Laser direct imaging closed-loop real-time detection system and closed-loop real-time detection method

Abstract

The present invention discloses a laser direct imaging closed-loop real-time detection system and a closed-loop real-time detection method, comprising: a light source module; a light spot uniformity mechanism, used to uniformize the light spot output by the light source module; a spatial light modulator, used to convert a digital signal into an optical signal; a photolithography objective lens, used as an imaging element to generate an image with the modulated light spot; a first beam splitter reflector, used to divide the image into a transmission output acting on the material to be exposed and another reflection output as a detection signal; a data acquisition device, corresponding to the reflection output end of the first beam splitter reflector to collect images. By setting the beam splitter reflector, the image is divided into a reflection output and a transmission output, the transmission output inherits the original exposure function, and the reflection output cooperates with the data acquisition device to detect the imaging quality and imaging effect in real time, and the collected image can be used to compare the original image and make a judgment, thereby forming a closed-loop control of laser direct imaging.

Description

Technical Field

[0001] The present invention relates to the application field of laser direct imaging (LDI) equipment, and in particular to a laser direct imaging closed-loop real-time detection system and a closed-loop real-time detection method. Background Art

[0002] Laser direct imaging (LDI) equipment uses laser scanning to directly image on the PCB, which is more detailed than the traditional method. The usual working mode is: the light spot emitted by the light source passes through the beam shaping system, DMD spatial light modulator image processing, photolithography objective lens, and finally acts on the material surface. In the whole system, the image processing DMD and imaging system determine the image quality of the material surface, but there are uncertainties in whether the image is correct and the image quality. Summary of the invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a laser direct imaging closed-loop real-time detection system and a closed-loop real-time detection method, which can detect the imaging quality and imaging effect in real time.

[0004] According to the first aspect of the present invention, a laser direct imaging closed-loop real-time detection system includes: a light source module; a spot uniformity mechanism for uniformizing the light spot output by the light source module; a spatial light modulator for converting a digital signal into an optical signal; a lithography objective lens, as an imaging element, generating an image with the modulated light spot; a first beam splitter reflector, for dividing the image into a transmission output acting on a material to be exposed and a reflection output as a detection signal; a data acquisition device, corresponding to the reflection output end of the first beam splitter reflector to acquire image and brightness data and generate a graphic file signal; a graphic processing server, for converting the graphic file signal into spatial light modulator working data and outputting it to the spatial light modulator.

[0005] According to some embodiments of the first aspect of the present invention, the light source module adopts a multi-spectrum light source composed of one or more light sources arranged in a line.

[0006] According to some embodiments of the first aspect of the present invention, the light spot uniformity mechanism includes a total reflection mirror and one or more second beam splitting mirrors, the second beam splitting mirrors correspond one-to-one to the light source, and the total reflection mirror is arranged between the one or more second beam splitting mirrors and the spatial light modulator.

[0007] According to some embodiments of the first aspect of the present invention, the data acquisition device is a linear array CCD.

[0008] According to the second aspect of the present invention, a laser direct imaging closed-loop real-time detection system includes: a light source module; a spot uniformity mechanism for uniformizing the light spot output by the light source module; a spatial light modulator for converting a digital signal into an optical signal; a first beam splitter reflector for dividing the optical signal into a transmission output and a reflection output; a first photolithography objective lens, as an imaging element, generates an image of the light spot output by the first beam splitter reflector on a material to be exposed; a second photolithography objective lens, as an imaging element, generates an image for detecting a signal from the light spot output by the first beam splitter reflector; a data acquisition device for acquiring the image and brightness data output by the second photolithography objective lens and generating a graphic file signal; a graphic processing server for converting the graphic file signal into spatial light modulator working data and outputting it to the spatial light modulator.

[0009] According to some embodiments of the second aspect of the present invention, the light source module adopts a multi-spectrum light source composed of one or more light sources arranged in a line.

[0010] According to some embodiments of the second aspect of the present invention, the light spot uniformity mechanism includes a total reflection mirror and one or more second beam splitting mirrors, the second beam splitting mirrors correspond one-to-one to the light source, and the total reflection mirror is arranged between the one or more second beam splitting mirrors and the spatial light modulator.

[0011] According to some embodiments of the second aspect of the present invention, the data acquisition device is a linear array CCD.

[0012] According to an embodiment of the third aspect of the present invention, a closed-loop real-time detection method for a laser direct imaging closed-loop real-time detection system includes the following steps: a light source outputs a light spot; homogenizes the output light spot; uses a spatial light modulator to convert a digital signal into an optical signal; divides the optical signal into a reflection output and a transmission output; or divides the optical signal into a reflection output and a transmission output and then generates images respectively; collects an image of the reflection output and uploads it to a graphics server, and performs real-time detection on the real-time collected graphics; after the detection is completed, the entire graphic is accurately compared with the pre-stored original image; and a judgment is made based on the comparison result of the real-time collected graphics, and if the comparison result exceeds the set deviation threshold, a prompt for manual confirmation is given.

