Plasma surface treatment equipment and method

Abstract

The present invention discloses a plasma surface treatment device and method, the plasma surface treatment device includes a tooling assembly, characterized in that it is provided with an adsorption system: the tooling assembly includes a tooling block, the top surface of the tooling block is used to place the product workpiece to be processed, and at least one adsorption hole is provided on the tooling block at a position covered by the product workpiece; the adsorption system includes an adsorption fan, the adsorption holes on the tooling block are connected to the adsorption fan through an air path, and when the equipment is working, the product workpiece is adsorbed on the tooling block through the adsorption fan. The plasma surface treatment device and method of the present invention can effectively avoid the phenomenon that the workpiece product is blown away by the jet plasma, greatly improving the stability of production, the compliance rate of the processing results of the process and the product qualification rate of the entire production line. At the same time, the present invention also has the advantages of a wide range of applicability to product types and low transformation cost, and is suitable for popularization and use.

Description

Technical Field

[0001] The invention belongs to the technical field of automated mechanical processing, and in particular relates to a plasma surface device and method. Background Art

[0002] The technology of using low-temperature plasma to treat the surface of products to improve bonding performance has partially or completely replaced the previous dispensing processing technology in the industry. However, there is still much room for improvement in the application of this technology in actual production lines.

[0003] The 3C production industry is one of the hottest industries at present, and it is also one of the fields where new technologies are constantly developed and applied. In terms of the application of low-temperature plasma surface treatment of mobile phone screens, the equipment currently used on the production line is mostly a simple combination of an independent plasma generation system and an independent motion platform. The degree of automation is not high, and only 1-2 mobile phone screens can be processed at a time. For production lines with high output requirements, the efficiency is too low. At the same time, the existing equipment also has the following problems, including: the jet plasma airflow will blow away the workpiece; the edge of the back of the mobile phone screen (the side that does not require plasma progeny treatment) is easily corroded; the strong electricity of the plasma system and the weak electricity interference of the motion platform will cause system instability, etc. The above problems will make the yield of the production line unable to be guaranteed. Summary of the invention

[0004] The technical purpose of the present invention is to improve the plasma surface treatment process of mobile phone screens or similar products on the basis of the existing technology, and to provide a new type of plasma surface treatment equipment and method to solve some problems existing in the existing technology.

[0005] In order to achieve the above technical purpose, the present invention provides the following technical solutions:

[0006] A plasma surface treatment device, comprising a tooling assembly, characterized in that an adsorption system is provided:

[0007] The tooling assembly comprises a tooling block, the top surface of which is used to place the product workpiece to be processed, and at least one adsorption hole is provided on the tooling block at a position covered by the product workpiece;

[0008] The adsorption system includes an adsorption fan, and the adsorption holes on the tooling block are connected to the adsorption fan through an air path. When the equipment is working, the product workpiece is adsorbed on the tooling block through the adsorption fan.

[0009] Based on the above solution, further improved or preferred solutions also include

[0010] The top surface area of ​​the tooling block is smaller than the upper surface area of ​​the product workpiece. When the product workpiece is placed on the tooling block, the tooling block supports the middle of the product workpiece, so that the edges of the product workpiece are suspended.

[0011] The distance between the edge of the product workpiece and the edge of the tooling block is not less than 10 mm.

[0012] The tooling assembly is also provided with a support plate, an air circuit plate, an air circuit interface and an adapter tray, the tooling block is installed on the support plate, and the support plate is provided with a through hole at the position corresponding to the adsorption hole of the tooling block; the air circuit plate is installed under the support plate, and an air circuit groove is provided on the air circuit plate, and the air circuit groove is connected to the adsorption fan through the air circuit interface, and the adsorption holes on the tooling block are connected to the air circuit groove through the through holes on the support plate; the adapter tray is provided with workpiece grooves corresponding to the tooling blocks one by one, the top surface of the workpiece groove is open, and the bottom plate is provided with through holes, and the size of the opening on the top surface of the workpiece groove is larger than the size of the product workpiece, so that the product workpiece can fall into the workpiece groove; the size of the through hole on the bottom plate of the workpiece groove is smaller than the product workpiece, but larger than the tooling block, so that the workpiece groove can support the falling product workpiece, and the tooling block can be inserted into the workpiece groove from below to lift the product workpiece.

