LIQUID SUPPLY APPARATUS AND METHOD FOR CONTROLLING LIQUID SUPPLY APPARATUS - Patent application

Abstract

To couple a socket-end liquid flow passage and a plug-end liquid flow passage together without using a grip mechanism having an excessive drive force and grip force.SOLUTION: There is provided a liquid feeder comprising a plug 10 having a plug-end liquid flow passage 11 and a socket 20 having a socket-end liquid flow passage 21a. The plug 10 has a groove portion 12 having a fixation groove 12a, and the socket 20 has a body portion 21 having the socket-end liquid flow passage 21a, a grip portion 22 to be gripped by a robot, and a sleeve member 23 for adjusting the position of the body portion 21 relative to the grip portion 22. The body portion 21 has a tip extending annularly around a socket axis Zp1 and having a lock ball 21Aa. The sleeve member 23 switches over between a coupling state in which the lock ball 21Aa is fixed in the fixation groove 12a and a released state in which the lock ball 21Aa is not fixed in the fixation groove 12a.SELECTED DRAWING: Figure 10

Description

[Technical field]

[0001] The present invention relates to a liquid supply device and a method for controlling a liquid supply device. [Background technology]

[0002] Conventionally, there is known a liquid supplying device that supplies liquid stored in a liquid storage container to a plurality of supply destination devices (see, for example, Patent Document 1). The liquid supplying device disclosed in Patent Document 1 connects a liquid flow path formed in the plug to a liquid flow path formed in the socket by fixing a plug to an opening of the liquid storage container and attaching a socket to the plug. When attaching the socket to the plug, an operator engages a male thread formed in a mounting nut of the socket with a female thread formed in the plug. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2018-20793 A Summary of the Invention [Problem to be solved by the invention]

[0004] In the liquid supply device disclosed in Patent Document 1, when connecting the liquid flow path formed in the plug and the liquid flow path formed in the socket, an operator must grasp the socket and attach it to the plug, which increases the operator's workload and may expose the operator to danger when handling highly hazardous liquids.

[0005] In order to prevent the worker's workload from increasing and to prevent the worker from being exposed to danger, it is conceivable to automate the task of attaching a socket to a plug by using a robot hand that holds the socket. For example, it is conceivable to store the position of the plug disclosed in Patent Document 1 in advance and move the socket to the stored position by the robot hand.

[0006] However, in order to fix the socket to the plug using a robot hand that holds the socket, the robot hand needs to have an excessive driving force to fix the socket to the plug. Also, in order to accurately position the socket with respect to the plug using the robot hand, the robot hand needs to hold the socket with an excessive gripping force so as to prevent the posture of the socket from changing.

[0007] The present invention has been made in consideration of the above circumstances, and aims to provide a liquid supply device and a control method for a liquid supply device that are capable of fixing a socket side fixing part of a socket to a plug side fixing part of a plug, thereby connecting a socket side liquid flow path and a plug side liquid flow path, without using a gripping mechanism with excessive driving force and gripping force. [Means for solving the problem]

[0008] In order to solve the above problems, the present invention employs the following means. a plug having a plug-side liquid flow passage fixed to an opening provided on an upper surface of a liquid storage container and extending along a plug axis; and a socket having a socket-side liquid flow passage extending along a socket axis, the plug having a groove portion extending in a circular shape around the plug axis and having a plug-side fixed portion, the socket having a main body portion formed in a cylindrical shape along the socket axis and having the socket-side liquid flow passage, a gripping portion formed in a cylindrical shape along the socket axis and gripped by a gripping mechanism that grips the socket, and an adjustment portion that adjusts the position of the main body portion on the socket axis relative to the gripping portion, the tip of the main body portion extending in a circular shape around the socket axis and having a socket-side fixed portion, and switching between a connected state in which the socket-side liquid flow passage and the plug-side liquid flow passage are connected to each other and a released state in which the socket-side fixed portion is not fixed to the plug-side fixed portion.

[0009] According to a liquid supply device according to one aspect of the present invention, the socket is gripped at its gripping portion by the gripping mechanism, and a tip of the main body having the socket-side liquid flow path is inserted into a groove extending in an annular shape around the plug axis. The socket is switched by the adjustment portion between a connected state in which the socket-side fixed portion is fixed to the plug-side fixed portion and the socket-side liquid flow path and the plug-side liquid flow path are connected, and a released state in which the socket-side fixed portion is not fixed to the plug-side fixed portion.

[0010] In the liquid supply device according to one aspect of the present invention, the adjustment part of the socket adjusts the position of the main body part relative to the gripping part on the socket axis to switch the released state to the connected state, so that the gripping mechanism that grips the socket does not need to apply a driving force to the socket to fix the socket to the plug. Therefore, the socket-side liquid flow path and the plug-side liquid flow path can be connected by fixing the socket-side fixing part of the socket to the plug-side fixing part of the plug without using a gripping mechanism with excessive driving force and gripping force.

[0011] In a liquid supply device according to one aspect of the present invention, a biasing member is provided that biases the adjustment portion toward the tip of the main body portion along the socket axis, the adjustment portion being formed in a cylindrical shape along the socket axis and arranged movably relative to the main body portion along the outer peripheral surface of the main body portion, the adjustment portion fixing the socket side fixing portion to the plug side fixing portion by the biasing force of the biasing member to establish the connected state, and the adjustment portion may be configured to move relative to the main body portion in a direction opposite to the biasing force to switch the connected state to the released state.

