Valve, fluid control device, pressure device, and blood pressure monitor

Abstract

A valve (11) comprises a casing, a film (80), and a hole (800). The casing has a flat plate (41) having a hole (400) capable of communicating with an external pump (12), a casing member (70) having a hole (700) capable of communicating with a component to be discharged of fluid, and a valve chamber enclosed between the casing member (70) and a casing member (40) including the flat plate (41). The film (80) divides the valve chamber in a space on the flat plate (41) side and a space on the casing member (70) side. The hole (800) allows communication between the space on the flat plate (41) side and the space on the casing member (70) side. The casing member (70) has a hole (790) that can communicate with the exterior of the casing and that allows fluid to be discharged from the valve chamber. When viewed in a first direction of the casing in which the flat plate (41), the film (80), and the casing member (70) are aligned, the film (80), the valve-chamber-side open surface of the hole (400), and the valve-chamber-side open surface of the hole (790) overlap, the hole (800), the valve-chamber-side open surface of the hole (400), and the valve-chamber-side open surface of the hole (790) do not overlap, and the valve-chamber-side open surface of the hole (400) and the valve-chamber-side open surface of the hole (790) overlap at least partially.

Description

[Technical field]

[0001] The present invention relates to a valve that rectifies the flow of a fluid by using a deformable membrane, and a fluid control device including this valve. [Background technology]

[0002] Patent Document 1 describes a fluid control device that includes a piezoelectric pump and a check valve (valve). An air vent, a communication hole, a quick exhaust hole, and a check valve hole are formed in the housing of the check valve (valve). The air vent communicates with the piezoelectric pump. The communication hole and the check valve hole communicate with a cuff outside the fluid control device. The quick exhaust hole communicates with the outside of the housing of the check valve.

[0003] The housing includes a first wall and a second wall that are parallel to each other. The vent hole and the check valve hole are formed in the first wall. The communication hole and the quick exhaust hole are formed in the second wall.

[0004] The housing further includes a diaphragm that divides the interior space of the housing into a first wall-side space and a second wall-side space.

[0005] The diaphragm deforms with the flow of fluid, switching between supplying gas to the cuff and expelling gas through the quick exhaust hole. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] International Publication No. 2012 / 141113 Summary of the Invention [Problem to be solved by the invention]

[0007] However, when a conventional diaphragm (membrane) functioning as a check valve as shown in Patent Document 1 is used, a problem may arise in that the diaphragm (membrane) vibrates when gas is discharged using the quick exhaust hole.

[0008] SUMMARY OF THE PRESENTLY PREFERRED EMBODIMENTS It is therefore an object of the present invention to suppress vibration of the membrane when gas is exhausted using a quick exhaust hole. [Means for solving the problem]

[0009] The valve of the present invention includes a housing, a membrane, and a communication passage. The housing has a first wall having a first hole that can communicate with an external pump, a second wall having a second hole that can communicate with a component that discharges fluid, and a valve chamber sandwiched between the first and second walls that face each other. The membrane divides the valve chamber into a space on the first wall side and a space on the second wall side. The communication passage connects the space on the first wall side and the space on the second wall side.

[0010] The second wall has a third hole that can communicate with the outside of the housing and can discharge the fluid from the valve chamber. When viewed in a first direction of the housing in which the first wall, the membrane, and the second wall are aligned, the membrane, the opening surface of the first hole on the valve chamber side, and the opening surface of the third hole on the valve chamber side overlap, and the communication passage does not overlap with the opening surface of the first hole on the valve chamber side and the opening surface of the third hole on the valve chamber side, and the opening surface of the first hole on the valve chamber side and the opening surface of the third hole on the valve chamber side at least partially overlap.

[0011] In this configuration, at the initial stage of fluid discharge from the second hole to the third hole, a flow path (first flow path) that reaches the second hole to the third hole, and a flow path (second flow path) that reaches the first hole through the connecting passage are formed, the membrane remains in a midway position between the first hole and the third hole, and the fluid flows at approximately the same flow rate in the first flow path and the second flow path.

[0012] This suppresses rapid changes in the cross-sectional area and flow rate of the first flow path. Therefore, the membrane is prevented from being drawn toward the third hole after it has deformed to approach the first hole. This action suppresses the vibration of the membrane.

[0013] After this, since the first flow path has a smaller pressure loss than the second flow path, more of the fluid flows into the first flow path, and the membrane covers the opening of the first hole. This causes the fluid to be discharged from the third hole. Therefore, since the membrane closes the first hole with almost no vibration, the fluid is discharged from the third hole more stably and at higher speed. Effect of the Invention

[0014] According to this invention, it is possible to suppress vibration of the membrane when gas is discharged using the quick exhaust hole. [Brief description of the drawings]

