Feeding device

Abstract

The present invention provides a loading device, comprising: a carrier, a fixing assembly and a flipping assembly, wherein the carrier is used for carrying a workpiece to be processed; the fixing assembly is arranged on the carrier, and the fixing assembly is used for limiting the separation of the workpiece to be processed from the carrier; the flipping assembly is assembled on the carrier, and the flipping assembly is used for driving the carrier to flip, and the purpose of driving multiple workpieces to be processed to flip simultaneously by a single flip of the carrier can be achieved, thereby effectively improving the flipping efficiency of multiple workpieces to be processed and saving the workload of the staff in flipping the workpieces to be processed.

Description

Technical Field

[0001] The invention belongs to the technical field of coating equipment, and in particular relates to a feeding device. Background Art

[0002] During the processing of the battery cell, the raw material silicon wafer in the battery cell needs to be processed on both sides. After processing one side of the silicon wafer, the silicon wafer needs to be turned over manually. The manual flipping of the silicon wafer is labor-intensive and difficult to improve work efficiency. Summary of the invention

[0003] The present invention aims to solve one of the technical problems existing in the prior art or related technology.

[0004] In view of this, the present invention proposes a loading device, comprising: a carrier for carrying a workpiece to be processed; a fixing component arranged on the carrier, the fixing component being used to limit the separation of the workpiece to be processed from the carrier; a flipping component assembled on the carrier, the flipping component being used to drive the carrier to flip.

[0005] The loading device provided by the present invention includes: a carrier, a fixing component and a flipping component. The carrier can carry the workpiece to be processed, the fixing component can fix the workpiece to be processed on the carrier, and the flipping component can drive the carrier to flip. After processing one side of the workpiece to be processed, multiple workpieces to be processed can be placed on the carrier at the same time. The fixing component fixes the workpiece to be processed so that the workpiece to be processed is not easy to move relative to the carrier. The flipping component drives the carrier to flip, and the carrier drives the multiple workpieces to be processed to flip. Since the fixing component fixes the workpiece to be processed on the carrier, the multiple workpieces to be processed are not easy to separate from the carrier after flipping, which makes it convenient to neatly take away the multiple workpieces to be processed after flipping. The method of driving the multiple workpieces to be processed to flip by the carrier can achieve the purpose of driving the multiple workpieces to be processed to flip at the same time by a single flip of the carrier, effectively improving the flipping efficiency of the multiple workpieces to be processed and saving the workload of the staff in flipping the workpieces to be processed.

[0006] In addition, the feeding device in the above technical solution provided by the present invention may also have the following additional technical features:

[0007] In a possible design, a first air intake hole is provided on the carrier; the fixed component includes: an air intake pipe, which is provided in the carrier; and an air pipe joint, which is fixed in the carrier, and the air pipe joint is connected to the first air intake hole and the air intake pipe.

[0008] In this design, the fixed component includes an air suction pipe and an air pipe connector. The air suction pipe can perform an air suction function, for example, it is connected to an external negative pressure device. The air suction pipe is connected to the air pipe connector, that is, the air pipe connector can perform an air suction function. The air pipe connector adsorbs the workpiece to be processed so that the workpiece to be processed is stably attached to the surface of the carrier. During the rotation of the carrier, the workpiece to be processed is not easy to move or fall off relative to the carrier. The air pipe connector is fixed in the carrier so that it is not easy for the air pipe connector to shake relative to the carrier, thereby improving the adsorption stability of the air pipe connector on the workpiece to be processed. After the carrier drives multiple workpieces to be processed to flip over, the air pipe connector stops suctioning the workpieces to be processed, so that the flipped multiple workpieces to be processed are separated from the carrier, thereby facilitating the removal of multiple workpieces to be processed for continued processing.

[0009] In one possible design, the carrier includes: a main body, used to carry the air intake pipe, the main body is provided with a second air intake hole, and the air pipe joint is accommodated in the second air intake hole; a receiving plate, arranged on the main body, the receiving plate is provided with a first air intake hole, and the first air intake hole is connected to the second air intake hole.

[0010] In this design, the carrier includes a main body and a receiving plate. The suction pipe is arranged on the main body, and then the receiving plate is installed to improve the convenience of installing and arranging the suction pipe. The receiving plate can protect the suction pipe to prevent the suction pipe from being damaged by collision with other components. A second suction hole is provided on the main body, and a first suction hole is provided on the receiving plate. The second suction hole is connected to the first suction hole, and the air pipe joint is accommodated in the second suction hole. On the one hand, the air pipe joint is prevented from protruding from the carrier, so that the workpiece to be processed can be in stable contact with the carrier, and the shaking of the workpiece to be processed is avoided. On the other hand, the limiting effect of the second suction hole on the air pipe joint can improve the stability of the air pipe joint, improve the adsorption capacity of the air pipe joint to the workpiece to be processed, and then improve the stability of the workpiece to be processed fixed on the carrier. The receiving plate can be arranged to be detachably connected to the main body, so as to facilitate the replacement or maintenance of the suction pipe.

[0011] In one possible design, the loading device also includes: a frame; a first driving component, which is arranged on the frame, and the platform is supported by the first driving component, and the first driving component is used to drive the workpiece to be processed to approach or move away from the platform; a material picking component, which is arranged on the frame, and the material picking component moves relative to the frame so that the material picking component approaches or moves away from the platform, and the material picking component is used to drive the workpiece to be processed to move.

