Multifunctional special gas cabinet

Abstract

The utility model discloses a kind of multifunctional special gas cabinet, including cabinet, the one end of cabinet is equipped with first opening, sealing assembly for sealing is equipped on the cabinet, detachably be equipped with the positioning assembly for positioning special gas bottle in the cabinet, the upper end of cabinet is equipped with the control cabinet of installation control module, the one end of control cabinet is equipped with second opening, detachably be equipped with cover plate at second opening, third opening is equipped on the cover plate, the touch screen rotation is set in third opening. The utility model will control module design, effectively reduce the equipment longitudinal depth size, the rotation structure of touch screen is convenient for different height operator to adjust viewing angle, and compared with traditional parallel layout, this vertical space utilization mode can effectively save ground occupied area under the condition of keeping same storage capacity, and also can make staff easily operate touch screen.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a multifunctional special gas cabinet. Background Technology

[0002] Special gas supply and liquid supply equipment is used in production workshops of industries such as semiconductor chips and photovoltaic components. The number of devices stored in the gas room is related to the size of each individual device, and the devices must not interfere with the transportation of other equipment in the aisles.

[0003] Space utilization of equipment in the gas chamber is a critical issue. The width of the equipment affects the storage capacity, and the depth of the equipment affects the aisle width. To reduce the depth of the equipment, the height of the equipment can be increased. That is, the control module of the special gas cabinet is placed on top of the special gas cabinet, and the touch screen of the equipment can only be viewed and operated from the top. However, due to the height of the device, it is inconvenient to operate the touch screen. Utility Model Content

[0004] (I) Purpose of the utility model

[0005] To address the technical problems existing in the background art, this utility model proposes a multi-functional special gas cabinet. The device has a top-mounted control module design, which effectively reduces the depth of the equipment. The rotating structure of the touch screen makes it easy for operators of different heights to adjust the viewing angle. Compared with the traditional side-by-side layout, this vertical space utilization method can effectively save floor space while maintaining the same storage capacity, and also allows staff to easily operate the touch screen.

[0006] (II) Technical Solution

[0007] This utility model provides a multifunctional special gas cabinet, including a cabinet, one end of which has a first opening, a sealing component for sealing the cabinet, a positioning component for positioning the special gas cylinder detachably installed inside the cabinet, a control cabinet for installing a control module at the upper end of the cabinet, a second opening at one end of the control cabinet, a cover plate detachably installed at the second opening, a third opening on the cover plate, and a touch screen rotatably installed within the third opening.

[0008] Preferably, the touch screen is hinged to the inner wall of the third opening via a first hinge, and the touch screen and the third opening are detachably connected via a bouncer.

[0009] Preferably, the positioning component includes a limiting block located inside the cabinet. One end of the limiting block has a first notch for accommodating a special gas cylinder. The inner wall of the notch fits against the outer end of the special gas cylinder. The limiting block is detachably connected to the inner wall of the cabinet via a connecting unit.

[0010] Preferably, the connecting unit includes two mounting plates and a mounting block. Both mounting plates are vertically arranged and spaced apart within the cabinet, connected to its inner wall. A gap exists between the two mounting plates and the inner wall of the cabinet to accommodate the mounting block. One end of the mounting block slides against the inner wall of the cabinet, and the other end slides against the mounting plate. The end of the mounting block facing the mounting plate has a T-shaped groove, with multiple spring nuts spaced apart within the T-shaped groove. The mounting plate has multiple first through holes spaced apart, each containing a first bolt threaded to a spring nut. The bolt is movable to abut against the end of the mounting plate away from the mounting block. The limiting block has a second through hole communicating with the T-shaped groove. A second bolt is located within the second through hole, extending into one of the spring nuts and threadedly connected to it. The second bolt is movable to abut against the inner wall of the second through hole.

[0011] Preferably, the sealing assembly includes a cabinet door, which is hinged to the cabinet body. The cabinet door can be rotated to fit against the end of the cabinet body that has a first opening. The cabinet door and the cabinet body are detachably connected by a first lock.

[0012] Preferably, the cabinet door is provided with a fourth opening, and an observation window is rotatably provided in the fourth opening. The observation window is detachably connected to the cabinet door via a second lock body.

[0013] Preferably, a storage box is provided at the end of the cabinet door facing the cabinet body, and the storage box has an opening at the top.

[0014] Preferably, the cabinet door is provided with hooks at intervals on the upper and lower sides at one end facing the cabinet body for placing special gas cylinder caps.

[0015] Preferably, a barcode scanner is provided at the end of the cabinet door facing the cabinet body.