[0012] In the liquid supply device according to this configuration, the state in which the socket side fixed part is fixed to the plug side fixed part can be released by moving the adjustment part, which is biased by the biasing member toward the tip side of the main body part, in a direction opposite to the biasing force, so that the coupled state can be switched to the released state and the socket can be removed from the plug without the intervention of an operator.

[0013] In the liquid supply device configured as above, a recess formed in a ring shape around the socket axis is formed on the inner side of the gripping portion, the adjustment portion has a flange portion arranged to close the recess and protruding in a radial direction perpendicular to the socket axis so as to contact a bottom surface of the recess, a first space (S1) is formed closer to the base end of the main body portion than the flange portion and a second space (S2) is formed closer to the tip end of the main body portion than the flange portion, and the adjustment portion may be configured to switch the released state to the connected state by supplying compressed gas to the first space, and to switch the connected state to the released state by supplying compressed gas to the second space.

[0014] According to the liquid supplying device of this aspect, by supplying compressed gas to the first space on the base end side of the main body portion relative to the flange portion of the adjustment unit, the flange portion can be moved from the base end side to the tip end side of the main body portion, and the disconnected state can be switched to the connected state. Also, by supplying compressed gas to the second space on the tip end side of the main body portion relative to the flange portion of the adjustment unit, the flange portion can be moved from the tip end side to the base end side of the main body portion, and the connected state can be switched to the disconnected state.

[0015] In the liquid supply device of this aspect, the gripping portion may have a first cylindrical member made of metal that forms the bottom surface of the recess, and a second cylindrical member made of resin that is arranged so as to contact the outer peripheral surface of the first cylindrical member. Since the first cylindrical member forming the bottom surface of the recess is made of metal, the first cylindrical member will not deform even if a high gripping force is applied by the gripping mechanism. Therefore, the movement of the flange portion is not hindered by the deformation of the first cylindrical member. In addition, since the second cylindrical member is made of resin, the socket can be made lighter.

[0016] The liquid supplying device according to one aspect of the present invention may further include a detection unit that detects the connected state and the released state. According to the liquid supplying device configured as above, the detection section can appropriately detect switching from the released state to the connected state and switching from the connected state to the released state.

[0017] In the liquid supply device configured as above, the detection unit may have a magnet attached to the main body, and a magnetic sensor which outputs whether the position on the socket axis relative to the gripping unit is fixed and the magnet is positioned in a close proximity, and may be configured to detect the connected state and the released state according to the output of the magnetic sensor. According to the liquid supply device of this embodiment, the connected and disconnected states can be appropriately detected according to the output of a magnetic sensor that outputs whether the magnet attached to the main body is positioned in a close proximity.

[0018] A method for controlling a liquid supplying device according to one aspect of the present invention is a method for controlling a liquid supplying device including a plug fixed to an opening provided in an upper surface of a liquid storage container and having a plug-side liquid flow path extending along a plug axis, and a socket having a socket-side liquid flow path extending along a socket axis, wherein the plug has a groove portion extending in an annular shape around the plug axis and having a plug-side fixed portion, and the socket has a main body portion formed in a cylindrical shape along the socket axis and having the socket-side liquid flow path, and a gripper portion formed in a cylindrical shape along the socket axis and gripping the socket. the tip of the main body portion extends in a circular shape around the socket axis and has a socket side fixing portion, and the connecting process controls the position of the main body portion on the socket axis relative to the gripping portion to switch a released state in which the socket side fixing portion is not fixed to the plug side fixing portion to a connected state in which the socket side fixing portion is fixed to the plug side fixing portion and the socket side liquid flow path and the plug side liquid flow path are connected; and a releasing process controls the position of the main body portion on the socket axis relative to the gripping portion to switch the connected state to the released state.

[0019] According to a method for controlling a liquid supplying device according to one aspect of the present invention, in a connecting step, the position of the main body part on the socket axis relative to the grip part is controlled to switch the disconnected state to the connected state. In a disconnecting step, with the tip of the main body part inserted into the groove, the position of the main body part on the socket axis relative to the grip part is controlled to switch the connected state to the disconnected state.

[0020] According to a control method for a liquid supplying device according to one aspect of the present invention, in the connecting step, the disconnected state is switched to the connected state by controlling the position of the main body part relative to the gripping part on the socket axis, so that the gripping mechanism that grips the socket does not need to apply a driving force to the socket for fixing the socket to the plug. Also, in the releasing step, the connected state is switched to the disconnected state by controlling the position of the main body part relative to the gripping part on the socket axis, so that the gripping mechanism that grips the socket does not need to apply a driving force to the socket for removing the socket from the plug. Therefore, it is possible to connect the socket-side liquid flow path and the plug-side liquid flow path by fixing the socket-side fixing part of the socket to the plug-side fixing part of the plug without using a gripping mechanism having excessive driving force and gripping force. Effect of the Invention

[0021] According to the present invention, it is possible to provide a liquid supply device and a control method for a liquid supply device that are capable of fixing a socket side fixing portion of a socket to a plug side fixing portion of a plug, thereby connecting a socket side liquid flow path and a plug side liquid flow path, without using a gripping mechanism with excessive driving force and gripping force. [Brief description of the drawings]

