Processing equipment

Abstract

A processing device is provided that can grasp the progress of processing of a workpiece. The processing device comprises a chuck table, a cutting unit, a track for temporarily placing the workpiece, a cleaning unit, a display screen (111), and a display information setting unit for setting a progress display screen (112) displayed on the display screen (111). The progress display screen (112) is set with: an internal layout diagram (120) of the device, which has corresponding areas (121, 123, 124) corresponding to the track, the chuck table, and the cleaning unit, which display prescribed colors (301, 303, 304); a workpiece mark, which overlaps and displays the current position of the workpiece in the internal layout diagram (120); and a plurality of grids (131) which represent storage racks for boxes. The color (301, 303, 304) of the corresponding area (121, 123, 124) corresponding to the current position of the workpiece in the storage rack of the box shown in the box (131) is displayed in the box (131).

Description

Technical Field

[0001] The present invention relates to a processing device. Background Art

[0002] Various processing devices are known that hold a plate-like workpiece on a chuck table and cut it with a cutting tool, thin it with a grinding tool, or process it with a laser beam. Most of these processing devices use the following fully automatic processing device: the workpiece is taken out from a box formed with multiple layers and each layer supports a piece of the workpiece, the workpiece is processed on the chuck table, cleaned on the cleaning table, and returned to the box again (for example, refer to Patent Document 1).

[0003] In the processing apparatus disclosed in Patent Document 1 and the like, the area outside the box is covered with an exterior cover for the purpose of preventing foreign matter from adhering to the workpiece or preventing an operator from accidentally getting injured.

[0004] Patent Document 1: Japanese Patent Application Publication No. 2016-15042

[0005] The processing device shown in Patent Document 1 and the like uses an outer cover to cover the area outside the box, so at first glance it is not possible to understand where the workpiece is positioned in the device. In addition, the processing device shown in Patent Document 1 and the like uses numbers to display where the workpiece is being processed among the workpieces stored in the box, but it is difficult to see at a glance, and it is difficult to understand the situation by looking at the screen of the display device from a distant position. Summary of the invention

[0006] The present invention has been made in view of the above problem, and an object of the present invention is to provide a processing device capable of grasping the progress status of processing of a workpiece.

[0007] In order to solve the above-mentioned problems and achieve the purpose, the processing device of the present invention comprises: a chuck worktable, which holds a workpiece; a processing unit, which processes the workpiece held by the chuck worktable; a box loading area, which holds a box having multiple layers for storing the workpiece; a cleaning area, which cleans the workpiece; a conveying unit, which conveys the workpiece between the box, the chuck worktable and the cleaning area; a display screen, which displays the progress of the processing of the workpiece; and a display information setting unit, which sets the information displayed on the display screen, characterized in that the display information setting unit is set as display information: a layout diagram within the device, which has the chuck worktable and the cleaning area, and each area displays a specified color or a specified identification mark; a workpiece mark, which overlaps and displays the current position of the workpiece moved out of the box in the layout diagram within the device; and a plurality of grids, which represent the layer of the box, and the color or specified identification mark of the area corresponding to the current position of the workpiece that was once stored in the layer of the box shown in the grid is displayed in the grid.

[0008] In the processing device, the internal layout diagram of the device may include a transport unit that transports the workpiece.

[0009] In the processing apparatus, a color or identification mark indicating that loading is completed may be displayed in the cell indicating the layer storing the workpieces that have been loaded out of the box and then returned to the box.

[0010] Alternatively, the processing device further comprises a temporary storage area for temporarily storing the workpieces moved out from the box placed in the box loading area, the transport unit transports the workpieces between the box, the temporary storage area, the chuck workbench and the cleaning area, and the layout diagram within the device includes the temporary storage area.

[0011] The present invention has the effect of being able to grasp the progress status of processing of a workpiece. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a perspective view showing a structural example of the processing device according to the first embodiment.

[0013] Figure 2 It is shown Figure 1 A stereoscopic view of a box of a processing device is shown.

[0014] Figure 3 It is shown Figure 1 FIG. 1 is a diagram of a progress status display screen displayed on a display screen of a display unit of a processing device shown in FIG.

[0015] Figure 4 It is shown Figure 1FIG. 1 is a diagram showing an example of a workpiece mark displayed on a display screen of a display unit of a processing device shown in FIG.

[0016] Figure 5 It is shown Figure 1 FIG. 2 is a diagram showing another example of a workpiece mark displayed on the display screen of the display unit of the processing device shown.

[0017] Figure 6 It shows that the Figure 1 The figure shows a progress status display screen when the workpieces on the storage shelf at the lower side of the cassette of the processing device are temporarily placed on the rail.

[0018] Figure 7 It shows that the first transport unit is used to transport the Figure 1 FIG. 1 is a diagram showing a progress status display screen when a workpiece in a storage rack at the lower side of a cassette of a processing apparatus is being conveyed.

[0019] Figure 8 It shows that the Figure 1 The figure shows a progress status display screen when the workpieces in the second storage rack from the bottom of the cassette of the processing device are temporarily placed on the rail.

[0020] Fig. 9 It shows that the Figure 1 The figure shows a progress status display screen when the workpieces in the lowermost storage rack of the cassette of the processing apparatus are held on the chuck table and the workpieces stored in the second storage rack from the bottom are transported by the first transport unit.

[0021] Fig.10 It shows that the second transport unit is used to transport the Figure 1 The figure shows a screen displaying the status of conveying the workpiece on the storage rack at the bottom of the box of the processing device, holding the workpiece once stored in the second storage rack from the bottom on the chuck table, and temporarily placing the workpiece once stored in the third storage rack from the bottom of the box on the track.

[0022] Fig.11 It shows that the Figure 1 The figure shows a progress status display screen when the workpieces in the lowermost storage rack of the cassette of the processing apparatus are held on the rotary table and the workpieces stored in the third storage rack from the bottom of the cassette are transported by the first transport unit.

[0023] Fig.12 It shows that the first transport unit is used to transport the Figure 1The figure shows a screen displaying the status of conveying the workpiece on the storage rack at the bottom side of the box of the processing device shown, conveying the workpiece that was once stored in the second storage rack from the bottom by the second conveying unit, and holding the workpiece that was once stored in the third storage rack from the bottom of the box on the chuck worktable.

[0024] Fig.13 It shows that the Figure 1 The figure shows a progress status display screen when the workpieces in the storage rack at the bottom of the cassette of the processing device are temporarily placed on the rail and the workpieces stored in the second storage rack from the bottom are held on the rotary table.

[0025] Fig.14 It shows that the Figure 1 The figure shows a progress status display screen when the workpieces on the bottom storage rack of the cassette of the processing device are carried into the cassette and the workpieces stored in the fourth storage rack from the bottom are temporarily placed on the rail.

[0026] Fig.15 It shows that the Figure 1 The figure shows a progress status display screen when the workpiece in the uppermost storage shelf of the cassette of the processing device is temporarily placed on the rail after cutting.

[0027] Fig.16 This is a diagram showing a progress status display screen displayed on the display screen of the display unit of the processing device according to the first modification of the first embodiment.

[0028] Fig.17 This is a diagram showing a progress status display screen displayed on the display screen of the display unit of the processing device according to the second modification of the first embodiment.

[0029] Description of symbols

[0030] 1: Processing device; 10: Chuck worktable; 20: Cutting unit (processing unit); 50: Box elevator (box loading area); 60: Box; 64: Storage rack (layer); 70: Cleaning unit (cleaning area); 81: Track (temporary storage area); 90: Transport unit; 100: Control unit; 101: Display information setting unit; 111: Display screen; 112: Status display screen (display information); 120: Layout diagram inside the device; 121: Temporary storage corresponding area; 122: First transport unit corresponding area; 123: Chuck worktable corresponding area; 124: Cleaning corresponding area; 125: Second transport unit corresponding area; 131: Grid; 140, 141: Workpiece mark; 200: Workpiece; 301, 302, 303, 304, 305: Color (specified color); 306: Color indicating completion of loading. DETAILED DESCRIPTION

[0031] With reference to the accompanying drawings, the mode (embodiment) for implementing the present invention is described in detail. The present invention is not limited by the contents described in the following embodiments. In addition, the constituent elements described below include contents that can be easily thought of by those skilled in the art, and substantially the same contents. In addition, the structures described below can be appropriately combined. In addition, various omissions, substitutions or changes in the structure can be made within the scope of the gist of the present invention.

