A high-speed rotary joint for cooling the spindle of a silicon wafer wire saw

By designing a high-speed rotary joint with adjustable angle in the spindle cooling system of the silicon wafer wire cutting machine, the problem that the existing technology is difficult to meet the needs of diversified spindle use is solved, and better adaptability and cooling effect are achieved.

CN111152377BActive Publication Date: 2025-04-08HANGZHOU HONGSHENG INTELLIGENT TECH CO LTD
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Patent Information

Application Number
CN202010134471.7
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2020-03-02
Publication Date
2025-04-08
Estimated Expiration
2040-03-02

AI Technical Summary

Technical Problem

The existing rotary joints are difficult to meet the diversified use of the spindle of the silicon wafer wire cutting machine, and lack the function of adjustable angles.

Method used

A high-speed rotary joint for cooling the spindle of the silicon wafer wire cutting machine is designed. By installing the first and second shells on the hollow shaft, and a water inlet, water outlet, water barrier ring and mechanical sealing mechanism are provided to realize the misalignment of the left and right rotation shafts and upper and lower rotations of the hollow shaft and the spindle, and has the function of adjustable angles.

Benefits of technology

This rotary joint can meet the needs of more use of silicon wafer wire cutting machine spindle, has good adaptability, and ensures the effective use of cooling water through mechanical sealing mechanism and water barrier ring.

✦ Generated by Eureka AI based on patent content.

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    Figure CN111152377B_ABST
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Abstract

The present invention discloses a high-speed rotary joint for cooling the spindle of a silicon wafer wire saw, comprising a hollow shaft, wherein the spindle is movably arranged inside the hollow shaft, a first shell is arranged outside one end of the hollow shaft, and a second shell is arranged outside one end of the hollow shaft away from the first shell. The present invention sleeves the spindle inside the hollow shaft, and then respectively installs the first shell and the second shell on the hollow shaft, and the water inlet and the water outlet are also respectively installed on the first shell and the second shell. When in use, the shaft can be rotated left and right through the connection between the hollow shaft and the spindle, and then the upper and lower offset rotation can be achieved through the connection between the hollow shaft and the first shell and the second shell, that is, the effect of the shaft rotating while the shell does not rotate is achieved, so that the rotary joint has an effect of adjustable angle, so that the rotary joint can meet more use requirements of the spindle of the silicon wafer wire saw, so that the rotary joint has good adaptability.
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Description

Technical Field

[0001] The invention belongs to the field of rabbit breeding boxes, and in particular relates to a high-speed rotary joint for cooling the spindle of a silicon wafer wire saw. Background Art

[0002] A rotary joint refers to a medium: water, working speed: 3300rpm, working temperature: 70℃, working pressure: 7MPa, filter diameter: 60um. The rotary joint supports a design structure that transmits water in multiple channels at the same time. It adopts flange connection and is effectively integrated into customer equipment. Types of rotary joints: hydraulic rotary joints, high-pressure rotary joints, multi-channel rotary joints, high-speed rotary joints, high-temperature rotary joints, single-channel rotary joints, special rotary joints, LED special rotary joints, excavator special rotary joints and machine tool special rotary joints. With the development of various fields, the use of rotating structures has become more extensive. Therefore, the demand for an angle-adjustable rotary joint is growing. Summary of the invention

[0003] The present invention provides a high-speed rotary joint for cooling a spindle of a silicon wafer wire saw, aiming to solve the problems raised in the above-mentioned background technology.

[0004] The present invention is achieved in this way. A high-speed rotary joint for cooling the spindle of a silicon wafer wire cutting machine comprises a hollow shaft, a spindle is movably arranged inside the hollow shaft, a first shell is arranged on the outside of one end of the hollow shaft, a second shell is arranged on the outside of one end of the hollow shaft away from the first shell, a water inlet is arranged on the top of the first shell, a water outlet is arranged on the top of the second shell, a water isolating ring is arranged between the inner sides of the first shell and the second shell, mechanical sealing mechanisms are arranged at both ends of the water isolating ring inside the first shell and the second shell, L-shaped sealing rings are arranged on the outside of the mechanical sealing mechanism at the bottom ends of the water inlet and the water outlet, deep groove ball bearings are arranged on the outside of the hollow shaft at one end inside the first shell and the second shell, retaining rings are arranged on the outside of the deep groove ball bearings inside the first shell and the second shell, an O-ring is arranged between one end of the first shell and the second shell, hexagon socket screws are installed on the outer surfaces of the second shell and the outer end of the spindle, and silencers are arranged on the outer surfaces of the first shell and the second shell.