[0016] Preferably, it also includes a pedal, which is located inside the cabinet. The pedal is hinged to the bottom wall of the cabinet via a second hinge. The pedal can be rotated to abut against the bottom of the cabinet. The pedal has an L-shaped cross-section and can be rotated to fit against the special gas cylinder.

[0017] Compared with the prior art, the above-mentioned technical solution of this utility model has the following beneficial technical effects:

[0018] In this utility model: the solution effectively reduces the depth of the equipment by placing the control module on top, the rotating structure of the touch screen makes it easy for operators of different heights to adjust the viewing angle, and compared with the traditional side-by-side layout, this vertical space utilization method can effectively save the floor area occupied while maintaining the same storage capacity, and also allows the staff to easily operate the touch screen. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the internal structure of a multifunctional special gas cabinet proposed in this utility model.

[0020] Figure 2 This is a structural schematic diagram of a multifunctional special gas cabinet proposed in this utility model.

[0021] Figure 3 This is a schematic diagram of the structure of the cabinet in the multifunctional special gas cabinet proposed in this utility model.

[0022] Figure 4 This is a schematic diagram of the structure of a multifunctional special gas cabinet with the observation window open, as proposed in this utility model.

[0023] Reference numerals in the attached diagram: 1. Cabinet body; 2. Cabinet door; 3. Control cabinet; 4. Observation window; 5. Cover plate; 6. Touch screen; 7. First hinge; 8. Rebound device; 9. Limit block; 10. Mounting plate; 11. Mounting block; 12. Placement box; 13. Barcode scanner; 14. Hook; 15. Pedal; 16. Second hinge. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings. It should be understood that these descriptions are merely exemplary and not intended to limit the scope of this utility model. Furthermore, descriptions of well-known structures and technologies are omitted in the following description to avoid unnecessarily obscuring the concept of this utility model.

[0025] In the description of this utility model, it should be noted that the terms "upper," "lower," "inner," "outer," "front end," "rear end," "both ends," "one end," and "the other end," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used solely for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0026] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installed," "equipped with," and "connected," etc., should be interpreted broadly. For example, "connected" can be a fixed connection, such as welding, riveting, or bonding; it can also be a detachable connection, such as threaded connection, keyed connection, or pin connection; or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; or it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0027] like Figure 1-3 As shown, the present invention proposes a multifunctional special gas cabinet, including a cabinet 1, one end of which is provided with a first opening, a sealing component for sealing the cabinet 1, a positioning component for positioning the special gas cylinder that is detachably provided inside the cabinet 1, a control cabinet 3 for installing a control module at the upper end of the cabinet 1, a second opening at one end of the control cabinet 3, a cover plate 5 that is detachably provided at the second opening, a third opening on the cover plate 5, and a touch screen 6 that is rotatably disposed in the third opening.

[0028] The cabinet 1 is equipped with a T-junction on the connection line to the special gas cylinder. One T-junction connects to the special gas cylinder, another connects to the gas pipeline via a solenoid valve, and the third connects to the gas pipeline via a manual valve. In the event of a power outage and the solenoid valve is unusable, the connection between the special gas cylinder and the gas pipeline can be maintained via the manual valve, further facilitating the use of the device.

[0029] The touchscreen 6 and the control module are electrically connected, meaning that the control module can be effectively operated through the touchscreen 6. The connection circuit and signal transmission circuit between them are existing technologies, and therefore are not described in detail in the patent.

[0030] This solution effectively reduces the equipment's depth by placing the control module on top. The rotating structure of the touchscreen 6 allows operators of different heights to adjust their viewing angle. The separate design of the control cabinet 3 and the cabinet 1 facilitates modular maintenance. The detachable positioning components make it easy to adapt to different sizes of gas cylinders. The sealing components ensure storage safety. Compared to the traditional parallel layout, this vertical space utilization method can effectively save floor space while maintaining the same storage capacity, and it also allows staff to easily operate the touchscreen 6.

[0031] Furthermore, this application also proposes that the touch screen 6 is hinged to the inner wall of the third opening via the first hinge 7, and the touch screen 6 and the third opening are detachably connected via a bouncer 8.

[0032] Therefore, this technical solution achieves flexible rotation and convenient disassembly and assembly of the touch screen 6 through the combination structure of the hinge and the rebounder 8. The rebounder 8 can be selected as the beetle-type press-type cabinet door suction rebounder 8, which further facilitates operation and is existing technology, so it is not described in detail in this patent.

