A method for compensating for exposure pattern position accuracy in a digital direct imaging device

Abstract

The application discloses a kind of digital direct imaging device exposure pattern position precision compensation method, it is related to digital imaging technical field, after the technical problem that the exposure pattern position precision each area is not consistent in prior art processing is solved;The present application does not need to help complex tool, exposure substrate is the material commonly used to generate laser direct imaging device, calibration condition and process are very simple;The alignment camera of the digital direct imaging device of the present application is a calibrated coordinate system itself, and the accurate position of the mark pattern in the exposed pattern can be identified, and each position of the exposed pattern can be compensated using different compensation parameters;The present application has low compensation cost, and does not need additional cost to improve and optimize hardware system by digital compensation method for CAM pattern;Moreover, compensation is free and flexible, and the CAM pattern is digitally compensated, and similar transformation, affine transformation and perspective transformation can be used flexibly according to specific requirements for each subdivided area.

Description

Technical Field

[0001] This invention belongs to the field of digital imaging and relates to positional accuracy compensation technology for exposure patterns in digital direct imaging devices, specifically a method for positional accuracy compensation of exposure patterns in digital direct imaging devices. Background Technology

[0002] The exposure process of a digital direct imaging device is as follows: CAM data is loaded, positional and dimensional information of the CAM data is acquired, and the mapping relationship between the CAM coordinate system and the exposure coordinate system is calculated based on the exposure area definition of the digital direct imaging device's exposure coordinate system or based on information such as the substrate position, rotation, scaling, and misalignment captured by the positioning camera. The exposure motion system calculates motion information and projects the corresponding CAM data graphic according to the mapping relationship between the CAM coordinate system and the exposure coordinate system. Due to limitations imposed by hardware or environmental conditions, such as positioning errors of the exposure motion system, machining errors of structural components, optical path characteristic errors, and some fixed systematic errors, the positional accuracy of the graphic exposed on the substrate will inevitably have errors. As a precision instrument, improving accuracy has always been one of the most important and difficult problems to address.

[0003] Current approaches aim to reduce cumulative errors in the final equipment by optimizing the errors of various modules through improvements in hardware specifications and assembly control. This includes using higher-specification motion controllers to enhance the positioning accuracy of the motion system, employing higher-specification optical systems to optimize optical path errors, and using higher-cost machined parts to mitigate structural machining errors. However, this requires a series of calibration, debugging, and compensation methods to optimize the final exposure imaging effect. These existing methods increase equipment cost and debugging complexity, and they still cannot resolve the issue of inconsistent positional accuracy across different areas of the exposed pattern. Summary of the Invention

[0004] The present invention aims to at least solve one of the technical problems existing in the prior art; to this end, the present invention proposes a method for compensating the positional accuracy of exposure patterns in digital direct imaging devices, which is used to solve the technical problem that the positional accuracy of exposure patterns is inconsistent in different areas after processing in the prior art.

[0005] To achieve the above objectives, a first aspect of the present invention provides a method for compensating the positional accuracy of an exposure pattern in a digital direct imaging device, comprising:

[0006] S11: Select CAM data with identifiable marking patterns; expose the CAM data with identifiable marking patterns onto the substrate using a digital direct imaging device, and display the exposed pattern;

[0007] S12: Sequentially capture the position information of the marked patterns displayed on the substrate, convert the position information into coordinates in the exposure coordinate system of the digital direct imaging device, and mark them as actual coordinate information;

[0008] S13: Convert the position information of the marked graphic in the CAM coordinate system into the coordinates under the exposure coordinates of the digital direct imaging device, and mark it as ideal coordinate information;

[0009] S14: Divide the coordinate list under the exposure coordinate system into several regions according to the desired compensation accuracy; ·Introduce the ideal coordinate information and actual coordinate information of the marked graphic into each region to obtain the error data list of the corresponding region;

[0010] S15: Apply the region and the corresponding error data list as a position accuracy compensation template for the digital direct imaging device to the CAM data to be exposed, and perform regional graphic transformation and exposure on the CAM data.

[0011] Preferably, the size of the CAM data covers the exposure area to be compensated by the device, and several marker graphics are set according to the desired compensation accuracy and the exposure area.

[0012] Preferably, the location information of the marked graphic is captured by a device positioning camera or by a calibrated third-party measuring instrument.

