Structure analysis device

Abstract

The invention relates to a structure analysis device (1) and to an associated method. The structure analysis device (1) comprises: a beam source (2) which generates an analysis beam (3) and is directed at a measurement point (4); a measurement signal detector (5) which detects portions of the analysis beam (3a) which are scattered or diffracted by a specimen at the measurement point (4) and converts said portions into an electrical measurement signal; and a reference signal detector (6) which detects reference radiation (3b) and converts said reference radiation into an electrical reference signal. The structure analysis device (1) also comprises electrical signal-splitting means (7) for dividing the electrical reference signal into a first and a second component, the first component having a static signal portion which substantially corresponds to the static signal portion of the electrical measurement signal, and means (8) for combining the first component with the electrical measurement signal to form an output signal (9) in such a way that respective static signal portions cancel each other out. The measurement signal detector (5) is mounted for movement with respect to the measurement point (4).

Description

[0001] Structural analysis device

[0002] The invention relates to a structural analysis device according to the preamble of claim 1 and a method for structural analysis of samples according to the preamble of claim 11.

[0003] The structural analysis of crystals is a fundamental method in materials science and plays a crucial role in the development of new materials and the investigation of their properties. Structural analysis generally refers to the determination of the atomic structure of a crystal by diffraction of suitable radiation at the crystal lattice. The radiation used is often monochromatic X-rays, which can be generated using an X-ray tube. Alternatively, particle beams, such as neutron beams, or synchrotron radiation can also be used. Synchrotron radiation is electromagnetic radiation emitted tangentially to the direction of motion of charged particles.

[0004] In general, electromagnetic waves, such as X-rays or light, which exhibit fundamentally the same diffraction phenomena, can be used for the structural analysis of ordered structures. For example, structural analysis can be performed using X-ray diffraction (XRD). X-ray diffraction is used in materials physics, crystallography, chemistry, and biochemistry.

[0005] For structural analysis, the scattering of electromagnetic radiation, such as light rays, can also be used. Scattering refers to the deflection of electromagnetic radiation through interaction with objects. An example of structural analysis through the scattering of electromagnetic radiation is the dynamic light scattering (DLS) technique, also known as photon correlation spectroscopy (PCS) or quasielastic light scattering (QELS). This is a common measurement technique for particle size analysis in the nanometer range.

[0006] Small-angle X-ray scattering (SAXS) is an analytical technique that measures the intensities of X-rays scattered by a sample as a function of the scattering angle. This allows, for example, the quantification of minute density differences in a sample. A structural analysis device is known in the prior art, for example, from US 5134276 A. The disclosed structural analysis device comprises a beam source, a measurement signal detector, a reference signal detector, as well as electrical signal splitters and means for combining signals, wherein stationary signal components cancel each other out. The beam source generates a laser beam that is split into a measurement beam and a reference beam, wherein the measurement beam strikes a sample and the reference beam does not interact with the sample. These beams strike photodiodes, which each generate an electrical measurement current and a reference current.The reference current is divided into two partial currents, with one of the partial currents having the same DC component as the measuring current, depending on the division ratio. Combining this partial current with the measuring current reduces unwanted noise. In a further embodiment, a circuit with a feedback loop is shown that automatically adjusts the division ratio of the reference current such that one of the partial currents has the same DC component as the measuring current. Such a circuit is referred to herein as an automatic balancer. A disadvantage of prior art structural analysis devices is that recording a scattering and / or diffraction pattern takes a long time.

[0007] The object of the present invention is to provide a structural analysis device that alleviates or eliminates at least some disadvantages of the prior art.

[0008] This problem is solved by a structural analysis device according to claim 1 and a method according to claim 11. Preferred embodiments are specified in the dependent claims, the description, and the drawings.

