Flower basket puller and wafer transfer apparatus

CN224746919UActive Publication Date: 2026-09-11ANHUI HUASUN ENERGY CO LTD
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Patent Information

Application Number
CN202522302251.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-10-30
Publication Date
2026-09-11
Estimated Expiration
2035-10-30

AI Technical Summary

Technical Problem

[0003]本申请提供了一种花篮抽手和硅片转移设备,以解决现有技术中的花篮抽手结构缺陷导致硅片刮擦损伤问题,提高硅片转移过程的稳定性和安全性

Benefits of technology

[0013]依据本申请的另一个方面,提供了一种硅片转移设备,包括如上的花篮抽手,以及驱动花篮抽手往复运动的驱动机构。

✦ Generated by Eureka AI based on patent content.

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Abstract

This application relates to a basket handle and a silicon wafer transfer device. The basket handle includes a handle body, which comprises an insertion part and a connecting part. The insertion part reciprocates into the photovoltaic basket to pick up silicon wafers. The connecting part connects the insertion part to a drive mechanism that drives the basket handle, causing the insertion part to move horizontally back and forth. A microporous suction cup is provided on the top surface of the insertion part. Multiple sets of smooth pads are distributed around the microporous suction cup and within its suction cup area. The surfaces of the smooth pads are smoothed and protrude from the upper surfaces of the insertion part and the microporous suction cup. This application optimizes the basket handle structure, making it easier to enter and exit the basket and improving transfer efficiency. Simultaneously, the smooth suction surface of the basket handle and the uniformly distributed suction force protect the silicon wafers from excessive suction force, avoiding scratches and breakage, and improving the quality and safety of silicon wafer transfer.
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Description

Technical Field

[0001] This application relates to the field of silicon wafer handling technology in the photovoltaic industry, and more specifically, to a basket-pulling device and silicon wafer transfer equipment. Background Technology

[0002] As a crucial renewable energy sector, the photovoltaic industry has experienced rapid growth in recent years. The accompanying challenge is that the continuously increasing installed capacity of photovoltaic cells necessitates manufacturers to constantly improve production efficiency and product quality to meet market demands. Among the solutions developed for this purpose is the basket-style handle technology, used for the rapid loading, unloading, and transfer of silicon wafers in large-scale photovoltaic cell production, offering higher efficiency compared to traditional manual methods. However, if the basket-style handle's structural design is flawed—for example, with rough surface materials, excessively strong suction, or adhesion on the suction surface—friction, strong suction, and adhesion issues can easily damage the silicon wafers during high-speed loading and unloading from the photovoltaic basket. This can lead to wafer wear, suction cup marks, or even breakage due to impact, affecting the safety and quality of the silicon wafers and threatening the safety of the photovoltaic basket equipment. Utility Model Content

[0003] This application provides a basket handle and silicon wafer transfer device to solve the problem of silicon wafer scratch damage caused by structural defects in the basket handle in the prior art, and to improve the stability and safety of the silicon wafer transfer process.

[0004] According to this application, a flower basket handle includes a handle body, which includes an insertion part and a connecting part. The insertion part reciprocates into the interior of a photovoltaic flower basket to pick up silicon wafers. The connecting part connects the insertion part and a drive mechanism that drives the flower basket handle, thereby driving the insertion part to move horizontally back and forth. The top surface of the insertion part is provided with a microporous suction cup. Multiple sets of smooth pads are distributed around the microporous suction cup and within the suction cup area of ​​the microporous suction cup. The surface of the smooth pads is smoothed and protrudes from the upper surface of the insertion part and the microporous suction cup.

[0005] In some embodiments, the microporous suction cup is a sponge microporous suction cup or a silicone microporous suction cup, and a vacuum channel is provided in the body of the hand-drawing unit. The vacuum channel extends from the connecting part to the insertion part and communicates with the microporous suction cup.