[0015] [Figure 1] FIG. 1 is a schematic side cross-sectional view showing the configuration of a fluid control device according to a first embodiment. [Diagram 2] FIG. 2 is a diagram showing a state in which a cuff is attached to the fluid control device according to the first embodiment. [Diagram 3] FIG. 3(A) is an enlarged side cross-sectional view of a portion of the valve according to the first embodiment, and FIG. 3(B) is a perspective plan view showing the relationship between each hole and the membrane. [Figure 4] FIG. 4 is a diagram showing the flow of gas when gas is being supplied to the cuff, and is an enlarged side cross-sectional view of a part of the valve. [Diagram 5] 5(A) and 5(B) are diagrams showing the flow of gas during the operation of discharging gas from the cuff, and are enlarged side cross-sectional views of a part of the valve. [Figure 6] FIG. 6 is a schematic side cross-sectional view showing the configuration of a fluid control device according to a second embodiment. [Figure 7] FIG. 7(A) is an enlarged side cross-sectional view of a portion of a valve according to a second embodiment, and FIG. 7(B) is a perspective plan view showing the relationship between each hole and the membrane. [Figure 8] FIG. 8(A) is an enlarged side cross-sectional view of a portion of a valve according to a third embodiment, and FIG. 8(B) is a perspective plan view showing the relationship between each hole and the membrane. [Figure 9]FIG. 9 is a diagram showing the flow of gas during the operation of discharging gas from the cuff, and is an enlarged side cross-sectional view of a part of the valve. [Figure 10] FIG. 10(A) is an enlarged side cross-sectional view of a portion of a valve relating to a fourth embodiment, and FIG. 10(B) is an enlarged side cross-sectional view of a portion of the valve, showing the flow of gas during the operation of discharging gas from the cuff. [Figure 11] Figure 11(A) is an enlarged side cross-sectional view of a portion of a valve relating to the fifth embodiment, Figure 11(B) is a diagram showing the flow of gas during the operation of supplying gas to the cuff, and Figure 11(C) is a diagram showing the flow of gas during the operation of discharging gas from the cuff, both being enlarged side cross-sectional views of a portion of the valve. [Figure 12] FIG. 12 is a schematic side cross-sectional view showing the configuration of a fluid control device according to a sixth embodiment. [Figure 13] FIG. 13 is a schematic side cross-sectional view showing the configuration of a fluid control device according to the seventh embodiment. [Figure 14] FIG. 14 is a schematic side cross-sectional view showing the configuration of a fluid control device according to the eighth embodiment. [Figure 15] FIG. 15 is a schematic side cross-sectional view showing the configuration of a fluid control device according to a ninth embodiment. [Figure 16] 16(A) and 16(B) are diagrams showing examples of the positional relationship between the hole communicating with the pump, the hole for discharging gas, and the membrane. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0016] [First embodiment] A valve and a fluid control device according to a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a schematic side cross-sectional view showing the configuration of the fluid control device according to the first embodiment. FIG. 2 is a view showing a state in which a cuff is attached to the fluid control device according to the first embodiment. In each embodiment including this embodiment, the shapes of each component are partially or entirely exaggerated in each drawing to make the configuration of the valve and the fluid control device easier to understand. In addition, although an embodiment using a gas (e.g., air) as a fluid is shown below, the configuration of the present invention can also be applied to, for example, a liquid.

[0017] As shown in Figures 1 and 2, a fluid control device 10 includes a valve 11 and a pump 12. The valve 11 and the pump 12 share common members and are integrally formed. A cuff 2 is connected to the valve 11. The cuff 2 corresponds to the "part to which fluid is discharged" of the present invention.

[0018] Generally speaking, when gas is to be supplied to the cuff 2, the pump 12 is driven and gas is supplied from the pump 12 into the valve 11. The gas supplied into the valve 11 is discharged into the cuff 2 from a hole 700 of the valve 11. On the other hand, when gas is to be discharged from the cuff 2, the driving of the pump 12 is stopped. The gas from the cuff 2 flows from the hole 700 into the valve 11 and is discharged through the hole 790 to the outside of the valve 11, in other words, to the outside of the fluid control device 1.

[0019] (Valve 11) Fig. 3(A) is an enlarged side cross-sectional view of a portion of the valve according to the first embodiment, and Fig. 3(B) is a perspective plan view showing the relationship between each hole and the membrane. The specific configuration of valve 11 will be described below with reference to Figs. 1, 2, 3(A) and 3(B).

[0020] The valve 11 comprises a housing member 40 , a housing member 70 , a membrane 80 , and a retaining plate 90 .

[0021] The housing member 40 includes a flat plate 41 and a side wall 42, and is made of metal, resin, etc. The flat plate 41 corresponds to the "first wall" of the present invention.

[0022] The side wall 42 is connected to the outer edge of the flat plate 41. The side wall 42 is shaped to protrude from one main surface of the flat plate 41. The flat plate 41 and the side wall 42 may be integrally formed, or may be formed separately and joined or adhered to each other. The flat plate 41 and the side wall 42 form a recess 402.

[0023] The flat plate 41 has a protruding portion 410 protruding from one main surface to which the side wall 42 is connected. A hole 400 is formed in the protruding portion 410, penetrating the protruding portion 410 along the height direction. Due to the shape having this hole 400, the protruding portion 410 has, for example, a circular cylindrical shape in a plan view (when viewed in a direction perpendicular to the one main surface). The one main surface side and the other main surface side of the flat plate 41 communicate with each other through the hole 400. This hole 400 is a communication hole of the valve 11 to the pump 12, and corresponds to the "first hole" of the present invention. The plane of the boundary where the hole 400 communicates with the valve chamber is the opening surface of the hole 400 on the valve chamber side.

[0024] The housing member 70 is plate-shaped and made of metal, resin, etc. The shape of the housing member 70 in a plan view is substantially the same as that of the housing member 40. The housing member 70 corresponds to a "second wall" of the present invention.

[0025] The housing member 70 has holes 700, 710, and 790. The hole 700 is opened on one main surface of the housing member 70. The plane of the boundary where the hole 700 communicates with the outside is the opening surface on the outside side of the hole 700. The hole 710 is opened on the other main surface (valve chamber side) of the housing member 70. The plane of the boundary where the hole 710 communicates with the valve chamber is the opening surface on the outside side of the hole 710. The holes 700 and 710 overlap in a plan view (when viewed in a direction perpendicular to the one main surface and the other main surface). The holes 700 and 710 communicate with each other. The hole formed by the communication between the holes 700 and 710 corresponds to the "second hole" of the present invention. The hole 700 corresponds to the "first part" of the present invention, and the hole 710 corresponds to the "second part" of the present invention.

