Vacuum filling process and vacuum filling device

Abstract

The invention relates to a vacuum filling method and a vacuum filling device (1). The vacuum filling method comprises the process steps of providing a vacuum filling device (1), providing a housing (3) with an interior (7) and an inlet opening (10) connecting the interior (7) to an exterior (11), pressurizing the interior (7) with an internal pressure (14) between 0 mbar and 950 mbar, in particular between 10-12 mbar and 300 mbar, preferably between 10 mbar and 100 mbar, by means of the vacuum filling device (1), and filling the interior (7) with a fluid medium (8) via the inlet opening (10) by means of the vacuum filling device (1).

Description

The invention relates to a vacuum filling method and a vacuum filling device for carrying out a vacuum filling method. Filling methods for shock absorbers are known from CN 106382324 A, WO 0022320 A1 and DE 102011011537 A1. The object of the present invention was to overcome the disadvantages of the prior art and to provide an improved vacuum filling process and a vacuum filling device by means of which a high degree of automation and high process reliability are enabled in a vacuum filling process. This problem is solved by a device and a method according to the claims. The invention relates to a vacuum filling process comprising the process steps of providing a vacuum filling device; - Providing a housing with an interior and an inlet opening connecting the interior to an exterior; - Pressurizing the interior of the housing with an internal housing pressure between 0 mbar and 950 mbar, in particular between 10-12 mbar and 300 mbar, preferably between 10 mbar and 100 mbar, by means of the vacuum filling device; - Filling the interior of the housing via the inlet opening with a fluid medium using the vacuum filling device. Advantageously, the method according to the invention provides a filling method by means of which a housing is filled with a fluid medium, / 39 N2019 / 03100-AT-00, achieving a high-quality filling process. Applying a vacuum inside the housing creates a suction effect, allowing the fluid to be introduced more quickly. Furthermore, the vacuum prevents or largely eliminates the formation of air bubbles or inclusions in the fluid during filling. This results in an overall improvement in the quality of the product, in which the housing filled with a fluid is a key component. A product filled using the filling method according to the invention could, for example, be a technical component such as a hydraulic shock absorber or a push button. To produce a high-quality technical component, it is essential that the fluid medium, which acts as the working fluid, is introduced free of bubbles or air inclusions. Furthermore, it may be advantageous if, during the filling of the housing interior with the fluid medium, an active element arranged in the housing is moved in an axial, radial and / or circumferential direction. This process step ensures that all spaces inside the housing are filled with the fluid medium, thus improving complete, bubble-free filling. Furthermore, the filling speed can be increased and the filling process time reduced by means of the measure according to the invention. In the case of a shock absorber, the working element can be a piston with a piston rod coupled to it, which moves axially and / or radially during the filling process. The piston rod can be slightly raised at the start of the filling process to allow the fluid to flow through a helical groove in the housing. Subsequently, the axial and / or radial movement of the piston rod or piston improves the complete, bubble-free filling of the housing interior. / 39 N2019 / 03100-AT-00 In the case of a push button that uses a magnetorheological fluid for dynamic control, the actuating element can be a shaft coupled to barrels arranged around it. In principle, the actuating element can be any actuating or controlling element that actuates, displaces, or sets a working medium in motion. Furthermore, the housing may be moved axially, radially, and / or circumferentially, which further improves the flow of the fluid medium into all the spaces inside the housing, ensuring complete and bubble-free filling. This vibration can be achieved through shaking or ultrasonic stimulation. Furthermore, the housing and / or the fluid medium may be heated before and / or during filling to increase the viscosity of the fluid medium. This ensures that all internal spaces of the housing are filled with the fluid medium during the filling process and that the fluid medium is introduced without air inclusions or bubbles. The housing can be heated, for example, by induction. In the case of a hydraulic shock absorber being filled, the fluid medium is hydraulic oil, which can be heated to a temperature range of, for example, 50°C to 80°C. It is also advantageous to have a design in which the housing and / or the fluid medium is cooled after filling in order to compensate for any change in volume of the fluid medium during temperature control or filling. To increase