Boron diffusion apparatus, and production system

Abstract

A boron diffusion apparatus, and a production system. In the boron diffusion apparatus, a furnace body is provided with a gas inlet and a gas outlet opposite to each other in a first direction; a first ventilation pipe is provided with a first partial pipe body extending into the furnace body; and a second ventilation pipe is provided with a second partial pipe body extending into the furnace body, the length of the second partial pipe body being greater than the length of the first partial pipe body.

Description

Boron diffusion equipment and production system

[0001] Priority information

[0002] This disclosure claims priority and benefits to patent application No. 202411676616.0, filed with the China National Intellectual Property Administration on November 21, 2024, the entire contents of which are incorporated herein by reference. Technical Field

[0003] This disclosure pertains to the field of photovoltaic technology, and particularly relates to a boron diffusion device and production system. Background Technology

[0004] Solar photovoltaic (PV) technology is a technology that uses the energy of solar photons to generate electricity. It converts solar radiation into electrical energy using solar panels or photovoltaic panels to capture solar photons and convert them into electrical energy, and then uses batteries to store the converted electrical energy. Among the many processes in solar cell fabrication, boron diffusion is a challenging aspect. Boron diffusion is the step in preparing the PN junction in N-type photovoltaic cells, and the quality of the PN junction directly affects the efficiency of N-type cells. Boron diffusion involves depositing boron atoms from a boron source as boron trichloride onto the cell surface at high temperatures. These boron atoms then diffuse into the phosphorus-containing solar cell, forming the PN junction. Existing diffusion equipment suffers from the problem that some of the produced cells have high sheet resistance, resulting in power generation efficiencies that do not meet factory requirements. Summary of the Invention

[0005] The inventors discovered that the diffusion furnace gas inlet system commonly used in the industry generally adopts a single-path gas inlet. During the diffusion process of the boron source gas, the concentration gradually decreases. This makes it difficult to ensure that the solar cells at the rear end of the furnace can receive sufficient boron source, resulting in uneven boron diffusion. Consequently, some of the produced solar cells have a high sheet resistance and low power generation efficiency.

[0006] This disclosure provides a boron diffusion device, a solar cell, a solar cell module, and a solar cell production system, aiming to solve the problem that it is difficult to ensure that the solar cells at the rear end of the furnace can receive a sufficient boron source, resulting in uneven boron diffusion, high sheet resistance of some solar cells, and failure of the solar cells to meet the factory requirements for power generation efficiency.

[0007] In a first aspect, this disclosure provides a boron diffusion apparatus including a furnace body having an inlet and an outlet disposed opposite to each other in a first direction; and a first vent pipe configured to extend into the furnace body from the inlet, the first vent pipe having a first portion of the pipe extending into the furnace body.

[0008] The second vent pipe is configured to extend into the furnace body from the air inlet. The second vent pipe has a second part of the pipe extending into the furnace body, the length of which is greater than the length of the first part of the pipe.

[0009] This disclosure employs a first vent pipe and a second vent pipe. The second portion of the second vent pipe extending into the furnace body is longer than the first portion of the first vent pipe. The first vent pipe introduces boron source gas into the furnace body, filling it with a boron source gas atmosphere. The second vent pipe extends into the front-middle section of the furnace body, replenishing the front-middle region with boron source gas. This ensures that the solar cells near the furnace outlet receive sufficient boron source gas. The cooperation between the first and second vent pipes enables uniform diffusion of boron source gas within the furnace body, resulting in more uniform boron diffusion across the solar cells at different locations, thereby improving the uniformity of sheet resistance. Furthermore, the longer second portion of the second vent pipe allows the boron source gas to be heated by the furnace body temperature as it flows through, ensuring that the temperature of the boron source gas introduced through the second vent pipe is consistent with the furnace temperature. This guarantees that the boron source gas introduced through the second vent pipe and the existing boron source gas in the furnace have approximately the same deposition rate, further ensuring the uniformity of boron source deposition across the solar cells at different locations within the furnace.

[0010] Optionally, the first ventilator extends along a first direction, and in a second direction, the second ventilator and the first ventilator are spaced apart.

[0011] This disclosure, by extending the first vent pipe and the second vent pipe into the furnace body from different positions at the air inlet of the furnace body, can avoid mutual interference between the boron source gases introduced by the first vent pipe and the second vent pipe respectively, and better utilize the cooperative function of the first vent pipe and the second vent pipe.

[0012] Optionally, the second ventilation tube extends along the first direction.

[0013] This disclosure aligns the extension directions of the first and second vent pipes, meaning they transmit airflow along the same path or direction. This consistency ensures the stability and continuity of the airflow within the pipes, facilitating effective gas flow replenishment. Furthermore, because the first and second vent pipes extend in the same direction, airflow transmission within the pipes is smoother, preventing disturbance between gases flowing in different directions and avoiding undesirable gas flow patterns such as turbulence and disturbance, thus reducing resistance caused by changes in direction. This helps improve airflow efficiency, allowing the gas to reach the target location more quickly.

[0014] Optionally, the first ventilator extends along a second direction, and in the first direction, the second ventilator and the first ventilator are spaced apart.

[0015] This disclosure, by extending the first vent pipe and the second vent pipe into the furnace body from different positions at the air inlet of the furnace body, can avoid mutual interference between the boron source gases introduced by the first vent pipe and the second vent pipe respectively, and better utilize the cooperative function of the first vent pipe and the second vent pipe.

[0016] Optionally, the second ventilation tube extends in the second direction.

[0017] This disclosure ensures the stability and continuity of the gas flow within the pipes by setting the extension directions of the first and second vent pipes to be consistent, allowing each vent pipe to independently supply boron to the furnace, thus facilitating effective gas flow replenishment.

[0018] Optionally, in the second direction, the distance between the first vent pipe and the second vent pipe is greater than or equal to 1 / 2 of the furnace height.

[0019] This disclosure ensures that the airflow between the first and second vent pipes is not interfered with when the distance between them is large enough (greater than or equal to 1 / 2 of the furnace height), thereby improving ventilation efficiency.

[0020] Optionally, the ratio of the length of the second tube to the length of the furnace body is greater than or equal to 1 / 2 and less than or equal to 2 / 3.