[0009] In a first aspect of the invention, a structural analysis device is provided, with

[0010] - a beam source that generates an analysis beam, wherein the analysis beam is electromagnetic radiation or a particle beam, wherein the beam source is directed towards a measuring point of the structural analysis device where a sample can be arranged,

[0011] - a measurement signal detector configured to detect scattered or diffracted components of the analytical beam from a sample located at the measurement point and to convert them into a proportional electrical measurement signal,

[0012] - a reference signal detector configured to detect a reference radiation derived from the analysis beam and convert it into a proportional electrical reference signal, wherein the electrical measurement signal and the electrical reference signal have stationary signal values ​​proportional to the scattered or diffracted components of the analysis beam and the reference radiation received by the measurement signal detector,

[0013] - electrical signal dividers for dividing the electrical reference signal into a first and a second component, wherein the first component of the electrical reference signal has a stationary signal component that essentially corresponds to the stationary signal component of the electrical measurement signal; and

[0014] - Means for combining the first component of the electrical reference signal with the electrical measurement signal to form an output signal in such a way that the respective stationary signal components contained in the first component of the electrical reference signal and the electrical measurement signal cancel each other out.

[0015] The structural analysis device according to the invention is characterized in that the measurement signal detector is arranged to be displaceable in at least one spatial axis with respect to the measurement point. Compared to the prior art, this offers the advantage that diffraction or scattering patterns can be recorded significantly faster. The intensity or flux of the incident analysis beam constitutes the main limiting factor. The movable components and an upper cutoff frequency of the automatic balancer (usually a few MHz) play only a subordinate role.

[0016] The relocation of the measurement signal detector includes translations in one, two and / or three dimensions, as well as rotations around any axis.

[0017] Furthermore, the structural analysis device according to the invention achieves a high sensitivity to fluctuations in the intensity or flux of the analysis beam, since these same fluctuations are detected by both the measurement signal detector and the reference signal detector. This can enable the production of portable structural analysis devices whose beam sources can have a correspondingly high degree of leeway with regard to these fluctuations.

[0018] As a welcome side effect, the structural analysis device according to the invention eliminates all noise from the detectors used, down to shot noise. Shot noise, also called Schottky noise, is a form of electronic noise caused by the discrete nature of electric current, particularly when electrons flow irregularly across an interface in semiconductors. It arises due to statistical fluctuations in the number of electrons or other charge carriers crossing a potential barrier in a given time interval, resulting in a variable current intensity.

[0019] It should be noted that particle beams include a wide variety of subatomic particles, including - but not limited to - electrons, positrons, neutrons, protons, alpha radiation (He nuclei) and muons.

[0020] In a preferred embodiment, a receiving area of ​​the measurement signal detector is directed towards the measurement point and remains directed towards the measurement point even when the measurement signal detector is relocated. This ensures that, after relocation of the measurement signal detector, the scattered or diffracted components of the analysis beam still reach the measurement signal detector. This embodiment also allows, for example, rotation of the measurement signal detector, with the axis of rotation essentially passing through the sample. In this way, diffraction patterns whose beam propagates spherically from the sample can be readily detected, and their angular dependence can be determined.

[0021] In a preferred embodiment, the measurement signal detector is configured as a line or area detector. An advantage of this embodiment is that individual detector pixels can be used as reference signal detectors. This proves particularly advantageous when the scattered or diffracted components of the analysis beam and the reference beam propagate essentially parallel in the same direction from the sample. If these two beams are close together, the measurement signal detector and the reference signal detector, if designed as two separate devices, could potentially interfere with each other.

