Physical quantity sensors, composite sensors, electronic devices, and moving objects

Abstract

The present invention provides a physical quantity sensor, a composite sensor, an electronic device and a moving object, wherein the physical quantity sensor can reduce the decrease in detection accuracy caused by the size fluctuation of an elastic part. The gyro sensor (1) includes: an elastic part (43), having a plurality of beam parts (first parts (4301a, 4301b, 4301c, 4301d)) connected by a folding part (430); a structure (fixed driving part (45)), which is opposite to an outer beam (first part (4301a)) located outside of the plurality of beams, and when the interval between the outer beam and the structure is set to T1 and the interval between the plurality of beams is set to T2, in the case of T2<T1, a first beam (4303) opposite to the outer beam is provided on the structure side of the outer beam.

Description

Technical Field

[0001] The invention relates to a physical quantity sensor, a composite sensor, an inertial measurement unit, a portable electronic device, an electronic device and a moving object. Background Art

[0002] In recent years, as an example of a physical quantity sensor, a gyro sensor using a gyro sensor element using silicon MEMS (micro-electro-mechanical system) technology has been developed. Among physical quantity sensors, gyro sensors for detecting angular velocity are rapidly gaining popularity in applications such as motion sensing functions of gaming machines.

[0003] As such a gyro sensor, for example, Patent Document 1 discloses a sensor element constituting an angular velocity sensor. The sensor element has: a supporting substrate; a fixed portion fixed to the supporting substrate; a vibrating body supported by an elastic beam (supporting beam) relative to the fixed portion; a comb-tooth-shaped movable electrode provided on the vibrating body; and a fixed comb-tooth electrode meshing with the movable electrode through a gap. In an angular velocity sensor having such a structure, when a voltage is applied to the fixed comb-tooth electrode, the vibrating body vibrates (drives vibration) in the X-axis direction due to the electrostatic force generated between the movable electrode and the fixed comb-tooth electrode. When an angular velocity around the Z-axis (or Y-axis) acts on the vibrating body in such a vibrating state, the vibrating body vibrates (detects vibration) in the Y-axis (or Z-axis) direction due to the Coriolis force. By detecting an electrical signal corresponding to the magnitude of the vibration amplitude of the vibrating body in the Y-axis (or Z-axis) direction caused by the Coriolis force, the angular velocity of rotation can be detected.

[0004] Such a sensor element can be manufactured by dry etching. For example, Patent Document 2 describes a deep reactive ion etching technology for silicon, the so-called Bosch process, which alternately switches the SF 6 (etching gas) and C 4 F 8 (Deposition gas) Two systems of reactive plasma gases are used to repeat the process of etching and sidewall protection film deposition.

[0005] However, when the sensor element described in Patent Document 1 is intended to be manufactured by dry etching described in Patent Document 2, if the shape pattern of each part of the sensor element is sparse or dense, the flow of the etching gas fluctuates, and the cross-sectional shape of each part is also different. Specifically, the part (pattern) with a large opening ratio promotes side etching due to the flow of the etching gas, and the change in the cross-sectional shape increases. On the contrary, the change in the cross-sectional shape of the part (pattern) with a small opening ratio becomes smaller. In addition, when such fluctuations in the cross-sectional shape occur in the elastic part supporting the vibrating body, the resonant frequency of each part of the elastic part fluctuates, and the detection signal in the sensor element is affected. As a result, there is a problem of reduced detection accuracy.

[0006] Prior art literature

[0007] Patent Literature

[0008] Patent Document 1: Japanese Patent Application Publication No. 2009-175079

[0009] Patent document 2: Japanese Patent Application Publication No. 7-503815. Summary of the invention

[0010] The present invention is proposed to solve at least a part of the above-mentioned technical problems, and can be implemented by the following methods or application examples.

[0011] [Application Example 1] The physical quantity sensor of this application example includes: an elastic portion having a plurality of beams connected by a folding portion; and a structural body opposite to an outer beam located on the outside of the beams, wherein when the interval between the outer beam and the structural body is set to T1, and the interval between the plurality of beams is set to T2, in the case of T2<T1, a first beam opposite to the outer beam is provided on the structural body side of the outer beam.

[0012] According to the physical quantity sensor of this application example, when the interval T1 between the outer beam and the structure and the interval T2 between the plurality of beams satisfy T2<T1, in other words, when the aperture ratio between the outer beam and the structure is large, a first beam opposite to the outer beam is provided on the structure side of the outer beam. By means of the first beam, the aperture ratio between the outer beam and the structure can be reduced, and the aperture ratios of the beams can be close to each other. Thus, the fluctuation of the cross-sectional shape caused by the flow of the etching gas can be reduced, and as a result, the reduction in detection accuracy caused by the fluctuation of the resonance frequency of the elastic portion including the plurality of beams caused by the fluctuation of the cross-sectional shape can be reduced.

[0013] [Application Example 2] In the physical quantity sensor described in the above application example, when the interval between the outer beam and the first beam portion is T3, 0.8<T3 / T2<3.0 is preferably satisfied.

[0014] According to this application example, the fluctuation of the interval (opening ratio) between the first beam and the outer beam and the interval (opening ratio) between the plurality of beams can be reduced. In other words, the fluctuation of the cross-sectional shape of the plurality of beams in the region having a small influence on the resonance frequency can be reduced, and the fluctuation of the resonance frequency of the elastic portion caused by the fluctuation of the cross-sectional shape of the plurality of beams can be reduced.

[0015] [Application Example 3] In the physical quantity sensor described in the above application example, it is preferred that 0.8<T3 / T2≤2.0 is satisfied.

[0016] According to this application example, in the region where the influence on the resonance frequency hardly occurs, the fluctuation of the interval (aperture ratio) between the first beam and the outer beam and the interval (aperture ratio) between the plurality of beams can be further reduced, and the fluctuation of the resonance frequency of the beams caused by the fluctuation of the cross-sectional shape of the plurality of beams can be reduced.

[0017] [Application Example 4] In the physical quantity sensor described in the above application example, it is preferred that 0.9≤T3 / T2≤1.1 is satisfied.

[0018] According to this application example, in the area that does not affect the resonance frequency, the fluctuation of the interval (aperture ratio) between the first beam and the outer beam and the interval (aperture ratio) between the multiple beams can be further reduced, and the fluctuation of the resonance frequency of the beam caused by the fluctuation of the cross-sectional shape of the multiple beams can be significantly reduced.

[0019] [Application Example 5] In the physical quantity sensor described in the above application example, it is preferred that T1 ≤ 10 μm is satisfied.

[0020] According to this application example, by setting the interval between the outer beam and the structure in this manner, a more compact physical quantity sensor can be obtained.

[0021] [Application Example 6] In the physical quantity sensor described in the above application example, when the depth of the beam is set to D1, it is preferable to satisfy 20 μm ≤ D1 ≤ 30 μm.

[0022] According to this application example, when the depth D1 of the beam is set to 20μm≤D1≤30μm, the fluctuation of the cross-sectional shape caused by the flow of the etching gas can be reduced. As a result, the decrease in detection accuracy caused by the fluctuation of the resonance frequency of multiple beams caused by the fluctuation of the cross-sectional shape can be reduced.

[0023] [Application Example 7] In the physical quantity sensor described in the above application example, when the width of the beam is set to W1, it is preferable to satisfy 0<W1≤10μm.

[0024] According to this application example, when the depth D1 of the beam is set to 20μm≤D1≤30μm, since the aspect ratio (width / depth) of the beam becomes less than 1 / 2, it is possible to provide a physical quantity sensor that improves the detection accuracy affected by the fluctuations in the resonant frequencies of multiple beams caused by fluctuations in their small size and cross-sectional shapes.

[0025] [Application Example 8] In the physical quantity sensor described in the above application example, it is preferred that the elastic portion and the structure are provided in a sensor element, and the sensor element is an angular velocity sensor element capable of detecting angular velocity.

[0026] According to this application example, it is possible to provide an angular velocity sensor in which a decrease in detection accuracy due to fluctuations in the resonance frequencies of a plurality of beams is reduced and in which output characteristics are stabilized.

[0027] [Application Example 9] The composite sensor of this application example includes the physical quantity sensor and the acceleration sensor described in the above-mentioned Application Example 8.

[0028] According to the composite sensor of this application example, a composite sensor including an angular velocity sensor and an acceleration sensor capable of reducing a decrease in detection accuracy due to fluctuations in the resonance frequency of a plurality of beams can be easily configured, and stable angular velocity data and acceleration data can be acquired.

[0029] [Application Example 10] According to this application example, an inertial measurement unit includes: the physical quantity sensor described in the above-mentioned application example 8, an acceleration sensor, and a control unit that controls the physical quantity sensor and the acceleration sensor.

[0030] According to the inertial measurement unit of this application example, a physical quantity sensor (angular velocity sensor) and an acceleration sensor that can reduce the reduction in detection accuracy caused by fluctuations in the resonant frequency of multiple beams are controlled by a control unit, thereby obtaining an inertial measurement unit that is highly reliable and can output physical quantity data.

[0031] [Application Example 11] The portable electronic device of this application example includes: a physical quantity sensor of any one of the above-mentioned application examples; a housing that accommodates the physical quantity sensor; a processing unit accommodated in the housing and that processes output data from the physical quantity sensor; a display unit accommodated in the housing; and a light-transmitting cover that covers the opening of the housing.

[0032] According to the portable electronic device of this application example, since the processing unit performs control based on the output data output from the physical quantity sensor, the effect of the physical quantity sensor can be enjoyed, and a highly reliable portable electronic device can be obtained.

[0033] [Application Example 12] In the portable electronic device described in the above application example, it is preferred to include a satellite positioning system to measure the user's moving distance and movement trajectory.

[0034] According to this application example, a highly reliable portable electronic device can be obtained that can measure the moving distance and moving trajectory of a user using a satellite positioning system.

[0035] [Application Example 13] The electronic device of the above-mentioned application example includes: the physical quantity sensor described in any of the above-mentioned application examples, and a control unit that performs control based on a detection signal output from the physical quantity sensor.

[0036] According to the electronic device of this application example, since the control unit performs control based on the detection signal output from the physical quantity sensor, the effect of the physical quantity sensor can be enjoyed, and a highly reliable electronic device can be obtained.

[0037] [Application Example 14] The moving object of the above application example includes: the physical quantity sensor described in any of the above application examples, and a posture control unit that controls the posture based on the detection signal output from the physical quantity sensor.

[0038] According to the moving object of this application example, since the posture control unit controls the posture based on the detection signal output from the physical quantity sensor, the effect of the physical quantity sensor can be enjoyed, and a moving object with high reliability can be obtained.

[0039] [Application Example 15] The moving object described in the above application example includes: at least one of an engine system, a braking system and a keyless entry system, and preferably the posture control unit controls the system based on the detection signal.