[0013] Furthermore, the workpiece groove is in a frustum shape, with four walls being inclined surfaces, and the outer edge size of the bottom plate is consistent with the product workpiece, which is convenient for positioning the product workpiece, and the through hole on the bottom plate is arranged in the middle.

[0014] The integrated plasma surface treatment equipment is also provided with a cabinet and a multi-axial motion system. A workbench is provided in the middle of the cabinet, and the multi-axial motion system includes an X-axis slide, a Y-axis slide and a Z-axis slide. The X-axis slide is located on one side of the Y-axis slide and is installed on the rear side of the upper cabinet. The Z-axis slide is installed on the slide block of the X-axis slide, and the Y-axis slide is installed on the workbench. The spray gun of the plasma generation system is installed on the slide block of the Z-axis slide and is located in the upper cabinet above the workbench. The tooling assembly is installed on the slide block of the Y-axis slide and moves in and out of the upper cabinet driven by the slide block.

[0015] A drag chain is installed in the lower cabinet under the workbench. The laying direction of the drag chain is parallel to the movement direction of the Y-axis slide. The floating end of the drag chain is fixedly connected to the tooling assembly. The adsorption air path enters from the fixed end of the drag chain, exits from the moving end of the drag chain, and is connected to the adsorption hole on the tooling block.

[0016] More than two types of spray guns and rodless cylinders corresponding to the spray guns are installed on the slide block of the Z-axis slide. The spray guns are installed on the slide block of the rodless cylinder, and the rodless cylinder is fixedly installed on the slide block of the Z-axis slide.

[0017] A plasma surface treatment method based on the above-mentioned equipment is characterized in that when the plasma generating system spray gun is working, the product workpiece to be processed is stabilized on the tooling block by gas pressure adsorption.

[0018] The middle part of the product workpiece is supported by a tooling block whose top surface area is smaller than that of the product workpiece, so that the edge of the product workpiece is suspended in the air, thereby preventing reflected splashing plasma from adhering to the reverse edge of the product workpiece. Beneficial Effects

[0019] 1) The plasma surface treatment equipment and method of the present invention adds an adsorption system, which can effectively avoid the phenomenon that the workpiece product is blown away by the jet plasma, and can greatly improve the production stability, the compliance rate of the process treatment results and the product qualification rate of the entire production line.

[0020] 2) In a further solution, the present invention can effectively prevent the edge of the back side of the product workpiece from being damaged by the reflected splashing jet plasma through the improvement of the tooling components, thereby improving the product processing quality.

[0021] 3) In a further solution, the present invention can simply complete the action of taking and placing parts by transferring the tray, reduce the labor intensity of the operator, and improve production efficiency and output.

[0022] 4) In a further solution, the present invention is equipped with multiple sets of spray guns, and the type of spray gun can be easily replaced by a rodless cylinder, which can flexibly adapt to the needs of products of different sizes.

[0023] 5) The plasma surface treatment equipment of the present invention can be used for the surface treatment of various products, has a wide range of applicability to product types, has low modification costs, and is suitable for popularization and use. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the right view structure of the equipment;

[0025] Figure 2 It is the main structural diagram of the equipment;

[0026] Figure 3 It is a schematic diagram of the shaft isometric structure of the equipment;

[0027] Figure 4 It is an exploded view of the equipment slide structure;

[0028] Figure 5 It is the internal structure diagram of the lower cabinet of the equipment;

[0029] Figure 6 It is an exploded view of the equipment tooling assembly;

[0030] Figure 7 It is a structural schematic diagram of the equipment accessory transfer tray. DETAILED DESCRIPTION

[0031] In order to illustrate the technical solution and working principle of the present invention, the present invention is further introduced below in conjunction with the accompanying drawings and specific embodiments.

[0032] When the mobile phone screen to be processed is in a certain processing stage, one side needs to remain hydrophobic and the other side needs to be changed to be hydrophilic. This embodiment takes the process of modifying the mobile phone screen product workpiece using low-temperature plasma as an example.