[0033] Furthermore, this application also proposes that the positioning component includes a limiting block 9, which is located inside the cabinet 1. One end of the limiting block 9 is provided with a first notch for accommodating a special gas cylinder. The inner wall of the notch fits against the outer end of the special gas cylinder. The limiting block 9 is detachably connected to the inner wall of the cabinet 1 through a connecting unit.

[0034] The connecting unit includes two mounting plates 10 and a mounting block 11. Both mounting plates 10 are vertically arranged and spaced apart within the cabinet 1 and connected to its inner wall. There is a gap between the two mounting plates 10 and the inner wall of the cabinet 1 to accommodate the mounting block 11. One end of the mounting block 11 is slidably fitted against the inner wall of the cabinet 1, and the other end of the mounting block 11 is slidably fitted against the mounting plate 10. The end of the mounting block 11 facing the mounting plate 10 is provided with a T-shaped groove, and multiple spring nuts are spaced apart in the T-shaped groove. Multiple first through holes are spaced apart on the mounting plate 10. A first bolt is provided in the first through hole and is threadedly connected to the spring nut. The bolt can be moved to abut against the end of the mounting plate 10 away from the mounting block 11. A second through hole is provided on the limiting block 9. The second through hole is connected to the T-shaped groove and is provided with a second bolt. The second bolt can extend into one of the spring nuts and is threadedly connected to one of the spring nuts. The second bolt can be moved to abut against the inner wall of the second through hole.

[0035] To address this, the technical solution utilizes an adjustable connection unit to achieve flexible positioning of the limiting block 9 within the cabinet 1. The sliding fit between the mounting block 11 and the mounting plate 10, along with the structural design of the T-shaped groove and spring nut, allows the position of the limiting block 9 to be adjusted according to the size of the special gas cylinder. This solution solves the problem of unstable positioning of the special gas cylinder. The multi-level adjustable connection structure enables rapid installation and disassembly of the limiting block 9 while ensuring positioning accuracy. The combination of the spring nut and bolt not only simplifies the installation process but also improves the reliability of the connection structure. Furthermore, the cabinet 1 can be equipped with a chain to further limit the special gas cylinder.

[0036] Furthermore, this application also proposes a sealing assembly including a cabinet door 2, which is hinged to the cabinet body 1. The cabinet door 2 can be rotated to fit against the end of the cabinet body 1 that has a first opening. The cabinet door 2 and the cabinet body 1 are detachably connected by a first lock body.

[0037] The hinge connection between the cabinet door 2 and the cabinet body 1 can be a hinge connection or a concealed hinge connection. The concealed hinge can keep the outer surface of the cabinet body 1 flat. The first lock body can be a mechanical lock or an electromagnetic lock. Mechanical locks include, but are not limited to, bolt locks, rotary locks or three-point locks. Electromagnetic locks can be remotely unlocked through a control module. This technical solution realizes the quick opening and closing of the cabinet body 1 through the hinged cabinet door 2 design, and the first lock body ensures operational safety.

[0038] Furthermore, this application also proposes that the cabinet door 2 is provided with a fourth opening, and an observation window 4 is provided in the fourth opening. The observation window 4 is detachably connected to the cabinet door 2 through a second lock body.

[0039] The fourth opening is located on the surface of cabinet door 2, and its size matches that of observation window 4 for easy installation and observation. Observation window 4 is made of transparent material, and the second lock body can be a mechanical lock or an electromagnetic lock, installed between the edge of observation window 4 and cabinet door 2 to achieve quick locking and unlocking. This technical solution solves the problem of limited viewing angle of traditional fixed observation window 4 by setting a rotatable observation window 4 on cabinet door 2.

[0040] Furthermore, this application also proposes that a storage box 12 is provided at the end of the cabinet door 2 facing the cabinet body 1, and the storage box 12 has an opening at the top.

[0041] This technical solution provides an open-type storage box 12 inside the cabinet door 2, allowing operators to directly access and store the equipment's files when opening the cabinet door 2.

[0042] Furthermore, this application also proposes that the cabinet door 2 is provided with hooks 14 at intervals on the upper and lower sides for placing special gas cylinder caps on the end facing the cabinet body 1. The hooks 14 can be made of stainless steel. This technical solution solves the problem of special gas cylinder caps being difficult to store and easily lost by setting hooks 14 on the inside of the cabinet door 2.

[0043] Furthermore, this application also proposes that a barcode scanner 13 is provided at the end of the cabinet door 2 facing the cabinet body 1.

[0044] This technical solution enables rapid collection and identification of information about special gas cylinders by installing a barcode scanner 13 on the inside of the cabinet door 2.

