Moving device and operating method of multi-modal composite drive of basin frame type stator

Abstract

The present invention discloses a mobile device and operating method for a multi-modal composite drive system with a basin-shaped stator. The mobile device comprises a stator assembly, a slide assembly, and a base assembly. The slide assembly connects to the stator assembly to form a bidirectional moving pair, while the stator assembly connects to the base assembly, and the slide assembly connects to the base assembly to form a bidirectional rolling-sliding pair. The present invention utilizes a piezoelectric drive system to propel the slide, resulting in high-precision motion. The mobile device utilizes multiple drive legs to propel the slide, thereby exponentially increasing the platform's output density and motion speed, while also ensuring more stable operation.

Description

Technical Field

[0001] The present invention relates to the fields of piezoelectric precision drive technology and piezoelectric motor technology, and in particular to a moving device and an operating method for a multi-modal composite drive of a basin-frame type stator. Background Art

[0002] Planar motors are a new type of electric motor that can directly convert electrical energy into planar motion. They are a core technology for high-integration IC manufacturing and precision and ultra-precision machining. Unlike traditional two-dimensional positioning stages, planar motors achieve their motion trajectory by directly outputting planar positioning motion through ingenious motor design, rather than using two perpendicular guideways to synthesize motion directions. Compared to traditional two-dimensional positioning stages, planar motors eliminate intermediate conversion devices such as screw-nut pairs, resulting in high output density, low heat dissipation, and high precision. Furthermore, due to the integration of the controlled object and the planar motor, they offer advantages such as fast response, high sensitivity, excellent tracking, and a compact size. Based on the principle of electrical-to-mechanical energy conversion, planar motors can be divided into two categories: electromagnetic planar motors and piezoelectric planar motors. The former utilizes electromagnetic induction to convert electrical energy into planar motion-state dynamics, while the latter utilizes the inverse piezoelectric effect to convert electrical energy into vibration-state mechanical energy. Currently, electromagnetic planar motor technology is relatively mature, with the introduction of motors based on various electromagnetic principles, including variable reluctance, induction, and permanent magnet motors. However, due to the nonlinearity of electromagnetic coupling and the end-effects of the electromagnetic windings, electromagnetic planar motors generally suffer from a range of issues, including severe overheating, large power fluctuations, limited motion accuracy, poor controllability, insufficiency in stability, and complex structures.

[0003] A piezoelectric planar motor (mobile device) utilizes the unique inverse piezoelectric properties of piezoelectric materials to induce regular vibrations in the stator within the motor, and then converts electrical energy into planar motion through the friction between the stator and the mover. Because it breaks through the framework of electromagnetic induction in principle, compared with electromagnetic planar motors, it has the characteristics of simple structure, diverse types, small and light weight, fast response, low noise, self-locking when power is off, and not affected by magnetic field interference. Therefore, it has broad application prospects in biomedical operations, high-precision IC etching, fiber optic docking, fine chemicals, micro-operations and other fields. For this reason, piezoelectric planar motors constitute an important aspect of ultrasonic motor research and have become the main research hotspot in this field in recent times, and people have done a lot of work for this. For example, Xiao Zhiyong proposed a piezoelectric planar motor based on H-type stator drive. The motor uses the three-phase specific modes such as the out-of-plane second-order antisymmetric bending vibration mode of the H-type configuration and the two-way in-plane first-order antisymmetric longitudinal vibration mode as the working mode to drive the mover to perform planar motion; Lingpu introduced a planar motor based on a cross-stator piezoelectric vibrator and explored the dynamic characteristics of the motor; Jiang Tao proposed a piezoelectric planar motor driven by a double-cross coupling configuration resonant drive and explained its operating principle; Yu Jiu proposed a new principle and dynamic structure of a planar motor driven by a toothed vibrator and verified the effectiveness of the motor. However, despite this, the current performance of piezoelectric planar motors is still far from sufficient for widespread engineering applications. On the one hand, piezoelectric planar motors still suffer from common problems such as low power, low efficiency, and unstable operation. On the other hand, their extremely limited structural options currently make them unable to meet the diverse demands of various application fields. Therefore, the development of more high-performance piezoelectric planar motor principles and their dynamic structures has become a top priority for piezoelectric planar motor research. The piezoelectric motion device based on a basket-shaped stator drive proposed in this paper is an innovation adapted to this background. This device is essentially a high-performance piezoelectric planar motor. Summary of the Invention

[0004] The problem to be solved by the present invention is to provide a moving device based on a basin-shaped stator, which drives the slide to move based on a piezoelectric drive method, so that the slide has high-precision movement characteristics. The moving device uses multiple drive feet to drive the slide, so it can exponentially increase the platform's output density and movement speed and make its slide operation more stable.

