Clamping device for machining of a metal planar target material

Abstract

The present disclosure relates to the technical field of target material processing, and one embodiment of the present disclosure provides a clamping device for machining a metal flat target material, which comprises a disc holder and a plurality of fixing legs, the fixing legs are arranged on the bottom of the disc holder, a supporting disc is fixed on the surface of the disc holder, a clamping assembly is arranged on the disc holder and the supporting disc, a bottom supporting assembly is arranged on the disc holder, the clamping assembly comprises a ring-shaped seat, a rotating disc is slidably connected to the ring-shaped seat, an external gear is arranged on the bottom of the rotating disc, a driving gear driven by electricity is arranged on the upper surface of the disc holder, the driving gear is engaged with the external gear, a plurality of pushing grooves are formed in the surface of the rotating disc, a plurality of clamping seats are arranged on the supporting disc, a plurality of long holes are formed in the surface of the supporting disc, the positions and the number of the long holes are matched with those of the pushing grooves, a guide rod is arranged in each long hole, and each clamping seat is slidably sleeved on the guide rod. Through the above technical solution, the technical problem that quick positioning and clamping cannot be realized in the prior art is solved.

Description

Technical Field

[0001] The embodiments disclosed herein relate to the technical field of target material processing, and more specifically, to a clamping device for machining metal planar targets. Background Technology

[0002] In high-end manufacturing fields such as semiconductors, photovoltaics, and film coating, planar metal targets are the core materials for thin film deposition, and their processing precision directly affects the coating quality and device performance. The machining process of planar metal targets requires the blank to be fixed by a clamping device to complete precision machining such as milling and grinding. The stability and efficiency of the clamping are key to ensuring production progress and product quality.

[0003] Currently, the clamping devices used in machining metal planar targets have significant drawbacks, with the inability to achieve rapid positioning and clamping being a prominent issue. Traditional clamping methods often employ bolt fastening or universal fixtures, requiring repeated adjustments to the target's position to calibrate the reference datum. This process is cumbersome, with each clamping operation taking several minutes. For large, thin targets, manual positioning is prone to uneven force, leading to micro-deformation of the target and affecting the flatness and parallelism of subsequent machining.

[0004] In mass production, this inefficient clamping method leads to excessive downtime, significantly reducing the utilization rate of machining centers. Simultaneously, instability in positioning accuracy causes dimensional deviations in the target material, increasing the scrap rate. For high-value rare metal targets, the material waste and delays caused by time-consuming and inaccurate clamping significantly increase production costs. Therefore, developing a machining device for metal planar targets that enables rapid positioning and clamping has become an urgent need to improve the efficiency and quality of precision machining. Utility Model Content

[0005] To overcome the above-mentioned defects, the embodiments of this disclosure provide a clamping device for machining metal planar targets, which solves the technical problem that rapid positioning and clamping cannot be achieved in the prior art.

[0006] According to one aspect, at least one embodiment of the present disclosure provides a clamping device for machining a metal planar target, comprising: The tray frame and several fixed legs are provided at the bottom of the tray frame; A support plate and a clamping assembly, wherein the support plate is fixed to the surface of the plate frame, and the clamping assembly is disposed on the plate frame and the support plate; A bottom support assembly is disposed on the tray frame; The clamping assembly includes an annular seat, on which a rotating disk is slidably connected. An external gear is arranged around the bottom of the rotating disk. A drive gear driven by electricity is arranged on the upper surface of the disk frame. The drive gear meshes with the external gear. Several pushing grooves are opened on the surface of the rotating disk. Several clamping seats are arranged on the support disk.

[0007] As a further technical solution, the surface of the support plate is provided with a number of elongated holes, the position and number of which match the pushing groove. A guide rod is provided in the elongated hole, and the clamping seat is slidably connected to the guide rod.

[0008] As a further technical solution, the bottom of the clamping seat is provided with a protrusion, the protrusion slides and fits in the push groove, the guide rod is fitted with a return spring, and a number of outer frames are provided around the outer surface of the rotating disk. The outer frames are connected to fastening bolts by threaded engagement, and one end of the fastening bolt is supported on the outer surface of the annular seat.

[0009] As a further technical solution, the bottom support assembly includes several telescopic rods, the upper end of which is connected to a support plate. Both the support plate and the rotating plate have circular openings on their surfaces, and the plate frame has a transmission groove inside its surface.