[0006] In some embodiments, the microporous suction cup is configured as a grid structure, the top surface of the insertion part is provided with a grid groove, and the microporous suction cup is filled in the grid groove; a smooth pad surrounds the microporous suction cup of the grid structure and is filled in the grid of the microporous suction cup of the grid structure.

[0007] In some embodiments, the smooth pad is a glass pad, and the top edge of the smooth pad is rounded.

[0008] In some embodiments, the top surface of the insertion portion is further provided with a silicon wafer sensor, which is disposed within the placement range of the silicon wafer and embedded below a glass pad thereunder.

[0009] In some embodiments, a set of silicon wafer sensors are respectively provided at the two corners of one end of the insertion part entering the photovoltaic flower basket. A wiring channel is provided in the handle body, which extends from the connection part into the insertion part. A signal line is provided in the wiring channel, and the signal line is electrically connected to the silicon wafer sensor and the controller of the drive mechanism.

[0010] In some embodiments, the connecting part is inclined downward to the tail end of the insertion part, and the outlets of the vacuum channel and the wiring channel are both located at the lower end face of the connecting part.

[0011] In some embodiments, the insertion part is further provided with a clearance groove, which is located at the end of the insertion part that enters the photovoltaic flower basket and is centrally located, with the silicon wafer sensor located on both sides of the clearance groove.

[0012] In some embodiments, the insertion part and the connecting part of the pull-out body are both made of carbon fiber or special engineering plastic.

[0013] According to another aspect of this application, a silicon wafer transfer device is provided, including the above-mentioned basket handle and a drive mechanism for driving the basket handle to reciprocate.

[0014] Applying the technical solution of this application, the flower basket puller can reciprocate into the photovoltaic flower basket using the insertion part to pick up silicon wafers, and obtain the reciprocating driving force of the drive mechanism using the connecting part, so as to realize the smooth entry and exit of the insertion part into the photovoltaic flower basket and reduce jamming. Furthermore, the insertion part adopts a microporous suction cup with a smooth pad design for the adsorption surface. The microporous structure makes the adsorption force evenly distributed, reducing the local adsorption force on the silicon wafer and achieving uniform adsorption. The smooth pad is placed around the microporous suction cup and within the suction cup range, providing multi-point protrusion support and preventing the rough surfaces of the insertion part and the microporous suction cup from directly contacting the silicon wafer. This not only protects the silicon wafer surface from scratches but also limits the distance between the suction cup and the silicon wafer, further reducing the problem of excessive local suction force on the silicon wafer and reducing poor suction cup imprints. Attached Figure Description The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0015] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is an isometric structural schematic diagram of the flower basket handle according to an embodiment of this application; Figure 2 A schematic diagram of the lower end face of the connecting part of the flower basket handle according to an embodiment of this application is shown; Figure 3 This is a front axonometric structural diagram of the flower basket pull-out into the photovoltaic flower basket according to an embodiment of this application; Figure 4 This invention relates to an isometric structural diagram of the rear of a photovoltaic flower basket with a pull handle, according to an embodiment of this application. Figure 5 This illustration shows a schematic diagram of the principle of transferring silicon wafer samples by pulling the handle in and out of the photovoltaic basket according to an embodiment of this application.

[0017] The above figures include the following reference numerals: 10. Hand-drawing body; 110. Insertion part; 111. Micro-hole suction cup; 112. Smooth pad; 113. Silicon wafer sensor; 114. Avoidance groove; 120. Connecting part; 121. Vacuum channel; 122. Wiring channel; 20. Photovoltaic flower basket; 210. Column; 30. Silicon wafer sample. Detailed Implementation

[0018] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0019] It should be noted that the following detailed descriptions are illustrative and intended to provide further explanation of this application. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0020] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways, rotated 90 degrees, or in other orientations, and the spatial relative descriptions used herein will be interpreted accordingly.

[0021] Figures 1 to 5 An embodiment of the flower basket handle of this application is illustrated schematically.