[0005] The technical solution provided by the present invention to solve the above problems is: a mobile device with a multi-modal composite drive of a basin-frame type stator, including a stator assembly, a slide assembly, and a base assembly; the slide assembly is connected to the stator assembly and constitutes a moving pair for two-way motion, the stator assembly is connected to the base assembly, and the slide assembly is connected to the base assembly and constitutes a rolling-sliding moving pair for two-way motion.

[0006] The stator assembly includes a stator base, a piezoelectric ceramic sheet group and a driving foot. The stator base includes four square rods and a cross block, each square rod is connected to the cross block. The piezoelectric ceramic sheet group consists of 32 piezoelectric ceramics, which are evenly distributed on the four square rods. The driving feet are all spherical protrusions and are respectively installed on the upper end of each square rod.

[0007] Preferably, the slide assembly includes a slide and a slide motion guide rail, the slide is connected to the slide motion guide rail and forms a rolling pair. The slide motion guide rail is composed of a cover plate, a ball bearing and a ball support plate, four long grooves are made on the cover plate, the ball bearings are placed in the long grooves and covered by the ball support plate, and the ball support plate is adhered to the cover plate.

[0008] Preferably, the base assembly includes a bottom plate, a lower plate frame, a middle plate, an upper plate frame, a circular column, and a rubber pad. The lower plate frame is connected to the bottom plate, the middle plate is connected to the lower plate frame, the upper plate frame is connected to the middle plate, the circular column is fixed on the bottom plate, the rubber pad is placed on the circular column, and the stator assembly is connected to the circular column with screws via the rubber pad.

[0009] Preferably, the stator base has a basin frame shape.

[0010] The multi-mode includes three-phase working modes, which respectively specify the antisymmetric longitudinal stretching vibration mode between the front and rear square rods and the left and right square rods of the sub-assembly, the same "3"-shaped bending vibration mode within the left and right square rod surfaces, and the same "3"-shaped bending vibration mode within the front and rear square rod surfaces.

[0011] The antisymmetric longitudinal telescopic vibration mode between the front and rear square rods and the left and right square rods refers to the extension or shortening of the two ends of the rod body along the z-axis direction, wherein the vibration states of the front and rear square rods are completely consistent and both extend and contract synchronously along the z-axis direction, and the vibration states of the left and right square rods are also completely identical and both extend and contract along the z-axis direction. At the same time, the vibration states between the front and rear square rods and the left and right square rods are just opposite, so that the front and rear square rods and the left and right square rods are in an alternating telescopic state, so that the front and rear square rods and the driving feet on the left and right square rods alternately contact and separate from the slide; the same-type "3"-shaped bending vibration mode in the plane of the left and right square rods refers to the upper and lower rod bodies of the left square rod based on the cross block bending along the x-axis direction at the same time, and the upper and lower rod bodies of the right square rod based on the cross block also bending along the y-axis direction, and the bending shapes of the left and right square rods are the same and are both "3"-shaped, so that the driving feet on the left and right square rods generate thrust on the slide along the x-axis direction. The same "3"-shaped bending vibration mode in the plane of the front and rear square rods means that the upper rod body and the lower rod body of the front square rod based on the cross block are bent simultaneously along the y-axis direction, and the upper rod body and the lower rod body of the rear square rod based on the cross block are also bent along the y-axis direction, and the bending shape of the front and rear square rods is the same and is in the shape of a "3", so that the driving feet on the front and rear square rods generate thrust on the slide along the y-axis direction.

[0012] A method for operating a multi-modal composite drive mobile device for a basin-frame stator is as follows: a three-phase AC power simple harmonic signal with a certain amplitude and a frequency close to the three-phase operating modal frequency is applied to each of the three groups of piezoelectric ceramic plates within the piezoelectric ceramic plate group on the stator assembly, and the power signal applied to the longitudinal vibration excitation ceramic group is maintained at a 90° phase difference from the power signals applied to the front and rear square rod bending vibration excitation ceramic groups, and the left and right square rod bending vibration excitation ceramic groups, thereby stimulating the three-phase operating modal resonance of the stator, thereby causing the driving feet on the left and right square rods of the stator to move along elliptical trajectories in the xOz plane, and simultaneously causing the driving feet on the front and rear square rods of the stator to move along elliptical trajectories in the yOz plane; The stator base utilizes the elliptical motion of the driving feet on the left and right square rods along the xOz plane and the elliptical trajectory of the driving feet on the front and rear square rods along the yOz plane, and uses the friction between the driving feet and the slide to push the slide to slide along the x and y directions respectively, so as to realize the movement function of the piezoelectric moving device; if the lead-lag phase relationship between the electric power signals input to the longitudinal vibration excitation ceramic group and the electric power signals input to the left and right square rod bending vibration excitation ceramic group is reversed, the slide will move in the opposite direction of the x-axis; similarly, if the lead-lag phase relationship between the electric power signals input to the longitudinal vibration excitation ceramic group and the electric power signals input to the front and rear square rod bending vibration excitation ceramic group is reversed, the slide will move in the opposite direction of the y-axis.

