An ultra-high precision five-dimensional motion adjustment device with high load-bearing capacity

Abstract

The present invention discloses an ultra-high precision five-dimensional motion adjustment device with high load-bearing capacity, and relates to the field of precision adjustment technology. The present invention includes a front-back translation mechanism based on the X direction, a left-right translation mechanism based on the Y direction, a rotation mechanism based on the θZ direction, a swing mechanism based on the θX direction or the θY direction, a lifting mechanism based on the Z direction, and an overall walking mechanism; a first high-precision ball screw pair as a transmission mechanism, a second high-precision ball screw pair as a transmission mechanism, a first high-precision worm gear mechanism, a second high-precision worm gear mechanism, and a tank vehicle are respectively controlled by computer instructions to realize the functions of axis movement, positioning, and feedback. The present invention fills the gap of ultra-high precision motion adjustment devices for large load mechanisms. Compared with the um-level high-precision five-dimensional motion adjustment devices currently on the market, the load capacity of this device is far superior, and the fine-tuning accuracy reaches the um level, which can be competent for the load-bearing and fine-tuning work of precision measurement of large devices.

Description

Technical Field

[0001] The present invention belongs to the technical field of precision adjustment, and in particular relates to an ultra-high precision five-dimensional motion adjustment device with high load-bearing capacity. Background Art

[0002] The five-dimensional motion adjustment devices currently on the market have split structures with high adjustment accuracy but very small load capacity, generally less than 1000kg. If the five-degree-of-freedom motion adjustment device has a relatively large load capacity, the positioning accuracy of the product is too low, generally in the mm range, and cannot be used for precision measurement, and cannot achieve high-precision motion adjustment. Although the resolution of the six-degree-of-freedom high-precision motion adjustment device imported from abroad can reach the um level, its load capacity is only about 1000kg. There is no good product that can meet the demand for high-precision positioning for loads exceeding 2000kg. Therefore, in response to the above problems, it is of great significance to provide a device that can carry ultra-large movements that require precise adjustment, and to achieve high-precision, high-efficiency, and high-precision posture adjustment by performing multi-degree-of-freedom precision adjustment and positioning on ultra-large devices to meet the requirements of ultra-high-precision measurement and assembly for detection, testing, space monitoring, etc. Summary of the invention

[0003] The present invention provides an ultra-high precision five-dimensional motion regulating device with high load-bearing capacity, which solves the above problems.

[0004] In order to solve the above technical problems, the present invention is achieved through the following technical solutions:

[0005] The present invention provides an ultra-high precision five-dimensional motion regulating device with high load-bearing capacity, comprising a front-back translation mechanism based on the X direction, a left-right translation mechanism based on the Y direction, a rotation mechanism based on the θZ direction, a swing mechanism based on the θX direction or the θY direction, a lifting mechanism based on the Z direction, and an overall walking mechanism;

[0006] The front-to-back translation mechanism comprises a base, two X-axis translation guide rails installed on the upper surface of the base and provided with support ribs, a middle-layer high-strength table top slidably matched with the X-axis translation guide rails through a plurality of high-load-bearing sliders installed at the bottom, and a first high-precision ball screw pair as a transmission mechanism installed in a first groove on the upper part of the base and arranged parallel to the X-axis translation guide rails for transmitting the middle-layer high-strength table top to perform X-axis translation; the front-to-back translation mechanism is used to perform high-precision X-axis translation of the middle-layer high-strength table top;

[0007] The left-right translation mechanism comprises two Y-axis translation guide rails installed on the upper surface of the middle-layer high-strength table and provided with support ribs along the Y-axis direction, a Y-axis translation stage with hollow holes provided inside and slidably matched with the Y-axis translation guide rails through a plurality of high-load-bearing sliders installed at the bottom, and a second high-precision ball screw pair as a transmission mechanism for driving the Y-axis translation stage to perform Y-axis translation installed in a second groove on the upper part of the middle-layer high-strength table and parallel to the Y-axis translation guide rails. The left-right translation mechanism is used to perform high-precision Y-axis translation of the Y-axis translation stage;

[0008] The rotating mechanism includes a plurality of high-precision arc guide rails installed on the upper surface of the Y-axis translation table, a turntable table slidably matched with the high-precision arc guide rails through a plurality of high-load-bearing sliders installed at the bottom, and a first high-precision worm gear mechanism installed at the Y-axis translation table and the bottom of the turntable table to drive the turntable table. The rotating mechanism is used to perform high-precision rotation adjustment on the turntable table carrying heavy samples to be tested;