[0012] In this design, the material picking component is used to drive the workpiece to be processed to move. The material picking component drives the workpiece to be processed to a predetermined position. The first drive component carries the workpiece to be processed at the predetermined position, so that the first drive component drives the workpiece to be processed to move to the surface of the carrier. The carrier carries the workpiece to be processed. After the carrier drives the workpiece to be processed to flip over, the material picking component can take away the workpiece to be processed to facilitate subsequent processing of the workpiece to be processed.

[0013] The material picking component drives the workpiece to be processed to move, so that the workpiece to be processed can be sent to the process chamber for processing. During this process, the aluminum carrier of the related technology can always be placed in the process chamber. The aluminum carrier does not need to drive the workpiece to be processed in and out of the process chamber, ensuring that the surface temperature of the aluminum carrier is not easy to change, thereby avoiding the uneven surface temperature of the aluminum carrier and affecting the quality of the workpiece to be processed. The material picking component automatically sends the workpiece to be processed into the process chamber, thereby improving the degree of automation and convenience of placing the workpiece to be processed into the process chamber.

[0014] In one possible design, the flip assembly includes: a first rotating shaft, fixed to one side of the carrier; a flip driving member, provided on the first driving member, the first rotating shaft is assembled on the flip driving member, and the flip driving member is used to drive the first rotating shaft to rotate; a second rotating shaft, fixed to the other side of the carrier, and the second rotating shaft is rotatably connected to the first driving member.

[0015] In this design, the flipping drive member can drive the first rotating shaft to rotate, and the first rotating shaft is fixedly connected to the carrier, so that the first rotating shaft can drive the carrier to rotate, which is beneficial for the carrier to drive multiple workpieces to be processed to flip, and the first driving component supports the flipping drive member and the second rotating shaft, and the second rotating shaft is rotatably connected to the first driving component. The second rotating shaft plays a supporting role on the other side of the carrier, so that the carrier can be driven by the first rotating shaft and stably rotate with the second rotating shaft as the rotation axis.

[0016] In one possible design, a through hole is provided on the carrier; the first driving component includes: a supporting member for supporting the carrier; a sliding member configured to be movable relative to the supporting member; a support plate connected to the sliding member; and a driving column arranged on the support plate, and at least part of the driving column can pass through the through hole.

[0017] In this design, the first driving component includes: a carrier, a sliding member, a bearing plate and a driving column. The sliding member can move relative to the carrier. Specifically, the sliding member can approach or move away from the carrier. The sliding member drives the support plate to move. The support plate plays a bearing role on the driving column, so that the support plate drives the driving column to move in the direction of approaching or moving away from the carrier. A through hole is provided on the carrier, and the driving column can pass through the through hole during the driving process. The driving column passes through the through hole and takes away the workpiece to be processed on the material picking assembly. The driving column descends, so that the workpiece to be processed can be carried on the surface of the carrier.

[0018] In a possible design, the loading device further includes: a second driving component, the second driving component is connected to the supporting member, and the second driving component can drive the first driving component to rise and fall.

[0019] In this design, the second driving component can drive the first driving component to move up and down, so that the platform can also move up and down driven by the first driving component.

[0020] The driving process is as follows: the second driving component drives the first driving component to rise, and after the first driving component drives the carrier to rise to the first predetermined position, the sliding member drives the driving column to rise and pass through the through hole, so that the driving column can take away the workpiece to be processed on the material picking component.

[0021] It can be understood that the contact area between the driving column and the workpiece to be processed is small, and the driving column has a lower load-bearing and stable position relative to the workpiece to be processed. If the driving column drives the workpiece to be processed to move for a long distance, the workpiece to be processed may easily fall off the driving column. The first driving component drives the second driving component to rise, thereby reducing the distance between the carrier and the material picking component at a predetermined position, thereby reducing the distance that the driving column drives the workpiece to be processed to move, and reducing the possibility of the workpiece to be processed falling off the driving column.

[0022] In one possible design, the material picking assembly includes: a sliding plate; at least two connecting plates, which are spaced apart on the sliding plate; at least two supporting plates, wherein one of the at least two supporting plates is connected to one of the at least two connecting plates; at least two connecting plates, at least two supporting plates and the sliding plate are arranged to form a accommodating space, and a gap is left between adjacent supporting plates in the supporting plates for the driving column part to pass through.

[0023] In this design, the material picking assembly includes: a sliding plate, at least two connecting plates and at least two supporting plates, one end of the connecting plate is connected to the sliding plate, and the other end of the connecting plate is connected to the supporting plate, adjacent connecting plates are arranged at intervals, and adjacent supporting plates are also arranged at intervals, and adjacent connecting plates, adjacent supporting plates and sliding plates are surrounded to form a accommodating space, and the workpiece to be processed can be accommodated in the accommodating space, and the supporting plates carry the workpiece to be processed. It can be understood that when the material picking assembly is moving close to the carrier, a gap is provided between adjacent supporting plates for the driving column to pass through, so that the driving column will not interfere with the movement process of the material picking assembly, and when the material picking assembly moves to a predetermined position, the driving column is raised, so that the workpiece to be processed is separated from the supporting plate, and the material picking assembly is away from the carrier, so that the driving column can drive the workpiece to be processed to descend, thereby facilitating the placement of the workpiece to be processed on the carrier.

