A light homogenizing device and light homogenizing equipment

Abstract

The present invention relates to the field of homogenization technology, and discloses a light homogenization device and a light homogenization equipment. The present invention includes a first light homogenization module and a second light homogenization module, and the incident light can be divided into a first light and a second light after passing through the first light homogenization module in sequence, and the second light and the third light can be divided into a fourth light, a fifth light, a sixth light and a seventh light after passing through the second light homogenization module, so that the energy of the incident light changes from a relatively concentrated state to a relatively evenly distributed energy state.

Description

Technical Field

[0001] The present invention relates to the technical field of light homogenization, and in particular to a light homogenization device and a light homogenization equipment. Background Art

[0002] In laser processing or welding, the energy distribution of the output light spot directly affects the laser processing or welding performance. For lasers that have not undergone any light energy processing, the output light spot energy distribution satisfies the Gaussian energy distribution, that is, there is a maximum peak value. At this maximum energy peak power, the components processed by the laser are affected first. The energy below the energy peak is less than the peak energy, and the intensity acting on the components will be less than the peak power. Under the action of this laser with uneven energy distribution, the cut surface or weld of the processed component is uneven, and there are beveled surfaces or welding stress. Summary of the invention

[0003] In order to overcome the deficiencies of the prior art, the present invention provides a light homogenizing device and a light homogenizing equipment.

[0004] The technical solution adopted by the present invention to solve its technical problem is:

[0005] A light homogenizing device is provided, comprising a first light homogenizing module and a second light homogenizing module. Both the first light homogenizing module and the second light homogenizing module can separate incident light into two mutually perpendicular polarized light beams. The second light homogenizing module is located downstream of the first light homogenizing module. The incident light can be emitted after passing through the first light homogenizing module and the second light homogenizing module in sequence.

[0006] As an improvement to the above technical solution, the light homogenizing module includes a light splitting device and an adjustment device, the adjustment device is located downstream of the light splitting device, and the incident direction of the incident light is 90° to the direction of the optical axis of the light splitting device.

[0007] As a further improvement to the above technical solution, the light homogenizing module includes a light splitting device, and the direction of the optical axis of the light splitting device is 45° with the incident direction of the incident light.

[0008] As a further improvement to the above technical solution, the direction of the optical axis of the light splitting device in the second light homogenizing module is the direction of the optical axis of the light splitting device in the first light homogenizing module rotated 90 degrees around the direction of the incident light.

[0009] A light homogenization device is also provided, comprising a light homogenization device.

[0010] As an improvement to the above technical solution, it also includes a light source, an isolation module and an output module. The light emitted by the light source passes through the isolation module, the light homogenization device and the output module in sequence and is output outward from the output module.

[0011] As a further improvement to the above technical solution, a wave plate is provided between the homogenization device and the output module.

[0012] A light homogenization method is also provided, characterized in that:

[0013] The first light beam is divided into a second light beam and a third light beam which are non-overlapping;

[0014] The second light beam is divided into a fourth light beam and a fifth light beam which do not overlap each other;

[0015] The third light beam is split into a sixth light beam and a seventh light beam which do not overlap.

[0016] As an improvement to the above technical solution, the splitting radius of the first light is smaller than the radius of the second light and the third light.

[0017] The splitting radius of the second light is smaller than the radii of the fourth light and the fifth light;

[0018] The splitting radius of the third light is smaller than the splitting radius of the sixth light and the seventh light.

[0019] As a further improvement to the above technical solution, the fourth light, the fifth light, the sixth light and the seventh light all cross each other.

[0020] The beneficial effect of the present invention is that the incident light passes through the first light homogenizing module, so that the incident light is divided into two beams of light, and the two beams of light pass through the second light homogenizing module to be divided into four beams of light. The first light homogenizing module and the second light homogenizing module have a light homogenizing effect on the incident light, so that the light energy distribution is more uniform. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0022] Figure 1 is a schematic structural diagram of a light homogenizing device according to an embodiment of the present invention;

[0023] Figure 2 yes Figure 1 Light spot distribution at the first state at B1 in the middle Figure 1 ;

[0024] Figure 3 yes Figure 1 Light spot distribution at the first state at B1 in the middle Figure 2 ;

[0025] Figure 4 yes Figure 1 Light spot distribution at the first state at B1 in the middle Figure 3 ;

[0026] Figure 5 yes Figure 1 The third state spot distribution at B3 in the middle Figure 1 ;