[0009] The swing mechanism and the lifting mechanism are both realized by three second high-precision worm gear mechanisms evenly distributed at three points installed on the turntable table. One or two of the second worm gear mechanisms are used to adjust the heavy-duty sample to be tested installed on the turntable table through the sample base in the θX axis and θY axis with high precision to form a swing mechanism; the three second worm gear mechanisms are synchronously and smoothly pushed up to achieve Z-direction lifting to form a lifting mechanism. The swing mechanism is used to perform high-precision θX axis and θY axis angle adjustment on the heavy-duty sample to be tested; the lifting mechanism is used to perform high-precision Z-direction lifting on the heavy-duty sample to be tested;

[0010] The overall walking mechanism includes a steel support bracket installed on both sides of the base, and a moving tank located at the bottom of the steel support bracket vertically installed by a moving push screw, and the overall walking mechanism is used for the overall movement of the device;

[0011] The first high-precision ball screw pair as transmission mechanism, the second high-precision ball screw pair as transmission mechanism, the first high-precision worm gear mechanism, the second high-precision worm gear mechanism, and the tank are respectively controlled through the network port or 485 bus and the computer sends instructions to realize the functional control of axis movement, positioning, and feedback.

[0012] Furthermore, the base is made of granite marble, with two sides of the bottom hollowed out and a plurality of first hanging rings installed on the upper surface.

[0013] Furthermore, the X-axis translation guide adopts a high-precision THK-55 square guide, and the high-load-bearing slider adopts a single slider with a basic rated load of 88.5KN that cooperates with the X-axis translation guide, and each of the high-load-bearing sliders together reaches a load capacity of 7T.

[0014] Furthermore, the first high-precision ball screw pair transmission mechanism includes an X-axis ball screw installed in a first groove in the middle position of the upper surface of the base and arranged parallel to the X-axis translation guide rail, an X-axis motor arranged at one end of the X-axis ball screw for driving, and a ball nut connection structure installed at the bottom of the middle-level high-strength table and connected to the X-axis ball screw drive. The adjustment accuracy of the first high-precision ball screw pair transmission mechanism reaches 0.03mm.

[0015] Furthermore, the middle-layer high-strength table top is made of high-strength aviation aluminum alloy material, a hollow area is opened inside and supporting ribs are reserved, and a second hanging ring is installed on the outer side.

[0016] Furthermore, the second high-precision ball screw pair as the transmission mechanism includes a Y-axis ball screw installed in a second groove in the middle position of the upper surface of the middle-layer high-strength table and arranged parallel to the Y-axis translation guide rail, a Y-axis motor arranged at one end of the Y-axis ball screw for driving, and a ball nut connection structure installed at the bottom of the Y-axis translation table and connected to the Y-axis ball screw drive. The adjustment accuracy of the second high-precision ball screw pair as the transmission mechanism reaches 0.04mm.

[0017] Furthermore, the first high-precision worm gear mechanism includes a θZ-axis motor installed on the upper part of the Y-axis translation platform and a circular turbine disk arranged at the bottom of the turntable table. The output shaft end of the θZ-axis motor is equipped with a first worm gear structure that cooperates with the circular turbine disk in the form of a worm gear.

[0018] Furthermore, the second high-precision worm gear mechanism includes three worm mounting grooves which are three-point-shaped and arranged on the upper surface of the turntable table, a worm mounted in the worm mounting grooves, an angle adjustment motor which is mounted on the peripheral side of the turntable table, and a lifting screw which is installed in the worm gear and is used to lift heavy test samples. The output shaft end of the angle adjustment motor is equipped with a second worm gear structure which cooperates with the worm gear in the form of a worm gear.

[0019] Furthermore, the base is provided with an X-axis absolute imported linear grating arranged parallel to the X-axis translation guide for measuring X-axis translation data; the middle-layer high-strength table is provided with a Y-axis absolute imported linear grating arranged parallel to the Y-axis translation guide for measuring Y-axis translation data; the Y-axis translation table is provided with an imported absolute circular grating for measuring rotation angle data, and the X-axis absolute imported linear grating, Y-axis absolute imported linear grating and imported absolute circular grating all adopt Heidenhain gratings with a resolution accuracy of 1μm.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] 1. The present invention fills the blank of ultra-high precision motion adjustment device for large load mechanism. Compared with the um-level high-precision five-dimensional motion adjustment device currently on the market, the load capacity of this device is far superior.

[0022] 2. Compared with the five-dimensional large-load-bearing motion device in the existing technology, the fine-tuning accuracy of the present invention reaches the um level, which is far superior in motion adjustment accuracy and can be competent for the bearing and fine-tuning work of precision measurement of large-scale devices.

