Light source module, distance measuring device, wearable display device, and method for manufacturing light source module

Abstract

To provide a light source module, a distance measuring device, a wearable device, and a method for manufacturing the light source module that improve a positional accuracy of a light emitting element and a lens.SOLUTION: A light source module according to one aspect of a technique of the present invention includes: a first substrate having a plurality of light emitting elements respectively provided on a first surface; a second substrate having a plurality of lenses respectively provided on a second surface opposed to the first surface and protruding toward the first surface; a spacer disposed outside the plurality of light emitting elements on the first surface and supporting the second substrate at a position separated from the first substrate; and a bonding member bonding the second substrate and the spacer. The second substrate includes: a first region in which a first lens group facing the plurality of light emitting elements among the plurality of lenses is disposed; and a second region in which a second lens group facing the spacer is disposed.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a light source module, a distance measuring device, a wearable display device, and a method for manufacturing a light source module. [Background technology]

[0002] Patent Document 1 discloses an optical device having a first substrate having a plurality of light-emitting elements arranged on a first surface, and a second substrate having a plurality of lenses arranged on a second surface and corresponding to the plurality of light-emitting elements, the second substrate having a joint that defines the distance between the first substrate and the second substrate. Summary of the Invention [Problem to be solved by the invention]

[0003] In order to emit light emitted from a light-emitting element through a lens at a desired radiation angle, it is desired to improve the positional accuracy of the light-emitting element and the lens.

[0004] The present invention aims to provide a light source module, a distance measuring device, a wearable device, and a method for manufacturing a light source module that improves the positional accuracy of a light emitting element and a lens. [Means for solving the problem]

[0005] A light source module according to one embodiment of the present invention comprises a first substrate having a first surface and having a plurality of light-emitting elements each arranged on the first surface side; a second substrate having a second surface opposite the first surface and having a plurality of lenses each arranged on the second surface side and protruding toward the first surface side; a spacer arranged on the first surface outside the plurality of light-emitting elements and supporting the second substrate at a position spaced apart from the first substrate; and a bonding member bonding the second substrate and the spacer, wherein the second substrate has a first region in which a first lens group facing the plurality of light-emitting elements among the plurality of lenses is arranged, and a second region in which a second lens group facing the spacer is arranged. [Effects of the Invention]

[0006] According to the present invention, the positional accuracy of the light emitting element and the lens can be improved. [Brief explanation of the drawings]

[0007] [Figure 1] 1 is a plan view schematically showing a plane of a light source module according to a first embodiment of the present invention. [Figure 2] 2 is a cross-sectional view showing a schematic cross section of the light source module according to the first embodiment of the present invention taken along line II-II shown in FIG. 1. FIG. [Figure 3] 10 is a schematic partial enlarged view showing a bonding region between a second substrate and a spacer in a light source module according to a reference example. FIG. [Figure 4] 3 is a schematic partial enlarged view showing a bonding region between a second substrate and a spacer in the light source module according to the first embodiment of the present invention. FIG. [Figure 5] 3A to 3C are schematic cross-sectional views illustrating a first example of a method for manufacturing the light source module according to the first embodiment of the present invention. [Figure 6] 3A to 3C are schematic cross-sectional views illustrating a first example of a method for manufacturing the light source module according to the first embodiment of the present invention. [Figure 7] 3A to 3C are schematic cross-sectional views illustrating a first example of a method for manufacturing the light source module according to the first embodiment of the present invention. [Figure 8] 5A to 5C are schematic cross-sectional views for explaining a second example of a method for manufacturing the light source module according to the first embodiment of the present invention. [Figure 9] 5A to 5C are schematic cross-sectional views for explaining a second example of a method for manufacturing the light source module according to the first embodiment of the present invention. [Figure 10] 5A to 5C are schematic cross-sectional views for explaining a second example of a method for manufacturing the light source module according to the first embodiment of the present invention. [Figure 11]FIG. 10 is a plan view schematically showing a plane of a light source module according to a second embodiment of the present invention. [Figure 12] 12 is a cross-sectional view showing a schematic cross section of the light source module according to the second embodiment of the present invention taken along line XII-XII shown in FIG. [Figure 13] 10 is a cross-sectional view schematically illustrating a cross section for explaining the height relationship between a lens belonging to a second lens group of a light source module according to a second embodiment of the present invention and a first convex portion. FIG. [Figure 14] FIG. 10 is a cross-sectional view schematically showing a cross section of a light source module according to a first modified example of the second embodiment of the present invention, taken along an XZ plane. [Figure 15] FIG. 10 is an enlarged plan view schematically showing a plane of a light source module according to a second modified example of the second embodiment of the present invention. [Figure 16] FIG. 10 is a cross-sectional view schematically showing a cross section of a light source module according to a third modified example of the second embodiment of the present invention, taken along an XZ plane. [Figure 17] FIG. 10 is a cross-sectional view schematically showing a cross section of a light source module according to a fourth modified example of the second embodiment of the present invention, taken along an XZ plane. [Figure 18] FIG. 11 is a cross-sectional view schematically showing a cross section of a light source module according to a fifth modified example of the second embodiment of the present invention, taken along an XZ plane. [Figure 19] FIG. 10 is a block diagram schematically illustrating an example of the overall configuration of a distance measuring device according to a third embodiment of the present invention. [Figure 20] FIG. 10 is a block diagram schematically illustrating an example of the overall configuration of a wearable display device according to a fourth embodiment of the present invention. [Figure 21] FIG. 10 is a diagram schematically illustrating the configuration of a wearable display device according to a fourth embodiment of the present invention in a plan view. DETAILED DESCRIPTION OF THE INVENTION

[0008] Hereinafter, an embodiment of the invention will be described with reference to the drawings. In each drawing, the same components are designated by the same reference numerals, and redundant description may be omitted. In the drawings, directions are expressed using a Cartesian coordinate system having an X-axis, a Y-axis, and a Z-axis. The X-axis, the Y-axis, and the Z-axis are orthogonal to one another. The direction along the X-axis is referred to as the X-axis direction. The direction along the Y-axis is referred to as the Y-axis direction. The direction along the Z-axis is referred to as the Z-axis direction. In addition, in the X-axis direction, the direction in which an arrow points is referred to as the +X direction or +X side, and the direction opposite to the +X direction is referred to as the -X direction or -X side. In the Y-axis direction, the direction in which an arrow points is referred to as the +Y direction or +Y side, and the direction opposite to the +Y direction is referred to as the -Y direction or -Y side. In the Z-axis direction, the direction in which an arrow points is referred to as the +Z direction or +Z side, and the direction opposite to the +Z direction is referred to as the -Z direction or -Z side.