[0027] Figure 6 yes Figure 1 The third state spot distribution at B3 in the middle Figure 2 ;

[0028] Figure 7 yes Figure 1 The third state spot distribution at B3 in the middle Figure 3 ;

[0029] Figure 8 yes Figure 1 The fourth state spot distribution at B4 in the middle Figure 1 ;

[0030] Fig. 9 yes Figure 1 The fourth state spot distribution at B4 in the middle Figure 2 ;

[0031] Fig.10 yes Figure 1 The fourth state spot distribution at B4 in the middle Figure 3 ;

[0032] Fig.11 is a structural schematic diagram of a light homogenizing device according to another embodiment of the present invention;

[0033] Fig.12 It is a schematic diagram of the structure of a light homogenization device according to an embodiment of the present invention. DETAILED DESCRIPTION

[0034] The following will be combined with the embodiments and drawings to clearly and completely describe the concept, specific structure and technical effects of the present invention, so as to fully understand the purpose, scheme and effect of the present invention. It should be noted that the embodiments and features in the embodiments of this application can be combined with each other without conflict.

[0035] It should be noted that, unless otherwise specified, when a feature is referred to as being "fixed" or "connected" to another feature, it may be directly fixed or connected to the other feature, or it may be indirectly fixed or connected to the other feature. In addition, the descriptions of up, down, left, right, front, back, etc. used in the present invention are only relative to the relative positional relationship of the components of the present invention in the drawings.

[0036] In addition, unless otherwise defined, all technical and scientific terms used herein have the same meaning as those generally understood by those skilled in the art. The terms used in this specification are only for describing specific embodiments, not for limiting the present invention. The term "and / or" used herein includes any combination of one or more related listed items.

[0037] Reference Figure 1 , Figure 1 1 is a schematic diagram of the structure of a light homogenizing device according to an embodiment of the present invention, which includes: a first light homogenizing module 110 , a first light splitting device 111 , a first adjustment device 112 , a second light homogenizing module 120 , a second light splitting device 121 , and a second adjustment device 122 .

[0038] As an embodiment of the light homogenization device, the device comprises at least two light homogenization modules. Each time the incident light passes through a light homogenization module, it will be divided into two beams of light. When the incident light passes through N light homogenization modules, the incident light is divided into two N Beam light, which changes the incident light from a state with more concentrated energy to a state with more dispersed energy.

[0039] As an embodiment, the first light homogenizing module 110 includes a first light splitting device 111 and an adjusting device 112. At this time, the optical axis of the first light splitting device 111 is parallel to the incident light, so that the incident light passing through the first light splitting device 111 is divided into a first light beam (o light) and a second light beam (e light), so that the incident light changes from the first state to the second state; the first light and the second light enter the first adjusting device 112, and the first adjusting device 112 causes the first light and the second light to rotate 45° clockwise, changing from the second state to the third state. Figures 2 to 7 , Figures 2 to 4 is the incident light spot distribution. The energy spatial distribution of the incident light satisfies the Gaussian energy distribution. Figures 5 to 7 This is the energy distribution of the light after passing through the first light homogenizing module 110. After passing through a light splitting module, the light spot energy spatial distribution has a flat top peak that is approximately a long strip.

[0040] As an embodiment, the distance between the first light beam and the second light beam can be adjusted by adjusting the distance between the first light splitting module and the first adjustment device 112 .

[0041] As an embodiment, the first light beam and the second light beam do not completely overlap.

[0042] As an embodiment, the splitting distance of the splitting device is smaller than the radius of the first light beam and the second light beam, that is, after the splitting, there is an intersection between the first light beam and the second light beam.

[0043] The second light beam and the third light beam passing through the first light splitting module enter the second light homogenizing module 120. The second light homogenizing module 120 includes a second light splitting device 121 and a second adjustment device 122. The optical axis of the second light splitting device 121 is rotated 90° with the incident light as the axis on the basis of the optical axis of the first light splitting device 111. The second light beam is divided into a fourth light beam (o light) and a fifth light beam (e light) after passing through the second light splitting device 121. The third light beam is divided into a sixth light beam (o light) and a seventh light beam (e light). Then the fourth light beam, the fifth light beam, the sixth light beam and the seventh light beam are emitted into the second adjustment device 122, so that the four light beams are all deflected 45° clockwise. Therefore, the emission directions of the fourth light beam and the fifth light beam are both at an angle of 45° to the incident direction of the incident light, and the two are symmetrically distributed. Similarly, the sixth light beam and the seventh light beam are both at an angle of 45° to the incident light, and the two are symmetrically distributed. At this time, the incident light changes from the third state to the fourth state, as shown in FIG. Figures 8 to 10 At this time, the energy distribution of the light spot is approximately a flat-top energy distribution.

