Fluid flow device flow rate reference

The flow restrictor design with meandering grooves and expanded zones on stacked sheets addresses the issue of high uncertainty in flow rate measurements, enhancing the reliability and accuracy of fluid delivery in semiconductor manufacturing.

JP7880425B2Active Publication Date: 2026-06-25HORIBA STEC CO LTD
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Patents
Current Assignee / Owner
HORIBA STEC CO LTD
Filing Date
2022-12-08
Publication Date
2026-06-25

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Abstract

A flow restrictor is provided, comprising a first sheet including a flow passage and a second sheet laminated to the first sheet, the second sheet being perforated, the flow passage including a groove in a surface of the first sheet and communicating with an expansion zone in a peripheral area of ​​the first sheet, the peripheral edge of the second sheet contacting the first sheet in the expansion zone.
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Citation Information

Patent Citations

  • Fluid flow control device and its manufacture

    JP1997088907A

  • Flow restrictor

    JP2011257004A

  • Fluid mechanism and support member constituting the fluid mechanism

    JP2013083282A

  • Bypass unit, base for flowmeter, base for flow rate controller, flowmeter, and flow rate controller

    JP2017191090A

  • Exhaust gas after-treatment system and method for exhaust gas after-treatment

    JP2019074089A