[0009] The direction parallel to the XY plane defined by the X-axis and Y-axis directions is called the "in-plane direction." The direction parallel to the Z-axis direction is called the "perpendicular-to-plane direction." The +Z direction or +Z axis corresponds to the direction in which light is emitted from the light source module according to the embodiment. However, these directions do not limit the direction in which the light source module is used. The light source module can be used in any direction. Furthermore, the length along the X-axis direction may be called the "width." The length along the Y-axis direction may be called the "depth." The length along the Z-axis direction may be called the "height."

[0010] [First embodiment] An example of the overall configuration of a light source module 1 according to a first embodiment of the present invention will be described with reference to Figures 1 and 2. Figure 1 is a plan view schematically showing the plane of the light source module 1 according to the first embodiment of the present invention. Figure 2 is a cross-sectional view schematically showing the cross section of the light source module 1 according to the first embodiment of the present invention taken along line II-II shown in Figure 1. The light source module 1 according to the first embodiment includes a first substrate 10, a second substrate 20, a spacer 30, and a bonding member 40.

[0011] <First substrate 10> An example of the configuration of the first substrate 10 will be described. As shown in FIG. 2, the first substrate 10 has a first surface 10a and a plurality of light-emitting elements 11 each provided on the first surface 10a. In the example shown in FIG. 2, the first surface 10a corresponds to the +Z side of the first substrate 10. The first substrate 10 is a structure including a flat substrate 12 made of a material such as sapphire or aluminum nitride, and semiconductor layers arranged on the substrate 12 and corresponding to the plurality of light-emitting elements 11. The semiconductor layers corresponding to the plurality of light-emitting elements 11 may be monolithically fabricated on the substrate 12. The first substrate 10 may further include electrodes and wiring for supplying a drive current to each of the plurality of light-emitting elements 11. Each of the plurality of light-emitting elements 11 emits light L11 whose optical axis is along the Z-axis direction. The first surface 10a includes the surface on the +Z side of the light emitting element 11, and the surface on the +Z side of the base 12 in an area of ​​the base 12 where the light emitting element 11 is not arranged.

[0012] For example, when each of the plurality of light-emitting elements 11 is a vertical cavity surface-emitting laser (VCSEL), each light-emitting element 11 has various semiconductor layers such as a pair of multilayer reflector layers, a spacer layer, a p-type semiconductor layer, an active layer, an n-type semiconductor layer, etc. However, each of the plurality of light-emitting elements 11 may be other light-emitting elements such as a light-emitting diode (LED).

[0013] The first substrate 10 has, for example, a substantially rectangular outer shape in a plan view. However, the outer shape of the first substrate 10 is not limited to this. The first substrate 10 may have other outer shapes in a plan view, such as a substantially circular, substantially elliptical, or substantially polygonal shape.

[0014] As shown in Figures 1 and 2, it is preferable that each of the multiple light-emitting elements 11 is arranged in an array in a predetermined direction. For example, each of the multiple light-emitting elements 11 is arranged in a matrix along the X-axis direction and the Y-axis direction on the first surface 10a. Each of the multiple light-emitting elements 11 is arranged in an area on the first surface 10a excluding an area where a spacer 30, which will be described separately, is arranged. In the example shown in Figures 1 and 2, the multiple light-emitting elements 11 are arranged toward the center on the first surface 10a. Furthermore, among the multiple light-emitting elements 11, adjacent light-emitting elements 11 are arranged spaced apart from each other. However, the number and positions of the light-emitting elements 11 are not limited to the example shown in Figures 1 and 2.

[0015] <Second substrate 20> An example of the configuration of the second substrate 20 will be described. As shown in FIG. 2, the second substrate 20 has a second surface 20a facing the first surface 10a, and has a plurality of lenses 21 each provided on the second surface 20a side. The second surface 20a corresponds to the surface of the second substrate 20 on the -Z side. In the example shown in FIG. 2, the second substrate 20 is disposed on the +Z side of the first substrate 10. Furthermore, the second substrate 20 is disposed spaced apart from the first substrate 10 in the Z-axis direction.

[0016] The second substrate 20 is a structure including a flat substrate 22 made of a light-transmitting material such as glass and a plurality of lenses 21 connected to the -Z side of the substrate 22. The plurality of lenses 21 are made of a light-transmitting material such as optical glass, just like the substrate 22. For ease of explanation, the hatching representing the plurality of lenses 21 and the hatching representing the substrate 22 are different types of hatching in cross-sectional views such as FIG. 2 . However, the lenses 21 and the substrate 22 may be structurally integrated members. That is, each of the plurality of lenses 21 may be made of the same material as the substrate 22 and may be a member connected to the substrate 22. Light L11 from the plurality of light-emitting elements 11 enters the second substrate 20 from the side where the lenses 21 are provided, i.e., the second surface 20a side. Furthermore, light L11 is emitted from the surface of the second substrate 20 located on the opposite side in the Z-axis direction to the second surface 20a on which the lens 21 is provided. The second surface 20a includes the surface on the -Z side of the lens 21 and, in an area of ​​the base 22 where the lens 21 is not disposed, the surface on the -Z side of the base 22.

[0017] The second substrate 20 has a substantially rectangular outer shape in a plan view. The length of the second substrate 20 along the X-axis direction and the length of the second substrate 20 along the Y-axis direction may be substantially the same as the length of the first substrate 10 along the X-axis direction and the length of the second substrate 20 along the Y-axis direction, respectively. However, the outer shape of the second substrate 20 is not limited to this. The second substrate 20 may have other outer shapes in a plan view, such as a substantially circular shape, a substantially elliptical shape, or a substantially polygonal shape.

[0018] As shown in Fig. 2, each of the multiple lenses 21 protrudes toward the first surface 10a. In the example shown in Fig. 2, each of the multiple lenses 21 is a convex lens that protrudes toward the first surface 10a. However, the multiple lenses 21 are not limited to convex lenses. For example, the multiple lenses 21 may be lenses having other shapes, such as Fresnel lenses and diffractive lenses.

