Radio frequency probe card

Abstract

The invention discloses a radio frequency probe card, and relates to the technical field of probe cards. The radio frequency probe card comprises a substrate, the substrate is connected with a PCB, and one end, far away from the substrate, of the PCB is provided with a connecting ring; a mounting groove is formed in the substrate, a connecting block is mounted in the mounting groove, the connecting block is connected with a radio frequency probe piece, an accommodating groove is formed in the PCB, and the radio frequency probe piece is arranged in the accommodating groove in a penetrating manner and extends into the connecting ring; the PCB is further connected with a direct-current probe piece, the direct-current probe piece also extends into the connecting ring, and the substrate is further provided with a connector connected with the PCB. A test area is formed on one side, far away from the PCB, of the connecting ring; and one end, far away from the substrate, of the radio frequency probe piece and one end, far away from the PCB, of the direct current probe piece extend into the test area. The test efficiency can be improved.

Description

Technical Field

[0001] The present application relates to the technical field of probe cards, and in particular to a radio frequency probe card. Background Art

[0002] With the rapid development of semiconductor technology, chip integration continues to increase, and the requirements for integrated circuit testing are becoming increasingly stringent. As the key interface between automatic test equipment and semiconductor wafers, probe cards play an indispensable role in electrical performance testing of chips before packaging. By contacting the probes with the pads or bumps on the wafer surface, they transmit test signals and thus determine the chip's electrical performance.

[0003] Typically, testing of some existing chips requires not only RF signal testing but also DC signal testing.

[0004] There are various types of probe cards on the market. For the above two tests, common applications include RF probe cards and DC probe cards. The RF probe card includes a substrate and multiple RF probe parts installed on the substrate. The RF probe parts include connected female heads and RF test needles, while the DC probe card includes a board body and multiple DC probe parts installed on the board body. In order to complete the above two tests, during the test, both probe cards need to be installed on the test machine, and the female head needs to be connected to the external male head and the DC probe parts need to be connected to the PCB board. It is also necessary to install a connector on the PCB so that the PCB can be connected to the test machine. Subsequently, multiple tests of the two probe cards need to be completed in a certain order with manual cooperation and adjustment.

[0005] Users hope to integrate RF and DC probes into a single component to improve test efficiency. When performing separate RF and DC signal tests on chips, because some chips are small and the contact points are close together, the two probe cards must be constantly disassembled and assembled, or their positions adjusted to ensure the probe card tips contact the chip test points at a specific angle. This requires a lot of manual effort and results in low test efficiency. Summary of the Invention

[0006] In order to improve testing efficiency, the present application provides a radio frequency probe card.

[0007] The radio frequency probe card provided in this application adopts the following technical solution: A radio frequency probe card includes a substrate, the substrate is connected to a PCB board, and a connecting ring is provided at one end of the PCB board away from the substrate; a mounting groove is formed on the substrate, a connecting block is installed in the mounting groove, and a radio frequency probe component is connected to the connecting block; a receiving groove is formed on the PCB board, and the radio frequency probe component is inserted into the receiving groove and extends into the connecting ring; a direct current probe component is also connected to the PCB board, and the direct current probe component also extends into the connecting ring; a connector connected to the PCB board is also installed on the substrate; a test area is formed on the side of the connecting ring away from the PCB board, and both the end of the radio frequency probe component away from the substrate and the end of the direct current probe component away from the PCB board extend into the test area.

[0008] By adopting the above technical solution, in this application, the RF probe component and the DC probe component are combined into one probe card through a reasonable structural design, and it can also ensure that: the PCB board can be connected to the test machine through a connector, the DC probe component is connected to the PCB and the test contact end can be located within the test area, and the RF probe component can be connected to the test machine and the test contact end can also be located within the test area; during testing, in response to different test requirements, such as when the chip is small, it is only necessary to fine-tune the shape of the RF probe component and the DC probe component located in the test area to meet the test requirements. This application improves test efficiency by integrating the RF probe component and the DC probe component into one component.

[0009] Preferably, the radio frequency probe component includes a connecting female head, a supporting portion and a needle head connected in sequence, the connecting female head is connected to the connecting block, the supporting portion is connected to the connecting ring, and the needle head is located in the test area; the connecting block and the mounting groove are detachably connected, and the connecting ring and the substrate are also detachably connected.

[0010] Preferably, a first connecting hole is provided on the connecting ring, a receiving hole is provided on the PCB board, and a second connecting hole is provided on the base board. The first connecting hole and the second connecting hole are detachably connected to each other with a fastener, and the fastener is passed through the receiving hole.

