Insert for Spacing within a Reticle Container

Abstract

The spacer includes a base configured to be disposed within a recess in either the cover or the base plate of the reticle pod, and a contact surface configured to contact the other of the cover and the base plate. The spacer is configured to space the cover and the base plate apart from each other such that the sealing surfaces of the cover and the base plate are separated by a gap. The recess can be a gripper pocket of the base plate. A plurality of spacers can be used within the reticle pod to provide a gap between the sealing surfaces. The spacer can be installed to prepare the reticle pod for shipment.

Description

Technical Field

[0001] The present disclosure relates to an insert for separating portions of a reticle container from each other.

Background Art

[0002] Reticle containers can include a rigid contact surface. When reticle containers are shipped, they are typically shipped in a fully assembled state. During transportation, the contact surfaces can be subject to impacts and / or vibrations beyond the normal handling and operation of the reticle pod, leading to wear, damage, and generation of particles that can affect the cleanliness or other performance of the reticle pod.

Summary of the Invention

[0003] The present disclosure relates to an insert for separating portions of a reticle container from each other.

[0004] By providing a spacer disposed within the internal space of a reticle container, such as an inner pod of a reticle pod, a gap can be maintained between the contact surfaces while the reticle pod is shipped in an assembled state. The presence of such a gap can reduce or eliminate wear or damage resulting from impacts or vibrations received during transportation of the reticle container. The gap can be sized such that the reticle container can still be fully assembled, for example, with the inner pod being received within the outer pod of the complete reticle container during such transportation. Thereby, even when shipped as a complete container, the reticle container can be shipped with reduced risk of damage or particle generation.

[0005] In one embodiment, the article includes a spacer for a reticle pod. The spacer includes a spacer base configured to engage a recess formed in one of a cover or a base plate of the reticle pod, and a spacer contact surface configured to contact the other of the cover or the base plate. The contact surface is configured to space the cover from the base plate such that a seal surface included in the cover and the base plate are spaced apart from each other by a gap.

[0006] In one embodiment, the gap has a width in the range of 20 μm to 1 mm.

[0007] In one embodiment, the spacer includes a thermoplastic such as polycarbonate (PC), polyetheretherketone (PEEK), perfluoroalkoxy (PFA), and high density polyethylene (HDPE).

[0008] In one embodiment, the recess is a gripper pocket formed within a first inner pod segment.

[0009] In one embodiment, the spacer further includes a handling mechanism extending from the body.

[0010] In one embodiment, the reticle pod includes an inner pod including a base plate and a cover, and one or more spacers. Each spacer includes a base configured to engage a recess formed in one of the base plate or the cover, and a contact surface configured to contact the other of the base plate or the cover. The contact surface is configured to space the base plate from the cover such that a base plate seal surface included in the base plate and a cover seal surface included in the cover are spaced apart from each other by a gap.

[0011] In one embodiment, the gap has a width in the range of 20 μm to 1 mm.

[0012] In one embodiment, the reticle pod further includes an outer pod configured to accommodate an inner pod and one or more spacers.

[0013] In one embodiment, the recess is a gripper pocket formed in the base plate, and the contact surface is configured to contact the cover.

[0014] In one embodiment, the spacer further includes a handling mechanism extending from the body.

[0015] In one embodiment, the one or more spacers include a plurality of spacers. In one embodiment, at least two of the plurality of spacers are joined to each other by at least one handling mechanism.

[0016] In one embodiment, the spacer contacts the cover only outside the cover sealing surface and contacts the base plate only outside the base plate sealing surface.

[0017] A method for preparing a reticle pod for shipment includes placing one or more spacers in a recess formed in one of the cover or the base plate of the reticle pod, and assembling the cover and the base plate to form an inner pod of the reticle pod. The spacer contacts the cover and the base plate. The cover and the base plate are separated by a gap.

[0018] In one embodiment, the gap has a width in the range of 20 μm to 1 mm.

[0019] In one embodiment, the recess is a gripper pocket formed in the base plate, and the contact surface is configured to contact the cover.

[0020] In one embodiment, the cover includes one or more cover sealing surfaces, the base plate includes one or more base plate sealing surfaces, the spacer contacts the cover only outside the cover sealing surface, and contacts the base plate only outside the base plate sealing surface.