[0019] As shown in Figures 1 and 2, the second substrate 20 has a first region 20A in which a first lens group 21A of the multiple lenses 21 that faces the multiple light-emitting elements 11 is arranged, and a second region 20B in which a second lens group 21B that faces the spacer 30, which will be described separately, is arranged.

[0020] The first region 20A corresponds to a central region of the second substrate 20 in a plan view. The first region 20A overlaps with the plurality of light-emitting elements 11 in a plan view. The plurality of lenses 21 belonging to the first lens group 21A are arranged in an array in a region of the second surface 20a corresponding to the first region 20A. In the example shown in FIG. 1, the plurality of lenses 21 belonging to the first lens group 21A are arranged in a matrix along the X-axis direction and the Y-axis direction. However, the number, positions, and arrangement direction of the plurality of lenses 21 belonging to the first lens group 21A are not limited to the examples shown in FIGS. 1 and 2.

[0021] The plurality of lenses 21 belonging to the first lens group 21A are arranged at positions overlapping different light emitting elements 11 from the plurality of light emitting elements 11 in a plan view. Light L11 emitted from each light emitting element 11 is incident on each lens 21 belonging to the first lens group 21A that overlaps with the corresponding light emitting element 11 in a plan view. Each lens 21 belonging to the first lens group 21A refracts the light L11 incident thereon, deflects it into light substantially parallel to the optical axis, and emits the deflected light.

[0022] The second region 20B is located outside the first region 20A in a plan view. The lenses 21 belonging to the second lens group 21B are arranged in an array in a region of the second surface 20a corresponding to the second region 20B. In the example shown in FIG. 1, the lenses 21 belonging to the second lens group 21B are arranged in a matrix along the X-axis direction and the Y-axis direction. However, the number, positions, and arrangement direction of the lenses 21 belonging to the second lens group 21B are not limited to the examples shown in FIGS. 1 and 2.

[0023] Light L11 from the light emitting element 11 is not incident on the lenses 21 belonging to the second lens group 21B. However, due to refraction and reflection at each lens 21 belonging to the first lens group 21A and the base 22, light L11 may be incident on the lenses 21 belonging to the second lens group 21B.

[0024] 1, the outermost lens 21 in the second lens group 21B is adjacent to the outer edge of the second surface 20a. For example, in the second region 20B on the -X side, the lens 21 closest to the -X side is adjacent to the outer edge of the second surface 20a on the -X side. Also, in the second region 20B on the +X side, the lens 21 closest to the +X side is adjacent to the outer edge of the second surface 20a on the +X side. However, the outermost lens 21 in the second lens group 21B may be located a predetermined distance away from the outer edge of the second surface 20a.

[0025] 1 and 2, the second regions 20B are located on the -X side and the +X side of the first region 20A. As shown in FIG. 1, each second region 20B has a strip shape in which the length in the Y-axis direction is longer than the length in the X-axis direction in a plan view. However, the shape of the second regions 20B is not limited thereto. For example, the shape of the second regions 20B may correspond to the planar shape of the spacer 30.

[0026] It is preferable that the plurality of lenses 21 belonging to the first lens group 21A and the plurality of lenses 21 belonging to the second lens group 21B have the same height. Here, "height of lens 21" refers to the distance from the boundary between lens 21 and base 22 to the top of lens 21 on second substrate 20. Furthermore, when the plurality of lenses 21 are convex lenses, it is preferable that the plurality of lenses 21 belonging to the first lens group 21A and the plurality of lenses 21 belonging to the second lens group 21B have the same curvature. This makes it easy to process the plurality of lenses 21. However, it is not necessary that the plurality of lenses 21 belonging to the first lens group 21A and the plurality of lenses 21 belonging to the second lens group 21B have the same height and curvature.

[0027] The second substrate 20 further includes a third region 20C between the first region 20A and the second region 20B. Specifically, the third region 20C is located between the first region 20A and the second region 20B on the -X side, and between the first region 20A and the second region 20B on the +X side. As shown in FIGS. 1 and 2, the third region 20C corresponds to a region where the lenses 21 are not disposed. As shown in FIG. 1, each of the third regions 20C has a strip-like shape in which the length in the Y-axis direction is longer than the length in the X-axis direction in a plan view. However, the shape of the third region 20C is not limited to this.

[0028] <Spacer 30> An example of the configuration of the spacer 30 will be described. As shown in FIG. 2, the spacer 30 is disposed on the first surface 10a of the first substrate 10 outside the plurality of light-emitting elements 11. The spacer 30 extends from the first surface 10a to the +Z side. In the example shown in FIGS. 1 and 2, the spacers 30 are disposed on the -X side and the +X side of the plurality of light-emitting elements 11 in a plan view. Also, as shown in FIG. 1, the spacer 30 has a strip-like shape in which the length in the Y-axis direction is longer than the length in the X-axis direction in a plan view. However, the planar shape of the spacer 30 is not limited to this.

[0029] The spacer 30 supports the second substrate 20. The first substrate 10 and the second substrate 20 are disposed at separate positions. The height of the spacer 30 is set in accordance with the focal length of the lens 21. As an example, the height of the spacer 30 is set so that, when the light emitting element 11 and the lens 21 overlap each other in a plan view, the distance between the light emitting surface (mesa upper surface) of the light emitting element 11 and the center of the lens 21 is equal to the focal length of the lens 21. Note that other configurations of the spacer 30 can be adjusted as appropriate.

[0030] <Joint member 40> An example of the configuration of the bonding member 40 will be described. The bonding member 40 bonds the second substrate 20 and the spacer 30. Examples of the bonding member 40 include adhesives made of photocurable resin that hardens with ultraviolet light or the like, and thermosetting resin or the like.

[0031] 2, the bonding member 40 is positioned between the plurality of lenses 21 belonging to the second lens group 21B and the +Z side surface of the spacer 30. Preferably, the bonding member 40 is positioned so as to include gaps between adjacent lenses 21 in the second lens group 21B. This allows the tops of all of the lenses 21 belonging to the second lens group 21B to contact the +Z side surface of the spacer 30, and the second substrate 20 is supported horizontally on the spacer 30. This improves the positional accuracy in the Z axis direction between the light-emitting element 11 and the lens 21 (the lens 21 of the first lens 21A), which overlap each other in a plan view.