[0024] In a possible design, the loading device also includes: at least two pulleys; a transmission belt, which is mounted on at least two pulleys; at least two connecting shafts, which are mounted on at least two pulleys; at least two driving wheels, which are mounted on at least two connecting shafts, and at least two driving wheels are used to carry the material picking assembly, and one connecting shaft of the at least two connecting shafts, one pulley of the at least two pulleys and one driving wheel of the at least two driving wheels are coaxially arranged; and a power member, which is used to drive one of the at least two pulleys to rotate.

[0025] In this design, the transmission belt is sleeved on at least two pulleys, and the at least two pulleys support the transmission belt so that the transmission belt can be in a taut state, thereby enabling the at least two pulleys to drive the transmission belt to rotate stably. The power component drives at least one of the two pulleys to rotate, so that the pulley drives the transmission belt to rotate, the pulley can drive the connecting shaft to rotate, and the connecting shaft drives the driving wheel to rotate. The at least two driving wheels carry the material picking assembly, and the rotating at least two driving wheels can drive the material picking assembly to move, so that the material picking assembly can drive the workpiece to be processed to move. Adjacent driving wheels of the at least two driving wheels are arranged at intervals, so that the flipping assembly can pass through the gap between the adjacent driving wheels, thereby avoiding interference of the driving wheels with the movement of the flipping assembly.

[0026] In a possible design, a sliding groove is provided on the sliding plate, and each of the at least two driving wheels is at least partially accommodated in the sliding groove.

[0027] In this design, the driving wheel is accommodated in the sliding groove. It can be understood that the driving wheel is accommodated in the sliding groove along the width direction. The width of the driving wheel can be set to be consistent with the width of the sliding groove, or the width of the sliding groove can be slightly larger than the width of the driving wheel, so that the sliding plate is not easy to move relative to the driving wheel, and the sliding plate is prevented from being separated from the driving wheel, so that the driving wheel can drive the material picking assembly to move stably.

[0028] Additional aspects and advantages of the present invention will become apparent from the following description or may be learned by practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0030] Figure 1 A schematic structural diagram of a feeding device according to an embodiment of the present invention is shown;

[0031] Figure 2 A schematic structural diagram of a feeding device according to another embodiment of the present invention is shown;

[0032] Figure 3 yes Figure 2 Schematic diagram of the explosion structure;

[0033] Figure 4 yes Figure 3 The enlarged view of point A in the middle;

[0034] Figure 5 A schematic structural diagram of a feeding device according to another embodiment of the present invention is shown;

[0035] Figure 6A schematic structural diagram of a first driving assembly according to an embodiment of the present invention is shown;

[0036] Figure 7 A schematic structural diagram of a material taking assembly according to an embodiment of the present invention is shown;

[0037] Figure 8 A schematic structural diagram of a feeding device according to another embodiment of the present invention is shown;

[0038] Fig. 9 A schematic structural diagram of a feeding device according to another embodiment of the present invention is shown;

[0039] Fig.10 A schematic structural diagram of a feeding device according to another embodiment of the present invention is shown;

[0040] Fig.11 A schematic structural diagram of a feeding device according to another embodiment of the present invention is shown;

[0041] Fig.12 A schematic structural diagram of a feeding device according to another embodiment of the present invention is shown;

[0042] Fig.13 A schematic structural diagram of a feeding device according to another embodiment of the present invention is shown;

[0043] Fig.14 A schematic structural diagram of a feeding device according to another embodiment of the present invention is shown;

[0044] Fig.15 A schematic structural diagram of a feeding device according to another embodiment of the present invention is shown;

[0045] Fig.16 A schematic structural diagram of a feeding device according to another embodiment of the present invention is shown;

[0046] Fig.17 A schematic structural diagram of a feeding device according to another embodiment of the present invention is shown.

[0047] in, Figures 1 to 17 The corresponding relationship between the reference numerals and the component names is as follows:

[0048] 1 carrier, 12 body, 13 receiving plate, 131 first suction hole, 14 through hole, 2 workpiece to be processed, 3 fixing assembly, 31 suction pipe, 32 air pipe joint, 4 flip assembly, 41 first rotating shaft, 42 flip driving member, 43 second rotating shaft, 44 connecting block, 45 pressing block, 46 screw, 47 key, 48 sealing ring, 49 bearing, 410 rotating joint, 5 first driving assembly, 51 bearing member, 52 sliding member, 53 supporting plate, 54 driving column, 55 first screw rod, 56 first motor, 6 material taking assembly, 61 sliding plate, 611 sliding groove, 62 connecting plate, 63 bearing plate, 64 accommodating space, 7 second driving assembly, 71 second slider, 8 pulley, 9 transmission belt, 10 connecting shaft, 20 driving wheel, 21 power member. DETAILED DESCRIPTION

[0049] In order to more clearly understand the above-mentioned purpose, features and advantages of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the embodiments of the present application and the features in the embodiments can be combined with each other without conflict.

[0050] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the protection scope of the present invention is not limited to the specific embodiments disclosed below.