[0040] According to this application example, since the posture control unit controls at least one of the engine system, the brake system and the keyless entry system based on the detection signal output from the above-mentioned physical quantity sensor, it is possible to enjoy the effect of the above-mentioned physical quantity sensor and obtain a moving object with high reliability.

[0041] [Application Example 16] The physical quantity sensor of this application example includes: a substrate; a fixed portion, fixed relative to the substrate; an elastic portion, connected to the fixed portion, having an inner beam and an outer beam connected by a folding portion; and a structure, opposite to the outer beam in a top view of the substrate, the outer beam is located between the inner beam and the structure in a top view of the substrate, and when the interval between the outer beam and the structure is set to T1, and the interval between the inner beam and the outer beam is set to T2, when T2<T1, a first beam opposite to the outer beam is provided on the structure side of the outer beam. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] Figure 1 It is a perspective view showing a schematic configuration of a gyro sensor (angular velocity sensor) according to a first embodiment of the physical quantity sensor.

[0043] Figure 2 It is shown Figure 1 A cross-sectional view showing the simplified structure of a gyro sensor.

[0044] Figure 3 It is schematically shown Figure 1 A top view of the gyroscope sensor element is shown.

[0045] Figure 4 It is schematically shown Figure 3 A top view of a portion (portion A) of the elastic portion is shown.

[0046] Figure 5 yes Figure 4 BB cross-section diagram.

[0047] Fig. 6A This is a cross-sectional view for explaining shape fluctuation caused by a difference in aperture ratio in a dry etching method.

[0048] Figure 6B : is a graph showing the correlation between the interval T1 / interval T2 and the change rate of the width W1 (deep width W2) of the beam.

[0049] Figure 7 It is a plan view showing a schematic configuration of a gyro sensor according to a second embodiment of the physical quantity sensor.

[0050] Figure 8 It is schematically shown Figure 7 A top view of a portion (portion C) of the elastic portion is shown.

[0051] Fig. 9 It is a plan view showing a schematic configuration of a gyro sensor according to a third embodiment of the physical quantity sensor.

[0052] Fig.10 It is schematically shown Fig. 9 A top view of a portion (portion F) of the elastic portion is shown.

[0053] Fig.11 This is a functional block diagram showing a schematic configuration of a composite sensor.

[0054] Fig.12 It is an exploded perspective view showing a schematic structure of an inertial measurement unit.

[0055] Fig.13 It is a perspective view showing an arrangement example of inertial sensor elements of an inertial measurement unit.

[0056] Fig.14 It is a plan view schematically showing the structure of a portable electronic device.

[0057] Fig.15 This is a functional block diagram showing a schematic configuration of a portable electronic device.

[0058] Fig.16 It is a perspective view schematically showing the structure of a mobile personal computer which is an example of the electronic equipment.

[0059] Fig.17 The diagram schematically shows a configuration of a smartphone (mobile phone) as an example of an electronic device.

[0060] Fig.18 It is a perspective view showing the structure of a digital still camera which is an example of electronic equipment.

[0061] Fig.19 It is a perspective view showing the structure of a car which is an example of a moving object.

[0062] Description of Reference Numerals

[0063] 1, 1A, 1B...Gyro sensor as a physical quantity sensor; 2...Substrate; 3...Cover; 4...Gyro element (angular velocity sensor element) as a sensor element; 10...Package; 21...Concave portion; 22...Protrusion; 23...Upper surface; 31...Concave portion; 33...Lower surface; 40, 40a, 40b...Element body; 41...Mass portion; 42...Fixed portion; 43...Elastic portion; 44...Drive portion; 45...Fixed drive portion as a structure; 46...Fixed drive portion; 48...Supporting beam; 49, 49a, 49b...Fixed detection portion; 212...Bottom surface; 430...Folding portion; 431...First main surface; 432...Second main surface; 471...Detection portion; 472...Detection portion; 473...Frame; 900...Compound sensor; 1000...a wrist device as a portable electronic device; 1100...a personal computer as an electronic device; 1200...a smart phone as an electronic device; 1300...a digital still camera as an electronic device; 1500...a car as a moving object; 2000...an inertial measurement unit; 4301a, 4301b, 4301c, 4301d...a first part as a beam; 4302...a second part as a beam; 4303...a first beam; 4304...a connecting part; T1...a gap between the first part and the fixed driving part; T2...a gap between adjacent first parts; T3...a gap between the first part and the first beam; W1...a width of the first part; Q...a gap between the first beam and the first beam; QL1, QL2, QL3, QL4, QL5, QL6, QL7...a dotted line representing a boundary of the first part. DETAILED DESCRIPTION

[0064] Hereinafter, a physical quantity sensor, a composite sensor, an inertial measurement unit, a portable electronic device, an electronic device, and a moving object will be described in detail based on the embodiments shown in the drawings.

[0065] 1. Physical Quantity Sensor <First Embodiment>

[0066] First, the implementation of the physical quantity sensor takes a gyro sensor (angular velocity sensor) as an example, and refers to Figure 1 , Figure 2 and Figure 3 Provide explanation. Figure 1 It is a perspective view showing a schematic configuration of a gyro sensor (angular velocity sensor) according to a first embodiment of the physical quantity sensor.

[0067] Figure 2 It is shown Figure 1A cross-sectional view showing the simplified structure of a gyro sensor. Figure 3 It is schematically shown Figure 1 A top view of the gyroscope sensor element is shown. Figure 1 In the figure, the substrate (base) is schematically shown, and the illustration of the cover is omitted. In the following description of each embodiment of the physical quantity sensor, three axes orthogonal to each other are defined as the X-axis (third axis), the Y-axis (first axis) and the Z-axis (second axis). In addition, the direction along the X-axis is also referred to as the "X-axis direction", the direction along the Y-axis is also referred to as the "Y-axis direction", and the direction along the Z-axis is also referred to as the "Z-axis direction". In addition, the Z-axis is an axis indicating the thickness direction in which the substrate and the cover overlap, and the Y-axis is an axis along the driving direction of the gyro sensor element. In addition, for the convenience of explanation, in the top view when observed from the Z-axis direction, the +Z-axis direction side of the cover side is sometimes referred to as "above" or the surface of the +Z-axis direction side is referred to as the "upper surface", the -Z-axis direction side on the opposite side is referred to as "below", or the surface of the -Z-axis direction side is referred to as the "lower surface". In addition, for the convenience of explanation, in each figure, the size of each part is appropriately exaggerated as needed, and the size ratio of each part is not necessarily consistent with the actual size ratio.

[0068] [Gyro sensor]

[0069] like Figure 1 As shown in FIG. 1 , the gyro sensor 1 of the first embodiment of the physical quantity sensor is an angular velocity sensor capable of detecting an angular velocity around the X-axis. Figure 2 As shown, the gyro sensor 1 has a gyro sensor element (angular velocity sensor element) 4 as a sensor element and a package 10 that houses the gyro sensor element 4 .

[0070] (Package)

[0071] The package 10 has a substrate 2 (base) supporting a gyro sensor element 4 and a cover 3 connected to the substrate 2. A space S for accommodating the gyro sensor element 4 is formed between the substrate 2 and the cover 3. The substrate 2 and the cover 3 are both plate-shaped and arranged along an XY plane (reference plane) which is a plane including the X-axis and the Y-axis.

[0072] The substrate 2 is provided with a recess 21 that opens upward (toward the gyro sensor element 4 side). A protrusion 22 that protrudes from a bottom surface 212 of the recess 21 is provided at the center portion of the recess 21. In addition, a part of the gyro sensor element 4 (a fixing portion 42 and fixing drive portions 45 and 46 described later) is fixed to an upper surface 23 of the substrate 2 outside the recess 21.

[0073] The cover 3 is provided with a recess 31 opening downward (toward the substrate 2 ). The cover 3 is provided on the substrate 2 so as to cover the gyro sensor element 4 in a non-contact manner, and a lower surface 33 outside the recess 31 is bonded to the upper surface 23 of the substrate 2 .

[0074] In addition, the space S serving as the cavity is an airtight space formed by the recess 21 and the recess 31 and is in a reduced pressure state (for example, about 1×10 2 Pa to 1×10 -2 Thus, the detection sensitivity of the angular velocity can be improved.

[0075] The constituent material of the substrate 2 is not particularly limited, but it is preferable to use a material having insulating properties, and specifically, it is preferable to use a glass material or a silicon material having high resistance, for example, it is preferable to use a glass material containing a certain amount of alkali metal ions (mobile ions) (for example, borosilicate glass such as Pyrex (registered trademark) glass). Thus, when the gyro sensor element 4 is made of silicon as a main material, the substrate 2 and the gyro sensor element 4 can be anode-bonded. In addition, it can be a quartz substrate, a crystal substrate, or an SOI (silicon on insulator) substrate.

[0076] The material constituting the cover 3 is not particularly limited, and for example, the same material as that of the substrate 2 described above can be used.

[0077] The method of bonding the substrate 2 and the cover 3 is not particularly limited and varies depending on the constituent materials of the substrate 2 and the cover 3. The method of bonding the substrate 2 and the cover 3 may be, for example, a bonding method using a bonding material such as an adhesive or a soldering material; a direct bonding method; a solid bonding method such as an anodic bonding, etc.

[0078] (Gyro sensor element)

[0079] like Figure 3 As shown, the gyro sensor element (angular velocity sensor element) 4 as a sensor element has two element bodies 40 (40a, 40b) arranged in the Y-axis direction and two fixed detection parts 49 (49a, 49b). Figure 3 In the embodiment, the two element bodies 40a and 40b are configured to be vertically symmetrical in the + (positive) Y-axis direction and the - (negative) Y-axis direction, and have the same configuration as each other.

[0080] Each element body 40a and 40b includes a mass portion 41, a plurality of fixed portions 42, a plurality of elastic portions 43, a plurality of drive portions 44 (movable drive electrodes), a plurality of fixed drive portions 45 and 46 (fixed drive electrodes), detection portions 471 and 472 (movable detection electrodes), and a plurality of support beams 48. The mass portion 41 is formed as a whole, including the drive portion 44, the frame 473, the detection portions 471, 472, and the support beams 48. That is, the detection portions 471 and 472 have a shape included in the mass portion 41.

[0081] The outer shape of the mass unit 41 is a quadrilateral frame shape in a plan view (hereinafter referred to as a "top view") viewed from the Z-axis direction, and as described above, includes the drive unit 44, the frame 473, and the detection units 471 and 472. Specifically, the outer shape of the mass unit 41 is composed of a pair of portions extending parallel to each other in the Y-axis direction and a pair of portions connecting the ends of the pair of portions and extending parallel to each other in the X-axis direction.

[0082] Four fixing portions 42 are provided with respect to one element body 40, and each fixing portion 42 is fixed to the upper surface 23 of the substrate 2. In addition, each fixing portion 42 is arranged outside the mass portion 41 in a plan view, and in the present embodiment, it is arranged at a position corresponding to each corner of the mass portion 41. In addition, in the figure, the fixing portion 42 located on the -Y axis side of the element body 40a and the fixing portion 42 located on the +Y axis side of the element body 40b are used as a common fixing portion.