[0033] like Figure 3 As shown in the figure, the dual-station integrated low-temperature plasma surface treatment equipment includes a cabinet, a control system, a plasma generation system, a multi-axial motion system, tooling components and an adsorption system:

[0034] 1) Cabinet

[0035] The plasma surface treatment equipment is provided with an aluminum profile frame cabinet, a workbench is provided in the middle of the cabinet, the part above the workbench is divided into an upper cabinet, and the part below the workbench is divided into a lower cabinet. The upper cabinet occupies the rear half of the workbench, and an openable double door is provided on the front side.

[0036] 2) Control system

[0037] The control system is mainly composed of a distribution board, an operation box 30 and a touch screen 31. The distribution board is installed on the rear side of the upper cabinet, and a PLC (programmable logic controller) is installed on the distribution board. The plasma power supply, pressure switch and solenoid valve in the plasma generation system, the servo motor and sensor in the multi-axis motion system, the adsorption fan 19 and solenoid valve in the adsorption system, and the lighting control, exhaust fan control, and double door sensor in other functions are all connected to the PLC.

[0038] The operation box 30 is installed on the right side of the upper cabinet, and a touch screen 31 is installed on it. The touch screen 31 is connected to the PLC on the switchboard to realize the operation and control of the entire equipment, including setting the power supply voltage, gas source flow, gas pressure and other parameters of the plasma rotary spray gun 2, and establishing, editing, saving, calling and deleting different motion trajectories for the multi-axial motion system.

[0039] 3) Plasma generation system

[0040] The plasma generation system is connected to a control system, and includes a jet plasma rotating spray gun 2, a jet plasma direct spray gun 32, and two plasma power supplies 1. The jet plasma rotating spray gun 2 is a wide spray gun, and the jet plasma direct spray gun 32 is a small spray gun.

[0041] Two plasma power supplies 1 are installed on the bottom plate of the lower cabinet, located on the left and right sides, and are respectively connected to the jet plasma rotary spray gun 2 and the jet plasma direct spray gun 32. The power signal input end and the control signal input end of the plasma power supply 1 are respectively connected to the distribution board of the control system, the gas source input end is connected to the input gas circuit, and the grounding end is connected to the equipment grounding column. The input gas circuit is provided with a pressure switch and a solenoid valve.

[0042] The jet plasma rotary spray gun 2 and the jet plasma direct spray gun 32 are both arranged in the upper cabinet, and are respectively mounted on a slider of a rodless cylinder with a stroke of 50 mm, and the cylinder body of the rodless cylinder is fixedly mounted on the slider of the Z-axis slide of the multi-axial motion system. The control system adjusts the positions of the two spray guns through the multi-axial motion system, and selects the spray gun to be used by lifting and lowering the rodless cylinder.

[0043] 4) Multi-axial motion system

[0044] The multi-axial motion system includes an X-axis slide 3, two Y-axis slides 4 and 5, and a Z-axis slide 6. The X-axis slide 3 is installed on the horizontal frame structure on the back of the upper cabinet, and is located on the rear side of the two Y-axis slides. The Y-axis slide is laid on the workbench, with one end located inside the upper cabinet and the other end extending outside the upper cabinet. The Y-axis slide 4 is set on the left station of the workbench, and the Y-axis slide 5 is set on the right station of the workbench. A set of tooling components is installed on each Y-axis slide, and the position of the tooling components is controlled by the movement of the Y-axis slide. The Z-axis slide 6 is installed on the slide block of the X-axis slide 3, that is, the spray gun can freely adjust the spatial position in the coordinate system plane formed by the X-axis and the Z-axis.

[0045] The structures of the four slides are basically the same, except for the travel and installation position. Figure 4 As shown, its components include a base plate 7, a track 8, a lead screw 9, a lead screw nut 10, a slider 11, a slide slider 12, a servo motor 13, a synchronous pulley mechanism 14, a sensor 15 and a cover plate 16, etc.

[0046] The base plate 7 is fixed on the installation position of the slide (the base plate of the X-axis slide is fixed on the frame structure of the upper cabinet, the base plate of the Y-axis slide is fixed on the workbench, and the base plate of the Z-axis slide is fixed on the slide block of the X-axis slide). Two parallel tracks 8 and a lead screw 9 are installed on the base plate 7. The lead screw 9 is arranged between the two tracks 8. A slide block 11 is installed on each track 8. A lead screw nut 10 is installed on the lead screw 9. The slide block 12 is respectively connected to the lead screw nut 10 and the two slide blocks 11. The cover plate 16 covers the track 8 and the lead screw 9 from above. The two side wings of the slide block 12 extend laterally out of the cover plate, which is used to be fixedly connected with the object mounted on the slide to drive the object to move.