[0010] As a further technical solution, an internally threaded block is rotatably connected inside the transmission groove. The lower end of the internally threaded block is located at the bottom of the disc frame. A connecting stud is provided at the center of the bottom surface of the support plate. The connecting stud and the internally threaded block are connected by a threaded engagement.

[0011] As a further technical solution, the clamping seat has an L-shaped cross-section and an arc-shaped transition structure on its side surface.

[0012] As a further technical solution, a waste collection cover is provided around the outer surface of the support plate.

[0013] As a further technical solution, one end of the fastening bolt is fixedly connected to an anti-slip block.

[0014] The beneficial effects of the embodiments disclosed herein are as follows: In this disclosure, the clamping assembly solves the problem of slow target clamping and positioning through a synchronous drive design. The drive gear and external gear transmission ensure smooth rotation of the rotating disk, and the engagement of the push groove and protrusion drives the clamping seat to retract synchronously along the guide rod, ensuring concentric positioning of the target. The L-shaped structure combines lateral clamping and bottom support, and the arc transition avoids damage to the target. A return spring enables automatic reset, and the fastening bolts enhance locking stability, significantly shortening clamping time, adapting to mass production, ensuring uniform force on the target during processing, and reducing the risk of micro-deformation. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this disclosure, the accompanying drawings used in the description of the embodiments of this disclosure will be briefly introduced below. Obviously, the drawings described below are merely some exemplary embodiments of this disclosure. For those skilled in the art, other drawings can be obtained based on the content of the exemplary embodiments of this disclosure and these drawings without any creative effort.

[0016] Figure 1 This is a schematic diagram of a structure in one embodiment of the present disclosure; Figure 2 This is an isometric drawing of the present disclosure; Figure 3 This is an isometric sectional view of the present disclosure; Figure 4 This is another isometric sectional view from which this disclosure is presented; Figure 5 This is yet another isometric sectional view from which this disclosure is made; In the diagram: 1. Disc frame; 2. Fixed leg; 3. Support disc; 4. Clamping assembly; 4-1. Ring seat; 4-2. Rotating disc; 4-3. External gear; 4-4. Drive gear; 4-5. Push groove; 4-6. Clamping seat; 4-7. Elongated hole; 4-8. Guide rod; 4-9. Protrusion; 4-10. Return spring; 4-11. Outer frame; 4-12. Fastening bolt; 5. Bottom support assembly; 5-1. Telescopic rod; 5-2. Support plate; 5-3. Circular opening; 5-4. Transmission groove; 5-5. Internal threaded block; 5-6. Connecting stud; 6. Waste collection cover; 7. Anti-slip block. Detailed Implementation

[0017] The present disclosure will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present disclosure and are not intended to limit the scope of the disclosure.

[0018] To keep the drawings concise, each drawing only schematically shows the parts relevant to the disclosure; these do not represent the actual structure of the product. Furthermore, for ease of understanding, in some drawings, only one of components with the same structure or function is schematically shown, or only one is labeled. In this document, "one" not only means "only one," but can also mean "more than one," and "several" includes "two" and "more than two."

[0019] In this document, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linkage" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this disclosure based on the specific circumstances.

[0020] In this disclosure, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0021] In the description of this embodiment, terms such as "upper," "lower," "left," and "right" are based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of description and simplification of operation, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this disclosure.

[0022] Furthermore, in the description of this application, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0023] like Figures 1-5 As shown, a clamping device for machining a metal planar target material according to an embodiment of the present disclosure is illustrated, comprising: The tray frame 1 and several fixed legs 2 are all located at the bottom of the tray frame 1; The support plate 3 and the clamping assembly 4 are provided. The support plate 3 is fixed on the surface of the plate frame 1, and the clamping assembly 4 is provided on the plate frame 1 and the support plate 3. Bottom support assembly 5, which is disposed on the tray frame 1; The clamping assembly 4 includes an annular seat 4-1, on which a rotating disk 4-2 is slidably connected. An external gear 4-3 is arranged around the bottom of the rotating disk 4-2. A drive gear 4-4, electrically driven, is arranged on the upper surface of the disk frame 1, meshing with the external gear 4-3. The rotating disk 4-2 has several pushing grooves 4-5 on its surface. The support disk 3 has several clamping seats 4-6 and several elongated holes 4-7 on its surface. The positions and number of the elongated holes 4-7 and the pushing grooves 4-5 are specified. Matching the guide rod 4-8, a clamping seat 4-6 is slidably connected to the guide rod 4-8. A protrusion 4-9 is provided at the bottom of the clamping seat 4-6. The protrusion 4-9 slides in the push groove 4-5. A return spring 4-10 is fitted on each guide rod 4-8. Several outer frames 4-11 are arranged around the outer surface of the rotating disk 4-2. Fastening bolts 4-12 are threadedly connected to the outer frames 4-11. One end of the fastening bolt 4-12 is supported on the outer surface of the annular seat 4-1.