[0032] [Implementation Method 1]

[0033] A processing device according to a first embodiment of the present invention will be described with reference to the drawings. Figure 1 It is a perspective view showing a structural example of the processing device according to the first embodiment. Figure 2 It is shown Figure 1 A stereoscopic view of a box of a processing device is shown. Figure 3 It is shown Figure 1 FIG. 1 is a diagram of a progress status display screen displayed on a display screen of a display unit of a processing device shown in FIG. Figure 4 It is shown Figure 1 FIG. 1 is a diagram showing an example of a workpiece mark displayed on a display screen of a display unit of a processing device shown in FIG. Figure 5 It is shown Figure 1 FIG. 2 is a diagram showing another example of a workpiece mark displayed on the display screen of the display unit of the processing device shown.

[0034] The processing device 1 of the first embodiment is Figure 1 The processing device 1 shown in the figure cuts (equivalent to processing) the workpiece 200. In the first embodiment, the workpiece 200 is a wafer such as a disc-shaped semiconductor wafer or an optical device wafer using silicon, sapphire, gallium, etc. as a base material. The workpiece 200 has a device 203 formed on the front surface 201 in an area divided in a grid shape by a plurality of predetermined dividing lines 202 formed in a grid shape.

[0035] In addition, the workpiece 200 of the present invention may be a so-called TAIKO (registered trademark) wafer having a thin central portion and a thick wall portion formed at the outer periphery. In addition to the wafer, it may also be a rectangular package substrate having a plurality of devices sealed by resin, a ceramic substrate, a ferrite substrate, or a substrate containing at least one of nickel and iron, etc. In the first embodiment, the workpiece 200 is supported by the annular frame 205 by pasting the back surface 204 to the adhesive tape 206 having the annular frame 205 installed at the outer periphery.

[0036] Figure 1 The processing device 1 shown in the figure is a device that uses a chuck table 10 to hold a workpiece 200 and uses a cutting tool 21 to cut along a predetermined dividing line 202. Figure 1 As shown, the processing device 1 includes: a chuck worktable 10, which uses a holding surface 11 to attract and hold the workpiece 200; a cutting unit 20, which is a processing unit that uses a cutting tool 21 to cut the workpiece 200 held by the chuck worktable 10; a shooting unit 30, which shoots the workpiece 200 held by the chuck worktable 10; and a control unit 100.

[0037] In addition, if Figure 1 As shown, the processing device 1 at least has: an X-axis moving unit (not shown) that feeds the chuck table 10 in the X-axis direction parallel to the horizontal direction; a Y-axis moving unit (not shown) that feeds the cutting unit 20 in the Y-axis direction parallel to the horizontal direction and perpendicular to the X-axis direction; and a Z-axis moving unit 40 that feeds the cutting unit 20 in the Z-axis direction parallel to the vertical direction perpendicular to the X-axis direction and the Y-axis direction. Figure 1 As shown, the processing device 1 is a processing device 1 having two cutting units 20, that is, a dicing machine with two spindles, a so-called facing dual-spindle type processing device 1.

[0038] The chuck table 10 is in the shape of a disk, and a holding surface 11 for holding the workpiece 200 is formed of porous ceramics or the like. In addition, the chuck table 10 is configured to be freely movable in the X-axis direction between a processing area below the cutting unit 20 and a loading and unloading area away from below the cutting unit 20 for loading and unloading the workpiece 200, and is configured to be freely rotatable around an axis parallel to the Z-axis direction by a rotary drive source. The chuck table 10 is connected to a vacuum suction source not shown in the figure, and suction is performed by the vacuum suction source to suck and hold the workpiece 200 placed on the holding surface 11. In embodiment 1, the chuck table 10 sucks and holds the back side 204 of the workpiece 200 via the adhesive tape 206. In addition, as Figure 1 As shown, a plurality of clamping parts 12 for clamping the annular frame 205 are provided around the chuck table 10 .

[0039] The cutting unit 20 is a cutting assembly in which a cutting tool 21 for cutting a workpiece 200 held by the chuck table 10 is detachably mounted. The cutting unit 20 is respectively arranged to be movable in the Y-axis direction relative to the workpiece 200 held by the chuck table 10 by the Y-axis moving unit, and is arranged to be movable in the Z-axis direction by the Z-axis moving unit 40.

[0040] like Figure 1As shown, the cutting unit 20 is installed on one column 4 of the gate-shaped support frame 3 erected from the device body 2 by means of the Y-axis moving unit, the Z-axis moving unit 40, etc. Figure 1 As shown, the other cutting unit 20 is installed on the other column 5 of the support frame 3 via the Y-axis moving unit, the Z-axis moving unit 40, etc. In addition, the support frame 3 connects the upper ends of the columns 4 and 5 to each other via the horizontal beam 6.

[0041] The cutting unit 20 can position the cutting tool 21 at any position of the holding surface 11 of the chuck table 10 through the Y-axis moving unit and the Z-axis moving unit 40. The cutting unit 20 includes: a spindle housing 22, which is arranged to be movable in the Y-axis direction and the Z-axis direction through the Y-axis moving unit and the Z-axis moving unit 40; and a spindle (not shown) which is arranged on the spindle housing 22 in a manner that it can rotate freely around the axis and is rotated by a motor, and the cutting tool 21 is installed at the front end.

[0042] The photographing unit 30 is fixed to the cutting unit 20 in such a manner that it moves integrally with the cutting unit 20. The photographing unit 30 has a photographing element for photographing the area to be divided of the workpiece 200 held by the chuck table 10 before cutting. The photographing element is, for example, a CCD (Charge-Coupled Device) photographing element or a CMOS (Complementary MOS) photographing element. The photographing unit 30 photographs the workpiece 200 held by the chuck table 10 to obtain an image for performing alignment, etc., performs alignment between the workpiece 200 and the cutting tool 21, and outputs the obtained image to the control unit 100.

[0043] The X-axis moving unit moves the chuck table 10 in the X-axis direction as the machining feed direction, so that the chuck table 10 and the cutting unit 20 perform machining feed relative to each other along the X-axis direction. The Y-axis moving unit moves the cutting unit 20 in the Y-axis direction as the indexing feed direction, so that the chuck table 10 and the cutting unit 20 perform indexing feed relative to each other along the Y-axis direction. The Z-axis moving unit 40 moves the cutting unit 20 in the Z-axis direction as the cutting feed direction, so that the chuck table 10 and the cutting unit 20 perform cutting feed relative to each other along the Z-axis direction.

[0044] The X-axis moving unit, the Y-axis moving unit and the Z-axis moving unit 40 have: a well-known ball screw, which is configured to rotate freely around the axis; a well-known motor, which causes the ball screw to rotate around the axis; and a well-known guide rail, which supports the chuck table 10 or the cutting unit 20 to be movable in the X-axis direction, the Y-axis direction or the Z-axis direction.