[0026] One end of hole 790 opens into the other main surface (valve chamber side) of housing member 70. The plane of the boundary where hole 790 communicates with the valve chamber is the opening surface of hole 790 on the valve chamber side. The other end of hole 790 opens into the outer surface of housing member 70. The plane of the boundary where hole 790 communicates with the outside is the opening surface of hole 790 on the outside side. Hole 790 corresponds to the "third hole" of the present invention.

[0027] The membrane 80 is what is called a valve membrane or diaphragm, and is made of a deformable material, such as a rubber sheet. A hole 800 is formed in the membrane 80 near the outer edge. The hole 800 penetrates the membrane 80 in the thickness direction. The hole 800 corresponds to the "communication passage" of the present invention.

[0028] The holding plate 90 is plate-shaped and made of, for example, metal, resin, etc. The holding plate 90 has an opening 900. The opening 900 penetrates the holding plate 90 in the thickness direction, and the shape of the opening 900 in a plan view is smaller than the outer shape of the film 80.

[0029] The holding plate 90 holds the membrane 80 so as to overlap the opening 900. At this time, the holding plate 90 holds the outer edge of the membrane 80 so that the hole 800 communicates with the opening 900.

[0030] Moreover, the shape of the opening 900 of the holding plate 90 in plan view is larger than the opening surface of the hole 700 and the opening surface of the hole 790 .

[0031] These components are assembled in the following positional relationship to form the valve 11.

[0032] A holding plate 90 and a housing member 70 are arranged in this order on the side of the housing member 40 from which the side wall 42 protrudes. The holding plate 90 abuts against the side wall 42. The other main surface of the housing member 70 is connected to the holding plate 90.

[0033] With this configuration, the housing member 70 is connected to the housing member 40 with the membrane 80 and the holding plate 90 sandwiched therebetween, with the other main surface facing one main surface of the flat plate 41 of the housing member 40. As a result, a valve chamber is formed that is surrounded by the housing of the valve 11 formed by the housing member 40, the housing member 70, and the holding plate 90, and is a space in which the recess 402 of the housing member 40 and the opening 900 of the holding plate 90 are in communication with each other. In other words, the valve chamber is a space sandwiched between the flat plate 41 of the housing member 40 and the housing member 70.

[0034] Also, with this configuration, the membrane 80 is disposed within the valve chamber, and is disposed between the flat plate 41 of the housing member 40 and the housing member 70. The membrane 80 divides the valve chamber into a first space on the housing member 40 side (space formed by the recess 402: space on the first wall side) and a second space on the housing member 70 side (space formed by the opening 900: space on the second wall side). The first space and the second space communicate with each other via the hole 800 in the membrane 80.

[0035] Hole 400 communicates with a first space formed by recess 402, and hole 710 (hole 700) and hole 790 communicate with a second space formed by opening 900. That is, hole 400, hole 710 (hole 700), and hole 790 are disposed on opposite sides of membrane 80. When valve 11 is viewed from above (when viewed in the direction in which housing member 40, membrane 80, and housing member 70 are aligned (first direction of valve 11)), membrane 80 is disposed so as to overlap hole 400, hole 710 (hole 700), and hole 790.

[0036] Furthermore, in a plan view of valve 11, the opening surface of hole 400 on the valve chamber side (first space side) and the opening surface of hole 790 on the valve chamber side (second space side) overlap. More specifically, the opening surface of hole 790 on the valve chamber side (second space side) completely overlaps with the opening surface of hole 400 on the valve chamber side (first space side). Note that here, the opening surfaces completely overlap means that, for example, when the area of ​​the opening surface of hole 790 is smaller than the area of ​​the opening surface of hole 400 as shown in FIG. 1, the entire opening surface of hole 790 is located within the range of the opening surface of hole 400 in a plan view.

[0037] Furthermore, in a plan view of the valve 11, the hole 800 does not overlap with the opening surface of the hole 400 facing the valve chamber side, nor with the opening surface of the hole 790 facing the valve chamber side.

[0038] (Valve 11 operation) The valve 11 having the above-mentioned configuration realizes the operation of supplying gas to the cuff 2 and the operation of discharging gas from the cuff 2 as will be described below.

[0039] (Supply of gas to cuff 2) FIG. 4 is a diagram showing the flow of gas when gas is being supplied to the cuff, and is an enlarged side cross-sectional view of a part of the valve.

[0040] When gas is supplied to the cuff 2, the pump 12, which will be described later, is driven. By driving the pump 12, the gas flows from the pump 12 into the first space of the valve chamber through the hole 400. The gas that flows in through the hole 400 presses the membrane 80. As a result, the membrane 80 is deformed and covers the hole 790 of the housing member 70. The hole 790 is then blocked by the membrane 80.

[0041] The gas that has flowed into the first space flows along the first space side of membrane 80, and flows into the second space through hole 800. The gas that has flowed into the second space is discharged to the outside of valve 11 through holes 710 and 700. Hole 700 is in communication with cuff 2, and the gas discharged from hole 700 to the outside of valve 11 is supplied to cuff 2.

[0042] At this time, the hole 790 is blocked by the membrane 80, and the membrane 80 is pressed against the wall surface of the housing member 70 on the pump chamber side from the first space side with a predetermined pressure. This allows the gas that has flowed into the second space from the hole 800 to be discharged from the hole 700 without leaking to the hole 790. Therefore, the gas can be efficiently supplied to the cuff 2.

[0043] (Gas discharge from cuff 2) Figures 5(A) and 5(B) are diagrams showing the flow of gas during the operation of discharging gas from the cuff, and are enlarged side cross-sectional views of a part of the valve. Figure 5(A) shows the transient state (initial state) of discharging, and Figure 5(B) shows the steady state of discharging.

