Automatic door opening and closing device with vertical lifting function

Abstract

The present invention discloses an automatic door opening and closing device with a vertical lifting function, wherein a bearing c is connected to a bearing fixing block by means of a rotating shaft c, a bearing a is directly or indirectly connected and fixed to the bearing c, a cylinder or an electric cylinder and the bearing fixing block are respectively installed at corresponding positions of a connecting plate, the connecting plate is connected and fixed to a slider of a pneumatic slide or an electric slide, the pneumatic slide or the electric slide is installed at corresponding positions of a door frame component, a connecting rod is respectively connected to a bearing a and a bearing b by means of a rotating shaft a and a rotating shaft b, the bearing b is connected to a movable rod of the cylinder or the electric cylinder, a door panel is installed on the connecting rod, the opening and closing action of the door panel is realized by means of the telescopic movement of the movable rod of the cylinder or the electric cylinder and the linkage cooperation of the bearings a, b and c, and then the vertical lifting function of the door panel is realized by means of the up and down movement of the slider of the pneumatic slide or the electric slide.

Description

Technical Field

[0001] The present invention relates to the automatic door opening and closing required for materials entering and exiting semiconductor equipment, and in particular to an automatic door opening and closing device with a vertical lifting function. Background Art

[0002] In semiconductor equipment, there are parts where materials enter and exit, and it is necessary to set up channels for the materials to enter and exit. In known semiconductor equipment, the channels for the materials to enter and exit are of two types: completely open and with parallel opening and closing door devices. The open channels cannot meet the cleanliness requirements of semiconductor equipment, while the channels with parallel opening and closing door devices occupy a large space and have a complicated structure. Summary of the invention

[0003] In order to solve the above technical problems, the purpose of the present invention is to provide an automatic door opening and closing device with a vertical lifting function. The specific technical solution is as follows:

[0004] An automatic door opening and closing device with vertical lifting function, comprising a door panel, a connecting rod, a pneumatic slide or an electric slide, a bearing a, a bearing b, a bearing c, a bearing fixing block, a cylinder or an electric cylinder and a connecting plate;

[0005] The bearing c is connected to the bearing fixing block via a rotating shaft c;

[0006] The bearing a and the bearing c are directly connected and fixed or indirectly connected and fixed through other components.

[0007] The connecting plate can be of any shape, and the cylinder or electric cylinder and the bearing fixing block are respectively fixed on the upper and lower ends of the connecting plate;

[0008] The bearing b is connected to the connecting rod via a rotating shaft b;

[0009] The bearing a is connected to the connecting rod via a rotating shaft a;

[0010] The movable rod of the air cylinder or electric cylinder is connected to the bearing b;

[0011] The connecting plate is connected and fixed to a slider arranged on the pneumatic slide or the electric slide;

[0012] The pneumatic slide or electric slide is fixed on the door frame assembly;

[0013] The door panel is mounted on the connecting plate;

[0014] The door panel assembly is provided with a passage opening for materials to enter and exit.

[0015] The automatic door opening and closing device with vertical lifting function has a preferred solution in which the number of bearings C connected to the bearing fixing block can be selected arbitrarily. When the number of bearings C is one, it can be arranged on any side of the bearing fixing block. When the number of bearings C is two, they are arranged on both sides of the bearing fixing block. The bearings C can be of any structure.

[0016] The preferred solution of the automatic door opening and closing device with vertical lifting function is that the bearing C and the bearing fixing block are connected in a hinged manner through the rotating shaft C, or in any other manner.

[0017] The automatic door opening and closing device with vertical lifting function is preferably configured such that the air cylinder or the electric cylinder has an air inlet a and an air inlet b, while the electric cylinder has no air inlet.

[0018] The movable rod of the air cylinder or electric cylinder has a telescopic function, and the movable rod can be in a rod shape, a plate shape or other forms.

[0019] The automatic door opening and closing device with vertical lifting function is preferably configured such that the pneumatic slide or the electric slide has an air inlet c and an air inlet d, while the electric slide has no air inlet.

[0020] The automatic door opening and closing device with vertical lifting function is preferably connected to the bearing a through a rotating shaft a or any other method, and the connecting rod is connected to the bearing b through a rotating shaft b or any other method.