[0045] In addition, the processing device 1 includes: an X-axis direction position detection unit (not shown) for detecting the position of the chuck table 10 in the X-axis direction; a Y-axis direction position detection unit (not shown) for detecting the position of the cutting unit 20 in the Y-axis direction; and a Z-axis direction position detection unit for detecting the position of the cutting unit 20 in the Z-axis direction. The X-axis direction position detection unit and the Y-axis direction position detection unit can be composed of a linear scale and a reading head parallel to the X-axis direction or the Y-axis direction. The Z-axis direction position detection unit detects the position of the cutting unit 20 in the Z-axis direction using a pulse of a motor. The X-axis direction position detection unit, the Y-axis direction position detection unit, and the Z-axis direction position detection unit output the position of the chuck table 10 in the X-axis direction and the Y-axis direction or the Z-axis direction of the cutting unit 20 to the control unit 100. In addition, in the first embodiment, the positions of the components of the processing device 1 in the X-axis direction, the Y-axis direction, and the Z-axis direction are determined using the positions with the pre-set reference position (not shown) as the reference.

[0046] In addition, the processing device 1 has: a box elevator 50, which is a box loading area for loading a box 60 containing a workpiece 200 before and after cutting on an upper surface and moving the box 60 up and down in the Z-axis direction; a cleaning unit 70, which is a cleaning area for cleaning the workpiece 200 after cutting; a temporary storage unit 80, which allows the workpiece 200 to enter and exit relative to the box 60; and a conveying unit 90, which conveys the workpiece 200.

[0047] like Figure 2 As shown, the box 60 has: a bottom plate 61, which is placed on the box elevator 50; a top plate 62, which is spaced apart from the bottom plate 61 in the Z-axis direction and faces each other; and a pair of side plates 63, which connect the ends of the bottom plate 61 and the top plate 62 in the X-axis direction to each other. The pair of side plates 63 are spaced apart from each other in the X-axis direction. The pair of side plates 63 each have a storage rack 64, which is a layer protruding in a direction approaching each other. The box 60 has a plurality of storage racks 64 at equal intervals along the Z-axis direction on each side plate 63. In embodiment 1, 10 storage racks 64 are provided on each side plate 63. The upper surfaces of the storage racks 64 arranged on the pair of side plates 63 and facing each other in the X-axis direction are arranged on the same plane. Each storage rack 64 carries the workpiece 200 on the upper surface and stores the workpiece 200 in the box 60. In the first embodiment, each storage shelf 64 has the annular frame 205 placed on the upper surface.

[0048] In addition, when distinguishing each storage rack 64 from each other, this manual sequentially marks the number 64 with natural numbers that increase from 1, such as -1, -2, -3 ... -10, starting from the object on the lower side, and explains. When the storage racks 64 are not distinguished from each other, only the number 64 is marked and explained. In addition, when distinguishing the processed objects 200 stored in each storage rack 64 from each other, this manual sequentially marks the number 200 with natural numbers that increase from 1, such as -1, -2, -3 ... -10, starting from the processed objects 200 stored in the storage rack 64 on the lower side, and explains. When the processed objects 200 stored in the storage rack 64 are not distinguished from each other, only the number 200 is marked and explained.

[0049] In the first embodiment, the cassette elevator 50 places the cassette 60 on the upper surface, and moves the cassette 60 up and down in the Z-axis direction by a motor (not shown).

[0050] The cleaning unit 70 is disc-shaped and comprises: a rotating table 72 whose holding surface 71 for holding the workpiece 200 is formed of porous ceramics, etc.; and a cleaning liquid supply nozzle (not shown) which supplies a cleaning liquid such as pure water to the workpiece 200 held by the holding surface 71 of the rotating table 72.

[0051] The rotating table 72 is connected to a vacuum suction source (not shown) and sucks the workpiece 200 placed on the holding surface 71 by the vacuum suction source. In addition, the rotating table 72 is arranged to be freely rotatable around an axis parallel to the Z-axis direction by a motor (not shown) or the like. In the first embodiment, the cleaning unit 70 supplies cleaning liquid to the workpiece 200 from a cleaning liquid supply nozzle while rotating the rotating table 72 that sucks and holds the back side 204 of the workpiece 200 through the adhesive tape 206 around the axis, thereby cleaning the workpiece 200 held by the holding surface 71.

[0052] The temporary placement unit 80 carries out a workpiece 200 before cutting from the box 60 placed on the box elevator 50, and carries out the workpiece 200 after cutting into the box 60. The temporary placement unit 80 is configured to include: a carrying in and out unit 83 that carries out the workpiece 200 before cutting from the box 60, and carries out the workpiece 200 after cutting into the box 60; and a pair of rails 81 that serve as a temporary placement area for temporarily placing the workpiece 200 before cutting carried out from the box 60 placed on the box elevator 50, and temporarily placing the workpiece 200 after cutting. In addition, the temporary placement unit 80 has a detection sensor 82 that detects the workpiece 200 temporarily placed on the rail 81. The detection sensor 82 outputs the detection result to the control unit 100.

[0053] The transport unit 90 transports the workpiece 200 between the cassette 60, the rail 81 of the temporary placement unit 80, the chuck table 10, and the rotary table 72 of the cleaning unit 70. The transport unit 90 includes a first transport unit 91 and a second transport unit 92. The first transport unit 91 transports the workpiece 200 before cutting temporarily placed on the rail 81 of the temporary placement unit 80 to the chuck table 10, and transports the cleaned workpiece 200 on the rotary table 72 of the cleaning unit 70 to the rail 81 of the temporary placement unit 80. The second transport unit 92 transports the cut workpiece 200 on the chuck table 10 to the rotary table 72 of the cleaning unit 70.

[0054] In this specification, the first conveying unit 91 and the second conveying unit 92 have the same parts in structure, so the first conveying unit 91 is used as a representative for description below, and the same parts of the second conveying unit 92 as the first conveying unit 91 are marked with the same reference numerals and the description is omitted. The first conveying unit 91 includes: a unit body 94, which is provided to be movable in the Y-axis direction and to be movable in the Z-axis direction on the second support frame 7 which is provided upright from the device body 2 and is arranged at a position closer to the loading and unloading area than the support frame 3; and a suction member 93, which is installed on the unit body 94 and connected to a vacuum suction source (not shown), and sucks and holds the annular frame 205 supporting the workpiece 200. The first conveying unit 91 sucks and holds the annular frame 205 by the suction member 93, and moves the unit body 94 in the Y-axis direction and the Z-axis direction to convey the workpiece 200.

[0055] The control unit 100 controls the above-mentioned units of the processing device 1 respectively so that the processing device 1 performs processing operations on the workpiece 200. Specifically, the control unit 100 carries out the workpiece 200 before cutting to the temporary placement unit 80 and temporarily places it on the track 81, and transports the workpiece 200 temporarily placed on the track 81 to the chuck table 10 through the first transport unit 91. After the workpiece 200 is sucked and held on the chuck table 10 and the annular frame 205 is clamped by the clamping unit 12, the control unit 100 moves the chuck table 10 through the X-axis moving unit, and photographs the workpiece 200 on the chuck table 10 through the photographing unit 30. The control unit 100 performs alignment, performs alignment between the workpiece 200 and the cutting tool 21, and makes the cutting tool 21 cut into the predetermined dividing line 202 while relatively moving the chuck table 10 and the cutting tool 21 of the cutting unit 20 along the predetermined dividing line 202.

[0056] After the cutting tool 21 cuts into all the planned dividing lines 202, the control unit 100 releases the suction and holding of the chuck table 10 and the clamping of the clamping part 12, and transports the workpiece 200 on the chuck table 10 to the rotary table 72 through the second transport unit 92. After the workpiece 200 is suctioned and held by the rotary table 72 and cleaned by the cleaning unit 70, the control unit 100 releases the suction and holding of the rotary table 72, and transports the workpiece 200 on the rotary table 72 to the rail 81 through the first transport unit 91. After the lower surface of the annular frame 205 supporting the workpiece 200 on the rail 81 and the upper surface of the storage rack 64 that is the same as before being carried out are positioned on the same plane by the box elevator 50, the control unit 100 transports the workpiece 200 on the rail 81 into the box 60 through the temporary placement unit 80.