the viscosity of a liquid, it can be advantageous to heat it, which can also lead to expansion of the liquid. According to the invention, the fluid medium can be cooled after filling in order to / 39 N2019 / 03100-AT-00 to achieve a desired volume of fluid medium for the sealing process or a working operation. According to further training, it is possible to evacuate the fluid medium before filling in order to largely remove air bubbles. This ensures a bubble-free, complete filling of the housing interior and improves the quality of a product with a filled housing as an assembly. Furthermore, it may be advantageous to mix the fluid medium with additional particles before and / or during filling. For example, magnetically polarizable particles, such as metal beads or metal shavings, can be introduced into a fluid to produce a magnetorheological liquid, which is then filled into a housing. Mixing can be achieved using vibration, ultrasound, and / or a mechanical stirrer. This advantageously creates an integrated filling process that also ensures high quality of the fluid being filled. Furthermore, it may be provided that the housing is closed at the inlet opening of the housing with a closure cover, whereby the interior of the housing remains subjected to an internal pressure between 0 mbar and 950 mbar, in particular between 10-12 mbar and 300 mbar, preferably between 10 mbar and 100 mbar, specifically between 20 mbar and 40 mbar. This prevents or largely prevents air from entering the housing interior during the sealing process and from forming air inclusions or air bubbles in the fluid medium located in the housing interior. Furthermore, it may be provided that the interior of the housing is at least partially filled with a test gas, in particular helium, before the housing is closed with the sealing cap. This has the advantage that this measure verifies the tightness of the housing and the connections of the / 39 N2019 / 03100-AT-00 The housing can be checked with the sealing cap after the housing has been closed. The tightness can be checked in particular by using Helium can be used as a test gas for quick and easy testing, as this gas, due to its high diffusion rate through solids, would escape within a very short time in the event of a leak, thus allowing the leak to be detected. In another embodiment, it can also be provided that the housing interior is filled with helium and remains filled with helium while the housing interior remains under vacuum. Furthermore, it can be provided that a pressing force is applied to the sealing cap in the pressing direction while the housing inlet opening is being closed with the sealing cap. This pressing force is detected during the pressing process, and the pressing process is terminated when the pressing force increases due to the sealing cap impacting the fluid medium contained within the housing interior. This advantageously improves the precise fitting of a sealing cap, ensuring that no voids form between the fluid medium and the cap during the sealing process. Furthermore, this allows for complete, air-free filling of the housing interior. According to a particular embodiment, it is possible that during the closing of the housing with the closure cover, at least one volume compensation membrane arranged inside the housing, which divides the housing interior into a fluid chamber and an air chamber, is displaced by the volume of the fluid medium in the direction of the air chamber, whereby the closure cover is brought into a cover end position. A compensating stroke of the volume compensation membrane achieves tolerance compensation. The volume compensation membrane acts as a counterbalance for manufacturing and filling tolerances, thereby ensuring that the housing interior is completely and bubble-free filled with the fluid medium. / 39 N2019 / 03100-AT-00 Moving the closure lid into its final position involves a precise fitting, whereby the compensation of manufacturing and filling tolerances can still be achieved via the volume compensation membrane. According to an advantageous further development, it can be provided that the volume of the housing interior is subject to manufacturing tolerances and that the fill quantity of the fluid medium is subject to a fill quantity tolerance, wherein the fill quantity tolerance is dimensioned such that when positioning the closure cover in its cover end position, it is ensured that the volume compensation membrane is displaced by the volume of the fluid medium in the direction of the air chamber. By moving the volume compensation membrane, it is ensured that the housing interior is completely and bubble-free filled with the fluid medium. The housing interior is temporarily enlarged by the volume compensation membrane, and after sealing, the membrane's return to its original position eliminates any potential air inclusions or cavities. In particular, it can be advantageous if, after the pressing process has ended, the closure cover is moved from an intermediate cover position against the direction of pressing into the final cover