[0011] By adopting the above technical solution, the connecting ring and the PCB board can be separated by disassembling the fastener.

[0012] Preferably, the installation slot is provided with a connecting slot, the connecting slot is slidably connected to a resist block, a pressing spring is commonly connected between the resist block and the connection slot, and the connecting block is pressed tightly into the installation slot by the pressing spring.

[0013] By adopting the above technical solution, the connection block together with the radio frequency probe card can be directly disassembled to replace the radio frequency probe component.

[0014] Preferably, the DC probe component has deformation capability; the DC probe component includes a first connecting part, a second connecting part and a needle tip part connected to each other, the first connecting part is connected to the PCB board at one end away from the second connecting part, the second connecting part is fixedly connected to a ring body, the connecting ring has an accommodating hole, the ring body is detachably connected to the accommodating hole, and the needle tip part is located in the test area.

[0015] By adopting the above technical solution, the DC probe component with this structure can be easily connected to the PCB board and the detection contact end can be located within the test area.

[0016] Preferably, the accommodating hole is provided with an annular groove, an inflatable part is installed in the annular groove, and the connecting ring is further provided with an air inlet channel, the air inlet channel is communicated with the interior of the inflatable part, and the inflatable part can clamp the ring body after expansion.

[0017] By adopting the above technical solution, the air inlet channel is inflated by an external air source so that the inflatable member can be expanded to clamp or loosen the ring body.

[0018] Preferably, the accommodating hole is installed with a transparent ring plate, and a thermal expansion ring is also provided in the accommodating hole between the transparent ring plate and the ring body. One end of the thermal expansion ring is connected to the ring body, and the other end is connected to the transparent ring plate. The second connecting part is passed through the transparent ring plate. The thermal expansion ring can drive the ring body to move after thermal expansion, thereby driving the second connecting part to move and then driving the needle tip to move.

[0019] By adopting the above technical solution, when the air expansion piece does not clamp the ring body, the ring body can be moved by heating the heat expansion ring to expand the heat expansion ring, and the position of the needle tip is finely adjusted.

[0020] Preferably, the second connecting portion and the ring body are an integrally formed part cast by resin.

[0021] Preferably, a through observation slot is provided on the substrate, and the observation slot is used to facilitate observation of the test area.

[0022] By adopting the above technical solution, the arrangement of the RF probe components and the DC probe components in the test area can be easily observed through the observation slot to meet the test requirements.

[0023] Preferably, a first docking hole is provided on the substrate, a second docking hole is provided on the PCB board, and the first docking hole and the second docking hole are detachably connected to a locking piece.

[0024] In summary, the present invention includes at least one of the following beneficial technical effects: 1. In this application, a rational structural design is employed to combine an RF probe component and a DC probe component onto a single probe card. This design also ensures that: the PCB can be connected to a tester via a connector, the DC probe component can be connected to the PCB with its test contact terminals located within the test area, and the RF probe component can be connected to the tester with its test contact terminals also located within the test area. During testing, to meet varying test requirements, such as for smaller chips, only minor adjustments to the configuration of the RF and DC probe components within the test area are required. 2. In this application, the PCB board, connecting ring, and connecting block with RF probe components can be disassembled for maintenance or replacement; 3. When the ring body is not clamped by the gas expansion piece, the ring body can be moved by heating the heat expansion ring to expand it, and the position of the needle tip can be fine-tuned. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a schematic diagram of the overall structure of a radio frequency probe card in an embodiment of the present application; Figure 2 It is a schematic diagram for reflecting the overall structure of the connecting ring; Figure 3 is a main cross-sectional view of a radio frequency probe card; Figure 4 yes Figure 3 Enlarged view of part A; Figure 5 It is a cross-sectional view for showing a radio frequency probe component; Figure 6 It is a cross-sectional view used to reflect the connection groove; Figure 7 yes Figure 3 Enlarged view of part B; Figure 8 It is a partial cross-sectional view used to illustrate the thermal expansion ring.

[0026] Markings in the accompanying drawings: 1. Base plate; 11. Docking hole 1; 12. Locking piece; 13. Second connecting hole; 14. Mounting slot; 141. Connecting slot; 142. Retaining block; 143. Retaining spring; 15. Connecting block; 16. RF probe component; 161. Connecting female connector; 162. Supporting part; 163. Needle; 17. Connector; 2. PCB board; 21. Receiving hole; 22. Receiving slot; 23. DC probe component; 231. First connecting part; 232. Second connecting part; 233. Needle tip; 234. Ring body; 3. Connecting ring; 31. First connecting hole; 32. Fastener; 33. Receiving hole; 331. Ring groove; 332. Inflatable component; 34. Air inlet channel; 4. Test area; 5. Transparent ring plate; 6. Thermal expansion ring; 7. Gap; 8. Observation slot. DETAILED DESCRIPTION

[0027] The present invention will be further described in detail below with reference to the accompanying drawings.