[0024] In some examples, in order to achieve rapid concentric clamping of the target, a clamping assembly 4 is designed. This assembly includes an annular seat 4-1 on the surface of the disc frame 1, which is welded and fixed to the disc frame 1. The rotating disc 4-2 is slidably connected to the annular seat 4-1 through a sliding sleeve and can rotate around the axis of the annular seat 4-1. The external gear 4-3 at the bottom of the rotating disc 4-2 meshes with the drive gear 4-4 on the upper surface of the disc frame 1. The drive gear 4-4 is driven to rotate by a motor, providing rotational power for the rotating disc 4-2. The pushing grooves 4-5 on the surface of the rotating disk 4-2 are evenly distributed radially, and the grooves are arc-shaped. The number of clamping seats 4-6 on the support disk 3 is the same as that of the pushing grooves 4-5, and they are radially distributed. The elongated holes 4-7 on the surface of the support disk 3 correspond to the pushing grooves 4-5. The guide rods 4-8 inside the holes are fixed at both ends to the inner walls of the elongated holes 4-7. The clamping seats 4-6 are slidably fitted onto the guide rods 4-8 through sliding sleeves. The protrusions 4-9 at the bottom are adapted to the pushing grooves 4-5 and slide against the grooves to form a cam transmission structure. One end of the return spring 4-10 on the guide rod 4-8 abuts against the side of the clamping seat 4-6, and the other end abuts against the inner wall of the elongated hole 4-7, always applying an outward elastic force to the clamping seat 4-6. The outer frame 4-11 on the outer surface of the rotating disk 4-2 is evenly distributed circumferentially. The fastening bolts 4-12 are screwed into the outer frame 4-11 through threads, and one end is supported on the outside of the annular seat 4-1, which can lock the position of the rotating disk 4-2.

[0025] During operation, the motor drives the drive gear 4-4 to rotate, which in turn drives the rotating disk 4-2 to rotate around the annular seat 4-1 via the external gear 4-3. This pushes the arc-shaped surface of the groove 4-5 to press against the protrusion 4-9 at the bottom of the clamping seat 4-6, overcoming the elastic force of the return spring 4-10 and pushing the clamping seat 4-6 to move towards the center along the guide rod 4-8. Multiple clamping seats 4-6 simultaneously close, clamping the target material in the center position. After clamping, tighten the fastening bolt 4-12 to support it on the annular seat 4-1 and lock the position of the rotating disk 4-2 to prevent loosening. When releasing, rotate the rotating disk 4-2 in the opposite direction, and the return spring 4-10 pushes the clamping seat 4-6 to return to its original position, releasing the clamping. The transmission between drive gear 4-4 and external gear 4-3 ensures the smooth rotation of rotating disk 4-2 and synchronizes the movement of each clamping seat 4-6. The engagement of push groove 4-5 and protrusion 4-9 converts the rotational motion into radial movement of clamping seat 4-6, achieving uniform force transmission. Guide rod 4-8 provides movement guidance for clamping seat 4-6, preventing offset and ensuring clamping concentricity. Return spring 4-10 enables automatic reset of clamping seat 4-6, simplifying operation. Locking bolt 4-12 enhances clamping stability and prevents target material from loosening during processing. This assembly, through synchronous drive and concentric clamping design, achieves rapid and stable clamping of the target material.