[0005] Preferably, the mechanical sealing mechanism includes a sealing ring, a spring, a pressure block, a receiving ring and a clutch block. A sealing ring is provided on the outside of the hollow shaft at one end inside the first shell and the second shell, a spring is provided at one end of the sealing ring, a pressure block is fixedly provided at the end of the spring away from the sealing ring, a receiving ring is fixedly provided on the side of the pressure block away from the spring, and a clutch block is fixedly provided on the side of the receiving ring away from the pressure block.

[0006] Preferably, washers are provided on the inner sides of the hexagon socket screws.

[0007] Preferably, the water isolating ring is made of graphite.

[0008] Preferably, the O-ring is made of rubber.

[0009] Compared with the prior art, the present invention has the following beneficial effects:

[0010] The present invention sleeves the main shaft inside the hollow shaft, and then installs the first shell and the second shell on the hollow shaft respectively, and the water inlet and the water outlet are also installed on the first shell and the second shell respectively. When in use, the shaft can be rotated left and right through the connection between the hollow shaft and the main shaft, and the upper and lower offset rotation can be achieved through the connection between the hollow shaft and the first shell and the second shell, that is, the effect of the shaft rotating without the shell rotating is achieved, so that the rotary joint has the effect of adjustable angle, so that the rotary joint can meet more usage requirements of the silicon wafer wire cutting machine spindle, so that the rotary joint has good adaptability. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a cross-sectional view of a front view of a high-speed rotary joint for cooling the spindle of a silicon wafer wire sawing machine according to the present invention;

[0012] Figure 2 It is a schematic diagram of the side structure of a high-speed rotary joint for cooling the spindle of a silicon wafer wire sawing machine according to the present invention;

[0013] Figure 3 The present invention is a three-dimensional diagram of the structure of a high-speed rotary joint for cooling the spindle of a silicon wafer wire saw.

[0014] In the figure: 1. hollow shaft; 2. main shaft; 3. first shell; 4. second shell; 5. water inlet; 6. water outlet; 7. water isolating ring; 8. mechanical sealing mechanism; 9. L-shaped sealing ring; 10. deep groove ball bearing; 11. retaining ring; 12. O-ring; 13. hexagon socket screw; 14. sealing ring; 15. spring; 16. pressure block; 17. receiving ring; 18. clutch block; 19. gasket; 20. muffler. DETAILED DESCRIPTION

[0015] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0016] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, in the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined.

[0017] See also Figure 1-3 A high-speed rotary joint for cooling the spindle of a silicon wafer wire sawing machine comprises a hollow shaft 1, a spindle 2 is movably arranged inside the hollow shaft 1, a first shell 3 is arranged outside one end of the hollow shaft 1, a second shell 4 is arranged outside one end of the hollow shaft 1 away from the first shell 3, a water inlet 5 is arranged on the top of the first shell 3, a water outlet 6 is arranged on the top of the second shell 4, a water isolating ring 7 is arranged between the inner sides of the first shell 3 and the second shell 4, a mechanical sealing mechanism 8 is arranged at both ends of the water isolating ring 7 inside the first shell 3 and the second shell 4, An L-shaped sealing ring 9 is provided at the bottom of the water inlet 5 and the water outlet 6 on the outside of the mechanical sealing mechanism 8, a deep groove ball bearing 10 is provided at one end inside the first shell 3 and the second shell 4 on the outside of the hollow shaft 1, a retaining ring 11 is provided inside the first shell 3 and the second shell 4 on the outside of the deep groove ball bearing 10, an O-ring 12 is provided between one end of the first shell 3 and the second shell 4, an inner hexagon screw 13 is installed on the outer surface of the second shell 4 and one end of the main shaft 2, and a muffler 20 is provided on the outer surface of the first shell 3 and the second shell 4.

[0018] The mechanical sealing mechanism 8 described in the present invention includes a sealing ring 14, a spring 15, a pressure block 16, a receiving ring 17 and a clutch block 18. A sealing ring 14 is provided at one end of the first shell 3 and the second shell 4 on the outside of the hollow shaft 1, and a spring 15 is provided at one end of the sealing ring 14. A pressure block 16 is fixedly provided at one end of the spring 15 away from the sealing ring 14, and a receiving ring 17 is fixedly provided on the side of the pressure block 16 away from the spring 15. A clutch block 18 is fixedly provided on the side of the receiving ring 17 away from the pressure block 16. The mechanical sealing mechanism 8 composed of the above component structure can complete the sealing between the first shell 3, the second shell 4 and the hollow shaft 1.