position, so that a free space is formed inside the housing, which acts as a volume compensation for the fluid medium, while the inlet opening of the housing remains closed with the closure cover. Fitting the closure lid to size can further compensate for manufacturing and filling tolerances and improve the complete and air-free filling of a housing interior. Furthermore, it may be provided that the closure cover is welded to the housing in a cover securing step using a laser welding process. / 39 N2019 / 03100-AT-00 Alternatively, the lid securing step can also involve crimping or the application of an additional sealing cap. This lid securing step ensures that the lid is held in position and the housing interior remains securely closed. The invention further relates to a vacuum filling device comprising a holding device for a housing with a housing interior and an inlet opening, an evacuation device with a sealing unit for evacuating the housing interior and a filling channel for filling the housing interior with a fluid medium. Advantageously, a compact vacuum filling device is provided for highly automated, process-reliable use in a vacuum filling process. An advantageous embodiment is one in which the holding device may include a receiving device for receiving the housing and an adjusting device, which adjusting device is designed to adjust the receiving device in the axial, radial and / or circumferential direction, wherein the adjusting device is designed in particular to apply a vibration, such as an ultrasonic vibration. The adjustment mechanism allows the holding device or the housing to be filled to be moved or vibrated to improve complete, bubble-free filling. This can, for example, involve applying a vibration using ultrasound. Alternatively, if the holding device is an industrial robot, the gripper arm can function as the adjustment mechanism. According to further training, it is possible that the holding device, the receiving device and / or the filling channel includes a temperature control device for the housing and / or the fluid medium in order to increase the viscosity of the fluid medium to be filled. / 39 N2019 / 03100-AT-00 Increasing the viscosity ensures complete, bubble-free filling of the housing interior. The holding device, receiving device, and / or filling channel can be heated, for example, by induction. be tempered. Furthermore, it may be advantageous to have a fluid evacuation device for the fluid medium arranged in the filling channel in order to supply a fluid that is already largely free of bubbles into the interior of the housing. Furthermore, it may be provided that a mixing device for the fluid medium is arranged in the filling channel in order to improve the mixing of the fluid medium and / or to introduce additional particles into the fluid medium during filling. Furthermore, the evacuation device may include a sealer for closing the inlet opening of the housing with a sealing cap in order to be able to close the housing under vacuum. This ensures, or largely prevents, the formation of air inclusions or air bubbles in the already filled fluid medium during the sealing process. In particular, it can be advantageous if an actuating element is provided which serves to move an active element arranged in the housing in the axial, radial and / or circumferential direction. By moving the actuating element using the actuator, all spaces inside the housing can be filled with the fluid medium. This further improves the complete, bubble-free filling of the housing. To better understand the invention, it is explained in more detail with reference to the following figures. They each show, in a highly simplified, schematic representation: / 39 N2019 / 03100-AT-00 Fig. 1 a to c different embodiments of vacuum filling devices; Fig. 2 a to b shows a hydraulic shock absorber which can be filled using a vacuum filling method; Fig. 3 a to b shows a button which can be filled using a vacuum filling method; Fig. 4 shows an embodiment of a vacuum filling device with temperature control equipment; Fig. 5 shows an embodiment of a vacuum filling device with a holding device in the form of an industrial robot; Fig. 6 shows a flowchart of an exemplary embodiment of a vacuum filling process; Fig. 7 shows a flowchart of another embodiment of a vacuum filling process. It should be noted at the outset that in the differently described embodiments, identical parts are provided with the same reference numerals or component designations, and the disclosures contained in the entire description can be applied analogously to identical parts with the same reference numerals or component designations. Furthermore, the positional designations chosen in the description, such as top, bottom, side, etc., refer to the figure directly described and illustrated, and these positional designations must be applied analogously to the new position if the position changes. Figures 1a to 1c show different embodiments of vacuum filling devices 1, each comprising a holding device 2 for a housing 3, an evacuation device 4 with a sealing