[0021] The working principle of an automatic door opening and closing device with a vertical lifting function: the initial state of the device is that the movable rod of the air cylinder or electric cylinder is in an extended state, and the slider of the pneumatic slide or electric slide is at the upper limit of the pneumatic slide. Through the interaction between bearings a, bearings b and bearing c and the connecting rod, the connecting rod drives the door panel to be at the passage opening of the door frame assembly, that is, the material inlet and outlet passage opening is in a closed state. When the door panel needs to be opened, the movable rod of the air cylinder or electric cylinder retracts, and the door panel opens at a specific angle at this time. Then the slider of the pneumatic slide or electric slide moves downward, driving the door panel to move downward at the same time, thereby opening the passage opening.

[0022] The beneficial effects of the present disclosure: The present invention has a simple structure and saves costs. The movable rod of the air cylinder or electric cylinder moves in a telescopic manner to drive the door panel to open or close at a specific angle, and then the pneumatic slide or electric slide moves up and down to drive the door panel to rise or fall. The device is cleverly coordinated, simple in structure, easy to implement, and can save space. Therefore, the use of this structure has significant social and economic benefits. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1It is a front view of an automatic door opening and closing device with vertical lifting function;

[0024] Figure 2 It is a side view of an automatic door opening and closing device with vertical lifting function (the passage is closed);

[0025] Figure 3 It is a rear view of an automatic door opening and closing device with vertical lifting function;

[0026] Figure 4 The door panel is opened at a specific angle;

[0027] Figure 5 The door panel is opened and then drops to the lower limit of the slider (the passage is open).

[0028] In the figure, 1 is a door panel, 2 is a connecting rod, 3 is a bearing a, 4 is an air connection port c, 5 is a rotating shaft a, 6 is a connecting plate, 7 is a rotating shaft b, 8 is a bearing b, 9 is a pneumatic slide or an electric slide, 10 is an air connection port d, 11 is a slider, 12 is a bearing fixing block, 13 is a bearing c, 14 is a rotating shaft c, 15 is an air connection port a, 16 is an air connection port b, 17 is an air cylinder or an electric cylinder, 18 is an air cylinder or an electric cylinder movable rod, 19 is a door frame assembly, and 20 is a passage opening DETAILED DESCRIPTION

[0029] like Figure 1-5 The automatic door opening and closing device with vertical lifting function shown in the figure comprises a door panel 1, a connecting rod 2, a pneumatic slide or an electric slide 9, a bearing a3, a bearing b8, a bearing c13, a bearing fixing block 12, a cylinder or an electric cylinder 17 and a connecting plate 6;

[0030] The bearing c13 is connected to the bearing fixing block via a rotating shaft c14;

[0031] The bearing a3 and the bearing c13 are directly connected and fixed or indirectly connected and fixed through other components.

[0032] The connecting plate 6 can be of any shape, and the cylinder or electric cylinder 17 and the bearing fixing block 12 are respectively fixed at the upper and lower ends of the connecting plate 6;

[0033] The bearing b8 is connected to the connecting rod 2 via the rotating shaft b7;

[0034] The bearing a3 is connected to the connecting rod 2 via the rotating shaft a5;

[0035] The cylinder or electric cylinder movable rod 18 is connected to the bearing b8;

[0036] The connecting plate 6 is connected and fixed to a slider 11 arranged on the pneumatic slide table or the electric slide table 9;

[0037] The pneumatic slide or electric slide 9 is fixed on the door frame assembly 19;

[0038] The door panel 1 is mounted on the connecting plate 6;

[0039] The door panel assembly 19 is provided with a passage opening 20 for materials to enter and exit.

[0040] The number of bearings c13 connected to the bearing fixing block 12 can be selected arbitrarily. When there is one bearing c13, it can be arranged on any side of the bearing fixing block 12. When there are two bearings c13, they are arranged on both sides of the bearing fixing block 12. The bearing c13 can be of any structure.

[0041] The bearing c13 and the bearing fixing block 12 are connected in a hinged manner via a rotating shaft C14, or in any other manner.

[0042] The air cylinder or the electric cylinder 17 has an air inlet a15 and an air inlet b16, while the electric cylinder has no air inlet.