[0083] In this embodiment, four elastic parts 43 are provided with respect to one element body 40, and each elastic part 43 connects a part of the mass part 41 and the fixing part 42 in a top view. In this embodiment, the elastic part 43 is connected to the corner of the frame 473 of the mass part 41, but it is not limited thereto, and it can also be any position where the mass part 41 can be displaced relative to the fixing part 42. Figure 3 In the figure, the mass portion 41 is configured to be displaceable relative to the Y-axis direction. In the figure, each elastic portion 43 has a serpentine shape in a top view, and has first portions 4301a, 4301b, 4301c and 4301d as a plurality of beams extending in the X-axis direction and a second portion 4302 (see FIG. 4 ) constituting the folded portion 430 and extending in the Y-axis direction. Figure 4 The shape of the elastic portion 43 is not limited to the shape shown in the figure, as long as it is elastically deformable in the desired driving direction (in the Y-axis direction in this embodiment).

[0084] Eight drive parts 44 are provided with respect to one element body 40, and each drive part 44 is connected to a portion extending in the Y-axis direction of the mass part 41. Specifically, four drive parts 44 are located on the +X side of the mass part 41, and the remaining four drive parts 44 are located on the -X side of the mass part 41. Each drive part 44 has a comb-tooth shape, and has a trunk part extending from the mass part 41 in the X-axis direction and a plurality of branch parts extending from the trunk part in the Y-axis direction.

[0085] Eight fixed drive parts 45 and 46 are provided for each element body 40, and each fixed drive part 45 and 46 is fixed to the upper surface 23 of the substrate 2. In addition, each of the fixed drive parts 45 and 46 has a comb shape corresponding to the drive part 44, and is provided to sandwich the drive part 44 therebetween.

[0086] The detection portions 471 and 472 are plate-like members having a rectangular shape in a plan view, which are provided inside the mass portion 41 and connected to the mass portion 41 through the support beam 48. The detection portions 471 and 472 are respectively rotatable (displaceable) about the rotation axis J4.

[0087] Furthermore, the fixed detection portion 49 (fixed detection electrode) is provided on the protrusion 22 located in the recess 21 of the substrate 2 (see Figure 2 ). The fixed detection portion 49 is rectangular in a plan view and faces the detection portions 471 and 472. In addition, the fixed detection portion 49 is separated from the detection portions 471 and 472.

[0088] In addition, the mass portion 41, the elastic portion 43, the drive portion 44, a portion of the fixed drive portion 45, a portion of the fixed drive portion 46, the detection portions 471 and 472 and the support beam 48 of the above-mentioned structure are arranged above the recess 21 of the substrate 2 and are separated from the substrate 2.

[0089] The element body 40 is formed by patterning a conductive silicon substrate doped with impurities such as phosphorus and boron using the Bosch process, that is, combining an etching process using, for example, reactive plasma gas and a deposition process.

[0090] Furthermore, as a constituent material of the fixed detection portion 49 , for example, aluminum, gold, platinum, ITO (indium tin oxide), ZnO (zinc oxide), or a combination thereof can be used.

[0091] Although not shown, the fixed portion 42 , the fixed driving portion 45 , the fixed driving portion 46 , the fixed detecting portion 49 a , and the fixed detecting portion 49 b are electrically connected to wirings and terminals, respectively. These wirings and terminals are provided on the substrate 2 , for example.

[0092] The configuration of the gyro sensor 1 has been briefly described above. The gyro sensor 1 having such a configuration can detect the angular velocity ωx in the following manner.

[0093] First, when a driving voltage is applied between the driving unit 44 and the fixed driving units 45 and 46 of the gyro sensor 1, the electrostatic attraction force periodically changes in intensity between the fixed driving units 45 and 46 and the driving unit 44. As a result, each driving unit 44 vibrates in the Y-axis direction along with the elastic deformation of each elastic unit 43. At this time, the plurality of driving units 44 of the element body 40a and the plurality of driving units 44 of the element body 40b vibrate in opposite phases to each other in the Y-axis direction (drive vibration).

[0094] In this way, when the angular velocity ωx is applied to the gyro sensor 1 in a state where the driving portion 44 vibrates in the Y-axis direction, the Coriolis force acts, and the detection portions 471 and 472 are displaced around the rotation axis J4. At this time, the detection portions 471 and 472 of the element body 40a and the detection portions 471 and 472 of the element body 40b are displaced in directions opposite to each other. For example, when the detection portions 471 and 472 of the element body 40a are displaced in the +Z-axis direction, the detection portions 471 and 472 included in the element body 40b are displaced in the -Z-axis direction, respectively. In addition, when the detection portions 471 and 472 included in the element body 40a are displaced in the -Z-axis direction, respectively, the detection portions 471 and 472 included in the element body 40b are displaced in the +Z-axis direction, respectively.

[0095] When the detection parts 471 and 472 are displaced (detect vibration) in this way, the distance between the detection parts 471 and 472 and the fixed detection part 49 changes. As the distance changes, the electrostatic capacitance between the detection parts 471, 472 and the fixed detection part 49 changes. Then, the angular velocity ωx applied to the gyro sensor 1 can be detected based on the amount of change in the electrostatic capacitance.

[0096] As described above, when the drive unit 44 vibrates in the Y-axis direction (drive vibration), ideally, the drive unit 44 preferably vibrates substantially parallel to the Y-axis direction from the non-driven state. However, the shape of the gyro sensor element 4 may not be an ideal shape due to processing errors, etc. Among them, in the shape of the beam (first portion 4301a, 4301b, 4301c, 4301d) constituting the elastic portion 43, for example, the width W1 of the beam (see Figure 4 ) will fluctuate, or the cross-sectional shape of the beam cannot be an ideal rectangular shape. As mentioned above, when the width W1 of the beam (see Figure 4) fluctuates, the resonance frequency of the elastic portion 43 also fluctuates. In addition, if the cross-sectional shape of the beam is not rectangular, the vibration of the driving portion 44 connected to the elastic portion 43 via the mass portion 41 includes not only the vibration component in the Y-axis direction of the desired driving vibration direction, but also the vibration component in the X-axis direction or Z-axis direction (unnecessary vibration component) in other vibration directions, and the so-called orthogonal signal increases.

[0097] In this embodiment, the elastic portion 43 is configured to have some features to reduce the fluctuation of the resonant frequency of the elastic portion 43 and reduce the increase of the orthogonal signal. Figure 4 , Figure 5 , Fig. 6A and Figure 6B , the elastic portion 43 is described in detail.

[0098] (Elastic part)

[0099] Figure 4 It is schematically shown Figure 3 A top view of a portion (portion A) of the elastic portion is shown. Figure 4 Shown by Figure 3 The elastic portion 43 is shown in the portion A surrounded by a dot-dash line. Figure 5 is schematically shown along Figure 4 A cross-sectional view of a portion of the elastic portion taken along line BB. Fig. 6A It is a cross-sectional view for explaining shape fluctuation caused by a difference in aperture ratio in a dry etching method. Figure 6B is a graph showing the correlation between the interval T1 / interval T2 and the rate of change of the beam width W1 (deep width W2). Note that Figure 6B The interval T1 in is the interval between the beam and the structure, and the interval T2 is the interval between the beam and the adjacent beam.

[0100] like Figure 4As shown, the elastic portion 43 has a serpentine shape in a top view. The elastic portion 43 includes: a first portion 4301a, 4301b, 4301c and 4301d of a plurality of slender beams extending in the X-axis direction (length direction); a plurality of second portions 4302 extending in the Y-axis direction (width direction); and a plurality of first beams 4303 connected to each of the two first portions 4301a, 4301b, 4301c and 4301d, respectively. Note that the first portions 4301a, 4301b, 4301c and 4301d are longer than the second portions 4302. In addition, the first portions 4301a, 4301b, 4301c and 4301d are portions defined by the dotted lines QL1, QL2, QL3, QL4, QL5, QL6, QL7 and QL8 shown in the figure as rough boundary lines, respectively. The second part 4302 constitutes a so-called folding portion 430 that connects and folds the adjacent first parts 4301a, 4301b, 4301c, and 4301d. The plurality of first parts 4301a, 4301b, 4301c, and 4301d are folded back by the folding portion 430 including the second part 4302 to form a serpentine shape. In addition, one end of the elastic part 43 is connected to the end of the mass part 41, which is indicated by a dotted line QL7 in the figure, and the other end is connected to the end of the fixing part 42, which is indicated by a dotted line QL1 in the figure.

[0101] The elastic part 43 of the present embodiment includes four first parts 4301a, 4301b, 4301c and 4301d. The four first parts 4301a, 4301b, 4301c and 4301d are configured to be arranged with an interval T2 from each other. The first parts 4301a, 4301b, 4301c and 4301d can be divided into two parts, namely: the first part 4301a and the first part 4301d as two outer beams located on the outside; and the first part 4301b and the first part 4301c as two inner beams located between the first part 4301a and the first part 4301d as the outer beam. The first parts 4301a, 4301b, 4301c and 4301d are folded backward by the folding part 430 including the second part 4302 to form a serpentine shape. In addition, one end of the elastic part 43 is connected to the mass part 41, and the other end is connected to the fixing part 42.

[0102] The first portion 4301a as one outer beam has one end connected to the mass portion 41 and is arranged to face the fixed drive portion 45 as a structural body. The first portion 4301a has a gap T1 between the first portion 4301a and the fixed drive portion 45 and extends along the outer edge of the fixed drive portion 45. The first portion 4301d as another outer beam has one end connected to the fixed portion 42 and is arranged on the opposite side of the fixed drive portion 45.

[0103] The first part 4301b as an inner beam has one end connected to the first part 4301a via the second part 4302, and the other end connected to the first part 4301c via another second part 4302. The first part 4301c as another inner beam connected to the first part 4301b via the second part 4302 at the other end is connected to the first part 4301d via another second part 4302 at the other end.

[0104] In addition, it is preferable that the four first portions 4301a, 4301b, 4301c, and 4301d are configured so that the width W1 in the direction (Y-axis direction) orthogonal to the length direction (X-axis direction) satisfies 0<W1≤10 (μm). By configuring the first portions 4301a, 4301b, 4301c, and 4301d in this way, when the depth D1 (see Fig. 6A ) is 20μm≤D1≤30μm, the aspect ratio (width / depth) of the first parts 4301a, 4301b, 4301c, and 4301d becomes less than 1 / 2, and therefore, the gyro sensor 1 is able to improve the detection accuracy affected by the fluctuation of the resonance frequency of the multiple first parts 4301a, 4301b, 4301c, and 4301d caused by their small size and fluctuation of the cross-sectional shape.