[0022] [Figure 1] FIG. 2 is a side view showing the liquid supplying device according to the embodiment of the present invention, illustrating a state in which the robot holds and transports the socket. [Diagram 2] FIG. 2 is a side view of the liquid supplying device according to the embodiment of the present invention, showing a state in which the robot has placed the socket near the plug. [Diagram 3]2 is a plan view of the liquid supplying device shown in FIG. 1 as viewed from above, illustrating a state in which a robot holds and transports a socket. [Figure 4] 5 is a flowchart showing a control method for the liquid supply apparatus of the present embodiment. [Diagram 5] FIG. 11 is a partial cross-sectional view showing a state in which the socket has been moved close to the plug. [Figure 6] FIG. 4 is a partial cross-sectional view showing a state in which the socket is inserted into the plug. [Figure 7] FIG. 4 is a partial cross-sectional view showing a state in which the socket is fixed to the plug. [Figure 8] FIG. 2 is a plan view of the socket as viewed from above. [Figure 9] 9 is a cross-sectional view of the socket shown in FIG. 8 taken along line AA, illustrating a released state in which the socket is not fixed to the plug. [Figure 10] 9 is a cross-sectional view of the socket shown in FIG. 8 taken along the line BB, illustrating a release state in which the socket is not fixed to the plug. [Figure 11] 9 is a cross-sectional view of the socket shown in FIG. 8 taken along line AA, illustrating a connected state in which the socket is fixed to the plug. [Figure 12] 9 is a cross-sectional view of the socket shown in FIG. 8 taken along the line BB, illustrating a connected state in which the socket is fixed to the plug. [Figure 13] FIG. 11 is a partial vertical cross-sectional view showing the socket and the plug when switching from a released state to a connected state. [Figure 14] FIG. 11 is a partial vertical cross-sectional view showing the socket and the plug when switching the coupled state to a released state. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0023] A liquid supplying apparatus 100 according to one embodiment of the present invention will be described below with reference to the drawings. Figs. 1 and 2 are side views showing the liquid supplying apparatus 100 according to this embodiment. Fig. 1 shows a state in which the robot 30 holds and transports the socket 20. Fig. 2 shows a state in which the robot 30 has placed the socket 20 in the vicinity of the plug 10. Fig. 3 is a plan view seen from above of the liquid supplying apparatus 100 shown in Fig. 1, showing a state in which the robot 30 holds and transports the socket 20.

[0024] 1 is a device that supplies liquid contained in a liquid storage container 200 to a plurality of destination devices (not shown). Here, the liquid in this embodiment is, for example, pure water or various chemical liquids used in the semiconductor manufacturing process of a semiconductor manufacturing device.

[0025] As shown in FIGS. 1 to 3, the liquid supplying device 100 includes a plug (first plug) 10, a sealing plug 15, a socket 20, a robot (gripping mechanism) 30, an imaging section (recognition section) 40, and a control section 50.

[0026] 1, liquid storage container 200 is a container formed into a cylindrical shape about axis Z1 extending vertically, and has a top surface (top plate) provided with first opening 210 and second opening 220. Female threads are formed on the inner circumferential surfaces of first opening 210 and second opening 220.

[0027] The plug 10 has a plug-side liquid flow path 11 that is fixed to the first opening 210 and extends along the plug axis (first plug axis) Zp1. The plug-side liquid flow path 11 extends to the vicinity of the bottom 230 of the liquid storage container 200. A male thread is formed on the outer circumferential surface of the upper end of the plug 10. The plug 10 is fixed to the first opening 210 by engaging the male thread of the plug 10 with the female thread of the first opening 210.

[0028] Fig. 5 is a partial cross-sectional view showing a state in which the socket 20 has been moved close to the plug 10. As shown in Fig. 5, a groove portion 12 extending in an annular shape around the plug axis Zp1 is formed at the tip (upper end) of the plug 10. The groove portion 12 has a fixing groove (plug side fixing portion) 12a for fixing a lock ball (socket side fixing portion) 21Aa of the socket 20. The fixing groove 12a is formed in an annular shape around the plug axis Zp1.

[0029] 1, the sealing plug 15 is a member that is fixed to the second opening 220 and seals the second opening 220. A male thread is formed on the outer circumferential surface of the sealing plug 15. The male thread of the sealing plug 15 is engaged with the female thread of the second opening 220, whereby the sealing plug 15 is fixed to the second opening 220.

[0030] The socket 20 is detachably attached to the plug 10 and has a main body 21. The main body 21 has a socket-side liquid flow path 21a extending along a socket axis Zs1. The socket 20 is connected to a liquid pipe LL1 for supplying liquid to a destination device and a gas pipe GL1 for supplying gas (gas) to the liquid storage container 200. The socket 20 is held by a hand unit 31 of the robot 30.

[0031] 5, the tip (lower end) of the main body 21 of the socket 20 extends in an annular shape around the socket axis Zs1 and has a plurality of lock balls 21Aa fixed to the fixing groove 12a of the plug 10. The lock balls 21Aa are arranged at a plurality of positions at intervals around the socket axis Zs1. The detailed structure of the socket 20 will be described later.

[0032] 1 to 23, the robot 30 is a mechanism that holds the socket 20 and places the socket 20 in a predetermined posture at a three-dimensional position defined by an axis X, an axis Y, and an axis Z within a range of motion. The robot 30 is, for example, a six-axis articulated robot. The robot 30 has a hand unit 31, a wrist unit 32, a first arm unit 33, a second arm unit 34, a base unit 35, and a rotating body 36.

[0033] The rotating body 36 is supported rotatably about a vertical axis Zr1 relative to the base portion 35. The first arm portion 33 is supported rotatably about a horizontal axis Zr2 relative to the rotating body 36. The second arm portion 34 is supported rotatably about a horizontal axis Zr3 relative to the first arm portion 33. One end of the wrist portion 32 is attached to the second arm portion 34, and the hand portion 31 is attached to the other end.