[0044] When discharging gas from the cuff 2, the operation of pump 12, which will be described later, is stopped. When pump 12 is stopped, the pressure caused by the flow of gas into the cuff 2 disappears. Therefore, the pressure in the cuff 2 becomes higher than the valve chamber. Therefore, the gas in the cuff 2 flows into the second space of the valve chamber through holes 700 and 710.

[0045] (Transient state) 5(A), in the transient state, part of the gas that has flowed into the second space pushes the membrane 80 toward the housing member 40. As a result, the membrane 80 moves away from the wall surface on the pump chamber side of the housing member 70. Then, the hole 790 communicates with the second space.

[0046] In addition, in this transitional state, a part of the gas that has flowed into the second space flows into the first space through the hole 800. In the transitional state, the film 80 is not in contact with the housing member 40. Therefore, as shown in Fig. 5(A), the gas that has flowed into the first space passes through the first space side of the film 80 and is discharged from the hole 400.

[0047] Thus, in the transient state, gas flows on both the hole 790 side (second space side) and the hole 400 side of the film 80. In addition, since the hole 790 and the hole 400 overlap in a plan view, the film 80 receives the same amount of pressure from both the first space side and the second space side in this region (pressure equilibrium state). In particular, if the flow rate of gas to the hole 790 and the flow rate of gas to the hole 400 are the same, the film 80 receives the same pressure. As a result, as shown in FIG. 5(A), the film 80 is not in contact with both the housing member 40 and the housing member 70.

[0048] That is, a flow path (first flow path) that reaches hole 700 through hole 790 and a flow path (second flow path) that reaches hole 400 through hole 800 are formed. This makes it possible to suppress a rapid change in the flow path cross-sectional area and flow rate of the first flow path, and to suppress the membrane 80 from bending suddenly and significantly toward the first space side due to the airflow to hole 790. This makes it possible to suppress the membrane 80 from colliding with the inner wall surface of flat plate 41 or the tip of protruding portion 410 and bending toward the second space side in reaction, and thus suppresses vibration of the membrane 80.

[0049] If gas continues to flow into the second space, this equilibrium state is disturbed. More specifically, hole 710 and hole 790 are on the same side of membrane 80, and hole 710 and hole 400 are on opposite sides of membrane 80, so that the pressure loss in the flow path from hole 710 to hole 790 is smaller than the pressure loss from hole 710 to hole 400. This difference in pressure loss can be adjusted, for example, by the size, position, etc. of hole 800.

[0050] Due to this pressure loss relationship, the gas easily flows from the hole 710 to the hole 790, and the gas flows more into the hole 790 depending on the time elapsed since the start of discharge. As a result, the film 80 deforms so as to approach the housing member 40, and then contacts the tip surface 411 of the protruding portion 410 of the housing member 40. Then, as shown in FIG. 5(B), the film 80 blocks the hole 400, and almost all of the gas from the hole 710 flows into the hole 790. That is, the film 80 deforms so as to move toward the inner wall surface of the flat plate 41 and the tip of the protruding portion 410 in almost one direction without causing any significant vibration.

[0051] In this way, the valve 11 can exhaust the gas in the cuff 2 to the outside with almost no vibration of the membrane 80.

[0052] On the other hand, in the comparative configuration (where hole 790 and hole 400 are disposed far apart in a plan view), immediately after the gas is discharged from cuff 2, the gas flows into hole 790, but the flow rate of the gas causes membrane 80 to be drawn back to hole 790, and membrane 80 almost completely blocks hole 790. Thereafter, the pressure of the gas causes the membrane to be drawn away from hole 790 again and collide with the opposing wall surface. This causes the membrane to vibrate. As a result, in the comparative configuration, undesirable vibration noise is generated. Furthermore, the repeated blocking and opening of hole 790 makes it difficult to increase the discharge speed.

[0053] On the other hand, by using the configuration of the valve 11 of the present invention, it is possible to suppress undesirable vibration noise and improve the gas exhaust speed.

[0054] Furthermore, valve 11 includes protrusion 410. Protrusion 410 does not necessarily have to be included. However, by including protrusion 410, the distance between the opening surface of hole 400 and the opening surface of hole 790 can be adjusted without changing the capacity of the pump chamber. Therefore, the flow rate and flow speed of the fluid on both sides of membrane 80 in the above-mentioned transient state can be controlled, and valve 11 can more reliably suppress the occurrence of vibration.

[0055] Furthermore, in the valve 11, the hole 710 has a shape that widens to a position closer to the hole 790 than the hole 700. The portion of the hole 710 that widens toward the hole 790 can be omitted. However, by having a portion of the hole 710 that widens toward the hole 790, the pressure loss of the gas flowing from the hole 700 to the hole 790 can be reduced. That is, the opening cross-sectional area of ​​the hole 710 is larger than the opening cross-sectional area of ​​the hole 700, so that the pressure loss of the gas flowing from the hole 700 to the hole 790 can be reduced. Note that the opening cross-sectional area is the cross-sectional area of ​​the hole 700 and the hole 710 cut by a plane parallel to the opening plane of the hole 700 and the hole 710.

[0056] This can further increase the gas discharge speed. In this case, it is preferable that at least a part of the portion of hole 710 that expands toward hole 790 overlaps with hole 400. This can further reduce the pressure loss of the gas flowing from hole 700 to hole 790.

[0057] Furthermore, in valve 11, holes 400 and 790 overlap in a plan view, so that the area of ​​membrane 80 can be made smaller than in a configuration in which holes 790 and 400 are separated in a plan view. This allows membrane 80 to be made smaller, and therefore valve 11 to be made smaller.

[0058] Furthermore, in valve 11, hole 800 is formed in membrane 80. This allows hole 800 to be provided at a position closer to the operating position of valve 11, i.e., the position where hole 790 and hole 400 overlap, allowing valve 11 to be made more compact.