unit 5 and a filling channel 6 for filling a housing interior 7 with a fluid medium 8. / 39 N2019 / 03100-AT-00 A housing 3 is in particular a hollow cylindrical housing 3 which is sealed in a pressure- and liquid-tight manner in a bottom area 9. To fill the housing 3 with the fluid medium 8, an inlet opening 10 is provided on the housing 3, which connects the housing interior 7 with a housing exterior 11. The housing 3 can be the housing 3 of a shock absorber 12, a push button 13, or the housing 3 of another technical component which is filled with a working medium in the form of a fluid medium 8 during manufacturing or assembly. To fill the housing 3 without air inclusions, the housing interior 7 is pressurized to an internal pressure 14 between 10 mbar and 100 mbar using the vacuum filling device 1. Subsequently, the housing interior 7 is filled with the fluid medium 8 via the inlet opening 10 using the vacuum filling device 1, where the fluid medium 8 can be hydraulic oil, a magnetrheological fluid, or another working fluid. During the evacuation and filling process, the housing 3 is held or fixed in the holding device 2, while the evacuation device 4, with its sealing unit 5, engages in the area of ​​the inlet opening 10 of the housing 3 to seal the housing interior 7 against the housing exterior 11. The housing interior 7 is filled with the fluid medium 8 via the filling channel 6 of the vacuum filling device 1, ensuring a bubble-free and air-free filling process. Furthermore, an actuating element 50 is formed in the vacuum filling device 1, which serves to move an active element 21 arranged in the housing 3 in the axial, radial and / or circumferential direction. Figure 1a shows an embodiment of a vacuum filling device 1, which includes a holding device 2 with a receiving opening 15 for a housing 3 to be filled. In the area of ​​an inlet opening 10 of the housing 3 / 39 N2019 / 03100-AT-00 engages an evacuation device 4, wherein a sealing unit 5 seals a housing interior 7 against a housing exterior 11. The evacuation device 4 has the form of an evacuation chamber 16, wherein the sealing unit 5 is formed in the area of ​​the inlet opening 10, which engages an outer housing surface 17 and thus seals the housing interior 7 to the outside. Via a vacuum channel 18, which engages in the evacuation chamber 16 (the evacuation chamber 16 forming a pressure-tight shell), the housing interior 7 is pressurized to an internal housing pressure 14 between 10 mbar and 100 mbar. The resulting vacuum allows the fluid medium 8 to be filled without air inclusions or bubbles via a filling channel 6, which also engages in the evacuation chamber 16. Figure 1b shows an embodiment of a vacuum filling device 1, which includes a holding device 2 with a receiving opening 15 for a housing 3 to be filled. An evacuation device 4 engages in the area of ​​an inlet opening 10 of the housing 3, with a sealing unit 5 sealing an interior housing 7 against an exterior housing 11. According to the exemplary embodiment, the sealing unit 5 engages directly in the interior housing 7 in the area of ​​the inlet opening 10 and thereby forms a sealing plug 19 to seal the interior housing 7 to the outside. In other embodiments not shown, it may also be provided that the sealing unit 5 is pressed against the front face of the housing 3. In yet another embodiment variant, it can also be provided that the sealing unit 5 is pressed against the outer shell surface 17 of the housing. In yet another design variant, it may also be provided that the sealing unit 5 has a combination of several of the above-mentioned seals. / 39 N2019 / 03100-AT-00 Via a vacuum channel 18, which engages the housing interior 7 through the sealing plug 19, the housing interior 7 is pressurized to an internal pressure 14 between 10 mbar and 100 mbar. The resulting vacuum allows the housing interior 7 to be filled with a fluid medium 8 without air inclusions or bubbles via a filling channel 6, which also engages the housing interior 7 through the sealing plug 19. Figure 1c shows an embodiment of a vacuum filling device 1, which comprises a holding device 2 with a receiving opening 15 for a housing 3 to be filled. The holding device 2 and the housing 3 are enclosed by an evacuation chamber 16 of an evacuation device 4, which forms a pressure-tight shell. A sealing unit 5 is formed in a cover plate 20 to seal an interior housing space 7 against an exterior housing surface 11. Via a vacuum channel 18, which engages in the evacuation chamber 16 in the area of ​​the sealing unit 5, the housing interior 7 is pressurized to an internal housing pressure 14 between 10 mbar and 100 mbar. The resulting vacuum allows the fluid medium 8 to be filled without air inclusions or bubbles via a filling channel 6, which also engages in the evacuation chamber 16 in the area of ​​the sealing unit 5. Figures 2a and 2b show an embodiment of a shock absorber 12 which can be filled using a vacuum filling method, whereby the same reference numerals and component designations are used for identical parts as in the preceding