A system and a test head for reading pin card information based on RFID

Abstract

The present invention relates to a system and a test head for reading probe card information based on RFID, including an RFID reader / writer, an electronic tag and an antenna, characterized in that it is used in cooperation with a test head and a probe card; the electronic tag is installed on the probe card, and the electronic tag is used to store the information of the probe card; the RFID reader / writer and the antenna are installed in the test head, and the RFID reader / writer and the antenna are connected through a radio frequency cable and are integrally arranged in a shielding cover; the shielding cover is a shielding cover with a receiving hole, and the shielding cover can shield electromagnetic waves to ensure that the antenna can perform directional interaction of electromagnetic waves with the electronic tag through the receiving hole; the RFID reader / writer reads and writes the information of the electronic tag through the antenna, and the RFID reader / writer is also connected to a computer device through a serial port line or a network. The present invention facilitates users to timely understand the probe card information.

Description

Technical Field

[0001] The present invention relates to the field of integrated circuits, and particularly to a system and a test head for reading pin card information based on RFID. Background Art

[0002] RFID (Radio Frequency Identification) is a non-contact automatic identification technology. It automatically identifies target objects through radio frequency signals and obtains relevant data. The identification work does not require manual intervention. As a wireless version of barcodes, RFID technology has advantages that barcodes do not have, such as waterproof, anti-magnetic, high temperature resistance, long service life, large reading distance, data on the tag can be encrypted, larger data storage capacity, and easy modification of stored information (depending on the encapsulation material of the RFID tag. Barcode tags using resin carbon tape and PET label paper for thermal transfer can also achieve good waterproof and long-life effects). Its application will bring revolutionary changes to industries such as retail and logistics.

[0003] The factors affecting RFID reading and writing mainly include reader power, antenna size (gain), tag size, and external environments such as metal, liquid, and electromagnetic interference. Radio Frequency Identification (RFID) technology is a non-contact automatic identification technology that uses electromagnetic waves to achieve automatic identification of items. Currently, RFID is most widely applied in high-frequency and ultra-high-frequency bands. However, the radio frequency in the ultra-high-frequency band is sensitive to the environment, especially to metal, resulting in the inability of passive tags operating at this working frequency to work on objects with metal surfaces. When an RFID system is applied to a metal environment, the influence of metal on the reader mainly manifests in two aspects: reflectivity and shielding. When electromagnetic waves are incident on metal, a large part will be reflected, and the phase of the reflected wave is opposite to that of the incident wave. When the electric field generated by the reflection of electromagnetic waves by metal is in phase with the original electric field at a certain position, the induction intensity of the electric field on the tag at this position will increase, which can improve the tag reading rate; when the phase of the reflected electric field is opposite to that of the original electric field, they will cancel each other out, thus reducing the tag reading rate.

[0004] In the WAT test (Wafer Acceptance Test), a probe card is needed to establish a test path between the test chip and the tester. For the type and model of the probe card used in the test, we often cannot obtain them in a timely and effective manner. Currently, before using the probe card for testing, its type and model information are recorded first. In this way, once the record is lost, we can only stop the test, open the test head of the probe station, take out the probe card to check, which is very inconvenient for users and will delay the test process. We attempt to use RFID to read and write the model and type of the probe card, but there is a metal structure in the test head, which has a great impact on the reading and writing of the RFID system. Summary of the Invention

[0005] The main object of the present invention is to overcome the deficiencies in the prior art and provide a system and a test head for reading probe card information based on RFID, which can facilitate users to timely understand the probe card information. To solve the above technical problems, the solution of the present invention is as follows:

[0006] Provide a system for reading probe card information based on RFID, including an RFID reader / writer, an electronic tag, and an antenna, which are used in cooperation with a test head and a probe card;

[0007] The electronic tag is installed on the probe card, and the electronic tag is used to store the information of the probe card;

[0008] The RFID reader / writer and the antenna are installed in the test head, and the RFID reader / writer and the antenna are connected through a radio frequency cable and are integrally arranged in a shielding cover; the shielding cover is a shielding cover with a receiving hole left, and the shielding cover can shield electromagnetic waves to ensure that the antenna can perform directional interaction of electromagnetic waves with the electronic tag through the receiving hole;

[0009] The RFID reader / writer reads and writes the information of the electronic tag through the antenna, and the RFID reader / writer is also connected to a computer device through a serial port line or a network.