[0013] Compared with the prior art, the advantages of the present invention are: (1) The present invention adopts a basin-frame piezoelectric stator to drive the slide to perform two-way planar motion, which can realize the precise motion and positioning of the slide, and enable the slide to obtain micron-level or even higher repeatable positioning accuracy along the x-direction and y-direction; (2) In the piezoelectric moving device of the present invention, the slide is directly driven by the basin-frame piezoelectric vibrator, so that the transmission components between the driving part and the actuator can be omitted, which greatly improves the dynamic characteristics of the moving device and makes the slide have faster response speed and operation accuracy; (3) The piezoelectric moving device of the present invention adopts multiple driving feet to alternately push the two sides of the slide The driving mode of the multi-degree-of-freedom movement is a driving mode of the multi-driving foot combined driving mode, which can multiply the output thrust and speed of the slide and make the operation of the platform more stable; (4) The piezoelectric moving device of the present invention uses the longitudinal vibration of the basin-shaped stator to realize the dynamic contact and separation of the driving foot and the slide. This operation mode is conducive to increasing the dynamic positive pressure and friction between the driving foot and the slide, thereby helping to improve the power output of the piezoelectric moving device; (5) The piezoelectric moving device of the present invention has broad application prospects in the fields of precision and ultra-precision machining, large-integration IC manufacturing, and precision driving of micro-servo actuators. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The drawings described herein are used to provide further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute improper limitations on the present invention.

[0015] Figure 1 The present invention is a three-dimensional assembly structure of a piezoelectric moving device based on a basin-frame configuration;

[0016] Figure 2 This is a schematic structural diagram of a basin-shaped stator assembly of a piezoelectric moving device of the present invention;

[0017] Figure 3 Schematic diagram of the structure of the slide assembly in the piezoelectric moving device of the present invention;

[0018] Figure 4 Schematic diagram of the structure of the base assembly in the piezoelectric moving device of the present invention;

[0019] Figure 5 is the working mode of the piezoelectric moving device of the present invention, wherein Figure 5 a is the schematic diagram of the antisymmetric longitudinal telescopic vibration mode between the front and rear square rods and the left and right square rods. Figure 5 b is the diagram of the same “3”-shaped bending vibration mode of the left and right square rods. Figure 5 c is the schematic diagram of the same “3”-shaped bending vibration mode of the front and rear square rods;

[0020] Figure 6 is the piezoelectric ceramic polarization and power supply configuration of the stator assembly, where Figure 6 a is a schematic diagram of the piezoelectric ceramic polarization and power supply configuration of the left and right square rods. Figure 6 b is a schematic diagram of the piezoelectric ceramic polarization and power supply configuration of the front and rear square rods;

[0021] Figure 7 This is a schematic diagram of the first step of the stator assembly pushing the slide forward during its vibration cycle, where: Figure 7 a is the driving state diagram in the zOx plane, Figure 7 b is a schematic diagram of the driving state in the zOy plane;

[0022] Figure 8 The second step driving diagram of the stator assembly pushing the slide to move forward during its vibration cycle is shown in FIG. Figure 8 a is the driving state diagram in the zOx plane, Figure 8 b is a schematic diagram of the driving state in the zOy plane;

[0023] Figure 9 The third step driving diagram of the stator assembly pushing the slide to move forward during its vibration cycle is shown in FIG. Figure 9 a is the driving state diagram in the zOx plane, Figure 9 b is a schematic diagram of the driving state in the zOy plane;

[0024] Figure 10 This is a schematic diagram of the fourth step of driving the stator assembly to move the slide forward during its vibration cycle, wherein: Figure 10 a is the driving state diagram in the zOx plane, Figure 10 b is a schematic diagram of the driving state in the zOy plane;

[0025] In the figure: 1- stator assembly, 11- stator base, 111- square rod, 112- cross block, 12- piezoelectric ceramic sheet group, 13- driving foot; 2- slide assembly, 21- slide, 22- slide motion guide rail, 221- cover plate, 222- ball bearing, 223- ball support plate; 3- machine base assembly, 31- bottom plate, 32- lower plate frame, 33- middle plate, 34- upper plate frame, 35- round column, 36- rubber pad, 37- mounting screw. DETAILED DESCRIPTION

[0026] The following will describe the embodiments of the present invention in detail with reference to the accompanying drawings and examples, so that the implementation process of how the present invention applies technical means to solve technical problems and achieve technical effects can be fully understood and implemented accordingly.

[0027] like Figures 1 to 4The piezoelectric moving device of the present invention is composed of a stator assembly 1, a slide assembly 2, and a base assembly 3. The slide assembly 2 is connected to the stator assembly 1, and the two constitute a moving pair that can move along two degrees of freedom; the stator assembly 1 is connected to the base assembly 3; the slide assembly 2 is connected to the base assembly 3, and they constitute a rolling-sliding pair that can move along two degrees of freedom.

