Pressure difference detection integrated block and manufacturing method thereof

Abstract

The present invention provides a pressure difference detection integrated block and a manufacturing method thereof, belonging to the technical field of pressure difference sensors, wherein the pressure difference detection integrated block comprises: an upper electrode; a lower electrode, which is parallel to the upper electrode and spaced apart; an air guide gasket, which is an integral structure, connected between the upper electrode and the lower electrode, and respectively connected to the upper electrode and the lower electrode in a fixed manner to form an integral structure; the pressure difference detection integrated block of the present invention adopts an air guide gasket with an integral structure added between the upper and lower electrodes, and then the upper and lower electrodes and the air guide gasket are fixed as a whole, thereby reducing the assembly accumulation error caused by the pressure difference sensor in the prior art adopting multiple sets of distance adjustment accessories.

Description

Technical Field

[0001] The invention relates to the technical field of differential pressure sensors, and in particular to a differential pressure detection integrated block and a manufacturing method thereof. Background Art

[0002] A differential pressure sensor is a sensor used to measure the difference between two pressures. It is usually composed of upper and lower electrodes, adjustable accessories, fixed accessories and other internal accessories, as well as an external temperature system and detection system.

[0003] During the assembly of the differential pressure sensor, the distance (d value) between the upper and lower electrodes may change due to changes in temperature and assembly factors. Generally, in order to reduce the impact of this change, it is necessary to relieve the compressive stress inside the differential pressure sensor through multiple distance-adjusting accessories (such as washers and gaskets), and set a set of high-precision heating packages outside the differential pressure sensor to control the ambient temperature, thereby reducing the impact of temperature on detection accuracy.

[0004] However, due to the accumulation and embedding of multiple distance adjustment accessories inside the differential pressure sensor, cumulative errors will occur, which will affect the differential pressure detection accuracy of the sensor and increase the complexity of the manufacturing process. Summary of the invention

[0005] Therefore, the technical problem to be solved by the present invention is to overcome the defect of the differential pressure sensor in the prior art that the differential pressure detection accuracy of the sensor is easily affected due to the need to relieve compressive stress through multiple adjustable accessories, thereby providing a differential pressure detection integrated block.

[0006] The present invention also provides a method for manufacturing the differential pressure detection integrated block.

[0007] In order to solve the above technical problems, the present invention provides a pressure difference detection integrated block, comprising:

[0008] Upper electrode;

[0009] A lower electrode, arranged parallel to and spaced apart from the upper electrode;

[0010] The air guide gasket is an integrated structure, connected between the upper electrode and the lower electrode, and is respectively connected to the upper electrode and the lower electrode in a fixed manner to form an integral structure.

[0011] As a preferred solution, the air guide gasket is annular and has an air guide channel for connecting the inner ring and the outer ring of the annular shape.

[0012] As a preferred solution, the air guide channel is arranged on one surface of the air guide gasket.

[0013] As a preferred solution, the air guide channel has a plurality of radial connecting channels evenly arranged along the circumferential direction.

[0014] As a preferred solution, the air guide channel further comprises a circumferential connecting channel arranged along the circumferential direction of the air guide gasket and connecting the plurality of radial connecting channels.

[0015] As a preferred solution, the air guide gasket is made of zero expansion material.

[0016] As a preferred solution, the air guide gasket is one of a metal composite material, an oxide composite material, zero expansion glass or microcrystalline glass.

[0017] As a preferred solution, the air guide gasket is fixedly connected to the upper electrode and the lower electrode by bonding or welding.

[0018] The present invention also provides a method for manufacturing a pressure differential detection integrated block, comprising the following steps:

[0019] Making an air guide gasket, selecting the thickness of the gasket according to the spacing between the upper electrode and the lower electrode, and then setting an air guide channel on the gasket that can connect the inside and the outside;

[0020] Assemble the integrated block, overlap the upper electrode, the gas-conducting gasket and the lower electrode in sequence, and connect the upper electrode, the gas-conducting gasket and the lower electrode into a whole by fixed connection.

