Vacuum chamber cover hoisting and opening device

Abstract

This utility model discloses a vacuum chamber cover lifting and opening device, including a support frame with a fixing hole at the bottom. A reducer is fixed on the support frame, and a handwheel is connected to the input end of the reducer. Output shafts are connected to the output ends on both sides of the reducer, and a winch is fixed on the output shaft. A wire rope for pulling the cover is fixed on the winch. This utility model reduces the workload of operators, reduces equipment maintenance costs, improves the overall operating efficiency and safety of vacuum equipment, meets the requirements for efficient cover operation in vacuum equipment, and has a safety protection structure to eliminate the risk of cover falling, ensure the safety of operators and equipment, reduce the bending deformation and damage to the cover caused by external forces, and avoid damage to the equipment that could lead to production delays.

Description

Technical Field

[0001] This utility model relates to the field of machinery, and more specifically to a vacuum chamber cover lifting and opening device. Background Technology

[0002] Vacuum coating equipment is widely used in semiconductors, optics, materials, and other fields. Its chamber is typically sealed by a heavy metal cover, with a rubber sealing ring providing a vacuum seal. In the vacuum coating industry, opening and closing the vacuum chamber cover is a critical aspect of equipment inspection, maintenance, and replacement. Opening the cover usually involves manual handling or using a crane. This presents the following problems: 1. Manual Operation: For small and medium-sized covers, they are usually opened manually by 2-3 operators. This method is labor-intensive, inefficient, and prone to scratching the sealing surface or causing the cover to fall due to uneven force, posing a very high safety risk.

[0003] 2. Mobile gantry crane: This is the most common method, but it has significant drawbacks. Alignment of the cover plate is difficult during use, requiring multiple workers to repeatedly adjust it during closure, resulting in low efficiency and safety hazards. When opening the cover plate, vertical lifting cannot be guaranteed, and the swinging of the wire rope can easily cause the cover plate to collide with the cavity, damaging the sealing ring. Furthermore, this method is limited by the equipment installation site.

[0004] 3. The existing hoisting device has a complex structure and uses multiple idler wheel combinations. When the cover plate is opened and closed, the idler wheels are subjected to large forces, resulting in severe wear and frequent replacement. Moreover, its complex structure makes replacement cumbersome and the subsequent maintenance costs are high. Utility Model Content

[0005] To address the aforementioned technical problems, this utility model discloses a vacuum chamber cover lifting and opening device. This utility model reduces the workload of operators, decreases equipment maintenance costs, improves the overall operating efficiency and safety of vacuum equipment, meets the requirements for efficient cover operation in vacuum equipment, and incorporates a safety protection structure to eliminate the risk of cover falling, ensuring the safety of operators and equipment. It also reduces the risk of cover bending, deformation, and damage caused by external forces, preventing equipment damage and production delays.

[0006] To achieve the above objectives, the technical solution of this utility model is as follows: A vacuum chamber cover lifting and opening device includes a support frame, a fixing hole formed at the lower part of the support frame, a reducer fixed on the support frame, a handwheel connected to the input end of the reducer, output shafts connected to the output ends on both sides of the reducer, a winch fixed on the output shaft, and a wire rope for pulling the cover fixed on the winch. Safety rope fixing seats are installed on both sides of the upper part of the support frame; In a further improvement, the safety rope fixing seat includes a U-shaped component, with limiting nuts fixed in the middle of both sides of the U-shaped component. The U-shaped component passes through the first clamping plate and the second clamping plate in sequence to connect and fix the nuts. The support frame is fixed between the first clamping plate and the second clamping plate.

[0007] A further improvement is that the reducer is a worm gear reducer.

[0008] As a further improvement, the support frame is triangular.

[0009] In a further improvement, the support frame includes a U-shaped base formed by welding steel profiles and a rectangular front frame formed by welding steel profiles; the front end of the U-shaped base is welded and fixed to the bottom end of the rectangular front frame; the rear ends of the upper two sides of the rectangular front frame are welded and fixed to the rear ends of the U-shaped base by inclined steel profiles.

[0010] In a further improvement, the rear end of the U-shaped base has a vertically downward fixing hole, and fixing plates are welded to both sides of the bottom of the rectangular front frame, with fixing holes also formed on the fixing plates.

[0011] In a further improvement, one end of the cover plate is hinged to the vacuum cavity, and the other end is a free end, with the steel wire rope connected and fixed to the lifting ring on the free end.

[0012] The beneficial effects that this utility model can achieve are: 1. Safer and more reliable: Mechanized operation avoids direct human intervention, eliminating the risk of personal injury. Safety ropes and a worm gear self-locking mechanism ensure stable opening and closing of the cover plate, enhancing the inherent safety level of the equipment.

[0013] 2. Reduced component wear: Smooth lifting reduces wear on the sealing ring and smooth surface of the cover plate during opening and closing, extending the service life of the sealing ring and cover plate.

[0014] 3. Greater convenience: Traditional cover opening methods are relatively cumbersome. Now, when it is necessary to open, the cover can be opened and closed simply by operating the handwheel, improving production efficiency. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the three-dimensional structure of the present invention. Figure 1 (No handwheel or wire rope).