[0034] The wrist unit 32 can be positioned at any three-dimensional position within the operating range by combining the rotational movement of the rotating body 36 relative to the base unit 35, the rotational movement of the first arm unit 33 relative to the rotating body 36, and the rotational movement of the second arm unit 34 relative to the first arm unit 33. The wrist unit 32 can also rotate on three axes, and the hand unit 31 can be displaced on the three axes to assume any posture.

[0035] The imaging unit 40 is a device that captures an image of the upper surface of the plug 10 and recognizes the position of the plug 10 in three-dimensional space and the orientation of the plug axis Zp1 of the plug 10. The imaging unit 40 transmits the recognition results of the position of the plug 10 in three-dimensional space and the orientation of the plug axis Zp1 of the plug 10 to the control unit 50.

[0036] The control unit 50 controls the robot 30 so that the socket 20 held by the hand unit 31 is positioned at the desired position and in the desired posture based on the recognition results of the position of the plug 10 in three-dimensional space and the direction of the plug axis Zp1 of the plug 10 transmitted from the imaging unit 40.

[0037] Next, a control method for liquid supplying apparatus 100 of the present embodiment will be described with reference to Fig. 4. Fig. 4 is a flow chart showing a control method for liquid supplying apparatus 100 of the present embodiment, and shows a process for attaching socket 20 to plug 10. Each process shown in Fig. 4 is performed by control unit 50 executing a control program.

[0038] In step S101, the control unit 50 controls the robot 30 to grip the socket 20 placed on the installation stand TB shown in Fig. 3. The control unit 50 stores in advance the position of the socket 20 placed on the installation stand TB, and moves the hand unit 31 to a position near the socket 20 and grips the socket 20.

[0039] In step S102 (gripping process), the control unit 50 controls the robot 30 so that, with the hand unit 31 gripping the socket 20, the socket 20 moves to the vicinity of the plug 10. The control unit 50 controls the robot 30 so that the tip of the main body unit 21 is positioned at a position a certain distance along the plug axis Zp1 from the position in three-dimensional space of the plug 10 recognized by the imaging unit 40. When placing the socket 20 near the plug 10, the robot 30 adjusts the hand unit 31 so that the orientation of the plug axis Zp1 recognized by the imaging unit 40 coincides with the orientation of the socket axis Zs1, and grips the socket 20.

[0040] In step S103 (insertion process), the control unit 50 controls the robot 30 to insert the tip of the body 21 of the socket 20 into the groove 12 of the plug 10. The robot 30 moves the hand unit 31 along the plug axis Zp1 so as to insert the tip of the body 21 toward the groove 12 of the plug 10.

[0041] Fig. 6 is a partial cross-sectional view showing the state in which the socket 20 is inserted into the plug 10. As shown in Fig. 6, the robot 30 inserts the tip of the body 21 into the groove 12 so that the lock ball 21Aa is positioned at a position a predetermined distance (first predetermined distance) L1 away from the fixing groove 12a on the plug axis Zp1. When the tip of the body 21 is inserted into the groove 12 of the plug 10, the state shown in Fig. 6 is reached.

[0042] In step S104 (coupling step), the control unit 50 controls the socket 20 to fix the socket 20 to the plug 10. The socket 20 has a sleeve member (adjustment unit) 23 that moves the tip of the main body portion 21 toward the bottom of the groove portion 12 of the plug 10. The sleeve member 23 is a member that switches between a coupled state in which the lock balls 21Aa are fixed to the fixing grooves 12a and a released state in which the lock balls 21Aa are not fixed to the fixing grooves 12a with the tip of the main body portion 21 inserted into the groove portion 12.

[0043] In step S104 (connecting step), the control unit 50 controls the position of the tip of the main body unit 21 on the socket axis Zs1 relative to the hand unit 31 of the robot 30 with the tip of the main body unit 21 inserted into the groove portion 12, and switches the released state to the connected state. When the detection unit 29 described later detects the connected state, the control unit 50 recognizes that the released state has been switched to the connected state, and proceeds to step S105.

[0044] Fig. 7 is a partial cross-sectional view showing a state in which the socket 20 is fixed to the plug 10. As shown in Fig. 7, when the lock ball 21Aa is placed in the fixing groove 12a, the lock ball 21Aa is fixed to the fixing groove 12a by the biasing force of the spring 24. Therefore, the state in which the socket 20 is fixed to the plug 10 is maintained unless an upward force that overcomes the biasing force of the spring 24 is applied.

[0045] As shown in Fig. 6, when the lock ball 21Aa is not positioned in the fixing groove 12a, the valve 25 comes into contact with the bellows 26, and the lower end of the socket-side liquid flow path 21a is sealed. On the other hand, as shown in Fig. 7, when the lock ball 21Aa is positioned in the fixing groove 12a, the bellows 26 comes into contact with the tip of the plug 10, and the valve 25 moves away from the bellows 26 accordingly. This unseals the socket-side liquid flow path 21a, resulting in the state shown in Fig. 7, and the socket-side liquid flow path 21a and the plug-side liquid flow path 11 are connected.

[0046] In step S105, the control unit 50 controls the robot 30 so that the hand unit 31 releases the state in which it has gripped the socket 20, and moves the hand unit 31 to a predetermined standby position.