[0105] The second portion 4302 is arranged to extend along the Y-axis direction (width direction) intersecting the X-axis direction which is the length direction of the first portions 4301a, 4301b, 4301c, and 4301d. The second portion 4302 constitutes a so-called folding portion 430 that is connected at the end on the +X-axis side and folds the first portion 4301a and the adjacent first portion 4301b. Similarly, the second portion 4302 includes: a folding portion 430 that is connected at the end on the -X-axis side and folds the first portion 4301b and the adjacent first portion 4301c; and a folding portion 430 that is connected at the end on the +X-axis side and folds the first portion 4301c and the adjacent first portion 4301d.

[0106] The first beam 4303 is arranged between the first part 4301a and the fixed driving part 45 as a structure. The first beam 4303 has a gap T3 between itself and the first part 4301a, and is connected to the first part 4301a via a connecting part 4304. In this embodiment, two first beams 4303 are provided. The two first beams 4303 have a gap Q at the position facing the central part of the length direction of the first part 4301a, and extend along the length direction of the first part 4301a. In addition, the first beam 4303, as a general shape, refers to the part shown by the hatched line in the figure.

[0107] The first beam 4303 is particularly provided to reduce fluctuations in the cross-sectional shape of the first portion 4301a during dry etching such as the Bosch method (Bosch process) for forming the gyro sensor element 4. In addition, the fluctuations in the cross-sectional shape are caused by the density of the shape patterns of the various parts of the gyro sensor element 4 and also by the difference in the flow of the etching gas during the dry etching. Fig. 6A and 6B , the fluctuation of the cross-sectional shape of each part caused by the density of the shape pattern is explained.

[0108] In dry etching such as the Bosch method, in a portion with a large aperture ratio, in other words, a portion (pattern) with a large interval from an adjacent portion, the etching gas flows more easily, and side etching is performed by the flowing etching gas, and the change in cross-sectional shape increases. On the contrary, in a portion with a small aperture ratio, in other words, a portion (pattern) with a small interval from an adjacent portion, the change in cross-sectional shape becomes small (micro-loading effect).

[0109] Specifically, we will use examples to simulate Fig. 6A A processing example of the pattern of the elastic portion 43 shown in FIG. 4 is described. Fig. 6A 1 shows a cross section when deep etching with a depth D1 of 20 μm to 30 μm (20 μm ≤ D1 ≤ 30 μm) is performed by the Bosch method. Fig. 6A As shown, the first part 4301a as an outer beam having a gap T1 between itself and the fixed driving part 45, and the first part 4301b as an inner beam having a gap T2 between itself and the first part 4301a are dry-etched by the Bosch method. In this example, the gap T1 between the first part 4301a and the fixed driving part 45 satisfies the relationship T2<T1 with respect to the gap T2 between the first part 4301a and the first part 4301b. That is, a pattern is formed in which the opening ratio between the first part 4301a and the fixed driving part 45 is greater than the opening ratio between the first part 4301a and the first part 4301b. When dry etching is performed with such a pattern, as shown in FIG. Fig. 6A As shown, side etching is easily performed between the first portion 4301a having a large aperture ratio (interval T1) and the fixed driving portion 45, and side etching is difficult to perform between the first portion 4301a and the first portion 4301b having a small aperture ratio (interval T2).

[0110] Preferably, the interval T1 between the first portion 4301a and the fixed drive unit 45 satisfies T1≤10 (μm). By setting the interval T1 between the first portion 4301a as the outer beam and the fixed drive unit 45 as the structure in this way, a more compact gyro sensor 1 can be obtained.

[0111] As described above, in the first portion 4301a, side etching occurs on the side surface on the fixed driving unit 45 side, and the depth width W2 of the first portion 4301a at the bottom of the deep digging is smaller than the depth width W1 on the first main surface 431 where etching starts. On the other hand, in the first portion 4301b, both the first portion 4301a side and the first portion 4301c side have the interval T2, so that side etching is hardly generated, and the width W1 of the first portion 4301b of the first main surface 431 where etching starts and the depth width W3 of the first portion 4301b at the bottom of the deep digging are substantially equal.

[0112] In this way, a difference in cross-sectional shape is generated between the first portion 4301a having a pattern with a large aperture ratio and the first portion 4301b having a pattern without a large aperture ratio, that is, the cross-sectional shape fluctuates. Then, due to the fluctuation of the cross-sectional shape, the resonance frequency of the elastic portion 43 (the first portion 4301a and the other first portion 4301b, the first portion 4301c, and the first portion 4301d) supporting the mass portion 41 also fluctuates. In other words, the resonance frequency of the mass portion 41 supported by the elastic portion 43 fluctuates, which has an influence on the detection signal in the gyro sensor element 4.

[0113] The first beam 4303 is provided between the first portion 4301a having a large aperture ratio (interval T1) and the fixed driving unit 45, and can reduce the aperture ratio of the first portion 4301a on the side of the fixed driving unit 45. The first beam 4303 is provided on the side of the fixed driving unit 45 of the first portion 4301a so that the interval T3 from the first portion 4301a satisfies 0.8<T3 / T2<3.

[0114] exist Figure 6B The graph shows Fig. 6A The correlation between the ratio of the interval T1 and the interval T2 (T1 / T2 ratio) in the case shown, and the change rate of the depth width W2 relative to the width W1 of the first portion 4301a, the interval T1 being the interval between the first portion 4301a and the fixed driving portion 45, and the interval T2 being the interval between the first portion 4301a and the adjacent first portion 4301b. Figure 6BAs shown in the graph of , in the region where the T1 / T2 ratio is 3.0 or more, the rate of change of the depth width W2 of the deep portion relative to the width W1 of the first main surface 431 of the first portion 4301a exceeds 4%. Then, in the case where the rate of change of such depth width W2 exceeds 4%, fluctuation of the resonance frequency of the elastic portion 43 sometimes occurs. Therefore, it is not advisable to set the ratio T1 / T2 so as to have a relationship exceeding 3.0. In other words, it is preferable to arrange the first beam 4303 opposite to the first portion 4301a in such a manner that the ratio T3 / T2 of the interval T3 between the first beam 4303 and the first portion 4301a and the interval T2 between the first portion 4301a and the adjacent first portion 4301b is less than 3.0 (T3 / T2<3).

[0115] In addition, if Figure 6B As shown in the graph of , when the ratio T1 / T2 is less than 0.8, that is, if the interval (gap) is narrow, the width W1 of the first portion 4301a increases due to the micro-load effect, and etching does not penetrate when the interval (gap) is set narrower than this. Therefore, in the first beam 4303, the ratio of the interval T3 between the first portion 4301a and the interval T2 between the first portion 4301a and the adjacent first portion 4301b, that is, the ratio T3 / T2, is preferably set to satisfy 0.8<T3 / T2<3.

[0116] In this way, by configuring the first beam 4303 relative to the first part 4301a so that the T3 / T2 ratio is 0.8<T3 / T2<3, the elastic part 43 can reduce the fluctuation of the cross-sectional shape of the first part 4301a and the other first parts 4301b, 4301c and 4301d, can penetrate, and can reduce the fluctuation of the resonant frequency of the elastic part 43 (mass part 41).

[0117] In addition, it is more preferable that the interval T3 between the first beam 4303 and the first portion 4301a satisfies 0.8<T3 / T2≤2.0. By setting the T3 / T2 ratio in this way, as Figure 6B As shown in the curve diagram, the rate of change of the deep width W2 relative to the width W1 of the first part 4301a is as low as about 2%, which further reduces the fluctuation of the cross-sectional shape of the first part 4301a and the other first parts 4301b, 4301c, and 4301d, and can penetrate, and can further reduce the fluctuation of the resonant frequency of the elastic part 43 (mass part 41).

[0118] In addition, it is more preferable that the interval T3 between the first beam 4303 and the first portion 4301a satisfies 0.9≤T3 / T2≤1.1. By setting the T3 / T2 ratio in this way, as Figure 6BAs shown in the curve graph, the change of the deep width W2 relative to the width W1 of the first part 4301a is within 10%, the width W1 hardly changes, and the fluctuation of the cross-sectional shape between the first part 4301a and another first part 4301b, the first part 4301c, and the first part 4301d is further reduced, and it is possible to penetrate. As a result, the fluctuation of the resonant frequency of the elastic part 43 (mass part 41) caused by the fluctuation of the cross-sectional shape of the multiple first parts 4301a, 4301b, 4301c, and 4301d can be significantly reduced.

[0119] In addition, the first beam 4303 is not limited to the first portion 4301a on the fixed drive unit 45 side, and may be provided in the first portion 4301d on the side opposite to the fixed drive unit 45 side. In this case, the first beam 4303a is arranged via the connecting portion 4304a to face the first portion 4301d on the side opposite to the first portion 4301a. The arrangement pattern (arrangement configuration) such as the interval between the first portion 4301d and the first beam 4303a may be the same as that of the first beam 4303 on the fixed drive unit 45 side described above.

[0120] The first parts 4301a, 4301b, 4301c and 4301d constituting the elastic part 43 have a rectangular shape (a cross-sectional shape parallel to a YZ plane including the Y axis and the Z axis) formed in the direction along the X axis. The outer peripheral surface of the first parts 4301a, 4301b, 4301c and 4301d has a first main surface 431 and a second main surface 432 as a pair of main surfaces (see Figure 5 ) and a first side surface 433 and a second side surface 434 as a pair of side surfaces.

[0121] The first main surface 431 and the second main surface 432 are respectively flat surfaces along the XY plane including the X-axis and the Y-axis. The first main surface 431 is the surface on the +Z-axis side (upper surface), and the second main surface 432 is the surface on the -Z-axis side (lower surface). In the present embodiment, the first main surface 431 and the second main surface 432 are respectively in a serpentine shape and have a portion extending in the X-axis direction and a portion extending in the Y-axis direction.

[0122] The first side surface 433 is a surface on the -Y axis side, and the second side surface 434 is a surface on the +Y axis side. In this embodiment, four first side surfaces 433 and four second side surfaces 434 are provided for one elastic portion 43 (see Figure 4 ). The edge of the first side surface 433 on the +Z axis side is connected to the first main surface 431, and the edge on the -Z axis side is connected to the second main surface 432. On the other hand, the edge of the second side surface 434 on the +Z axis side is connected to the first main surface 431, and the edge of the second side surface 434 on the -Z axis side is connected to the second main surface 432.

[0123] As described above, the gyro sensor 1 includes: a substrate 2; a fixing portion 42 fixed to the substrate 2; a driving portion 44 driven in a first direction along the Y axis as a "first axis"; detection portions 471, 472 capable of being displaced in a second direction along the Z axis as a "second axis" orthogonal to the Y axis by the Coriolis force acting on the driving portion 44; a mass portion 41 connecting the driving portion 44 and the fixing portion 42; and an elastic portion 43 connecting the mass portion 41 and the fixing portion 42. The outer peripheral surface of the elastic portion 43 has a first main surface 431 and a second main surface 432 as "main surfaces", and a first side surface 433 and a second side surface 434 as "side surfaces".