[0057] In addition, the control unit 100 is a computer, and the control unit 100 has: an operation processing device having a microprocessor such as a CPU (central processing unit); a storage device having a memory such as a ROM (readonly memory) or a RAM (random access memory); and an input / output interface device. The operation processing device of the control unit 100 performs operation processing according to a computer program stored in the storage device, and outputs a control signal for controlling the processing device 1 to the above-mentioned units of the processing device 1 via the input / output interface device.

[0058] The control unit 100 determines whether the workpiece 200 is temporarily placed on the temporary placement rail 81 based on the detection result of the detection sensor 82. The control unit 100 determines whether the chuck table 10 is sucking and holding the workpiece 200 using the holding surface 11 based on the negative pressure of the vacuum suction source connected to the chuck table 10. The control unit 100 determines whether the rotary table 72 is sucking and holding the workpiece 200 using the holding surface 71 based on the negative pressure of the vacuum suction source connected to the rotary table 72. The control unit 100 determines whether each conveying unit 91, 92 is sucking and holding the workpiece 200 using the suction component 93 based on the negative pressure of the vacuum suction source connected to the suction component 93 of each conveying unit 91, 92.

[0059] The processing device 1 has: a display unit 110 ( Figure 1), which is connected to the control unit 100 and has a display screen 111 that displays the state or image of the processing action, etc.; and an input unit, which is connected to the control unit 100 and is used by the operator when registering the processing content information, etc. The display unit 110 is composed of a liquid crystal display device, etc. The input unit is composed of an external input device such as a touch panel or a keyboard provided on the display screen 111 of the display unit 110, etc.

[0060] The display unit 110 is controlled by the control unit 100 so as to display the processing operation of the processing device 1. Figure 3 The progress status display screen 112 as display information is displayed on the display screen 111. The progress status display screen 112 shows the progress status of the cutting process of the workpiece 200 by the processing device 1.

[0061] like Figure 3 As shown, the status display screen 112 has: a start / stop input area 113 for inputting the start and stop of the cutting process of the processing device 1; a captured image display area 114, where the capturing unit 30 captures and displays the image; a layout diagram 120 inside the device; and a layout diagram 130 inside the box.

[0062] The in-device layout diagram 120 includes a temporary storage corresponding area 121 corresponding to the rail 81 of the temporary storage unit, a first transport unit corresponding area 122 corresponding to the first transport unit 91, a chuck table corresponding area 123 corresponding to the chuck table 10, a cleaning corresponding area 124 corresponding to the rotary table 72 of the cleaning unit 70, and a second transport unit corresponding area 125 corresponding to the second transport unit 92. Each corresponding area 121, 122, 123, 124, 125 displays a predetermined color or a predetermined identification mark. In the first embodiment, each corresponding area 121, 122, 123, 124, 125 displays mutually different colors 301, 302, 303, 304, 305. In addition, in the first embodiment, the in-device layout diagram 120 includes a blank area 126 that does not correspond to any of the units of the processing device 1. The blank area 126 can be used to correspond to other units of the processing device 1 or units added to the processing device 1 .

[0063] The box internal layout diagram 130 has a plurality of grids 131 corresponding to the storage racks 64. In the first embodiment, the grids 131 correspond to the storage racks 64 in a one-to-one ratio, and 10 of the grids 131 are arranged in the vertical direction of the display screen 111, and correspond to the storage racks 64 of the box 60 from the lower storage rack 64 to the upper storage rack 64 in order from the bottom to the top. In addition, when the grids 131 are distinguished from each other, the description is given by marking the reference numerals 131 with natural numbers that increase from 1, such as -1, -2, -3 ... -10, from the object on the lower side, and when the grids 131 are not distinguished from each other, the description is given by marking only the reference numerals 131.

[0064] In addition, if Figure 1 As shown in the figures, the control unit 100 includes a display information setting unit 101 for setting information to be displayed on the display screen 111. In order to display the above-mentioned device layout diagram 120 and box layout diagram 130 on the display screen 111, the device layout diagram 120 and box layout diagram 130 are set as display information in the display information setting unit 101. That is, the display information setting unit 101 stores information for displaying the device layout diagram 120 and box layout diagram 130 and a program for displaying the device layout diagram 120 and box layout diagram 130 on the display screen 111.

[0065] In order to show the current position of the workpiece 200 unloaded from the box 60, the display information setting unit 101 displays the display information 111 by overlapping the internal layout diagram 120 of the display screen 111. Figure 4 and Figure 5 The workpiece marks 140 and 141 shown are set as display information. Figure 4 and Figure 5 The workpiece marks 140 and 141 shown schematically show the planar shapes of the workpiece 200 and the annular frame 205. In addition, in this specification, when distinguishing between the storage racks 64 that store the workpieces 200 shown by the workpiece marks 140 and 141 before cutting, the numbers 140 and 141 are marked with natural numbers that increase from 1, such as -1, -2, -3 ... -10, starting from the workpiece mark representing the workpiece 200 stored in the storage rack 64 on the lower side, and when the storage racks 64 that store the workpieces 200 shown by the workpiece marks 140 and 141 before cutting are not distinguished from each other, they are described only by marking the numbers 140 and 141.

[0066] The display information setting unit 101 displays the workpiece marks 140 and 141 so as to overlap with the corresponding areas 121, 122, 123, 124, and 125 corresponding to the current position of the workpiece 200 in the processing device 1. Figure 4The workpiece mark 140 shown is used before being taken out of the box 60 and held on the chuck table 10. Figure 5 The workpiece mark 141 shown is used after being held on the chuck table 10 until it is carried into the box 60. That is, the display information setting unit 101 stores information indicating the workpiece marks 140 and 141 and a program for overlapping and displaying the workpiece marks 140 and 141 with the corresponding areas 121, 122, 123, 124, and 125 of the display screen 111.

[0067] In addition, the display information setting unit 101 stores a grid display program 150, and the grid display program 150 is executed during the cutting process of the processing device 1. The grid display program 150 is a program for displaying the colors 301, 302, 303, 304, 305 or a predetermined identification mark of each corresponding area 121, 122, 123, 124, 125 corresponding to the current position of the workpiece 200 stored in the storage rack 64 of the box 60 shown in the grid 131. In embodiment 1, the grid display program 150 displays the color corresponding to each corresponding area 121, 122, 123, 124, 125 in each grid 131 (in embodiment 1, the same colors as the corresponding areas 121, 122, 123, 124, 125 301, 302, 303, 304, 305), and each corresponding area 121, 122, 123, 124, 125 corresponds to the current position of the workpiece 200 stored in the storage rack 64 corresponding to each grid 131 before cutting in the processing device 1.

[0068] In addition, the grid display program 150 is a program for displaying a color 306 or an identification mark indicating that the loading is completed in the grid 131 representing the storage rack 64 storing the workpiece 200 that was unloaded from the box 60 and returned to the box 60. The grid display program 150 displays a color 306 (for example, gray, in the case of gray) indicating that the loading is completed in the grid 131 corresponding to the storage rack 64 storing the workpiece 200 that was unloaded from the box 60 and returned to the box 60. Figure 3 Indicated by dense parallel slashes).

[0069] The function of the display information setting unit 101 is realized by storing information representing a layout diagram 120 inside the device, information representing a layout diagram inside the box 130, information representing the processed object marks 140 and 141, and a grid display program 150 in the storage device of the control unit 100, and the operation processing device performs operation processing according to the computer program stored in the storage device.

[0070] In addition, the processing device 1 covers the area other than the box 60 on the device body 2 with an exterior cover (not shown), and attaches the display unit 110 to the exterior cover.

