A dual stage LDI laser direct imaging exposure machine
CN224696236UActive Publication Date: 2026-08-28DONGGUAN HECHUAN MASCH EQUIP TECH CO LTD
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Patent Information
- Application Number
- CN202522352326.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-06
- Publication Date
- 2026-08-28
- Estimated Expiration
- 2035-11-06
AI Technical Summary
Technical Problem
[0002]曝光机是用特定波长的光源将菲林或掩膜板上的图像信息转移到涂有感光物质的表面上的设备，LDI曝光机因为在曝光过程中不需要使用菲林或掩膜板，相较于传统的使用菲林或掩膜板的曝光机，生产更加灵活、高效，且生产成本更低，目前LDI曝光机已经在普通精度PCB生产领域实现了对传统曝光机的替代，但是在高精度PCB、高阶IC载板领域，LDI曝光机对传统曝光机的替代还比较低，现有的LDI曝光机通常为单台面，在进行生产时只能单个进行曝光，每次曝光完成后，都需要花费一定时间进行上板、下板以及基板的预定位等操作，这段时间内曝光系统处于闲置状态，导致设备利用率较低，随着电子产业的迅猛发展，单个台面加工生产效率无法进一步得到提升，基于此，设计一款便于双台面进行曝光的曝光机便于更好的提高设备的生产效率
Benefits of technology
（1）在安装腔室的内部并排安装有两个底座，底座的内部安装输送模组，输送模组由安装在底座内部两侧的纵向滑轨组成，底座上方设有吸附平台用于放置需要曝光加工的基板，吸附平台通过底部两侧安装的第一滑块滑动在纵向滑轨表面，使得两个吸附平台可以交替对基板进行输送至曝光工位，代替单台面曝光，提高了设备利用率，从而提高生产效率，满足生产需求；
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Figure CN224696236U_ABST
Abstract
The utility model provides a kind of double table surface LDI laser direct imaging exposure machine, belong to exposure machine equipment field, including pedestal, double table surface conveying component and exposure component;The top of pedestal is fixedly installed with portal frame on both sides;The utility model: two bases are installed side by side in the inside of installation chamber, conveying module is installed in the inside of base, conveying module is made of longitudinal slide rail installed in the inside of base two sides, suction platform is equipped for placing the substrate needing exposure processing above base, suction platform is slid on longitudinal slide rail surface by first sliding block installed on the bottom two sides, so that two suction platforms can be alternately transported to exposure station to substrate, instead of single table surface exposure, improve equipment utilization, to improve production efficiency, satisfy production demand.
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