An ultra-high precision pressure control device

A pressure control and precision technology, which is applied in the field of ultra-high precision pressure control devices, can solve problems such as pressure loss, increased equipment costs, and high price of variable pumps, and achieves low frequency response, elimination of long-term fluctuations, and small speed fluctuations.

CN108980208BActive Publication Date: 2020-01-17HANGZHOU REBOTECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Publication Date
2020-01-17

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Abstract

The invention discloses an ultrahigh-precision pressure control device. The ultrahigh-precision pressure control device comprises an oil tank, a power unit, a pressure regulating unit and a detectionand feedback unit; the power unit comprises a hydraulic pump and an electric motor connected with the hydraulic pump, and the pressure regulating unit comprises a proportional servo valve, a throttlevalve and a pilot-operated relief valve; the detection and feedback unit comprises a pressure sensor and a closed-loop controller; an oil outlet of a check valve, an oil inlet of the throttle valve and an oil inlet of the pilot-operated relief valve are in mutual communication; a port P of the proportional servo valve, the oil inlet of the throttle valve, an oil outlet of the throttle valve and adetection port of the pressure sensor are in mutual communication; the closed-loop controller is connected with a signal output port of the pressure sensor and the proportional servo valve; an oil suction port of the hydraulic pump, an oil outlet of the pilot-operated relief valve, the oil outlet of the throttle valve, and ports B and T of the proportional servo valve are communicated with the oiltank; a port A of the proportional servo valve is blocked. The ultrahigh-precision pressure control device has the advantage that ultrahigh-precision pressure control, in which the system pressure iswithin 1000kPa and the pressure fluctuation is less than 0.5kPa, is achieved.
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Description

technical field

[0001] The invention belongs to the technical field of hydraulic transmission, and in particular relates to an ultra-high-precision pressure control device for a hydraulic static pressure bearing. Background technique

[0002] With the process of industrialization, the application field of hydraulic transmission technology is constantly expanding, and the requirements for hydraulic technology are getting higher and higher. Hydrostatic support bearings are the core components of ultra-precision machine tools, and small fluctuations in the supply pressure of the hydraulic system will directly Affecting the machining accuracy of the machine tool, it is necessary to control the supply pressure fluctuation of the hydraulic system within 0.5KPa at least. The pressure fluctuation accuracy is 5 / 10,000 of the supply pressure. According to literature search and market research, there is no technical solution and solution for this control accuracy. Mature product. Ther...

Examples

Embodiment Construction

[0024] The following combination figure 2 The present invention is further introduced.

[0025] Such as figure 2 As shown, the pressure control device of the present invention includes a fuel tank, a power unit, a pressure adjustment unit, and a detection and feedback unit. The power unit includes a screw pump 3 and a servo motor 2 connected to each other; the pressure adjustment unit includes a proportional servo valve 11 and a throttle valve; The throttle valve includes a first throttle valve 10 and a second throttle valve 5 , and the detection and feedback unit includes a pressure sensor 8 and a closed-loop controller 12 . The oil outlet of the one-way valve 4, the oil inlet of the second throttle valve 5, and the oil inlet of the pilot relief valve 9 communicate with each other. Port P of the proportional servo valve 11 , the oil inlet port of the first throttle valve 10 , the oil outlet port of the second throttle valve 5 and the detection port of the pressure sensor ...