[0032] <Example of effects> Next, an example of the effects of the light source module 1 will be described with reference to Figures 3 and 4. Figure 3 is a schematic partial enlarged view showing an enlarged joint region between the second substrate 20R and the spacer 30R in a light source module according to a reference example. Figure 4 is a schematic partial enlarged view showing an enlarged joint region between the second substrate 20R and the spacer 30 in the light source module 1 according to the first embodiment of the present invention.

[0033] First, a reference example will be described. In the reference example, a lens 21 is not arranged in the region of the second substrate 20R facing the spacer 30R, i.e., the region corresponding to the second region 20B of the second substrate 20 of the light source module 1. The region of the second substrate 20R facing the spacer 30R is, for example, a flat surface. Therefore, the flat surfaces of the second substrate 20R and the spacer 30R face each other via the adhesive 40R.

[0034] In this state, as shown in FIG. 3, variations in the height of the adhesive 40R may occur depending on the position due to variations in the distribution of the amount of adhesive 40R applied, variations in the load on the adhesive 40R during bonding, and variations in the degree of shrinkage of the adhesive 40R when it hardens. As a result, the second substrate 20R may tilt with respect to the +Z side surface of the spacer 30R. When the second substrate 20R tilts, the positions of the overlapping light-emitting element 11 and the lens 21 in the Z axis direction in a plan view may deviate from the desired positions. That is, the distance in the Z axis direction between the overlapping light-emitting element 11 and the lens 21 in a plan view may deviate from the focal length of the lens 21. As a result, the optical characteristics, such as the radiation angle, of the light emitted from the light-emitting element 11 and then exiting the second substrate 20R through the lens 21 may differ from the desired characteristics.

[0035] Next, the light source module 1 according to the first embodiment will be described. As shown in FIG. 4, a plurality of lenses 21 (a plurality of lenses 21 belonging to the second lens group 21B) are arranged in the second region 20B of the second substrate 20 facing the spacer 30. Therefore, the bonding member 40 can be impregnated into the gaps between adjacent lenses 21 in the second lens group 21B. Accordingly, the tops of all the lenses 21 belonging to the second lens group 21B can be brought into contact with the +Z side surface of the spacer 30. All the lenses 21 belonging to the second lens group 21B are designed to have the same height. Therefore, the second substrate 20 can be supported horizontally on the spacer 30. This improves the positional accuracy in the Z axis direction between the light emitting element 11 and the lenses 21 (the lenses 21 of the first lens 21A) that overlap each other in a plan view. As a result, the optical characteristics of the light L11 can be controlled with high precision.

[0036] Furthermore, in the second substrate 20, the third region 20C, where no lens 21 is arranged, is located next to the second region 20B. Therefore, a portion of the bonding member 40, which is pushed out as the second substrate 20 and the spacer 30 approach each other, can penetrate into a portion of the third region 20C. Because no lens 21 is arranged in the third region 20C, capillary action, which will be described later, does not occur, and the bonding member 40 is prevented from spreading throughout the entire third region 20C. This prevents the bonding member 40 from reaching the first region 20A. As a result, the bonding member 40 does not adhere to the lenses 21 belonging to the first lens group 21A, and changes in the optical properties of the lenses 21 due to the adhesion of the bonding member 40 can be prevented.

[0037] <Manufacturing method> Next, an example of a method for manufacturing the light source module 1 according to the first embodiment of the present invention will be described with reference to Fig. 5 to Fig. 10. Figs. 5 to 7 are schematic cross-sectional views for describing a first example of a method for manufacturing the light source module 1 according to the first embodiment of the present invention. Figs. 8 to 10 are schematic cross-sectional views for describing a second example of a method for manufacturing the light source module 1 according to the first embodiment of the present invention.

[0038] The manufacturing method of the light source module 1 includes the steps of preparing an intermediate 50M having a first substrate 10 and a spacer 30 (hereinafter referred to as the "step of preparing the intermediate 50M"), placing a second substrate 20 on the spacer 30, and bonding the second substrate 20 and the spacer 30.

[0039] First, a first example of a manufacturing method for the light source module 1 according to the first embodiment of the present invention will be described. In the first example, an intermediate 50M including a first substrate 10 and a spacer 30 disposed on the first surface 10a of the first substrate 10 outside the plurality of light emitting elements 11 is prepared. Then, a step of disposing the second substrate 20 on the spacer 30 is performed. Specifically, as shown in FIG. 5 , all of the lenses 21 belonging to the second lens group 21B are brought into contact with the +Z side surface of the spacer 30. For example, if the lenses 21 are convex lenses, the apexes of the lenses 21 are brought into contact with the +Z side surface of the spacer 30. This allows the second substrate 20 to be supported by the spacer 30 in a horizontal state without tilting relative to the +Z side surface of the spacer 30. At this time, it is preferable to apply a load toward the -Z side to the second region 20B of the second substrate 20, for example, to prevent all of the lenses 21 belonging to the second lens group 21B from moving.

[0040] Next, a step of bonding the second substrate 20 and the spacer 30 is performed. As shown in FIG. 6, a bonding fluid 40B corresponding to the uncured bonding member 40 is placed between the second region 20B of the second substrate 20 and the spacer 30. Here, minute spaces are formed as gaps between adjacent lenses 21 in the second lens group 21B. Therefore, when the bonding fluid 40B is introduced between the second region 20B and the spacer 30, the bonding fluid 40B flows into the gaps between adjacent lenses 21 in the second lens group 21B due to capillary action. As a result, the bonding fluid 40B is introduced between the second region 20B and the spacer 30 while the second substrate 20 supported by the spacer 30 remains horizontal.

[0041] If the bonding fluid 40B contains a photocurable resin, then, as shown in FIG. 7, light such as ultraviolet light is irradiated onto the bonding fluid 40B from a light irradiator 61. This hardens the bonding fluid 40B, and the bonding member 40 is formed. In other words, the second substrate 20 and the spacer 30 are bonded via the bonding member 40. Furthermore, if the bonding fluid 40B contains a thermosetting resin, the bonding fluid 40B is heated and hardened. This allows the light source module 1 to be manufactured.