[0028] like Figure 2 As shown, the stator assembly 1 is composed of a stator base 11, a piezoelectric ceramic sheet group 12, and a driving foot 13. The stator base 11 has a basin frame structure, consisting of four square rods 111 and a cross block 112, and the four square rods 111 are connected to the ends of the cross block 112. A slender hole is made at the center of each square rod 111, a square groove is made at the connection between the square rod 111 and the cross block 112, and a through hole is also drilled at the center of the cross block 112. The piezoelectric ceramic sheet group 12 is composed of 32 piezoelectric ceramics, which are divided into three groups. Among them, the 8 ceramic sheets pasted on the front square rod and the rear square rod near the end position constitute the front and rear square rod bending vibration excitation ceramic group 121, the 8 ceramic sheets pasted on the left square rod and the right square rod near the end position constitute the left and right square rod bending vibration excitation ceramic group 122, and the 16 ceramic sheets near the middle position on each rod constitute the longitudinal vibration excitation ceramic group 123. The driving foot 13 includes four driving feet, each driving foot is a spherical protrusion and is respectively installed on the upper end surface of each square rod 111.

[0029] like Figure 3 As shown, the slide assembly 2 consists of a slide 21 and a planar motion guide rail 22. The slide 21 is connected to the planar motion guide rail 22, and a rolling-sliding motion pair is formed therebetween. The slide 21 has a square plate structure. The planar motion guide rail 22 is composed of a cover plate 221, a ball 222 and a ball supporting plate 223. Four long grooves are provided on the cover plate 221. The ball 222 is placed in these grooves and covered by the ball supporting plate 223, and part of the surface of the ball 222 is exposed. The ball supporting plate 223 is glued to the surface of the cover plate 221 with strong glue.

[0030] like Figure 4 As shown, the base assembly 3 consists of a bottom plate 31, a lower plate frame 32, a middle plate 33, an upper plate frame 34, a circular column 35, and a rubber pad 36. The lower plate frame 32 is connected to the bottom plate 31 by screws, the middle plate 33 is connected to the lower plate frame 32, and the upper plate frame 34 is connected to the middle plate 33. The circular column 35 is fixed on the bottom plate 31 by screws, and the rubber pad 36 is placed on the circular column 35. The stator assembly 1 is fastened to the circular column 35 via the rubber pad 36 by mounting screws 37, see Figure 1 .

[0031] like Figure 5As shown, the piezoelectric motion device of the present invention selects the three-phase vibration modes of the basin-shaped elastic structure stator as the operating modes to drive the operation of the slide 21. These modes are the antisymmetric longitudinal expansion mode of the stator base, the same "3"-shaped bending vibration mode in the plane of the left and right square rods, and the same "3"-shaped bending vibration mode of the front and rear square rods. When the front and rear square rods of the stator base vibrate in the antisymmetric longitudinal expansion mode with the left and right square rods, the front and rear rods alternately expand and contract with the left and right rods. When the stator base vibrates in the same "3"-shaped bending vibration mode in the plane of the left and right square rods, causing the left and right rods to be at their maximum bending deformation position, the front and rear rods assume a straight rod shape and the expansion and contraction deformation is zero. When the stator base vibrates in the same "3"-shaped bending vibration mode in the plane of the front and rear square rods, causing the front and rear rods to be at their maximum bending deformation position, the left and right rods assume a straight rod shape and the expansion and contraction deformation is also zero.

[0032] like Figure 6 As shown, the piezoelectric moving device of the present invention utilizes the resonance of the three-phase working mode of the stator matrix to drive the slide to move, and its operation control method is: when the three groups of piezoelectric ceramics in the piezoelectric ceramic sheet group 12 on the stator assembly are respectively supplied with a three-phase AC power simple harmonic signal with a certain amplitude and a frequency close to the three-phase working mode frequency, and the electric power signal applied to the longitudinal vibration excitation ceramic group 123 is maintained at a 90° phase difference with the electric power signal applied to the front and rear square rod bending vibration excitation ceramic group 121, and the left and right square rod bending vibration excitation ceramic group 122, the stator matrix can be excited to resonate in the three-phase working mode, so that the driving feet 13 on the left and right square rods of the stator move in an elliptical trajectory along the xOz plane, and the driving feet 13 of the front and rear square rods of the stator are both moved along the The stator base 11 utilizes the elliptical motion trajectory of the driving foot 13 along the xOz plane and the elliptical trajectory along the yOz plane, and uses the friction coupling between the driving foot 13 and the slide 21 to push the slide 21 to move along the x and y directions, and realize the two degrees of freedom of movement of the moving device; if the lead / lag relationship between the electric power signal input to the longitudinal vibration excitation ceramic group 123 and the electric power signal input to the left and right square rod bending vibration excitation ceramic groups 121 is reversed, the slide 21 will run in the opposite direction of the x-axis; similarly, if the lead-lag phase relationship between the electric power signal input to the longitudinal vibration excitation ceramic group 123 and the electric power signal input to the front and rear square rod bending vibration excitation ceramic groups 122 is reversed, the slide 21 will move in the opposite direction of the y-axis.