[0022] Furthermore, in an area detector, the analysis beam (e.g., in the center of the sensor as a reference) and the refracted or diffracted components of the analysis beam (e.g., circles with an angle-dependent diameter as the signal) are measured with only one detector. Each signal pixel is connected to a reference pixel via an auto-balancer circuit. Alternatively, each signal pixel can be connected to all reference pixels via an auto-balancer circuit. Such configurations can be implemented using analog application-specific integrated circuits (ASICs). The corresponding signal pixels can then achieve, firstly, a very high contrast (typically around 120 dB) and, secondly, extremely high rates of change between the pixels in question.In a preferred embodiment, the measurement signal detector and the reference detector are configured to detect the intensity of the electromagnetic radiation and / or the flux of a particle beam. Electromagnetic radiation, especially X-rays, enables high-resolution imaging of the electron density distribution in crystals. This is crucial for determining the positions of atoms and molecules within a structure. Particle beams also offer several advantages. For example, a key difference between neutron beams and electromagnetic radiation is that neutrons are diffracted by atomic nuclei and not by electron clouds, allowing for a more precise determination of the atoms' positions and making it particularly easy to identify light elements such as hydrogen. Hydrogen atoms do not diffract X-rays well.Neutron diffraction occurs at both large and small angles, allowing for the investigation of larger scattering angles, which in turn increases the experimental resolution. Neutrons also possess a magnetic moment, making them suitable for investigating the magnetic properties of materials. It is particularly advantageous to use both electromagnetic radiation and neutron beams in a complementary manner to obtain the most complete picture possible of the structures under investigation.

[0023] In a preferred embodiment, the reference radiation is directed through the measuring point. This proves particularly advantageous for samples that are at least partially transparent. It should be noted here that "transparent" always refers to the type of radiation used. In an alternative preferred embodiment, the reference radiation is directed past the measuring point. This can be achieved, for example, by providing a beam splitter along the analysis beam upstream of the sample. This embodiment is particularly advantageous when the sample is essentially opaque to the radiation used.

[0024] In a preferred embodiment, the radiation source is configured to generate X-rays, and the measurement signal detector and the reference detector are configured to detect X-rays. X-rays can penetrate deep into most materials, making it possible to visualize internal structures without destroying the sample. X-rays typically have a wavelength similar to the distances between atoms in solids, making them ideal for investigating crystal structure. The diffraction patterns produced can be used to accurately determine atomic positions and analyze the crystal lattice structure. X-rays can also be used to study dynamic processes, as some X-ray sources, such as synchrotron radiation, can generate extremely fast pulses.

[0025] In a preferred embodiment, the beam source is configured to generate light in a spectral range of 300 to 2000 nm, and the measurement signal detector and the reference detector are configured to detect light in this range. Light in this spectral range can be easily manipulated with lenses, mirrors, and prisms to focus, direct, or disperse it. This enables the analysis of materials by measuring light absorption, emission, or scattering, providing insights into their molecular and atomic structure. The light is generally non-invasive and does not cause significant damage to sensitive materials. It is particularly preferred that the measurement signal detector and the reference detector are configured as photodiodes.

[0026] In a second aspect of the invention, a method for structural analysis of samples is provided, comprising

[0027] - Generating an analysis beam as electromagnetic radiation or a particle beam,

[0028] - Directing the analytical beam at a sample positioned at a measuring point,

[0029] - Detecting the portions of the analytical beam scattered or diffracted by the sample and converting them into a proportional electrical measurement signal,

[0030] - Deriving a reference radiation from the generated analysis beam, detecting the reference radiation and converting it into a proportional electrical reference signal, wherein the electrical measurement signal and the electrical reference signal have stationary signal values ​​that are proportional to the components of the analysis beam scattered or diffracted by the sample and to the reference radiation,

[0031] - Dividing the electrical reference signal into a first and a second component, wherein the first component of the electrical reference signal has a stationary signal component that essentially corresponds to the stationary signal component of the electrical measurement signal; and

[0032] - Combining the first component of the electrical reference signal with the electrical measurement signal to form an output signal in such a way that the respective stationary signal components contained in the first component of the electrical reference signal and the electrical measurement signal cancel each other out.

[0033] The method according to the invention is characterized in that the measurement signal detector is displaced along at least one spatial axis with respect to the measurement point. Compared to the prior art, this offers the advantage that diffraction or scattering patterns can be recorded significantly faster. The intensity or flux of the incident analysis beam constitutes the main limiting factor. The moving components and an upper cutoff frequency of the automatic balancer (usually a few MHz) play only a subordinate role.

[0034] Furthermore, according to the invention, a high insensitivity to fluctuations in the intensity or flux of the analysis beam is achieved, since these same fluctuations are detected by both the measurement signal detector and the reference signal detector. This can enable the production of portable structural analysis devices whose beam sources can have a correspondingly high degree of leeway with regard to these fluctuations.