[0124] In addition, in this embodiment, since there are the elastic portion 43 that is displaced according to the vibration of the driving portion 44 and the support beam 48 that is not displaced with respect to the vibration of the driving portion 44 but is displaced according to the Coriolis force, there is a feature that the processing of the elastic portion 43 has little effect on the support beam 48. The support beam 48 only needs to be displaceable in the Z-axis direction, and may be, for example, a torsion spring (torsion spring), a folding spring, or a thin plate-shaped spring in the Z direction.

[0125] According to the gyro sensor 1 of the first embodiment described above, when the interval T1 between the first portion 4301a as the outer beam and the fixed drive portion 45 as the structure has a relationship of T2<T1 with the interval T1 between the first portions 4301a, 4301b, 4301c, and 4301d as the plurality of beams, the first beam 4303 is provided. In other words, when the aperture ratio between the first portion 4301a and the fixed drive portion 45 is large, the first beam 4303 facing the first portion 4301a is provided on the fixed drive portion 45 side of the first portion 4301a. By this first beam 4303, the aperture ratio between the first portion 4301a and the fixed drive portion 45 can be reduced and made close to the aperture ratio between the plurality of first portions 4301a, 4301b, 4301c, and 4301d. Therefore, even if deep etching (deep groove etching) with a depth D1 of 20μm to 30μm (20μm≤D1≤30μm) is performed, the fluctuation of the cross-sectional shape caused by the flow of the etching gas can be reduced, and the fluctuation of the resonant frequency of the elastic part 43 including multiple first parts 4301a, 4301b, 4301c and 4301d caused by the fluctuation of the cross-sectional shape can be reduced, thereby reducing the decrease in detection accuracy.

[0126] In addition, as described above, the interval T1 may be the distance between the first portion 4301a and the fixed drive portion 45 as a structure in one gyro sensor element 4, but is not limited thereto. For example, when etching is performed in a state where a plurality of gyro sensor elements 4 are arranged on a wafer, a portion of the gyro sensor element 4 located nearby is used as a structure, and the interval T1 may be the distance (interval) between the structure and the first portion 4301a, or the distance (interval) between a frame (support frame) and the first portion 4301a.

[0127] <Second Embodiment>

[0128] Next, refer to Figure 7 and Figure 8 , a second embodiment of the physical quantity sensor is described. Figure 7 It is a plan view showing a schematic configuration of a gyro sensor according to a second embodiment of the physical quantity sensor. Figure 8 It is schematically shown Figure 7 FIG. 1 is a top view of a portion (portion C) of the elastic portion shown in FIG. In addition, in the following, the three mutually orthogonal axes similar to those of the first embodiment will be described using the X-axis, the Y-axis, and the Z-axis. In the following description, the differences from the first embodiment described above will be mainly described, and the description of the same matters will be omitted.

[0129] like Figure 7 and 8 As shown in FIG. 1 , the gyro sensor 1A of the second embodiment is an angular velocity sensor capable of detecting the angular velocity around the X-axis in the same manner as the first embodiment. Figure 7 As shown, the gyro sensor 1A includes a gyro sensor element (angular velocity sensor element) 505 as a sensor element and a package (not shown) accommodating the gyro sensor element (angular velocity sensor element) 505. In addition, since the package is the same as that in the first embodiment described above, its description is omitted.

[0130] The gyro sensor element 505 includes: two mass units 501 and 502 arranged in the X-axis direction; two fixed detection units 507 and 508; a plurality of fixed units 510 and 540 including support beams; a connecting beam 520; a plurality of elastic units 530; and a plurality of driving units 551 and 552. The two mass units 501 and 502 are symmetrically configured with respect to the + (positive) X-axis direction and the - (negative) X-axis direction, and have the same configuration.

[0131] The mass parts 501 and 502 are connected to the fixing part 510 including the support beam, the plurality of fixing parts 540 including the support beam, and the driving parts 551 and 552. And, the mass part 501 and the mass part 502 are connected to each other by the connection beam 520 which is respectively provided at the +Y axis side and the -Y axis side and sandwiches the fixing part 510. The mass parts 501 and 502 are integrally formed including the fixing parts 510 and 540, the connection beam 520, the plurality of elastic parts 530, and the driving parts 551 and 552.

[0132] The fixing portion 510 including a support beam is disposed between the mass portion 501 and the mass portion 502, and the mass portion 501 and the mass portion 502 are displaceably supported by the support beam having a curved shape. A plurality of fixing portions 540 including a support beam are respectively disposed on the driving portion 551 side of the mass portion 501 and the driving portion 552 side of the mass portion 502. The plurality of fixing portions 540 movably support the mass portion 501 and the mass portion 502 via the support beam.

[0133] The driving part 551 is connected to the mass part 501 via the support beam 550. The driving part 552 is provided on a side opposite to the driving part 551 with respect to the mass parts 501 and 502, and is connected to the mass part 502 via the support beam 550. Each of the driving parts 551 and 552 is connected to a portion of the mass parts 501 and 502 extending in the Y-axis direction. Each of the driving parts 551 and 552 has a comb-tooth shape, including a trunk portion extending in the Y-axis direction along the mass parts 501 and 502, and a plurality of branch portions extending from the trunk portion in the X-axis direction. Each of the driving parts 551 and 552 is configured relative to a fixed driving part (not shown).

[0134] Fixed detection portions 507 and 508 (fixed detection electrodes) are provided to respectively face the mass portions 501 and 502. The fixed detection portions 507 and 508 are separated from the mass portions 501 and 502.

[0135] The plurality of elastic portions 530 are respectively connected to the two ends of the trunk portion of the driving portions 551 and 552. That is, in this embodiment, four elastic portions 530 are provided. The plurality of elastic portions 530 are connected to the mass portions 501 and 502 via the driving portions 551 and 552. The plurality of elastic portions 530 are configured to enable the driving portions 551 and 552 to be displaced in the XY plane. Furthermore, each elastic portion 530 is in a serpentine shape in a top view viewed from the Z-axis direction, and has: a first portion 5301 extending in the Y-axis direction as a plurality of beams, and a second portion 5302 constituting a folding portion 533 and extending in the X-axis direction (see Figure 8 ).

[0136] like Figure 8As shown, the elastic part 530 is in a serpentine shape when viewed from the Z-axis direction. The elastic part 530 has: a first part 5301 as a plurality of beams extending in an elongated shape along the Y-axis direction; a second part 5302 extending in the X-axis direction; a third part 5306 extending in the X-axis direction; a fourth part 5305 extending in the X-axis direction; and a plurality of first beams 5303 respectively connected to the two first parts 5301. In addition, Figure 8 The interval T1 in the figure is the interval between the beam and the structure, and the interval T2 is the interval between the beam and the adjacent beam. Moreover, the first portion 5301 is longer than the second portion 5302. In addition, the first portion 5301 is a portion defined as a rough boundary line by the dotted lines QL11, QL12, QL13, and QL14 shown in the figure.

[0137] In addition, the elastic part 530 of the present embodiment includes two first parts 5301. The two first parts 5301 are arranged with an interval T2 between each other. One end of one of the first parts 5301 is connected to the trunk part of the driving part 551 via the third part 5306. Among them, the interval T1 between the first part 5301 and the trunk part of the driving part 551 satisfies the relationship of T2<T1 relative to the interval T2 between the first part 5301 and the first part 5301. One end of the other first part 5301 is connected to the fixing part 531 via the fourth part 5305. The second part 5302 connects the other end of one first part 5301 on the side opposite to the third part 5306 to the other end of the other first part 5301 on the side opposite to the fourth part 5305. The first parts 5301 connected in this way are folded by the folding part 533 including the second part 5302 to form a serpentine shape. In addition, it is preferable that the two first portions 5301 be configured so that the width W1 in the direction (X-axis direction) perpendicular to the longitudinal direction (Y-axis direction) satisfies 0<W1≤2 μm.

[0138] The first beam 5303 is arranged between one first portion 5301 and the main part of the driving portion 551 as a structural body. The first beam 5303 has a gap T3 between it and the first portion 5301, and is connected to the first portion 5301 via a connecting portion 5304. In this embodiment, two first beams 5303 are provided. The two first beams 5303 have a gap at a position opposite to the central part in the length direction of the first portion 5301, and extend along the length direction of the first portion 5301. In addition, the first beam 5303 is a general shape shown by the hatched line in the figure.

[0139] The first beam 5303 is preferably arranged to be opposite to the first portion 5301 so that the ratio T3 / T2 of the interval T3 between the first beam 5303 and the first portion 5301 to the interval T2 between the first portion 5301 and the adjacent first portion 5301 is 0.8<T3 / T2<3.0. Furthermore, it is further preferred that the interval T3 between the first beam 5303 and the first portion 5301 also satisfies 0.8<T3 / T2≤2.0. Furthermore, it is even more preferred that the interval T3 between the first beam 5303 and the first portion 5301 satisfies 0.9≤T3 / T2≤1.1.

[0140] As in the first embodiment, the first beam 5303 is provided to reduce fluctuations in the cross-sectional shape of the first portion 5301, particularly during dry etching, such as the Bosch method (Bosch process) for forming the gyro sensor element 505. In addition, the fluctuations in the cross-sectional shape are caused by differences in the flow of etching gas during dry etching, which is caused by the density of the shape pattern of each portion of the gyro sensor element 505, but since it is the same as the first embodiment, a detailed description is omitted here.

[0141] In addition, the first beam 5303 is not limited to being provided on the first portion 5301 side on the trunk portion side of the driving portion 551, but may be provided in the first portion 5301 located on the side opposite to the configuration side of the trunk portion of the driving portion 551 (the fixing portion 531 side). In this case, the first beam 5303 is configured via the connection portion 5304 so as to face the first portion 5301 on the fixing portion 531 side. Here, the configuration pattern (configuration configuration) such as the interval between the first portion 5301 and the first beam 5303 may be the same as that of the first beam 5303 on the trunk portion side of the driving portion 551 described above.

[0142] In addition, the shape of the elastic part 530 is not limited to the shape shown in the figure, as long as it is a structure that can be elastically deformed in the desired driving direction. And, although the elastic part 530 of this embodiment is respectively connected to the two ends of the trunk part of the driving part 551, the present invention is not limited to this, as long as it can support the mass part 501 (driving part 551) in a position that is displaceable relative to the fixing part 531.

[0143] Since the structure and advantages of the elastic portion 530 including the first portion 5301 including such a first beam 5303 have been described in detail above, similarly to the first embodiment, repeated description will be omitted here.

[0144] According to the gyro sensor 1A of the second embodiment described above, like the gyro sensor 1 of the first embodiment, the fluctuation of the cross-sectional shape caused by the flow of the etching gas can be reduced, the fluctuation of the resonance frequency of the elastic portion 530 including the plurality of first portions 5301 caused by the fluctuation of the cross-sectional shape can be reduced, and the decrease in detection accuracy can be reduced.