Figures 1a to 1c. To avoid unnecessary repetition, reference is made to the detailed description in the preceding Figures 1a to 1c. The shock absorber 12 according to Figs. 2a and 2b comprises a housing 3 with a housing interior 7, an inlet opening 10 connecting the housing interior 7 to a housing exterior 11, and an actuating element 21. The actuating element 21 / 39 N2019 / 03100-AT-00 is designed as a piston 22 and a piston rod 23 coupled to the piston 22 in a shock absorber 12. In a base area 9, the shock absorber 12 is sealed pressure- and liquid-tight with a guide and sealing assembly 24. To ensure that all spaces to be filled in the housing interior 7 of the shock absorber 12 are filled with a fluid medium 8 without air inclusions or bubbles during a vacuum filling process using a vacuum filling device 1, the piston 22 is moved axially, radially, and / or circumferentially by means of the piston rod 23 during filling while the housing interior 7 is evacuated. This measure also ensures that a helical groove 27, optionally located in the inner surface 25 of the housing or in the outer surface 26 of the piston, is completely filled with the fluid medium 8 by means of a stepwise stroke movement of the piston 22 during the filling process, which brings the fluid medium 8 into contact with all areas of the groove. In an alternative embodiment, the housing 3 can of course be filled from the bottom area 9, and the inlet opening 10 can be closed before filling, or the housing 3 can be completely closed instead of having an inlet opening 10. Thus, contrary to the illustrations in Fig. 1ac, filling can take place from the opposite side. In this case, the housing 3 is first filled with the fluid medium 8, and only in a subsequent process step is the guide and sealing assembly 24 inserted. Here, too, it is conceivable that, in addition to the vacuum, the housing 3 is pressurized with helium to allow for subsequent leak testing. In particular, it is conceivable that after the insertion of the guide and sealing assembly 24, the housing 3 is no longer subjected to a vacuum and the part of the housing 3 located above the guide and sealing assembly 24 is purged before a leak test to remove any helium residue. The leak test can then be performed. In Fig. 2a, the joint 14 / 39 N2019 / 03100-AT-00 damper 12 is shown during the filling process, wherein it is arranged in a vacuum filling device 1 (not shown in detail). Once the desired quantity of the fluid medium 8 has been introduced into the housing interior 7, the housing 3 is closed at the inlet opening 10 of the housing 3 with a sealing cap 28, whereby the housing interior 7 remains pressurized by the vacuum filling device 1 to an internal housing pressure 14 between 10 mbar and 100 mbar. To close the inlet opening 10 of the housing 3 with the closure cover 28, the vacuum filling device 1 can include a sealer 29, which can be arranged in or engage with an evacuation chamber 16 of the vacuum filling device 1. In Fig. 2b the shock absorber 12 is shown in a state already closed with the cover 28. During the closing of the inlet opening 10 of the housing 3 with the closure cover 28, a pressing force 30 acts on the closure cover 28 in the pressing direction 49, the pressing force 30 being detected during the pressing process and the pressing process being terminated when the pressing force 30 increases, which is caused by the closure cover 28 striking the fluid medium 8 received in the housing interior 7. During the closing of the housing 3 with the cover 28, a volume compensation membrane 31 located inside the housing 7 is displaced, dividing the housing 7 into a fluid chamber 32 and an air chamber 33. The volume compensation membrane 31 is moved by the volume of the fluid medium 8 towards the air chamber 33, thereby bringing the cover 28 into a closed position 34 and ensuring that the housing 7 is filled with the fluid medium 8 without air inclusions or bubbles. By moving the volume compensation membrane 31 towards the air chamber 33, manufacturing tolerances of the housing 3 and filling tolerances of the fluid medium 8 are eliminated. / 39 N2019 / 03100-AT-00 After the pressing process has ended, the closure cover 28 can be moved in the axial direction, towards the side facing away from the fluid medium 8, whereby the The inlet opening 10 of the housing 3 remains closed with the cover 28 and the volume compensation membrane 31 remains in a displaced state. Finally, the closure cover 28 can be fixed to the housing 3 in a cover securing step by welding, crimping or applying a cover securing device 35. Figures 3a and 3b show an embodiment of a push button 13 which can be filled using a vacuum filling method, whereby the same reference numerals or component designations are used for identical parts as in the preceding Figures 1 and 2. To avoid unnecessary repetition, reference is made to the detailed description in the preceding Figures 1 and 2. The push button 13 according to Figs. 3a and 3b comprises a housing 3 with an inner chamber 7, an inlet opening 10 connecting the inner chamber 