[0010] The above system for reading probe card information based on RFID directly places the RFID reader / writer in the test head to read the probe card information, solves the influence of applying the RFID system to a metal environment, not only facilitates users to timely understand the information, but also reduces the mistakes caused by disassembling the equipment.

[0011] As a further improvement, the shielding cover is made of an aluminum matrix composite material by casting, and the surface of the aluminum matrix composite material is coated with an electromagnetic wave shielding coating.

[0012] As a further improvement, the preparation method of the shielding cover is: after heating and melting the aluminum matrix composite material, it is introduced into a mold to form a casting, after solution heat treatment, the electromagnetic wave shielding coating is applied to the surface of the casting, and laser sintering is carried out under the nitrogen protection state at 1200 °C, and the required shielding cover is obtained after laser sintering.

[0013] As a further improvement, the aluminum matrix composite material is an aluminum matrix composite material reinforced with SiC, and the preparation method is specifically: taking aluminum alloy (block-shaped 2219 aluminum alloy) and melting it at 750 °C until it is completely melted and holding for 10 min, then cooling it to 620 °C, the aluminum melt is in a semi-solid state, adding 2.5 wt% of SiC particles and stirring evenly to obtain the SiC-reinforced aluminum matrix composite material.

[0014] As a further improvement, the preparation method of the electromagnetic wave shielding coating is specifically as follows: TiC particles and aluminum powder are obtained in a mass ratio of 1:4, and the TiC particles and aluminum powder are mixed and homogenized by rosin to obtain the electromagnetic wave shielding coating.

[0015] As a further improvement, the system for reading needle card information based on RFID further includes an electronic tag processing system, which is installed on a computer device connected to a plurality of RFID readers and is used for:

[0016] 1) Configuring the working parameters of the RFID reader and the antenna; in some embodiments, setting the transmit power to adjust the reading distance of the electronic tag, with a setting range of 0 - 27 dBm and a step value of 0.01 dBm. The larger the value, the farther the reading distance.

[0017] 2) Obtaining and identifying the electronic tag information sent by the RFID reader and being able to automatically write it into the file generated by the test.

[0018] 3) Modifying the information in the electronic tag through the RFID reader and the antenna.

[0019] As a further improvement, the electronic tag information is in the format of an EPC code, and the EPC code is represented in hexadecimal or ASCII code.

[0020] In the above system for reading needle card information based on RFID, an electronic tag processing system is added, which can conveniently read and write the information in the electronic tag. When wafer testing, the generated test data will generate a log file, and the information read by the electronic tag processing system can be directly added to the log file for display, facilitating the user to understand the information in a timely manner.

[0021] Provided is a test head capable of reading needle card information based on RFID, which is used in cooperation with a stage and a probe card installed with an electronic tag. The test head capable of reading needle card information based on RFID includes a cover plate, a fixed frame, an interface board, a needle tower, a box body, an RFID reader, and an antenna;

[0022] The interface board is installed and fixed to the fixed frame. The upper plane of the interface board is provided with connectors, and the lower plane of the interface board is provided with connection points, which are electrically connected to the connectors. The RFID reader-writer is installed on the upper plane of the interface board, and the antenna is installed on the lower plane of the interface board. A through hole C is opened on the interface board, and the RFID reader-writer and the antenna are connected by a radio frequency cable passing through the through hole C and are integrally arranged in the shielding cover. The shielding cover is a shielding cover with a receiving hole left. The shielding cover can shield electromagnetic waves to ensure that the antenna can perform directional interaction of electromagnetic waves with the electronic tag through the receiving hole. The RFID reader-writer reads and writes information of the electronic tag through the antenna. The cover plate is installed on the fixed frame. The cover plate is provided with a through hole B, so that the external cable can pass through the through hole B of the cover plate and be connected to the connector on the interface board, and the external serial port line can pass through the through hole B of the cover plate and be connected to the RFID reader-writer on the interface board. The pin tower is installed under the fixed frame. The pin tower is provided with pin holes, and spring pins are installed in the pin holes. The upper ends of the spring pins are in contact connection with the connection points of the interface board, and the lower ends of the spring pins are used for contact connection with the probes of the probe card.

[0023] The box body has a structure with an open upper end. The box body is installed on a carrier platform for carrying the probe card, and a through hole A for the probe card to expose upward is provided at the bottom of the box body.