[0021] This disclosure controls the ratio of the length of the second tube to the length of the furnace body within a reasonable range, ensuring that the outlet of the second vent pipe is located in the front middle of the furnace body, replenishing the boron source in the front middle of the furnace body, thereby balancing the boron source concentration in the front, middle and rear parts of the furnace body, improving the uniformity of gas diffusion in the furnace body, improving the uniformity of boron diffusion in the solar cells in the furnace body, and making the sheet resistance uniformity of the solar cells better.

[0022] Optionally, the port of the second part of the pipe is the first air outlet, and at least one second air outlet is provided on the peripheral sidewall of the second part of the pipe.

[0023] This disclosure enables gas to enter the reaction zone simultaneously from multiple directions by providing at least one second gas outlet on the peripheral sidewall of the second part of the tube, thereby greatly improving the uniformity of gas distribution.

[0024] Optionally, the peripheral sidewall of the second part of the pipe is provided with a plurality of second air outlets, which are spaced apart along the second part of the pipe in the first direction.

[0025] This disclosure, through the layout design of the second gas outlet on the second part of the tube, ensures that gas enters the target area simultaneously from multiple directions and positions. This allows for rapid and synchronous replenishment of the boron source to various areas in the front and middle sections of the furnace, reducing the time it takes for the boron source to reach the surface of the solar cells. When the gas pipe is long enough, the gas can more fully enter various parts of the front and middle sections of the furnace, ensuring that the surface of the solar cells is uniformly affected by the gas, thereby improving the uniformity of boron diffusion.

[0026] Optionally, a plurality of second air outlets are provided on at least one of the first surface and the second surface of the second part of the tube body, and the first surface and the second surface are parallel to each other in a first direction.

[0027] In this disclosure, the first surface and the second surface are arranged parallel to each other, so the gas outlets on the first surface and the second surface can be arranged symmetrically or oppositely, thereby achieving a more uniform and controllable gas distribution. By releasing gas simultaneously through multiple gas outlets, a more uniform gas distribution can be achieved, thereby ensuring that each location in the target area can obtain a sufficient and uniform gas supply.

[0028] Optionally, when multiple second air outlets are provided on both the first and second surfaces of the second part of the tube, the multiple second air outlets are arranged opposite each other in the second direction, either aligned or staggered.

[0029] When the gas outlets of the first and second surfaces are aligned one-to-one, they form a localized coverage within the target area, helping to ensure uniform gas diffusion to the surface of the solar cell and improving the efficiency of the reaction or processing. When the gas outlets of the first and second surfaces are staggered, a more complex airflow pattern can be formed. This design helps to further improve the uniformity and penetration of gas distribution, while also helping to optimize the airflow path and reduce energy consumption.

[0030] Optionally, a plurality of second air outlets are provided on at least one of the third and fourth surfaces of the second part of the tube body, and the third and fourth surfaces are parallel to each other in the second direction.

[0031] This disclosure arranges the third and fourth surfaces parallel to each other, so that the gas outlets on the third and fourth surfaces can be arranged symmetrically or oppositely, thereby achieving a more uniform and controllable gas distribution. By releasing gas simultaneously through multiple gas outlets, a more uniform gas distribution can be achieved.

[0032] Optionally, when multiple second air outlets are provided on both the third and fourth surfaces of the second part of the tube, the multiple second air outlets are arranged opposite each other in the third direction, either aligned or staggered.

[0033] When the gas outlets of the third and fourth surfaces are aligned one by one, they will form a local coverage in the target area, which helps to ensure that the gas diffuses evenly to the surface of the cell and improves the efficiency of reaction or processing. When the gas outlets of the third and fourth surfaces are staggered, a more complex airflow pattern can be formed. This design helps to further improve the uniformity and penetration of gas distribution, while also helping to optimize the airflow path and reduce energy consumption.

[0034] Optionally, the first surface is the upper surface of the second part of the tube, and the second surface is the lower surface of the second part of the tube.

[0035] Optionally, the third and fourth surfaces are the side surfaces of the second part of the tube.

[0036] Optionally, at least one second air outlet is provided with a first shielding cover, which is detachably connected to the second part of the pipe body.

[0037] This disclosure provides a first shielding cover to seal the second outlet, preventing gas from leaking from the outlet when not needed, which helps to ensure precise control and regulation of gas flow.

[0038] Optionally, it also includes an exhaust pipe configured to extend from the air inlet into the furnace body and extend along a first direction to the air outlet of the furnace body.

[0039] This disclosure uses a gas extraction pipe to extract gas from the furnace body, maintaining gas circulation within the furnace to achieve a dynamic equilibrium in the concentration of the gas atmosphere. This helps to achieve uniform gas distribution and efficient utilization, ensuring uniform boron diffusion on the surface of the solar cells.

[0040] Optionally, the exhaust pipe has a third section extending into the furnace body, the length of which is greater than the length of the second section.

[0041] This disclosure ensures that the gas introduced through the second vent pipe diffuses and deposits on the surface of the battery cells over a certain distance before being extracted by the exhaust pipe, by setting the length of the third part of the pipe to be greater than the length of the second part of the pipe. This fully utilizes the supplementary effect of the gas introduced through the second vent pipe on the front and middle part of the furnace body.

[0042] Optionally, in the second direction, the suction pipe, the first vent pipe, and the second vent pipe are arranged at intervals at the air inlet.

[0043] This disclosure achieves more uniform and stable gas flow by independently setting up the extraction pipe, the first vent pipe, and the second vent pipe, so that they do not interfere with each other.

[0044] Optionally, the second vent pipe and the exhaust pipe are arranged opposite to each other in the second direction, with the second vent pipe located at the top of the furnace body and the exhaust pipe located at the bottom of the furnace body.

[0045] This disclosure involves placing the second vent pipe at the top of the furnace body and the extraction pipe at the bottom of the furnace body. The gas introduced through the second vent pipe enters the extraction pipe in an arc-shaped trajectory, maximizing the coverage and flow through as many battery cells as possible within the limited space inside the furnace body. Furthermore, this design results in a longer diffusion path for the gas introduced through the second vent pipe, which can fully utilize the effectiveness of the boron source introduced through the second vent pipe.

