A vibration isolation buffer device for large-size silicon single crystal landing and implementation method thereof

Abstract

The present invention relates to a vibration isolation and buffering device for landing a large-sized silicon single crystal and an implementation method thereof. The device comprises an upper shell, a flexible force-bearing spring, an outer shell, a spring under a vibration transmission rod, a vibration isolator, an elastic member, and a buffer, wherein the vibration isolator comprises a vibration receiving rod, a torsion spring, a vibration transmission rod, and a vibration output rod. The buffer is composed of a coil and a magnet, and a high-power vibration transmission rod. The magnet of the buffer is used to cut the movement of magnetic flux lines to play a damping and buffering role to reduce vibration. The torsion spring of the vibration isolator and the spring under the vibration transmission rod play a vibration isolation effect with high sensitivity to slight vibrations and fast response speed. The effect is that a method of increasing the damping amount of the system by using a magnet-coil is used for the first time, thereby achieving the goal of quickly weakening large vibrations and reducing the potential hidden danger of crystal rods being damaged by vibration. When the amplitude becomes smaller or the frequency of the vibration source becomes lower, the vibration isolator not only protects the internal structure but also improves the vibration isolation performance.

Description

Technical Field

[0001] The invention relates to a vibration isolation and buffering device for landing, and in particular to a vibration isolation and buffering device for landing a large-size silicon single crystal and a realization method thereof. Background Art

[0002] With the advancement of science and technology, the production of large-size silicon single crystals has become more and more common. At the same time, the weight of silicon single crystals has also become heavier, reaching more than 200 kilograms. Before the pulled silicon single crystal falls to the ground, the surface is hot and the staff cannot touch it with their hands. At this time, it is suspended in the air by the seed crystal. When cutting the seed crystal, the bottom of the single crystal may be hit by the ground and the crystal may break if you are not careful. More seriously, it may pose a threat to the safety of the staff. At present, the solutions to this problem at home and abroad are still immature. Summary of the invention

[0003] In order to reduce the risk of single crystal breakage and reduce potential safety hazards to workers, the present invention provides a vibration isolation and buffering device for large-sized silicon single crystals falling to the ground and an implementation method. The specific technical scheme is that a vibration isolation and buffering device for large-sized silicon single crystals falling to the ground includes an upper shell, a flexible force spring, an outer shell, a lower spring of a vibration transmission rod, a vibration isolator, an elastic member, and a buffer, wherein the vibration isolator includes a vibration receiving rod, a torsion spring, a vibration transmission rod, an articulated connection structure, and a vibration transmission rod. The hammer end of the vibration transmission rod and the anvil end of the vibration receiving rod are connected together by a torsion spring. The end of the dynamic transmission rod is connected to the vibration transmission rod by an articulated connection structure, characterized in that: the buffer is composed of a loop closed coil and a magnet, and a high-power vibration transmission rod, one end of the high-power vibration transmission rod has a thread and the other end is fixed with a magnetic body, the high-power vibration transmission rod is screwed to the center of the upper end surface of the upper shell (1), the elastic member is an annular body with a center hole, and four uniformly symmetrical through holes are arranged around the center hole, the four uniformly symmetrical through holes on the bottom end surface of the elastic member have grooves identical to those on the upper end surface of the vibration receiving rod, and the four Young's moduli are greater than the flexibility of the annular elastic member. The flexible force spring is higher than the thickness of the elastic member, is placed in four evenly symmetrical through holes and fixed to the upper end surface of the upper shell. The four vibration isolators are placed back to back in pairs, and their four vibration receiving rods are placed in four evenly symmetrical grooves and pressed tightly on the force spring. The elastic member is placed in the upper shell. The flexible force spring of the vibration isolator, the built-in spring of the articulated connection structure, the torsion spring, and the lower spring of the vibration transmission rod are all in a compressed state when not working to increase the compactness between the internal parts of the vibration isolator. One end of the lower spring of the vibration transmission rod is fixed on the lower side of the middle part of the vibration transmission rod of the vibration isolator. The other end of the lower spring of the transfer rod is fixed in the outer shell body, the vibration transmission rod of the vibration isolator is placed on the ground, the inner diameter of the outer shell body is larger than the outer diameter of the upper shell body, a boss with an inner hole is provided at the center of the bottom surface of the outer shell body, the loop closing coil is fixed in the inner hole of the boss, the inner diameter of the loop closing coil is larger than the outer diameter of the magnet, when the strong vibration transmission rod drives the magnet to move downward, the magnet can penetrate into the loop closing coil, the upper shell body is placed in the outer shell body, the upper shell body can slide up and down along the track in the outer shell body to form a dynamic fit, and since the diameter of the magnet is larger than the diameter of the hole on the boss, it will not pop out of the outer shell body.