[0059] (Pump 12) 1 and 2, the pump 12 includes a main plate 21, a frame 22, a connecting member 23, a piezoelectric element 30, a plate 41 of a housing member 40, a sidewall member 50, and a cover member 60. The plate 41 of the housing member 40 is shared by the valve 11 and the pump 12.

[0060] The main plate 21 is circular in plan view. The frame body 22 is disposed so as to surround the main plate 21. The multiple connecting members 23 are beam-shaped and disposed between the main plate 21 and the frame body 22. The multiple connecting members 23 support the main plate 21 relative to the frame body 22 so as to be vibrable.

[0061] The piezoelectric element 30 has a circular shape in a plan view. The piezoelectric element 30 includes a piezoelectric body and a driving conductor. The piezoelectric element 30 is disposed on one main surface of the main plate 21. At this time, the center of the piezoelectric element 30 and the center of the main plate 21 coincide with each other. Note that the term "coincidence" here includes a range in which the center positions of the two are misaligned within the range of manufacturing error.

[0062] The piezoelectric element 30 is distorted by application of a drive voltage. The main plate 21 vibrates due to the stress caused by the distortion of the piezoelectric element 30.

[0063] The sidewall member 50 is annular with a hollow 500, and is disposed between the frame body 22 and the housing member 40. The sidewall member 50 connects to the frame body 22 and the housing member 40.

[0064] A space (hollow 500) surrounded by a structural body made up of main plate 21, frame body 22, and connecting member 23, housing member 40, and side wall member 50 becomes a pump chamber of pump 12.

[0065] The cover member 60 is made up of a flat plate portion and a frame portion, and the frame portion is shaped to protrude from one main surface of the flat plate portion. The flat plate portion has a hole 600 formed therethrough.

[0066] The cover member 60 is disposed so as to cover the main plate 21 , and the frame portion of the cover member 60 is connected to the frame body 22 .

[0067] In this configuration, when the main plate 21 vibrates as described above, gas is sucked into the pump 12 through the hole 600 and discharged into the valve chamber of the valve 11 through the hole 400 .

[0068] With this configuration, the fluid control device 10 shares the flat plate 41 and the hole 400 of the housing member 40, and the valve 11 and the pump 12 are realized in a single housing. This allows the fluid control device 10 to be made thinner and more compact. Furthermore, by including the above-mentioned valve 11, the fluid control device 10 can suppress undesirable vibration noise and discharge gas from the cuff 2 at a higher speed.

[0069] [Second embodiment] A valve and a fluid control device according to a second embodiment of the present invention will be described with reference to the drawings.

[0070] Fig. 6 is a schematic cross-sectional side view showing the configuration of a fluid control device according to a second embodiment. Fig. 7(A) is an enlarged cross-sectional side view of a part of a valve according to a second embodiment, and Fig. 7(B) is a perspective plan view showing the relationship between each hole and a membrane.

[0071] As shown in Figures 6, 7(A) and 7(B), the fluid control device 10A according to the second embodiment differs from the fluid control device 10 according to the first embodiment in the configuration of a valve 11A. Other configurations of the fluid control device 10A are similar to those of the fluid control device 10, and a description of similar parts will be omitted.

[0072] The fluid control device 10A includes a valve 11A. The valve 11A includes a membrane 80A and a retaining plate 90A.

[0073] The retaining plate 90A has a shape that protrudes into an area overlapping the hole 710 in a plan view when placed in the housing member 70. In other words, the retaining plate 90A has a shape that has a portion that extends inward from the outer edge of the valve chamber. As a result, the area of ​​the opening 900 of the retaining plate 90A is smaller than that of the retaining plate 90.

[0074] The holding plate 90A has a hole 910 in this protruding portion. The hole 910 passes through the holding plate 90A in the thickness direction. The hole 910 corresponds to the "communication passage" of the present invention.

[0075] The membrane 80A is larger than the opening 900 of the retaining plate 90A. The membrane 80A covers the opening 900 but does not cover the hole 910. The outer edge of the membrane 80A is fixed to the retaining plate 90A. In a plan view of the valve 11A, the membrane 80A overlaps the opening surface of the hole 400 on the valve chamber side and the opening surface of the hole 790 on the valve chamber side.

[0076] With this configuration, valve 11A can suppress vibration of membrane 80A. Furthermore, in valve 11A, the area of ​​membrane 80A, more specifically, the area of ​​the region that deforms in membrane 80A, can be reduced, thereby improving the response speed of membrane 80A.

[0077] [Third embodiment] A valve and a fluid control device according to a third embodiment of the present invention will be described with reference to the drawings.

[0078] FIG. 8(A) is an enlarged side cross-sectional view of a portion of a valve according to a third embodiment, and FIG. 8(B) is a perspective plan view showing the relationship between each hole and the membrane.

[0079] As shown in Figures 8(A) and 8(B), the fluid control device 10B according to the third embodiment differs from the fluid control device 10A according to the second embodiment in the configuration of the valve 11B. The other configuration of the fluid control device 10B is the same as that of the fluid control device 10A, and a description of similar parts will be omitted. Also, in the figures, the membrane 80B is the same as the membrane 80A, and the holding plate 90B is the same as the holding plate 90A, and therefore a detailed description of each will be omitted.

[0080] The valve 11B includes a flat plate 41B. The flat plate 41B includes a support member 420. The support member 420 is formed inside the hole 400. The support member 420 has, for example, a mesh shape in a plan view. In other words, the support member 420 has a shape that partially blocks the hole 400 but ensures gas permeability of the hole 400.

[0081] The end face of the support member 420 on the pump chamber side is flush with the tip face 411 of the protruding portion 410 .