[0051] Refer to the following Figures 1 to 17 A loading device provided according to some embodiments of the present invention is described.

[0052] A feeding device, such as Figure 1 As shown, it includes: a carrier 1, a fixing component 3 and a flipping component 4, the carrier 1 is used to carry the workpiece 2 to be processed; the fixing component 3 is arranged on the carrier 1, and the fixing component 3 is used to limit the separation of the workpiece 2 to be processed from the carrier 1; the flipping component 4 is assembled on the carrier 1, and the flipping component 4 is used to drive the carrier 1 to flip.

[0053] The loading device provided in this embodiment includes: a carrier 1, a fixing component 3 and a flipping component 4. The carrier 1 can carry a workpiece 2 to be processed, the fixing component 3 can fix the workpiece 2 to be processed on the carrier 1, and the flipping component 4 can drive the carrier 1 to flip. After processing one side of the workpiece 2 to be processed, multiple workpieces 2 to be processed can be placed on the carrier 1 at the same time. The fixing component 3 fixes the workpiece 2 to be processed, so that the workpiece 2 to be processed is not easy to move relative to the carrier 1. The flipping component 4 drives the carrier 1 to flip, and the carrier 1 drives the multiple workpieces 2 to be processed to flip. Since the fixing component 3 fixes the workpiece 2 to be processed on the carrier 1, the multiple workpieces 2 to be processed are not easy to separate from the flipped carrier 1, so that it is convenient to neatly take away the flipped multiple workpieces 2 to be processed. The method of driving the multiple workpieces 2 to be processed to flip by the carrier 1 can achieve the purpose of driving the multiple workpieces 2 to be processed to flip at the same time by a single flip of the carrier 1, effectively improving the flipping efficiency of the multiple workpieces 2 to be processed and saving the workload of the staff in flipping the workpieces 2 to be processed.

[0054] In the above embodiment, combined with Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, a first air intake hole 131 is provided on the carrier 1; the fixing component 3 includes: an air intake pipe 31 and an air pipe joint 32, the air intake pipe 31 is provided in the carrier 1; the air pipe joint 32 is fixed in the carrier 1, and the air pipe joint 32 is connected to the first air intake hole 131 and the air intake pipe 31.

[0055] In this embodiment, the fixing component 3 includes an air suction pipe 31 and an air pipe connector 32. The air suction pipe 31 can perform an air suction function, for example, it can be connected to an external negative pressure device. The air suction pipe 31 is connected to the air pipe connector 32, that is, the air pipe connector 32 can perform an air suction function. The air pipe connector 32 adsorbs the workpiece 2 to be processed, so that the workpiece 2 to be processed is stably attached to the surface of the carrier 1. During the rotation of the carrier 1, the workpiece 2 to be processed is not easy to move or fall off relative to the carrier 1. The air pipe connector 32 is fixed in the carrier 1 so that the air pipe connector 32 is not easy to shake relative to the carrier 1, thereby improving the adsorption stability of the air pipe connector 32 on the workpiece 2 to be processed. After the carrier 1 drives the multiple workpieces 2 to be processed to flip, the air pipe connector 32 stops suctioning the workpiece 2 to be processed, so that the flipped multiple workpieces 2 to be processed are separated from the carrier 1, thereby facilitating the removal of the multiple workpieces 2 to be processed and continuing processing.

[0056] In the above embodiment, the carrier 1 includes: a main body 12 and a receiving plate 13, the main body 12 is used to carry the air intake pipe 31, the main body 12 is provided with a second air intake hole, and the air pipe joint is accommodated in the second air intake hole; the receiving plate 13 is arranged on the main body 12, and the receiving plate 13 is provided with a first air intake hole 131, and the first air intake hole 131 is connected to the second air intake hole.

[0057] In this embodiment, the carrier 1 includes a body 12 and a receiving plate 13. The air intake pipe 31 is arranged on the body 12, and then the receiving plate 13 is installed to improve the convenience of installing and arranging the air intake pipe 31. The receiving plate 13 can protect the air intake pipe 31 and prevent the air intake pipe 31 from being damaged by collision with other components. The body 12 is provided with a second air intake hole, and the receiving plate 13 is provided with a first air intake hole 131. The second air intake hole is connected to the first air intake hole 131, and the air pipe joint is connected to the receiving plate 13. 32 is accommodated in the second suction hole. For example, the end of the air pipe connector 32 can be arranged to be flush with the end surface of the carrier 1. On the one hand, the air pipe connector 32 is prevented from protruding from the carrier 1, so that the workpiece 2 to be processed can be in stable contact with the carrier 1 to prevent the workpiece 2 to be processed from shaking. On the other hand, the adsorption capacity of the air pipe connector 32 to the workpiece 2 to be processed is improved, and the stability of the workpiece 2 to be processed on the carrier 1 is improved. The receiving plate 13 can be arranged to be detachably connected to the main body 12, so as to facilitate the replacement or maintenance of the suction pipe 31.

[0058] In the above embodiment, if Figure 1 As shown, the loading device also includes: a frame; a first driving component 5, which is arranged on the frame, and the platform 1 is carried on the first driving component 5, and the first driving component 5 is used to drive the workpiece 2 to be processed to approach or move away from the platform 1; a material picking component 6, which is arranged on the frame, and the material picking component 6 moves relative to the frame so that the material picking component 6 approaches or moves away from the platform 1, and the material picking component 6 is used to drive the workpiece 2 to be processed to move.