[0046] Optionally, it also includes a piping assembly, wherein the first vent pipe and the second vent pipe are connected together to the piping assembly, and the piping assembly is used to provide a boron source to the first vent pipe and the second vent pipe.

[0047] This disclosure provides a piping assembly for precise control of the flow rate of the boron source. By adjusting the flow rate, it ensures that the first and second vent pipes receive an appropriate amount of boron source.

[0048] Optionally, the piping assembly includes:

[0049] The first pipeline, the first end of the first pipeline is connected to the first vent pipe;

[0050] The second pipeline has its first end connected to the second vent pipe;

[0051] The main pipeline is connected to the second end of the first pipeline and the second end of the second pipeline.

[0052] This disclosure allows boron source gas to be supplied to the first and second pipelines via a main pipeline, and enables independent supply of boron source to the first and second vent pipes, facilitating regulation and control.

[0053] Optionally, the piping assembly further includes a first valve disposed on the first pipeline and a second valve disposed on the second pipeline.

[0054] This disclosure controls the gas flow rate and volume by controlling the valve opening, thereby achieving precise control of the gas and effectively preventing excessive gas flow rate and uneven boron diffusion on the battery cells.

[0055] Optionally, the port of the second part of the pipe is the first air outlet, and a second shielding cover is provided on the first air outlet. The second shielding cover is detachably connected to the first air outlet.

[0056] This disclosure provides a second shielding cover to close the first outlet, preventing gas from leaking from the outlet when not needed, which helps to ensure precise control and regulation of gas flow.

[0057] Optionally, the second cover is provided with multiple vents.

[0058] This disclosure provides multiple vent holes on the second shielding cover, which, while meeting the shielding requirements, allows for adequate gas flow or pressure balance, thus helping to maintain a stable furnace environment.

[0059] Optionally, it also includes multiple carrier boats, which are arranged sequentially and at intervals in the furnace body in the first direction, and the carrier boats are used to place the battery cells.

[0060] In a second aspect, this disclosure provides a solar cell prepared using the boron diffusion apparatus described in any of the first aspects.

[0061] Optionally, multiple solar cells are stacked sequentially inside the carrier boat in the second direction.

[0062] Thirdly, this disclosure provides a battery assembly including the battery cells described in the second aspect.

[0063] Fourthly, this disclosure provides a solar cell manufacturing system, including the boron diffusion equipment of any of the first aspects, any of the solar cells of the second aspect, and the solar cell assembly of the third aspect. Attached Figure Description

[0064] Figure 1 is a schematic diagram of the boron diffusion device provided in this disclosure.

[0065] Figure 2 is a schematic diagram of the boron diffusion device provided in this disclosure.

[0066] Figure 3 is a schematic diagram of the boron diffusion device provided in this disclosure.

[0067] Figure 4 is a schematic diagram of the boron diffusion device provided in this disclosure.

[0068] Figure 5 is a partial structural schematic diagram of the boron diffusion device provided in this disclosure;

[0069] Figure 6 is a schematic diagram of the structure of the carrier boat of the boron diffusion device provided in this disclosure;

[0070] Figure 7 is a schematic diagram of the structure of the second vent pipe of the boron diffusion device provided in this disclosure;

[0071] Figure 8 is a schematic diagram of the second vent pipe of the boron diffusion device provided in this disclosure.

[0072] Figure 9 is a schematic diagram of the structure of the second vent pipe of the boron diffusion device provided in this disclosure.

[0073] Figure 10 is a schematic diagram of the structure of the second vent pipe of the boron diffusion device provided in this disclosure.

[0074] Explanation of reference numerals in the attached drawings: 100, furnace body; 101, air inlet; 102, air outlet; 200, first vent pipe; 201, first section of pipe; 300, second vent pipe; 301, second section of pipe; 302, first air outlet; 303, second air outlet; 400, extraction pipe; 401, third section of pipe; 500, pipeline assembly; 501, first pipeline; 502, second pipeline; 503, main pipeline; 504, first valve; 505, second valve; 600, support boat. Detailed Implementation

[0075] To make the objectives, technical solutions, and advantages of this disclosure clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this disclosure, and should not be construed as limiting this disclosure. Furthermore, it should be understood that the specific embodiments described herein are merely for explaining this disclosure and are not intended to limit this disclosure.

[0076] In the description of this disclosure, it should be understood that the terms “length”, “width”, “upper”, “lower”, “left”, “right”, “horizontal”, “top”, “bottom”, etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this disclosure and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this disclosure.

[0077] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the stated features. In the description of this disclosure, "a plurality of" means two or more, unless otherwise explicitly specified.

[0078] In the description of this disclosure, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linkage" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this disclosure according to the specific circumstances.

[0079] In this disclosure, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0080] The following disclosure provides numerous different embodiments or examples for implementing various structures of this disclosure. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of this disclosure. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, various specific examples of processes and materials are provided in this disclosure, but those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0081] The solar cell production system in this disclosure embodiment may include the boron diffusion equipment, solar cells, and solar cell assembly in this disclosure embodiment. The boron diffusion equipment in this disclosure embodiment can be used to prepare the solar cells in this disclosure embodiment, and several solar cells in this disclosure embodiment can be assembled into the assembly in this disclosure embodiment.

[0082] As shown in Figure 1, a boron diffusion device includes a furnace body 100, a first vent pipe 200, a second vent pipe 300, an extraction pipe 400, a pipeline assembly 500, and multiple support boats 600. The first vent pipe 200 and the second vent pipe 300 partially extend into the furnace body 100 to introduce boron source gas into the furnace body 100. The extraction pipe 400 partially extends into the furnace body 100 to extract gas, creating a negative pressure in a localized area within the furnace body 100. This accelerates the circulation of the boron source gas within the furnace body 100, resulting in a more uniform boron source concentration within the furnace body 100. Simultaneously, the extraction pipe 400 removes residual gas and impurities deposited during boron source diffusion within the furnace body 100, ensuring the purity of the boron source gas within the furnace body 100. The pipeline assembly 500 is connected to the first vent pipe 200 and the second vent pipe 300 to control the time, frequency and flow rate of the boron source gas introduced into the first vent pipe 200 and the second vent pipe 300. The carrier boat 600 is used to place the battery cells, and multiple battery cells are stacked sequentially in the carrier boat 600 in the second direction.

