Multifunctional special gas cabinet body

By placing the control module on top of the special gas cabinet in the gas room of the semiconductor production workshop and flexibly positioning the gas cylinders, the problems of excessive equipment depth and inconvenient touch screen operation are solved, achieving efficient use of space and safe operation.

CN224498179UActive Publication Date: 2026-07-14CHINA ELECTRONICS SCIENCE & TECHNOLOGY ENVIRONMENTAL TECHNOLOGY (WUHAN) CO LTD
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Patent Information

Application Number
CN202521597148.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-07-30
Publication Date
2026-07-14
Estimated Expiration
2035-07-30

AI Technical Summary

Technical Problem

The existing layout of equipment in the gas chamber of the semiconductor manufacturing workshop results in excessively long equipment depth, affecting the width of the aisles, and making touch screen operation inconvenient and underutilizing space.

Method used

The control module is designed to be located on the top, and the touch screen is hinged to the inner wall of the opening and equipped with a rebound mechanism for easy viewing angle adjustment; the positioning component enables flexible positioning of the gas cylinder through an adjustable connecting unit; the sealing component improves safety and ease of operation through a hinged cabinet door and observation window.

Benefits of technology

It effectively reduces the depth of the equipment, saves floor space, improves the ease of operation of the touch screen, and enhances the space utilization efficiency and safety of the equipment.

✦ Generated by Eureka AI based on patent content.
Patent Text Reader

Abstract

The utility model discloses a multifunctional special gas cabinet body which comprises a cabinet body, one end of the cabinet body is provided with a first opening, the cabinet body is provided with a sealing assembly used for sealing the cabinet body, a positioning assembly used for positioning a special gas cylinder is detachably arranged in the cabinet body, the upper end of the cabinet body is provided with a control cabinet provided with a control module, and the control module is arranged on the cabinet body. A second opening is formed in one end of the control cabinet, a cover plate is detachably arranged at the second opening, a third opening is formed in the cover plate, and the touch screen is rotationally arranged in the third opening. According to the utility model, the control module is designed on the top, the depth size of the equipment is effectively reduced, the rotating structure of the touch screen is convenient for operators with different heights to adjust the visual angle, and compared with the traditional parallel layout, the vertical space utilization mode can effectively save the floor occupation area under the condition of keeping the same storage capacity, and the cost is reduced. And a worker can easily operate the touch screen.
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