[0022] like Figures 1 to 5 As shown, this application discloses a flower basket handle, which includes a handle body 10, comprising an insertion part 110 and a connecting part 120. The insertion part 110 reciprocates into the photovoltaic flower basket 20 to pick up silicon wafers. The connecting part 120 connects the insertion part 110 to a drive mechanism that drives the flower basket handle, causing the insertion part 110 to move horizontally reciprocally. A microporous suction cup 111 is provided on the top surface of the insertion part 110. Multiple sets of smooth pads 112 are distributed around the microporous suction cup 111 and within its suction cup area. The surfaces of the smooth pads 112 are smoothed and protrude from the upper surfaces of the insertion part 110 and the microporous suction cup 111.

[0023] Through the above structural design, the basket handle of this embodiment can reciprocate into the photovoltaic basket 20 using the insertion part 110 to pick up silicon wafers, and obtain the reciprocating driving force of the driving mechanism using the connecting part 120, so as to realize the smooth entry and exit of the insertion part 110 into the photovoltaic basket 20, reduce jamming, and improve the efficiency of the basket handle in transferring silicon wafers. In addition, in the basket handle of this embodiment, the insertion part 110 is designed with a microporous suction cup 111 and a smooth pad 112 to form an adsorption surface. The microporous structure makes the adsorption force evenly distributed, reducing the local adsorption force on the silicon wafer and achieving uniform adsorption, so as to overcome the adverse effects of excessive local suction force on silicon wafers and suction cup marks, and significantly improve the quality of silicon wafers. Meanwhile, smooth pads 112 are set around the micro-hole chuck 111 and within the chuck area to achieve multi-point protrusion support, avoiding direct contact between the rough surfaces of the insertion part 110 and the micro-hole chuck 111 and the silicon wafer to prevent friction. This not only protects the silicon wafer surface from scratches, but also allows for fine adjustment of the distance between the chuck and the silicon wafer, further overcoming the problem of excessive local suction on the silicon wafer and reducing poor chuck marks on the silicon wafer.

[0024] like Figure 1 As shown in the figure, the shaded area represents the microporous suction cup 111. Compared with traditional grooved suction cups, the microporous suction cup 111 used in this application has a larger adsorption area, indicating that the microporous structure makes the adsorption force evenly distributed, and at the same time has a certain buffering capacity, which can significantly reduce the local adsorption force on the silicon wafer and avoid scratches, deformation or breakage caused by excessive local force on the silicon wafer. Figure 1 The rectangular structure represents a smooth pad 112. The smooth pad 112 improves the rough surface of the original basket handle, ensuring a smooth and flat contact surface for the silicon wafer and preventing scratches on the wafer surface. The smooth pads 112 are distributed on the top surface of the insertion part 110, surrounding the micro-hole chuck 111 and within the chuck area embedded in the micro-hole chuck 111, thus working in conjunction with the micro-hole chuck 111 to provide multi-point support to ensure the stability and safety of silicon wafer transfer.

[0025] In some embodiments of this application, the microporous suction cup 111 used is either a sponge microporous suction cup 111 or a silicone microporous suction cup 111. For example, the sponge microporous suction cup 111 may be a sponge suction cup of model MRK-HVK, and the silicone microporous suction cup 111 may be a silicone pad suction cup of model MRK-BNL. Both types of suction cups feature a multi-hole design at the suction port, resulting in uniformly distributed suction force. While meeting the requirements for photovoltaic silicon wafer removal, this design effectively avoids wafer adhesion marks and breakage caused by excessive local suction force, thereby improving the quality of silicon wafer transfer. Furthermore, the shape of the suction port of the aforementioned microporous suction cup 111 can be customized to easily match different silicon wafer sizes and shapes. The sponge suction cup is lighter, more flexible in use, and lower in cost; the silicone suction cup has a large-area anti-static buffer silicone pad, which can further improve production quality and meet the production requirements of high-quality silicon wafers.