[0083] In some embodiments, the furnace body 100 has an air inlet 101 and an air outlet 102 disposed opposite to each other in a first direction. Specifically, the air inlet 101 of the furnace body 100 is located at the rear end of the furnace body 100, and the air outlet 102 of the furnace body 100 is located at the front end of the furnace body 100. It can be understood that the furnace body 100 can be divided into a front part, a middle part, and a rear part in the first direction. The rear part is the portion of the furnace body 100 near the air inlet 101, the front part is the portion of the furnace body 100 near the air outlet 102, and the middle part is the portion of the furnace body 100 between the front part and the rear part. It can be understood that in some embodiments, the air inlet 101 may be located at the tail of the furnace body 100, and the air outlet 102 may be located at the mouth of the furnace body 100. A first vent pipe 200 is configured to extend into the furnace body 100 from the air inlet 101. The first vent pipe 200 has a first portion 201 extending into the furnace body 100. A second vent pipe 300 is configured to extend into the furnace body 100 from the air inlet 101. The second vent pipe 300 has a second portion 301 extending into the furnace body 100, and the length of the second portion 301 is greater than the length of the first portion 201. In this embodiment, the first direction is the length direction of the furnace body 100. In the first direction, the air inlet 101 is located at one end of the furnace body 100 and is used to introduce boron source gas and oxygen to meet the gas deposition needs of the battery cells inside the furnace. The air outlet 102 is located at the other end of the furnace body 100 and is used to discharge gases that have been used or are no longer needed inside the furnace to maintain the effectiveness of the gas inside the furnace. The first vent pipe 200 and the second vent pipe 300 are respectively configured to extend into the furnace body 100 from the air inlet 101 to introduce boron source gas into the furnace body 100. The length of the second portion 301 of the second vent pipe 300 extending into the furnace body 100 is greater than the length of the first portion 201 of the first vent pipe 200 extending into the furnace body 100. The first vent pipe 200 is the main boron source supply line, introducing boron source gas into the furnace body 100 to fill the furnace with a boron source gas atmosphere. The second vent pipe 300 is an auxiliary boron source supply line. Given that the boron source gas introduced through the first vent pipe 200 diffuses within the furnace body 100... During the diffusion process, the concentration gradually decreases. The second vent pipe 300 extends into the front-middle part of the furnace body 100 to replenish the boron source gas in the front-middle region of the furnace body 100, ensuring that the solar cells at the gas outlet 102 of the furnace body 100 can receive sufficient boron source. The first vent pipe 200 and the second vent pipe 300 work together to achieve uniform diffusion of boron source gas within the furnace body 100, making the boron diffusion of solar cells at different locations within the furnace body 100 more uniform, thereby improving the uniformity of the sheet resistance of the solar cells. Here, the front-middle part of the furnace body 100 refers to the front end and middle part of the furnace body near the furnace opening.

[0084] In addition, the second part of the second vent pipe 300 extending into the furnace body 100 is relatively long. As the boron source gas flows through the second vent pipe 300, it is heated by the temperature of the furnace body 100, which makes the temperature of the boron source gas introduced through the second vent pipe 300 more consistent with that of the furnace. This ensures that the boron source gas introduced through the second vent pipe 300 and the original boron source gas in the furnace have approximately the same deposition rate, further ensuring the uniformity of boron source deposition of the battery cells at different locations in the furnace.

[0085] In some embodiments, the first vent pipe 200 and the second vent pipe 300 can extend into the furnace body 100 from the same position of the air inlet. For example, the first vent pipe 200 is sleeved on the outside of the second vent pipe 300, and the inner diameter of the first vent pipe 200 is larger than the outer diameter of the second vent pipe 300. In this way, the second vent pipe 300 can be added without any modification to the original furnace body 100 to supplement the front middle part of the furnace body 100 with boron source gas.

[0086] In some embodiments, the first vent pipe 200 and the second vent pipe 300 can extend into the furnace body 100 from the same position of the air inlet. For example, the first vent pipe 200 and the second vent pipe 300 can extend into the furnace body 100 from the same hole, and the first vent pipe 200 and the second vent pipe 300 can be arranged side by side. In this way, the installation of the second vent pipe 300 can be completed by slightly enlarging the original hole based on the original structure of the furnace body 100, and the modification cost is low.

[0087] In some embodiments, the first vent pipe 200 and the second vent pipe 300 can extend into the furnace body 100 from different positions at the air inlet. For example, the first vent pipe 200 can extend into the furnace body 100 from its original position without change, and the second vent pipe 300 can extend into the furnace body 100 from a reserved hole at the air inlet. The gap between the second vent pipe 300 and the reserved hole is sealed to complete the installation of the second vent pipe 300. This way, no changes to the structure of the furnace body 100 are required, and the existing structure of the furnace body 100 can be improved. By having the first vent pipe 200 and the second vent pipe 300 extend into the furnace body 100 from different positions at the air inlet, mutual interference between the boron source gases introduced by the first vent pipe 200 and the second vent pipe 300 can be avoided, and the cooperative function of the first vent pipe 200 and the second vent pipe 300 can be better utilized. In other words, the first vent pipe 200 introduces boron source gas to fill the furnace body 100 with a boron source gas atmosphere, and the second vent pipe 300 introduces boron source gas to supplement the front and middle area of ​​the furnace body 100.

[0088] Optionally, as shown in Figures 1 and 2, the first vent pipe 200 extends along a first direction, and in a second direction, the second vent pipe 300 is spaced apart from the first vent pipe 200, with the second vent pipe 300 extending along the first direction. In this embodiment, the second direction can be the radial direction of the furnace body 100, which can be understood as any direction from the central axis of the furnace body 100 toward the peripheral sidewall of the furnace body 100. The first vent pipe 200 and the second vent pipe 300 are spaced apart in the second direction, and their extension directions are consistent, meaning they transmit airflow along the same path or direction. This consistency ensures the stability and continuity of the airflow within the pipe, contributing to effective gas flow replenishment. Furthermore, because the first vent pipe 200 and the second vent pipe 300 extend in the same direction, the airflow transmission within the pipe is smoother, avoiding disturbance between gases flowing in different directions to form turbulent and other undesirable gas flow patterns, and reducing resistance caused by changes in direction. This helps improve airflow efficiency, allowing the gas to reach the target position more quickly.