[0028] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention.

[0029] The embodiment of the present application discloses a radio frequency probe card, which is used to integrate a radio frequency probe component and a direct current probe component into one component to improve test efficiency.

[0030] Reference Figure 1 and Figure 2 A radio frequency probe card includes a substrate 1, the lower end of the substrate 1 is detachably connected to a PCB board 2, a connecting ring 3 is provided at the lower end of the PCB board 2 and the connecting ring 3 can be separated from the PCB board 2, the connecting ring 3 is step-shaped, and the connecting ring 3 is detachably connected to the substrate 1.

[0031] Reference Figure 1 and Figure 2 Specifically, a docking hole 11 is opened on the substrate 1, and a docking hole 2 is opened on the PCB board 2. The docking hole 11 and the docking hole 2 are detachably connected to a locking piece 12 and a fastener 32 such as a screw.

[0032] Reference Figure 3 A connector 17 is also installed on the substrate 1. The connector 17 is connected to the PCB board 2. The connector 17 is used to connect to the tester. The connector 17 includes a connection port at the upper end. The specific structure of the connector 17 is prior art and will not be described here.

[0033] Reference Figure 3 and Figure 4 The connecting ring 3 has a first connecting hole 31, the PCB 2 has a receiving hole 21, and the base plate 1 has a second connecting hole 13. A fastener 32, such as a screw, is detachably connected to the first and second connecting holes 31 and 13. After the fastener 32 and the locking member 12 are removed, the connecting ring 3 and the PCB 2 can be removed for replacement or maintenance.

[0034] Reference Figure 1 and Figure 2A test area 4 is formed on the side of the connecting ring 3 away from the PCB board 2. A through mounting slot 14 is formed on the base plate 1. In this embodiment, there are two mounting slots 14. Each mounting slot 14 is installed with a connecting block 15. Each connecting block 15 is connected to a radio frequency probe 16. The specific number of radio frequency probes 16 depends on the actual test requirements. Typically, in this embodiment, two radio frequency probes 16 are provided on the upper connecting block 15, while only one radio frequency probe 16 is provided on the lower connecting block 15.

[0035] Reference Figure 2 and Figure 5 Taking the structure of a radio frequency probe component 16 on a connecting block 15 as an example: a receiving slot 22 is opened on the PCB board 2, and the radio frequency probe component 16 is installed in the receiving slot 22 and extends into the connecting ring 3 to connect with the connecting ring 3. The lower end of the radio frequency probe component 16 also extends into the test area 4. Specifically, the radio frequency probe component 16 includes a female connector 161, a support portion 162, and a needle 163 connected in sequence from top to bottom. The female connector 161 is used for external male connector connection. The female connector 161 is connected to the connecting block 15. The female connector 161 and the connecting block 15 are integrally formed by resin casting. The support portion 162 is connected to the connecting ring 3. The needle 163 is located in the test area 4. The specific shape of the needle 163 is determined based on actual test requirements.

[0036] Reference Figure 6 To meet more testing requirements, the connection block 15 is detachably connected to the mounting slot 14. Specifically, the mounting slot 14 has a connection slot 141, to which a stopper 142 is slidably connected. A pressure spring 143 is connected between the end of the stopper 142, which is away from the mounting slot 14, and the bottom of the connection slot 141. The pressure spring 143 presses the connection block 15 tightly against the mounting slot 14. The connection block 15 can be inserted into the mounting slot 14 and can be removed from the mounting slot 14.

[0037] Reference Figure 3 and Figure 7 , a plurality of DC probes 23 are further connected to the PCB board 2, and each DC probe 23 also extends into the connecting ring 3. The DC probe 23 has a certain degree of deformation ability, and the material is, for example, phosphor bronze, beryllium copper, and silicon-based composite materials.