[0047] The servo motor 13 is installed at one end of the slide, and the servo motor 13 is connected to the lead screw 9 through a synchronous pulley mechanism 14. A displacement sensor 15 is installed beside the bottom plate, and the displacement sensor 15 is connected to the control system to collect the position information of the slide block 12. The servo motor 13 is connected to the control system. When working, the lead screw 9 is rotated through the synchronous pulley mechanism 14, and the lead screw nut 10 on the lead screw 9 is further moved, thereby driving the slide block 12 to move forward and backward.

[0048] 5) Tooling components

[0049] There are two sets of tooling components, which are respectively installed on the sliders of the Y-axis slide 5 and the Z-axis slide 6 of the left and right stations. Figure 6 As shown, it is composed of a support plate 22 , an air circuit plate 23 , a bracket 24 , an air circuit interface 25 , a plurality of tooling blocks 26 and a transfer tray 27 .

[0050] When the existing technology performs modification treatment on the corresponding surface, the plasma gas flow is shot from above onto the mobile phone screen and its surrounding structures. The particles included therein are adsorbed and captured when incident on the material, while the particles not captured by the material will produce reflection splashes. The mobile phone screen is a thin sheet product, and it often presents a certain curvature when placed naturally, or the product itself is designed to have a curvature, especially at the edge. When the mobile phone screen cannot fit tightly with the supporting surface below it, the reverse side of its edge is very susceptible to harmful erosion by the reflected and splashed plasma. After testing, the edge of the back of the mobile phone screen (hydrophobic surface) can be reduced from more than 110° to less than 100° after being subjected to non-purposeful harmful erosion by plasma. Regarding the above modification treatment:

[0051] In this embodiment, the tooling block 26 is made of polymer material, and an adsorption hole is provided in the middle thereof. When the equipment is working, an adsorption force can be generated to prevent the workpiece product from being displaced under the blowing of the jet plasma. The shape of the tooling block 26 can generally be designed according to the shape and requirements of the product. In this embodiment, for the mobile phone screen product workpiece, the tooling block 26 is designed to be in the shape of an inverted T-shaped longitudinal section, consisting of an upper rectangular block and a folded edge of a bottom connecting support plate. The top surface of the upper rectangular block is smaller than the upper surface area of ​​the mobile phone screen, so that the mobile phone screen is suspended around and keeps a certain distance from its surrounding components to avoid reflected splashing plasma. When the mobile phone screen is placed on the tooling block 26 with the edge bent downward, the distance between the edges of the top surface of the tooling block 26 and the edges of the mobile phone screen is controlled to be more than 10 mm, so as to avoid the plasma diffused along the surface of the mobile phone screen from forming an inward vortex at the edge of the mobile phone screen, and climbing upward under the influence of the side wall of the rectangular block, interfering with the reverse side (i.e., bottom surface) of the mobile phone screen.

[0052] Two rows of 10 tooling blocks 26 are installed above the pallet 22, and the pallet 22 is provided with through holes at the positions corresponding to the adsorption holes of each tooling block 26. Two left and right air circuit plates 23 are installed on the lower surface of the pallet, corresponding to the two rows of tooling blocks 26 respectively. An air circuit groove is machined inside the air circuit plate 23. One end of the air circuit plate 23 is connected to the air circuit interface 25. The air circuit groove is connected to the adsorption air circuit through the air circuit interface 25 located below it, and is connected to the tooling block adsorption holes through each pallet through hole located above it. The bracket 24 is fixed below the pallet 22 and is used to connect the adsorption system.