[0089] In some embodiments, as shown in FIG4, the first vent pipe 200 extends along a second direction, and the second vent pipe 300 is spaced apart from the first vent pipe 200 in a first direction. The first vent pipe 200 and the second vent pipe 300 are arranged in the same direction in the second direction, and the first vent pipe 200 and the second vent pipe 300 independently supply boron sources to the furnace, ensuring the stability and continuity of the gas flow in the pipes and facilitating effective gas flow replenishment.

[0090] In some embodiments, as shown in FIG3, the first vent pipe 200 and the second vent pipe 300 may extend in different directions. For example, the first vent pipe 200 may extend in a first direction and the second vent pipe 300 may extend in a second direction, or the first vent pipe 200 may extend in a second direction and the second vent pipe 300 may extend in a first direction. This disclosure does not limit this. By arranging the first vent pipe 200 and the second vent pipe 300 in different directions, the boron source can be introduced from all directions, ensuring the supply of the boron source.

[0091] Optionally, in the second direction, the distance between the first vent pipe 200 and the second vent pipe 300 is greater than or equal to half the height of the furnace body 100. When the distance between the first vent pipe 200 and the second vent pipe 300 is sufficiently large (greater than or equal to half the height of the furnace body 100), it can be ensured that the airflow between the two pipes will not interfere with each other, thereby improving ventilation efficiency. Optionally, in this embodiment of the present disclosure, the furnace body 100 is generally in the shape of a horizontal cylinder. The outlet direction of the first vent pipe 200 is located on the central axis of the furnace body 100. The second vent pipe 300 is located near the edge of the inner sidewall of the furnace body 100. The outlet of the first vent pipe 200 is located at the rear of the furnace body 100, and the outlet of the second vent pipe 300 is located at the middle of the furnace body 100. Understandably, the air intake of the second vent pipe 300 is slightly less than that of the first vent pipe 200. This is because the air intake from the first vent pipe 200 is less than that from the second vent pipe 300. The gas from the vent pipe 200 gradually diffuses from the rear of the furnace body 100 into the entire furnace body 100. However, due to the direction of airflow, the gas from the second vent pipe 300 can only flow from the middle of the furnace body 100 to the front of the furnace body 100, and it is difficult to diffuse to the rear of the furnace body 100. The main function of the second vent pipe 300 is to compensate for the insufficient gas diffusion at the front of the furnace body 100. Therefore, when the air intake of the second vent pipe 300 is slightly less than that of the first vent pipe 200, it can effectively improve the uniformity of gas diffusion within the furnace body 100.

[0092] In some embodiments, in the first direction, the ratio of the length of the second portion of the tube 301 extending in the first direction to the length of the furnace body 100 is greater than or equal to 1 / 2 and less than or equal to 2 / 3. This ratio ensures that the outlet of the second vent pipe 300 is located in the front-middle part of the furnace body 100, replenishing the boron source in the front-middle part of the furnace body 100. This balances the boron source concentration in the front, middle, and rear parts of the furnace body 100, improving the uniformity of gas diffusion within the furnace body 100, and enhancing the uniformity of boron diffusion in the solar cells, resulting in better sheet resistance uniformity of the solar cells. Furthermore, an appropriate tube length ratio helps achieve gas thermal uniformity within the tube. The gas introduced through the second vent pipe 300 undergoes a longer preheating process within the furnace, ensuring that the gas temperature is essentially the same as the furnace temperature. This reduces the impact of temperature fluctuations on the boron diffusion process, which helps improve the yield and quality stability of the solar cells. Optionally, the ratio of the length of the second section tube 301 to the length of the furnace body 100 ranges from 50% to 80%.

[0093] In some embodiments, the length of the second section of the tube 301 can be set according to the number of carrier boats 600 inside the furnace body 100 of the boron diffusion device. For example, as shown in Figure 1, there are nine carrier boats 600 inside the furnace body 100, and the gas outlet of the second section of the tube 301 is located at the starting position of the third-to-last carrier boat 600 in the furnace body 100. Understandably, the gas outlet of the second section of the tube 301 can also be placed at the starting position of the second-to-last carrier boat 600. This disclosure does not impose any limitations. When the number of carrier boats 600 changes, the position of the second section of the tube 301 can be adaptively adjusted according to the number of carrier boats 600, so that the gas introduced by the second vent pipe 300 enters the exhaust pipe 400 with an arc trajectory, maximizing the coverage and flow through as many battery cells as possible within the limited space inside the furnace body 100. Furthermore, this design results in a longer gas diffusion path introduced by the second vent pipe 300, which can fully utilize the effectiveness of the boron source introduced by the second vent pipe 300.

[0094] In some embodiments, as shown in FIG7, the port of the second part of the tube 301 is a first gas outlet 302, and at least one second gas outlet 303 is provided on the peripheral sidewall of the second part of the tube 301. By providing at least one second gas outlet 303 on the peripheral sidewall of the second part of the tube 301, gas can enter the reaction zone simultaneously from multiple directions, thereby greatly improving the uniformity of gas distribution. This design allows the equipment to be adjusted and optimized according to different process requirements. For example, by adjusting the opening and flow rate of the first gas outlet 302 and the second gas outlet 303, different gas distribution patterns can be achieved, thereby adapting to different process conditions. In addition, increasing the number of second gas outlets 303 can also disperse the outlet pressure of the gas and reduce the load on a single gas outlet. Optionally, the peripheral sidewall of the second part of the tube 301 is provided with multiple second gas outlets 303, and the multiple second gas outlets 303 are spaced apart along the second part of the tube 301 in a first direction. By designing the layout of the second gas outlet 303 on the second section of the tube 301, it is possible to ensure that gas enters the target area simultaneously from multiple directions and positions. This allows for rapid and synchronous replenishment of the boron source to various areas in the front and middle sections of the furnace body 100, reducing the time it takes for the boron source to reach the surface of the solar cells. When the vent pipe is long enough, the gas can more fully enter various parts of the front and middle sections of the furnace body 100, ensuring that the surface of the solar cells is uniformly affected by the gas, thereby improving the uniformity of boron diffusion. A reasonable gas outlet layout can optimize the airflow path, reduce gas resistance and energy consumption within the pipe, and reduce eddies and turbulence, thereby lowering the gas flow resistance and improving the gas flow diffusion efficiency within the furnace body 100.