[0024] One side of the box body and one side of the cover plate are connected to form a rotating shaft, and the other end of the cover plate flips relative to the rotating shaft to realize the closed cover state and the open cover state between the cover plate and the box body. In the closed cover state, the lower end of the spring pin of the pin tower can pass through the through hole A at the bottom of the box body and form contact connection with the probe on the probe card.

[0025] The above test head that can read the information of the probe card based on RFID directly places the RFID reader-writer into it to read the information of the probe card, which not only facilitates the user to understand the information in time but also reduces the mistakes caused by disassembling the equipment. Moreover, the structure of the test head is simple and reliable. By controlling the opening and closing of the cover plate and the box body, the connection or disconnection between the spring pin and the probe on the probe card can be realized, which is convenient for controlling the test path.

[0026] As a further improvement, the test head for the probe station further includes a gas spring. One end of the gas spring is connected to the box body, and the other end of the gas spring is connected to the cover plate, which is used to provide support and buffering when the cover plate flips. Using the gas spring can make the cover plate rise and fall slowly.

[0027] As a further improvement, a locking assembly is provided inside the box body. The cover plate is flexibly connected to the fixed frame and can move relative to each other. The locking assembly includes a connecting portion for connecting the fixed frame and a transmission mechanism for driving the fixed frame, the interface board and the needle tower thereon to vertically lift a certain distance. When the cover plate is flipped to the closed state, the spring pins on the needle tower are close to the probe card and the lower ends of the spring pins are parallel to and do not contact the probes on the probe card. At the same time, the fixed frame forms a connection with the connecting portion of the locking assembly, and the transmission mechanism of the locking assembly acts to make the lower ends of the spring pins on the needle tower contact and connect with the probes on the probe card.

[0028] For the above test head capable of reading needle card information based on RFID, since the cover plate is flexibly connected to the fixed frame, the fixed frame, the interface board and the needle tower fixed on the fixed frame can achieve secondary lifting relative to the box body. First, it rotates to the closed state driven by the cover plate, which is the first lifting. At this stage, the spring pins are aligned with the probes on the probe card, and the plane where the lower ends of all spring pins are located is set horizontally. Then, it is driven by the locking assembly for the second lifting to make the spring pins contact and connect with the probes, so that all spring pins can contact the probes simultaneously.

[0029] For the above test head capable of reading needle card information based on RFID, the way of the spring pins pressing down to contact the probes on the probe card is optimized. When the cover plate covers the box body, the spring pins on the needle tower do not contact the probes on the probe card. By controlling the transmission in the locking assembly, the fixed frame, the interface board and the needle tower are moved downward as a whole, and then the spring pins are horizontally lowered to form contact connection with the probes, ensuring that all the spring pins on the needle tower contact the probes on the probe card simultaneously, eliminating the problem that the spring pins at different positions contact the probes successively when the cover plate gradually covers the box body, and making the spring pins and probes at different positions all approach the theoretical life given by the manufacturer.

[0030] As a further improvement, positioning pins are provided on a pair of side edges of the fixed frame;

[0031] The transmission mechanism includes a rotating shaft, a connecting rod, a rotating handle, bearings, linear guides and positioning sliders; there are two linear guides, which are symmetrically installed on both sides of the through hole A on the box body respectively. Each linear guide is slidably connected with a positioning slider, namely positioning slider A and positioning slider B; a chute is opened on one side of the positioning slider. The chute includes an upper chute section and a lower chute section. The upper end of the upper chute section opens to the upper end face of the positioning slider. The lower end of the upper chute section is connected to the upper end of the lower chute section, and a positioning point G is provided at the connection. The lower end of the lower chute section is provided with a positioning point D, and the positioning point D is lower than the positioning point G; after the two positioning sliders are respectively installed on the corresponding linear guides, the sides of the two positioning sliders with chutes are arranged opposite to each other; the chute is the connecting part in the locking assembly, and the positioning pins on the fixed frame can enter the corresponding chute to achieve connection. When the positioning pin is at the positioning point D, the cover plate and the box body are in the closed state, and the lower end of the spring pin on the needle tower is parallel to and does not contact the probe on the probe card. When the positioning pin is at the positioning point G, the lower end of the spring pin on the needle tower contacts and connects with the probe on the probe card; there are two bearings, namely bearing A and bearing B. The two bearings are respectively sleeved on the corresponding rotating shafts. A connecting rod is connected between bearing A and bearing B, between positioning slider A and bearing A, and between positioning slider B and bearing B. The rotating handle is arranged on bearing A.