[0082] Fig. 9 is a diagram showing the flow of gas during the operation of discharging gas from the cuff, and is an enlarged side cross-sectional view of a part of the valve Fig. 9 shows a steady state of the discharging operation.

[0083] 9, when gas flows in from the cuff 2 through holes 700 and 710 and the membrane 80B deforms and abuts against the tip surface 411 of the protrusion 410, the membrane 80B also abuts against and is supported by the support member 420. This prevents the membrane 80B from entering the hole 400. As a result, the amount of deformation of the membrane 80B is suppressed, and the responsiveness of the deformation of the membrane 80B to the flow of gas is improved.

[0084] [Fourth embodiment] A valve and a fluid control device according to a fourth embodiment of the present invention will be described with reference to the drawings.

[0085] Fig. 10(A) is a side cross-sectional view of an enlarged portion of a valve according to a fourth embodiment, and Fig. 10(B) is a side cross-sectional view of an enlarged portion of the valve, showing the flow of gas during the operation of discharging gas from the cuff. Fig. 10(B) shows the steady state of the discharging operation.

[0086] As shown in Figures 10(A) and 10(B), the fluid control device 10C according to the fourth embodiment differs from the fluid control device 10B according to the third embodiment in the configuration of the valve 11C. The other configuration of the fluid control device 10C is the same as that of the fluid control device 10B, and a description of similar parts will be omitted. Also, in the figures, the membrane 80C is the same as the membrane 80B, and the holding plate 90C is the same as the holding plate 90B, and therefore a detailed description of each will be omitted.

[0087] The valve 11C includes a flat plate 41C. The flat plate 41C includes a support member 420C. The support member 420C is formed inside the hole 400. The support member 420C has the same shape as the support member 420 of the valve 11B in a plan view.

[0088] The end face of the support member 420C on the pump chamber side is disposed closer to the inside of the hole 400 than the tip face 411 of the protruding portion 410.

[0089] 10(B), when gas flows in from cuff 2 through holes 700 and 710 and membrane 80C deforms and abuts against tip surface 411 of protrusion 410, the portion of membrane 80C overlapping with the opening surface of hole 400 enters hole 400 and abuts against and is supported by support member 420C. At this time, by adjusting the position of the end surface of support member 420C, the depth to which membrane 80C enters hole 400 can be set to a desired amount. As a result, it is possible to improve the responsiveness of the deformation of membrane 80C to the gas flow and to achieve a predetermined discharge speed at the same time.

[0090] [Fifth embodiment] A valve and a fluid control device according to a fifth embodiment of the present invention will be described with reference to the drawings.

[0091] Fig. 11(A) is a side cross-sectional view of an enlarged portion of a valve according to the fifth embodiment, Fig. 11(B) is a diagram showing the flow of gas during the operation of supplying gas to the cuff, and Fig. 11(C) is a side cross-sectional view of an enlarged portion of the valve showing the flow of gas during the operation of discharging gas from the cuff. Fig. 11(C) shows the steady state of the discharging operation.

[0092] As shown in Figures 11(A), 11(B), and 11(C), the fluid control device 10D according to the fifth embodiment differs from the fluid control device 10A according to the second embodiment in the configuration of the valve 11D. The other configuration of the fluid control device 10D is the same as that of the fluid control device 10A, and a description of similar parts will be omitted. Also, the membrane 80D in the figures is the same as the membrane 80A, and the holding plate 90D is the same as the holding plate 90A, and therefore a detailed description of each will be omitted.

[0093] Valve 11D includes a flat plate 41D. Flat plate 41D includes a communication hole 430. In a plan view of valve 11D, one opening of communication hole 430 overlaps with aperture 900. The other opening of communication hole 430 overlaps with hole 910. In other words, communication hole 430 is formed in flat plate 41D so as to straddle the portion between aperture 900 and hole 910 in holding plate 90D in a plan view.

[0094] The housing member having the flat plate 41D has a low sidewall height, and the membrane 80D abuts against the main surface of the flat plate 41D on the pump chamber side in a static state where no gas flow is occurring.

[0095] 11(B), when gas is supplied to the cuff 2, the membrane 80D closes the hole 790 and connects the communication hole 430 to the valve chamber. This allows the gas to flow into the valve 11D from the hole 400, and the gas is discharged to the cuff 2 through the communication hole 430, the hole 910, the hole 710, and the hole 700.

[0096] On the other hand, when gas is discharged from the cuff 2, as shown in Fig. 11(C), the membrane 80D closes the hole 400 and connects the hole 790 to the valve chamber. This allows the valve 11D to discharge the gas from the cuff 2 to the outside of the valve 11D through the holes 700, 710, and 790. At this time, for example, by adjusting the cross-sectional area of ​​the communication hole 430, it is possible to achieve a balanced state of pressure on both sides of the membrane 80D described above in the transient state of discharge. Therefore, the valve 11D can suppress the vibration of the membrane 80D.

[0097] [Sixth embodiment] A valve and a fluid control device according to a sixth embodiment of the present invention will be described with reference to the drawings.

[0098] FIG. 12 is a schematic side cross-sectional view showing the configuration of a fluid control device according to a sixth embodiment.

[0099] 12, the fluid control device 10E according to the sixth embodiment differs from the fluid control device 10 according to the first embodiment in the configuration of a valve 11E. Other configurations of the fluid control device 10E are similar to those of the fluid control device 10, and a description of similar parts will be omitted.

[0100] The fluid control device 10E includes a valve 11E. The valve 11E includes a retaining plate 90E. The retaining plate 90E is, for example, annular. The retaining plate 90E retains the outer edge of the membrane 80. The retaining plate 90E is fixed to the flat plate 41 of the housing member 40.