[0035] In a preferred embodiment, the intensity of the portions of the electromagnetic radiation scattered or diffracted by the sample and the intensity of the electromagnetic reference radiation are detected, or the flux of the portions of the particle beam scattered or diffracted by the sample and the flux of the reference radiation are detected.

[0036] The intensity can be a function of location. Location here refers to the position of a detector before and after a displacement and / or to two pixels of a length or area detector. Alternatively or additionally, the intensity can be a function of time. This case is advantageous when the scattering pattern changes over time.

[0037] In a preferred embodiment, the reference radiation is directed through the sample. This proves particularly advantageous for samples that are at least partially transparent. It should be noted again that "transparent" always refers to the type of radiation used. In an alternative preferred embodiment, the reference radiation is directed past the sample. This can be achieved, for example, by providing a beam splitter along the analysis beam upstream of the sample. This embodiment is particularly advantageous when the sample is essentially opaque to the radiation used.

[0038] In a preferred embodiment, the generated electromagnetic radiation is X-rays. X-rays can penetrate deep into most materials, making it possible to visualize internal structures without destroying the sample. X-rays typically have a wavelength similar to the distances between atoms in solids, making them ideal for investigating crystal structure. The diffraction patterns produced can be used to accurately determine atomic positions and analyze the crystal lattice structure. X-rays can also be used to study dynamic processes, as some X-ray sources, such as synchrotron radiation, can generate extremely fast pulses.

[0039] In an alternative preferred embodiment, the generated electromagnetic radiation is light in a spectral range from 300 nm to 2000 nm. Light in this spectral range can be easily manipulated with lenses, mirrors, and prisms to focus, direct, or disperse it. It enables the analysis of materials by measuring light absorption, emission, or scattering, providing insights into their molecular and atomic structure. The light is generally non-invasive and does not cause significant damage to sensitive materials. It is particularly preferred that the measurement signal detector and the reference detector are configured as photodiodes.

[0040] Advantageous and non-restrictive embodiments of the invention described in the claims are explained in more detail below with reference to the drawings.

[0041] Fig. 1 shows a circuit diagram of an automatic balancer from the prior art. Fig. 2 shows an embodiment of the structural analysis device according to the invention.

[0042] Fig. 3a shows a further embodiment of the structural analysis device according to the invention, wherein the analysis beam is passed through the sample. Fig. 3b shows a further embodiment of the structural analysis device according to the invention, wherein the analysis beam is only partially passed through the sample.

[0043] Fig. 4a shows a further embodiment of the structural analysis device according to the invention, wherein the analysis beam is guided to a detector according to a theta-theta goniometer.

[0044] Fig. 4b shows a further embodiment of the structural analysis device according to the invention, wherein the analysis beam is guided to a detector according to a theta-2-theta goniometer.

[0045] Fig. 5a shows possible embodiments of an area detector.

[0046] Fig. 5b shows further possible embodiments of an area detector.

[0047] Reference is now made in detail to embodiments, examples of which are shown in the accompanying figures. The effects and features of the embodiments, as well as their implementation methods, are described with reference to the accompanying figures. In the figures, the same reference numerals denote the same elements, and redundant descriptions are omitted. However, the present invention can be implemented in several different forms and is not to be understood as limited to the embodiments shown here. Rather, these embodiments are provided as examples to ensure that this disclosure is thorough and complete and fully conveys the aspects and features of the present invention to those skilled in the art. Methods, elements, and techniques that are not necessary for a skilled person to fully understand the aspects and features of the present invention are not described.In the figures, the relative sizes of elements, layers, and areas may be exaggerated for clarity. The embodiments described below are merely illustrative of the principles of the present invention. It is understood that modifications and deviations of the arrangements and the details described herein will be apparent to other persons skilled in the art. It is therefore intended to limit ourselves to the scope of the pending patent claims and not to the specific details included herein for the description and explanation of the embodiments.