[0026] like Figures 1-5 As shown in the figure, the bottom support assembly 5 in this embodiment includes several telescopic rods 5-1. The upper end of each telescopic rod 5-1 is connected to a support plate 5-2. The surfaces of the support plate 3 and the rotating plate 4-2 are both provided with circular openings 5-3. The surface of the plate frame 1 is provided with a transmission groove 5-4. An internally threaded block 5-5 is rotatably fitted inside the transmission groove 5-4. The lower end of the internally threaded block 5-5 is located at the bottom of the plate frame 1. A connecting stud 5-6 is provided at the center of the bottom surface of the support plate 5-2. The connecting stud 5-6 and the internally threaded block 5-5 are connected by a threaded engagement.

[0027] In some examples, to achieve adjustable support for the bottom of the target, a transmission groove 5-4 is designed on the surface of the disc frame 1, which is axially opened. An internally threaded block 5-5 is rotatably fitted into the transmission groove 5-4 via a bearing, with its lower end extending to the bottom of the disc frame 1. It can be rotated using a tool. The connecting stud 5-6 at the center of the bottom surface of the support plate 5-2 is threadedly engaged with the internally threaded block 5-5 to form a screw drive structure. Several telescopic rods 5-1 are evenly distributed between the bottom of the support plate 5-2 and the surface of the disc frame 1, with one end hinged to the support plate 5-2 and the other end hinged to the disc frame 1, serving as auxiliary support. The circular openings 5-3 on the surfaces of the support disc 3 and the rotating disc 4-2 correspond to the positions of the support plate 5-2, facilitating the passage of the support plate 5-2 and supporting the target.

[0028] During operation, depending on the target thickness, the internal threaded block 5-5 is rotated at the bottom of the tray 1. The connecting stud 5-6, through threaded engagement, causes the support plate 5-2 to rise or fall, adjusting the support height. The telescopic rod 5-1 extends and retracts synchronously with the support plate 5-2, maintaining its horizontal stability. After adjustment to the appropriate height, the top surface of the support plate 5-2 contacts the bottom of the target, providing bottom support and working with the clamping assembly 4 to secure the target, facilitating subsequent polishing. The threaded transmission between the internal threaded block 5-5 and the connecting stud 5-6 allows for precise and controllable height adjustment, meeting the support requirements of targets of different thicknesses. The auxiliary support of the telescopic rod 5-1 enhances the structural stability of the support plate 5-2, preventing it from swaying under stress during target processing and ensuring support rigidity. The circular opening 5-3 provides space for the lifting and lowering of the support plate 5-2, ensuring precise contact with the target.

[0029] This component, with its height-adjustable support structure, can adapt to target materials of different thicknesses, providing stable bottom support for machining and improving polishing accuracy.

[0030] For example, such as Figure 5 As shown, the clamping seat 4-6 has an L-shaped cross-section and an arc-shaped transition structure on its side surface.

[0031] In some examples, the clamping seat 4-6 has an L-shaped cross-section with a curved transition structure on its side surface. The L-shaped structure allows the clamping seat 4-6 to clamp the target material from the side while providing bottom support, enhancing clamping stability. The curved transition avoids scratches on the target material from right angles, while reducing stress concentration and preventing damage to the target material's edges during clamping. This design ensures a closer contact between the clamping seat 4-6 and the target material, distributing clamping force and ensuring the target material is less prone to deformation during processing, thus improving clamping reliability.

[0032] For example, such as Figure 1 As shown, a waste collection cover 6 is provided around the outer surface of the support plate 3.

[0033] In some examples, a waste collection hood 6 surrounding the outer surface of the support plate 3 can collect debris and waste generated during processing. The collection hood, positioned around the support plate 3, catches waste falling from the target surface, preventing it from scattering onto the equipment rack or the ground, facilitating centralized cleaning. Simultaneously, it prevents waste from entering the device and affecting component operation, maintains a clean processing environment, reduces subsequent cleaning workload, and improves processing efficiency.

[0034] For example, such as Figure 5 As shown, one end of the fastening bolt 4-12 is fixedly connected to an anti-slip block 7.

[0035] In some examples, the anti-slip block 7 at one end of the fastening bolt 4-12 enhances the friction with the annular seat 4-1. The anti-slip block 7, made of rubber, increases contact resistance when the fastening bolt 4-12 is supported on the annular seat 4-1, preventing loosening and ensuring the rotating disk 4-2 is securely locked. This structure avoids clamping failure due to machining vibration, ensuring the target material remains stable during machining and improving machining safety.