[0059] In this embodiment, the material picking component 6 is used to drive the workpiece 2 to move. The material picking component 6 drives the workpiece 2 to move to a predetermined position. The first driving component 5 carries the workpiece 2 to be processed at the predetermined position, so that the first driving component 5 drives the workpiece 2 to move to the surface of the carrier 1. The carrier 1 carries the workpiece 2. After the carrier 1 drives the workpiece 2 to flip over, the material picking component 6 can take away the workpiece 2 to facilitate subsequent processing of the workpiece 2.

[0060] The material picking component 6 drives the workpiece 2 to move, so that the workpiece 2 can be sent to the process chamber for processing. During this process, the aluminum carrier of the related technology can always be placed in the process chamber. The aluminum carrier does not need to drive the workpiece 2 to enter and exit the process chamber, ensuring that the surface temperature of the aluminum carrier is not easy to change, thereby avoiding the uneven surface temperature of the aluminum carrier and affecting the quality of the workpiece 2. The material picking component 6 automatically sends the workpiece 2 to be processed into the process chamber, thereby improving the degree of automation and convenience of placing the workpiece 2 to be processed into the process chamber.

[0061] In the above embodiment, combined with Figure 1 , Figure 2 , Figure 3 and Figure 4As shown, the flip assembly 4 includes: a first rotating shaft 41, fixed to one side of the carrier 1; a flip driving member 42, arranged on the first driving assembly 5, the first rotating shaft 41 is assembled on the flip driving member 42, and the flip driving member 42 is used to drive the first rotating shaft 41 to rotate; a second rotating shaft 43, fixed to the other side of the carrier 1, and the second rotating shaft 43 is rotatably connected to the first driving assembly 5.

[0062] In this embodiment, the flipping drive member 42 can drive the first rotating shaft 41 to rotate. The first rotating shaft 41 is fixedly connected to the carrier 1, so that the first rotating shaft 41 can drive the carrier 1 to rotate, which is beneficial for the carrier 1 to drive the multiple workpieces 2 to be processed to flip. The first driving component 5 supports the flipping drive member 42 and the second rotating shaft 43. The second rotating shaft 43 is rotatably connected to the first driving component 5. The second rotating shaft 43 plays a supporting role on the other side of the carrier 1, so that the carrier 1 can be driven by the first rotating shaft 41 and stably rotate with the second rotating shaft 43 as the rotation axis.

[0063] Specifically, the first rotating shaft 41 and the second rotating shaft 43 are bolted onto the main body 12. Since the first rotating shaft 41 and the second rotating shaft 43 are hollow structures inside, negative pressure needs to be transmitted to the main body 12. The first rotating shaft 41 and the second rotating shaft 43 need to be sealed from the main body 12. A sealing ring 48 is installed between the main body 12 and the first rotating shaft 41 and the second rotating shaft 43 to achieve sealing. Then, bearings 49 are installed at both ends of the first rotating shaft 41 and the second rotating shaft 43 to support the rotation of the main body 12. The main body 12 is provided with a connecting channel connected to the first rotating shaft 41 and the second rotating shaft 43 outside. The main body 12 is provided with a plurality of negative pressure air inlets. In order to prevent the workpiece 2 to be processed from falling when it is turned over, since a sealing ring 48 is provided between the carrier 1 and the rotating shafts on both sides, the connecting channel on the main body 12, the air intake pipe 31, the air pipe joint 32, the first air intake hole 131 on the receiving plate 13, and the workpiece 2 to be processed form an enclosed space. The receiving plate 13 is locked on the top of the main body 12 by screws 46. After that, the two second air intake holes above each receiving plate 13 are connected to the negative pressure air inlet provided on the main body 12, that is, the first air intake hole 131. The connecting block 44 is installed on the flip driving member 42 by bolts. The flip driving member 42 in this embodiment is a flip cylinder. A key 47 is installed in the keyway of the first rotating shaft 41, and then the first rotating shaft 41 is installed in the semicircular hole of the connecting block 44. A pressing block 45 is installed on the top, and the pressing block 45 is fixed to the connecting block 44 by bolts, so that the first rotating shaft 41 and the rotating part on the flip driving member 42 form a whole. Since the first rotating shaft 41 has been connected to the body 12 by bolts, the entire body 12 including its accessories installed thereon can be rotated under the power of the flip driving member 42. Rotary joints 410 are installed at both ends of the first rotating shaft 41 and the second rotating shaft 43, respectively, wherein the function of the rotary joint 410 is to transmit the negative pressure to each negative pressure suction port when the input negative pressure hole is stationary and the body 12 rotates.

[0064] In the above embodiment, combined with Figure 1 , Figure 5 and Figure 6 As shown, a through hole 14 is provided on the carrier 1; the first driving component 5 includes: a supporting member 51 for supporting the carrier 1; a sliding member 52, which is configured to be able to move relative to the supporting member 51; a supporting plate 53, which is connected to the sliding member 52; a driving column 54, which is arranged on the supporting plate 53, and at least part of the driving column 54 can pass through the through hole 14.