[0044] Since the optical axis of the second light splitting device 121 is rotated 90° based on the optical axis of the first light splitting device 111 with the incident light as the axis, the light splitting directions of the first light splitting and the second light splitting are perpendicular to each other. The result after two light splittings is shown as follows: Figures 8 to 10 shown.

[0045] As an example, Figure 8 As shown, the fourth light beam, the fifth light beam, the sixth light beam and the seventh light beam do not overlap with each other and all have intersections.

[0046] Reference Fig.11 , Fig.11 1 is a schematic diagram of the structure of a light homogenizing device according to another embodiment of the present invention, which includes a first light splitting device 111 and a second light splitting device 121. In this embodiment, the light homogenizing device only includes a light splitting device. At this time, the optical axis of the light splitting device is 45° with the incident light. After the incident light passes through the first light splitting device 111, it is divided into a second light beam (o light) and a third light beam (e light). The second light beam and the third light beam are symmetrically distributed with the incident light direction as the axis, and both are 45° with the incident light. At this time, the spatial energy distribution of the incident light spot is: Figure 2 , Figure 3 and Figure 4 The first state becomes Figure 5 , Figure 6 and Figure 7 In the third state shown, the spatial distribution of the light spot energy has a flat-top peak that is approximately a long strip.

[0047] The optical axis of the second spectrometer 121 is rotated 45° with the incident light as the axis on the basis of the optical axis of the first spectrometer 111. The second light beam and the third light beam incident on the second spectrometer 121 pass through the second spectrometer 121. The second light is divided into a fourth light beam (o light) and a fifth light beam (e light) with mutually perpendicular polarization states. The third light beam is divided into a sixth light beam (o light) and a seventh light beam (e light) with mutually perpendicular polarization states. Since the second light beam and the third light beam are both 45° to the optical axis of the second spectrometer 121, the fourth light beam and the fifth light beam are both 45° to the second light, and the two are symmetrically distributed, the sixth light beam and the seventh light beam are both 45° to the third light. At this time, the incident light changes from the third state to the fourth state, as shown in FIG. Figures 8 to 10 At this time, the energy distribution of the light spot is approximately a flat-top energy distribution.

[0048] Since the optical axis of the second light splitting device 121 is rotated 45° based on the optical axis of the first light splitting device 111 with the incident light as the axis, the first light splitting direction is perpendicular to the second light splitting direction, so the light passing through the two light splitting devices appears Figure 8 The light-splitting effect shown.

[0049] As a third embodiment, the light homogenizing device in the first embodiment and the light homogenizing module in the second embodiment may be connected in series in multiple stages to achieve multi-stage light splitting.

[0050] The present invention also discloses a light homogenization device, referring to Fig.12 , Fig.12 1 is a schematic diagram of the structure of a light homogenizing device according to an embodiment of the present invention, which includes a light source 200, an isolation module 300, a third light splitting device 301, a third adjustment device 302, a rotating device 303, a magnetic tube 304, a fourth light splitting device 305, a light homogenizing device 100 and an output module 400.

[0051] The light emitted by the light source 200 enters the light homogenizing device 100 after passing through the isolation module 300 . After the light homogenizing device 100 evenly distributes the energy of the incident light, the output module 400 adjusts the diameter of the light and then outputs it from the light homogenizing device.

[0052] The optical isolation module 300 includes a third optical splitter 301, which decomposes the incident light into an eighth light beam (o light) and a ninth light beam (e light). The two light beams enter the third adjustment device 302, and the polarization states of the two light beams rotate 45° clockwise under the action of the third adjustment device 302, and then enter the rotation device 303. Due to the magneto-optical rotation effect generated by the magnetic tube 304, the polarization states of the two light beams rotate 45° clockwise again. At this time, the eighth light beam (o light) and the ninth light beam (e light) rotate 90°. That is, after passing through the isolation device 300, the eighth light beam becomes the ninth light, and the ninth light beam becomes the eighth light. The light enters the fourth optical splitter 305 of the isolator, and the fourth optical splitter 305 combines the two polarization states into a beam of non-polarized light and injects it into the light homogenization device.