[0021] In one embodiment, the method further includes disposing an inner pod within an outer pod that includes a pod dome and a pod door, and joining the pod dome to the pod door to enclose the inner pod of the reticle pod within the outer pod. In one embodiment, the method further includes transporting the reticle pod from a packing position to a destination position while the pod dome is joined to the pod door. In one embodiment, the method further includes removing a spacer from the reticle pod at the destination position. BRIEF DESCRIPTION OF THE DRAWINGS

[0022]

Figure 1

Figure 2

Figure 3

Figure 4

[0023] The present disclosure relates to an insert for separating portions of a reticle container from each other.

[0024] FIG. 1 shows a reticle container according to one embodiment. The reticle container 100 includes an outer pod 102 that includes a pod dome 104 and a pod door 106. The reticle container 100 further includes an inner pod 108 that includes a cover 110 and a base plate 112. One or more spacers 114 can be disposed within the inner pod 108.

[0025] The outer pod 102 forms the outside of the reticle container 100. The outer pod 102 is configured to accommodate the inner pod 108. When the reticle container 100 is shipped to a destination, the reticle container can be assembled together with the inner pod 108 housed within the outer pod 102. The outer pod 102 can be composed of a pod dome 104 and a pod door 106.

[0026] The inner pod 108 is the inner pod of the reticle container 100 configured to accommodate a reticle. The inner pod includes a cover 110 and a base plate 112. The cover 110 and the base plate 112 can be configured to contact each other during typical use, for example, with corresponding sealing surfaces provided on each of the cover 110 and the base plate 112. The cover 110 and the base plate 112 can be manufactured from a metallic material and further can have, for example, a metal plating on at least some of the sealing surfaces. The cover 110 and the base plate 112 can be spaced apart from each other at other times, for example, during storage or shipping, using one or more of the spacers 114.

[0027] The spacer 114 can be included in the reticle container 100 to space the cover 110 and the base plate 112 apart from each other when the inner pod 108 is assembled. The spacer 114 can include one or more spacing contacts configured to engage a recess formed in one of the cover 110 or the base plate 112 and contact the other of the cover 110 or the base plate 112 to space the cover 110 and the base plate 112 apart from each other. The recess can be any suitable indentation or recess formed in the cover 110 or the base plate 112. In one embodiment, the recess can be included particularly for accommodating the spacer 114. In one embodiment, the recess can be an existing feature of the cover 110 or the base plate 112, such as a gripper pocket, a gripper exclusion zone, a pellicle indentation, or any other such feature of the cover 110 or the base plate 112. The fit between the spacer 114 and the recess is such that the spacer 114 can be easily placed into or removed from the recess. In one embodiment, the spacer 114 is not attached to or fixed in the recess. The spacer 114 can stay within the recess like the spacer 114. The spacer 114 can be configured to be removable from the recess by manual or automated handling of the spacer 114. The spacer 114 can contact the cover 110 and the base plate 112 such that their respective sealing surfaces remain separated by a gap. This gap is such that the cover 110 and the base plate 112 do not contact each other when the spacer 114 is installed in the inner pod 108. In one embodiment, the gap can be maintained when the cover 110 and the base plate 112 are assembled together with the spacer 114 in place and disposed within the outer pod 102. When the inner pod 108 is disposed within the outer pod 102 and the outer pod 102 is closed, the gap can have a size ranging from 20 micrometers (μm) to 1 millimeter (mm).In one embodiment, the spacer 114 can include one or more spring members configured to increase the size of the gap when the inner pod 108 is not contained within the outer pod 102, relative to the size of the gap maintained when the inner pod 108 is contained within the outer pod 102.

[0028] FIG. 2 shows an inner pod of a reticle according to one embodiment. The inner pod 200 includes a cover 202 having a cover sealing surface 204 and a base plate 206 having a recess 208 and a base plate sealing surface 210. The spacer 212 includes a base 214 and a contact surface 216.