[0042] Since the bonding member 40 is not positioned between the top of the lens 21 and the +Z side surface of the spacer 30, the second substrate 20 supported by the spacer 30 can maintain a horizontal posture even after the bonding member 40 is formed. This prevents a change in the distance between the lens 21 belonging to the first lens group 21A and the light-emitting element 11, which overlap in a plan view, and improves the positional accuracy of the lens 21 and the light-emitting element 11 in the Z-axis direction.

[0043] Next, a second example of a method for manufacturing the light source module 1 according to the first embodiment of the present invention will be described. In the second example, an intermediate 50M including a first substrate 10 and a spacer 30 disposed on the first surface 10a of the first substrate 10 outside the plurality of light emitting elements 11 is prepared, and then a step of bonding the second substrate 20 and the spacer 30 is performed. Specifically, as shown in FIG. 8, before the second substrate 20 and the spacer 30 come into contact with each other, a bonding fluid 40B is applied in advance to the +Z side surface of the spacer 30.

[0044] Next, a step of placing the second substrate 20 on the spacer 30 is performed. Specifically, as shown in FIG. 9 , the second substrate 20 is moved toward the −Z side and brought closer to the spacer 30. Finally, the second substrate 20 is moved toward the −Z side so that the tops of all the lenses 21 belonging to the second lens group 21B come into contact with the surface of the spacer 30 on the +Z side. As a result, the second substrate 20 is supported horizontally on the spacer 30 with the bonding fluid 40B present between the second substrate 20 and the spacer 30.

[0045] If the bonding fluid 40B contains a photocurable resin, then, as shown in FIG. 10, light such as ultraviolet light is irradiated onto the bonding fluid 40B from a light irradiator 61. This hardens the bonding fluid 40B, and the bonding member 40 is formed. In other words, the second substrate 20 and the spacer 30 are bonded via the bonding member 40. Furthermore, if the bonding fluid 40B contains a thermosetting resin, the bonding fluid 40B is heated and hardened. This allows the light source module 1 to be manufactured.

[0046] According to the second example, after the bonding member 40 is formed, the second substrate 20 supported by the spacer 30 can maintain a horizontal posture. This prevents a change in the distance between the lenses 21 belonging to the first lens group 21A and the light-emitting elements 11 that overlap in a plan view, and improves the positional accuracy of the lenses 21 and the light-emitting elements 11 in the Z-axis direction.

[0047] [Second embodiment] Next, a light source module 1A according to a second embodiment of the present invention will be described with reference to FIGS. 11 to 13. FIG. 11 is a plan view schematically illustrating the plane of the light source module 1A according to the second embodiment of the present invention. FIG. 12 is a cross-sectional view schematically illustrating a cross section of the light source module 1A according to the second embodiment of the present invention, taken along line XII-XII shown in FIG. 11. FIG. 13 is a cross-sectional view schematically illustrating a cross section for explaining the height relationship between the lens 21 belonging to the second lens group 21B of the light source module 1A according to the second embodiment of the present invention and the first convex portion. Note that in the second embodiment, components similar to those in the first embodiment are denoted by the same reference numerals, and descriptions thereof will be omitted where appropriate.

[0048] <First protrusion 25> 11 and 12, the light source module 1A according to the second embodiment further includes a first convex portion 25 disposed in the third region 20C of the second substrate 20. The first convex portion 25 is disposed between the first lens group 21A disposed in the first region 20A and the second lens group 21B disposed in the second region 20B. Specifically, the first convex portion 25 is disposed between the first lens group 21A disposed in the first region 20A and the second lens group 21B disposed in the second region 20B on the -X side, and between the first lens group 21A disposed in the first region 20A and the second lens group 21B disposed in the second region 20B on the +X side.

[0049] Each first convex portion 25 protrudes from the base 22 of the second substrate 20 toward the -Z side. As shown in FIG. 11 , the first convex portion 25 has a strip-like shape in which the length in the Y-axis direction is longer than the length in the X-axis direction in a plan view. Also, as shown in FIG. 12 , the -Z side surface of each first convex portion 25 contacts the +Z side surface of the spacer 30. In the example shown in FIG. 12 , the -Z side surface of each first convex portion 25 is a flat surface parallel to the in-plane direction. However, the shape of the -Z side surface of each first convex portion 25 is not limited thereto. By arranging such first convex portions 25 in the third region 20C, even if the heights of the multiple lenses 21 belonging to the second lens group 21B are not exactly the same, tilting of the second substrate 20 supported by the spacer 30 can be suppressed. This further improves the positional accuracy in the Z-axis direction of the light-emitting element 11 and the lenses 21 belonging to the first lens group 21A, which overlap in a plan view. Moreover, the first convex portion 25 can further prevent the bonding member 40 from adhering to the lenses 21 belonging to the first lens group 21A.

[0050] 13, when the height of lens 21 belonging to second lens group 21B is h1 and the height of first convex portion 25 is h2, in order to effectively prevent tilting of second substrate 20 supported by spacer 30, it is preferable that height h1 of lens 21 and height h2 of first convex portion 25 have the relationship shown in formula (1). Note that height h1 is the maximum height of lens 21, and height h2 is the maximum height of the portion of first convex portion 25 that contacts the surface of spacer 30 on the +Z side. h1≦h2≦1.2×h1 (1)

[0051] On the other hand, if the height h2 of the first convex portion 25 is shorter than the height h1 of the lens 21 belonging to the second lens group 21B, i.e., if h1>h2, the lens 21 belonging to the second lens group 21B will contact the +Z side surface of the spacer 30, and since the heights h1 of the lenses 21 are not exactly the same, there is a possibility that the second substrate 20 supported by the spacer 30 will be slightly tilted.

[0052] On the other hand, if the height h2 of the first convex portion 25 is longer than 1.2 times the height h1 of the lens 21 belonging to the second lens group 21B, that is, if h2>1.2×h1, there is a possibility that the bonding member 40 will not completely penetrate into the gaps between the adjacent lenses 21 in the second lens group 21B. This may cause concerns in terms of the bonding strength between the second substrate 20 and the spacer 30 via the bonding member 40.