[0071] Next, this specification describes the processing operation of the processing device 1 having the above-mentioned structure. Figure 6 It shows that the Figure 1 The figure shows a progress status display screen when the workpieces on the storage shelf at the lower side of the cassette of the processing device are temporarily placed on the rail. Figure 7 It shows that the first transport unit is used to transport the Figure 1 FIG. 1 is a diagram showing a progress status display screen when a workpiece in the storage rack at the lower side of a cassette of a processing device is being conveyed. Figure 8 It shows that the Figure 1 The figure shows a progress status display screen when the workpieces in the second storage rack from the bottom of the cassette of the processing device are temporarily placed on the rail. Fig. 9 It shows that the Figure 1 The figure shows a progress status display screen when the workpieces in the lowermost storage rack of the cassette of the processing apparatus are held on the chuck table and the workpieces stored in the second storage rack from the bottom are transported by the first transport unit. Fig.10 It shows that the second transport unit is used to transport the Figure 1 The figure shows a screen displaying the status of conveying the workpiece on the storage rack at the bottom of the box of the processing device, holding the workpiece once stored in the second storage rack from the bottom on the chuck table, and temporarily placing the workpiece once stored in the third storage rack from the bottom of the box on the track. Fig.11 It shows that the Figure 1 The figure shows a progress status display screen when the workpieces in the lowermost storage rack of the cassette of the processing apparatus are held on the rotary table and the workpieces stored in the third storage rack from the bottom of the cassette are transported by the first transport unit. Fig.12 It shows that the first transport unit is used to transport the Figure 1 The figure shows a screen displaying the status of conveying the workpiece on the storage rack at the bottom side of the box of the processing device shown, conveying the workpiece that was once stored in the second storage rack from the bottom by the second conveying unit, and holding the workpiece that was once stored in the third storage rack from the bottom of the box on the chuck worktable. Fig.13 It shows that the Figure 1 The figure shows a progress status display screen when the workpieces in the storage rack at the bottom of the cassette of the processing device are temporarily placed on the rail and the workpieces stored in the second storage rack from the bottom are held on the rotary table. Fig.14 It shows that the Figure 1 The figure shows a progress status display screen when the workpieces on the bottom storage rack of the cassette of the processing device are carried into the cassette and the workpieces stored in the fourth storage rack from the bottom are temporarily placed on the rail. Fig.15is to be included in Figure 1 The figure shows a progress status display screen when the workpiece in the uppermost storage shelf of the cassette of the processing device is temporarily placed on the rail after cutting.

[0072] First, in the processing operation, the operator registers the processing content information in the control unit 100, stores the workpiece 200 before cutting processing in the box 60, and sets the box 60 on the upper surface of the box elevator 50. Then, when the processing device 1 receives the start instruction of the processing operation from the operator, the processing operation starts. In the first embodiment, the control unit 100 of the processing device 1 displays the progress display screen 112 on the display screen 111 of the display unit 110, and when the operator's operation on the start / stop input area 113 is received, the processing operation of the processing device 1 is started. In the first embodiment, in the processing operation, the processing device 1 performs cutting processing on the workpieces 200 stored in the plurality of storage racks 64 of the box 60 in sequence from the workpieces 200 stored in the storage racks 64 on the lower side to the workpieces 200 stored in the storage racks 64 on the upper side. However, in the present invention, the order in which the processing device 1 performs cutting processing on the workpieces 200 in the box 60 is not limited to the order shown in the first embodiment.

[0073] When the processing device 1 starts the processing operation, the box 60 is positioned by the box elevator 50 so that the lower surface of the ring frame 205 supporting the workpiece 200-1 stored in the lowest storage rack 64-1 is flush with the upper surface of the track 81. The control unit 100 uses the loading and unloading unit 83 of the temporary storage unit 80 to load the workpiece 200-1 stored in the lowest storage rack 64-1 from the box 60 and temporarily places the loaded workpiece 200-1 on the track 81. When the detection sensor 82 detects the workpiece 200-1 temporarily placed on the track 81, the control unit 100 moves the workpiece 200-1 as shown in the figure. Figure 6 As shown, the workpiece mark 140-1 indicating the workpiece 200-1 that was once stored in the bottom storage rack 64-1 is displayed in an overlapping manner in the temporary storage corresponding area 121 of the status display screen 112. In addition, the control unit 100 displays the same color 301 as the temporary storage corresponding area 121 in the cell 131-1 corresponding to the bottom storage rack 64-1 among the plurality of cells 131.

[0074] The control unit 100 uses the first conveying unit 91 to suck and hold the annular frame 205 supporting the workpiece 200-1 temporarily placed on the rail 81 of the temporary placement unit 80, and moves the first conveying unit 91 and the chuck table 10 relatively by the X-axis moving unit, etc., so that the first conveying unit 91 moves toward the upper side of the chuck table 10. When the control unit 100 detects that the first conveying unit 91 is sucking and holding the annular frame 205 based on the negative pressure of the vacuum suction source connected to the suction component 93 of the first conveying unit 91, as shown in FIG. Figure 7 As shown, the workpiece mark 140-1 indicating the workpiece 200-1 that was stored in the bottom storage rack 64-1 is displayed in an overlapping manner in the first transport unit corresponding area 122 of the status display screen 112. In addition, the control unit 100 displays the same color 302 as the first transport unit corresponding area 122 in the cell 131-1 corresponding to the bottom storage rack 64-1 among the plurality of cells 131.

[0075] The control unit 100 positions the box 60 by the box elevator 50 so that the lower surface of the ring frame 205 supporting the workpiece 200-2 stored in the second storage rack 64-2 from the bottom is flush with the upper surface of the track 81. The control unit 100 moves the workpiece 200-2 stored in the second storage rack 64-2 from the box 60 by the loading and unloading unit 83 of the temporary storage unit 80, and temporarily places the moved workpiece 200-2 on the track 81. When the detection sensor 82 detects the workpiece 200-2 temporarily placed on the track 81, the control unit 100 moves the workpiece 200-2 as shown in the figure. Figure 8 As shown, the workpiece mark 140-2 indicating the workpiece 200-2 that was once stored in the second storage rack 64-2 from the bottom is displayed in the temporary storage corresponding area 121 of the status display screen 112. In addition, the control unit 100 displays the same color 301 as the temporary storage corresponding area 121 in the cell 131-2 corresponding to the second storage rack 64-2 from the bottom among the plurality of cells 131.

[0076] The control unit 100 places the workpiece 200-1 on the holding surface 11 of the chuck table 10 through the first transport unit 91, and the chuck table 10 sucks and holds the workpiece 200-1, and clamps the annular frame 205 through the clamping portion 12. When the control unit 100 detects that the chuck table 10 sucks and holds the workpiece 200-1 based on the negative pressure of the vacuum suction source connected to the chuck table 10, as shown in FIG. Fig. 9As shown, the workpiece mark 141-1 indicating the workpiece 200-1 that was once stored in the bottom storage rack 64-1 is displayed in an overlapping manner in the chuck table corresponding area 123 of the status display screen 112. In addition, the control unit 100 displays the same color 303 as the chuck table corresponding area 123 in the cell 131-1 corresponding to the bottom storage rack 64-1 among the plurality of cells 131.

[0077] The control unit 100 moves the chuck table 10 toward the processing area through the X-axis moving unit, photographs the workpiece 200-1 through the photographing unit 30, and performs alignment based on the image photographed by the photographing unit 30. At this time, the control unit 100 displays the image photographed by the photographing unit 30 in the photographing image display area 114 of the progress display screen 112.

[0078] The control unit 100 moves the workpiece 200-1 and the cutting unit 20 relatively along the predetermined dividing lines 202, and causes the cutting tool 21 to cut into each predetermined dividing line 202 to divide the workpiece 200-1 into individual devices 203. When the control unit 100 causes the cutting tool 21 to cut into all the predetermined dividing lines 202 of the workpiece 200-1 held by the chuck table 10, the holding of the chuck table 10 and the clamping of the clamping unit 12 are released.