[0004] The Young's modulus of the flexible force-bearing spring is greater than that of the annular elastic member.

[0005] The implementation method is that the exciting force of the large-size silicon single crystal is added to the upper shell. Since the external exciting force is large, the frequency or amplitude of the exciting force is large. At this time, the exciting force is transmitted to the four vibration isolators by the flexible force spring. The four vibration isolators are compressed by a large deformation amount. The connection between the vibration receiving rod and the vibration transmission rod will resist the inner contour of the vibration transmission rod, forcing the vibration isolator to move up and down as a whole. The elastic part is compressed, driving the magnet into the circular loop closed coil. According to Lenz's damping law, when the magnet cuts the magnetic flux lines in the loop closed coil, it will play a damping and buffering role. In this way, larger vibrations will be eliminated in a shorter time. When the vibration is reduced to a certain amount, the external exciting force becomes smaller, and the flexible force spring transmits the exciting force to the vibration receiving rod of the vibration isolator. The vibration receiving rod and the vibration transmission rod of the vibration isolator rotate with the torsion spring as the axis. The spring under the vibration transmission rod is compressed. Since the structure of the vibration isolator can amplify the vibration signal, the vibration capacity is rapidly attenuated under the simultaneous action of the torsion spring, the spring under the vibration transmission rod and the articulated connection structure. The vibration isolator can play a vibration-isolating effect with high sensitivity and fast response speed for slight vibrations. This working mode can not only protect the components inside the system, but also play a good role in protecting the crystal rod.

[0006] The technical effect of the present invention is that a flexible force-bearing spring with a Young's modulus greater than that of an elastic member is used as a vibration transmission medium. When the frequency or amplitude of the exciting force is different, the system can select whether to protect the vibration isolator start buffer, which not only increases the service life of the vibration isolator, but also protects the safety of the crystal rod.

[0007] At the same time, a special structure of the vibration isolator was proposed for the first time. When the amplitude of the vibration isolation system is large or the frequency of the vibration source is high, the connection between the vibration receiving rod and the vibration transmission rod will press against the inner contour of the vibration transmission rod, forcing the vibration isolator to move up and down as a whole. Under the action of the magnet and coil of the buffer, the vibration energy inside the system can be quickly eliminated. When the amplitude becomes smaller or the frequency of the vibration source becomes lower, it is converted into vibration reduction of the vibration isolator. This design can not only protect the internal structure, but also improve the vibration isolation performance. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 It is a schematic diagram of the structure of the present invention;

[0009] Figure 2 It is a schematic diagram of the vibration isolator structure of the present invention. DETAILED DESCRIPTION

[0010] like Figure 1 , Figure 2As shown, a vibration isolation and buffering device for falling large-sized silicon single crystals includes an upper shell 1, a flexible force-bearing spring 2, an outer shell 3, a lower spring 4 of a vibration transmission rod, a vibration isolator 5, an elastic member 6, and a buffer 7, wherein the vibration isolator 5 includes a vibration receiving rod 5-1, a torsion spring 5-2, a vibration transmission rod 5-3, an articulated connection structure 5-4, and a vibration transmission rod 5-5. The malleus end of the vibration transmission rod 5-3 and the incus end of the vibration receiving rod 5-1 are connected together by a torsion spring 5-2, and the end of the vibration transmission rod 5-3 and the vibration transmission rod 5-5 are connected together by an articulated connection structure 5-4.

[0011] The buffer 7 is composed of a loop closed coil 7-1, a magnet 7-2, and a high-power vibration transmission rod 7-3. The high-power vibration transmission rod 7-3 has a thread at one end and a magnetic body 7-2 is fixed at the other end. The high-power vibration transmission rod 7-3 is screwed to the center of the upper end surface of the upper shell 1. The elastic member 6 is an annular body with a center hole. There are four uniformly symmetrical through holes around the center hole. The four uniformly symmetrical through holes on the bottom end surface of the elastic member 6 have the same grooves as the upper end surface of the vibration receiving rod 7-3. The four Young's modulus is greater than the flexibility of the annular elastic member 6. The force spring 2 is thicker than the elastic member 6, is placed in four evenly symmetrical through holes and fixed on the upper end surface of the upper shell 1. The four vibration isolators 5 are placed back to back in pairs, and their four vibration receiving rods 5-1 are placed in four evenly symmetrical grooves and pressed tightly on the force spring 2. The elastic member 6 is placed in the upper shell 1. The flexible force spring 2 of the vibration isolator, the built-in spring of the articulated connection structure 5-4, the torsion spring 5-2, and the spring 4 under the vibration transmission rod are all in a compressed state when not working to increase the compactness between the internal parts of the vibration isolator 5.