[0026] In some embodiments of this application, such as Figure 2 As shown, a vacuum channel 121 is provided inside the handle body 10. The vacuum channel 121 extends from the connecting part 120 into the insertion part 110 and communicates with the microporous suction cup 111. (Reference) Figure 2 As shown, the outlet of the vacuum channel 121 is located on the lower end face of the connecting part 120, and is entirely embedded inside the handle body 10. This application places the vacuum channel 121 inside the handle body 10 instead of using an external gas pipeline. This achieves airtightness while avoiding interference from external pipelines on the reciprocating motion of the basket handle, reducing gas pipeline wear and leakage, and thus improving production safety. A rubber seal can be installed at the outlet of the vacuum channel 121 to connect with vacuum equipment composed of gas pipes and air pumps. Since this is a conventional technique in the field, it will not be described in detail here.

[0027] In some embodiments of this application, such as Figure 1 As shown, the micro-perforated chuck 111 is configured with a grid-like structure. The top surface of the insertion portion 110 has grid grooves, and the micro-perforated chuck 111 is filled within these grooves. The surface height of the micro-perforated chuck 111 is flush with the surface of the main body of the insertion portion 110, and both are slightly lower than the height of the smooth pad 112. The smooth pad 112 surrounds the grid-like micro-perforated chuck 111 and fills within the grid of the micro-perforated chuck 111, providing multi-point support to the silicon wafer sample 30. This prevents the silicon wafer sample 30 from directly contacting the micro-perforated chuck 111 and the main body surface of the insertion portion 110, ensuring a smooth contact surface and protecting the silicon wafer sample 30 for high-quality transfer.

[0028] In some embodiments of this application, the smooth pad 112 is a glass pad, and the top edge of the smooth pad 112 is smoothly polished. Because the surface of the glass pad is sufficiently smooth and easy to polish, it can ensure a smooth contact surface with the silicon wafer while maintaining rigid support, thereby reducing scratches on the silicon wafer caused by friction and improving the quality of the silicon wafer during the transfer process. Figures 1 to 5 As shown in the embodiment of this application, each pull handle body 10 is provided with nine smooth glass pads 112. The nine smooth pads 112 are arranged in three columns, covering the two sides and the middle area of ​​the insertion part 110, and are scattered and embedded in the suction cup range of the microporous suction cup 111 to achieve multi-point support for the silicon wafer. By dispersing the pressure on the silicon wafer surface and smoothing the surface, the problem of scratches during the silicon wafer transfer process is reduced.

[0029] In some embodiments of this application, such as Figure 1 and Figure 4 As shown, a silicon wafer sensor 113 is also provided on the top surface of the insertion part 110. The silicon wafer sensor 113 is located within the placement range of the silicon wafer and is embedded below a glass pad. When the insertion part 110 enters the photovoltaic basket 20, the photovoltaic basket 20 descends layer by layer to place the silicon wafer sample 30 on the insertion part 110. When the silicon wafer sensor 113 detects that the distance of the silicon wafer sample 30 meets the transfer requirements, wafer extraction begins. The vacuum equipment is activated, and the wafer is picked up by the microporous suction cup 111. Then, the controller drives the extraction handle body 10 to horizontally extract the photovoltaic basket 20 through the drive mechanism, realizing the outward transfer of the silicon wafer sample 30 inside the photovoltaic basket 20. By setting the silicon wafer sensor 113, this application can effectively avoid the influence of empty layers inside the photovoltaic basket 20, avoid wasting the vacuum capacity of the machine and the driving efficiency of the drive mechanism, effectively improve the utilization rate of the machine, reduce the idle running of the machine's air pump and motor, and avoid energy waste. Furthermore, this application places the silicon wafer sensor 113 below a glass pad, which also helps protect the silicon wafer sensor 113 and prevents damage caused by impurities or silicon wafer debris, thus making it safer and more reliable. It is understood that the silicon wafer sensor 113 can use mature ranging components such as laser sensors (since the silicon wafer is a non-transparent structure, distance measurement can be performed using the principle of light reflection). In addition, the controller of the drive mechanism can be implemented using existing mature devices such as host computers or microcontrollers, which can be driven and started by detecting signals. These are all conventional methods in the art and will not be described in detail here.