7 to an outer surface 11, and an actuating element 21. In the push button 13, the actuating element 21 is designed as a shaft 37. When the shaft 37 is rotated, barrels 36 coupled to the shaft 37 are also rotated about an axis of rotation of the shaft 37. The push button 13 is sealed pressure- and liquid-tight in a base area 9. In order to ensure that all spaces to be filled in the interior of the housing 7 of the push button 13 are filled with a fluid medium 8 without air inclusions or bubbles during a vacuum filling process using a vacuum filling device 1, the shaft 37 is rotated, which also rotates the barrels 36 coupled to it. In Fig. 3a, the button 13 is shown during the filling process, where it is arranged in a vacuum filling device 1 (not shown in detail). Is the / 39 N2019 / 03100-AT-00 The desired fill quantity of the fluid medium 8 is introduced into the housing interior 7, the housing 3 is sealed at the inlet opening 10 of the housing 3 with a Closure lid 28 closed. While the inlet opening 10 of the housing 3 is closed with the closure cover 28, the interior of the housing 7 remains pressurized by the vacuum filling device 1 with an interior pressure 14 between 10 mbar and 100 mbar. In Fig. 3b the button 13 is shown in a state already closed with the cover 28. Figure 4 shows a further, and optionally independent, embodiment of the vacuum filling device 1, whereby the same reference numerals and component designations are used for identical parts as in the preceding Figures 1 to 3. To avoid unnecessary repetition, reference is made to the detailed description in the preceding Figures 1 to 3. In the embodiment of the vacuum filling device 1 shown in Fig. 4, the vacuum filling device 1 is designed with a multi-part holding device 2, wherein the holding device 2 comprises a receiving device 38 and an adjusting device 39. The adjusting device 39 is configured to adjust the receiving device 38 in the axial, radial and / or circumferential direction. The adjusting device 39 can be designed as a vibrating plate 40 to move a housing 3 during an evacuation and filling process with the vacuum filling device 1. This measure also ensures that the housing 3 is completely evacuated and filled with a fluid medium 8 without air inclusions or bubbles. As can be seen further in Fig. 4, a mixing device 41 for the fluid medium 8 is provided on a filling channel 6. On the one hand, this allows the homo17 / 39 N2019 / 03100-AT-00 ensures thorough mixing of the fluid medium 8 and, on the other hand, additional particles 42 can be mixed into the fluid medium 8 using the mixing device. For example, the additional particles 42 in magnetrheological fluids can be spherical iron particles which are mixed into the fluid medium 8 via the mixing device 41. Additionally, a fluid evacuation device 43 is arranged at the filling channel 6, in which air bubbles are evacuated from the fluid medium 8 to ensure that the interior of the housing 7 is filled without air inclusions or bubbles. To improve the flow properties of the fluid medium 8, a temperature control device 44 in the form of a flow heater 45 is arranged on the filling channel 6. An increase in viscosity and an improvement in the flow properties of the fluid medium 8 has a beneficial effect on the air-inclusion- and bubble-free filling of the housing interior 7. In this case, according to an embodiment not shown in detail, it is conceivable that the mixing device 41, fluid evacuation device 43 and temperature control device 44 form a common unit on the filling channel 6 and that mixing, evacuation and temperature control of the fluid medium 8 takes place simultaneously. According to the embodiment shown in Fig. 4, a temperature control device 44 in the form of an induction heater 46 is also provided in the holding device 2 to regulate the temperature of the housing 3. This further improves the viscosity and flow properties of the fluid medium 8. In an embodiment not shown in detail, the temperature control device 44 can also be configured such that, after completion of the filling process of the housing interior 7, the housing 3 is cooled again via the temperature control device 44 and then fed into a further process step. Optionally, a cooling device (not shown) can also be provided in the holding device 2. / 39 N2019 / 03100-AT-00 In addition, Fig. 4 also shows the arrangement of a closing device 29 within an evacuation chamber 16 of the vacuum filling device 1, by means of which an inlet opening 10 of the housing 3 is closed after the filling process. Figure 5 shows a further, and optionally independent, embodiment of the vacuum filling device 1, whereby the same reference numerals and component designations are used for identical parts as in the preceding Figures 1 to 4. To avoid unnecessary repetition, reference is made to the detailed description in the preceding Figures 1 to 4. In Fig. 5, the holding device 2 is designed as an industrial robot 47. The industrial robot 47 comprises several links and joints to form an adjustment device 39. The gripper 48 of the industrial robot 47 