[0012] One end of the vibration transmission rod lower spring 4 is fixed to the lower side of the middle part of the vibration transmission rod 5-3 of the vibration isolator 5, and the other end of the vibration transmission rod lower spring 4 is fixed in the shell 3, and the vibration transmission rod 5-5 of the vibration isolator 5 is placed on the ground.

[0013] The inner diameter of the outer shell 3 is larger than the outer diameter of the upper shell 1. A boss 3-2 with an inner hole is provided at the center of the inner bottom surface of the outer shell 3. The loop closing coil 7-1 is fixed in the inner hole of the boss 3-2. The inner diameter of the loop closing coil 7-1 is larger than the outer diameter of the magnet 7-2. When the strong vibration transmission rod 7-3 drives the magnet 7-2 to move downward, the magnet 7-2 can penetrate into the loop closing coil 7-1. The upper shell 1 is partially placed in the outer shell 3. The upper shell 1 can slide up and down along the track in the outer shell 3 to form a dynamic fit. Since the diameter of the magnet 7-2 is larger than the diameter of the hole on the boss 3-2, it will not pop out of the outer shell (3).

[0014] The Young's modulus of the flexible force-bearing spring 2 is greater than that of the annular elastic member 6 .

[0015] The implementation method is that the excitation force of the large-sized silicon single crystal is applied to the upper shell 1. Since the external excitation force is large, the frequency or amplitude of the excitation force is large. At this time, the excitation force is transmitted to the four vibration isolators 5 by the flexible force-bearing spring 2. The four vibration isolators 5 are compressed by a large deformation amount. The connection between the vibration receiving rod 5-1 and the vibration transmission rod 5-3 will resist the inner contour of the vibration transmission rod 5-3, forcing the vibration isolator 5 to move up and down as a whole. The elastic member 6 is compressed, driving the magnet 7-2 into the circular loop closed coil 7-1. According to Lenz's damping law, when the magnet cuts the magnetic flux lines in the loop closed coil 7-1, it will play a damping and buffering role. In this way, larger vibrations will be eliminated in a shorter time. When the vibration is reduced to a certain amount, the external excitation force becomes smaller, and the flexible force-bearing spring 2 transmits the excitation force to the vibration receiving rod 5-1 of the vibration isolator 5. The vibration receiving rod 5-1 and the vibration transmission rod 5-3 of the vibration isolator 5 rotate with the torsion spring 5-2 as the axis. The spring 4 under the vibration transmission rod is compressed. Since the structure of the vibration isolator can amplify the vibration signal, the vibration capacity is rapidly attenuated under the simultaneous action of the torsion spring 5-2, the spring 4 under the vibration transmission rod and the articulated connection structure 5-4. The vibration isolator 5 can have a high sensitivity and fast response speed to slight vibrations. The vibration isolation effect. This working mode can not only protect the internal components of the system, but also play a good role in protecting the crystal rod.

[0016] in,

[0017] Function of upper shell 1: The impact force of the crystal rod acts on the upper shell 1;

[0018] The function of the spring 4 under the vibration transmission rod is to attenuate the vibration energy inside the vibration isolator;

[0019] The flexible force spring 2 functions to transmit the exciting force received by the upper shell to the vibration isolation system;

[0020] The function of the elastic member 6 is to transmit the exciting force received by the upper shell to the vibration isolation system;

[0021] The function of the tension spring 4 under the vibration transmission rod is to quickly reset the vibration isolator;

[0022] The elastic member 6 functions to transfer the kinetic energy received by the upper housing 1 to the vibration receiving rod;

[0023] The outer shell 3 functions as follows: supporting the vibration isolator and the buffer;

[0024] Vibration isolator 5 function: protect internal components and extend service life;

[0025] Function of buffer 7: Increase system damping and quickly eliminate kinetic energy.