[0095] In some embodiments, as shown in FIG8, a plurality of second gas outlets 303 are provided on at least one of the first and second surfaces of the second portion of the tube 301, and the first and second surfaces are parallel to each other in a first direction. Since the first and second surfaces are parallel, the gas outlets on the first and second surfaces can be arranged symmetrically or oppositely, thereby achieving a more uniform and controllable gas distribution. Simultaneous gas release from multiple outlets can achieve a more uniform gas distribution, ensuring that all locations within the target area receive a sufficient and uniform gas supply. When multiple second gas outlets 303 are provided on both the first and second surfaces of the second portion of the tube 301, the multiple second gas outlets 303 can be arranged opposite each other in the second direction, either aligned or staggered. Gas enters the target area simultaneously from the two opposite surfaces of the tube. This design greatly increases the uniformity of gas distribution, ensuring that all locations within the target area receive a sufficient and uniform gas supply. When the gas outlets on the first and second surfaces are aligned, they form a localized coverage within the target area, helping to ensure uniform gas diffusion to the surface of the battery cell and improving the efficiency of the reaction or processing. When the gas outlets of the first and second surfaces are staggered, a more complex airflow pattern can be formed. This design helps to further improve the uniformity and penetration of gas distribution, while also helping to optimize the airflow path and reduce energy consumption. In addition, the staggered gas outlets can reduce gas accumulation and eddies at the outlets, allowing the boron source to be smoothly introduced into the furnace body 100.

[0096] In some embodiments, as shown in FIG9, a plurality of second gas outlets 303 are provided on at least one of the third and fourth surfaces of the second portion of the tube 301, and the third and fourth surfaces are parallel to each other in a second direction. Since the third and fourth surfaces are parallel, the gas outlets on the third and fourth surfaces can be arranged symmetrically or oppositely, thereby achieving a more uniform and controllable gas distribution. Simultaneous gas release from multiple outlets can achieve a more uniform gas distribution, ensuring that all locations within the target area receive a sufficient and uniform gas supply. When multiple second gas outlets 303 are provided on both the third and fourth surfaces of the second portion of the tube 301, the multiple second gas outlets 303 can be arranged opposite each other in a third direction, either aligned or staggered. Gas enters the target area simultaneously from the two opposite surfaces of the tube. This design greatly increases the uniformity of gas distribution, ensuring that all locations within the target area receive a sufficient and uniform gas supply. When the gas outlets on the third and fourth surfaces are aligned, they form a localized coverage within the target area, helping to ensure uniform gas diffusion to the surface of the solar cell and improving the efficiency of the reaction or processing. When the gas outlets on the third and fourth surfaces are staggered, a more complex airflow pattern can be formed. This design helps to further improve the uniformity and penetration of gas distribution, while also helping to optimize the airflow path and reduce energy consumption. In addition, the staggered gas outlets can reduce gas accumulation and eddies at the outlets, allowing the boron source to be smoothly introduced into the furnace body 100.

[0097] Optionally, the first surface is the upper surface of the second part of the tube 301, the second surface is the lower surface of the second part of the tube 301, and the third and fourth surfaces are the side surfaces of the second part of the tube 301. The overall structure of the second part of the tube 301 consists of the upper surface, the lower surface, and the two side surfaces, forming a closed space that can contain gas and exchange with the external environment through the gas outlet. Specifically, the upper surface is the arc surface of the second part of the tube 301 facing the top of the furnace body 100, the lower surface is the arc surface of the second part of the tube 301 facing the bottom of the furnace body 100, and the side surfaces are the two vertical arc surfaces of the second part of the tube 301 connecting the upper and lower surfaces.

[0098] In some embodiments, as shown in FIG10, the second air outlet 303 may be disposed only at the port of the second portion of the pipe body 301 of the second vent pipe 300 or at any location on the peripheral sidewall of the second portion of the pipe body 301, for example, on at least one of the upper surface, lower surface, and two side surfaces, for example, only on the upper surface, or simultaneously on the upper surface and one side surface. This disclosure does not impose any limitations on this. When multiple second air outlets 303 are provided, the distribution of the multiple second air outlets 303 may be symmetrical or asymmetrical. 。

[0099] In some embodiments, at least one second outlet 303 is provided with a first shield (not shown), which is detachably connected to the second portion of the tube 301. Understandably, the first shield is typically a cap that matches the shape of the second outlet 303, used to seal the second outlet 303 and prevent gas leakage from the outlet when not needed, which helps ensure precise control and regulation of gas flow. The first shield is detachably connected to the second portion of the tube 301; exemplaryly, this connection can be a threaded connection, a snap-fit ​​connection, a bolted connection, or other methods that facilitate disassembly and installation. Optionally, the first shield is threaded to the second portion of the tube 301, which is both secure and easy to operate. In some embodiments, the first shielding cover may also be configured as a half-shielding shape or a one-third-shielding shape to partially block the gas flowing out from the second part of the tube 301. When the required gas flow rate needs to be precisely controlled, the first shielding cover can be moved to a predetermined position for blocking, for example, the first shielding cover can be moved to one-third of the position of the second gas outlet 303 for blocking or the first shielding cover can be moved to one-half of the position of the second gas outlet 303 for blocking. This disclosure does not limit this.