[0145] In addition, as described above, the interval T1 may be the distance between the first portion 5301 and the main portion of the driving unit 551 as a structure in one gyro sensor element 505, but is not limited thereto. For example, in the case where etching is performed while a plurality of gyro sensor elements 505 are arranged on a wafer, the interval T1 may be the distance (interval) between a portion (structure) of the gyro sensor element 505 located next to it and the first portion 5301, or the distance (interval) between a frame (support frame) and the first portion 5301.

[0146] <Third Embodiment>

[0147] Next, refer to Fig. 9 and 10 A third embodiment of the physical quantity sensor will be described. Fig. 9 It is a plan view showing a schematic configuration of a gyro sensor according to a third embodiment of the physical quantity sensor. Fig.10 It is schematically shown Fig. 9 FIG. 1 is a top view of a portion (portion F) of the elastic portion shown in FIG. 1. In addition, in the following, the three mutually orthogonal axes, namely, the X-axis, the Y-axis, and the Z-axis, which are the same as those in the first embodiment, will be used to describe the same embodiment. In addition, in the following description, the differences from the first embodiment described above will be mainly described, and the description of the same matters will be omitted.

[0148] like Fig. 9 and 10 As shown in FIG. 1 , the gyro sensor 1B of the third embodiment is an angular velocity sensor capable of detecting an angular velocity around the X-axis or around the Y-axis. Fig. 9 As shown, the gyro sensor 1B includes a gyro sensor element (angular velocity sensor element) 605 as a sensor element and a package (not shown) accommodating the gyro sensor element (angular velocity sensor element) 605. In addition, since the package can use the same package as the first embodiment, the description thereof is omitted.

[0149] The gyro sensor element 605 has four element bodies 605a, 605b, 605c, and 605d arranged in the X-axis and Y-axis directions, and four fixed detection portions (not shown). Fig. 9As shown, the four element bodies 605a, 605b, 605c and 605d have the same structure in the +(positive) X, +Y axis direction, +X, -(negative) Y axis direction, -X, +Y axis direction and -X, -Y axis direction.

[0150] Each element body 605a, 605b, 605c and 605d has a mass portion 601a, 601b, 601c and 601d. Each element body 605a, 605b, 605c and 605d is supported by the fixing portion 510 in a displaceable manner via a support beam 640 connecting the element body 605a and the element body 605b, a support beam 640 connecting the element body 605c and the element body 605d, and a connection beam 620 connecting the two support beams 640 and the fixing portion 510.

[0151] Hereinafter, the configuration will be described by taking the element body 605a as a representative example. The element body 605a has: a mass portion 601a; outer frame portions 613a and 614a connecting the ends of the mass portion 601a on the +X axis direction side and the ends on the -X axis direction side in an arc shape; a drive portion 610 connected to the outer frame portions 613a and 614a; a fixed drive electrode 618 opposite to the drive portion 610; and an elastic portion 630 that displaceably supports the mass portion 601a relative to the fixed portion 633. The mass portion 601a, the outer frame portions 613a and 614a, the drive portion 610, and the elastic portion 630 that constitute the element body 605a are formed integrally, including a support beam 620 and a connecting beam 620 that connect each element body 605a, 605b, 605c, and 605d to the fixed portion 510.

[0152] In the top view when observed from the Z-axis direction (hereinafter referred to as the "top view"), the outer shape of the mass portion 601a is a shape including a circular central portion and a roughly fan-shaped extension portion extending from the central portion in both the +X-axis direction and the -X-axis direction along the +X-axis direction.

[0153] The outer frame portion 614a connects the outer edge portion of the mass portion 601a on the +X axis direction side and the outer edge portion on the -X axis direction side in an arc shape in the +Y axis direction. The outer frame portion 613a connects the outer edge portion of the mass portion 601a on the +X axis direction side and the outer edge portion on the -X axis direction side in an arc shape in the -Y axis direction.

[0154] The two driving parts 610 are respectively arranged between the outer frame part 613a and the mass part 601a, and between the outer frame part 614a and the mass part 601a, forming two structures. The driving part 610 includes a plurality of trunk parts 611 connecting the outer frame parts 613a, 614a and the mass part 601a, and a plurality of branch parts 612 extending in an arc shape on both sides from the trunk part 611. The plurality of branch parts 612 are arranged in an arc shape that is substantially concentric with the outer edge of the central part of the mass part 601a.

[0155] The fixed driving electrode 618 is formed in a comb-tooth shape of an arc substantially concentric with the outer edge of the central portion of the mass portion 601 a to face the branch portions 612 arranged on both sides of the trunk portion 611 of the driving portion 610 .

[0156] The multiple elastic parts 630 are respectively connected to the four corners of each mass part 601a, 601b, 601c, and 601d. That is, in this embodiment, the elastic parts 630 are set at 16 positions. In the following, the structure of the element body 605a will be described as a representative example. One end of the multiple elastic parts 630 is connected to the fixed part 633, and the other end is connected to the mass part 601a. ​​The multiple elastic parts 630 are configured to enable the mass part 601a to be displaced. Fig.10 As shown, each elastic portion 630 has a serpentine shape in a top view, and has: a first portion 6301 as a plurality of beams extending in the X-axis direction, and a second portion 6302 constituting the folded portion 631 and extending in the Y-axis direction.

[0157] like Fig.10 As shown, the elastic part 630 has: a first part 6301 as a plurality of beams extending in the X-axis direction, a second part 6302 extending in the Y-axis direction, a third part 6306 extending in the Y-axis direction, and a plurality of first beams 6303a and 6303b respectively connected to the two first parts 6301. In addition, Fig.10The interval T1 in is the interval between the beam (first part 6301) and the structure (mass part 601a), and the interval T2 is the interval between the beam (first part 6301) and the adjacent beam (first part 6301). Moreover, the first part 6301 is longer than the second part. In addition, the first part 6301 is a part defined by the dotted lines QL21, QL22, QL23, QL24, QL25, QL26, and QL27 shown in the figure as a rough boundary line. The second part 6302 constitutes a so-called folding portion 631, which connects and folds the two ends of the first part 6301 and the adjacent first part 6301. Multiple first parts 6301 are folded by the folding portion 631 including the second part 6302 to form a serpentine shape. In addition, one end of the elastic part 630 is connected to the mass part 601a via the third part 6306, and the other end is connected to the fixed part 633.

[0158] In addition, the elastic part 630 of the present embodiment includes a plurality of first parts 6301. The plurality of first parts 6301 are arranged to have a spacing T2 between each other. In the first part 6301 on the mass part 601a side (-Y axis direction side), the end on the side opposite to the folded part 631 is connected to the mass part 601a via the third part 6306. Among them, the spacing T1 between the first part 6301 and the mass part 601a as a structure satisfies the relationship T2<T1 with respect to the spacing T2 between the first part 6301 and the first part 6301. In the first part 6301 on the fixed part 633 side (+Y axis direction side), the end on the side opposite to the folded part 631 is connected to the fixed part 633. The second part 6302 connects the ends of the adjacent first parts 6301 to each other to form the folded part 631. The plurality of first parts 6301 connected in this way are folded by the folded part 631 including the second part 6302 to form a serpentine shape. In addition, in the plurality of first portions 6301 , the width W1 in the direction (Y-axis direction) orthogonal to the longitudinal direction (X-axis direction) is preferably configured to satisfy 0<W1≤2 (μm).

[0159] The first beam 6303a is provided between the first portion 6301 on the mass portion 601a side (on the -Y axis direction side) and the mass portion 601a as a structural body. The first beam 6303a has a gap T3 between the first beam 6303a and the first portion 6301, and is connected to the first portion 6301 via a connecting portion 6304a. The first beam 6303a extends along the length direction of the first portion 6301.

[0160] The first beam 6303a is preferably arranged to be opposite to the first portion 6301 so that the ratio T3 / T2 between the interval T3 between the first beam 6303a and the first portion 6301 and the interval T2 between adjacent first portions 6301 is 0.8<T3 / T2<3.0. Furthermore, it is further preferred that the interval T3 between the first beam 6303a and the first portion 6301 further satisfies 0.8<T3 / T2≤2.0. It is even more preferred that the interval T3 between the first beam 6303a and the first portion 6301 satisfies 0.9≤T3 / T2≤1.1.

[0161] As in the first embodiment, the first beam 6303a is provided to reduce fluctuations in the cross-sectional shape of the first portion 6301, particularly during dry etching, such as the Bosch method (Bosch process) for forming the gyro sensor element 605. In addition, the fluctuations in the cross-sectional shape are caused by differences in the flow of etching gas during dry etching, which is caused by the density of the shape pattern of each portion of the gyro sensor element 605, but since it is the same as the first embodiment, a detailed description is omitted here.

[0162] In addition, the first beam 6303a is not limited to being provided on the first portion 6301 side on the mass unit 601a side, and may be provided in the first portion 6301 located on the side opposite to the arrangement side of the mass unit 601a (the fixing portion 633 side). Fig.10 As shown, the first beam 6303b is arranged via the connection portion 6304b so as to face the first portion 6301 on the fixing portion 633 side. Here, the arrangement pattern (arrangement structure) such as the interval between the first portion 6301 and the first beam 6303b can be the same as the first beam 6303a on the mass portion 601a side described above.

[0163] In addition, the shape of the elastic part 630 is not limited to the shape shown in the figure, as long as it is a structure that can be elastically deformed in the desired driving direction. In addition, although the elastic parts 630 of this embodiment are respectively connected to both sides of the mass part 601a, the present invention is not limited thereto, as long as it is a position that can displaceably support the mass part 601a relative to the fixed part 633, such as the sides of both ends of the mass part 601a in the X-axis direction.

[0164] Since the structure and advantages of the elastic portion 630 including the first portion 6301 including the first beams 6303a and 6303b have been described in detail above, similar to the first embodiment, repeated description will be omitted here.

[0165] According to the gyro sensor 1B of the third embodiment described above, like the gyro sensor 1 of the first embodiment, the fluctuation of the cross-sectional shape caused by the flow of the etching gas can be reduced, the fluctuation of the resonance frequency of the elastic portion 630 including the plurality of first portions 6301 caused by the fluctuation of the cross-sectional shape can be reduced, and the decrease in detection accuracy can be reduced.

[0166] In addition, as described above, the interval T1 may be the distance between the first portion 6301 and the mass portion 601a as a structure in one gyro sensor element 605, but is not limited thereto. For example, in the case where etching is performed while a plurality of gyro sensor elements 605 are arranged on a wafer, the interval T1 may be the distance (interval) between the structure of the gyro sensor element 605 located next to it and the first portion 6301, or the distance (interval) between the frame (support frame) and the first portion 6301.