[0048] Figure 1 shows an exemplary circuit for an automatic balancer according to the prior art. A measuring photodiode and a reference photodiode are irradiated, each generating an electrical measuring current IS and an electrical reference current IR, respectively. The voltage applied to the circuit is denoted +Vcc / -Vcc. The output signal A can be expressed as A = (IS - g * IR) * Rf, where Rf is the value of the feedback resistor and g is the current division ratio, which describes what proportion of the electrical reference current comes from the subtraction node Isub and what proportion from ground. The current division ratio g is determined by the current divider CS. In symmetrical mode, g = 1, and the entire electrical reference current IR comes from the subtraction node Isub.In this mode, A = (IS - IR) * Rf, and the photodetector behaves like a conventional symmetrical photoreceiver, where laser noise is canceled out when the DC photocurrents are equal. In autobalanced mode, g is electronically controlled by a low-frequency feedback loop to maintain equal DC photocurrents, thus eliminating laser noise regardless of the photocurrent.

[0049] Figure 2 shows a preferred embodiment of the invention.

[0050] Structural analysis device 1 is shown. A beam source 2 generates an analysis beam 3, which in the illustrated embodiment is an X-ray beam, i.e., electromagnetic radiation. The analysis beam 3 strikes a measuring point 4 where a sample is arranged whose structure is to be examined.

[0051] Scattered or diffracted components of the analysis beam 3a propagate from the measuring point 4 and encounter a measurement signal detector 5, where they are detected. The measurement signal detector 5 is repositionable, as indicated by the double arrow in Fig. 2. If, for example, the scattered or diffracted components of the analysis beam 3a form a different angle with the analysis beam 3 than shown in Fig. 2, the measurement signal detector 5 can be repositioned accordingly so that these beams can be detected. The measurement signal detector 5 is designed such that a receiving area of ​​the measurement signal detector 5 is directed towards the measuring point 4 and remains directed towards the measuring point 4 when the measurement signal detector 5 is repositioned.

[0052] The sample used in Fig. 2 is partially transparent to X-rays, so that a reference beam 3b propagates in essentially the same direction as the analysis beam 3 and is therefore essentially parallel to it. The reference beam 3b is detected by a reference signal detector 6.

[0053] The measurement signal detector 5 and the reference signal detector 6 detect the intensity of the incoming radiation and convert the received radiation into an electrical measurement signal and an electrical reference signal, respectively, which are then fed to electrical signal dividers 7. The electrical signal dividers 7 divide the electrical reference signal into a first and a second component, the first component of the electrical reference signal having a stationary signal component that essentially corresponds to the stationary signal component of the electrical measurement signal.

[0054] Means for combining 8 combine the first component of the electrical reference signal with the electrical measurement signal to form an output signal 9 in such a way that the respective stationary signal components contained in the first component of the electrical reference signal and the electrical measurement signal cancel each other out.

[0055] Such an automatic balancer circuit, as used by the electrical signal divider means 7 and the means for combining 8, is known in the prior art, see Fig. 1 and the accompanying description.

[0056] Analytical beam 3 can include electromagnetic radiation, particularly X-rays or visible light, and / or particle beams. X-rays can penetrate deep into most materials, making it possible to visualize internal structures without destroying the sample. X-rays also typically have a wavelength similar to the distances between atoms in solids, making them ideal for investigating crystal structure. Light in a spectral range between 300 and 2000 nm can be easily manipulated with lenses, mirrors, and prisms to focus, steer, or disperse it. This allows for the non-invasive analysis of materials by measuring light absorption, emission, or scattering, providing insights into molecular and atomic structure. Particle beams also offer several advantages.For example, a key difference between neutron beams and electromagnetic radiation is that neutrons are diffracted by atomic nuclei, not electron clouds. This allows for a more precise determination of the atoms' positions and makes it particularly easy to identify light elements such as hydrogen. Neutron diffraction occurs at both large and small angles, enabling the investigation of larger scattering angles and thus increasing the experimental resolution. Furthermore, neutrons possess a magnetic moment, making them suitable for studying the magnetic properties of materials.