[0032] When the cover plate gradually covers the box body, the positioning pins on the side of the fixed frame can respectively enter the corresponding chutes of the positioning sliders. When the cover plate and the box body are in the closed state, each positioning pin is respectively at the positioning point G of the corresponding chute, so that the spring pins of the needle tower pass through the through hole A of the box body and approach the probe card installed on the stage, and the lower ends of the spring pins are parallel to and do not contact the probe card; at this time, by pulling the rotating handle, bearing A can be rotated along the rotating shaft, driving positioning slider A to slide along the linear guide. At the same time, bearing A drives bearing B to rotate, and then bearing B drives positioning slider B to slide along the linear guide. The positioning pins of the fixed frame respectively slide from the positioning point G of the corresponding chute to the positioning point D, so that the fixed frame, the interface board and the needle tower are integrally moved downward until the spring pins are in contact connection with the probes on the probe card; when it is necessary to open the cover, by pulling the rotating handle, bearing A can be rotated reversely along the rotating shaft, so that the positioning pins of the fixed frame respectively slide from the positioning point D of the corresponding chute to the positioning point G, and then the cover plate is opened.

[0033] The locking assembly with the above structure can realize the contact of all spring pins with the probes on the probe card through a simple structure.

[0034] As a further improvement, four positioning pins are symmetrically installed on a pair of sides of the fixed frame, that is, two positioning pins are installed on one side, and two identical chutes are correspondingly opened on one side of the positioning slider.

[0035] As a further improvement, the test head capable of reading the information of the probe card based on RFID further includes a cable box body, which is a box-shaped structure with an open bottom; the cable box body is installed on the fixed frame; the cover plate is sleeved on the cable box body by means of through hole B; a cable hole is opened on the cable box body, so that the cable can pass through the cable hole and enter the cable box body to realize the connection with the connector on the interface board.

[0036] As a further improvement, one side of the cover plate is connected to the box body, and a flip handle is installed on the other side, which is used to realize the closed cover state and the open cover state between the cover plate and the box body by operating the flip handle.

[0037] As a further improvement, the fixed frame is a rectangular frame structure, and reinforcing ribs are also provided in the rectangular frame. Corresponding through grooves are opened on the interface board, and corresponding installation grooves are opened on the needle tower. The reinforcing ribs on the fixed frame can pass through the through grooves of the interface board and then be embedded into the installation grooves on the needle tower to realize the rigid connection between the fixed frame, the interface board and the needle tower.

[0038] As a further improvement, the test head capable of reading the information of the probe card based on RFID includes a carrier platform, and a concave circular step is provided at the center of the carrier platform for carrying the probe card; the test head for the probe platform can be fixedly installed on the probe platform through the carrier platform.

[0039] As a further improvement, the test head capable of reading the information of the probe card based on RFID further includes a probe card, and an electronic tag is installed on the probe card. The electronic tag is used to store the information of the probe card, and the information of the probe card includes but is not limited to the type and model of the probe card; the probe card is fixedly installed on the carrier platform through a positioning pin. Description of the Drawings

[0040] Figure 1 It is a schematic diagram of a system for reading the information of a probe card based on RFID according to the present invention.

[0041] Figure 2 It is an interface diagram of the electronic tag processing system in the embodiment.

[0042] Figure 3 It is a schematic structural diagram of the present invention in the open cover state.

[0043] Figure 4 It is a schematic structural diagram of the present invention in the closed cover state.

[0044] Figure 5 It is a cross-sectional view of the present invention in the closed cover state.

[0045] Figure 6 It is a top view of the present invention in the closed cover state.

[0046] Figure 7 It is an exploded view of the present invention.

[0047] Figure 8 Electron scanning electron microscope image of the shielding cover

[0048] The reference signs in the figure are: 1, fixed frame; 2, cover plate; 3, interface board; 4, needle tower; 5, probe card; 6, box body; 7, stage; 8, positioning pin; 9, rotating shaft; 10, connecting rod; 11, bearing A; 12, bearing B; 13, positioning slider A; 14, positioning slider B; 15, linear guide rail; 16, rotating handle; 17, gas spring; 18, cable; 19, flipping handle; 20, cable box body Specific embodiments