[0023] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for describing the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0025] Figure 1 This is a schematic diagram of the overall structure of an ultra-high precision five-dimensional motion adjustment device with high load-bearing capacity according to an embodiment of the present invention;

[0026] Figure 2 for Figure 1 Structural diagram from perspective A;

[0027] Figure 3 for Figure 1 The left view of the structure;

[0028] Figure 4 for Figure 1 A top view of the structure;

[0029] Figure 5 for Figure 1 The rear view of the structure;

[0030] Figure 6 It is a schematic diagram of the structure of the X-axis forward and backward translation mechanism formed by the base and the middle-layer high-strength table;

[0031] Figure 7 for Figure 6 A top view of the structure;

[0032] Figure 8 for Figure 6 The main view of the structure;

[0033] Fig. 9 for Figure 6 Bottom view of the structure;

[0034] Fig.10It is a top view of the structure of the left-right translation mechanism composed of the middle-layer high-strength table and the Y-axis translation table;

[0035] Fig.11 This is the structural front view of the left-right translation mechanism composed of the middle-layer high-strength table and the Y-axis translation table;

[0036] Fig.12 This is a bottom view of the structure of the left-right translation mechanism composed of the middle-layer high-strength table and the Y-axis translation table;

[0037] Fig.13 It is a structural schematic diagram of the Y-axis translation stage;

[0038] Fig.14 for Fig.13 A top view of the structure;

[0039] Fig.15 It is a structural schematic diagram of a rotating mechanism formed by the turntable table and the θZ-axis motor;

[0040] Fig.16 It is a schematic diagram of the structure formed by the cooperation between the turntable table and the angle adjustment motor;

[0041] Fig.17 It is a schematic diagram of the structure in which the lifting screw, the turbine and the second worm gear structure cooperate;

[0042] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0043] 1-base, 2-X-axis translation guide, 201-first lifting ring, 3-X-axis ball screw, 301-X-axis motor, 302-first groove, 4-middle layer high-strength table, 401-second lifting ring, 402-second groove, 403-hollow area, 404-support ribs, 5-Y-axis translation guide, 501-Y-axis absolute imported linear grating, 6-Y-axis ball screw, 601-Y-axis motor, 7-Y-axis translation stage, 701-hollow hole, 702-imported absolute circular grating, 8-high-precision arc guide rail, 11-turntable, 12-turbine mounting slot, 1201-angle adjustment motor, 1203-turbine, 1204-lifting screw, 1205-second worm structure, 13-steel support bracket, 14-lifting screw for movement, 15-moving tank, 16-θZ-axis motor, 1601-first worm structure, 17-heavy sample to be tested, 1701-sample base. DETAILED DESCRIPTION

[0044] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0045] In the description of the present invention, it is necessary to understand that terms such as "front and back", "left and right", "bottom", "top", "middle layer", "lift and drop" and the like indicating directions or positional relationships are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as limiting the present invention.

[0046] See also Figure 1-17 As shown, an ultra-high precision five-dimensional motion adjustment device with high load-bearing capacity of the present invention includes a front-to-back translation mechanism based on the X direction, a left-to-right translation mechanism based on the Y direction, a rotation mechanism based on the θZ direction, a swing mechanism based on the θX direction or the θY direction, a lifting mechanism based on the Z direction, and an overall walking mechanism;

[0047] The front-to-back translation mechanism includes a base 1, two X-axis translation guide rails 2 installed on the upper surface of the base and with additional support ribs, a middle-layer high-strength table 4 slidingly matched on the X-axis translation guide rail 2 through three high-load-bearing sliders installed at the bottom, and a first high-precision ball screw pair as a transmission mechanism installed in a first groove 302 on the upper part of the base 1 and arranged parallel to the X-axis translation guide rail 2 for transmitting the middle-layer high-strength table 4 to perform X-axis translation; the front-to-back translation mechanism is used to perform high-precision X-axis translation of the middle-layer high-strength table 4; the translation stroke of the front-to-back translation mechanism: ±750mm, resolution: better than 1μm, positioning accuracy: better than 10μm, maximum working speed: 25mm / s, effective load capacity: ≥9T, using imported linear gratings (absolute), using network ports or 485 bus control to send instructions through a computer to achieve axis movement, positioning, feedback and other functional control;