[0057] If the sample arranged at measuring point 4 is opaque to X-rays, a beam splitter may be provided along the analysis beam 3 upstream of measuring point 4 to divert the reference beam 3b before the analysis beam 3 hits measuring point 4.

[0058] In the embodiment shown in Fig. 2, the measurement signal detector 5 and the reference signal detector 6 are designed to detect X-rays. However, if the analysis beam includes visible light, for example in the range of 300 to 2000 nm, the measurement signal detector 5 and the reference signal detector 6 are designed to detect light in this spectral range. If the analysis beam includes neutron beams, the measurement signal detector 5 and the reference signal detector 6 are designed to detect the flux or flux density of neutron beams.

[0059] Fig. 3a shows an embodiment of the invention with a measuring point 4 at which a sample (not shown) is arranged that is partially transparent to the incoming analytical beam 3. A scattered or diffracted portion of the analytical beam 3a leaves the measuring point 4 at an angle, while a reference beam 3b leaves the measuring point 4 substantially parallel to the analytical beam 3. The reference beam 3b thus corresponds to those portions of the analytical beam 3 that interact little or not at all with the sample. Fig. 3b shows an embodiment of the invention with a measuring point 4 at which a sample (not shown) is arranged that is opaque to the incoming analytical beam 3. A scattered or diffracted portion of the analytical beam 3a leaves the measuring point 4 at an angle, while a reference beam 3b passes the measuring point 4 substantially parallel to the analytical beam 3.The reference beam 3b corresponds to a portion of the analysis beam 3 that was branched off from the analysis beam by a (not shown) beam splitter.

[0060] Fig. 4a shows an embodiment in which both the radiation source 2 and the measurement signal detector 5 are movable. Their respective movements are represented by arrows in Fig. 4a. The radiation source 2 and the measurement signal detector 5 move towards each other along an imaginary arc at the same but opposite angular velocities, while the measuring point 4 remains stationary. The measuring point 4 is located at the center of the arc. In other words, this embodiment implements the principle of a theta-theta goniometer. This embodiment is particularly suitable when the radiation source 2 is movable.

[0061] Fig. 4b shows an embodiment in which both the beam source 2 and the measuring point 4 are movable. Their respective movements are indicated by arrows in Fig. 4a. The measuring signal detector 5 moves at a first angular velocity along an imaginary circular arc, at the center of which lies the measuring point 4. The measuring point 4 rotates at a second angular velocity, which is half the magnitude of the first angular velocity and moves in the same direction. In other words, this embodiment implements the principle of a theta-2-theta goniometer. This embodiment is particularly suitable when the measuring point 4 is movable, especially rotatable.

[0062] Figures 5a and 5b show exemplary arrangements of detector pixels on a flat-area detector. In the illustrated embodiments, a measurement signal detector pixel 5 is shown in black and a reference signal detector pixel 6 is shown in white. It is, of course, possible for this assignment to be reversed, so that, for example, a measurement signal detector pixel 5 is shown in white and a reference signal detector pixel 6 in black. Further arrangements of measurement signal detector pixels 5 and reference signal detector pixels 6 are known to those skilled in the art.

[0063] It is evident that various features are combined in a single embodiment to simplify the presentation of the invention. This type of disclosure is not to be understood as meaning that the claimed embodiments require more features than are expressly stated in the individual claims. Rather, as the claims show, the subject matter of the invention lies in fewer than the features of a single disclosed embodiment.