further forms the receiving device 38 for a housing 3 to be filled. An evacuation device 4 engages in the area of ​​an inlet opening 10 of the housing 3. Figure 6 shows a flowchart of an exemplary embodiment of a vacuum filling process, where the same reference numerals and component designations are used for identical parts as in the preceding Figures 1 to 5. To avoid unnecessary repetition, reference is made to the detailed description in the preceding Figures 1 to 5. After evacuating a fluid medium 8, the interior of a housing 3 is evacuated and pressurized with a vacuum, as shown in Fig. 6. The evacuation of the fluid medium 8 and the interior of the housing 7 can also be carried out simultaneously. Subsequently, the housing interior 7 is filled with the fluid medium 8, an actuating element 21 is moved, and the housing interior 7 is further filled. The / 39 N2019 / 03100-AT-00 Actuating element 21 can be kept in motion or actuated step by step throughout the entire filling process. Once the desired quantity of fluid medium 8 has been introduced into the housing interior 7, an inlet opening 10 of the housing is closed with a cover 28 and pressed in by means of a pressing force 30 to a cover end position 34. Finally, the closure lid 28 is secured in a process step, with the option of applying an additional lid locking device 35. Figure 7 shows another, and optionally independent, embodiment of a vacuum filling process, whereby the same reference numerals and component designations are used for identical parts as in the preceding Figures 1 to 6. To avoid unnecessary repetition, reference is made to the detailed description in the preceding Figures 1 to 6. According to the embodiment of a vacuum filling process shown in Fig. 7, a fluid medium 8 is additionally tempered in a temperature control device 44 and mixed in a mixing device 41, optionally with additional particles 42. After evacuating the interior space 7 of a housing 3, the housing 3 is subjected to vibration by means of a vibrating plate 40 and set in motion. Additionally, the housing 3 is temperature-controlled by means of a temperature control unit 44. Until an inlet opening 10 of the housing 3 is closed, the housing is received in the vacuum filling device 1, whereby the housing interior 7 is pressurized with vacuum. After closing the inlet opening 10 with a sealing cap 28, whereby the housing interior 7 is sealed pressure- and liquid-tight, / 39 N2019 / 03100-AT-00 involves a machine cycle. A machine cycle means that the sealed housing 3 is transferred to another handling device (not shown in detail), in which the sealing cover 28 is pressed in and secured at ambient or normal pressure. The exemplary embodiments show possible embodiment variants, whereby it should be noted at this point that the invention is not limited to the specifically illustrated embodiment variants, but rather various combinations of the individual embodiment variants are also possible and this possibility of variation lies within the skill of the person skilled in this technical field due to the teaching on technical action by the present invention. The scope of protection is defined by the claims. However, the description and drawings must be consulted for the interpretation of the claims. Individual features or combinations of features from the different embodiments shown and described can, in themselves, represent independent inventive solutions. The problem underlying these independent inventive solutions can be found in the description. All references to value ranges in this description are to be understood as encompassing any and all sub-ranges thereof, e.g., the reference 1 to 10 is to be understood as including all sub-ranges, starting from the lower limit 1 and the upper limit 10, i.e., all sub-ranges begin with a lower limit of 1 or greater and end with an upper limit of 10 or less, e.g., 1 to 1.7, or 3.2 to 8.1, or 5.5 to 10. Finally, for the sake of clarity, it should be noted that, for a better understanding of the structure, some elements have been shown not to scale and / or enlarged and / or reduced in size. / 39 N2019 / 03100-AT-00 Reference symbol list 1 Vacuum filling device 31 Volume compensation membrane 2 Holding device 32 Fluid chamber 3 Housing 33 Air chamber 4 Evacuation device 34 Lid end position 5 Sealing unit 35 Lid lock 6 Filling channel 36 Barrel 7 Housing interior 37 Shaft 8 Fluid medium 38 Receiving device 9 Base area 39 Adjustment device 10 Inlet opening 40 Vibration plate 11 Housing exterior 41 Mixing device 12 Shock absorber 42 Additive particles 13 Pushbutton 43 Fluid evacuation device 14 Housing interior pressure 44 Temperature control device 15 Receiving opening 45 Flow heater 16 Evacuation chamber 46 Induction heater 17 Housing outer surface 47 Industrial robot 18 Vacuum channel 48 Gripper 19 Sealing plug 49 Press-in direction 20 Cover plate 50 Actuating element 21 Actuating element 22 Piston 23 Piston rod 24 Guide and sealing package 25 Housing inner surface 26 Piston outer surface 27 Helical groove 28 Sealing cap 29 Sealer 30 Press-in force / 39