[0049] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments

[0050] As Figure 1 shown, a system for reading probe card information based on RFID includes an RFID reader, an electronic tag, an antenna, and an electronic tag processing system, which are used in cooperation with a test head and a probe card. The electronic tag is installed on the probe card, and the electronic tag is used to store information such as the type and model of the probe card. The RFID reader and the antenna are installed in the test head, and the RFID reader and the antenna are connected through a radio frequency cable and are integrally arranged in a shielding cover; the shielding cover is a shielding cover with a receiving hole, and the shielding cover is made of an aluminum matrix composite material by casting, and the surface of the aluminum matrix composite material is coated with an electromagnetic wave shielding coating; the shielding cover can shield electromagnetic waves, ensure that the antenna can perform directional interaction of electromagnetic waves with the electronic tag through the receiving hole, and prevent the electromagnetic waves from radiating to the metal structure in the test head, and then affecting the radio frequency interaction between the electronic tag and the antenna due to the reflection of the electromagnetic waves. The RFID reader reads and writes information of the electronic tag through the antenna; the RFID reader is also connected to a computer device through a serial port line or a network

[0051] The preparation method of the shielding cover is as follows: after heating and melting the aluminum matrix composite material, it is introduced into a mold to form a casting. After solution heat treatment, the electromagnetic wave shielding coating is applied to the surface of the casting, and laser sintering is carried out under the nitrogen protection state at 1200 °C to avoid reacting with oxygen to generate impurities. After laser sintering, the required shielding cover is obtained

[0052] In this embodiment, the following materials are used to prepare the shielding cover: the aluminum alloy uses aluminum alloy No. 2219, and the composition is shown in Table 1 below; TiC particles (1 μm), with a commercial purity of 99.99%, are purchased from Shanghai Naiou Nano Co., Ltd.; SiC particles (1 μm); aluminum powder (15 μm)

[0053] Table 1 Main element composition of 2219 aluminum alloy (wt%)

[0054]

[0055] Using the method of casting, the bulk 2219 aluminum alloy is melted at a temperature of 750 °C. Wait until the melt is completely melted and held for 10 minutes, then lower the temperature to 620 °C. Use a thermocouple to measure the temperature of the aluminum liquid in real time. At this time, the aluminum melt is in a semi-solid state. Then add 2.5 wt% of SiC particles, and then stir with a mechanical rotor for 2 minutes. Then raise the temperature to 750 °C and pour it into a mold to form a casting. This is the casting, and then solution heat treatment is carried out. Take TiC particles and aluminum powder in a mass ratio of 1:4, and then use rosin to mix and blend the TiC particles and aluminum powder to obtain an electromagnetic wave shielding coating. Then, using the method of laser sintering, apply the electromagnetic wave shielding coating on the surface of the casting; sinter it under the protection of nitrogen at 1200 °C to prevent reaction with oxygen to produce impurities. After laser sintering, observe it under an electron scanning electron microscope, as Figure 8 shown. After laser sintering, a coating with a thickness of about 500 μm is formed. It can be seen that the combination of the coating and the matrix alloy is very tight and there will be no peeling off. The aluminum matrix composite material of this shielding cover is light in weight and has a series of advantages such as corrosion resistance, wear resistance, high temperature resistance, and simple processing; using TiC ceramic particles as the coating material can effectively reduce the attenuation of the material to the signal.

[0056] The described electronic tag processing system is installed on a computer device connected to several RFID readers, and can conveniently perform operations such as reading and writing the information in the electronic tag. When wafer testing, the generated test data will generate a log file, and the information read by the electronic tag processing system can be directly added to the log file for display, facilitating users to understand the information in a timely manner. Figure 2 It is an interface diagram of an embodiment of the electronic tag system, and its main functions are as follows:

[0057] 1) Configure the working parameters of the RFID reader and antenna: the working frequency range (NA2), the antenna (1), and the communication protocol (Gen2). Since these are fixed in this embodiment, the display settings are not open. After successful connection, the status will prompt Connected; Power Settings is used to set the signal power for reading and writing. The default power value is 27 dBm, which can be adjusted within the range of 0 - 27 dBm, with a step value of 0.01 dBm. The larger the value, the farther the reading distance. Since the signal is affected by different environments, the transmit power will also affect the effectiveness of reading and writing tags. If the default value cannot effectively read and write tags, the user can adjust the power value to obtain the effective transmit power for reading and writing tags.

[0058] 2) Identification and modification of the electronic tag: Click Read, and the information of the read electronic tag will be displayed in Tag Results. The electronic tag information is in the format of an EPC code. The EPC code is represented in hexadecimal ("double-byte" input, the input content must be numbers 0-9 and letters A-F, with a total length not exceeding 96 bits and the number of characters not exceeding 24) or ASCII code (the number of characters not exceeding 25); Click Clear to clear Tag Results, and DisConnect to disconnect the connection; Select the read electronic tag, and you can right-click to select Write EPC to modify the EPC code.