[0167] (Compound Sensor)

[0168] Next, refer to Fig.11 , a configuration example of a composite sensor including any one of the gyro sensors 1 , 1A, and 1B will be described. Fig.11 This is a functional block diagram showing a schematic configuration of a composite sensor.

[0169] Fig.11 The composite sensor 900 shown includes a three-axis angular velocity sensor for detecting the posture or behavior (inertial momentum) of a moving object (wearable device) such as a car, robot, etc., and a three-axis acceleration sensor, functioning as a so-called six-axis motion sensor.

[0170] like Fig.11 As shown, the composite sensor 900 includes three angular velocity sensors 920x, 920y, and 920z capable of detecting the angular velocity of one axis, and an acceleration sensor 950 capable of detecting the acceleration of three axes. The angular velocity sensors 920x, 920y, and 920z are not particularly limited, and any one of the gyro sensors 1, 1A, and 1B using the Coriolis force can be used. The angular velocity sensors 920x, 920y, and 920z are sensors that reduce the detection accuracy as in the above-mentioned embodiments, and can perform stable and high-precision angular velocity detection. The acceleration sensor 950 can also be provided with independent sensors to measure the accelerations in the three axial directions respectively.

[0171] According to such a composite sensor 900, the composite sensor 900 can be easily constructed by using angular velocity sensors 920x, 920y, 920z of any one of the gyro sensors 1, 1A, 1B of the above-mentioned embodiments and an acceleration sensor 950 capable of detecting accelerations in three axes, so that, for example, angular velocity data and acceleration data can be easily obtained.

[0172] <Inertial Measurement Unit>

[0173] Next, refer to Fig.12 and Fig.13 , the inertial measurement unit (IMU: Inertial Measurement Unit) is explained. Fig.12 It is an exploded perspective view showing a schematic structure of an inertial measurement unit. Fig.13 It is a perspective view showing an arrangement example of inertial sensor elements of an inertial measurement unit.

[0174] Fig.12 The inertial measurement unit 2000 (IMU) shown is a device for detecting the posture or behavior (inertial momentum) of a moving object (wearable device) such as a car or a robot. The inertial measurement unit 2000 serves as a so-called six-axis motion sensor including a three-axis acceleration sensor and a three-axis angular velocity sensor.

[0175] The inertial measurement unit 2000 is a rectangular shape with a substantially square planar shape. In addition, screw holes 2110 as fixing parts are formed near two vertices located in the diagonal direction of the square. The inertial measurement unit 2000 can be fixed to the surface to be installed of the object to be installed in the car by two screws in the two screw holes 2110. For example, by selecting components or changing the design, the size can also be reduced so that it can be installed on, for example, a smartphone or a digital camera.

[0176] Inertial measurement unit 2000 includes housing 2100, joint member 2200, and sensor module 2300. Sensor module 2300 is inserted into housing 2100 via joint member 2200. Sensor module 2300 includes inner case 2310 and substrate 2320.

[0177] The outer shape of the housing 2100 is a rectangular shape that is roughly square in plan view, similar to the overall shape of the inertial measurement unit 2000, and the screw holes 2110 are formed near the vertices of two positions in the diagonal direction of the square. In addition, the housing 2100 is box-shaped, and the sensor module 2300 is accommodated therein.

[0178] The inner shell 2310 is a component that supports the substrate 2320 and has a shape that can be accommodated inside the outer shell 2100. And, the inner shell 2310 is formed with a recess 2311 for preventing contact with the substrate 2320 and an opening 2312 for exposing the connector 2330 described later. Such an inner shell 2310 is joined to the outer shell 2100 via a joining component 2200 (for example, a gasket impregnated with an adhesive). And, the substrate 2320 is joined to the lower surface of the inner shell 2310 via an adhesive.

[0179] like Fig.13 As shown, on the upper surface of the substrate 2320, a connector 2330, an angular velocity sensor 2340z for detecting the angular velocity around the Z axis, and an acceleration sensor 2350 for detecting the acceleration of each axial direction of the X axis, the Y axis, and the Z axis are installed. In addition, on the side surface of the substrate 2320, an angular velocity sensor 2340x for detecting the angular velocity around the X axis and an angular velocity sensor 2340y for detecting the angular velocity around the Y axis are installed. In addition, the angular velocity sensors 2340z, 2340x, and 2340y are not particularly limited, and any one of the gyro sensors 1, 1A, and 1B using the Coriolis force can be used. In addition, the acceleration sensor 2350 is not particularly limited, and an electrostatic capacitance type acceleration sensor or the like can be used.

[0180] In addition, a control IC 2360 is mounted on the lower surface of the substrate 2320. The control IC 2360 is an MCU (microcontroller unit) having a storage unit including a non-volatile memory, an A / D converter, etc., and controls various parts of the inertial measurement unit 2000. The storage unit stores a program that specifies the order and content for detecting acceleration and angular velocity, a program for digitizing the detected data and merging it into packet data, accompanying data, etc. In addition, a plurality of other electronic components are mounted on the substrate 2320.

[0181] The inertial measurement unit 2000 has been described above. This inertial measurement unit 2000 includes: angular velocity sensors 2340z, 2340x, 2340y and acceleration sensor 2350, and control IC 2360 (control circuit) for controlling the driving of these sensors 2340z, 2340x, 2340y, 2350. Therefore, the effect of the above-mentioned gyro sensor 1 can be enjoyed, and the inertial measurement unit 2000 with high reliability can be obtained.

[0182] <Portable Electronic Devices>

[0183] Next, we will refer to Fig.14 and 15, a portable electronic device using any one of the gyro sensors 1, 1A and 1B will be described in detail. Hereinafter, as an example of a portable electronic device, a watch-type actimeter (active tracker) will be described and described as a configuration to which the gyro sensor 1 is applied.

[0184] like Fig.14 As shown, the wrist device 1000 of the watch-type activity meter (active tracker) is attached to the user's wrist or other parts (detected object) through the straps 1032, 1037, etc., and has a display unit 150 for digital display, and can also communicate wirelessly. The gyro sensor 1 of the above embodiment is combined with a sensor for measuring acceleration, etc. in the wrist device 1000 as an angular velocity sensor 114 for measuring angular velocity (see Fig.15 ).

[0185] The wrist device 1000 includes a housing 1030, which contains at least an angular velocity sensor 114 (see Fig.15 ); the processing unit 100 accommodated in the housing 1030 (see Fig.15 ), for processing the output data from the angular velocity sensor 114; the display unit 150, which is accommodated in the housing 1030; and the light-transmitting cover 1071, which closes the opening of the housing 1030. A frame 1078 is provided on the outer side of the light-transmitting cover 1071 of the housing 1030. A plurality of operation buttons 1080, 1081 are provided on the side of the housing 1030. Fig.15 , further details are provided.

[0186] The acceleration sensor 113 detects each acceleration in three axial directions that intersect each other (ideally orthogonal), and outputs a signal (acceleration signal) based on the magnitude and direction of the detected three-axis acceleration. In addition, the angular velocity sensor 114 detects each angular velocity in three axial directions that intersect each other (ideally orthogonal), and outputs a signal (angular velocity signal) based on the magnitude and direction of the detected three-axis angular velocity.

[0187] On the liquid crystal display (LCD) constituting the display unit 150, for example, the following information is displayed according to various detection modes, namely: position information using the GPS sensor 110 or the geomagnetic sensor 111; motion information such as the amount of movement using the movement amount or acceleration sensor 113 or the angular velocity sensor 114; biological information such as the pulse rate using the pulse sensor 115; or time information such as the current time, etc. In addition, the ambient temperature using the temperature sensor 116 may also be displayed.

[0188] The communication unit 170 performs various controls for establishing communication between the user terminal and the information terminal (not shown). The communication unit 170 includes, for example, a transceiver corresponding to a short-range wireless communication standard such as Bluetooth (registered trademark) (including BTLE: Bluetooth Low Energy), Wi-Fi (registered trademark) (Wireless Fidelity), Zigbee (registered trademark), NFC (Near Field Communication), ANT+ (registered trademark), or a connector corresponding to a communication bus standard such as USB (Universal Bus).

[0189] The processing unit 100 (processor) is composed of, for example, an MPU (microprocessing unit), a DSP (digital signal processor), an ASIC (application-specific integrated circuit), etc. The processing unit 100 performs various processes based on the program stored in the storage unit 140 and the signal input from the operation unit 120 (for example, the operation buttons 1080 and 1081). The processing of the processing unit 100 includes: data processing of each output signal of the GPS sensor 110, the geomagnetic sensor 111, the pressure sensor 112, the acceleration sensor 113, the angular velocity sensor 114, the pulse sensor 115, the temperature sensor 116, and the timing unit 130; display processing of displaying an image on the display unit 150; sound output processing of outputting sound to the sound output unit 160; communication processing of communicating with the information terminal through the communication unit 170; power control processing of supplying power from the battery 180 to each part, etc.

[0190] Such a wrist device 1000 can have at least the following functions:

[0191] 1. Distance: The total distance (movement distance) and movement trajectory from the start of measurement are measured using the high-precision GPS function.

[0192] 2. Pace: Displays the current walking speed based on the measured pace distance value.

[0193] 3. Average speed: Calculates and displays the average speed from the start of walking to the current time.

[0194] 4. Altitude: Use GPS function to measure and display altitude.

[0195] 5. Stride Length: Stride length is measured and displayed even in locations such as tunnels where GPS radio waves cannot reach.

[0196] 6. Steps: Measures and displays the number of steps per minute.

[0197] 7. Heart rate: Measure and display heart rate through pulse sensor.

[0198] 8. GRADIENT: Measures and displays the slope of the ground during training or trail running in the mountains.

[0199] 9. Automatic lap measurement: When you run a preset fixed distance or fixed time, the lap measurement will be automatically performed.

[0200] 10. Exercise calories consumed: Displays the calories consumed.

[0201] 11. Steps: Displays the total number of steps since the start of exercise.

[0202] In addition, the wrist device 1000 can be widely used in running watches, runners' watches, running watches supporting multiple sports such as duathlon or triathlon, outdoor watches, and GPS watches equipped with a satellite positioning system such as GPS.

[0203] In addition, in the above description, GPS (Global Positioning System) is used as the satellite positioning system, but other global navigation satellite systems (GNSS: Global Navigation Satellite System) may also be used. For example, one or more satellite positioning systems may be used, such as EGNOS (European Geostationary Navigation Satellite Overlay Service), QZSS (Quasi-Zenith Satellite System), GLONASS (Global Navigation Satellite System), GALILEO (Galileo Satellite Navigation System), BeiDou (BeiDou Satellite Navigation System), etc. In addition, geostationary satellite-based satellite navigation augmentation systems (SBAS: satellite-based augmentation systems) such as WAAS (Wide Area Augmentation System) and EGNOS (European Geostationary Navigation Satellite Overlay Service) may also be used for at least one satellite positioning system.

[0204] Since this portable electronic device includes the gyro sensor 1 and the processing section 100 , it has excellent reliability.