[0047] In step S106, the control unit 50 operates a pump (not shown) connected to the liquid pipe LL1 to start supplying the liquid stored in the liquid storage container 200 to the supply destination device. The control unit 50 controls a gas supply source (not shown) connected to the gas pipe GL1 to supply gas (e.g., air or nitrogen) to the liquid storage container 200 in an amount equivalent to the volume of the liquid removed from the liquid storage container 200.

[0048] The gas supplied from the gas pipe GL1 to the socket 20 flows inside the socket 20 and is supplied to the space above the liquid storage container 200 via the plug-side gas flow path 13. The liquid that reaches the upper end of the plug-side liquid flow path 11 is guided to the liquid pipe LL1 via the socket-side liquid flow path 21a. The liquid guided to the liquid pipe LL1 is supplied to the supply destination device. In this manner, the liquid supply device 100 starts supplying the liquid to the supply destination device.

[0049] The supply of liquid by liquid supplying device 100 to the supply destination device continues as long as liquid remains in liquid storage container 200, but when the liquid in liquid storage container 200 runs out or falls below a predetermined amount, it is necessary to replace it with a new liquid storage container 200. The processing of steps S107 to S111 is processing for removing socket 20 from plug 10 in order to replace liquid storage container 200.

[0050] In step S107, the control unit 50 controls to stop the operation of the pump connected to the liquid pipe LL1 and the supply of gas from the gas supply source connected to the gas pipe GL1 to the socket 20. When the operation of the pump is stopped, the supply of liquid from the liquid storage container 200 to the liquid pipe LL1 is stopped.

[0051] In step S108, the control unit 50 controls the robot 30 to move the hand unit 31 from a predetermined standby position to a position where the socket 20 can be grasped, and to grasp the socket 20 with the hand unit 31. When the hand unit 31 grasps the socket 20, the state shown in FIG.

[0052] In step S109 (release step), with the tip of the main body 21 inserted into the groove 12, the control unit 50 controls the position of the main body 21 on the socket axis Zs1 relative to the gripping unit 22, and switches the connected state to the released state. The control unit 50 adjusts the position of the lock ball 21Aa on the socket axis Zs1 relative to the gripping position gripped by the hand unit 31 of the robot 30, and sets the lock ball 21Aa to a state where it is not positioned in the fixed groove 12a. When the detection unit 29, which will be described later, detects the released state, the control unit 50 recognizes that the connected state has been switched to the released state, and proceeds to step S110.

[0053] The sleeve member 23 applies an upward force that overcomes the biasing force of the spring 24, causing the spring 24 to contract. When the spring 24 contracts, the lock ball 21Aa is released from the fixed groove 12a, and the lock ball 21Aa moves to a position away from the fixed groove 12a, resulting in the state shown in FIG. 6. Thereafter, the control unit 50 controls the robot 30 to pull the socket 20 out of the plug 10. The robot 30 moves the hand unit 31 along the plug axis Zp1 so as to pull the tip of the main body unit 21 out of the groove unit 12 of the plug 10.

[0054] In step S110, the control unit 50 controls the robot 30 to move the hand unit 31, while the hand unit 31 is gripping the socket 20, to a cleaning container WC placed on the installation table TB. A cleaning liquid (e.g., pure water) for cleaning the liquid adhering to the socket 20 is stored in the cleaning container WC.

[0055] By immersing the socket 20 in the cleaning liquid, when the liquid adhering to the socket 20 is a chemical liquid such as a slurry that solidifies when exposed to the air, it is possible to prevent the chemical liquid from drying and solidifying while remaining on the socket 20. It is preferable to keep the socket 20 in a state where new cleaning liquid is constantly supplied to the cleaning container WC and to keep the socket 20 from being contaminated.

[0056] In step S111, the control unit 50 controls the robot 30 so that the hand unit 31 releases the socket 20 from its grip and releases the socket 20. Thereafter, the control unit 50 controls the robot 30 so that the hand unit 31 moves to a predetermined standby position. This completes the operation of removing the socket 20 from the plug 10.

[0057] Next, the structure of the socket 20 will be described in detail with reference to Figures 8 to 14. As shown in Figures 8 to 14, the socket 20 has a main body portion 21, a gripping portion 22, a sleeve member 23, a spring (biasing member) 24, a valve 25, a bellows 26, a spring 27, a support member 28, and a detection portion 29.

[0058] 9, the main body 21 has a socket body 21A, a seal core 21B, and a fitting 21C. The socket body 21A is disposed on the tip side of the main body 21, and the fitting 21C is disposed on the base end side of the socket body 21A. The seal core 21B is disposed between the socket body 21A and the fitting 21C, and connects the socket body 21A and the fitting 21C. The main body 21 is formed of a resin material (for example, a fluororesin material).

[0059] A valve 25 and a bellows 26 are fixed to the tip side of the main body 21 of the seal core 21B. The bellows 26 is expandable and contractable along the socket axis Zs1, and is biased by a spring 27 from the seal core 21B toward the tip of the main body 21.

[0060] The gripper 22 is formed in a substantially cylindrical shape along the socket axis Zs1, and is gripped by a hand unit 31 of a robot 30 that grips the socket 20. A recess 22a is formed in an annular shape around the socket axis Zs1 on the inner peripheral side of the gripper 22. A recess 22b is formed in an annular shape around the socket axis Zs1 on the outer peripheral side of the gripper 22. The recess 22b is the portion that is gripped by the hand unit 31.