[0030] In some embodiments of this application, such as Figures 1 to 5As shown, a set of silicon wafer sensors 113 are respectively provided at the two corners of the insertion part 110 entering the photovoltaic flower basket 20. In this embodiment, the setting of two sets of silicon wafer sensors 113 can improve the accuracy of detecting the silicon wafer sample 30. At the same time, the two sets of silicon wafer sensors 113, respectively located at the two corners of the insertion part 110, are closer to the edge of the silicon wafer and can also be used to assist in detecting the positioning of the silicon wafer. By detecting the two endpoints, it can determine whether the silicon wafer is in the correct position, avoiding impact and breakage during transfer when the silicon wafer is tilted, thereby improving the safety of transferring the flower basket.

[0031] like Figure 2 As shown, a wiring channel 122 is provided inside the handle body 10. The wiring channel 122 extends from the connecting part 120 to the insertion part 110. A signal line (not shown) is provided inside the wiring channel 122. The signal line is electrically connected to the silicon wafer sensor 113 and the controller of the drive mechanism to realize the transmission of the detection signal of the silicon wafer sensor 113. Figure 2 As shown, similar to the vacuum channel 121, the outlet of the wiring channel 122 is also located on the lower end face of the connecting part 120, so that the wiring channel 122 is completely embedded in the handle body 10, thereby avoiding interference and transfer of the signal line harness, protecting the signal line safety, reducing the risk of friction breakage, and improving the structural reliability of the basket handle.

[0032] In some embodiments of this application, such as Figures 1 to 5 As shown, the connecting part 120 is inclined downwards and connected to the tail end of the insertion part 110 to facilitate connection with the drive mechanism and receive the drive action of the drive mechanism. The outlets of the vacuum channel 121 and the wiring channel 122 are both located at the lower end face of the connecting part 120 to facilitate airtightness and ensure the safety of the channel. Correspondingly, the drive mechanism is provided with an inclined slot for the connecting part 120 to be inserted. During assembly, simply insert the connecting part 120 of the flower basket handle into the inclined slot and slide it into place to achieve quick installation. The bottom of the inclined slot has a connection space for accommodating the airtight connector of the vacuum channel 121 and the signal line of the silicon wafer sensor 113. In a preferred embodiment of this application, the drive mechanism includes a horizontal guide rail, on which the inclined slot is slidably provided so that, driven by a power mechanism such as a motor, the flower basket handle is driven to reciprocate horizontally in and out of the photovoltaic flower basket 20, realizing the rapid and safe transfer of the silicon wafer.

[0033] In some embodiments of this application, such as Figure 1 and Figure 4As shown, the insertion part 110 is also provided with a clearance groove 114. The clearance groove 114 is located at the end of the insertion part 110 that enters the photovoltaic flower basket 20 and is centrally positioned. It is used to avoid obstructing structures within the photovoltaic flower basket 20, ensuring a safe distance between the flower basket handle and the photovoltaic flower basket 20, avoiding collisions, friction, and jamming interference between the flower basket handle and the photovoltaic flower basket 20, improving the smoothness of the insertion part 110 entering and exiting the photovoltaic flower basket, and improving transfer efficiency. (Reference) Figure 4 As shown, the photovoltaic flower basket 20 is equipped with multiple uprights 210, some of which also function as guide rails for vertical movement. The clearance groove 114 of the insertion part 110 provides clearance space for the corresponding uprights 210, preventing interference between the insertion part 110 and the vertical movement of the photovoltaic flower basket 20 when it enters or exits, thus improving the reliability and safety of the transfer. Furthermore, as... Figure 4 As shown in the embodiment of this application, two sets of silicon wafer sensors 113 are located on both sides of the avoidance groove 114 to correspond to the edge of the silicon wafer sample 30 and detect whether the silicon wafer sample 30 is in place and needs to be transferred.