[0053] The appearance of the transfer tray 27 is as follows Figure 7 As shown, it is used as an equipment accessory. The size of the transfer tray 27 is designed according to the pallet 22, the tooling block 26 and the product workpiece, and its outer contour size is consistent with the pallet 22. On the transfer tray 27, according to the assembly position of the tooling block 26 on the pallet 22, the workpiece grooves in the same position are made. The workpiece groove is in the shape of a quadrangular pyramid, and the four walls are inclined surfaces. The area of ​​its upper opening (top surface opening) is slightly larger than the product area, and the shape and size of the lower opening (outer edge of the bottom plate) are the same as the mobile phone screen. A through hole with a size slightly larger than the top surface area of ​​the tooling block and smaller than the area of ​​the mobile phone screen is provided in the middle of the bottom plate of the workpiece groove.

[0054] The transfer tray 27 has ribs around it as a support point for stacking, and can be stacked together to save space and facilitate transportation. When the transfer tray 27 is usually used to place product workpieces and transfer, the product workpiece is placed in the workpiece slot and supported by the bottom plate of the workpiece slot. When the equipment is working, the transfer tray 27 is placed on the support plate 22 as a whole, and the tooling block 26 just passes through the through hole on the bottom plate of the workpiece slot, lifting the product workpiece and suspending it around; after the work is completed, the transfer tray 27 can be directly lifted, and the product workpiece automatically falls back into the workpiece slot.

[0055] 6) Adsorption system

[0056] The adsorption system is mainly composed of an adsorption fan 19 , an adsorption air path and a drag chain 21 . Figure 5 This is the internal structure diagram of the lower cabinet, which mainly houses the host gas circuit and adsorption system.

[0057] The main engine gas circuit is provided with a solenoid valve A17 and a pressure switch 18 for controlling the on-off of the gas circuit. A PU pneumatic hose is used to connect the air inlet of the equipment to the solenoid valve A17 and the pressure switch 18, and finally to the gas source input end of the plasma power supply 1.

[0058] The adsorption air path is provided with an adsorption fan 19, two solenoid valves B20 and two drag chains 21. A 1-inch hose is used to connect the air path from the adsorption fan 19, which is divided into two and then passes through two solenoid valves B20 respectively, and then divided into four. Two by two are passed through the corresponding fixed ends of the drag chains 21, and then passed through the floating ends of the drag chains 21, and finally connected to the air path interface 25 of the tooling assembly.

[0059] There are two drag chains 21 arranged longitudinally in the lower cabinet, corresponding to the X-axis slides of the left and right stations on the workbench. The fixed end of the drag chain 21 is installed on the bottom plate of the lower cabinet, and the floating end is installed on the bracket 24 of the tooling assembly. The air pipe of the adsorption air path passes through the inside of the drag chain 21.

[0060] The workbench is provided with guide grooves that penetrate up and down on both sides of the Y-axis slide, and the guide grooves are parallel to the running direction of the slider of the Y-axis slide. The bracket 24 is U-shaped, and its bottom is connected to the drag chain 21, and its two arms pass through the workbench from the guide grooves and are connected to the support plate 22.

[0061] VII) Other facilities

[0062] A three-color alarm light 28 and a silent exhaust fan 29 are installed on the top of the equipment. The three-color alarm light 28 is connected to the control system to indicate the working status of the equipment; the air inlet of the silent exhaust fan 29 is connected to the upper cabinet to extract and discharge the gas generated by the jet plasma in the equipment.

[0063] The integrated low-temperature plasma surface treatment equipment of this embodiment is an industrialized equipment used in the process of plasma treatment of the surface of product workpieces in the factory production line. Through the integration of PLC, all the above systems are integrated into a unified whole. Through the touch screen 31 on the operation box 30, all systems of the equipment are controlled. It has a high degree of automation, which can effectively ensure the efficiency and yield of the process in the production line and reduce the workload of the operator.

[0064] Based on the plasma surface treatment method of the equipment described above, when the plasma generation system spray gun is working, the middle part of the product workpiece is lifted by the tooling block 26 whose top surface area is smaller than the product workpiece, and the product workpiece is raised, and the edge is suspended in the air to avoid the reflected splashing plasma. Afterwards, the product workpiece to be processed is adsorbed on the tooling block 26 by air pressure adsorption.

[0065] At the same time, the dual-station integrated low-temperature plasma surface treatment equipment of this embodiment can select two different jet plasma spray guns according to the product size, edit different processing paths according to different processing positions, and set different processing parameters according to different processing materials. Therefore, this equipment can adapt to product workpieces of various different materials and shapes, and can be used in different production lines in different industries, with a wide range of applications.