[0065] In this embodiment, the first driving component 5 includes: a supporting member 51, a sliding member 52, a supporting plate 63 and a driving column 54. The sliding member 52 can move relative to the supporting member 51. The flipping component 4 is arranged on the supporting member 51. Specifically, the sliding member 52 can approach or move away from the carrier 1. The sliding member 52 drives the supporting plate 53 to move. The supporting plate 53 plays a supporting role on the driving column 54, so that the support plate 53 drives the driving column 54 to move in a direction approaching or away from the carrier 1. A through hole 14 is provided on the carrier 1. The driving column 54 can pass through the through hole 14 during the driving process. The driving column 54 passes through the through hole 14 and takes away the workpiece 2 to be processed on the material picking component 6. The driving column 54 descends, so that the workpiece 2 to be processed can be carried on the surface of the carrier 1.

[0066] Through holes 14 are provided at equal intervals in the middle of the carrier 1, and at least a pair of receiving plates 13 are provided at diagonal positions of the through holes 14. At least one first air intake hole 131 is provided on the receiving plate 13, and the receiving plate 13 is connected to the main body 12 by screws 46. A plurality of negative pressure air inlets, i.e., second air intake holes, are provided on the main body 12, and the corresponding positions are located below the installation position of each supporting plate 13. The negative pressure air inlet is adapted to the air pipe joint 32 to facilitate the connection between the negative pressure air inlet and the air pipe joint 32. The air pipe joints 32 in the length direction of the carrier 1 are connected together through the air pipe 31, and then the air pipe 31 and the air pipe joint 32 connected in the length direction of the carrier 1 are connected to the first rotating shaft 41 and the second rotating shaft 43 outside through the connecting channel provided in the main body 12, and the first rotating shaft 41 and the second rotating shaft 43 are connected with a rotating joint 410.

[0067] When the workpiece 2 to be processed is placed on the carrier 1, the workpiece 2 to be processed is in contact with the receiving plate 13. When the carrier 1 is turned over, negative pressure is introduced through the rotating joint 410, and the negative pressure enters the negative pressure air inlet in the carrier 1 through the connecting channel, the suction pipe 31 and the air pipe joint 32, and then enters the first suction hole 131 on the receiving plate 13. When the carrier is turned over, the workpiece 2 to be processed will not fall off the carrier 1 due to the action of the negative pressure.

[0068] The length of the carrier 1 can be adjusted according to the size of the negative pressure difference to ensure that the silicon wafer in the middle of the carrier 1 does not fall off during the flipping process.

[0069] Specifically, the supporting member 51 can be a first guide rail, the sliding member 52 can be a first slider, and the first driving assembly 5 also includes a first screw rod 55 and a first motor 56. The first motor 56 drives the first screw rod 55 to rotate, and the first slider can move along the first screw rod 55, so that the first slider drives the supporting plate 63 to move.

[0070] Similarly, a sprocket and a chain may be arranged on the bearing member 51 , the sprocket drives the chain to rotate, and the sliding member 52 is arranged on the chain, so that the chain can drive the sliding member 52 to move.

[0071] In addition, the number of through holes 14 can be one or at least two, and the number of driving columns 54 is consistent with the number of through holes 14, so that the material taking component 6 can simultaneously drive the batch of workpieces 2 to be processed to move, effectively improving work efficiency.

[0072] In the above embodiment, the loading device further includes: a second driving assembly 7 , the second driving assembly 7 is connected to the supporting member 51 , and the second driving assembly 7 can drive the first driving assembly 5 to move up and down.

[0073] In this embodiment, the second driving assembly 7 can drive the first driving assembly 5 to move up and down, so that the carrier 1 can also move up and down driven by the first driving assembly 5 .

[0074] The driving process is as follows: the second driving component 7 drives the first driving component 5 to rise. After the first driving component 5 drives the carrier 1 to rise to a predetermined position, the sliding member 52 drives the driving column 54 to rise and pass through the through hole 14, so that the driving column 54 can take away the workpiece 2 to be processed on the material picking component 6.

[0075] It can be understood that the contact area between the driving column 54 and the workpiece 2 is relatively small, and the driving column 54 has a lower load-bearing and stable position relative to the workpiece 2. If the driving column 54 drives the workpiece 2 to move for a long distance, the workpiece 2 may easily fall off the driving column 54. The first driving component 5 drives the second driving component 7 to rise, thereby reducing the distance between the carrier 1 and the material picking component 6 at the predetermined position, thereby reducing the distance of the workpiece 2 to be processed driven by the driving column 54, and reducing the possibility of the workpiece 2 falling off the driving column 54.

[0076] The second drive assembly 7 can be a roller screw structure, or a chain and sprocket combination structure, or a belt and pulley combination structure. In the present embodiment, the second drive assembly 7 includes: a second guide rail, a second screw rod, a second slider 71 and a second motor. The second slider 71 and the supporting member 51 are fixedly connected, so that the second slider 71 can drive the first drive assembly 5 to move.