[0013] According to some embodiments of the third aspect of the present invention, when comparing the acquired image with the original image, if the sizes or positions of the two are inconsistent and exceed the set deviation threshold between the acquired image and the original image, an alarm is issued to prompt manual judgment.

[0014] The laser direct imaging closed-loop real-time detection system and closed-loop real-time detection method according to the above-mentioned embodiments of the present invention have at least the following beneficial effects: by setting a beam splitter, the image is divided into a reflection output and a transmission output, the transmission output inherits the original exposure function, and the reflection output cooperates with the data acquisition device to detect the imaging quality and imaging effect in real time, and the collected image can be used to compare the original image for judgment, thereby forming a closed-loop control of the laser direct imaging closed-loop real-time detection system.

[0015] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0017] Figure 1 It is a schematic diagram of the principle of a laser direct imaging closed-loop real-time detection system according to the first embodiment of the present invention;

[0018] Figure 2 It is a schematic diagram of the principle of a laser direct imaging closed-loop real-time detection system according to a second embodiment of the present invention;

[0019] Figure 3 This is a closed-loop detection control flow chart of a laser direct imaging closed-loop real-time detection system according to the third embodiment of the present invention.

[0020] Reference numerals:

[0021] Light source module 100;

[0022] Light spot uniformity mechanism 200, total reflection mirror 210, second beam splitting reflection mirror 220;

[0023] A spatial light modulator 300;

[0024] A photolithography objective lens 400, a first photolithography objective lens 410, and a second photolithography objective lens 420;

[0025] A first beam splitting reflector 500;

[0026] Data acquisition device 600;

[0027] Exposure material 700;

[0028] Graphics processing server 800. DETAILED DESCRIPTION

[0029] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0030] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., and orientations or positional relationships indicated are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0031] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0032] refer to Figure 1 , a laser direct imaging closed-loop real-time detection system according to an embodiment of the first aspect of the present invention, comprising: a light source module 100; a light spot uniformity mechanism 200, used to uniformize the light spot output by the light source module 100; a spatial light modulator 300, used to convert a digital signal into an optical signal; a lithography objective 400, used as an imaging element to generate an image with the modulated light spot; a first beam splitter reflector 500, used to split the image into a transmission output acting on a material to be exposed 700 and a reflection output as a detection signal, and to match the energy ratio of the separated light spots corresponding to the detection signal according to the image quality clarity of the linear array CCD; a data acquisition device 600, corresponding to the reflection output end of the first beam splitter reflector 500 to collect the image and brightness data, and generate a graphic file signal; a graphic processing server 800, used to convert the graphic file signal into spatial light modulator working data and output it to the spatial light modulator 300.

[0033] In some embodiments of the first aspect of the present invention, the light source module 100 uses a multi-spectral light source composed of one or more light sources (1-n) arranged in a line, and multiple groups of engines can form a multi-channel lithography system.

[0034] In some embodiments of the first aspect of the present invention, the light spot uniformity mechanism 200 includes a total reflection mirror 210 and a plurality of second beam splitting reflection mirrors 220 (1-n), the plurality of second beam splitting reflection mirrors 220 correspond one-to-one to the plurality of light sources, and the total reflection mirror 210 is arranged between the plurality of second beam splitting reflection mirrors 220 and the spatial light modulator 300. The multi-spectral light source (1-n) passes through the reflection mirrors 1-n, and the light beams are uniformly concentrated to the total reflection mirror 210.

[0035] In some embodiments of the first aspect of the present invention, the data acquisition device 600 is a linear array CCD, a brightness collector, or other existing known data acquisition devices or brightness acquisition devices.

[0036] A beam splitter is added between the photolithography objective 400 and the exposure material 700 to reflect a tiny portion of the image to the linear array CCD for analysis of the synchronous exposure image; the remaining majority of the light beam passes through the beam splitter and acts on the surface of the exposure material 700 to participate in the exposure work.

[0037] According to the second aspect of the present invention, a laser direct imaging closed-loop real-time detection system includes: a light source module 100; a spot uniformity mechanism 200, which is used to uniformize the light spot output by the light source module 100; a spatial light modulator 300, which converts a digital signal into an optical signal; a first beam splitter reflector 500, which is used to divide the modulated light spot into a transmission output and a reflection output; a first photolithography objective 410, which serves as an imaging element to generate an image of a material 700 to be exposed by using the light spot transmitted by the first beam splitter reflector 500; a second photolithography objective 420, which serves as an imaging element to generate an image for detecting a signal by using the light spot reflected by the first beam splitter reflector 500; a data acquisition device 600, which is used to acquire the image and brightness data output by the second photolithography objective 420 and generate a graphic file signal; and a graphic processing server 800, which is used to convert the graphic file signal into spatial light modulator working data and output it to the spatial light modulator 300.

[0038] A beam splitter mirror and another set of photolithography lenses are added between the spatial light modulator 300 and the first photolithography lens 410 to reflect a tiny portion of the image into the linear array CCD for analysis of the synchronous exposure image; the remaining majority of the light beam passes through the beam splitter mirror and acts on the surface of the exposure material 700 to participate in the exposure work.