[0061] The grip portion 22 has a cylinder guide (first cylindrical member) 22A, a cylinder body (second cylindrical member) 22B, an upper cylinder cover 22C, and a lower cylinder cover 22D.

[0062] The cylinder guide 22A is a member extending cylindrically around the socket axis Zs1, and is made of a metal material (for example, stainless steel). The inner peripheral surface of the cylinder guide 22A forms the bottom surface 22a1 of the recess 22a.

[0063] The cylinder body 22B is a member extending cylindrically around the socket axis Zs1 and is made of a resin material (for example, a fluororesin material). The cylinder body 22B is disposed so as to contact the outer circumferential surface of the cylinder guide 22A.

[0064] The upper cylinder cover 22C is a member formed in a disk shape around the socket axis Zs1 and is made of a resin material (e.g., a fluororesin material). The upper cylinder cover 22C is fixed to the top of the cylinder body 22B and is disposed in contact with the outer circumferential surface of the sleeve member 23 so as to seal the recess 22a.

[0065] The lower cylinder cover 22D is a member formed in a disk shape around the socket axis Zs1 and is made of a resin material (e.g., a fluororesin material). The lower cylinder cover 22D is fixed to the lower part of the cylinder body 22B and is disposed in contact with the outer circumferential surface of the sleeve member 23 so as to seal the recess 22a.

[0066] The sleeve member 23 is a member formed in a cylindrical shape along the socket axis Zs1 and arranged movably relative to the main body portion 21 along the outer circumferential surface 21b of the main body portion 21. The sleeve member 23 is arranged so as to close the recess 22a. The sleeve member 23 has a flange portion 23A that protrudes in a radial direction perpendicular to the socket axis Zs1 so as to contact the bottom surface 22a1 of the recess 22a.

[0067] In the recess 22a, a first space S1 is formed on the base end side (upper side) of the main body 21 relative to the flange portion 23A, and a second space S2 is formed on the tip end side (lower side) of the main body 21 relative to the flange portion 23A.

[0068] As shown in Fig. 10, a first port P1 and a second port P2 are attached to the upper cylinder cover 22C. Compressed air is supplied to the first port P1 from a compressed air source (not shown) via a first valve (not shown). Compressed air is supplied to the second port P2 from the compressed air source via a second valve (not shown). The opening and closing states of the first valve and the second valve are controlled by the control unit 50.

[0069] When the control unit 50 controls the first valve to be open and the second valve to be closed, compressed air is supplied to the first port P1. The compressed air supplied to the first port P1 is guided to the first space S1 via the first flow path 22C1 formed in the upper cylinder cover 22C. The sleeve member 23 moves toward the plug 10 along the socket axis Zs1 due to the pressure of the compressed air supplied to the first space S1.

[0070] The sleeve member 23 moves to a position where the lock ball 21Aa is disposed in the fixing groove 12a, thereby switching the release state in which the lock ball 21Aa is not fixed to the fixing groove 12a to a connection state in which the lock ball 21Aa is fixed to the fixing groove 12a.

[0071] In the connected state, the sleeve member 23 fixes the lock ball 21Aa in the fixing groove 12a by the biasing force of the spring 24. The spring 24 is an elastic member that biases the sleeve member 23 along the socket axis Zs1 toward the tip of the main body portion 21. When in the connected state, the state is as shown in Figures 11 and 12.

[0072] 13, when switching from the released state to the connected state, the sleeve member 23 moves toward the plug 10, and the lock ball 21Aa (indicated by a dotted line) comes into contact with the upper protrusion 12b of the fixing groove 12a. Thereafter, when the sleeve member 23 moves downward, the spring 24 contracts, and a gap CL1 is formed along the socket axis Zs1 between the sleeve member 23 and the annular member 24A arranged at the lower end of the spring 24.

[0073] The lock ball 21Aa enters the gap CL1, climbs over the protrusion 12b, and is guided to the fixing groove 12a. When the lock ball 21Aa is guided to the fixing groove 12a, the spring 24 expands, the gap CL1 disappears, and the lock ball 21Aa is fixed to the fixing groove 12a, resulting in a connected state.

[0074] When the control unit 50 controls the first valve to be in a closed state and the second valve to be in an open state, compressed air is supplied to the second port P2. The compressed air supplied to the second port P2 is guided to the second space S2 via the second flow path 22C2 formed in the upper cylinder cover 22C and the flow path 22B1 formed in the cylinder body 22B. The sleeve member 23 moves in a direction away from the plug 10 along the socket axis Zs1 due to the pressure of the compressed air supplied to the second space S2.

[0075] The sleeve member 23 moves in a direction opposite to the biasing force of the spring 24 relative to the main body 21, thereby switching the connected state in which the lock balls 21Aa are fixed to the fixing grooves 12a to a released state in which the lock balls 21Aa are not fixed to the fixing grooves 12a. The released state results in the state shown in Figures 9 and 10.

[0076] 14, when switching the coupled state to the released state, as the sleeve member 23 moves in a direction away from the plug 10, the lock ball 21Aa (indicated by a dotted line) comes into contact with the upper protrusion 12b of the fixing groove 12a. Thereafter, as the sleeve member 23 moves upward, the spring 24 contracts, and a gap CL2 is formed along the socket axis Zs1 between the sleeve member 23 and the annular member 21A1 fixed to the lower end of the socket body 21A.

[0077] The lock ball 21Aa enters the gap CL2, climbs over the protrusion 12b, and is guided to the position shown by the solid line in Fig. 14. Thereafter, the lock ball 21Aa is guided above the protrusion 12b as the sleeve member 23 moves upward. Then, the lock ball 21Aa enters a released state in which it is not fixed to the fixing groove 12a.