[0053] The manufacturing method of the light source module 1A according to the second embodiment described above also includes the same steps as the manufacturing method of the light source module 1 according to the first embodiment. That is, the manufacturing method of the light source module 1A includes the steps of preparing an intermediate 50M (see, for example, FIGS. 5 and 8) including a first substrate 10 and a spacer 30, placing a second substrate 20 on the spacer 30, and bonding the second substrate 20 and the spacer 30 together.

[0054] <First Modification> Next, a light source module according to a first modified example of the second embodiment of the present invention will be described with reference to Fig. 14. Fig. 14 is a cross-sectional view schematically showing a cross section of a light source module 1B according to a first modified example of the second embodiment of the present invention taken along the XZ plane.

[0055] As shown in Fig. 14, the second substrate 20 included in the light source module 1B according to the first modification has a fourth region 20D located outside the second region 20B. Specifically, the second substrate 20 has the fourth region 20D located further to the -X side than the second region 20B on the -X side and further to the +X side than the second region 20B on the +X side. No lens 21 is arranged in the fourth region 20D. Furthermore, the second substrate 20 has a second convex portion 26 arranged in the fourth region 20D. Specifically, the second substrate 20 has the second convex portion 26 arranged in each of the fourth region 20D on the -X side and the fourth region 20D on the +X side.

[0056] The second protrusion 26 protrudes from the base 22 of the second substrate 20 toward the -Z side. In a plan view, the second protrusion 26 has a strip-like planar shape whose length in the Y-axis direction is longer than its length in the X-axis direction. As shown in FIG. 14 , the -Z side surface of the second protrusion 26 contacts the +Z side surface of the spacer 30. It is preferable that the second protrusion 26 and the first protrusion 25 have the same height. In the example shown in FIG. 14 , the -Z side surface of the second protrusion 26 is a flat surface parallel to the in-plane direction. However, the shape of the -Z side surface of the second protrusion 26 is not limited thereto. By disposing the second protrusion 26 in the fourth region 20D, tilting of the second substrate 20 supported by the spacer 30 can be more reliably prevented. Furthermore, the bonding member 40 can be prevented from leaking outside the second substrate 20.

[0057] <Second Modification> Next, a light source module according to a second modified example of the second embodiment of the present invention will be described with reference to Fig. 15. Fig. 15 is an enlarged plan view schematically showing a plane of a light source module 1C according to the second modified example of the second embodiment of the present invention.

[0058] As shown in FIG. 15 , the second substrate 20 included in the light source module 1C according to the second modification has a third convex portion 27 disposed between the first convex portion 25 and the second convex portion 26. Specifically, the third convex portion 27 is disposed between the −Y side ends of the first convex portion 25 and the second convex portion 26 and between the +Y side ends of the first convex portion 25 and the second convex portion 26. As a result, the first convex portion 25, the second convex portion 26, and the third convex portion 27 form a frame-shaped convex portion surrounding the second lens group 21B. Providing the third convex portion 27 more reliably prevents the second substrate 20 supported by the spacer 30 from tilting. Furthermore, it more reliably prevents the bonding member 40 from leaking out of the second substrate 20.

[0059] Furthermore, the third convex portion 27 preferably has a communication hole 271 that connects the region in the second region 20B where the lenses 21 belonging to the second lens group 21B are arranged with the outside of the second substrate 20. By providing the communication hole 271 in the third convex portion 27, after the second substrate 20 is brought into contact with the spacer 30, the bonding member 40 (bonding fluid 40B) can be introduced through the communication hole 271 into the region where the lenses 21 belonging to the second lens group 21B are arranged. This makes it possible to easily pour the bonding member 40 (bonding fluid 40B) into the region where the lenses 21 belonging to the second lens group 21B are arranged while the second substrate 20 is supported by the first convex portion 25, the second convex portion 26, and the third convex portion 27. Note that the communication hole 271 may be provided in the second convex portion 26 instead of the third convex portion 27. Furthermore, the communication holes 271 may be provided in both the second protrusion 26 and the third protrusion 27.

[0060] <Third Modification> Next, a light source module according to a third modified example of the second embodiment of the present invention will be described with reference to Fig. 16. Fig. 16 is a cross-sectional view schematically showing a cross section of a light source module 1D according to the third modified example of the second embodiment of the present invention taken along the XZ plane.

[0061] 16, the first protrusion 25 and the second protrusion 26 may have a semi-cylindrical shape with a semicircular cross section. The first protrusion 25 and the second protrusion 26 each protrude from the base 22 toward the -Z side. The tops of the first protrusion 25 and the second protrusion 26 each contact the +Z side surface of the spacer 30.

[0062] 16, when the lens 21 belonging to the second lens group 21B is a convex lens, it is preferable that the curved surface of the lens 21 and the curved surfaces of the first convex portion 25 and the second convex portion 26 each have the same curvature. This allows the lens 21, the first convex portion 25, and the second convex portion 26 to be processed in the same process. In the example shown in FIG. 16, each of the first convex portion 25 and the second convex portion 26 has a semi-cylindrical shape with a semi-circular cross-sectional shape, but the first convex portion 25 or the second convex portion 26 may also have a semi-cylindrical shape with a semi-circular cross-sectional shape.

[0063] <Fourth Modification> Next, a light source module according to a fourth modified example of the second embodiment of the present invention will be described with reference to Fig. 17. Fig. 17 is a cross-sectional view schematically showing a cross section of a light source module 1E according to the fourth modified example of the second embodiment of the present invention, taken along the XZ plane. As shown in Fig. 17, the lenses 21 belonging to the second lens group 21B may have a rectangular cross-sectional shape. Furthermore, the cross-sectional shape of the lenses 21 belonging to the second lens group 21B may be different from the cross-sectional shape of the lenses 21 belonging to the first lens group 21A.

[0064] <Fifth Modification> Next, a light source module according to a fifth modified example of the second embodiment of the present invention will be described with reference to Fig. 18. Fig. 18 is a cross-sectional view schematically showing a cross section of a light source module 1F according to a fifth modified example of the second embodiment of the present invention taken along the XZ plane.

[0065] 18, the lenses 21 belonging to the second lens group 21B may have a wedge-shaped (triangular) cross-sectional shape. The cross-sectional shape of the lenses 21 belonging to the second lens group 21B may be different from the cross-sectional shape of the lenses 21 belonging to the first lens group 21A.