[0045] Furthermore, this application also proposes to provide a pedal 15 inside the cabinet 1. The pedal 15 is hinged to the bottom wall of the cabinet 1 via a second hinge 16. The pedal 15 can be rotated to abut against the bottom end of the cabinet 1. The cross-section of the pedal 15 is L-shaped. The pedal 15 can be rotated to fit against the special gas cylinder.

[0046] Therefore, this technical solution solves the problem that operators may easily touch the threshold when placing special gas cylinders in cabinet 1 by setting a rotatable L-shaped pedal 15. When it is necessary to prevent the special gas cylinders from being moved, the pedal 15 can be rotated to be used as a temporary step. After the operation is completed, it can be folded and stored without affecting the normal use of cabinet 1. The L-shaped design can ensure that the pedal 15 can have an inclined position after being moved, thus facilitating the installation of special gas cylinders.

[0047] It should be understood that the specific embodiments described above are merely illustrative or explanatory of the principles of this utility model and do not constitute a limitation thereof. Therefore, any modifications, equivalent substitutions, improvements, etc., made without departing from the spirit and scope of this utility model should be included within its protection scope. Furthermore, the appended claims are intended to cover all variations and modifications falling within the scope and boundaries of the appended claims, or equivalent forms of such scope and boundaries.

Claims

1. A multi-functional special gas cabinet, characterized in that, The device includes a cabinet and a touch screen. One end of the cabinet has a first opening. The cabinet is equipped with a sealing component for sealing it. The cabinet is detachably equipped with a positioning component for positioning the special gas cylinder. The upper end of the cabinet is equipped with a control cabinet for installing a control module. One end of the control cabinet has a second opening. A cover plate is detachably installed at the second opening. The cover plate has a third opening. The touch screen is rotatably installed in the third opening.

2. The multifunctional special gas cabinet according to claim 1, characterized in that, The touch screen is hinged to the inner wall of the third opening via a first hinge, and the touch screen and the third opening are detachably connected via a bouncer.

3. The multifunctional special gas cabinet according to claim 2, characterized in that, The positioning component includes a limiting block located inside the cabinet. One end of the limiting block has a first notch for accommodating a special gas cylinder. The inner wall of the notch fits against the outer end of the special gas cylinder. The limiting block is detachably connected to the inner wall of the cabinet via a connecting unit.

4. The multifunctional special gas cabinet according to claim 3, characterized in that, The connecting unit includes two mounting plates and a mounting block. Both mounting plates are vertically arranged and spaced apart within the cabinet, connected to its inner wall. A gap exists between the two mounting plates and the inner wall of the cabinet to accommodate the mounting block. One end of the mounting block slides against the inner wall of the cabinet, and the other end slides against the mounting plate. A T-shaped groove is provided at the end of the mounting block facing the mounting plate, with multiple spring nuts spaced apart within the T-shaped groove. Multiple first through holes are spaced apart on the mounting plate, each containing a first bolt threaded to a spring nut. The bolt can be moved to abut against the end of the mounting plate away from the mounting block. A second through hole is provided on the limiting block, communicating with the T-shaped groove. A second bolt is provided within the second through hole, extending into one of the spring nuts and threadedly connected to it. The second bolt can be moved to abut against the inner wall of the second through hole.

5. A multifunctional special gas cabinet according to claim 1, characterized in that, The sealing assembly includes a cabinet door, which is hinged to the cabinet body. The cabinet door can be rotated to fit against the end of the cabinet body that has a first opening. The cabinet door and the cabinet body are detachably connected by a first lock body.

6. A multifunctional special gas cabinet according to claim 5, characterized in that, The cabinet door is provided with a fourth opening, and an observation window is provided in the fourth opening. The observation window is detachably connected to the cabinet door through a second lock body.

7. A multifunctional special gas cabinet according to claim 6, characterized in that, The cabinet door has a storage box at one end facing the cabinet body, and the storage box has an opening at the top.

8. A multifunctional special gas cabinet according to claim 6, characterized in that, The cabinet door is provided with hooks at intervals on the upper and lower sides of the end facing the cabinet body for placing special gas cylinder caps.

9. A multifunctional special gas cabinet according to claim 6, characterized in that, A barcode scanner is installed at the end of the cabinet door facing the cabinet body.

10. A multifunctional special gas cabinet according to claim 1, characterized in that, It also includes a pedal, which is located inside the cabinet. The pedal is hinged to the bottom wall of the cabinet via a second hinge. The pedal can be rotated to abut against the bottom of the cabinet. The pedal has an L-shaped cross-section and can be rotated to fit against the special gas cylinder.

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