[0016] Figure 2 This is a schematic diagram of the three-dimensional structure of the present invention. Figure 2 (It has a handwheel and a steel wire rope).

[0017] Figure 3 This is a schematic diagram of the structure of this utility model.

[0018] The components include: support frame 1, U-shaped base 101, rectangular front frame 102, inclined steel 103, fixing plate 104, fixing hole 2, worm gear reducer 3, handwheel 4, output shaft 5, winch 6, safety rope fixing seat 7, U-shaped part 701, limit nut 702, first clamping plate 703, second clamping plate 704, fixing nut 705, and wire rope 8. Detailed Implementation

[0019] like Figure 1-3 The illustrated vacuum chamber cover lifting and opening device includes a support frame 1, which is generally a right-angled triangle. Specifically, the support frame 1 includes a U-shaped base 101 formed by welding steel profiles and a rectangular front frame 102 formed by welding steel profiles. The front end of the U-shaped base 101 is welded and fixed to the bottom end of the rectangular front frame 102. The rear ends of the upper two sides of the rectangular front frame 102 are welded and fixed to the rear ends of the U-shaped base 101 via inclined steel profiles 103. A vertically downward fixing hole 2 is formed at the rear end of the U-shaped base 101. Fixing plates 104 are welded to the bottom two sides of the rectangular front frame 102, and fixing holes 2 are also formed on the fixing plates 104. One end of the cover is hinged to the vacuum chamber, and the other end is a free end, with a steel wire rope connected and fixed to a lifting ring on the free end.

[0020] The support frame 1 has a tensile safety factor of 1.8, and its surface is sprayed with metallic paint to prevent corrosion and rust, thereby improving cleanliness.

[0021] A worm gear reducer 3 is fixed on the support frame 1. A handwheel 4 is connected to the input end of the worm gear reducer 3. Output shafts 5 are connected to the output ends on both sides of the reducer. A winch 6 is fixed on the output shaft 5, and a wire rope 8 for pulling the cover plate is fixed on the winch 6. The output shaft 5 is made of 304 stainless steel.

[0022] In use, first fix it to the hinge end of the cover plate through the fixing hole 2, then rotate the handwheel 4 clockwise, and the winch 6 will rotate, gradually retracting the wire rope, thereby pulling the cover plate open. To put the cover plate back on, simply rotate the handwheel 4 counterclockwise.

[0023] To prevent the cover from slipping, safety rope fixing seats 7 are installed on both sides of the upper part of the support frame 1. One end of the safety rope is fixed to the fixing seat, and the other end is fixed to the cover lifting ring using a movable lock. It is fixed when the cover is open and removed when the cover is closed.

[0024] To facilitate installation and disassembly, the safety rope fixing seat 7 includes a U-shaped part 701. Limiting nuts 702 are fixed in the middle of both sides of the U-shaped part 701. The U-shaped part 701 passes through the first clamping plate 703 and the second clamping plate 704 in sequence and is connected to the fixing nut 705. The support frame 1 is fixed between the first clamping plate 703 and the second clamping plate 704.

[0025] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this utility model without departing from the spirit and scope of the technical solutions of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A device for lifting and opening a vacuum chamber cover, characterized in that, Includes a support frame (1), the lower part of which has a fixing hole (2), a speed reducer is fixed on the support frame (1), a handwheel (4) is connected to the input end of the speed reducer, and output shafts (5) are connected to the output ends on both sides of the speed reducer respectively. A winch (6) is fixed on the output shaft (5), and a wire rope (8) for pulling the cover plate is fixed on the winch (6). Safety rope fixing seats (7) are installed on both sides of the upper part of the support frame (1). The safety rope fixing seat (7) includes a U-shaped part (701), with limit nuts (702) fixed in the middle of both sides of the U-shaped part (701). The U-shaped part (701) passes through the first clamping plate (703) and the second clamping plate (704) in sequence to connect and fix the nuts (705). The support frame (1) is fixed between the first clamping plate (703) and the second clamping plate (704).

2. The vacuum chamber cover lifting and opening device according to claim 1, characterized in that, The speed reducer is a worm gear reducer (3).

3. The vacuum chamber cover lifting and opening device according to claim 1, characterized in that, The support frame (1) is triangular.

4. The vacuum chamber cover lifting and opening device according to claim 1, characterized in that, The support frame (1) includes a U-shaped base (101) formed by welding steel profiles and a rectangular front frame (102) formed by welding steel profiles; the front end of the U-shaped base (101) is welded and fixed to the bottom end of the rectangular front frame (102); the rear ends of the upper two sides of the rectangular front frame (102) are welded and fixed to the rear ends of the U-shaped base (101) by inclined steel profiles (103).

5. The vacuum chamber cover lifting and opening device according to claim 4, characterized in that, The U-shaped base (101) has a vertically downward fixing hole (2) at its rear end, and a fixing plate (104) is welded to both sides of the bottom of the rectangular front frame (102), and a fixing hole (2) is also formed on the fixing plate (104).

6. The vacuum chamber cover lifting and opening device according to claim 1, characterized in that, One end of the cover plate is hinged to the vacuum chamber, and the other end is a free end. The steel wire rope is connected and fixed to the lifting ring on the free end.

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