[0029] The cover 202 is a cover of the inner pod 200. When joined to the base plate 206, the cover 202 is configured to define an internal space that can accommodate the reticle. The inner pod 200 can be used within a reticle pod, such as the reticle pod 100 shown in FIG. 1 and described above. In one embodiment, the inner pod 200 can be contained within an outer pod, such as the outer pod 102 shown in FIG. 1 and as described above. The cover 202 has a cover sealing surface 204. The cover sealing surface 204 is a portion of the cover 202 configured to contact a corresponding position on the base plate sealing surface 210 during normal use of the inner pod 200 to contain the reticle. The cover sealing surface 204 can be positioned to correspond to the base plate contact surface 210.

[0030] The base plate 206 is the base plate of the reticle pod 200. When joined with the cover 202, the base plate 206 is configured to define an internal space capable of accommodating a reticle. The base plate 206 includes one or more recesses 208. The recess 208 is an indentation into the base plate 206. The recess 208 can have any suitable shape and depth. The recess 208 can be a feature included in accordance with reticle pod specifications, such as a gripper pocket configured to allow automation to access the bottom surface of a reticle stored in the inner pod 200. The base plate sealing surface 210 is configured such that the reticle pod 200 contacts the cover sealing surface 204 during normal use, for example, to contain a reticle. The base plate sealing surface is configured to correspond to the cover sealing surface 204.

[0031] The spacer 212 can be included in the inner pod 200 to space the cover 202 from the base plate 206. The spacer 212 can be an article that includes a base 214 on one side and a contact surface 216 provided on the side opposite the base 214. The base 214 is configured to be received in one of the recesses 208 included in the base plate 206. The base can be shaped and sized to fit securely within the corresponding recess 208, for example, with very little or no play in the space. The contact surface 216 is on the side of the spacer 212 opposite the base 214. The distance from the base 214 to the contact surface 216 is such that when the base is installed in the recess 208 and the contact surface 216 contacts the cover, a gap having a width is formed between the cover sealing surface 204 and the base plate sealing surface 210. The inner pod 200 can be disposed in an outer pod such as the outer pod 102 to maintain the gap even when the outer pod is closed. The spacer 214 can be any suitable material selected based on the potential for particle generation when used with the materials of the cover 202 and the base plate 206. Non-limiting examples of suitable materials include polyolefins. In one embodiment, the spacer 214 can include high-density polyethylene or can be made entirely of high-density polyethylene. In one embodiment, the spacer 214 can include polycarbonate or can be made entirely of polycarbonate. In one embodiment, the spacer 214 can include polyether ether ketone or can be made entirely of polyether ether ketone. In one embodiment, the spacer 214 can include perfluoroalkoxy or can be made entirely of perfluoroalkoxy. In one embodiment, the spacer 214 can be made of a compressible material such that a gap having a first width is maintained when the cover 202 and the base plate 206 are pressed together by an outer pod containing an inner pod 200 such as the outer pod 102 as described above and shown in FIG. 1.In this embodiment, when the inner pod 200 is not compressed, for example, when the cover 202 stays on the spacer 214 due to gravity and the inner pod 200 is not pressed by contact with the outer pod, a gap having a second width larger than the first can be provided.

[0032] The spacer 214 can be included in the inner pod 200 when it is desirable to separate the cover 202 from the base plate 206, for example, when transporting or storing the inner pod 200. In one embodiment, when it is desired to separate the cover 202 from the base plate 206, at least three spacers 214 are included in the inner pod 200.

[0033] FIG. 2 shows the recess 208 formed in the base plate 206 and the contact surface 216 that contacts the cover 202, but these can be reversed in an embodiment, where instead the recess 208 is formed in the cover 202, the base 214 is inserted into this recess 208, and the contact surface 216 contacts the base plate 204.