[0033] like Figures 8-10As shown in FIG. 1 , for the piezoelectric moving device of the present invention, the driving process of the stator assembly 1 on the slide 21 within one vibration period (T) is as follows: in the period 0 to T / 4, the longitudinal vibration of the left and right square rods causes them to stretch from their initial rod lengths to their maximum lengths, causing the driving feet 13 on the left and right square rods to contact the slide 21 on the slide assembly, while the bending mode vibration of the left and right square rods causes the two rods to return from their maximum left-bend state to a straight rod state, thereby causing the driving feet 13 on the left and right rods to be slightly bent. They respectively run from A1 and B1 to A2 and B2 positions and push the slide 21 to move a step moment λ1 along the x direction; at the same time, the longitudinal vibration of the front and rear square rods causes them to shrink from their initial length to the minimum rod length, so that the driving feet 13 on the front and rear square rods are out of contact with the slide 21, and the bending mode vibration of the front and rear square rods causes the front and rear square rods to recover from the maximum forward bending shape to the straight rod shape, so that the driving feet 13 on the front and rear square rods move from F1 and G1 to F2 and G2 positions. During the period of T / 4 to T / 2, the longitudinal vibration of the left and right square rods causes them to recover from the maximum rod length to the initial rod length. At this time, the driving feet 13 on the two rods still maintain contact with the slide 21, while the bending mode vibration of the left and right square rods causes the two rods to bend from a straight rod shape to a maximum right bend shape, thereby causing the driving feet 13 on the left and right square rods to move from A2 and B2 to A3 and B3 positions respectively, and push the slide 21 to move another step moment λ1 along the x direction; at the same time, the longitudinal vibration of the front and rear square rods causes them to recover from the initial minimum rod length to the initial rod length, so that the driving feet 13 on the front and rear square rods still do not contact with the slide 21, while the bending mode vibration of the front and rear square rods causes the front and rear square rods to bend from a straight rod shape to a maximum rear bend shape, thereby causing the driving feet 13 on the front and rear square rods to move from F2 and G2 to F3 and G3 positions. During the period of T / 2 to 3T / 4, the longitudinal vibration of the left and right square rods causes them to shrink from their initial length to the minimum rod length, causing the driving feet 13 to break away from contact with the slide 21, while the bending mode vibration of the left and right square rods causes them to recover from the maximum right bend to the straight rod shape, thereby causing the driving feet 13 on the left and right square rods to move from A3 and B3 to A4 and B4 positions respectively; at the same time, the longitudinal vibration of the front and rear square rods causes them to stretch from their initial rod length to the maximum rod length, causing the driving feet 13 on the front and rear square rods to contact the slide 21, while the bending mode vibration of the front and rear square rods causes the front and rear square rods to recover from the maximum rear bend to the straight rod shape, thereby causing the driving feet 13 on the front and rear rods to move from F3 and G3 to F4 and G4 positions and push the slide 21 to move the first step λ2 along the y direction.During the period of 3T / 4~T, the longitudinal vibration of the left and right square rods causes them to recover from the minimum rod length to the initial length, so that the driving feet are still not in contact with the slide 21, and the bending mode vibration of the left and right square rods causes them to bend from a straight rod shape to a maximum left bend shape, thereby causing the driving feet 13 on the left and right square rods to move from A4, B4 to A1, B1 positions; at the same time, the longitudinal vibration of the front and rear square rods causes them to recover from the maximum rod length to the initial rod length, so that the driving feet 13 on the front and rear square rods still maintain contact with the slide 21, and the bending mode vibration of the front and rear square rods causes the front and rear square rods to bend from a straight rod shape to a maximum forward bend shape, thereby causing the driving feet 13 on the front and rear square rods to move from F4, G4 to F1, G1 positions, and push the slide 21 to move along the y direction for the second step λ2. Thus, each time the stator base completes a working vibration cycle, the driving feet 13 on the left and right square rods and the front and rear square rods each complete an elliptical motion. Furthermore, the driving feet 13 on the left and right square rods and the driving feet 13 on the front and rear square rods alternately propel the slide 21 two steps in the x- and y-directions, respectively. As the stator base repeats these vibration cycles, the driving feet propel the slide 21 continuously in the x- and y-directions. Example:

[0034] like Figure 1 As shown, the present invention's piezoelectric mobile device based on a basin-type stator drive consists of a stator assembly 1, a slide assembly 2, and a base assembly 3. The slide assembly 2 is connected to the stator assembly 1, and the two together form a moving pair capable of moving in two degrees of freedom. The stator assembly 1 is connected to the base assembly 3; the slide assembly 2 is connected to the base assembly, and the two together form a rolling-sliding pair capable of moving in two degrees of freedom.