[0059] Provide a Figures 3 to 7 test head that can read the information of the needle card based on RFID as shown, which is used in cooperation with a carrier and a probe card equipped with an electronic tag. The test head that can read the information of the needle card based on RFID includes a cover plate 2, a cable box body 20, a fixed frame 1, an interface board 3, a needle tower 4, a gas spring 17, a box body 6, a locking assembly, a carrier 7 and a probe card 5. The test head is fixedly installed on the probe table by using the carrier 7 (card holder).

[0060] The upper plane of the interface board 3 is provided with connectors, and the lower plane of the interface board 3 is provided with connection points. The RFID reader-writer is installed on the upper plane of the interface board 3, and the antenna is installed on the lower plane of the interface board 3. A through hole C is opened on the interface board, and the RFID reader-writer and the antenna are connected by a radio frequency cable passing through the through hole C and are integrally arranged in a shielding cover. The shielding cover is a shielding cover with a receiving hole left. The shielding cover can shield electromagnetic waves, ensuring that the antenna can perform directional interaction of electromagnetic waves with the electronic tag through the receiving hole. The RFID reader-writer reads and writes information of the electronic tag through the antenna. The fixed frame 1 is a rectangular frame, and reinforcing ribs are also arranged in the rectangular frame. Corresponding through slots are opened on the interface board 3, and corresponding installation slots are opened on the pin tower 4. The pin tower 4 is installed under the fixed frame 1. The reinforcing ribs on the fixed frame 1 can pass through the through slots of the interface board 3 and then be embedded into the installation slots on the pin tower 4 to achieve rigid connection between the fixed frame 1, the interface board 3, and the pin tower 4. The pin tower 4 is provided with pin holes, and spring pins are installed in the pin holes. The upper ends of the spring pins are in contact connection with the connection points of the interface board 3, and the lower ends of the spring pins are used to be in contact connection with the probes of the probe card 5. Four positioning pins 8 are symmetrically installed on a pair of side edges of the fixed frame 1, that is, two positioning pins 8 are installed on one side edge. The cable box body 20 is a box-shaped structure with an open bottom and is installed on the fixed frame 1. A cable hole is opened on the cable box body 20. The cable 18 for connecting the testing machine can pass through the cable hole and enter the cable box body 20 to achieve connection with the connectors on the interface board 3, and enable the external serial port line to pass through the through hole B of the cover plate and be connected to the RFID reader-writer on the interface board 3. The cover plate 2 is provided with a through hole B. The cover plate 2 is sleeved on the cable box body 20 by using the through hole B and is flexibly connected with the fixed frame 1, that is, relative displacement can occur between the cover plate 2 and the fixed frame 1.

[0061] The box body 6 is a structure with an open upper end, and a through hole A is opened at the bottom of the box body 6. The carrier table 7 is fixed at the bottom of the box body 6. A concave circular step for carrying the probe card 5 is provided at the center of the carrier table 7. The probe card 5 can be fixedly installed on the concave circular step by using the positioning pins to ensure that the probe card 5 is horizontally installed on the carrier table 7.

[0062] The locking assembly is installed in the box body 6. The locking assembly includes a rotating shaft 9, a connecting rod 10, a rotating handle 16, bearings, a linear guide rail 15 and a positioning slider. There are two linear guide rails 15, which are symmetrically installed on both sides of the through hole A in the box body 6 respectively, and a positioning slider is installed on each linear guide rail 15, namely positioning slider A 13 and positioning slider B 14. One side of the positioning slider is provided with two identical chutes, and the chute is in an "L" shape after counterclockwise rotation, including an upper chute section and a lower chute section. The upper opening of the upper chute section reaches the upper end face of the positioning slider. The lower end of the upper chute section is connected to the upper end of the lower chute section, and a positioning point G is provided at the connection. The lower end of the lower chute section is provided with a positioning point D, and the positioning point D is lower than the positioning point G. After the positioning sliders are respectively installed on the corresponding linear guide rails 15, the sides of the two positioning sliders with chutes are arranged opposite to each other. There are two bearings, namely bearing A 11 and bearing B 12. The two bearings are respectively sleeved on the corresponding rotating shafts 9. The positioning slider A 13 is connected to the bearing A 11 through the connecting rod 10, and the positioning slider B 14 is connected to the bearing B 12 through the connecting rod 10. A connecting rod 10 is also installed between the bearing A 11 and the bearing B 12. Among them, a rotating handle 16 is also installed on the bearing A 11.