[0101] The retaining plate 90E is fixed so that the membrane 80 overlaps the holes 400 and 790 in a plan view of the valve 11E.

[0102] With this configuration, the valve 11E can suppress vibration of the membrane 80, similar to the valve 11. That is, whether the membrane 80 is fixed to the housing member 40 or the housing member 70, vibration of the membrane 80 can be suppressed.

[0103] [Seventh embodiment] A valve and a fluid control device according to a seventh embodiment of the present invention will be described with reference to the drawings.

[0104] FIG. 13 is a schematic side cross-sectional view showing the configuration of a fluid control device according to the seventh embodiment.

[0105] 13, the fluid control device 10F according to the seventh embodiment differs from the fluid control device 10A according to the second embodiment in the configuration of the valve 11F. The other configuration of the fluid control device 10F is similar to that of the fluid control device 10A, and a description of similar parts will be omitted. Note that the membrane 80F has the same structure as the membrane 80A, and a detailed description will be omitted.

[0106] The fluid control device 10F includes a valve 11F. The valve 11F includes a retaining plate 90F. The retaining plate 90F is, for example, annular. The retaining plate 90F holds the outer edge of the membrane 80F. The retaining plate 90F is fixed to the flat plate 41 of the housing member 40.

[0107] The retaining plate 90F is fixed so that the membrane 80 overlaps the holes 400 and 790 in a plan view of the valve 11F.

[0108] A hole 910F is formed in the holding plate 90F. The hole 910F penetrates between the inner surface and the outer surface of the holding plate 90F.

[0109] With this configuration, the valve 11F can suppress the vibration of the film 80F, similar to the valve 11A. That is, whether the film 80F is fixed to the housing member 40 or the housing member 70, the vibration of the film 80F can be suppressed.

[0110] [Eighth embodiment] A valve and a fluid control device according to an eighth embodiment of the present invention will be described with reference to the drawings.

[0111] FIG. 14 is a schematic side cross-sectional view showing the configuration of a fluid control device according to the eighth embodiment.

[0112] 14, the fluid control device 10G according to the eighth embodiment differs from the fluid control device 10A according to the second embodiment in the configuration of a valve 11G. Other configurations of the fluid control device 10G are similar to those of the fluid control device 10A, and a description of similar parts will be omitted.

[0113] The fluid control device 10G includes a valve 11G. Schematically, the valve 11G has a configuration in which a plurality of functional parts of the valve 11 are arranged in parallel.

[0114] The valve 11G includes a housing member 40G, a housing member 70G, a membrane 80G1, a membrane 80G2, and a retaining plate 90G.

[0115] The housing member 40G has a hole 400G1 and a hole 400G2 in a flat plate 41. The hole 400G1 and the hole 400G2 are located apart from each other.

[0116] The housing member 70G has holes 700G, 710G, 790G1, and 790G2. The holes 700G and 710G are formed in a central region when the housing member 70G is viewed in a plan view. The holes 790G1 and 790G2 are formed at positions sandwiching the holes 700G and 710G. When the valve 11G is viewed in a plan view, the hole 790G1 overlaps with the hole 400G1, and the hole 790G2 overlaps with the hole 400G2.

[0117] The holding plate 90G has an opening 900G1, an opening 900G2, and a hole 910G. The hole 910G is formed in the center of the holding plate 90G in a plan view. In a plan view of the valve 11G, the hole 910G overlaps with the hole 710G of the housing member 70G. The opening 900G1 and the opening 900G2 are formed at a position sandwiching the hole 910G. In a plan view of the valve 11G, the opening 900G1 overlaps with the hole 400G1 and the hole 790G1, and overlaps with a part of the hole 710G. In a plan view of the valve 11G, the opening 900G2 overlaps with the hole 400G2 and the hole 790G2, and overlaps with a part of the hole 710G.

[0118] The membrane 80G1 is held by the holding plate 90G so as to cover the opening 900G1, so that the membrane 80G1 overlaps the hole 400G1 and the hole 790G1 when the valve 11G is viewed in plan.

[0119] The membrane 80G2 is held by the holding plate 90G so as to cover the opening 900G2, so that the membrane 80G2 overlaps with the hole 400G2 and the hole 790G2 in a plan view of the valve 11G.

[0120] A hole 800G is formed between the film 80G1 and the film 80G2. In a plan view of the valve 11G, the hole 800G overlaps with the hole 910G. This allows the hole 910G and the hole 800G to communicate with each other.

[0121] With this configuration, valve 11G can suppress vibration of membranes 80G1 and 80G2, similar to valve 11. Furthermore, valve 11G includes a first valve function portion including holes 400G1, 790G1, and membrane 80G1, and a second valve function portion including holes 400G2, 790G2, and membrane 80G2, which are arranged in parallel between pump 12 and hole 700G. This allows the rectifying function to be maintained even if either the first valve function portion or the second valve function portion fails or breaks.

[0122] [Ninth embodiment] A valve and a fluid control device according to a ninth embodiment of the present invention will be described with reference to the drawings.

[0123] FIG. 15 is a schematic side cross-sectional view showing the configuration of a fluid control device according to a ninth embodiment.

[0124] 15, the fluid control device 10H according to the ninth embodiment differs from the fluid control device 10 according to the first embodiment in that it includes a valve 11H. The valve 11H differs from the valve 11 according to the first embodiment in that the retaining plate 90 is omitted.

[0125] The valve 11H includes a housing member 70H. The outer edge of the film 80 is fixed to and held by the surface of the housing member 70H on the valve chamber side.

[0126] With this configuration, the valve 11H of the fluid control device 10H can achieve the same effects as the valve 11 of the fluid control device 10.