[0035] like Figure 2 As shown, the stator assembly 1 consists of a stator base 11, a piezoelectric ceramic plate group 12, and a driving foot 13. The stator base 11 is made of 45 steel and has a basin-like structure. It is composed of four square rods 111 and a cross block 112. The cross-sectional dimensions of each square rod 111 are 5 mm and 5 mm, and the length is 55 mm. A slender hole with a diameter of 2 to 2.5 mm is drilled at the center of the lower end of each square rod 111. The size of the square rods and the diameter of the slender holes can be slightly adjusted according to the requirements of the consistency of the three-phase operating modal frequency. The spacing between the front and rear square rods and the spacing between the left and right square rods on the stator base is 20 mm. A square groove is formed at the connection between the square rods 111 and the cross block 112. The thickness of the cross block 112 is set to 6 mm, and a 4 mm through-hole is drilled in the center of the cross block 112 to fix the stator assembly.

[0036] like Figure 3As shown, the slide assembly 2 is composed of a slide 21 and a planar motion guide rail 22, and the slide 21 and the planar motion guide rail 22 form a rolling-sliding motion pair. The slide 21 is a square thin plate structure with a size of 60mm x 60mm x 2mm. The planar motion guide rail 22 is composed of a square cover plate 221, a ball 222 and a ball support plate 223, wherein the outer dimensions of the square cover plate are 98mm x 98mm, and the diameter of the ball 222 is 3mm. Four straight grooves with a width of 3.2mm are processed on the square cover plate 221. After the balls 222 are respectively installed in these straight grooves, they are covered with four ball support plates 223. A through groove with a width of 2.8mm is opened on each ball support plate 223 so that part of the surface will be exposed after the balls 222 are installed in the straight grooves, and the ball support plates 223 are glued to the cover plate 221 with strong glue.

[0037] like Figure 4 As shown, the base assembly 3 consists of a base plate 31, a lower plate frame 32, a middle plate 33, an upper plate frame 34, a circular column 35, and a rubber pad 36. The lower plate frame 32 and the upper plate frame 34 are both square frame structures, and each is made up of four rectangular plates connected by screws. The lower plate frame 32 is connected to the base plate 31 by screws, the middle plate 33 is connected to the lower plate frame 32 by screws, and the upper plate frame 34 is connected to the middle plate 33 by screws. The circular column 35 is fixed to the base plate 31 by screws, and the rubber pad 36 is placed on the circular column 35. The stator assembly 1 is fastened to the circular column 35 via the rubber pad 36 and by mounting screws 37. By adjusting the degree of compression of the rubber pad 36, the preload force between the drive foot 13 and the slide 21 on the stator assembly 1 can be adjusted.

[0038] like Figure 5 As shown, the piezoelectric mobile device based on the basin-frame structure selects the three-phase natural vibration mode of the basin-frame stator as its working mode, and realizes the two-degree-of-freedom motion of the piezoelectric mobile device by exciting the resonance of the three-phase working mode. These three-phase working modes are the antisymmetric longitudinal telescopic vibration mode between the front and rear square rods and the left and right square rods of the basin-frame stator, the same-type "3"-shaped bending vibration mode in the plane of the left and right square rods, and the same-type "3"-shaped bending vibration mode of the front and rear square rods. When the basin-frame piezoelectric mobile device moves, the antisymmetric longitudinal telescopic vibration mode between the front and rear square rods and the left and right square rods realizes the dynamic contact and separation of the driving foot 13 and the slide 21, and the same-type "3"-shaped bending vibration mode vibration of the front and rear square rods and the same-type "3"-shaped bending vibration mode vibration in the plane of the left and right square rods respectively push the slide 21 to move in the y-direction and x-direction.

[0039] like Figure 6As shown, in order to correctly excite the three-phase operating mode of the basin-frame stator, a certain number of piezoelectric ceramic sheets must be attached to the stator base and correctly polarized. To this end, 32 piezoelectric ceramic sheets with a thickness of 0.5 to 0.6 mm are attached to the square bars of the stator base. These piezoelectric ceramic sheets can be divided into three groups: the eight sheets attached near the ends of the front and rear square bars constitute the front and rear square bar bending vibration excitation ceramic group 121; the eight sheets attached near the ends of the left and right square bars constitute the left and right square bar bending vibration excitation ceramic group 122; and the 16 sheets attached near the middle of each bar constitute the longitudinal vibration excitation ceramic group 123. The ceramic sheets in the front and rear square bar bending vibration excitation ceramic group 121 and the left and right square bar bending vibration excitation ceramic group 122 are of the same size, and the ceramic sheets in the longitudinal vibration excitation ceramic group 123 are also of the same size. Each ceramic piece in the longitudinal vibration excitation ceramic group 123 is polarized toward its surface bonded to the stator base. For each ceramic piece in the front and rear square rod bending vibration excitation ceramic groups 121 and the left and right square rod bending vibration excitation ceramic groups 122, the pole configuration is as follows: ceramic pieces placed outside the square rods are polarized toward their surface bonded to the stator base, while ceramic pieces placed inside the square rods are polarized away from their surface bonded to the stator base.