[0053] The reverse incident light is incident on the fourth beam-splitting crystal 305, and the fourth beam-splitting crystal 305 decomposes the non-polarized light into the tenth light beam (o light) and the eleventh light beam (e light). The separated two beams of light are incident on the rotating device 303. Due to the action of the rotating device 303, the polarization states of the two beams of light are rotated 45° clockwise. After being rotated 45°, the two polarized light beams are incident on the rotating device 303. The rotating device 303 rotates the light 45° counterclockwise under the action of the magnetic tube 304. At this time, the polarization states of the two polarized light beams are still the same as the polarization states when they are emitted from the fourth beam-splitting crystal 305. The two polarized light beams projected on both sides of the incident light cannot be incident on the light source 200, which can effectively realize the irreversibility of the forward and reverse light paths, that is, the isolation of the light source 200 is realized.

[0054] As an embodiment, the spectroscopic devices proposed in the above embodiments are all spectroscopic crystals.

[0055] As an embodiment, the adjustment device mentioned in the above embodiment is a quartz optical rotation rod or a wave plate.

[0056] As an embodiment, a quarter wave plate is provided between the homogenizing device 300 and the output module 400, and the angle of the optical axis of the quarter wave plate is 45° with the polarization state of the light output by the homogenizing device. The linear polarized light emitted from the homogenizing device 300 is converted into circular polarized light by the quarter wave plate, and the changed circular polarized light is emitted outward after passing through the output module 400. The circular polarized light converted by the quarter wave plate is more conducive to processing and production.

[0057] The present invention also discloses a light energy homogenization method:

[0058] Step 1: The incident light is separated into the second light and the third light in the first direction. The second light and the third light are symmetrical about the first midline and do not overlap each other. At this time, the spatial energy distribution of the light spot is: Figure 2 , Figure 3 and Figure 4 becomes Figure 5 , Figure 6 and Figure 7 .

[0059] Step 2: Separate the second light into the fourth light and the fifth light in the second direction, and the fourth light and the fifth light are symmetrical about the second center line; separate the third light into the sixth light and the seventh light in the second direction, and the sixth light and the seventh light are symmetrical about the second center line. The spatial energy distribution of the light spot is: Figure 5 , Figure 6 and Figure 7 becomes Figure 8 , Fig. 9 and Fig.10 . The fourth light and the fifth light do not completely overlap, and the sixth light and the seventh light do not completely overlap.

[0060] As an embodiment, the first direction and the second direction are perpendicular to each other.

[0061] As an example, Figure 8 , Fig. 9 and Fig.10 As shown, the fourth light, the fifth light, the sixth light and the seventh light all cross but do not completely overlap, and the energy distribution of the light spot is approximately a flat-top energy distribution.

[0062] The incident light can be split wirelessly through the above steps. The more times the light is split, the closer the energy of the emitted light is to the flat-top energy distribution.

[0063] The above is a specific description of the preferred implementation of the present invention, but the invention is not limited to the embodiments. Those skilled in the art may make various equivalent modifications or substitutions without violating the spirit of the present invention. These equivalent modifications or substitutions are all included in the scope defined by the claims of this application.

Claims

1. A light homogenizing device, characterized in that: It comprises at least two light homogenizing modules, which can divide the incident light into two beams of light with mutually perpendicular polarization directions; the light homogenizing module comprises a light splitting device, which is used to split the incident light into two symmetrical beams of light, the two beams of light intersect each other, and the light splitting distance of the light splitting device is smaller than the radius of the two beams of light; At least two of the light homogenization modules include a first light homogenization module and a second light homogenization module, the second light homogenization module is located downstream of the first light homogenization module, the incident light can be emitted after passing through the first light homogenization module and the second light homogenization module in sequence, the four polarized light beams emitted by the second light homogenization module cross each other, and the light spots of the four polarized light beams partially overlap; The direction of the optical axis of the spectrometer is 45 degrees to the incident direction of the incident light, and the direction of the optical axis of the spectrometer in the second light homogenizing module is that the direction of the optical axis of the spectrometer in the first light homogenizing module is rotated 45 degrees around the direction of the incident light.

2. A light homogenization device, characterized in that: It comprises the light homogenizing device as claimed in claim 1.

3. The light homogenization device according to claim 2, characterized in that: It also includes a light source, an isolation module and an output module. The light emitted by the light source passes through the isolation module, the light homogenization device and the output module in sequence and is output outward from the output module.

4. The light homogenization device according to claim 3, characterized in that: A quarter wave plate is provided between the light homogenizing device and the output module.

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