[0078] 8 to 12, the support member 28 is a substantially annular member that supports the fitting 21C of the main body 21 so as to be movable along the socket axis Zs1. As shown in Figs. 9 and 11, the support member 28 is connected to the upper cylinder cover 22C via a rod-shaped connecting member 28a extending along the socket axis Zs1. When the main body 21 moves relative to the grip portion 22 along the socket axis Zs1, the outer circumferential surface of the fitting 21C is supported by the support member 28.

[0079] The detection unit 29 is a device that detects a connected state in which the socket side liquid flow path 21a and the plug side liquid flow path 11 are connected, and a released state in which the lock ball 21Aa is not fixed to the fixing groove 12a. The detection result by the detection unit 29 is transmitted to the control unit 50.

[0080] As shown in Figures 8, 9, and 11, the detection unit 29 has a first magnet 29a and a second magnet 29b attached to the fitting 21C of the main body portion 21, and a first magnetic sensor 29c and a second magnetic sensor 29d attached to the support member 28.

[0081] As shown in Fig. 8, the first magnet 29a and the second magnet 29b are disposed at different positions in the circumferential direction about the socket axis Zs1. As shown in Fig. 9 and Fig. 11, the first magnet 29a and the second magnet 29b are disposed at different positions in the direction along the socket axis Zs1. The first magnet 29a is disposed at a position closer to the grip portion 22 than the second magnet 29b in the direction along the socket axis Zs1.

[0082] The first magnetic sensor 29c is a sensor that outputs whether or not the position on the socket axis Zs1 with respect to the grip portion 22 is fixed and the first magnet 29a is disposed in a nearby position. As shown in Fig. 9, the first magnetic sensor 29c outputs an ON state when the first magnet 29a is disposed in a position close to the support member 28 in the direction along the socket axis Zs1.

[0083] The second magnetic sensor 29d is a sensor that outputs whether or not the position on the socket axis Zs1 with respect to the grip portion 22 is fixed and the second magnet 29b is disposed in a nearby position. As shown in Fig. 11, the second magnetic sensor 29d outputs an ON state when the second magnet 29b is disposed in a position close to the support member 28 in the direction along the socket axis Zs1.

[0084] The detection unit 29 detects a released state in which the lock ball 21Aa is not fixed to the fixing groove 12a when the first magnetic sensor 29c outputs an ON state and the second magnetic sensor 29d outputs an OFF state. The detection unit 29 detects a connected state in which the socket side liquid flow path 21a and the plug side liquid flow path 11 are connected when the first magnetic sensor 29c outputs an OFF state and the second magnetic sensor 29d outputs an ON state. The detection unit 29 can reliably detect the released state and the connected state by combining the outputs of both the first magnetic sensor 29c and the second magnetic sensor 29d.

[0085] The actions and effects achieved by the liquid supplying apparatus 100 of the present embodiment described above will be described. According to the liquid supplying device 100 of the present embodiment, the socket 20 is gripped by the gripping portion 22 with the robot 30, and the tip of the main body 21 having the socket-side liquid flow path 21a is inserted into the groove 12 extending in an annular shape around the plug axis Zp1. With the tip of the main body 21 inserted into the groove 12, the socket 20 is switched by the sleeve member 23 between a connected state in which the lock ball 21Aa is fixed to the fixing groove 12a and the socket-side liquid flow path 21a and the plug-side liquid flow path 11 are connected, and a released state in which the lock ball 21Aa is not fixed to the fixing groove 12a.

[0086] According to the liquid supplying device 100 of the present embodiment, the released state can be switched to the connected state by adjusting the position of the sleeve member 23 of the socket 20 on the socket axis Zs1 of the main body 21 relative to the gripping part 22, so there is no need for the robot 30 gripping the socket 20 to apply a driving force to the socket 20 for fixing the socket 20 to the plug 10. Therefore, the lock ball 21Aa of the socket 20 can be fixed to the fixing groove 12a of the plug 10 to connect the socket side liquid flow path 21a and the plug side liquid flow path 11 without using a robot 30 having excessive driving force and gripping force.

[0087] According to the liquid supplying device 100 of the present embodiment, the state in which the lock ball 21Aa is fixed to the fixing groove 12a can be released by moving the sleeve member 23, which is biased toward the tip side of the main body 21 by the spring 24, in a direction opposite to the biasing force. Therefore, the socket 20 can be removed from the plug 10 by switching the coupled state to the released state without the intervention of an operator.

[0088] According to the liquid supplying device 100 of the present embodiment, by supplying compressed air to the first space S1 located closer to the base end of the main body 21 than the flange portion 23A of the sleeve member 23, the flange portion 23A can be moved from the base end side to the tip end side of the main body 21, and the disconnected state can be switched to the connected state. Also, by supplying compressed gas to the second space S2 located closer to the tip end of the main body 21 than the flange portion 23A of the sleeve member 23, the flange portion 23A can be moved from the tip end side to the base end side of the main body 21, and the connected state can be switched to the disconnected state.