[0066] Before using the equipment, the equipment engineer needs to select the appropriate spray gun type according to the product workpiece, set the equipment's operating parameters, and create and call a new motion trajectory in advance. After setting the parameters and calling the motion trajectory through the touch screen 31, the program design can simply start and stop with one button, and the equipment automatically works according to the preset motion trajectory to process the surface of the product workpiece. A motion trajectory program can process multiple product workpieces at a time. When the product to be produced changes, it only needs to adjust the shape and size of the tooling components and simply change the equipment's operating parameters, and call different motion trajectories to be suitable for the production of different products.

[0067] When the equipment is put into use, the tooling assembly is initially located at the front end of the Y-axis slide rail, outside the upper cabinet. The operator ensures that the product workpieces are placed on the tooling block one by one at the workstation, and then starts the equipment. The equipment controls the movement of the Y-axis slide according to the preset parameters and the called trajectory, and sends the tooling assembly and the product workpiece into the upper cabinet, starts the spray gun, and automatically completes the process of plasma surface treatment of the product workpiece. After the treatment is completed, the Y-axis slide is controlled to move, and the tooling assembly and the product workpiece are moved out of the upper cabinet. The worker removes the product workpiece and proceeds to the next process.

[0068] In order to facilitate the operator to take and place samples and transfer between processes, this equipment is also equipped with a transfer tray according to the product workpiece, which greatly reduces the operator's workload in taking and placing products.

[0069] In this embodiment, the equipment is provided with double workstations, and a working mode in which the left and right workstations are operated in turns can be established. When the tooling assembly on one workstation enters the upper cabinet under the drive of the Y-axis slide, the tooling assembly on the other workstation is controlled to automatically withdraw to the product workpiece pick-up and placement position under the drive of the Y-axis slide, that is, when the workstation on one side is in working state, the tray on the other side of the workstation automatically withdraws to the standby position, and the slider of the X-axis slide drives the spray gun to and from the two workstations. The operator can complete the work of picking and placing parts at the other workstation while the equipment is working, and the two sides take turns to operate, which greatly improves production efficiency.

[0070] The plasma surface treatment equipment of this embodiment has been repeatedly verified by sample experiments to ensure that the treatment effect can meet the requirements of the production line. The equipment adopts an integrated design to avoid problems such as incompatibility between systems, mutual interference, and plasma instability. The process is completed automatically by the machine to avoid human operating errors. The application of this equipment in the plasma surface treatment process on the production line can greatly improve the production stability of this process, the compliance rate of the treatment results of this process, and the qualified rate of the entire production line products.

[0071] The main structure and working mode of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above-mentioned embodiments. Various changes can be made within the knowledge of ordinary technicians in the field without departing from the purpose of the present invention. The above is only a preferred embodiment of the present invention, and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technician familiar with this profession can make some changes or modify the technical content disclosed above to an equivalent embodiment of equivalent changes without departing from the scope of the technical solution of the present invention. However, any simple modification, equivalent replacement and improvement of the above embodiments made according to the technical essence of the present invention and within the spirit and principle of the present invention without departing from the content of the technical solution of the present invention still belongs to the protection scope of the technical solution of the present invention.

Claims

1. A plasma surface treatment device, comprising a tooling assembly, characterized in that: Equipped with adsorption system: The tooling assembly comprises a tooling block (26), the top surface of the tooling block (26) is used to place the product workpiece to be processed, and at least one adsorption hole is provided on the tooling block (26) at a position covered by the product workpiece; The adsorption system comprises an adsorption fan, and the adsorption holes on the tooling block (26) are connected to the adsorption fan (19) through an air path. When the equipment is working, the product workpiece is adsorbed on the tooling block (26) through the adsorption fan (19); For mobile phone screen product workpieces, the tooling block is designed to have an inverted T-shaped longitudinal cross-section, consisting of an upper rectangular block and a folded edge of a bottom connecting support plate; the top surface of the upper rectangular block is smaller than the upper surface area of ​​the mobile phone screen, so that the mobile phone screen is suspended on all sides, keeping a certain distance from the surrounding components to avoid reflected splashing plasma; and when the mobile phone screen is placed on the tooling block with its edges bent downward, the distance between the edges of the top surface of the tooling block and the edges of the mobile phone screen is controlled to be more than 10 mm, so as to prevent the plasma diffused along the surface of the mobile phone screen from forming an inward vortex at the edge of the mobile phone screen, climbing upward under the influence of the side wall of the rectangular block, and interfering with the bottom surface of the mobile phone screen.