Claims

Patent claims 1. Structural analysis device ( 1 ) with - a beam source (2) that generates an analysis beam (3), wherein the analysis beam (3) is electromagnetic radiation or a particle beam, wherein the beam source (2) is directed towards a measuring point (4) of the structural analysis device (1) at which a sample can be arranged, - a measurement signal detector (5) configured to detect scattered or diffracted components of the analysis beam (3a) from a sample located at the measuring point (4) and to convert them into a proportional electrical measurement signal, - a reference signal detector (6) configured to detect a reference radiation (3b) derived from the analysis beam and convert it into a proportional electrical reference signal, wherein the electrical measurement signal and the electrical reference signal have stationary signal values ​​proportional to the scattered or diffracted components of the analysis beam (3a) and the reference radiation (3b) received by the measurement signal detector (5), - electrical signal divider devices (7) for dividing the electrical reference signal into a first and a second component, wherein the first component of the electrical reference signal has a stationary signal component which is essentially equivalent to the stationary signal component of the electrical measurement signal; and - Means for combining (8) the first component of the electrical reference signal with the electrical measurement signal to form an output signal (9) such that the respective stationary signal components contained in the first component of the electrical reference signal and the electrical measurement signal cancel each other out, characterized in that the measurement signal detector (5) is arranged to be displaceable in at least one spatial axis with respect to the measuring point (4).

2. Structural analysis device according to claim 1, wherein a receiving area of ​​the measurement signal detector (5) is directed towards the measuring point (4) and remains directed towards the measuring point (4) when the measurement signal detector (5) is moved.

3. Structural analysis device according to claim 1 or 2, wherein the measuring signal detector (5) is designed as a line or area detector.

4. Structural analysis device according to one of the preceding claims, wherein the measurement signal detector (5) and the reference detector (6) are used to detect the intensity of a are designed for electromagnetic radiation and / or for detecting the flux of a particle beam.

5. Structural analysis device according to one of the preceding claims, wherein the reference radiation (3b) is directed through the measuring point (4).

6. Structural analysis device according to one of claims 1 to 4, wherein the reference radiation (3b) is directed past the measuring point (4).

7. Structural analysis device according to one of the preceding claims, wherein the beam source (2) is configured to generate X-ray radiation and the measurement signal detector (5) and the reference detector (6) are configured to detect X-ray radiation.

8. Structural analysis device according to one of the preceding claims, wherein the beam source (2) is configured to generate light in a spectral range of 300 to 2000 nm and the measurement signal detector (5) and the reference detector (6) are configured to detect light from 300 to 2000 nm.

9. Structural analysis device according to claim 8, wherein the measurement signal detector (5) and the reference detector (6) are designed as photodiodes.

10. Methods for structural analysis of samples, including - Generating an analysis beam (3) as electromagnetic radiation or particle beam, - Directing the analysis beam (3) towards a sample arranged at a measuring point (4), - Detecting the components of the analytical beam scattered or diffracted by the sample (3a) and converting them into a proportional electrical measurement signal, - Deriving a reference radiation (3b) from the generated analysis beam (3), detecting the reference radiation (3b) and converting it into a proportional electrical reference signal, wherein the electrical measurement signal and the electrical reference signal have stationary signal values ​​that are proportional to the components of the analysis beam (3a) scattered or diffracted by the sample and to the reference radiation (3b), - Dividing the electrical reference signal into a first and a second component, wherein the first component of the electrical reference signal has a stationary signal component that essentially corresponds to the stationary signal component of the electrical measurement signal; and - Combining the first component of the electrical reference signal with the electrical measurement signal to form an output signal (9) such that the respective stationary signal components contained in the first component of the electrical reference signal and the electrical measurement signal cancel each other out, characterized in that the measurement signal detector (5) is displaced in at least one spatial axis with respect to the measuring point (4).

11. Method according to claim 10, wherein the intensity of the portions of the electromagnetic radiation scattered or diffracted by the sample and the intensity of the electromagnetic reference radiation are detected, or wherein the flux of the portions of the particle beam scattered or diffracted by the sample and the flux of the reference radiation are detected.

12. Method according to claim 10 or 11, wherein the reference radiation (3b) is directed through the sample.

13. Method according to claim 10 or 11, wherein the reference radiation (3b) is directed past the sample.

14. Method according to any one of claims 10 to 13, wherein the generated electromagnetic radiation is X-ray radiation.

15. Method according to any one of claims 10 to 13, wherein the generated electromagnetic radiation is light in a spectral range of 300 nm to 2000 nm.

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