[0034] Figure 3 shows a perspective view of a spacer according to an embodiment. The spacer 300 includes a main body 302 including a base 304 on one side and a contact surface 306 on the side opposite to the base 304. The main body 302 is configured to be inserted into one of the recesses of the cover of the reticle pod or the base plate and to contact the other of the cover or the base plate such that the cover and the base plate are separated from each other by a gap. The main body 302 can include any suitable material such as a polyolefin. Non-limiting examples of the material of the main body 302 include high-density polyethylene or polycarbonate. In one embodiment, the main body 302 can include a compressible elastic material. The elastic material can be selected such that a first gap size is maintained when the spacer 300 separates the cover and the base plate without applying additional force, and a second gap size is maintained when the cover and the base plate are pressed together by an outer pod containing the cover and the base plate. The second gap can be smaller than the first gap. In one embodiment, instead of the elastic material, the contact surface 306 can be connected to the main body 302 by a flexible member such as a spring arm 308 to provide the first and second gap sizes. The main body 302 includes a base 304 configured to be received in a recess formed in one of the cover or the base plate. For example, the base 304 can be received in a gripper pocket formed in the base plate of the inner pod where the spacer 300 is installed. The main body 302 also includes a contact surface 306 facing the base 304. The contact surface is configured to contact the other of the cover or the base plate such that the spacer 300 contacts both the cover and the base plate of the inner pod where the spacer 300 is installed. The distance from the base 304 to the contact surface 306 is selected such that when the base 304 contacts one of the cover or the base plate and the contact surface 306 contacts the other of the cover or the base plate, the cover and the base plate are spaced apart from each other. The spacing between the cover and the base plate due to contact with the spacer 300 is a spacing such that a gap exists between the sealing surfaces of the cover and the base plate. In one embodiment, the gap has a width in the range of 20 μm to 1 mm.The body 302 of the spacer 300 can include a handling mechanism 310 configured to enable operation of the spacer 300. In the embodiment shown in FIG. 3, the handling mechanism 310 is a protrusion that extends vertically above the contact surface 306. In an embodiment, the handling mechanism can alternatively include a horizontal protrusion, a flange, or the like. In an embodiment, the handling mechanism 310 is configured to be engaged by a user, for example, by a handle for gripping. In an embodiment, the handling mechanism is configured to be operated by automation and provides, for example, a flange, a tab, a groove, a recess, an opening, or the like configured to interface with an automated handling device such as a robotic arm.

[0035] FIG. 4 shows a spacer according to an embodiment. The spacer 400 includes a plurality of spacer bodies 402 having a base 404 and a contact surface 406. A handling mechanism 408 connects at least two of the plurality of spacer bodies.

[0036] The spacer 400 includes a plurality of spacer bodies 402. The spacer body 402 is inserted into one of the recesses of the cover of the reticle pod or the base plate, and is configured to contact the other of the cover and the base plate so that the cover and the base plate are separated from each other by a gap. The spacer body 402 can include any suitable material such as a polyolefin. Non-limiting examples of the material of the spacer body 402 include high density polyethylene, perfluoroalkoxy, polyetheretherketone, or polycarbonate. In one embodiment, the spacer body 402 can include a compressible elastic material. The elastic material can be selected such that a first gap size is maintained when the spacer 400 separates the cover and the base plate without applying additional force, and a second gap size is maintained when the cover and the base plate are pressed together by the outer pod containing the cover and the base plate. The second gap can be smaller than the first gap. The spacer body 402 includes a base 404 configured to be received in a recess formed in one of the cover or the base plate. For example, the base 404 can be received in a gripper pocket formed in the base plate of the inner pod where the spacer 400 is installed. The body 402 also includes a contact surface 406 on the opposite side of the base 404. The contact surface is configured to contact the other of the cover and the base plate such that the spacer 400 contacts both the cover and the base plate of the inner pod where the spacer 400 is installed. The distance from the base 404 to the contact surface 406 is selected such that when the base 404 contacts one of the cover or the base plate and the contact surface 406 contacts the other of the cover or the base plate, the cover and the base plate are separated from each other. The interval for separating the cover and the base plate by contact with the spacer 400 is an interval such that a gap exists between the sealing surfaces of the cover and the base plate. In one embodiment, the gap has a width in the range of 20 μm to 1 mm.