[0079] In addition, the control unit 100 uses the first conveying unit 91 to suck and hold the annular frame 205 supporting the workpiece 200-2 temporarily placed on the rail 81 of the temporary placement unit 80, and moves the first conveying unit 91 and the chuck table 10 relatively by the X-axis moving unit, etc., so that the first conveying unit 91 moves toward the upper side of the chuck table 10. When the control unit 100 detects that the first conveying unit 91 is sucking and holding the annular frame 205 based on the negative pressure of the vacuum suction source connected to the suction component 93 of the first conveying unit 91, as shown in FIG. Fig. 9 As shown, the workpiece mark 140-2 indicating the workpiece 200-2 that was stored in the second storage rack 64-2 from the bottom is displayed in an overlapping manner in the first transport unit corresponding area 122 of the status display screen 112. In addition, the control unit 100 displays the same color 302 as that in the first transport unit corresponding area 122 in the cell 131-2 corresponding to the second storage rack 64-2 from the bottom among the plurality of cells 131.

[0080] The control unit 100 uses the second transport unit 92 to suck and hold the annular frame 205 supporting the workpiece 200-1 placed on the holding surface 11 of the chuck table 10, and moves the second transport unit 92 toward the upper side of the rotary table 72. When the control unit 100 detects that the second transport unit 92 is sucking and holding the annular frame 205 based on the negative pressure of the vacuum suction source connected to the suction component 93 of the second transport unit 92, the second transport unit 92 is sucked and held. Fig.10 As shown, the workpiece mark 141-1 indicating the workpiece 200-1 that was stored in the bottom storage rack 64-1 is displayed in an overlapping manner in the second transport unit corresponding area 125 of the status display screen 112. In addition, the control unit 100 displays the same color 305 as the second transport unit corresponding area 125 in the cell 131-1 corresponding to the bottom storage rack 64-1 among the plurality of cells 131.

[0081] The control unit 100 places the workpiece 200-2 on the holding surface 11 of the chuck table 10 through the first transport unit 91, and the chuck table 10 sucks and holds the workpiece 200-2, and the clamping unit 12 clamps the annular frame 205. When the control unit 100 detects that the chuck table 10 sucks and holds the workpiece 200-2 based on the negative pressure of the vacuum suction source connected to the chuck table 10, as shown in FIG. Fig.10 As shown, the workpiece mark 141-2 indicating the workpiece 200-2 that was once stored in the second storage rack 64-2 from the bottom is displayed in an overlapping manner in the chuck table corresponding area 123 of the status display screen 112. In addition, the control unit 100 displays the same color 303 as the chuck table corresponding area 123 in the grid 131-2 corresponding to the second storage rack 64-2 from the bottom among the plurality of grids 131. The control unit 100 divides the workpiece 200-2 into individual components 203 in the same manner as the workpiece 200-1. When the control unit 100 causes the cutting tool 21 to cut into all the predetermined dividing lines 202 of the workpiece 200-2 held by the chuck table 10, the suction and holding of the chuck table 10 and the clamping of the clamping part 12 are released.

[0082] In addition, the control unit 100 positions the box 60 by the box elevator 50 so that the lower surface of the annular frame 205 supporting the workpiece 200-3 stored in the third storage rack 64-3 from the bottom is flush with the upper surface of the track 81. The control unit 100 removes the workpiece 200-3 stored in the third storage rack 64-3 from the box 60 by the loading and unloading unit 83 of the temporary storage unit 80, and temporarily places the removed workpiece 200-3 on the track 81. When the detection sensor 82 detects the workpiece 200-3 temporarily placed on the track 81, the control unit 100 moves the workpiece 200-3 as shown in FIG. Fig.10 As shown, the workpiece mark 140-3 indicating the workpiece 200-3 that was once stored in the third storage rack 64-3 from the bottom is displayed in the temporary storage corresponding area 121 of the status display screen 112. In addition, the control unit 100 displays the same color 301 as the temporary storage corresponding area 121 in the cell 131-3 corresponding to the third storage rack 64-3 from the bottom among the plurality of cells 131.

[0083] The control unit 100 places the workpiece 200-1 on the holding surface 71 of the rotary table 72 through the second conveying unit 92, and the workpiece 200-1 is sucked and held by the rotary table 72. When the control unit 100 detects that the rotary table 72 is sucking and holding the workpiece 200-1 based on the negative pressure of the vacuum suction source connected to the rotary table 72, the workpiece 200-1 is sucked and held. Fig.11 As shown, the workpiece mark 141-1 indicating the workpiece 200-1 that was once stored in the lowest storage rack 64-1 is displayed in an overlapping manner in the cleaning corresponding area 124 of the status display screen 112. In addition, the control unit 100 displays the same color 304 as the cleaning corresponding area 124 in the cell 131-1 corresponding to the lowest storage rack 64-1 among the plurality of cells 131. The control unit 100 cleans the workpiece 200-1 by supplying cleaning liquid from the cleaning liquid supply nozzle while rotating the rotary table 72 around the axis through the cleaning unit 70. After the control unit 100 cleans the workpiece 200-1 for a predetermined time through the cleaning unit 70, the rotation of the rotary table 72 and the supply of cleaning liquid are stopped, and the suction holding of the rotary table 72 is released.

[0084] In addition, the control unit 100 uses the first conveying unit 91 to suck and hold the annular frame 205 supporting the workpiece 200-3 temporarily placed on the rail 81 of the temporary placement unit 80, and moves the first conveying unit 91 and the chuck table 10 relatively by the X-axis moving unit, etc., so that the first conveying unit 91 moves toward the upper side of the chuck table 10. When the control unit 100 detects that the first conveying unit 91 is sucking and holding the annular frame 205 based on the negative pressure of the vacuum suction source connected to the suction component 93 of the first conveying unit 91, as shown in FIG. Fig.11 As shown, the workpiece mark 140-3 indicating the workpiece 200-3 that was stored in the third storage rack 64-3 from the bottom is displayed in an overlapping manner in the first transport unit corresponding area 122 of the status display screen 112. In addition, the control unit 100 displays the same color 302 as that in the first transport unit corresponding area 122 in the cell 131-3 corresponding to the third storage rack 64-3 from the bottom among the plurality of cells 131.

[0085] The control unit 100 uses the second transport unit 92 to suck and hold the annular frame 205 supporting the workpiece 200-2 placed on the holding surface 11 of the chuck table 10, and moves the second transport unit 92 toward the upper side of the rotary table 72. When the control unit 100 detects that the second transport unit 92 is sucking and holding the annular frame 205 based on the negative pressure of the vacuum suction source connected to the suction component 93 of the second transport unit 92, the second transport unit 92 is sucked and held, as shown in FIG. Fig.12 As shown, the workpiece mark 141-2 indicating the workpiece 200-2 that was stored in the second storage rack 64-2 from the bottom is displayed in an overlapping manner in the second transport unit corresponding area 125 of the status display screen 112. In addition, the control unit 100 displays the same color 305 as the second transport unit corresponding area 125 in the cell 131-2 corresponding to the second storage rack 64-2 from the bottom among the plurality of cells 131.

[0086] The control unit 100 places the workpiece 200-3 on the holding surface 11 of the chuck table 10 through the first transport unit 91, and the chuck table 10 sucks and holds the workpiece 200-3, and clamps the annular frame 205 through the clamping portion 12. When the control unit 100 detects that the chuck table 10 sucks and holds the workpiece 200-3 based on the negative pressure of the vacuum suction source connected to the chuck table 10, as shown in FIG. Fig.12 As shown, the workpiece mark 141-3 indicating the workpiece 200-3 that was once stored in the third storage rack 64-2 from the bottom is displayed in an overlapping manner in the chuck table corresponding area 123 of the status display screen 112. In addition, the control unit 100 displays the same color 303 as the chuck table corresponding area 123 in the cell 131-3 corresponding to the third storage rack 64-3 from the bottom among the plurality of cells 131. The control unit 100 divides the workpiece 200-3 into individual components 203 in the same manner as the workpieces 200-1 and 200-2. When the control unit 100 divides the workpiece 200-3 held by the chuck table 10 into individual components 203, the suction holding of the chuck table 10 and the clamping of the clamping unit 12 are released.