[0021] The technical solution of the present invention has the following advantages:

[0022] 1. The differential pressure detection integrated block provided by the present invention adopts an integrated gas-conducting gasket added between the upper and lower electrodes, and then the upper and lower electrodes and the gas-conducting gasket are fixed as a whole, thereby reducing the assembly accumulation error caused by the differential pressure sensor in the prior art using multiple sets of distance-adjusting accessories.

[0023] 2. The differential pressure detection integrated block provided by the present invention and the air guide channel on the air guide gasket can enable the air located in the inner circle of the air guide gasket to be quickly and efficiently discharged through the air guide channel when the differential pressure sensor is evacuated, thereby avoiding the gas from being trapped inside the annular air guide gasket, thereby improving the exhaust efficiency and exhaust effect of the sensor during ultra-high vacuum exhaust.

[0024] 3. The pressure difference detection integrated block provided by the present invention has an air guide gasket made of zero expansion material, which is respectively connected to the upper electrode and the lower electrode into an integrated block by a fixed connection method. This integrated structure can avoid changes in the distance between the electrodes due to different external temperatures or changes in assembly factors. The sensor made according to this integrated block does not need an external heating pack, thereby avoiding the influence of the heating circuit on the detection circuit. Therefore, the introduction of this integrated block will improve the detection accuracy and stability of the detector, save costs and reduce assembly processes.

[0025] 4. The manufacturing method of the differential pressure detection integrated block provided by the present invention can simplify the assembly process of the differential pressure sensor, thereby reducing the errors caused by the assembly; the differential pressure detection integrated block manufactured by this method can greatly reduce the influence of temperature on the measurement signal, thereby eliminating the configuration of the insulation system of the traditional differential pressure sensor and reducing the cost, thereby avoiding the influence of the heating circuit on the detection circuit and improving the accuracy of the detection signal. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 This is the main view of the differential pressure detection integrated block.

[0028] Figure 2 It is a schematic diagram of the three-dimensional structure of the air guide gasket.

[0029] Figure 3 It is a schematic diagram of the three-dimensional structure of the pressure difference detection integrated block.

[0030] Description of reference numerals:

[0031] 1. Upper electrode; 2. Lower electrode; 3. Air guide gasket; 4. Air guide channel; 5. Radial connecting channel; 6. Circumferential connecting channel. DETAILED DESCRIPTION

[0032] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0033] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0034] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0035] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0036] Example 1

[0037] This embodiment provides a specific implementation of a pressure difference detection integrated block, such as Figure 1 As shown, it includes: an upper electrode 1, an air-conducting gasket 3 and a lower electrode 2, wherein the upper electrode 1, the air-conducting gasket 3 and the lower electrode 2 are arranged in sequence in an overlapping manner, wherein the two opposite surfaces of the upper electrode 1 and the lower electrode 2 are arranged parallel to each other, and the air-conducting gasket 3 is used to maintain the interval between the two surfaces, and the distance of the interval is determined by the thickness of the air-conducting gasket 3, and the interval is set according to the actual needs of the differential pressure sensor. The air-conducting gasket 3 of this embodiment is an integrated structure, and compared with multiple sets of distance-adjusting accessories in the prior art, the differential pressure detection integrated block of this embodiment can reduce the assembly accumulation error caused by multiple distance-adjusting accessories.

[0038] like Figure 2As shown, the air guide gasket 3 is an annular structure, and the air guide gasket 3 is provided with an air guide channel 4 for connecting the inner ring and the outer ring of the annular structure. Through the air guide channel 4, the air in the inner ring of the air guide gasket 3 can be quickly and efficiently discharged through the air guide channel 4 when the differential pressure sensor is evacuated, thereby avoiding the gas from being trapped inside the annular air guide gasket 3, thereby improving the exhaust efficiency and exhaust effect of the sensor during ultra-high vacuum exhaust. In order to reduce the manufacturing process steps and difficulty of the air guide gasket 3, the air guide channel 4 is only arranged on one side of the air guide gasket 3. Specifically, the air guide channel 4 has a plurality of radial connecting channels 5 evenly arranged along the circumferential direction, and also has a circumferential connecting channel 6 connecting the plurality of radial connecting channels 5 arranged along the circumferential direction of the air guide gasket 3. The circumferential connecting channel 6 is not only used to connect the plurality of radial connecting channels 5, but also used to guide out the air trapped in the contact part between the air guide gasket 3 and the electrode, so that the vacuuming of the sensor is more thorough. The specifications of the air guide gasket 3 are determined according to actual conditions. Specifically, the thickness of the air guide gasket 3 can be 50-350 microns, the depth of the air guide channel 4 can be 10-100 microns, and the width of the air guide channel 4 can be 0.1-1 mm.