[0127] (Derived configuration of the positional relationship between hole 400, hole 790, and membrane 80) 16(A) and 16(B) are diagrams showing examples of the positional relationship between a hole communicating with a pump, a hole for discharging gas, and a membrane. Fig. 16(A) and Fig. 16(B) are side cross-sectional views showing an enlarged portion of a valve according to a second embodiment.

[0128] In FIG. 16(A), in a plan view of valve 11A, hole 790 is closer to hole 700 than hole 400, and the opening surface of hole 790 on the valve chamber side and the opening surface of hole 400 on the valve chamber side partially overlap.

[0129] In FIG. 16(B), in a plan view of valve 11A, hole 400 is closer to hole 700 than hole 790, and the opening surface of hole 790 on the valve chamber side and the opening surface of hole 400 on the valve chamber side do not overlap.

[0130] As shown in Figures 16(A) and 16(B), in a plan view of the valve 11A, the holes 400 and 790 overlap the deformable region of the membrane 80A.

[0131] With this configuration, it is possible to suppress vibration of the membrane 80A. However, in a plan view of the valve 11A, it is preferable that the holes 400 and 790 at least partially overlap, and it is more preferable that they completely overlap as in the second embodiment described above.

[0132] Furthermore, the shape of the membrane 80A may be any shape, such as a circle or a polygon, but it is preferable that the hole 400 and the hole 790 overlap in the center of the deformable region.

[0133] (Examples of devices to which the fluid control device is applied) The fluid control device having the above-mentioned configuration is applied to, for example, a pressurizing device. The pressurizing device includes a fluid control device having any of the above-mentioned configurations and a cuff 2 that communicates with a hole 700 (see FIG. 2). By flowing gas from the fluid control device into the cuff 2, pressure can be applied to the human body or the like that is in contact with the cuff 2.

[0134] Furthermore, such a pressurizing device can be applied to a blood pressure monitor, which includes the pressurizing device described above and a measuring unit that measures blood pressure from the pressure applied by the cuff.

[0135] In the above description, a gas is transported, but the above configuration can be applied to other fluids other than gas.

[0136] Furthermore, the configurations of the above-described embodiments can be combined as appropriate, and effects corresponding to each combination can be achieved. [Explanation of symbols]

[0137] 10, 10A, 10B, 10C, 10D, 10E, 10F, 10G, 10H: Fluid control device 11, 11A, 11B, 11C, 11D, 11E, 11F, 11G, 11H: Valves 12: Pump 21: Main plate 22: Frame 23: Connecting member 30: Piezoelectric element 40, 40G: Housing materials 41: Flat plate 42: Side wall 50: Side wall member 60: Lid component 70, 70G, 70H: Housing materials 80, 80A, 80B, 80C, 80D, 80F, 80G1, 80G2: Membrane 90, 90A, 90B, 90C, 90D, 90E, 90F, 90G: Retainer plate 400, 400G1, 400G2: Hole 420, 420C: Support member 700, 700G: hole 710, 710G: hole 790, 790G1, 790G2: hole 800, 800G: hole 900, 900G1, 900G2: Opening surface 910, 910G: hole 2:カフ

Claims

1. a housing having a first wall having a first hole capable of communicating with an external pump, a second wall having a second hole capable of communicating with a component to which a fluid is discharged, and a valve chamber sandwiched between the first wall and the second wall facing each other; A membrane that divides the valve chamber into a space on the first wall side and a space on the second wall side; a communication passage that communicates between the first wall side space and the second wall side space; Equipped with the second wall has a third hole that is capable of communicating with the outside of the housing and that is capable of discharging the fluid from the valve chamber; When viewed in a first direction of the housing in which the first wall, the membrane, and the second wall are arranged, the membrane, an opening surface of the first hole on the valve chamber side, and an opening surface of the third hole on the valve chamber side overlap each other, Furthermore, the communication passage does not overlap an opening surface of the first hole on the valve chamber side and an opening surface of the third hole on the valve chamber side, an opening surface of the first hole on the valve chamber side and an opening surface of the third hole on the valve chamber side at least partially overlap with each other, The membrane is capable of blocking the first hole. valve.

2. When viewed in the first direction, an opening surface of the first hole on the valve chamber side and an opening surface of the third hole on the valve chamber side are such that a smaller hole is located within a range of an opening surface of a larger hole.

2. The valve of claim 1.

3. the second hole includes a first portion communicating with an outside of the housing and a second portion communicating with a space on the second wall side, When viewed in the first direction, the second portion is larger than the first portion, and the first portion overlaps the second portion. A valve according to claim 1 or claim 2.

4. The first wall includes a protruding portion protruding toward the second wall, The first hole is formed in the protruding portion. A valve according to claim 1 or claim 2.

5. a retaining plate extending inward from an outer end of the valve chamber and retaining the membrane when viewed in the first direction; The communication passage is formed in the retaining plate. A valve according to claim 1 or claim 2.

6. The communication passage is formed in the membrane. A valve according to claim 1 or claim 2.

7. a support member formed in the first hole and supporting the membrane; A valve according to claim 1 or claim 2.

8. an end surface of the support member is flush with an opening surface of the first hole on the valve chamber side; 8. The valve of claim 7.

9. an end face of the support member is located closer to the inside of the first hole than an opening face of the first hole on the valve chamber side; 8. The valve of claim 7.

10. The first hole, the third hole, and the membrane are each provided in a plurality of numbers. A valve according to claim 1 or claim 2.

11. A valve according to claim 1 or 2; the pump having a pump chamber sharing the first wall and communicating with the first hole; A fluid control device comprising:

12. A fluid control device according to claim 11; A cuff communicating with the second hole; A pressure applying device comprising:

13. A pressure device according to claim 12; A measurement unit for measuring blood pressure based on the pressure by the cuff; A blood pressure monitor comprising:

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