[0013] Preferably, the error data list is generated from graphic error data, and the graphic error data includes translation, rotation, scaling, or shearing.

[0014] Compared with the prior art, the beneficial effects of the present invention are:

[0015] 1. This invention does not require complex tools. The exposure substrate is a commonly used material in laser direct imaging equipment. Error measurement can be performed using the device's built-in alignment camera through visual algorithms. Therefore, the calibration conditions and process are very simple.

[0016] 2. The present invention has high compensation accuracy. The alignment camera built into the digital direct imaging device is a simple calibrated coordinate system that can identify the precise position of the marker in the exposed image. Different compensation parameters can be used to compensate for each position of the exposed image.

[0017] 3. The present invention has low compensation cost. By performing digital compensation on CAM graphics, no additional cost is required to upgrade or optimize the hardware system. Moreover, the compensation is flexible and free. The digital compensation method for CAM graphics can flexibly use similar transformation, affine transformation, and perspective transformation for each subdivided area according to specific needs. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of CAM data for the present invention;

[0020] Figure 2 This is a schematic diagram showing the position of the CAM data marking pattern after substrate exposure in this invention;

[0021] Figure 3 This is a schematic diagram showing the position of the marked graphic after unifying the ideal coordinate information and actual coordinate information into a coordinate system in this invention;

[0022] Figure 4 This is a schematic diagram illustrating the regional compensation method of the present invention based on the required compensation accuracy. Detailed Implementation

[0023] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0024] Please see Figures 1-4 The first aspect of the present invention provides a method for compensating the positional accuracy of an exposure pattern in a digital direct imaging device, comprising:

[0025] S11: Select CAM data with identifiable marking patterns; expose the CAM data with identifiable marking patterns onto the substrate using a digital direct imaging device, and display the exposed pattern;

[0026] S12: Sequentially capture the position information of the marked patterns displayed on the substrate, convert the position information into coordinates in the exposure coordinate system of the digital direct imaging device, and mark them as actual coordinate information;

[0027] S13: Convert the position information of the marked graphic in the CAM coordinate system into the coordinates under the exposure coordinates of the digital direct imaging device, and mark it as ideal coordinate information;

[0028] S14: Divide the coordinate list under the exposure coordinate system into several regions according to the desired compensation accuracy; input the ideal coordinate information and actual coordinate information of the marked graphic into each region to obtain the error data list of the corresponding region;

[0029] S15: Apply the region and the corresponding error data list as a position accuracy compensation template for the digital direct imaging device to the CAM data to be exposed, and perform regional graphic transformation and exposure on the CAM data.

[0030] like Figure 1 Select a CAM data file with identifiable marker graphics. The size of this data file needs to cover the exposure area that the device expects to compensate for. The marker graphics can be identified by the vision system after exposure. There will be multiple marker graphics depending on the compensation accuracy and the area.

[0031] like Figure 2 The CAM data with identifiable marked patterns is exposed onto a substrate using a digital direct imaging device, and the exposed pattern is displayed. The coordinates of the marked pattern in the CAM coordinate system are recorded as P. c(0，0) P c(0，1) …P c(m，n) And the transformation matrix Martrix from the CAM coordinate system to the device imaging (exposure) coordinate system. c2e .

[0032] Next, the CAM mark graphic position displayed on the substrate is sequentially captured by the device's alignment camera or a third-party calibrated measuring instrument. a(0，0) P a(0，1) …P a(m，n) Based on the positional relationship between the positioning camera and the exposure coordinate system, Martrix a2e The location information is converted into coordinates P in the exposure coordinate system of the digital direct imaging device. real(0，0) P real(0，1) …P real(m，n) :

[0033]

[0034] Based on the position P of the marked graphic in the CAM coordinate system within the CAM data. c(0，0) P c(0，1) …P c(m，n-1) P c(m，n) And the transformation matrix Martrix from the CAM coordinate system to the device imaging (exposure) coordinate system. c2e The coordinates P of the marked image in the ideal coordinate system under the exposure coordinate system of the digital direct imaging device are obtained. ideal(0，0) P ideal(0，1 ...P ideal(m，n) :

[0035]