[0077] In the above embodiment, combined with Figure 1 and Figure 7 As shown, the material picking assembly 6 includes: a sliding plate 61; at least two connecting plates 62, which are spaced apart on the sliding plate 61; at least two supporting plates 63, and at least one supporting plate 63 of the two supporting plates 63 is connected to one connecting plate 62 of the at least two connecting plates 62; at least two connecting plates 62, at least two supporting plates 63 and the sliding plate 61 are surrounded to form a accommodating space 64, and a gap is left between adjacent supporting plates 63 in the supporting plates 63 for the driving column 54 to partially pass through.

[0078] In this embodiment, the material picking assembly 6 includes: a sliding plate 61, at least two connecting plates 62 and at least two supporting plates 63, one end of the connecting plate 62 is connected to the sliding plate 61, and the other end of the connecting plate 62 is connected to the supporting plate 63, adjacent connecting plates 62 are arranged at intervals, and adjacent supporting plates 63 are also arranged at intervals, and adjacent connecting plates 62, adjacent supporting plates 63 and sliding plates 61 are surrounded to form a accommodating space 64, and the workpiece 2 to be processed can be accommodated in the accommodating space 64, and the supporting plate 63 carries the workpiece 2 to be processed. It can be understood that when the material picking assembly 6 moves close to the carrier 1, a gap is provided between adjacent supporting plates 63 for the driving column 54 to pass through, so that the driving column 54 will not interfere with the movement process of the material picking assembly 6, when the material picking assembly 6 moves to the predetermined position, the driving column 54 is lifted, so that the workpiece 2 to be processed is separated from the supporting plate 63, and the material picking assembly 6 is away from the carrier 1, so that the driving column 54 can drive the workpiece 2 to be processed to descend, thereby facilitating the placement of the workpiece 2 to be processed on the carrier 1.

[0079] In the above embodiment, combined with Figure 1 and Figure 7 As shown, the loading device also includes: at least two pulleys 8; a transmission belt 9, which is sleeved on the at least two pulleys 8; at least two connecting shafts 10, which are arranged on the at least two pulleys 8; at least two driving wheels 20, which are arranged on the at least two connecting shafts 10, and the at least two driving wheels 20 are used to carry the material picking assembly 6, and one connecting shaft 10 of the at least two connecting shafts 10, one pulley 8 of the at least two pulleys 8 and one driving wheel 20 of the at least two driving wheels 20 are coaxially arranged; a power member 21, which is used to drive one of the at least two pulleys 8 to rotate.

[0080] In this embodiment, the transmission belt 9 is sleeved on at least two pulleys 8, and the at least two pulleys 8 support the transmission belt 9 so that the transmission belt 9 can be in a taut state, thereby enabling the at least two pulleys 8 to drive the transmission belt 9 to rotate stably. The power member 21 drives at least one of the two pulleys 8 to rotate, so that the pulley 8 drives the transmission belt 9 to rotate. The pulley 8 can drive the connecting shaft 10 to rotate, and the connecting shaft 10 drives the driving wheel 20 to rotate. At least two driving wheels 20 carry the material picking assembly 6. The rotating at least two driving wheels 20 can drive the material picking assembly 6 to move by friction, so that the material picking assembly 6 can drive the workpiece 2 to move. Adjacent driving wheels 20 of the at least two driving wheels 20 are arranged at intervals, so that the flipping assembly 4 can pass through the gap between adjacent driving wheels 20 to avoid interference of the driving wheel 20 with the movement of the flipping assembly 4.

[0081] In the above embodiment, a sliding groove 611 is provided on the sliding plate 61 , and each of the at least two driving wheels 20 is at least partially accommodated in the sliding groove 611 .

[0082] In this embodiment, Figure 8 The direction of the middle arrow is the direction in which the transmission belt 9 drives the sliding plate 61 to move. The driving wheel 20 is accommodated in the sliding groove 611. It can be understood that the driving wheel 20 is accommodated in the sliding groove 611 along the width direction. The width of the driving wheel 20 can be set to be consistent with the width of the sliding groove 611, or the width of the sliding groove 611 can be slightly larger than the width of the driving wheel 20, so that the sliding plate 61 is not easy to move relative to the driving wheel 20, and the sliding plate 61 is prevented from being separated from the driving wheel 20, so that the driving wheel 20 can drive the material picking component 6 to move stably.

[0083] The turning process of workpiece 2 to be processed is as follows:

[0084] Combination Figure 1 and Figure 5 As shown, the material taking assembly 6 carries the workpiece 2 to be processed from another chamber via the driving wheel 20 and is transferred to the position directly above the carrier 1 .

[0085] like Fig. 9 As shown, the support plate 53 and the driving column 54 are driven upward by the sliding member 52 , and after the driving column 54 hits the workpiece 2 to be processed, it is lifted a certain distance, so that the workpiece 2 to be processed is completely separated from the material removal assembly 6 .

[0086] Combination Figure 1 and Fig.10 As shown, the driving wheel 20 transfers the material taking assembly 6 to another chamber, so that the material taking assembly 6 is separated from the top of the carrier 1.

[0087] Combination Figure 5 and Fig.11 As shown, the support plate 53 and the driving column 54 are driven downward by the sliding member 52, so that the silicon wafer falls on the surface of the carrier 1.