[0036] In practical use: Place the metal flat target on the support plate 5-2, rotate the internal threaded block 5-5 to adjust the height of the support plate 5-2 via the connecting stud 5-6, and use the telescopic rod 5-1 to assist in maintaining horizontality. The drive gear 4-4 drives the external gear 4-3 to rotate the rotating disk 4-2, pushing the groove 4-5 to press the bottom protrusion 4-9 of the clamping seat 4-6, causing it to move towards the center along the guide rod 4-8. The L-shaped clamping seat 4-6 clamps the target material synchronously from all sides, and the return spring 4-10 is compressed. After clamping, tighten the fastening bolt 4-12, and the anti-slip block 7 abuts against the annular seat 4-1 to lock the rotating disk 4-2. Waste generated during processing is collected by the collection cover. When releasing, rotate the rotating disk 4-2 in the opposite direction, and the return spring 4-10 pushes the clamping seat 4-6 to return to its original position, completing the material removal process. The entire process achieves rapid positioning and stable clamping.

[0037] It should be noted that the above embodiments are only used to illustrate the technical solutions of this disclosure and are not intended to limit it. Although this disclosure has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this disclosure without departing from the spirit and scope of the technical solutions of this disclosure, and all such modifications and substitutions should be covered within the scope of the claims of this disclosure.

Claims

1. A clamping device for machining metal planar targets, characterized in that, include: The tray frame (1) and several fixed legs (2) are provided at the bottom of the tray frame (1); The support plate (3) and clamping assembly (4) are provided on the plate frame (1) and the support plate (3) are fixed on the surface of the plate frame (1). Bottom support assembly (5), the bottom support assembly (5) is disposed on the tray frame (1); The clamping assembly (4) includes an annular seat (4-1), on which a rotating disk (4-2) is slidably connected. An external gear (4-3) is arranged around the bottom of the rotating disk (4-2). A drive gear (4-4) driven by electricity is arranged on the upper surface of the disk frame (1). The drive gear (4-4) meshes with the external gear (4-3). A plurality of push grooves (4-5) are opened on the surface of the rotating disk (4-2). A plurality of clamping seats (4-6) are arranged on the support disk (3).

2. The clamping device for machining a metal planar target according to claim 1, characterized in that, The support plate (3) has several elongated holes (4-7) on its surface. The elongated holes (4-7) are matched with the push groove (4-5) in terms of position and number. A guide rod (4-8) is provided in the elongated hole (4-7). The clamping seat (4-6) is slidably connected to the guide rod (4-8).

3. The clamping device for machining a metal planar target according to claim 2, characterized in that, The clamping seat (4-6) has a protrusion (4-9) at its bottom, which slides in the push groove (4-5). Each guide rod (4-8) is fitted with a return spring (4-10). The outer surface of the rotating disk (4-2) is provided with several outer frames (4-11). Each outer frame (4-11) is connected to a fastening bolt (4-12) by a threaded connection. One end of the fastening bolt (4-12) is supported on the outer surface of the annular seat (4-1).

4. The clamping device for machining a metal planar target according to claim 1, characterized in that, The bottom support assembly (5) includes several telescopic rods (5-1), the upper end of the telescopic rods (5-1) is connected to a support plate (5-2), the support plate (3) and the rotating plate (4-2) are both provided with circular openings (5-3), and the plate frame (1) is provided with a transmission groove (5-4) inside the surface.

5. The clamping device for machining a metal planar target according to claim 4, characterized in that, The transmission groove (5-4) is rotatably fitted with an internal threaded block (5-5). The lower end of the internal threaded block (5-5) is located at the bottom of the disc frame (1). A connecting stud (5-6) is provided at the center of the bottom surface of the support plate (5-2). The connecting stud (5-6) and the internal threaded block (5-5) are connected by a threaded engagement.

6. The clamping device for machining a metal planar target according to claim 1, characterized in that, The clamping seat (4-6) has an L-shaped cross-section and an arc-shaped transition structure on its side surface.

7. The clamping device for machining a metal planar target according to claim 1, characterized in that, Waste collection hood (6) is provided around the outer surface of the support plate (3).

8. The clamping device for machining a metal planar target according to claim 3, characterized in that, One end of the fastening bolt (4-12) is fixedly connected to an anti-slip block (7).

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