[0039] In terms of material selection, the air guide gasket 3 is made of existing zero-expansion materials, such as metal composite materials, oxide composite materials, zero-expansion glass or microcrystalline glass.

[0040] In terms of connection, the air guide gasket 3 can be connected and fixed as a whole with the upper electrode 1 and the lower electrode 2 by bonding or welding.

[0041] like Figure 3 As shown, the differential pressure detection integrated block is cylindrical as a whole, and the air guide gasket 3 is connected between the upper electrode 1 and the lower electrode 2, and is respectively connected to the upper electrode 1 and the lower electrode 2 in a fixed manner to form an integral structure.

[0042] Example 2

[0043] This embodiment provides a method for manufacturing a pressure differential detection integrated block, comprising the following steps:

[0044] Step 1: Select a gasket. According to the spacing between the upper electrode 1 and the lower electrode 2, select a gasket with a suitable thickness that can be used to maintain the spacing between the upper electrode 1 and the lower electrode 2. The material of the gasket is the zero expansion material described in Example 1.

[0045] Step 2: An air-guiding channel 4 is provided on the gasket to connect the inside and the outside. Specifically, the air-guiding channel 4 described in Example 1 can be provided on one side of the gasket by laser, electron beam, chemical etching or electrochemical etching. In addition, as an alternative embodiment, the air-guiding channel 4 can also be provided by other conventional methods in the prior art.

[0046] Step 3: Assemble the integrated block, overlap the upper electrode 1, the gas-conducting gasket 3 and the lower electrode 2 in sequence, and connect the upper electrode 1, the gas-conducting gasket 3 and the lower electrode 2 into a whole by fixing.

[0047] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention.

Claims

1. A pressure differential detection integrated block, characterized in that: include: Upper electrode (1); A lower electrode (2) is arranged parallel to and spaced apart from the upper electrode (1); The air-conducting gasket (3) is an integral structure, connected between the upper electrode (1) and the lower electrode (2), and respectively connected to the upper electrode (1) and the lower electrode (2) in a fixed manner to form an integral structure. The air-conducting gasket (3) is annular, and has an air-conducting channel (4) for connecting the inner ring and the outer ring of the annular shape.

2. The differential pressure detection integrated block according to claim 1, characterized in that: The air guide channel (4) is arranged on one surface of the air guide gasket (3).

3. The differential pressure detection integrated block according to claim 2, characterized in that: The air guide channel (4) has a plurality of radial communication channels (5) uniformly arranged along the circumferential direction.

4. The differential pressure detection integrated block according to claim 3, characterized in that: The air guide channel (4) further comprises a circumferential communication channel (6) arranged along the circumferential direction of the air guide gasket (3) and communicating with the plurality of radial communication channels (5).

5. The differential pressure detection integrated block according to any one of claims 1 to 4, characterized in that: The air guide gasket (3) is made of zero expansion material.

6. The differential pressure detection integrated block according to claim 5, characterized in that: The air guide gasket (3) is one of a metal composite material, an oxide composite material, zero expansion glass or microcrystalline glass.

7. The differential pressure detection integrated block according to any one of claims 1 to 4, characterized in that: The air guide gasket (3) is fixedly connected to the upper electrode (1) and the lower electrode (2) by bonding or welding.

8. A method for manufacturing a pressure differential detection integrated block, characterized in that: The following steps are involved: A gas-conducting gasket (3) is manufactured, the thickness of the gasket is selected according to the spacing between the upper electrode (1) and the lower electrode (2), and then a gas-conducting channel (4) that can connect the inside and the outside is provided on the gasket; The integrated block is assembled by sequentially stacking the upper electrode (1), the gas-conducting gasket (3) and the lower electrode (2), and connecting the upper electrode (1), the gas-conducting gasket (3) and the lower electrode (2) into a whole through a fixed connection.

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