[0063] One side of the cover plate 2 is connected to one side of the box body 6. A turning handle 19 is installed on the other side of the cover plate 2. An air spring 17 is also installed between the cover plate 2 and the box body 6. By controlling the turning handle 19, the cover plate 2 rotates with the side connected to the box body 6 as the axis, realizing the closed cover state and the open cover state between the cover plate 2 and the box body 6.

[0064] When the cover plate 2 gradually covers the box body 6, the four positioning pins 8 on the side of the fixed frame 1 can respectively enter the corresponding chutes of the positioning sliders. When the cover plate 2 and the box body 6 are in the closed cover state, each positioning pin 8 is respectively at the positioning point G of the corresponding chute, so that the spring pins of the pin tower 4 pass through the through hole A of the box body 6 and approach the probe card 5 installed on the carrier 7. At this time, the centers of the fixed frame 1, the interface board 3, the pin tower 4, the probe card 5 and the carrier 7 are on the same straight line, and the lower end of the spring pin and the probe card 5 are in a parallel and non-contact state. At this time, by pulling the rotating handle 16, the bearing A 11 rotates along the rotating shaft 9, driving the positioning slider A 13 to slide along the linear guide rail 15. At the same time, the bearing A 11 drives the bearing B 12 to rotate, and then the bearing B 12 drives the positioning slider B 14 to slide along the linear guide rail 15. The positioning pins 8 of the fixed frame 1 respectively slide from the positioning point G of the corresponding chute to the positioning point D, so that the fixed frame 1, the interface board 3 and the pin tower 4 are integrally lowered until the spring pin contacts and connects with the probes on the probe card 5.

[0065] When it is necessary to open the cover, by pulling the rotating handle 16, the bearing A 11 rotates reversely along the rotating shaft 9, so that the four positioning pins 8 of the fixed frame 1 respectively slide from the positioning point D of the corresponding chute to the positioning point G, and then the cover plate 2 is opened.

[0066] The above-mentioned test head based on RFID reading of pin card information directly places the RFID reader into the test head to read the pin card information, which not only makes it convenient for users to understand the information in time, but also reduces the mistakes caused by disassembling the equipment. Moreover, the test head based on RFID reading of pin card information has a simple and reliable structure, and is equipped with a locking assembly, which optimizes the way in which the spring needle is pressed down to contact the probe on the probe card 5. When the cover plate 2 covers the box body 6, the spring needle on the needle tower 4 does not contact the probe of the probe card 5. By controlling the rotating handle 16 in the locking assembly, the fixed frame 1, the interface board 3 and the needle tower 4 are moved downward as a whole, and then the spring needle is horizontally lowered to form a contact connection with the probe, ensuring that all spring needles on the needle tower 4 are in contact with the probe on the probe card 5 at the same time, eliminating the problem that the spring needles at different positions contact the probes one after another when the cover plate 2 gradually covers the box body 6, so that the spring needles and probes at different positions are close to the theoretical life given by the manufacturer.

[0067] Finally, it should be noted that the above examples are merely specific embodiments of the present invention. Obviously, the present invention is not limited to the above examples and is subject to numerous variations. All variations that can be directly derived or conceived by a person of ordinary skill in the art from the disclosure of the present invention should be considered within the scope of protection of the present invention.