Claims

Claim 1. Vacuum filling method comprising the process steps: - providing a vacuum filling device (1); - providing a housing (3) with an interior (7) and an inlet opening (10) connecting the interior (7) to an exterior (11); - pressurizing the interior (7) with an interior pressure (14) between 10-12 mbar and 950 mbar, in particular between 0.1 mbar and 300 mbar, preferably between 10 mbar and 100 mbar, specifically between 20 mbar and 40 mbar by means of the vacuum filling device (1); - filling the interior (7) with a fluid medium (8) via the inlet opening (10) by means of the vacuum filling device (1).

2. Vacuum filling method according to claim 1, characterized in that during the filling of the housing interior (7) with the fluid medium (8) an active element (21) arranged in the housing (3) is moved in the axial direction and / or in the radial direction and / or in the circumferential direction.

3. Vacuum filling method according to claim 1 or 2, characterized in that during the filling of the housing interior (7) with the fluid medium (8) the housing (3) is moved in the axial direction and / or in the radial direction and / or in the circumferential direction.

4. Vacuum filling method according to one of the preceding claims, characterized in that the housing (3) and / or the fluid medium (8) is tempered before filling and / or during filling.

5. Vacuum filling method according to one of the preceding claims, characterized in that the housing (3) and / or the fluid medium (8) is cooled after filling. 23 / 39 N2019 / 03100-AT-00 6. Vacuum filling method according to one of the preceding claims, characterized in that the fluid medium (8) is evacuated before filling.

7. Vacuum filling method according to one of the preceding claims, characterized in that the fluid medium (8) is mixed with additional particles (42) before filling and / or during filling.

8. Vacuum filling method according to one of the preceding claims, characterized in that the housing (3) is closed at the inlet opening (10) of the housing (3) by means of a closure cover (28), wherein the housing interior (7) remains subjected to a housing interior pressure (14) between 10-12 mbar and 950 mbar, in particular between 0.1 mbar and 300 mbar, preferably between 10 mbar and 100 mbar.

9. Vacuum filling method according to claim 8, characterized in that, before closing the housing (3) by means of the closure lid (28), the interior of the housing (7) is at least partially filled with a test gas, in particular helium.

10. Vacuum filling method according to claim 8 or 9, characterized in that during the closing of the inlet opening (10) of the housing (3) with the closure cover (28) a pressing force (30) acts on the closure cover (28) in the pressing direction (49), wherein the pressing force (30) is detected during the pressing process and the pressing process is terminated when the pressing force (30) increases, which is caused by the closure cover (28) coming into contact with the fluid medium (8) received in the interior of the housing (7).

11. Vacuum filling method according to one of the preceding claims, characterized in that during the closing of the housing (3) with 24 / 39 N2019 / 03100-AT-00 the closure cover (28) at least one volume compensation membrane (31) arranged in the housing interior (7), which divides the housing interior (7) into a fluid chamber (32) and an air chamber (33), is displaced by the volume of the fluid medium (8) in the direction of the air chamber (33), wherein the closure cover (28) is brought into a cover end position (34).

12. Vacuum filling method according to claim 11, characterized in that the volume of the housing interior (7) is subject to manufacturing tolerances and that the filling quantity of the fluid medium (8) is subject to a filling quantity tolerance, wherein the filling quantity tolerance is dimensioned such that when positioning the closure lid (28) in its lid end position (34) it is ensured that the volume compensation membrane (31) is displaced by the volume of the fluid medium (8) in the direction of the air chamber (33).

13. Vacuum filling method according to one of claims 10 to 12, characterized in that after the pressing process is completed, the closure lid (28) is moved from an intermediate lid position against the pressing direction (49) to the lid end position (34), so that a free space is formed in the housing interior (7), which acts as a volume compensation for the fluid medium (8).

14. Vacuum filling method according to one of the preceding claims, characterized in that the closure lid (28) is welded to the housing (3) in a lid securing step by means of a laser welding process.

15. Vacuum filling device (1), in particular for carrying out the method according to one of the preceding claims comprising - a holding device (2) for a housing (3) with a housing interior (7) and an inlet opening (10); - an evacuation device (4) with a sealing unit (5) for evacuating the housing interior (7); 25 / 39 N2019 / 03100-AT-00 - a filling channel (6) for filling the housing interior (7) with a fluid medium (8).

16. Vacuum filling device (1) according to claim 15, characterized in that the holding device (2) comprises a receiving device (38) for receiving the housing (3) and an adjusting device (39), which adjusting device (39) is configured to adjust the receiving device (38) in the axial direction and / or in the radial direction and / or in the circumferential direction, wherein the adjusting device (39) is configured in particular to apply a vibration, such as an ultrasonic vibration.

17. Vacuum filling device (1) according to claim 15 or 16, characterized in that the holding device (2), the receiving device (38) and / or the filling channel (6) comprise a temperature control device (44) for the housing (3) and / or the fluid medium (8).

18. Vacuum filling device (1) according to one of claims 15 to 17, characterized in that a fluid evacuation device (43) for the fluid medium (8) is arranged in the filling channel (6).

19. Vacuum filling device (1) according to one of claims 15 to 18, characterized in that a mixing device (41) for the fluid medium (8) is arranged in the filling channel (6).

20. Vacuum filling device (1) according to one of claims 15 to 19, characterized in that a sealer (29) for closing the inlet opening (10) of the housing (3) with a sealing cap (28) is provided in the evacuation device (4). 26 / 39 N2019 / 03100-AT-00 21. Vacuum filling device (1) according to one of claims 15 to 20, characterized in that an actuating element (50) is formed which serves to move an active element (21) arranged in the housing (3) in the axial direction and / or in the radial direction and / or in the circumferential direction.