[0205] <Electronic equipment>

[0206] Next, refer to Figures 16 to 18 , an electronic device using any one of the gyro sensors 1, 1A, and 1B will be described in detail. In addition, in the following description, a configuration to which the gyro sensor 1 is applied will be described by way of example.

[0207] First, refer to Fig.16 , a mobile personal computer as an example of an electronic device is described. Fig.16 It is a perspective view schematically showing the structure of a mobile personal computer which is an example of the electronic equipment.

[0208] In the figure, a personal computer 1100 is composed of a main body 1104 provided with a keyboard 1102 and a display unit 1106 having a display portion 1108, and the display unit 1106 is rotatably supported relative to the main body 1104 via a hinge structure. Such a personal computer 1100 has a gyro sensor 1 used as an angular velocity sensor built therein, and a control unit 1110 can perform control such as posture control based on detection data of the gyro sensor 1.

[0209] Fig.17 This is a perspective view schematically showing the structure of a smartphone (cellular phone) which is an example of an electronic device.

[0210] In this figure, the above-mentioned gyro sensor 1 is installed in the smartphone 1200. The detection data (angular velocity data) detected by the gyro sensor 1 is sent to the control unit 1201 of the smartphone 1200. The control unit 1201 is composed of a CPU (central processing unit), and can recognize the posture and behavior of the smartphone 1200 from the received detection data, change the display image displayed on the display unit 1208, emit a warning sound or effect sound, or drive the vibration motor to vibrate the main body. In other words, the action perception of the smartphone 1200 is performed, and from the measured posture and behavior, the display content can be changed, sound or vibration can be emitted, etc. In particular, when executing a game application, a realistic feeling close to reality can be enjoyed.

[0211] Fig.18 1 is a perspective view of a digital still camera showing an example of an electronic device. In addition, the connection with external devices is also briefly shown in the figure.

[0212] In the figure, a display unit 1310 is provided on the back of a housing (main body) 1302 of a digital still camera 1300. The display unit 1310 is configured to display based on an imaging signal of a CCD, and the display unit 1310 is also used as a viewfinder for displaying an object as an electronic image. In addition, a light receiving unit 1304 including an optical lens (imaging optical system) and a CCD is provided on the front side (back side in the figure) of the housing 1302.

[0213] After the photographer confirms the subject image displayed on the display unit 1310 and presses the shutter button 1306, the imaging signal of the CCD at this time is transmitted and stored in the memory 1308. In addition, in this digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the housing 1302. And, as shown in the figure, the video signal output terminal 1312 is connected to a television monitor 1430, and the input / output terminal 1314 for data communication is connected to a personal computer 1440 as needed. In addition, a configuration is formed in which the imaging signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation. This digital still camera 1300 has a built-in gyro sensor 1 used as an angular velocity sensor, and the control unit 1316 can perform control such as camera shake correction based on the detection data of the gyro sensor 1.

[0214] Since this electronic device includes the gyro sensor 1 and the control units 1110 , 1201 , and 1316 , it has excellent reliability.

[0215] In addition, electronic devices equipped with the gyro sensor 1 are used in Fig.16 Personal computers, Fig.17 Smartphone (mobile phone), Fig.18 In addition to digital still cameras, the present invention can also be applied to, for example, tablet terminals, clocks, inkjet devices (e.g., inkjet printers), laptop personal computers, televisions, cameras, video recorders, car navigation devices, pagers, electronic notebooks (including communication functions), electronic dictionaries, calculators, electronic game consoles, word processors, workstations, videophones, TV monitors for crime prevention, electronic binoculars, POS terminals, medical equipment (e.g., electronic thermometers, blood pressure monitors, blood glucose meters, electrocardiogram measuring devices, ultrasonic diagnostic devices, electronic endoscopes), fish finders, various measuring instruments, instruments (e.g., instruments for vehicles, aircraft, and ships), flight simulators, seismographs, pedometers, inclinometers, vibrometers for measuring hard disk vibrations, aircraft attitude control devices such as robots and drones, control devices for inertial navigation of autonomous driving of automobiles, etc.

[0216] <Moving Objects>

[0217] Next, in Fig.19 A moving object using any one of the gyro sensors 1, 1A and 1B is shown in FIG. 1 and described in detail. In addition, in the following description, a configuration to which the gyro sensor 1 is applied will be exemplified and described. Fig.19 It is a perspective view showing the structure of a car as an example of a moving object.

[0218] like Fig.19 As shown, a gyro sensor 1 is built into a car 1500, and for example, the posture of a car body 1501 can be detected by the gyro sensor 1. The detection signal of the gyro sensor 1 is provided to a car body posture control device 1502 as a posture control unit for controlling the posture of the car body. The car body posture control device 1502 can detect the posture of the car body 1501 based on the signal, and control the hardness of the car suspension or control the braking of each wheel 1503 according to the detection result. In addition, the gyro sensor 1 is widely used in electronic control units (ECUs) such as keyless entry systems, anti-theft devices, car navigation systems, car air conditioners, anti-lock braking systems (ABS), airbags, tire pressure monitoring systems (TPMS), engine control systems (engine systems), control devices for inertial navigation for automatic driving, and battery monitors of hybrid vehicles or electric vehicles.

[0219] In addition to the above examples, the gyro sensor 1 applied to a moving object can also be used as, for example, posture control of a bipedal walking robot or an electric train, remote control operation of a radio-controlled airplane, a radio-controlled helicopter, and an unmanned aerial vehicle, or posture control of an autonomous flying object, posture control of agricultural machinery (agricultural machinery) or construction machinery (construction machinery), and control of rockets, artificial satellites, ships, AGVs (automatic guided vehicles), and bipedal walking robots, etc. As described above, when realizing posture control of various moving objects, the gyro sensor 1 and various control units (not shown) are combined together.

[0220] Since such a moving object includes the gyro sensor 1 and a control unit (for example, the vehicle posture control device 1502 as a posture control unit), it has excellent reliability.

[0221] As described above, although the physical quantity sensor, composite sensor, inertial measurement unit, portable electronic device, electronic device and mobile object have been described based on the illustrated embodiments, the present invention is not limited thereto, and the composition of each part can be replaced by any composition having the same function. In addition, any other components can be added to the present invention.

[0222] In addition, in the above-mentioned embodiment, the X-axis, the Y-axis, and the Z-axis are orthogonal to each other, but the present invention is not limited thereto, and as long as the X-axis, the Y-axis, and the Z-axis intersect each other, for example, the X-axis may be slightly inclined relative to the normal direction of the YZ plane, the Y-axis may be slightly inclined relative to the normal direction of the XZ plane, and the Z-axis may be slightly inclined relative to the normal direction of the XY plane. In addition, "slightly" means the range in which the physical quantity sensor (gyro sensor 1) can exert its function, and the specific inclination angle (value) varies depending on the structure, etc.

Claims

1. A physical quantity sensor, characterized in that: include: A substrate, the substrate including a first surface and a second surface which are orthogonal to the Z axis and are in a front-to-back relationship with each other when three mutually orthogonal axes are set as an X axis, a Y axis, and a Z axis; as well as a gyro sensor element supported on the first surface of the substrate, the gyro sensor element detecting angular velocity based on a change in electrostatic capacitance, The gyro sensor element comprises: a structure configured to overlap with the first surface of the substrate when viewed from above in the direction of the Z axis; as well as an elastic portion, the elastic portion being arranged to overlap with the first surface of the substrate when viewed from above in the direction of the Z axis, The elastic portion includes an inner beam portion and an outer beam portion which are arranged parallel to each other. The outer beam portion is opposite to the structure when viewed from above in the direction of the Z axis and is arranged between the inner beam portion and the structure. The elastic portion includes a first beam portion provided only on the outer beam portion, on the side of the structure opposite to the inner beam portion and parallel to the outer beam portion, when viewed from above in the direction of the Z axis. The middle portion of the first beam portion is connected to the outer beam portion through a connecting portion, When the distance between the outer beam and the structure is set to T1, The distance between the inner beam portion and the outer beam portion is set to T2, When the distance between the outer beam portion and the first beam portion is set to T3, T2<T1, T1≤10μm, and 0.8<T3 / T2<3.0 are satisfied.

2. The physical quantity sensor according to claim 1, wherein: Satisfies 0.8<T3 / T2≤2.

0.

3. The physical quantity sensor according to claim 2, wherein: Satisfies 0.9<T3 / T2≤1.

1.

4. The physical quantity sensor according to any one of claims 1 to 3, wherein: When the depth of the beam along the Z axis is D1, Satisfies 20μm≤D1≤30μm.

5. The physical quantity sensor according to claim 4, wherein: When the width of the beam is set to W1, Satisfies 0<W1≤10μm.

6. The physical quantity sensor according to any one of claims 1 to 3, wherein: The gyro sensor element comprises: a fixing portion, fixed to the first surface of the substrate; a mass portion connected to the fixed portion; and The driving unit drives the mass unit.

7. The physical quantity sensor according to claim 6, wherein: The structure is the driving unit.

8. The physical quantity sensor according to claim 7, wherein: The first beam portion is opposite to the driving portion in the direction of the Y-axis.

9. The physical quantity sensor according to claim 7, wherein: The first beam portion is opposite to the driving portion in the direction of the X-axis.

10. The physical quantity sensor according to claim 6, wherein The structure is the mass portion.

11. The physical quantity sensor according to claim 10, wherein: The first beam portion is opposed to the mass portion in the direction of the Y-axis.

12. The physical quantity sensor according to any one of claims 1 to 3, wherein: The gyro sensor element includes a detection portion.

13. The physical quantity sensor according to any one of claims 1 to 3, wherein: The first beam portion and the connecting portion are formed in an integral T-shape in a plan view as viewed from the Z-axis direction.

14. A physical quantity sensor, characterized in that: include: substrate; A fixing portion, fixed relative to the substrate; an elastic portion connected to the fixing portion and having an inner beam and an outer beam connected by a folded portion; and a structure body, facing the outer beam in a plan view of the substrate, In a plan view of the substrate, the outer beam is located between the inner beam and the structure. When the distance between the outer beam and the structure is set to T1, When the interval between the inner beam and the outer beam is set to T2, T1≤10 μm is satisfied. In the case of T2<T1, a first beam is provided on the structural body side of the outer beam and is opposite to the outer beam. When the distance between the outer beam and the first beam is set to T3, Satisfies 0.8<T3 / T2<3.

0.

15. A composite sensor, characterized in that: include: The physical quantity sensor according to any one of claims 1 to 14; as well as Acceleration sensor.

16. An electronic device, characterized in that: include: The physical quantity sensor according to any one of claims 1 to 14; as well as The control unit performs control based on the detection signal output from the physical quantity sensor.

17. A moving object, characterized in that: include: The physical quantity sensor according to any one of claims 1 to 14; as well as The posture control unit controls the posture based on the detection signal output by the physical quantity sensor.

Images