[0088] Combination Figure 3 and Fig.12 As shown, the carrier 1 rotates 180° along the first rotating shaft 41 and the second rotating shaft 43 so that the workpiece 2 faces downward. In order to prevent the workpiece 2 from falling off the carrier 1 after being placed downward, a first suction hole 131 is provided on the carrier 1, and negative pressure is introduced into the fixing component 3 in the carrier 1 to suck the workpiece 2 to prevent the silicon wafer of the workpiece 2 from falling.

[0089] Combination Figure 3 , Figure 5 and Fig.13 As shown, the support plate 53 and the driving column 54 are driven upward by the sliding member 52 , and after the uppermost structure of the driving column 54 contacts the workpiece 2 to be processed, the negative pressure in the fixing assembly 3 is cut off, and the workpiece 2 to be processed falls onto the driving column 54 .

[0090] Combination Figure 5 and Fig.14As shown, the support plate 53 and the driving column 54 are driven downward by the sliding member 52 .

[0091] Combination Figure 5 and Fig.15 As shown, the second driving assembly 7 drives the carrier 51 to move upward, so that the first driving assembly 5 drives the support plate 53, the driving column 54, the turning assembly 4 and the carrier 1 to move upward.

[0092] Combination Figure 1 and Fig.16 As shown, the driving wheel 20 drives the material taking assembly 6 to move to just above the workpiece 2 to be processed.

[0093] Combination Figure 5 and Fig.17 As shown, the support plate 53 and the driving column 54 are driven downward by the sliding member 52, and the workpiece 2 to be processed will fall on the material taking assembly 6, and the turning of the workpiece 2 to be processed has been completed. After that, the material taking assembly 6 can take the workpiece 2 to be processed into another process chamber to continue processing the other side of the workpiece 2 to be processed.

[0094] The workpiece 2 to be processed can be placed on the carrier 1 so that the material taking component 6 can transport the workpiece 2 to be processed into the processing chamber.

[0095] In the present invention, the term "plurality" refers to two or more than two, unless otherwise clearly defined. The terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; "connected" can be a direct connection or an indirect connection through an intermediate medium. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.

[0096] In the description of this specification, the description of the terms "one embodiment", "some embodiments", "specific embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0097] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A feeding device, characterized in that: include: A carrier, used for carrying the workpiece to be processed; A fixing component, disposed on the carrier, and used to limit the separation of the workpiece to be processed from the carrier; A flip assembly, mounted on the platform, and used to drive the platform to flip; The carrier is provided with a first air suction hole; The fixing assembly comprises: An air intake pipe is arranged in the carrier; An air pipe joint, fixed in the carrier, the air pipe joint being connected to the first air suction hole and the air suction pipe; The feeding device also includes: frame; A first driving assembly is provided on the frame, the carrier is carried on the first driving assembly, and the first driving assembly is used to drive the workpiece to be processed to approach or move away from the carrier; A material taking assembly is arranged on the frame, and the material taking assembly moves relative to the frame so that the material taking assembly approaches or moves away from the carrier, and the material taking assembly is used to drive the workpiece to be processed to move; The flip assembly comprises: A first rotating shaft is fixed to one side of the carrier; A flip driving member, which is arranged on the first driving assembly, the first rotating shaft is assembled on the flip driving member, and the flip driving member is used to drive the first rotating shaft to rotate; A second rotating shaft, fixed to the other side of the carrier, the second rotating shaft being rotatably connected to the first driving assembly; The carrier is provided with a through hole; The first driving assembly comprises: A carrier, used for carrying the carrier; A sliding member, configured to be movable relative to the carrier; A support plate connected to the sliding member; The driving column is arranged on the supporting plate, and at least a part of the driving column can pass through the through hole.

2. The feeding device according to claim 1, characterized in that: The carrier comprises: A body, used for carrying the air suction pipe, the body is provided with a second air suction hole, and the air pipe joint is accommodated in the second air suction hole; A receiving plate is arranged on the main body, and the receiving plate is provided with the first air suction hole, and the first air suction hole is connected to the second air suction hole.

3. The feeding device according to claim 1, characterized in that: The feeding device also includes: A second driving assembly is connected to the bearing member, and the second driving assembly can drive the first driving assembly to move up and down.

4. The feeding device according to claim 1, characterized in that: The material taking component comprises: Sliding panels; At least two connecting plates are arranged on the sliding plate at intervals; At least two bearing plates, one of the at least two bearing plates being connected to one of the at least two connecting plates; The at least two connecting plates, the at least two bearing plates and the sliding plate are arranged to form an accommodating space, and a gap for the driving column part to pass through is reserved between adjacent bearing plates.

5. The feeding device according to claim 4, characterized in that: The feeding device also includes: At least two pulleys; A transmission belt, wherein the transmission belt is sleeved on the at least two pulleys; At least two connecting shafts, disposed on the at least two pulleys; At least two driving wheels are arranged on the at least two connecting shafts, the at least two driving wheels are used to carry the material taking assembly, and one connecting shaft of the at least two connecting shafts, one of the at least two pulleys and one of the at least two driving wheels are coaxially arranged; A power member, used for driving one of the at least two pulleys to rotate; At least one roller is located between the two pulleys, the transmission belt is sleeved on the at least one roller, and the at least one roller is used to compress the transmission belt.

6. The feeding device according to claim 5, characterized in that: The sliding plate is provided with a sliding groove, and each of the at least two driving wheels is at least partially accommodated in the sliding groove.

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