[0040] like Figure 6 As shown, in order to effectively excite the resonance of the stator's three-phase operating mode and reduce the number of phases of the driving power supply, while also minimizing the occurrence of electrical "short circuits," the piezoelectric ceramic sheet group 12 must be properly powered. To this end, the electrode surfaces of each piezoelectric ceramic sheet bonded to the stator substrate are grounded. Simultaneously, the electrodes of each ceramic sheet in the longitudinal vibration excitation ceramic group 123, facing away from the bonding surface, must be fed with a simple harmonic power signal of U1cosωt. Each ceramic sheet in the front and rear square rod bending vibration excitation ceramic group 121 must be fed with a simple harmonic power signal of U2sinωt. And each ceramic sheet in the left and right square rod bending vibration excitation ceramic group 122 must be fed with a simple harmonic power signal of U3sinωt. At the same time, in order to excite micron-level amplitude on the driving foot 13 so that the driving foot 13 can effectively push the slide 21 to slide, the frequency ω of the driving signal is required to be very close to the working modal frequency of the stator, and the maximum difference between the driving frequency and the working modal frequency should not exceed 0.5%. If the difference between the driving frequency and the working modal frequency is too large, the working modal frequency can be appropriately adjusted by adjusting the size of the stator matrix; at the same time, the amplitudes U1, U2, and U3 of the driving signals should be controlled within 150V to 300V.

[0041] The mobile device of the present invention selects the three-phase vibration mode of the stator matrix as the working mode to drive the two-dimensional planar motion freedom of the slide. These three-phase working modes are the antisymmetric longitudinal expansion mode of the stator matrix, the same "3"-shaped bending vibration mode in the plane of the left and right square rods, and the same "3"-shaped bending vibration mode of the front and rear square rods. When the front and rear square rods of the stator matrix vibrate in the antisymmetric longitudinal expansion mode with the left and right square rods, the front and rear rods alternately expand and contract with the left and right rods. When the stator matrix vibrates in the same "3"-shaped bending vibration mode in the plane of the left and right square rods, causing the left and right rods to be in the position of maximum bending deformation, the front and rear rods are straight and the expansion and contraction deformation is zero. When the stator matrix vibrates in the same "3"-shaped bending vibration mode in the plane of the front and rear square rods, causing the front and rear rods to be in the position of maximum bending deformation, the left and right rods are straight and the expansion and contraction deformation is also zero.

[0042] The operating method of the present invention is as follows: when a three-phase AC power simple harmonic signal with a certain amplitude and a frequency close to the three-phase working modal frequency of the stator matrix is respectively applied to the three groups of piezoelectric ceramic sheets in the piezoelectric ceramic sheet group 12 on the stator assembly, and the electric power signal applied to the longitudinal vibration excitation ceramic group 123 is maintained at a 90° phase difference with the electric power signals applied to the front and rear square rod bending vibration excitation ceramic groups 121, and the left and right square rod bending vibration excitation ceramic groups 122, the stator can be excited to perform three-phase working modal resonance, thereby causing the driving feet 13 on the left and right square rods of the stator to move along an elliptical trajectory in the xOz plane, and at the same time causing the driving feet 13 on the front and rear square rods of the stator to move along an elliptical trajectory along the yOz plane; the stator matrix 11 is respectively used The driving feet 13 on the left and right square rods move elliptically along the xOz plane, and the driving feet 13 on the front and rear square rods follow elliptical trajectories along the xOz plane, and with the help of the friction between the driving feet 13 and the slide 21, the slide 21 is pushed to slide along the x and y directions respectively, so as to realize the movement function of the mobile device; if the lead-lag phase relationship between the electric power signals input to the longitudinal vibration excitation ceramic group 123 and the electric power signals input to the left and right square rod bending vibration excitation ceramic group 122 is reversed, the slide 21 will move in the opposite direction of the x-axis; similarly, if the lead-lag phase relationship between the electric power signals input to the longitudinal vibration excitation ceramic group 123 and the electric power signals input to the front and rear square rod bending vibration excitation ceramic group 121 is reversed, the slide 21 will move in the opposite direction of the y-axis.

[0043] The above description is merely a description of the preferred embodiment of the present invention and is not to be construed as limiting the scope of the claims. The present invention is not limited to the above embodiment, and variations in the specific structure are permitted. Any variations within the scope of the independent claims of the present invention are also within the scope of protection of the present invention.