[0037] The handling mechanism 408 can join two or more of the spacer bodies 402. The handling mechanism 408 can be configured to facilitate the handling of the spacer 400, for example, by providing a surface that can be gripped by a user or an automated tool such as a robotic arm to place or remove the spacer body 402 from each recess in which the spacer body 402 is received. In the embodiment shown in FIG. 4, the handling mechanism 408 is a tab 410 that protrudes from the handling mechanism 408. The handling mechanism 408 can extend so as to be completely disposed within the internal space of the inner pod in which the spacer 400 is installed. The handling mechanism 408 can be configured to avoid contact with the cover and the base plate of the inner pod when the spacer 400 is installed. In one embodiment, at least a portion of the handling mechanism 408 can contact one of the cover or the base plate of the inner pod when the spacer 400 is installed. In one embodiment, the handling mechanism 408 can contact the cover or the base plate of the inner pod such that a gap is formed between the cover and the base plate when the inner pod contains the spacer 400 and the inner pod is not contained within the outer pod. The gap provided by the contact between the handling mechanism 408 and the cover or the base plate can be larger than the gap maintained by the spacer body 402 when the inner pod is contained within a larger pod. In one embodiment, the base 404 can be sized to be smaller than the recess 412 of the base plate 410 such that there is a space within the recess 412 that allows a user or an automated tool to reach under the handling mechanism 408 to lift the spacer 400 from the base plate 410.

[0038] Aspect It is understood that any of Aspects 1-5 can be combined with any of Aspects 6-13 or any of Aspects 14-20. It is understood that any of Aspects 6-13 can be combined with any of Aspects 14-20.

[0039] An article comprising a spacer for a reticle pod, the spacer comprising: a base of the spacer configured to engage a recess formed in one of a cover or a base plate of the reticle pod; and a contact surface of the spacer configured to contact the other of the cover or the base plate, the contact surface being configured to separate the cover from the base plate such that a sealing surface included in the cover and a sealing surface included in the base plate are spaced apart from each other by a gap. The article.

[0040] The article according to aspect 1, wherein the gap has a width in the range of 20 μm to 1 mm.

[0041] The article according to any one of aspects 1 to 2, wherein the spacer comprises a thermoplastic such as polycarbonate, polyetheretherketone, perfluoroalkoxy, and high density polyethylene.

[0042] The article according to any one of aspects 1 to 3, wherein the recess is a gripper pocket formed within a first inner pod segment.

[0043] The article according to claim 1, wherein the spacer further comprises a handling mechanism extending from the body.

[0044] A reticle pod, comprising: an inner pod including a base plate and a cover; and one or more spacers, each spacer comprising: a base configured to engage a recess formed in one of the base plate or the cover; and a contact surface configured to contact the other of the base plate or the cover, the contact surface being configured to separate the base plate from the cover such that a base plate sealing surface included in the base plate and a cover sealing surface included in the cover are spaced apart from each other by a gap. Reticle pod.

[0045] Aspect 7: The reticle pod according to aspect 6, wherein the gap has a width in the range of 20 μm to 1 mm.

[0046] Aspect 8: The reticle pod according to any one of aspects 6 to 7, further comprising an outer pod configured to accommodate an inner pod and one or more spacers.

[0047] Aspect 9: The reticle pod according to any one of aspects 6 to 8, wherein the recess is a gripper pocket formed in the base plate, and the contact surface is configured to contact the cover.

[0048] Aspect 10: The reticle pod according to any one of aspects 6 to 9, wherein the spacer further comprises a handling mechanism extending from the body.

[0049] Aspect 11: The reticle pod according to any one of aspects 6 to 10, wherein one or more spacers include a plurality of spacers.

[0050] Aspect 12: The reticle pod according to aspect 11, wherein at least two of the plurality of spacers are joined to each other by at least one handling mechanism.

[0051] Aspect 13: The reticle pod according to any one of aspects 6 to 12, wherein the spacer contacts the cover only outside the cover sealing surface and contacts the base plate only outside the base plate sealing surface.

[0052] Aspect 14: A method of preparing a reticle pod for shipment, comprising: placing one or more spacers in a recess formed in either the cover or the base plate of the reticle pod; assembling the cover and the base plate to form an inner pod of the reticle pod, wherein the spacer contacts the cover and the base plate to form the inner pod; and A method in which a cover and a base plate are separated by a gap.

[0053] The method according to aspect 14, wherein the gap has a width in the range of 20 μm to 1 mm.

[0054] The method according to any one of aspects 14 to 15, wherein the recess is a gripper pocket formed in the base plate, and the contact surface is configured to contact the cover.