[0019] In the present invention, a washer 19 is disposed inside the hexagon socket screw 13 , and the washer 19 is used to prevent the surfaces of the second housing 4 and the main shaft 2 from being worn when the hexagon socket screw 13 rotates.

[0020] The material of the water isolating ring 7 in the present invention is graphite, and the water isolating ring 7 made of graphite has good wear resistance.

[0021] The material of the O-ring 12 in the present invention is rubber, and the O-ring 12 made of rubber also has good wear resistance.

[0022] The working principle of the present invention is as follows: the hollow shaft 1 is placed inside the first shell 3 and the second shell 4, and both ends of the hollow shaft 1 need to extend to the outside of the first shell 3 and the second shell 4. The mechanical sealing mechanism 8 is installed between the first shell 3, the second shell 4 and the second shell 4. The sealing between the first shell 3, the second shell 4 and the second shell 4 is completed by various components in the mechanical sealing mechanism 8. One side of the mechanical sealing mechanism 8 is connected to the L-shaped sealing ring 9. The effect of the water-isolating ring 7 is to separate the water inlet 5 and the water outlet 6. The above is the effect provided by the main structure of the rotary joint, which is used to ensure the normal connection effect of the rotary joint. When using the rotary joint, the left and right shafts can be rotated by connecting the hollow shaft 1 and the main shaft 2, and then the upper and lower offset rotation can be realized by connecting the hollow shaft 1 and the first shell 3 and the second shell 4, that is, the effect of the shell not rotating but the shaft rotating is completed, so that the rotary joint has the effect of adjustable angle, so that the rotary joint can meet more usage requirements of the silicon wafer wire cutting machine main shaft 2, so that the rotary joint has better adaptability.

[0023] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A high-speed rotary joint for cooling the spindle of a silicon wafer wire saw, comprising a hollow shaft (1), characterized in that: A main shaft (2) is movably arranged inside the hollow shaft (1); a first shell (3) is arranged on the outside of one end of the hollow shaft (1); a second shell (4) is arranged on the outside of one end of the hollow shaft (1) away from the first shell (3); a water inlet (5) is arranged on the top of the first shell (3); a water outlet (6) is arranged on the top of the second shell (4); a water isolating ring (7) is arranged between the inner sides of the first shell (3) and the second shell (4); mechanical sealing mechanisms (8) are arranged at both ends of the water isolating ring (7) inside the first shell (3) and the second shell (4); the bottom ends of the water inlet (5) and the water outlet (6) are mechanically sealed. An L-shaped sealing ring (9) is arranged on the outside of the mechanical sealing mechanism (8); a deep groove ball bearing (10) is arranged on the outside of the hollow shaft (1) at one end inside the first housing (3) and the second housing (4); a retaining ring (11) is arranged on the outside of the deep groove ball bearing (10) inside the first housing (3) and the second housing (4); an O-ring (12) is arranged between one end of the first housing (3) and the second housing (4); a hexagon socket screw (13) is installed on the outer surface of one end of the second housing (4) and the main shaft (2); and a muffler (20) is arranged on the outer surface of the first housing (3) and the second housing (4).

2. A high-speed rotary joint for cooling the spindle of a silicon wafer wire saw according to claim 1, characterized in that: The mechanical sealing mechanism (8) comprises a sealing ring (14), a spring (15), a pressure block (16), a receiving ring (17) and a clutch block (18); a sealing ring (14) is arranged at one end inside the first shell (3) and the second shell (4) on the outside of the hollow shaft (1); a spring (15) is arranged at one end of the sealing ring (14); a pressure block (16) is fixedly arranged at one end of the spring (15) away from the sealing ring (14); a receiving ring (17) is fixedly arranged at one side of the pressure block (16) away from the spring (15); and a clutch block (18) is fixedly arranged at one side of the receiving ring (17) away from the pressure block (16).

3. The high-speed rotary joint for cooling the spindle of a silicon wafer wire saw according to claim 1, characterized in that: The inner side of the hexagon socket screw (13) is provided with a washer (19).

4. The high-speed rotary joint for cooling the spindle of a silicon wafer wire saw according to claim 1, characterized in that: The material of the water isolating ring (7) is graphite.

5. The high-speed rotary joint for cooling the spindle of a silicon wafer wire saw according to claim 1, characterized in that: The material of the O-ring (12) is rubber.

Citation Information

Patent Citations

  • High-speed rotating joint for cooling main shaft of silicon wafer wire cutting machine

    CN211762667U