[0066] [Third embodiment] Next, a distance measuring device 100 according to a third embodiment of the present invention will be described with reference to Fig. 19. Fig. 19 is a block diagram schematically showing an example of the overall configuration of the distance measuring device 100 according to the third embodiment of the present invention. Note that in the third embodiment, components similar to those in the first and second embodiments are denoted by the same reference numerals, and descriptions thereof will be omitted where appropriate.

[0067] 19, the distance measuring device 100 includes the light source module 1 according to the first embodiment, a light source drive circuit 120, a first optical element 130, a second optical element 140, a light receiving element 150, and a control circuit 160. The control circuit 160 may be an electronic circuit that controls the operation of the distance measuring device 100, such as a central processing unit (CPU), a field programmable gate array (FPGA), or an application specific integrated circuit (ASIC). The light source module included in the distance measuring device 100 may be the light source module 1A according to the second embodiment or any of the light source modules 1B to 1F according to the modifications of the second embodiment (first to fifth modifications). Hereinafter, the light source modules 1B to 1F according to the modifications of the second embodiment (first to fifth modifications) will be collectively referred to as modifications of the second embodiment.

[0068] The light source drive circuit 120 outputs a drive signal to the light source module 1. The light source module 1 emits light in response to the drive signal. In addition, upon outputting the drive signal to the light source module 1, the light source drive circuit 120 outputs a transmission signal to the control circuit 160 to notify the control circuit 160 that the drive signal has been output to the light source module 1.

[0069] The first optical element 130 widens the irradiation range of the light emitted by the light source module 1. The light emitted by the light source module 1 is irradiated onto the detection target object OB through the first optical element 130. The detection target object OB will hereinafter be referred to as "object OB."

[0070] The light reflected by the object OB is collected by the second optical element 140 and reaches the light receiving element 150. The light receiving element 150 receives the light reflected by the object OB. The light receiving element 150 includes a photoelectric conversion element that converts the received light into an electrical signal. The light receiving element 150 outputs a light receiving signal corresponding to the reception of the reflected light to the control circuit 160.

[0071] The control circuit 160 measures the distance to the object OB from the time difference between the timing of receiving the transmission signal from the light source drive circuit 120 and the timing of receiving the light receiving signal from the light receiving element 150, for example.

[0072] [Fourth embodiment] Next, a wearable display device 200 according to a fourth embodiment of the present invention will be described with reference to Fig. 20 and Fig. 21. Fig. 20 is a block diagram schematically showing an example of the overall configuration of the wearable display device 200 according to the fourth embodiment of the present invention. Fig. 21 is a diagram schematically showing the configuration of the wearable display device 200 according to the fourth embodiment of the present invention in a plan view. Note that in the fourth embodiment, components similar to those in the first and second embodiments are denoted by the same reference numerals, and descriptions thereof will be omitted where appropriate.

[0073] The wearable display device 200 is a display device worn on the user's head, such as a head-mounted display. As shown in Fig. 20 and Fig. 21 , the wearable display device 200 includes a frame 210 having eyeglass lenses 211 and temples 212, a detection mechanism 220 that detects the user's line of sight, and a display unit 230 that displays an image viewed by the user. The wearable display device 200 further includes a control unit 240. The control unit 240 may be an electronic circuit that controls the operation of the wearable display device 200, such as a CPU, FPGA, or ASIC.

[0074] An example of the configuration of the detection mechanism 220 will be described. As shown in Fig. 21 , the detection mechanism 220 includes a first light source module 221, a reflecting mirror 222, and a light receiving element 223. The first light source module 221 may be any of the light source module 1 according to the first embodiment, the light source module 1A according to the second embodiment, and a modified example of the second embodiment.

[0075] 21, the first light source module 221 and the reflecting mirror 222 are arranged on one side and the other side of the user's eyeball 220G in a plan view. The first light source module 221 and the light receiving element 223 are arranged adjacent to each other on the inner wall of the temple 212. However, the positions of the first light source module 221, the reflecting mirror 222, and the light receiving element 223 are not limited to these.

[0076] The light emitted from first light source module 221 is reflected by reflecting mirror 222 and then reaches user's pupil 220D. Furthermore, the light reflected by user's pupil 220D reaches light receiving element 223. Light receiving element 223 outputs a detection signal according to the intensity of the received light to control unit 240. Based on the detection signal from light receiving element 223, control unit 240 obtains information indicating the user's line of sight.

[0077] An example of the configuration of the display unit 230 will be described. As shown in Fig. 20 and Fig. 21 , the display unit 230 includes a second light source module 231, a scanning mirror 232, a deflection mirror 233, and a projection optical element 234. An example of the projection optical element 234 is a holographic optical element. The second light source module 231 may be any of the light source module 1 according to the first embodiment, the light source module 1A according to the second embodiment, and a modified example of the second embodiment.

[0078] 21, from the viewpoint of space saving, size reduction, etc., it is preferable that second light source module 231, scanning mirror 232, and deflection mirror 233 are disposed inside temple 212. However, the positions of second light source module 231, scanning mirror 232, and deflection mirror 233 are not limited to these.

[0079] The light emitted from the second light source module 231 is scanned in a predetermined direction by the scanning mirror 232. This forms an image. The light scanned by the scanning mirror 232 is deflected by the deflection mirror 233 and then reaches the projection optical element 234. The light that has reached the projection optical element 234 travels toward the eyeball 200G and projects an image or video onto the retina in the eyeball 200G. The control unit 240 controls the operations of the scanning mirror 232 and the deflection mirror 233 according to the acquired information indicating the user's line of sight so as to project an image or video onto the retina in the eyeball 200G.

[0080] Although the embodiments have been described above, the present invention is not limited to the above-described embodiments, and various modifications and improvements are possible within the scope of the present invention.