Claims

1. A vibration isolation and buffering device for a large-sized silicon single crystal falling to the ground, comprising an upper shell (1), a flexible force-bearing spring (2), an outer shell (3), a lower spring (4) of a vibration transmission rod, a vibration isolator (5), an elastic member (6), and a buffer (7), wherein the vibration isolator (5) comprises a vibration receiving rod (5-1), a torsion spring (5-2), a vibration transmission rod (5-3), an articulated connection structure (5-4), and a vibration transmission rod (5-5), wherein the malleus end of the vibration transmission rod (5-3) and the anvil end of the vibration receiving rod (5-1) are connected together by the torsion spring (5-2), and the end of the vibration transmission rod (5-3) and the vibration transmission rod (5-5) are connected together by the articulated connection structure (5-4), characterized in that: The buffer (7) is composed of a loop closed coil (7-1), a magnet (7-2), and a high-power vibration transmission rod (7-3). The high-power vibration transmission rod (7-3) has a thread at one end and a magnet (7-2) at the other end. The high-power vibration transmission rod (7-3) is screwed to the center of the upper end surface of the upper shell (1). The elastic member (6) is an annular body with a center hole, and four uniformly symmetrical through holes are arranged around the center hole. The four uniformly symmetrical through holes on the bottom end surface of the elastic member (6) have grooves that are the same as those on the upper end surface of the vibration receiving rod (5-1). The four The flexible force-bearing springs (2) are all thicker than the elastic member (6), are placed in four evenly symmetrical through holes and fixed to the upper end surface of the upper shell (1), the four vibration isolators (5) are placed in pairs opposite to each other, and their four vibration receiving rods (5-1) are placed in four evenly symmetrical grooves and pressed tightly against the flexible force-bearing springs (2), the elastic member (6) is placed in the upper shell (1), and the flexible force-bearing springs (2) of the vibration isolators, the built-in springs of the articulated connection structure (5-4), the torsion springs (5-2), and the lower springs (4) of the vibration transmission rods are all in a compressed state when not working, so as to prevent the vibration isolators from being damaged. The compactness of the internal parts of the vibration isolator (5) is increased. One end of the spring (4) under the vibration transmission rod is fixed to the lower side of the middle part of the vibration transmission rod (5-3) of the vibration isolator (5). The other end of the spring (4) under the vibration transmission rod is fixed in the outer shell (3). The vibration transmission rod (5-5) of the vibration isolator (5) is placed on the ground. The inner diameter of the outer shell (3) is larger than the outer diameter of the upper shell (1). A boss (3-2) with an inner hole is provided at the center of the inner bottom surface of the outer shell (3). The loop closing coil (7-1) is fixed in the inner hole of the boss (3-2). The loop closing The inner diameter of the coil (7-1) is larger than the outer diameter of the magnet (7-2). When the strong vibration transmission rod (7-3) drives the magnet (7-2) to move downward, the magnet (7-2) can penetrate into the loop closed coil (7-1). The upper shell (1) is partially placed in the outer shell (3). The upper shell (1) can slide up and down along the track in the outer shell (3) to form a dynamic fit. Since the diameter of the magnet (7-2) is larger than the diameter of the hole on the boss (3-2), it will not pop out of the outer shell (3); the Young's modulus of the flexible force-bearing spring (2) is larger than the annular elastic member (6).

2. A method for implementing the vibration isolation and buffering device for falling large-size silicon single crystals according to claim 1, characterized in that: The implementation method is that the excitation force of the large-sized silicon single crystal is applied to the upper shell (1). Since the external excitation force is large, the frequency or amplitude of the excitation force is large. At this time, the excitation force is transmitted to the four vibration isolators (5) by the flexible force-bearing spring (2). The four vibration isolators (5) are compressed to a large deformation amount. The connection between the vibration receiving rod (5-1) and the vibration transmission rod (5-3) will press against the inner contour of the vibration transmission rod (5-3), forcing the vibration isolators (5) to move up and down as a whole. The elastic member (6) is compressed, driving the magnet (7-2) into the circular loop closed coil (7-1). According to Lenz's damping law, when the magnet cuts the magnetic flux line in the loop closed coil (7-1), it will play a damping and buffering role. In this way, the larger vibration will be eliminated in a shorter time. When the vibration is reduced to a certain amount, the external exciting force becomes smaller, and the flexible force-bearing spring (2) transmits the exciting force to the vibration receiving rod (5-1) of the vibration isolator (5). The vibration receiving rod (5-1) and the vibration transmission rod (5-3) of the vibration isolator (5) rotate with the torsion spring (5-2) as the axis; the spring (4) under the vibration transmission rod is compressed. Since the structure of the vibration isolator can amplify the vibration signal, the vibration capacity is rapidly attenuated under the simultaneous action of the torsion spring (5-2), the spring (4) under the vibration transmission rod and the articulated connection structure (5-4). The vibration isolator (5) can play a vibration-damping effect with high sensitivity and fast response speed for slight vibration. This working mode can not only protect the components inside the system, but also play a good role in protecting the crystal rod.

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