[0039] According to an embodiment of the third aspect of the present invention, a closed-loop real-time detection method for a laser direct imaging closed-loop real-time detection system includes the following steps: a light source outputs a light spot; homogenizing the output light spot; using a spatial light modulator 300 to convert a digital signal into an optical signal; dividing the optical signal into a reflection output and a transmission output; or generating images of the reflection output and the transmission output of the optical signal respectively; collecting an image of the reflection output and uploading it to a graphics server, and performing real-time detection on the real-time collected graphics; after the detection is completed, accurately comparing the entire graphic with the pre-stored original image.

[0040] In some embodiments of the third aspect of the present invention, when comparing the captured image with the original image, if the two are inconsistent in size or position, the number of reflectors of the spatial light modulator 300 is supplemented for adjustment. If the number of supplemented reflectors is invalid and exceeds the set deviation threshold between the captured image and the original image, an alarm prompts manual judgment.

[0041] According to the laser direct imaging closed-loop real-time detection system and closed-loop real-time detection method of the above-mentioned embodiments of the present invention, the image is divided into reflection output and transmission output by setting a splitter reflector. The transmission output inherits the original exposure function, and the reflection output cooperates with the data acquisition device 600 to detect the imaging quality and imaging effect in real time. The collected image can be used to compare the original image and make a judgment, thereby forming a closed-loop control of the laser direct imaging closed-loop real-time detection system.

[0042] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0043] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A laser direct imaging closed-loop real-time detection system, characterized in that: include: Light source module; A light spot uniformity mechanism, used to uniformize the light spot output by the light source module; A spatial light modulator, which is used to convert digital signals into optical signals; The photolithography objective lens, as an imaging element, generates an image from the modulated light spot; A first beam splitter reflector is used to split the image into a transmission output for the material to be exposed and a reflection output as a detection signal; A data acquisition device, corresponding to the reflective output end of the first beam splitter reflector, to collect image and brightness data and generate a graphic file signal; The graphic processing server is used for converting the graphic file signal into spatial light modulator working data and outputting the data to the spatial light modulator.

2. The laser direct imaging closed-loop real-time detection system according to claim 1, characterized in that: The light source module adopts a multi-spectrum light source or a multi-spectrum light source composed of a plurality of light sources arranged in a line.

3. The laser direct imaging closed-loop real-time detection system according to claim 2, characterized in that: The light spot uniformity mechanism comprises a total reflection mirror and one or more second beam splitting reflection mirrors, the second beam splitting reflection mirrors correspond to the light sources one by one, and the total reflection mirror is arranged between the one or more second beam splitting reflection mirrors and the spatial light modulator.

4. The laser direct imaging closed-loop real-time detection system according to claim 1, characterized in that: The data acquisition device is a linear array CCD.

5. A laser direct imaging closed-loop real-time detection system, characterized in that: include: Light source module; A light spot uniformity mechanism, used to uniformize the light spot output by the light source module; A spatial light modulator, which is used to convert digital signals into optical signals; A first beam splitter reflector is used to split the modulated light spot into a transmission output and a reflection output; A first photolithography objective lens, serving as an imaging element, generates an image of the material to be exposed by transmitting the light spot output by the first beam splitting reflector; A second photolithography objective lens, serving as an imaging element, generates an image and brightness data for detecting a signal by reflecting the light spot output by the first beam splitting reflector; A data acquisition device, used for acquiring the image and brightness data output by the second photolithography objective lens, and generating a graphic file signal; The graphic processing server is used for converting the graphic file signal into spatial light modulator working data and outputting the data to the spatial light modulator.

6. The laser direct imaging closed-loop real-time detection system according to claim 5, characterized in that: The light source module adopts a multi-spectrum light source or a multi-spectrum light source composed of a plurality of light sources arranged in a line.

7. The laser direct imaging closed-loop real-time detection system according to claim 6, characterized in that: The light spot uniformity mechanism comprises a total reflection mirror and one or more second beam splitting reflection mirrors, the second beam splitting reflection mirrors correspond to the light sources one by one, and the total reflection mirror is arranged between the one or more second beam splitting reflection mirrors and the spatial light modulator.

8. The laser direct imaging closed-loop real-time detection system according to claim 5, characterized in that: The data acquisition device is a linear array CCD.

9. A closed-loop real-time detection method for a laser direct imaging closed-loop real-time detection system, characterized in that: The following steps are involved: Light source output spot; homogenizing the output light spot; Converting digital signals into optical signals using a spatial light modulator; The optical signal is further divided into a reflection output and a transmission output by a first beam splitting reflector; or the optical signal is divided into a reflection output and a transmission output and then images are generated respectively; The image and brightness data of the reflected output are collected and compared with the pre-stored original image.

10. The closed-loop real-time detection method of a laser direct imaging closed-loop real-time detection system according to claim 9, characterized in that: When comparing the acquired image with the original image, if the two are inconsistent in size or position, the number of reflectors of the spatial light modulator is supplemented to adjust the number. If the number of supplemented reflectors is invalid and exceeds the set deviation threshold between the acquired image and the original image, an alarm prompts manual judgment.

Images