[0055] The method according to any one of aspects 14 to 16, wherein the cover includes one or more cover sealing surfaces, the base plate includes one or more base plate sealing surfaces, the spacer contacts the cover only outside the cover sealing surface, and contacts the base plate only outside the base plate sealing surface.

[0056] The method according to any one of aspects 14 to 17, further including arranging an inner pod within an outer pod including a pod dome and a pod door, and joining the pod dome to the pod door to enclose the inner pod of the reticle pod within the outer pod.

[0057] The method according to aspect 18, further including transporting the reticle pod from a packing position to a target position while the pod dome is joined to the pod door.

[0058] The method according to aspect 19, further including removing the spacer from the reticle pod at the target position.

[0059] The examples disclosed in this application should be regarded as illustrative rather than restrictive in every respect. The scope of the present invention is indicated by the appended claims rather than the above description, and all modifications occurring within the meaning and equivalent scope of the claims are intended to be included herein.

Claims

Claim 1 An article comprising a spacer for a reticle pod, wherein the spacer comprises a base of the spacer configured to engage a recess formed in one of a cover or a base plate of the reticle pod, and a contact surface of the spacer configured to contact the other of the cover or the base plate, wherein the contact surface is configured to space the cover apart from the base plate such that a sealing surface included in the cover and a sealing surface included in the base plate are spaced apart from each other by a gap, the article. Claim 2 The article according to claim 1, wherein the gap has a width in the range of 20 μm to 1 mm. Claim 3 The article according to claim 1, wherein the spacer comprises a thermoplastic plastic. Claim 4 The article according to claim 1, wherein the recess is a gripper pocket formed within a first inner pod segment. Claim 5 The article according to claim 1, wherein the spacer further comprises a handling mechanism extending from a body. Claim 6 A reticle pod comprising an inner pod including a base plate and a cover, and one or more spacers, each spacer comprising a base configured to engage a recess formed in one of the base plate or the cover, and a contact surface configured to contact the other of the base plate or the cover, wherein the contact surface is configured to space the base plate apart from the cover such that a base plate sealing surface included in the base plate and a cover sealing surface included in the cover are spaced apart from each other by a gap, the reticle pod. Claim 7 The reticle pod according to claim 6, wherein the gap has a width in the range of 20 μm to 1 mm. Claim 8 The reticle pod according to claim 6, further comprising an outer pod configured to accommodate the inner pod and the one or more spacers. Claim 9 The reticle pod according to claim 6, wherein the recess is a gripper pocket formed within the base plate, and the contact surface is configured to contact the cover. Claim 10 The reticle pod according to claim 6, wherein the spacer further comprises a handling mechanism extending from a body. Claim 11 The reticle pod according to claim 6, wherein the one or more spacers include a plurality of the spacers. Claim 12 The reticle pod according to claim 11, wherein at least two of the plurality of spacers are joined to each other by at least one handling mechanism.

13. The reticle pod according to claim 6, wherein the spacer contacts the cover only outside the cover sealing surface and contacts the base plate only outside the base plate sealing surface.

14. A method of preparing a reticle pod for shipment, comprising: placing one or more spacers in a recess formed in one of a cover or a base plate of the reticle pod; assembling the cover and the base plate to form an inner pod of the reticle pod, wherein the spacer contacts the cover and the base plate to form the inner pod; including the cover and the base plate are separated by a gap; method.

15. The method according to claim 14, wherein the gap has a width in the range of 20 μm to 1 mm.

16. The method according to claim 14, wherein the recess is a gripper pocket formed in the base plate, and the contact surface is configured to contact the cover.

17. The method according to claim 14, wherein the cover includes one or more cover sealing surfaces, the base plate includes one or more base plate sealing surfaces, the spacer contacts the cover only outside the cover sealing surface, and the spacer contacts the base plate only outside the base plate sealing surface.

18. further comprising placing the inner pod in an outer pod including a pod dome and a pod door; joining the pod dome to the pod door to enclose the inner pod of the reticle pod within the outer pod.

19. The method according to claim 18, further comprising transporting the reticle pod from a packing position to a destination position while the pod dome is joined to the pod door.

20. The method according to claim 19, further comprising removing the spacer from the reticle pod at the destination position.

Images