[0034] In some embodiments of this application, to meet the high-intensity reciprocating motion of the pull handle and the high-temperature production environment, both the insertion part 110 and the connecting part 120 are made of carbon fiber or special engineering plastics. Special engineering plastics refer to a class of engineering plastics with high comprehensive performance and a long-term operating temperature above 150°C, mainly including polyphenylene sulfide (PPS), polyimide (PI), polyetheretherketone (PEEK), liquid crystal polymer (LCP), and polysulfone (PSF). These materials have advantages such as light weight, high strength, and wear resistance, and can adapt to various environments in photovoltaic production. Simultaneously, the surface of the pull handle body 10 is also processed to improve its smoothness and wear resistance, reducing damage to the silicon wafer.

[0035] According to another aspect of this application, a silicon wafer transfer device is provided, which includes the above-described basket handle and a drive mechanism for reciprocating the basket handle. The drive mechanism drives the basket handle to reciprocate in and out of the photovoltaic basket 20, thereby achieving rapid and safe transfer of the silicon wafer.

[0036] Combination Figure 5 The following diagram illustrates the working principle of the flower basket pull-out mechanism in this application: The pull handle body 10 of this application is elongated, with a certain length and width to accommodate photovoltaic flower baskets 20 of different sizes. The insertion portion 110 of the pull handle body 10 is horizontally positioned, and is equipped with a microporous suction cup 111 and nine dispersed smooth pads 112. The smooth pads 112 provide multi-point support for the silicon wafer sample 30. The surface of the smooth pads 112 protrudes from the upper surface of the microporous suction cup 111 and the insertion portion 110, preventing the silicon wafer sample 30 from directly contacting the rough surfaces of the microporous suction cup 111 and the insertion portion 110, thus avoiding frictional damage. Simultaneously, the smooth pads 112, in conjunction with the microporous suction cup 111, overcome the problem of excessive localized suction in traditional pull handles, protecting the silicon wafer sample 30 from scratches. Furthermore, silicon wafer sensors 113 are located at the two corners of one end of the insertion portion 110, emitting upward sensing light to measure the distance to the silicon wafer sample 30, allowing the flower basket pull handle to better coordinate with the movement of the photovoltaic flower basket 20. The connecting part 120 is obliquely downward connected to the tail end of the insertion part 110, and is used to connect the drive mechanism to realize the reciprocating horizontal movement of the pull-out body 10.

[0037] When transferring silicon wafer samples 30, the basket handle engages with the photovoltaic basket 20 via horizontal insertion. During insertion, the silicon wafer sample 30 is positioned directly above the handle body 10. As the photovoltaic basket 20 descends layer by layer, the handle body 10 only begins to extract the wafer when a silicon wafer sample 30 enters the detection range of the silicon wafer sensor 113. This involves activating the microporous suction cup 111 for adsorption and horizontally withdrawing the basket handle via a drive mechanism, thus achieving wafer adsorption and transfer. Compared to the traditional basket handle's fixed-frequency reciprocating drive, this application incorporates the silicon wafer sensor 113 for distance detection-based activation of the silicon wafer sample 30. This effectively avoids the impact of empty spaces in the photovoltaic basket 20 (i.e., layers where silicon wafer samples 30 cannot be properly loaded), improving the utilization rate of the basket handle, preventing dry-pull phenomena, and reducing energy and motor losses. Therefore, this application provides an efficient, stable, safe, and easy-to-operate silicon wafer transfer solution that meets the handling and processing needs of silicon wafers during photovoltaic cell production.