[0081] For example, aspects of the present invention are as follows. <1> a first substrate having a first surface and a plurality of light-emitting elements provided on the first surface side; a second substrate having a second surface facing the first surface, and a plurality of lenses provided on the second surface side and protruding toward the first surface side; a spacer disposed on the first surface outside the plurality of light emitting elements and supporting the second substrate at a position spaced apart from the first substrate; a bonding member that bonds the second substrate and the spacer; Equipped with the second substrate has a first region in which a first lens group facing the plurality of light-emitting elements is disposed among the plurality of lenses, and a second region in which a second lens group facing the spacer is disposed; Light source module. <2> the second substrate further has a third region between the first region and the second region, in which the lens is not disposed; The aforementioned <1> The light source module according to claim 1. <3> the bonding member is located at a position including a gap between the adjacent lenses in the second lens group. The aforementioned <1> or the above <2> The light source module according to claim 1. <4> the second substrate further has a first protrusion that protrudes toward the first surface in the third region and contacts the spacer; The aforementioned <2> The light source module according to claim 1. <5> a surface of the first protrusion that comes into contact with the spacer is a flat surface; The aforementioned <4> The light source module according to claim 1. <6> When the height of each of the lenses belonging to the second lens group is h1 and the height of the first convex portion is h2, the height h1 of the lens and the height h2 of the first convex portion have a relationship represented by formula (1). The aforementioned <4> or the above <5> The light source module according to claim 1. h1≦h2≦1.2×h1 (1) <7> The second substrate comprises: a fourth region located outside the second region in a plan view; The fourth region further includes a second protrusion that protrudes toward the first surface and contacts the spacer. The aforementioned <1> From the above <6> 10. The light source module according to claim 9, wherein: <8> The lenses belonging to the first lens group and the lenses belonging to the second lens group have the same height. The aforementioned <1> From the above <7> 10. The light source module according to claim 9, wherein: <9> A distance measuring device for measuring a distance to an object, The aforementioned <1> From the above <8> a light source module according to any one of the above items; a light receiving element that receives light emitted by the light source module and reflected by the object; Ranging device. <10> The aforementioned <1> From the above <8> a light source module according to any one of A wearable display device that is worn on the user's head. <11> preparing an intermediate body including a first substrate having a first surface and a plurality of light-emitting elements respectively provided on the first surface side, and a spacer disposed on the first surface outside the plurality of light-emitting elements; a step of arranging a second substrate on the spacer, the second substrate having a second surface on which a plurality of lenses are provided, and a first region in which a first lens group on the central side of the plurality of lenses is arranged in a plan view, and a second region in which a second lens group arranged outside the first lens group is arranged, the second substrate being arranged on the spacer such that the second surface and the first surface face each other, the plurality of lenses protrude toward the first surface, and the second lens group and the spacer face each other; a step of hardening the bonding fluid on the spacer to form a bonding member and bond the second substrate and the spacer together, before or after the step of placing the second substrate on the spacer; A method for manufacturing a light source module, comprising: [Explanation of symbols]

[0082] 1,1A,1B,1C,1D,1E,1F Light source module 10 First substrate 10a First Side 11 Light-emitting element 20 Second substrate 20a Second Side 20A 1st area 20B 2nd area 20C 3rd area 20D 4th area 21 Lens 21A First lens group 21B Second lens group 25 First convex part 26 Second convex part 27 Third convex part 30 spacer 40 Joint material 40B Bonding fluid 50M Intermediate 100 Rangefinder 120 Light source driving circuit 130 first optical element 140 Second optical element 150 Photodetector 160 Control circuit 200 Wearable display device 210 frames 220 Detection Mechanism 221 First Light Source Module 222 Reflective mirror 223 Photodetector 230 Display section 231 Second Light Source Module 232 Scanning Mirror 233 Deflecting Mirror 234 Projection optics 240 Control Unit [Prior art documents] [Patent documents]

[0083] [Patent Document 1] Patent Publication No. 2021-2541

Claims

1. a first substrate having a first surface and a plurality of light-emitting elements provided on the first surface side; a second substrate having a second surface facing the first surface, the second substrate having a plurality of lenses provided on the second surface side and protruding toward the first surface side; a spacer disposed on the first surface outside the plurality of light emitting elements and supporting the second substrate at a position spaced apart from the first substrate; a bonding member that bonds the second substrate and the spacer; Equipped with the second substrate has a first region in which a first lens group facing the plurality of light-emitting elements is disposed among the plurality of lenses, and a second region in which a second lens group facing the spacer is disposed; Light source module.

2. the second substrate further has a third region between the first region and the second region, in which the lens is not disposed; The light source module according to claim 1 .

3. the bonding member is located at a position including a gap between adjacent lenses in the second lens group. The light source module according to claim 1 or 2.

4. the second substrate further has a first protrusion that protrudes toward the first surface in the third region and contacts the spacer; The light source module according to claim 2 .

5. a surface of the first protrusion that comes into contact with the spacer is a flat surface; The light source module according to claim 4 .

6. When the height of each of the lenses belonging to the second lens group is h1 and the height of the first convex portion is h2, the height h1 of the lens and the height h2 of the first convex portion have a relationship represented by formula (1). The light source module according to claim 4 . h1≦h2≦1.2×h1 (1)

7. The second substrate comprises: a fourth region located outside the second region in a plan view; The fourth region further includes a second protrusion that protrudes toward the first surface and contacts the spacer. The light source module according to claim 1 or 2.

8. the lenses belonging to the first lens group and the lenses belonging to the second lens group have the same height. The light source module according to claim 1 or 2.

9. A distance measuring device for measuring a distance to an object, The light source module according to claim 1 or 2; a light receiving element that receives light emitted by the light source module and reflected by the object; Ranging device.

10. A light source module according to claim 1 or 2 is provided, A wearable display device that is worn on the user's head.

11. preparing an intermediate body including a first substrate having a first surface and a plurality of light-emitting elements respectively provided on the first surface side, and a spacer disposed on the first surface outside the plurality of light-emitting elements; a step of arranging a second substrate on the spacer, the second substrate having a second surface on which a plurality of lenses are provided, and a first region in which a first lens group on the central side of the plurality of lenses is arranged in a plan view, and a second region in which a second lens group arranged outside the first lens group is arranged, the second substrate being arranged on the spacer such that the second surface and the first surface face each other, the plurality of lenses protrude toward the first surface, and the second lens group and the spacer face each other; a step of hardening the bonding fluid on the spacer to form a bonding member and bond the second substrate and the spacer together, before or after the step of placing the second substrate on the spacer; A method for manufacturing a light source module, comprising:

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