[0038] Reference Figure 7Specifically, taking one of the DC probe parts 23 as an example, the DC probe part 23 includes a first connecting part 231, a second connecting part 232 and a needle tip part 233 connected in sequence from top to bottom, the second connecting part 232 is vertically arranged, the first connecting part 231 and the needle tip part 233 are both inclined to the second connecting part 232, the end of the first connecting part 231 away from the second connecting part 232 is connected to the PCB board 2, the second connecting part 232 is fixedly connected to the ring body 234, the second connecting part 232 and the ring body 234 are an integrally molded part cast by resin, the connecting ring 3 has a accommodating hole 33, the ring body 234 is detachably connected to the accommodating hole 33, the ring body 234 can rotate or move relative to the accommodating hole 33, and the needle tip part 233 is located in the test area 4.

[0039] Reference Figure 7 and Figure 8 In order to ensure the reliable position of the DC probe part 23, the accommodating hole 33 is provided with an annular groove 331, and the annular groove 331 is installed with an inflatable part 332. The connecting ring 3 also has an air inlet channel 34, which is connected to the inside of the inflatable part 332. The inflatable part 332 can clamp the ring body 234 after expansion.

[0040] Reference Figure 7 and Figure 8 In order to be able to fine-tune the position of the needle tip 233 in the vertical direction, a transparent ring plate 5 is installed in the accommodating hole 33. A thermal expansion ring 6 is also provided in the accommodating hole 33 between the transparent ring plate 5 and the ring body 234. The upper end of the thermal expansion ring 6 is connected to the ring body 234, and the lower end of the thermal expansion ring 6 is connected to the transparent ring plate 5. The second connecting part 232 is penetrated by the transparent ring plate 5. There is a gap 7 between the second connecting part 232 and the transparent ring plate 5. The gap 7 is used to ensure that the thermal expansion ring 6 can expand reliably. After the thermal expansion ring 6 expands due to heat, it can drive the ring body 234 to move upward, thereby driving the second connecting part 232 to move upward and then driving the needle tip 233 to move upward.

[0041] In actual testing, the consistency of the multiple needle tips 233, or the degree of coplanarity of the multiple needle tips 233, affects test accuracy. The error typically needs to be controlled within ±2 microns. Manually applying force to adjust the deformation is difficult, even with a micro-manipulator. In this application, materials with different thermal expansion coefficients can be used to achieve different deformation ranges for the thermal expansion ring 6 to meet varying adjustment requirements, thus enabling extremely subtle position adjustments.

[0042] The fine-tuning operation is as follows: when the pneumatic expansion member 332 is not clamping the ring body 234, an external heating device, such as a laser heating device, is used to irradiate the thermal expansion ring 6, causing it to expand and thereby move the ring body 234 upward. At this point, the second connecting portion 232 and the needle tip portion 233 are adjusted upward. By adjusting the upward movement of the multiple needle tips 233, the required coplanarity of the multiple needle tips 233 is achieved. Subsequently, by injecting air into the air inlet channel 34, the pneumatic expansion member 332 can clamp the ring body 234. It should be noted that due to the elastic properties and bending structure of the DC probe member 23 itself, the ring body 234 will be pressed against the thermal expansion ring 6 when it moves upward.

[0043] It is necessary to pay attention to the rationality of the materials of the thermal expansion component and the DC probe component 23. For example, when the material of the DC probe component 23 is phosphor bronze, when the temperature of the phosphor bronze rises to a certain value, it will directly cause the DC probe component 23 to fail in the test. At this time, the thermal expansion component cannot be made of a material with a higher thermal deformation starting temperature.

[0044] In the present application, in order to facilitate the arrangement of more RF probe components 16 and DC probe components 23, in a top view, multiple needles 163 and multiple needle tips 233 are distributed in a surrounding manner within the test area 4, and the specific surrounding method is determined based on actual test requirements.

[0045] Reference Figure 5 and Figure 6 In order to facilitate observation of the distribution of the multiple needles 163 and the multiple needle tips 233 in the test area 4, a penetrating observation slot 8 is opened on the base plate 1, and the observation slot 8 extends to the connecting ring 3. The observation slot 8 is used to facilitate workers or external detection devices to observe the test area 4, such as a CCD camera.

[0046] The implementation principle of a radio frequency probe card in an embodiment of the present application is as follows: before using the present application for testing, the distribution of multiple needles 163 and multiple needle tips 233 can be observed through the observation slot 8, and the top-view state of the multiple needles 163 and multiple needle tips 233 can be fine-tuned based on the distribution; for coplanarity, when the air expansion member 332 does not clamp the ring body 234, the heat expansion ring 6 is irradiated by an external heating device such as a laser heating device to expand the heat expansion ring 6 so that the ring body 234 moves upward. At this time, the second connecting portion 232 and the needle tip 233 are adjusted upward. By adjusting the upward movement of the multiple needle tips 233, the coplanarity of the multiple needle tips 233 can meet the requirements, and subsequently, the air expansion member 332 can clamp the ring body 234 by injecting air into the air inlet channel 34.