[0038] In summary, the basket handle of this embodiment utilizes the insertion part to reciprocate into the photovoltaic basket to pick up silicon wafers, and the connecting part obtains the reciprocating driving force of the drive mechanism, enabling the insertion part to smoothly enter and exit the photovoltaic basket, reducing jamming, and improving the efficiency of silicon wafer transfer. Furthermore, in the basket handle of this embodiment, the insertion part is designed with a microporous suction cup and smooth pads to create an adsorption surface. The microporous structure allows for uniform distribution of adsorption force, controlling the magnitude of local adsorption force on the silicon wafer and achieving uniform adsorption. This overcomes defects such as silicon wafer wear and suction cup marks caused by excessive local suction force, improving silicon wafer quality. Simultaneously, smooth pads are provided around and within the microporous suction cup, providing multi-point protrusion support and preventing direct contact and friction between the rough surfaces of the insertion part and the microporous suction cup. This protects the silicon wafer surface from scratches and allows for fine-tuning of the distance between the suction cup and the silicon wafer, further overcoming the problem of excessive local suction force on the silicon wafer, reducing suction cup marks, and improving the production quality of the silicon wafers.

[0039] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0040] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented, for example, in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0041] The above are merely preferred embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A flower basket pull-out handle, characterized in that, The device includes a pull-out body (10), which includes an insertion part (110) and a connecting part (120). The insertion part (110) reciprocates into the photovoltaic flower basket (20) to pick up silicon wafers. The connecting part (120) connects the insertion part (110) and the drive mechanism that drives the pull-out of the flower basket, thereby driving the insertion part (110) to move horizontally back and forth. The top surface of the insertion part (110) is provided with a microporous suction cup (111). Multiple sets of smooth pads (112) are dispersed around the microporous suction cup (111) and within the suction cup range of the microporous suction cup (111). The surface of the smooth pads (112) is smoothed and protrudes from the upper surface of the insertion part (110) and the microporous suction cup (111).

2. The flower basket puller according to claim 1, characterized in that The microporous suction cup (111) is a sponge microporous suction cup (111) or a silicone microporous suction cup (111). The hand-pulling body (10) is provided with a vacuum channel (121). The vacuum channel (121) extends from the connecting part (120) to the insertion part (110) and communicates with the microporous suction cup (111).

3. The flower basket handle according to claim 2, characterized in that, The microporous suction cup (111) is configured with a grid structure, and the top surface of the insertion part (110) is provided with a grid groove, and the microporous suction cup (111) is filled in the grid groove; the smooth pad (112) surrounds the microporous suction cup (111) with the grid structure and is filled in the grid of the microporous suction cup (111) with the grid structure.

4. The flower basket handle according to claim 3, characterized in that, The smooth pad (112) is a glass pad, and the top edge of the smooth pad (112) is rounded and polished.

5. The flower basket puller according to claim 4, characterized in that The top surface of the insertion part (110) is also provided with a silicon wafer sensor (113), which is located within the placement range of the silicon wafer and is embedded below one of the glass pads.

6. The flower basket handle according to claim 5, characterized in that, At the two corners of the insertion part (110) entering the photovoltaic flower basket (20), a set of silicon wafer sensors (113) are respectively provided. A wiring channel (122) is provided inside the handle body (10). The wiring channel (122) extends from the connection part (120) into the insertion part (110). A signal line is provided inside the wiring channel (122). The signal line is electrically connected to the silicon wafer sensor (113) and the controller of the drive mechanism.

7. The flower basket puller according to claim 6, characterized in that The connecting part (120) is inclined downward to the tail end of the insertion part (110), and the outlets of the vacuum channel (121) and the wiring channel (122) are both located at the lower end face of the connecting part (120).

8. The flower basket handle according to claim 7, characterized in that, The insertion part (110) is also provided with a clearance groove (114), which is located at one end of the insertion part (110) entering the photovoltaic flower basket (20) and is centrally located. The silicon wafer sensor (113) is located on both sides of the clearance groove (114).

9. The flower basket puller according to claim 1, wherein, In the pull-out body (10), both the insertion part (110) and the connecting part (120) are made of carbon fiber or special engineering plastic.

10. A silicon wafer transfer apparatus, characterized by, It includes the flower basket handle as described in any one of claims 1 to 9, and a drive mechanism for driving the reciprocating motion of the flower basket handle.