[0043] The movable rod 18 of the air cylinder or electric cylinder has a telescopic function, and the movable rod can be in a rod shape, a plate shape or other forms.

[0044] The pneumatic slide or the electric slide 9 has an air inlet c4 and an air inlet d10, while the electric slide has no air inlet.

[0045] The connecting rod 2 is connected to the bearing a3 via a rotating shaft a5 or any other means, and the connecting rod 2 is connected to the bearing b8 via a rotating shaft b7 or any other means.

[0046] The initial state of the device is Figure 1 , Figure 2 , Figure 3 As shown, the slider of the pneumatic slide or electric slide 9 is at the upper limit position, and the movable rod of the air cylinder or electric cylinder is in the extended state. At this time, the door panel 1 is at the passage opening of the door frame assembly 19, closing the passage opening. When materials are in or out and the passage opening needs to be opened, first, the movable rod of the air cylinder or electric cylinder retracts through pneumatic or electric control, and the three kinds of rotational motions are linked, namely, the rotational motion of the connecting rod 2 and the bearing a3, the rotational motion of the bearing fixing block 12 and the bearing c13, and the rotational motion of the connecting rod 2 and the bearing 8, so that the connecting rod 2 drives the door panel 1 to leave the door frame assembly 19 at a specific angle, as shown in FIG. Figure 4 Then the slider 11 of the pneumatic slide or electric slide 9 moves downward from the initial upper limit position through pneumatic or electric control until it moves to the lower limit position. During the downward movement of the slider 11, a series of components such as the connecting plate 6, the connecting rod 2 and the door panel 1 are driven to move downward at the same time, thereby opening the channel 20 of the door panel assembly 19 for materials to enter and exit. Figure 5Similarly, when the passage opening needs to be closed, the slider 11 drives a series of components such as the connecting plate 6, the connecting rod 2 and the door panel 1 to move upward at the same time to reach the upper limit, and then the cylinder or electric cylinder movable rod 18 is extended through pneumatic or electric control, and the three kinds of rotational motions are linked, such as the rotational motion of the connecting rod 2 and the bearing a3, the rotational motion of the bearing fixing block 12 and the bearing c13, and the rotational motion of the connecting rod 2 and the bearing 8, so that the connecting rod 2 drives the door panel 1 to move to the passage opening 20 of the door frame assembly 19 along a specific motion route, as shown in FIG. Figure 4 As shown, the channel opening 20 is now closed and returned to the initial state.

Claims

1. An automatic door opening and closing device with vertical lifting function, characterized in that: It includes a door panel, a connecting rod, a pneumatic slide or an electric slide, a bearing a, a bearing b, a bearing c, a bearing fixing block, a pneumatic cylinder or an electric cylinder and a connecting plate; The bearing c is connected to the bearing fixing block via a rotating shaft c; Bearing a is directly connected and fixed to bearing c; The air cylinder or electric cylinder and the bearing fixing block are respectively fixed on the upper and lower ends of the connecting plate; The bearing b is connected to the connecting rod via a rotating shaft b; The bearing a is connected to the connecting rod via a rotating shaft a; The movable rod of the air cylinder or electric cylinder is connected to the bearing b; The connecting plate is connected and fixed to a slider arranged on the pneumatic slide or the electric slide; The pneumatic slide or electric slide is fixed on the door frame assembly; The door panel is mounted on the connecting plate; The door panel assembly is provided with a passage opening for materials to enter and exit; The number of bearings c connected to the bearing fixing block is one or more. When the number of bearings c is one, it is arranged on one side of the bearing fixing block. When the number of bearings c is two, they are arranged on both sides of the bearing fixing block. The bearing C and the bearing fixing block are connected in a hinged manner through the rotating shaft C, or in a direct or indirect manner; The pneumatic cylinder or electric cylinder has air inlet a and air inlet b, while the electric cylinder has no air inlet; The movable rod of the air cylinder or electric cylinder has a telescopic function, and the movable rod is in a rod shape or a plate shape; The pneumatic slide or the electric slide has an air inlet c and an air inlet d, while the electric slide has no air inlet; The connecting rod is connected to the bearing a through the rotating shaft a, and the connecting rod is connected to the bearing b through the rotating shaft b.

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