SYSTEM TO CONTROL EPITAXIAL GROWTH RATE IN VERTICAL REACTORS EQUIPPED WITH A TRUNCOPYRAMID SUSCEPTOR.

IT8921582A0Inactive Publication Date: 1989-08-31LPE SPA
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Patent Information

Authority / Receiving Office
IT · IT
Patent Type
Applications
Current Assignee / Owner
LPE SPA
Filing Date
1989-08-31
Publication Date
1989-08-31
Estimated Expiration
Not applicable · inactive patent
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