[0036] like Figure 3The coordinate list in the exposure coordinate system of the digital direct imaging device is recorded. The area is divided according to the desired compensation accuracy. Each area is input into the ideal and actual coordinate information of the marked graphic. The corresponding graphic error data, such as translation, rotation, scaling, and shearing, are calculated. The area information and the corresponding error data list are recorded. [RM] (1，1) RM (1，2) , ..., RM (m，n) ], one of the regions RM (m，n) The error information is as follows:

[0037] R (m，n) =[P ideal(m-1，n-1) P ideal(m，n-1) P ideal(m，n1) P ideal(m-1，n-1) ]

[0038]

[0039] like Figure 4 Finally, the recorded area information and corresponding error data list are used as a position accuracy compensation template for the digital direct imaging device and applied to the CAM data to be exposed. The CAM data undergoes graphic region transformation and exposure. The specific process is as follows: Original CAM graphic [CAM...] o After misalignment Martrix c2e Or opposite Martrix alignment Digital mapping transformation yields [CAM] mapped to the exposure coordinate system. e [,] reapply the position accuracy compensation template list [RM] (1，1) RM (1，2) , ..., RM (m，n) The final compensated CAM graphic is obtained by performing digital compensation on the graphic. c And expose it:

[0040]

[0041] Note that this can also be found in the original CAM drawing [CAM]. o ]Application Template List [RM (1，1) RM (1，2) , ..., RM (m，n) To compensate, simply add the template list [RM] (1，1) RM (1，2) , ..., RM (m，n) The regional location information in [] is obtained through Martrix c2e The correction can be made.

[0042] At this point, the positional accuracy compensation for the exposure pattern of the digital direct imaging device is complete.

[0043] Working principle of the invention:

[0044] Select a CAM data with identifiable markings; expose the CAM data with identifiable markings onto a substrate using a digital direct imaging device, and display the exposed pattern.

[0045] The position information of the marked patterns displayed on the substrate is captured sequentially, and the position information is converted into coordinates in the exposure coordinate system of the digital direct imaging device and marked as the actual coordinate information.

[0046] The position information of the marked graphics in the CAM data in the CAM coordinate system is converted into coordinates under the exposure coordinates of the digital direct imaging device, and marked as ideal coordinate information.

[0047] The coordinate list under the exposure coordinate system is divided into several regions according to the desired compensation accuracy; the ideal coordinate information and actual coordinate information of the marked graphic are used to obtain the error data list of the corresponding region.

[0048] The region and its corresponding error data list are used as a position accuracy compensation template for the digital direct imaging device and applied to the CAM data to be exposed, so as to perform regional graphic transformation and exposure on the CAM data.

[0049] The above embodiments are only used to illustrate the technical methods of the present invention and are not intended to limit it. Although the present invention has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical methods of the present invention without departing from the spirit and scope of the technical methods of the present invention.

Claims

1. A method for compensating for exposure pattern position accuracy in a digital direct imaging device, characterized by, The method comprises the following steps: S11: selecting a CAM material with identifiable mark patterns; exposing the CAM material with identifiable mark patterns on a substrate by a digital direct imaging device, and displaying the exposed patterns; S12: sequentially capturing the position information of the mark patterns displayed on the substrate, converting the position information into coordinates in the exposure coordinate system of the digital direct imaging device, and marking the coordinates as actual coordinate information; wherein the position information is captured by a device alignment camera or a calibrated third-party measuring instrument; S13: converting the position information of the mark patterns in the CAM coordinate system in the CAM material into coordinates in the exposure coordinate system of the digital direct imaging device, and marking the coordinates as ideal coordinate information; S14: dividing the coordinate list in the exposure coordinate system into several regions according to the desired compensation accuracy; obtaining the error data list of the corresponding region by bringing the ideal coordinate information and the actual coordinate information of the mark patterns into each region; wherein the error data list is generated by pattern error data, and the pattern error data includes translation, rotation, scaling or shear; S15: applying the region and the corresponding error data list as a digital direct imaging device position accuracy compensation template to the CAM material to be exposed, and performing regional pattern transformation and exposure on the CAM material.

2. The method for compensating the positional accuracy of an exposure pattern in a digital direct imaging device according to claim 1, characterized in that, The size of the CAM material covers the exposure area to be compensated by the device, and a plurality of mark patterns are set according to the desired compensation accuracy and the exposure area.

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