[0047] The embodiments of this specific implementation method are all preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Therefore, any equivalent changes made based on the structure, shape, and principle of the present invention should be included in the scope of protection of the present invention.

Claims

1. A radio frequency probe card, characterized in that: The invention comprises a base plate (1), wherein the base plate (1) is connected to a PCB (2), and a connecting ring (3) is provided at one end of the PCB (2) away from the base plate (1); a mounting groove (14) is provided on the base plate (1), a connecting block (15) is installed in the mounting groove (14), and a radio frequency probe component (16) is connected to the connecting block (15); a receiving groove (22) is provided on the PCB (2), and the radio frequency probe component (16) is passed through the receiving groove (22) and extends to the connecting ring (3) The PCB board (2) is also connected to a DC probe member (23), and the DC probe member (23) also extends into the connecting ring (3). The substrate (1) is also mounted with a connector (17) connected to the PCB board (2). A test area (4) is formed on a side of the connecting ring (3) away from the PCB board (2), and an end of the radio frequency probe member (16) away from the substrate (1) and an end of the DC probe member (23) away from the PCB board (2) both extend into the test area (4).

2. The radio frequency probe card according to claim 1, wherein: The radio frequency probe component (16) comprises a connecting female head (161), a supporting portion (162), and a needle head (163) connected in sequence, wherein the connecting female head (161) is connected to the connecting block (15), the supporting portion (162) is connected to the connecting ring (3), and the needle head (163) is located in the test area (4); the connecting block (15) and the mounting groove (14) are detachably connected, and the connecting ring (3) and the base plate (1) are also detachably connected.

3. The radio frequency probe card according to claim 2, wherein: The connecting ring (3) is provided with a first connecting hole (31), the PCB board (2) is provided with a receiving hole (21), and the base plate (1) is provided with a second connecting hole (13). The first connecting hole (31) and the second connecting hole (13) are detachably connected to each other with a fastener (32), and the fastener (32) is inserted into the receiving hole (21).

4. The radio frequency probe card according to claim 2, wherein: The installation groove (14) is provided with a connecting groove (141), the connecting groove (141) is slidably connected to a stop block (142), a pressing spring (143) is commonly connected between the stop block (142) and the connection groove (141), and the connecting block (15) is pressed tightly into the installation groove (14) by the pressing spring (143).

5. The radio frequency probe card according to claim 2, wherein: The DC probe part (23) has a deformable capability; the DC probe part (23) comprises a first connecting part (231), a second connecting part (232) and a needle tip part (233) connected to each other; one end of the first connecting part (231) away from the second connecting part (232) is connected to the PCB board (2); the second connecting part (232) is fixedly connected to a ring body (234); the connecting ring (3) is provided with an accommodating hole (33); the ring body (234) is detachably connected to the accommodating hole (33); and the needle tip part (233) is located in the test area (4).

6. The radio frequency probe card according to claim 5, characterized in that: The accommodating hole (33) is provided with an annular groove (331), and an inflatable part (332) is installed in the annular groove (331). The connecting ring (3) is also provided with an air inlet channel (34), and the air inlet channel (34) is communicated with the interior of the inflatable part (332). The inflatable part (332) can clamp the ring body (234) after expansion.

7. The radio frequency probe card according to claim 6, characterized in that: The accommodating hole (33) is provided with a transparent ring plate (5), and a thermal expansion ring (6) is provided between the transparent ring plate (5) and the ring body (234) in the accommodating hole (33). One end of the thermal expansion ring (6) is connected to the ring body (234), and the other end is connected to the transparent ring plate (5). The second connecting portion (232) is passed through the transparent ring plate (5). The thermal expansion ring (6) can expand under heat to drive the ring body (234) to move, thereby driving the second connecting portion (232) to move and then driving the needle tip (233) to move.

8. The radio frequency probe card according to claim 5, characterized in that: The second connecting portion (232) and the ring body (234) are integrally formed parts by resin casting.

9. The radio frequency probe card according to claim 1, wherein: The base plate (1) is provided with a through observation slot (8), and the observation slot (8) is used to facilitate observation of the test area (4).

10. The radio frequency probe card according to claim 1, characterized in that: The base plate (1) is provided with a first docking hole (11), and the PCB board (2) is provided with a second docking hole. The first docking hole (11) and the second docking hole are detachably connected to a locking piece (12).

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