[0100] Similarly, the second part of the tube body 301 has a first air outlet 302 at its port. A second shielding cover (not shown in the figure) is provided on the first air outlet 302, and the second shielding cover is detachably connected to the first air outlet 302. The second shielding cover is typically a cover that matches the shape of the first air outlet 302, used to seal the first air outlet 302 and prevent gas leakage from the outlet when not needed. This helps ensure precise control and regulation of gas flow. The second shielding cover is detachably connected to the first air outlet 302; exemplaryly, this connection method can be a threaded connection, a snap-fit ​​connection, a bolt connection, or other methods that facilitate disassembly and installation. Optionally, the second shielding cover is threaded to the first air outlet 302, which is both secure and easy to operate. Optionally, the second shielding cover is provided with multiple vent holes, so that while meeting the shielding requirements, appropriate gas flow or pressure balance can be achieved, helping to maintain a stable furnace environment. The number and distribution of vent holes should be determined according to the specific application scenario and requirements, and this disclosure does not impose any limitations on this.

[0101] In some embodiments, the extraction pipe 400 is configured to extend into the furnace body 100 from the air inlet, and extends along a first direction to the air outlet of the furnace body 100. The main function of the extraction pipe 400 is to extract the gas from the furnace body 100, maintain the gas circulation within the furnace, and maintain a dynamic equilibrium in the concentration of the gas atmosphere within the furnace. This helps to achieve uniform gas distribution and efficient utilization, ensuring uniform boron diffusion on the surface of the solar cells. Understandably, the extraction pipe 400 is arranged in the same direction as the first vent pipe 200 and the second vent pipe 300, and the extraction pipe 400 extends to the air outlet of the furnace body 100, enabling the gas circulation at the front of the furnace body 100. This allows the boron source gas to enter from the rear and middle of the furnace body 100, diffuse to the front of the furnace body 100, and then be extracted, achieving dynamic circulation of the gas throughout the furnace body 100.

[0102] Optionally, the extraction pipe 400 has a third section 401 extending into the furnace body 100, the length of which is greater than the length of the second section 301. This ensures that the gas introduced through the second vent pipe 300 diffuses and deposits on the surface of the solar cells over a certain distance before being extracted by the extraction pipe 400, thus fully utilizing the supplementary effect of the gas introduced through the second vent pipe 300 on the front and middle part of the furnace body 100.

[0103] In some embodiments, as shown in FIG5, the extraction pipe 400, the first vent pipe 200, and the second vent pipe 300 are arranged at intervals at the air inlet in the second direction. This allows the extraction pipe 400, the first vent pipe 200, and the second vent pipe 300 to be independently configured without interference, resulting in more uniform and stable gas flow. Optionally, the second vent pipe 300 and the extraction pipe 400 are arranged opposite each other in the second direction, with the second vent pipe 300 located at the top of the furnace body 100 and the extraction pipe 400 located at the bottom of the furnace body 100. This allows the gas introduced through the second vent pipe 300 to enter the extraction pipe 400 with an arc-shaped trajectory, maximizing coverage and flowing through as many battery cells as possible within the limited space of the furnace body 100. Furthermore, this design results in a longer diffusion path for the gas introduced through the second vent pipe 300, fully utilizing the effectiveness of the boron source introduced through the second vent pipe 300.

[0104] In some embodiments, as shown in Figures 1-4, multiple carrier boats 600 are sequentially spaced apart within the furnace body 100 in a first direction. The carrier boats 600 are used to hold battery cells. Specifically, the outlet direction of the first vent pipe 200 is parallel to the battery cells within the carrier boat 600. The central axis of the carrier boat 600 is substantially coincident with the central axis of the furnace body 100, ensuring that the carrier boat 600 is located at the maximum center of the furnace body 100. This facilitates the uniformity of airflow distribution within the furnace body 100. As shown in Figure 6, the carrier boats 600 are suitable for horizontally placing the battery cells, with each battery cell parallel to the others and parallel to the central axis of the furnace body 100. In this way, the direction of the boron source is parallel to the surface of the solar cell to be deposited. During the gas flow, the solar cell has less obstruction to the gas flow field, the flow field is more stable, and the airflow can fully immerse the solar cell during the airflow process. The airflow path is completely controllable. The boron source can fully contact the solar cell and be uniformly attached to the surface of the solar cell. At the same time, the airflow direction is parallel to the surface of the solar cell to be deposited. The airflow pattern will not be disturbed by the arrangement of the solar cells, ensuring that the airflow pattern is stable from the air inlet to the air outlet.

[0105] In some embodiments, as shown in Figures 1-4, the first vent pipe 200 and the second vent pipe 300 are jointly connected to a piping assembly 500, which provides a boron source to both the first vent pipe 200 and the second vent pipe 300. The piping assembly 500 precisely controls the flow rate of the incoming boron source; by adjusting the flow rate, it ensures that the first vent pipe 200 and the second vent pipe 300 receive an appropriate amount of boron source. Optionally, the piping assembly 500 includes a first pipe 501, a second pipe 502, and a main pipe 503. The first end of the first pipe 501 is connected to the first vent pipe 200, the first end of the second pipe 502 is connected to the second vent pipe 300, and the second ends of the first pipe 501 and the second ends of the second pipe 502 are jointly connected to the main pipe 503. Boron source gas can be supplied to the first pipeline 501 and the second pipeline 502 through the main pipeline 503, and the boron source can be independently supplied to the first vent pipe 200 and the second vent pipe 300, which is convenient for adjustment and control. By installing a flow control valve, pressure regulator or mass flow controller on the main pipeline 503, the first pipeline 501 or the second pipeline 502, the flow rate and pressure of the fluid flowing to the first vent pipe 200 and the second vent pipe 300 can be precisely adjusted.

[0106] Optionally, the piping assembly 500 further includes a first valve 504 disposed on the first piping 501 and a second valve 505 disposed on the second piping 502. By controlling the opening degree of the valves, the flow rate and volume of the gas can be controlled, thereby achieving precise control of the atmosphere and effectively preventing excessively fast gas flow and uneven boron diffusion on the solar cells.

[0107] Based on the same concept, this disclosure also provides a battery cell prepared using the boron diffusion apparatus described in the above embodiments. When preparing the battery cell using the boron diffusion apparatus, multiple battery cells are stacked sequentially in a carrier boat in a second direction.

[0108] Based on the same concept, this disclosure also provides a battery assembly, including the aforementioned solar cells. Given the aforementioned solar cells, those skilled in the art will understand that a corresponding battery assembly can be obtained using multiple such solar cells and / or other corresponding existing accessories. In this embodiment, multiple solar cells in the battery assembly can be connected in series to form a battery string, thereby achieving a series current collection and output.