[0087] In addition, the control unit 100 uses the first conveying unit 91 to suck and hold the annular frame 205 supporting the workpiece 200-1 placed on the rotary table 72, and moves the first conveying unit 91 toward the upper side of the track 81 of the temporary placement unit 80. When the control unit 100 detects that the first conveying unit 91 is sucking and holding the annular frame 205 based on the negative pressure of the vacuum suction source connected to the suction component 93 of the first conveying unit 91, as shown in FIG. Fig.12As shown, the workpiece mark 141-1 indicating the workpiece 200-1 that was stored in the bottom storage rack 64-1 is displayed in an overlapping manner in the first transport unit corresponding area 122 of the status display screen 112. In addition, the control unit 100 displays the same color 302 as the first transport unit corresponding area 122 in the cell 131-1 corresponding to the bottom storage rack 64-1 among the plurality of cells 131.

[0088] The control unit 100 places the workpiece 200-2 on the holding surface 71 of the rotary table 72 through the second conveying unit 92, and the workpiece 200-2 is sucked and held by the rotary table 72. When the control unit 100 detects that the rotary table 72 is sucking and holding the workpiece 200-2 based on the negative pressure of the vacuum suction source connected to the rotary table 72, the workpiece 200-2 is sucked and held. Fig.13 As shown, the workpiece mark 141-2 indicating the workpiece 200-2 that was stored in the second storage rack 64-2 from the bottom is displayed in the cleaning corresponding area 124 of the progress display screen 112. In addition, the control unit 100 displays the same color 304 as the cleaning corresponding area 124 in the cell 131-2 corresponding to the second storage rack 64-2 from the bottom among the plurality of cells 131. The control unit 100 cleans the workpiece 200-2 in the same manner as the workpiece 200-1 through the cleaning unit 70, and releases the suction holding of the rotary table 72 when the cleaning is completed.

[0089] In addition, the control unit 100 places the workpiece 200-1 on the track 81 of the temporary placement unit 80 through the first conveying unit 91. When the detection sensor 82 detects the workpiece 200-1 temporarily placed on the track 81, as shown in FIG. Fig.13 As shown, the workpiece mark 141-1 indicating the workpiece 200-1 that was once stored in the bottom storage rack 64-1 is displayed in an overlapping manner in the temporary storage corresponding area 121 of the status display screen 112. In addition, the control unit 100 displays the same color 301 as the temporary storage corresponding area 121 in the cell 131-1 corresponding to the bottom storage rack 64-1 among the plurality of cells 131.

[0090] The control unit 100 positions the box 60 by the box elevator 50 so that the upper surface of the bottom storage rack 64-1 for storing the workpiece 200-1 placed on the track 81 is flush with the upper surface of the track 81. The control unit 100 moves the workpiece 200-1 on the track 81 to the bottom storage rack 64-1 by the loading and unloading unit 83 of the temporary storage unit 80. When the detection sensor 82 does not detect the workpiece 200-1 temporarily placed on the track 81, the control unit 100 moves the workpiece 200-1 temporarily placed on the track 81 to the bottom storage rack 64-1. Fig.14As shown, a color 306 indicating that loading is completed is displayed in the cell 131-1 corresponding to the lowermost storage rack 64-1 among the plurality of cells 131.

[0091] The control unit 100 positions the box 60 by the box elevator 50 so that the lower surface of the ring frame 205 supporting the workpiece 200-4 stored in the fourth storage rack 64-4 from the bottom is flush with the upper surface of the track 81. The control unit 100 moves the workpiece 200-4 stored in the fourth storage rack 64-4 from the bottom out of the box 60 by the moving-in and moving-out unit 83 of the temporary placement unit 80, and temporarily places the moved-out workpiece 200-4 on the track 81. When the detection sensor 82 detects the workpiece 200-4 temporarily placed on the track 81, the control unit 100 moves the workpiece 200-4 as shown in FIG. Fig.14 As shown, the workpiece mark 140-4 indicating the workpiece 200-4 that was once stored in the fourth storage rack 64-4 from the bottom is displayed in an overlapping manner in the temporary storage corresponding area 121 of the progress display screen 112. In addition, the control unit 100 displays the same color 301 as the temporary storage corresponding area 121 in the cell 131-4 corresponding to the fourth storage rack 64-4 from the bottom among the plurality of cells 131.

[0092] Thus, the processing device 1 displays the colors 301, 302, 303, 304, 305 of the corresponding areas 121, 122, 123, 124, 125 corresponding to the current positions of the workpieces 200 that were once stored in the storage racks 64 of the box 60 shown in the grids 131 in each grid 131 of the box layout diagram 130 of the progress display screen 112 on the display screen 111 of the display unit 110. In addition, the processing device 1 displays the color 306 indicating that the loading is completed in the grid 131 indicating the storage racks 64 storing the workpieces 200 that were taken out of the box 60 and returned to the box 60 again.

[0093] In addition, the processing device 1 sequentially transports the workpiece 200 from the box 60 to the track 81 of the temporary storage unit 80, the first transport unit 91, the chuck table 10, the second transport unit 92, the rotary table 72, the first transport unit 91, the track 81 of the temporary storage unit 80, and the box 60 for cutting. In the first embodiment, the control unit 100 sequentially cuts the workpiece 200 from the lower side of the box 60, and when the detection sensor 82 detects the workpiece 200-10 temporarily placed on the track 81 that has been cut by the tenth storage rack 64-10 from the bottom, as shown in FIG. Fig.15As shown, the temporary storage corresponding area 121 of the progress display screen 112 overlaps the workpiece mark 141-10 indicating the workpiece 200-10 that was stored in the tenth storage rack 64-10 from the bottom. In addition, the control unit 100 displays the same color 301 as the temporary storage corresponding area 121 in the cell 131-10 corresponding to the tenth storage rack 64-10 from the bottom among the plurality of cells 131. At this time, the control unit 100 Fig.15 As shown, the color 306 indicating the completion of loading is displayed in the plurality of grids 131 from the grid 131-1 corresponding to the bottom storage rack 64-1 to the grid 131-9 corresponding to the ninth storage rack 64-9 from the bottom. The control unit 100 positions the box 60 through the box elevator 50 so that the upper surface of the uppermost storage rack 64-10 for storing the workpieces 200-10 placed on the track 81 is on the same plane as the upper surface of the track 81. The control unit 100 loads the workpieces 200-10 on the track 81 into the uppermost storage rack 64-10 through the loading and unloading unit 83 of the temporary storage unit 80. In this way, when the cutting processing of all the workpieces 200 in the box 60 is completed, the control unit 100 of the processing device 1 ends the processing action.

[0094] In the processing device 1 of the first embodiment, the in-device layout diagram 120 and the in-box layout diagram 130 are set on the progress display screen 112 of the display screen 111 displayed on the display unit 110. The processing device 1 sets mutually different colors 301, 302, 303, 304, 305 to the corresponding areas 121, 122, 123, 124, 125 of the in-device layout diagram 120 in advance, and the in-box layout diagram 130 has grids 131 corresponding to the workpiece 200 in the box 60 set. The processing device 1 displays the colors 301, 302, 303, 304, 305 of the corresponding areas 121, 122, 123, 124, 125 corresponding to the current position of the workpiece 200 that was stored in the storage rack 64 of the box 60 corresponding to the grid 131 in each grid 131. Therefore, the processing device 1 can allow the operator to recognize at a glance where the workpiece 200 removed from each storage rack 64 of the box 60 is located in the layout diagram within the device through the colors 301, 302, 303, 304, and 305 of the grid 131. As a result, the processing device 1 has the effect of being able to grasp the progress of the processing of the workpiece 200.