Claims

1. A mobile device with a multi-modal composite drive of a basin-shaped stator, characterized by: It includes a stator assembly, a slide assembly, and a base assembly; the slide assembly is connected to the stator assembly and forms a moving pair for two-way motion, the stator assembly is connected to the base assembly, and the slide assembly is connected to the base assembly and forms a rolling-sliding motion pair for two-way motion; The stator assembly includes a stator base, a piezoelectric ceramic sheet group and a driving foot. The stator base includes four square rods and a cross block. Each square rod is connected to the cross block. The piezoelectric ceramic sheet group consists of 32 piezoelectric ceramics. These piezoelectric ceramic sheets are distributed on the four square rods. The driving feet are all spherical protrusions and are respectively installed on the upper end of each square rod. The multi-mode includes three-phase working modes, which are respectively: the antisymmetric longitudinal stretching vibration mode between the front and rear square rods and the left and right square rods of the stator assembly; the in-plane identical "3"-shaped bending vibration mode of the left and right square rods; the in-plane identical "3"-shaped bending vibration mode of the front and rear square rods; The antisymmetric longitudinal telescopic vibration mode between the front and rear square rods and the left and right square rods refers to the telescopic deformation of the two ends of the rod body along the z-axis direction, wherein the vibration state of the front and rear square rods is consistent and both extend or shorten synchronously along the z-axis direction, and the vibration state of the left and right square rods is consistent and both extend or shorten synchronously along the z-axis direction. At the same time, the vibration deformation between the front and rear square rods and the left and right square rods is just opposite, so that the front and rear square rods extend and shorten alternately with the left and right square rods, thereby making the front and rear square rods The driving feet on the left and right square rods alternately contact and separate from the slide. The identical "3"-shaped bending vibration modes in the planes of the left and right square rods refer to the left square rod simultaneously bending and deforming along the x-axis based on the upper and lower rods of the cross block, while the right square rod also bends and deforms along the y-axis based on the upper and lower rods of the cross block. Furthermore, the bending shapes of the left and right square rods are identical and both form a "3" shape, thereby causing the driving feet on the left and right square rods to generate thrust along the x-axis on the slide. The identical "3"-shaped bending vibration modes in the planes of the front and rear square rods refer to the front square rod simultaneously bending and deforming along the y-axis based on the upper and lower rods of the cross block, while the rear square rod also bends and deforms along the y-axis based on the upper and lower rods of the cross block. Furthermore, the bending shapes of the front and rear square rods are identical and both form a "3" shape, thereby causing the driving feet on the front and rear square rods to generate thrust along the y-axis on the slide.

2. The multi-modal composite drive mobile device of a basin-frame stator according to claim 1, characterized in that: The slide assembly includes a slide and a planar motion guide rail, the slide is connected to the planar motion guide rail and forms a rolling pair; the planar motion guide rail is composed of a cover plate, balls and a ball supporting plate, four long grooves are made on the cover plate, the balls are placed in the long grooves and covered with a ball supporting plate, and the ball supporting plate is glued to the cover plate.

3. A multi-modal composite drive moving device for a basin-frame stator according to claim 1 or 2, characterized in that: The base assembly includes a bottom plate, a lower plate frame, a middle plate, an upper plate frame, a circular column, and a rubber pad. The lower plate frame is connected to the bottom plate, the middle plate is connected to the lower plate frame, and the upper plate frame is connected to the middle plate. The circular column is fixed on the bottom plate, the rubber pad is placed on the circular column, and the stator assembly is connected to the circular column with screws via the rubber pad.

4. The multi-modal composite drive moving device of a basin-frame stator according to claim 1, characterized in that: The stator base has a basin-shaped configuration.

5. A method for operating a moving device with a multi-modal composite drive of a basin-shaped stator according to any one of claims 1 to 4, characterized in that: The three groups of piezoelectric ceramic sheets in the piezoelectric ceramic sheet group on the stator assembly are respectively fed with three-phase AC power simple harmonic signals with a certain amplitude and a frequency close to the three-phase working mode frequency, and the electric power signal applied to the longitudinal vibration excitation ceramic group is 90° out of phase with the electric power signal applied to the front square rod, the rear square rod bending vibration excitation ceramic group and the left square rod, the right square rod bending vibration excitation ceramic group, so as to stimulate the resonance of the stator three-phase working mode, so that the driving feet on the left square rod and the right square rod of the stator move in an elliptical trajectory along the xOz plane, and at the same time, the driving feet on the front square rod and the rear square rod of the stator move in an elliptical trajectory along the yOz plane; the stator matrix uses the left square rod and the rear square rod to move in an elliptical trajectory along the yOz plane. The driving feet on the left square rod and the right square rod move elliptically along the xOz plane, and the driving feet on the front square rod and the rear square rod move along the elliptical trajectory of the yOz plane, and the friction between the driving feet and the slide is used to push the slide to slide along the x and y directions respectively, so as to realize the movement and power functions of the mobile device; if the lead-lag phase relationship between the electric power signals input to the longitudinal vibration excitation ceramic group and the bending vibration excitation ceramic group input to the left square rod and the right square rod is reversed, the slide will move in the opposite direction of the x-axis; if the lead-lag phase relationship between the electric power signals input to the longitudinal vibration excitation ceramic group and the bending vibration excitation ceramic group input to the front square rod and the rear square rod is reversed, the slide will move in the opposite direction of the y-axis.

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