[0109] Based on the same concept, this disclosure also provides a solar cell manufacturing system, including the aforementioned boron diffusion equipment, the aforementioned solar cells, and the aforementioned solar cell assembly.

[0110] In the description of this specification, references to terms such as "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with the described embodiment or example is included in at least one embodiment or example of this disclosure. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0111] The above description is merely a preferred embodiment of this disclosure and is not intended to limit this disclosure. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this disclosure should be included within the scope of protection of this disclosure.

Claims

1. A boron diffusion apparatus, wherein, Includes a furnace body having an air inlet and an air outlet disposed opposite to each other in a first direction; and a first vent pipe configured to extend into the furnace body from the air inlet, the first vent pipe having a first portion of the pipe extending into the furnace body. A second vent pipe is configured to extend from the air inlet into the furnace body, the second vent pipe having a second portion of the pipe extending into the furnace body, the length of the second portion of the pipe being greater than the length of the first portion of the pipe.

2. The boron diffusion apparatus as described in claim 1, wherein, The first ventilator extends in a first direction, and in a second direction, the second ventilator and the first ventilator are spaced apart.

3. The boron diffusion apparatus as described in claim 2, wherein, The second vent tube extends along the first direction.

4. The boron diffusion apparatus as described in claim 1, wherein, The first ventilator extends along a second direction, and in the first direction, the second ventilator and the first ventilator are spaced apart.

5. The boron diffusion apparatus as described in claim 4, wherein, The second vent tube extends along the second direction.

6. The boron diffusion apparatus as described in claim 1, wherein, In the second direction, the distance between the first vent pipe and the second vent pipe is greater than or equal to 1 / 2 of the height of the furnace body.

7. The boron diffusion apparatus as described in claim 1, wherein, The ratio of the length of the second part of the tube to the length of the furnace body is greater than or equal to 1 / 2 and less than or equal to 2 / 3.

8. The boron diffusion apparatus as described in claim 1, wherein, The port of the second part of the pipe is the first air outlet, and the peripheral sidewall of the second part of the pipe is provided with at least one second air outlet.

9. The boron diffusion apparatus as described in claim 8, wherein, The second part of the pipe has a plurality of second air outlets on its peripheral sidewall, and the plurality of second air outlets are spaced apart along the second part of the pipe in a first direction.

10. The boron diffusion apparatus as claimed in claim 9, wherein, A plurality of second air outlets are provided on at least one of the first surface and the second surface of the second part of the tube body, and the first surface and the second surface are parallel to each other in the first direction.

11. The boron diffusion apparatus of claim 10, wherein, When multiple second air outlets are provided on both the first and second surfaces of the second part of the tube, the multiple second air outlets are arranged opposite each other in the second direction, either aligned or staggered.

12. The boron diffusion apparatus as claimed in claim 9, wherein, A plurality of second air outlets are provided on at least one of the third and fourth surfaces of the second part of the tube body, and the third and fourth surfaces are parallel to each other in a second direction.

13. The boron diffusion apparatus of claim 12, wherein, When multiple second air outlets are provided on both the third and fourth surfaces of the second part of the tube, the multiple second air outlets are arranged opposite each other in the third direction, either aligned or staggered.

14. The boron diffusion apparatus as claimed in claim 10 or 11, wherein, The first surface is the upper surface of the second part of the tube, and the second surface is the lower surface of the second part of the tube.

15. The boron diffusion apparatus as claimed in claim 12 or 13, wherein, The third surface and the fourth surface are the side surfaces of the second part of the tube.

16. The boron diffusion apparatus as claimed in claim 8, wherein, At least one of the second air outlets is provided with a first shielding cover, which is detachably connected to the second part of the pipe body.

17. The boron diffusion apparatus as claimed in claim 1, wherein, It also includes an exhaust pipe configured to extend from the air inlet into the furnace body and extend along a first direction to the air outlet of the furnace body.

18. The boron diffusion apparatus of claim 17, wherein, The exhaust pipe has a third section extending into the furnace body, the length of which is greater than the length of the second section.

19. The boron diffusion apparatus of claim 17, wherein, In the second direction, the suction pipe, the first vent pipe, and the second vent pipe are arranged at intervals at the air inlet.

20. The boron diffusion apparatus of claim 19, wherein, The second vent pipe and the exhaust pipe are arranged opposite to each other in the second direction, with the second vent pipe located at the top of the furnace body and the exhaust pipe located at the bottom of the furnace body.

21. The boron diffusion apparatus as claimed in claim 1, wherein, It also includes a piping assembly, to which the first vent pipe and the second vent pipe are connected, and the piping assembly is used to provide a boron source to the first vent pipe and the second vent pipe.

22. The boron diffusion apparatus of claim 21, wherein, The piping assembly includes: The first pipeline, the first end of the first pipeline being connected to the first vent pipe; The second pipeline, the first end of which is connected to the second vent pipe; The main pipeline is connected to the second end of the first pipeline and the second end of the second pipeline.

23. The boron diffusion apparatus of claim 22, wherein, The piping assembly further includes a first valve disposed on the first pipeline and a second valve disposed on the second pipeline.

24. The boron diffusion apparatus as claimed in claim 1, wherein, The second part of the tube has a first air outlet at its port, and a second shielding cover is provided on the first air outlet. The second shielding cover is detachably connected to the first air outlet.

25. The boron diffusion apparatus of claim 24, wherein, The second shielding cover is provided with multiple ventilation holes.

26. The boron diffusion apparatus as claimed in claim 1, wherein, It also includes multiple carrier boats, which are arranged sequentially and at intervals in the furnace body in the first direction, and the carrier boats are used to place the battery cells.

27. A type of battery cell, wherein, The solar cell is prepared using the boron diffusion apparatus according to any one of claims 1-26.

28. The battery cell of claim 27, wherein, Multiple solar cells are stacked sequentially in the carrier boat in the second direction.

29. A battery assembly, wherein, Includes the battery cell as described in claim 27 or 28.

30. A solar cell production system, wherein, Includes the boron diffusion apparatus according to any one of claims 1-26, the battery cell according to claim 27 or 28, and the battery assembly according to claim 29.

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