Optical-electro-mechanical vibration angular speed sensor

An angular rate sensor, optical electromechanical technology, applied in the direction of instruments, devices using optical methods, measuring devices, etc., can solve the problems of low sensitivity, easy to be affected by temperature, etc., achieve small volume, high zero stability, reduce The effect of thermal noise

CN102854331BActive Publication Date: 2014-07-09CHONGQING UNIV OF POSTS & TELECOMM
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2014-07-09

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Abstract

The invention discloses an optical-electro-mechanical vibration angular speed sensor, and relates to the technical field of sensors. A sensor vibration system comprises a driver arm, a sensitive arm and a mass positioned at a junction; an optical driving system drives a vibrating arm to vibrate through using an optical fiber group suspended above the driver arm to carry out pulse optical radiation to further drive the mass to swing and finally generate linear momentum in the driving direction; an optical detection system adopts a coherent detection technology; the sensor has an input angular speed in the direction of an input shaft; and corresponding vibrations are generated on the sensitive arm under the action of a coriolis force. The data collection is carried out on the vibrations through the optical detection system, and the vibration is further converted into input angular speed. The sensor has the characteristics of small size and easiness in integration of an MEMS gyroscope and high-precision of an optical gyroscope, and has the advantages of high zero position stability, no interference among shafts, anti-electromagnetic interference and the like.
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Description

technical field

[0001] The present invention relates to angular rate sensors, particularly angular rate sensors utilizing optical actuation and sensing mechanical vibrations. technical background

[0002] Optical angular rate sensor, based on the SAGNAC effect, this type of gyroscope has no moving parts and has strong anti-interference ability, but this type of gyroscope has a large volume and high cost. Based on the current technical level, it is difficult to realize small size and integration ; Traditional vibrating gyroscopes based on the Coriolis effect are limited by electronic sensitivity and electromagnetic sensitivity so that their sensitivity is not high, but they can be studied in small volume and integration.

[0003] The application proposes a method for measuring the angular rate of an all-fiber drive and detection in the cross-technical field combining mechanics and optical technology. This angular rate sensor is a new sensor design technology based on the vib...

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Embodiment Construction

[0015] The work of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0016] Such as figure 1 Shown is the top view of the opto-electromechanical vibration angular rate sensor of the present invention. The opto-electromechanical vibration angular rate sensor includes: a vibration system (10) composed of a vibrating mass (11) through a set of driving arms (12) and sensitive arms (13), the vibration system is connected to an external support structure through the driving arms and sensitive arms (20) Connecting, the driving arm vibrates under the action of the all-optical drive system (31), driving the vibrating mass to swing near the equilibrium position, thereby generating linear momentum; in the direction of the input axis (002) of the angular rate sensor Input the angular velocity, when the angular rate sensor is on figure 2 When there is an input angular velocity in the direction of the middle input axis (002), the vib...