2. A plasma surface treatment device according to claim 1, characterized in that: The tooling assembly is also provided with a support plate (22), an air circuit plate (23), an air circuit interface (25) and a transfer tray (27); The tooling block (26) is mounted on the support plate (22), and the support plate (22) is provided with a through hole at a position corresponding to the adsorption hole of the tooling block (26); The air path plate (23) is installed below the support plate (22), and the air path plate (23) is provided with an air path groove, which is connected to the adsorption fan (19) through an air path interface (25), and the adsorption hole on the tooling block (26) is connected to the air path groove through a through hole on the support plate (22); The transfer tray (27) is provided with a workpiece groove corresponding to the tooling block (26) one by one, the top surface of the workpiece groove is open, and the bottom plate is provided with a through hole. The size of the opening on the top surface of the workpiece groove is larger than the size of the product workpiece, so that the product workpiece can fall into the workpiece groove; the size of the through hole on the bottom plate of the workpiece groove is smaller than the product workpiece but larger than the tooling block, so that the workpiece groove can hold the falling product workpiece, and the tooling block (26) can be inserted into the workpiece groove from below to lift the product workpiece.

3. A plasma surface treatment device according to claim 2, characterized in that: The workpiece groove is in a frustum shape, with four walls being inclined surfaces, the outer edge size of the bottom plate being consistent with the product workpiece, and the through hole on the bottom plate being arranged in the middle.

4. The plasma surface treatment equipment according to claim 1, characterized in that: Equipped with cabinet and multi-axial motion system; A workbench is provided in the middle of the cabinet, and the multi-axial motion system includes an X-axis slide, a Y-axis slide and a Z-axis slide. The X-axis slide is located on one side of the Y-axis slide and is installed on the rear side of the upper cabinet. The Z-axis slide is installed on the slide block of the X-axis slide, and the Y-axis slide is installed on the workbench; The spray gun of the plasma generation system is installed on the slide block of the Z-axis slide, and is located in the upper cabinet above the workbench; the tooling assembly is installed on the slide block of the Y-axis slide, and moves in and out of the upper cabinet driven by the slide block; A drag chain (21) is arranged in the lower cabinet below the workbench. The laying direction of the drag chain (21) is parallel to the moving direction of the Y-axis slide. The floating end of the drag chain is fixedly connected to the tooling component. The adsorption air path enters from the fixed end of the drag chain, exits from the moving end of the drag chain, and is connected to the adsorption hole on the tooling block (26).

5. The plasma surface treatment equipment according to claim 4, characterized in that: More than two types of spray guns and rodless cylinders corresponding to the spray guns are installed on the slide block of the Z-axis slide. The spray guns are installed on the slide block of the rodless cylinder, and the rodless cylinder is fixedly installed on the slide block of the Z-axis slide.

6. A plasma surface treatment method based on the device according to any one of claims 1 to 5, characterized in that: When the plasma generating system spray gun is working, the product workpiece to be processed is adsorbed on the tooling block (26) by air pressure adsorption. For the mobile phone screen product workpiece, the tooling block is designed to have a longitudinal cross-section in the shape of an inverted T, consisting of an upper rectangular block and a folded edge of a bottom connecting support plate. The top surface of the upper rectangular block is smaller than the upper surface area of ​​the mobile phone screen, so that the mobile phone screen is suspended around and keeps a certain distance from the surrounding components to avoid reflected splashing plasma. When the mobile phone screen is placed on the tooling block with its edges bent downward, the distance between the edges of the top surface of the tooling block and the edges of the mobile phone screen is controlled to be more than 10 mm, so as to prevent the plasma diffused along the surface of the mobile phone screen from forming an inward vortex at the edge of the mobile phone screen, climbing upward under the influence of the side wall of the rectangular block, and interfering with the bottom surface of the mobile phone screen.

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