Synchronous phase-shift fiso interferometer

A Fizeau interferometer and synchronous phase-shifting technology, applied in the field of synchronous phase-shifting Fizeau interferometer, can solve the problems of optical path difference, cumbersome adjustment process, complex optical path structure, etc., and achieve a simple structure, simple structure and easy operation. Effect

CN101324421AInactive Publication Date: 2008-12-17SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
0 Cites 27 Cited by

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2008-12-17
Estimated Expiration
Not applicable · inactive patent

Smart Images

  • Figure 1
    Figure 1
  • Figure 2
    Figure 2
Patent Text Reader

Abstract

A synchronous phase-shifting Fizeau interferometer comprises a half-wave plate, a focusing lens, a diaphragm, a beam splitter, a first collimating lens, and a birefringent thin-film standard lens, which are arranged sequentially along the beam advancing direction of a linearly polarized laser source, wherein the diaphragm is positioned on the back focus and the front focus of the first collimating lens; a second collimating lens and a synchronous phase shifter are sequentially arranged in a direction perpendicular to the beam advancing direction of the beam splitter; the beam having a surface to be detected on the linearly polarized laser source passes through the emergent direction of the birefringent thin-film standard lens; the birefringent thin-film standard lens is a standard flat panel and has an antireflection film on the incident surface of the standard flat panel and a birefringent thin film and an antireflection film on the emergent surface; and the birefringent thin film has a phase delay of 90 DEG. The synchronous phase-shifting Fizeau interferometer has the advances of no principle return error, long measurement distance, simple structure and easy operation.
Need to check novelty before this filing date? Find Prior Art

Description

technical field

[0001] The invention relates to optical interferometry, in particular to a synchronous phase-shifting Fizeau interferometer. Background technique

[0002] Interferometer is a non-contact high-precision measuring instrument, which has been more and more widely used in modern optical measurement. Among various interferometers, the Fizeau interferometer includes the reference arm in the measurement arm to realize the common optical path interference of the reference beam and the measurement beam. The impact of environmental factors on measurement accuracy has become the most commonly used test instrument in optical processing. In order to improve the measurement accuracy, it is necessary to introduce phase shifting technology into the Fizeau interferometer to extract the phase distribution to obtain the surface shape information. For Fizeau interferometers, the common phase shifting measures are piezoelectric ceramics driving standard mirrors to move or changi...

Examples

Embodiment Construction

[0022] The present invention will be further described below in conjunction with the accompanying drawings and embodiments, but the protection scope of the present invention should not be limited thereby.

[0023] see first figure 1 , figure 1 It is the structural diagram of the synchronous phase-shifting Fizeau interferometer of the present invention. Depend on figure 1 It can be seen that the synchronous phase-shifting Fizeau interferometer of the present invention consists of a linearly polarized laser light source 1, a half-wave plate 2, a focusing lens 3, an aperture 4, a beam splitter 5, a first collimating lens 6, The birefringent film type standard mirror 7, the second collimating lens 8 and the synchronous phase shifter 9 are composed, and its positional relationship is: on the beam advancing direction along the described linearly polarized laser light source 1, it is successively described 1 / 2 A wave plate 2, focusing lens 3, diaphragm 4, beam splitter 5, first co...