Claims

1. A test head capable of reading the information of a probe card based on RFID, which is used in cooperation with a carrier stage and a probe card equipped with an electronic tag, characterized in that, The test head capable of reading the information of the probe card based on RFID includes a cover plate, a fixed frame, an interface board, a pin tower, a box body, an RFID reader / writer, and an antenna; The interface board is fixedly installed on the fixed frame. A connector is provided on the upper plane of the interface board, and connection points are provided on the lower plane of the interface board. The connection points are electrically connected to the connector. The RFID reader / writer is installed on the upper plane of the interface board, and the antenna is installed on the lower plane of the interface board. A through hole C is opened on the interface board, and the RFID reader / writer and the antenna are connected by a radio frequency cable passing through the through hole C and are integrally arranged in a shielding cover. The shielding cover is a shielding cover with a receiving hole left. The shielding cover can shield electromagnetic waves to ensure that the antenna can perform directional interaction of electromagnetic waves with the electronic tag through the receiving hole. The RFID reader / writer reads and writes the information of the electronic tag through the antenna. The cover plate is installed on the fixed frame. A through hole B is opened on the cover plate, so that an external cable can pass through the through hole B of the cover plate and be connected to the connector on the interface board, and an external serial port line can pass through the through hole B of the cover plate and be connected to the RFID reader / writer on the interface board. The pin tower is installed under the fixed frame. The pin tower is provided with pin holes, and spring pins are installed in the pin holes. The upper ends of the spring pins are in contact connection with the connection points of the interface board, and the lower ends of the spring pins are used for contact connection with the probes of the probe card; The box body has a structure with an open upper end. The box body is installed on a carrier for carrying the probe card, and a through hole A for the probe card to expose upward is provided at the bottom of the box body; One side of the box body and one side of the cover plate are connected to form a rotating shaft, and the other end of the cover plate rotates relative to the rotating shaft to realize the closed cover state and the open cover state between the cover plate and the box body. In the closed cover state, the lower ends of the spring pins of the pin tower can pass through the through hole A at the bottom of the box body and form contact connection with the probes on the probe card; The electronic tag is installed on the probe card, and the electronic tag is used to store the information of the probe card; The RFID reader / writer and the antenna are installed in the test head, and the RFID reader / writer and the antenna are connected by a radio frequency cable and are integrally arranged in a shielding cover. The shielding cover is a shielding cover with a receiving hole left. The shielding cover can shield electromagnetic waves to ensure that the antenna can perform directional interaction of electromagnetic waves with the electronic tag through the receiving hole; The RFID reader / writer reads and writes the information of the electronic tag through the antenna, and the RFID reader / writer is also connected to a computer device through a serial port line or a network; The preparation method of the shielding cover is as follows: After heating and melting the aluminum matrix composite material, it is introduced into a mold to form a casting. After solution heat treatment, an electromagnetic wave shielding coating is applied to the surface of the casting, and laser sintering is carried out under the nitrogen protection state at 1200 °C. After laser sintering, the required shielding cover is obtained.

2. The test head capable of reading pin card information based on RFID according to claim 1, characterized in that, The test head capable of reading the information of the probe card based on RFID includes a carrier. A concave circular step is provided at the center of the carrier for carrying the probe card. The test head for the probe stage can be fixedly installed on the probe stage through the carrier.

3. The test head capable of reading the information of the pin card based on RFID according to claim 2, wherein, The test head capable of reading the information of the probe card based on RFID further includes a probe card. An electronic tag is installed on the probe card, and the electronic tag is used to store the information of the probe card. The probe card is fixedly installed on the carrier through a positioning pin.

4. A test head capable of reading pin card information based on RFID according to claim 1, characterized in that, The shielding cover is made of an aluminum matrix composite material for casting, and the surface of the aluminum matrix composite material is coated with an electromagnetic wave shielding coating.

5. A test head capable of reading pin card information based on RFID according to claim 1, characterized in that, The aluminum matrix composite material is an SiC-reinforced aluminum matrix composite material, and the preparation method is specifically as follows: Take aluminum alloy and melt it at 750 °C until it is completely melted and keep it warm for 10 min, then cool it down to 620 °C. The aluminum melt is in a semi-solid state, add 2.5 wt% of SiC particles and stir evenly to obtain the SiC-reinforced aluminum matrix composite material.

6. The test head capable of reading the information of the pin card based on RFID according to claim 1, wherein, The preparation method of the electromagnetic wave shielding coating is specifically as follows: Obtain TiC particles and aluminum powder in a mass ratio of 1:4, and use rosin to mix and blend the TiC particles and aluminum powder to obtain the electromagnetic wave shielding coating.

7. A test head capable of reading pin card information based on RFID according to claim 1, characterized in that The system based on RFID for reading needle card information further includes an electronic tag processing system, which is installed on a computer device connected to a number of RFID readers and is used for: 1) Configuring the working parameters of the RFID reader and the antenna; 2) Obtaining and identifying the electronic tag information sent by the RFID reader and being able to automatically write it into the file generated by the test; 3) Modifying the information in the electronic tag through the RFID reader and the antenna.

8. A test head capable of reading pin card information based on RFID according to claim 1, characterized in that, The electronic tag information is in the format of an EPC code, and the EPC code is represented in hexadecimal or ASCII code.

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