[0089] According to the liquid supplying device 100 of this embodiment, the cylinder guide 22A forming the bottom surface 22a1 of the recess 22a is made of metal, so that the cylinder guide 22A is not deformed even if a high gripping force is applied by the robot 30. Therefore, the movement of the flange portion 23A is not hindered by the deformation of the cylinder guide 22A. In addition, because the cylinder body 22B is made of resin, the socket 20 can be made lighter in weight. [Explanation of symbols]

[0090] 10 Plug 11 Plug side liquid flow path 12 Groove 12a Fixing groove (plug side fixing part) 12b Protrusion 13 Plug side gas flow passage 20 Sockets 21 Main body 21A Socket body 21A1 Annular member 21Aa Lock ball (socket side fixing part) 21B Seal core 21C Fitting 21a Socket side liquid flow path 21b Outer surface 22 Gripping part 22A Cylinder guide 22B cylinder body 22B1 Flow path 22C Upper cylinder cover 22C1 First flow path 22C2 Second flow path 22D Lower cylinder cover 22a Recess 22a1 Bottom 22b recess 23 Sleeve member (adjustment part) 23A Flange part 24 Spring 24A Annular member 25 Valve 26 Bellows 27 Spring 30. Robot 31 Hand section 40 Imaging unit 50 Control section 100 Liquid supply device 200 Liquid storage container 210 First Opening 220 Second Opening 230 Bottom CL1,CL2 Gap GL1 Gas piping LL1 Liquid piping P1 First port P2 2nd port S1 1st space S2 2nd space TB installation stand WC cleaning container X,Y,Z axis Zp1 Plug axis Zs1 Socket axis

Claims

1. a plug that is fixed to an opening provided in an upper surface of the liquid storage container and has a plug-side liquid flow path that extends along an axis of the plug; a socket having a socket-side liquid flow path extending along a socket axis and removably attached to the plug, The plug is a groove portion that extends annularly around the plug axis and has a plug side fixing portion, The socket is a main body portion formed in a cylindrical shape along the socket axis and having the socket side liquid flow path; a gripping portion that is formed in a cylindrical shape along the socket axis and is gripped by a gripping mechanism that grips the socket, the gripping portion having an inner circumferential side with a recess that is formed in an annular shape around the socket axis; an adjustment unit that adjusts a position of the main body portion on the socket axis line relative to the gripping portion, a tip end of the main body portion extends in an annular shape around the socket axis and has a socket side fixing portion, The adjustment unit is a flange portion is disposed to close the recess and protrudes in a radial direction perpendicular to the socket axis so as to contact a bottom surface of the recess, a first space is formed on a base end side of the body portion relative to the flange portion, and a second space is formed on a tip end side of the body portion relative to the flange portion, a liquid supplying device which switches a connected state in which the socket side fixing part is fixed to the plug side fixing part by the pressure of compressed gas supplied to the second space, connecting the socket side liquid flow path and the plug side liquid flow path, to a released state in which the socket side fixing part is not fixed to the plug side fixing part, and switches the released state to the connected state by the pressure of compressed gas supplied to the first space.

2. a biasing member that biases the adjustment portion toward a tip end of the main body portion along the socket axis, The liquid supply device described in claim 1, wherein the adjustment portion is formed in a cylindrical shape along the socket axis and is arranged movably relative to the main body portion along the outer peripheral surface of the main body portion, and fixes the socket side fixed portion to the plug side fixed portion by the biasing force of the biasing member to establish the connected state, and moves in a direction opposite to the biasing force relative to the main body portion to switch the connected state to the released state.

3. The gripping portion is a first cylindrical member made of metal that forms a bottom surface of the recess; 3. The liquid supply device according to claim 2, further comprising: a second cylindrical member made of resin and arranged so as to contact an outer circumferential surface of the first cylindrical member.

4. The liquid supplying apparatus according to claim 1 , further comprising a detection unit that detects the connected state and the released state.

5. The liquid supply device described in claim 4, wherein the detection unit has a magnet attached to the main body and a magnetic sensor that outputs whether the position on the socket axis relative to the gripping unit is fixed and the magnet is positioned in a close proximity, and detects the connected state and the released state depending on the output of the magnetic sensor.

6. A method for controlling a liquid supplying device including a plug fixed to an opening provided in an upper surface of a liquid storage container and having a plug-side liquid flow path extending along a plug axis, and a socket having a socket-side liquid flow path extending along a socket axis, the method comprising the steps of: The plug is a groove portion that extends annularly around the plug axis and has a plug side fixing portion, The socket is a main body portion formed in a cylindrical shape along the socket axis and having the socket side liquid flow path; a gripping portion that is formed in a cylindrical shape along the socket axis and is gripped by a gripping mechanism that grips the socket, the gripping portion having an inner circumferential side with a recess that is formed in an annular shape around the socket axis; an adjustment unit that adjusts a position of the main body portion on the socket axis line relative to the gripping portion, a tip end of the main body portion extends in an annular shape around the socket axis and has a socket side fixing portion, The adjustment unit is a flange portion is disposed to close the recess and protrudes in a radial direction perpendicular to the socket axis so as to contact a bottom surface of the recess, a first space is formed on a base end side of the body portion relative to the flange portion, and a second space is formed on a tip end side of the body portion relative to the flange portion, a connecting step of controlling a position of the main body portion on the socket axis relative to the gripping portion by a pressure of compressed gas supplied to the first space, and switching a released state in which the socket side fixing portion is not fixed to the plug side fixing portion to a connected state in which the socket side fixing portion is fixed to the plug side fixing portion and the socket side liquid flow path and the plug side liquid flow path are connected; a release process for controlling the position of the main body portion on the socket axis relative to the grip portion by the pressure of compressed gas supplied to the second space, and switching the connected state to the released state.

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