[0095] In addition, the processing device 1 displays the workpiece marks 140 and 141 in overlapping relation to the corresponding regions 121, 122, 123, 124, and 125, so that the operator can recognize the current position of each workpiece 200 at a glance by checking the corresponding regions 121, 122, 123, 124, and 125.

[0096] In addition, the processing device 1 sets the transport unit corresponding areas 122 and 125 corresponding to the transport units 91 and 92 on the progress status display screen 112. As a result, the processing device 1 can also allow the operator to recognize at a glance the status of the workpiece 200 being transported in the processing device 1 through the colors 301, 302, 303, 304, 305, etc. of the confirmation grid 131.

[0097] In addition, the processing device 1 displays a color 306 indicating that the loading is completed in the grid 131 corresponding to the storage rack 64 that stores the workpiece 200 that has been taken out of the box 60 and subjected to cutting processing and loaded into the box 60, so that by confirming the layout diagram 130 inside the box, the operator can recognize the workpiece 200 that has been processed at a glance.

[0098] [Modification 1]

[0099] A processing device according to a first modification of the first embodiment of the present invention will be described with reference to the drawings. Fig.16 1 is a diagram showing a progress status display screen displayed on a display screen of a display unit of a processing device according to a first modification of the first embodiment. Fig.16 In the present invention, the same parts as those in Implementation 1 are denoted by the same reference numerals and description thereof is omitted.

[0100] The processing device 1 of the modification 1 of the embodiment 1 supports a plurality of (two in the modification 1) cassettes 60 by stacking them in the Z-axis direction through the cassette elevator 50. The progress display screen 112 of the processing device 1 of the modification 1 is as follows: Fig.16 As shown, the box layout diagram 130 has a first box layout diagram 130-1 corresponding to the lower box 60 of the two boxes 60 and a second box layout diagram 130-2 corresponding to the upper box 60, and other than this, the structure is the same as that of the progress display screen 112 of the embodiment 1. The structure of each box layout diagram 130-1, 130-2 of the progress display screen 112 of the processing device 1 of the modification 1 is the same as that of the box layout diagram 130 of the embodiment 1.

[0101] The processing device 1 of the modification example 1 is similar to the embodiment 1, in which the in-device layout diagram 120 and the in-box layout diagrams 130-1 and 130-2 are set on the progress display screen 112, and the colors 301, 302, 303, 304, 305 of the corresponding areas 121, 122, 123, 124, 125 corresponding to the current positions of the processed objects 200 that were once stored in the storage racks 64 of the box 60 corresponding to the grids 131 are displayed in each grid 131. Therefore, the processing device 1 of the modification example 1 can make the operator recognize at a glance at which position of the in-device layout diagram the processed objects 200 removed from each storage rack 64 of the box 60 are located, through the colors 301, 302, 303, 304, 305 of the grids 131, so that the operator can understand the progress of the processing of the processed objects 200.

[0102] [Modification 2]

[0103] A processing device according to a second modification of the first embodiment of the present invention will be described with reference to the drawings. Fig.17 2 is a diagram showing a progress status display screen displayed on a display screen of a display unit of a processing device according to a second modification of the first embodiment. Fig.17 In the present invention, the same parts as those in Implementation 1 are denoted by the same reference numerals and description thereof is omitted.

[0104] The processing device 1 of the second modification of the first embodiment supports a plurality of (two in the second modification) cassettes 60 stacked in the Z-axis direction by the cassette elevator 50. The progress display screen 112 of the processing device 1 of the second modification is as follows: Fig.17 The configuration of the progress display screen 112 of the processing apparatus 1 of the modification 2 is the same as that of the progress display screen 112 of the embodiment 1, except that one of the first box layout diagram 130-1 corresponding to the lower box 60 and the second box layout diagram 130-2 corresponding to the upper box 60 is displayed as shown, and the first box layout diagram 130-1 and the second box layout diagram 130-2 to be displayed can be switched. In addition to the configuration of the box layout diagram 130 of the embodiment 1, each of the box layout diagrams 130-1 and 130-2 of the progress display screen 112 of the processing apparatus 1 of the modification 2 is further provided with a box identification area 132 indicating the box 60 being displayed. In variant example 2, when the display information setting unit 101 of the processing device 1 receives the operator's operation on the box identification area 132, the box layout diagrams 130-1 and 130-2 displayed on the progress display screen 112 are switched, but in the present invention, the method of switching the box layout diagrams 130-1 and 130-2 displayed on the progress display screen 112 is not limited to this method.

[0105] The processing device 1 of the modification example 2 sets the in-device layout diagram 120 and the in-box layout diagrams 130-1 and 130-2 in the progress display screen 112 in the same manner as in the embodiment 1, and displays the colors 301, 302, 303, 304, 305 of the corresponding areas 121, 122, 123, 124, 125 corresponding to the current positions of the workpieces 200 that were once stored in the storage racks 64 of the box 60 corresponding to the grids 131 in each grid 131. Therefore, the processing device 1 of the modification example 2 can make the operator recognize at a glance the positions of the in-device layout diagram of the workpieces 200 that have been removed from the storage racks 64 of the box 60 through the colors 301, 302, 303, 304, 305 of the grids 131, thereby achieving the effect of being able to grasp the progress of the processing of the workpieces 200.

[0106] In addition, the present invention is not limited to the above-mentioned embodiments and modified examples. That is, various modifications can be made and implemented within the scope of the main purpose of the present invention. In the above-mentioned embodiment 1 and the like, mutually different colors 301, 302, 303, 304, 305 are displayed in each corresponding area 121, 122, 123, 124, 125 of the progress status display screen 112, and the color 301, 302, 303, 304, 305 of the corresponding area 121, 122, 123, 124, 125 corresponding to the current position of the workpiece 200 is displayed in each grid 131. However, in the present invention, mutually different identification marks may be displayed in each corresponding area 121, 122, 123, 124, 125 of the progress status display screen 112, and the identification marks of the corresponding areas 121, 122, 123, 124, 125 corresponding to the current position of the workpiece 200 may be displayed in each grid 131. In addition, in embodiment 1, etc., an example in which the processing device 1 is a cutting device is shown, but the processing device 1 of the present invention is not limited to a cutting device, and can also be a grinding device, a laser processing device, a planer, or other various devices that perform processing on the workpiece 200.

Claims

1. A processing device, comprising: A chuck table, which holds the workpiece; A processing unit that processes a workpiece held by the chuck table; A box placement area, which places a box having a plurality of layers for storing the workpiece; A cleaning area for cleaning the workpiece; A transport unit that transports the workpiece between the box, the chuck table, and the cleaning area; A display screen showing the progress of processing of the workpiece; and A display information setting unit is configured to set information to be displayed on the display screen. It is characterized in that The display information setting section sets the following display information: A layout diagram of the device, which has a chuck workbench corresponding area corresponding to the chuck workbench and a cleaning corresponding area corresponding to the cleaning area, and each corresponding area is displayed in a different color from each other; A processing object mark which is superimposed on the layout diagram within the device to display the current position of the processing object removed from the box; and Multiple cells, which represent the layers of the box, In the cell, the same color as the corresponding area corresponding to the current position of the workpiece that was once accommodated in the layer of the box shown in the cell is displayed during the processing action.

2. The processing device according to claim 1, wherein: The apparatus internal layout diagram includes a transport unit corresponding area corresponding to a transport unit that transports the workpiece.

3. The processing device according to claim 1 or 2, wherein: In the cell representing the layer storing the workpieces that have been taken out of the box and then returned to the box, a color or identification mark indicating that the loading is completed is displayed.

4. The processing device according to claim 1 or 2, wherein: The processing device further comprises a temporary storage area for temporarily storing the workpieces taken out from the box placed in the box placing area. The transport unit transports the workpiece between the box, the temporary storage area, the chuck workbench and the cleaning area. The internal layout diagram of the device includes a temporary placement corresponding area corresponding to the temporary placement area.

Images