[0048] The left-right translation mechanism includes two Y-axis translation guide rails 5 installed on the upper surface of the middle-layer high-strength table 4 with support ribs added along the Y-axis direction, a Y-axis translation stage 7 with a hollow hole 701 provided inside and slidably matched with the Y-axis translation guide rail 5 through three high-load-bearing sliders installed at the bottom, and a second high-precision ball screw pair as a transmission mechanism for driving the Y-axis translation stage 7 to perform Y-axis translation installed in the second groove 402 on the upper part of the middle-layer high-strength table 4 and parallel to the Y-axis translation guide rail 5. The left-right translation mechanism is used to perform high-precision Y-axis translation of the Y-axis translation stage 7; the translation stroke of the left-right translation mechanism is: ±50mm, resolution: better than 1μm, positioning accuracy: better than 10μm, maximum working speed: 25mm / s, effective load capacity: ≥7T, using imported linear grating (absolute), using network port or 485 bus control to send instructions through the computer to realize axis movement, positioning, feedback and other functional control;

[0049] The rotating mechanism includes nine high-precision arc guide rails 8 installed on the upper surface of the Y-axis translation stage 7, a turntable table 11 slidingly matched with the high-precision arc guide rails 8 through three high-load-bearing sliders installed at the bottom, and a first high-precision worm gear mechanism installed at the Y-axis translation stage 7 and the bottom of the turntable table 11 to drive the turntable table 11. The rotating mechanism is used to perform high-precision rotation adjustment on the turntable table 11 carrying the heavy sample 17 to be tested; the rotating working range of the rotating mechanism is: 360°, resolution: better than 1″, control accuracy: 35″, effective load Capacity: ≥5T, using imported circular grating (absolute), using network port or 485 bus control, can send instructions through the computer to achieve axis movement, positioning, feedback and other functional control; high-precision arc guide 8 uses THK-35 arc guide with a radius of R800mm, each guide is equipped with a high-load slider (single slider basic rated load 37.3KN), which has the characteristics of small dynamic and static friction coefficient, high positioning accuracy, high-precision arc motion under high load, and can also cooperate with the processing installation benchmark to ensure the reference center position of the rotational motion. The rotating table is installed with the Party A sample base (fixture) for 360° movement. The drive adopts a 130 stepper motor with a 1:5 reduction mechanism to drive the first worm gear mechanism with a transmission ratio of 1:360, so that the table can rotate and move smoothly on the guide rail, and can achieve 10 subdivision resolution:

[0050]

[0051] The base is equipped with an absolute imported linear grating (system accuracy ±1"), which can provide better feedback and more accurate resolution. It is also equipped with a conductive slip ring with an inner diameter of 250mm for the motion wiring of the three swing motors. Finite element analysis of the rotating table shows that under the load of 5T, the variable is ≈0.017mm, and the deformation required by the indicator is ≤0.06mm, which ensures overall stability and small deformation under heavy load conditions.

[0052] The swing mechanism and the lifting mechanism are both realized by three second high-precision worm gear mechanisms evenly distributed at three points installed on the turntable table 11. One or two of the second worm gear mechanisms are used to adjust the heavy-duty sample 17 installed on the turntable table 11 through the sample base 1701 with high-precision θX axis and θY axis to form a swing mechanism; the three second worm gear mechanisms are used to synchronously and smoothly push up to achieve Z-direction lifting to form a lifting mechanism. The swing mechanism is used to adjust the angles of the θX axis and θY axis of the heavy-duty sample 17 with high precision; the lifting mechanism is used to adjust the heavy-duty sample 17 with high precision The Z-axis lifting is accurate; the swing range of the swing mechanism is ±0.15°, the resolution is better than 1″, the control accuracy is 0.2″, and the effective load-bearing capacity of a single lifting mechanism is ≥3T. It uses a network port or 485 bus control, and can send commands from a computer to achieve axis movement, positioning and other functional control; the lifting range of the lifting mechanism is ±7.5mm, the resolution is 2.7μm, and the maximum movement speed is 0.027mm / s. When the three motors of the θX and θY axis adjustment are running synchronously, the Z-axis lifting function can be met, and the moving range of the three support points can meet the rise of 0 to 15mm from the platform table. When the sample under test by Party A needs to be fine-tuned horizontally, the swing mechanism is used to swing forward and backward at an angle, and the three points around the R950mm circle of the rotating table are evenly adjusted and pushed up. The drive adopts a 110 stepper motor with a corresponding reduction mechanism to rotate the second worm gear mechanism with a transmission ratio of 1:90, so that the push-up screw 1204 can be pushed up and moved smoothly, and high resolution and positioning accuracy can be achieved. The θX axis and θY axis use M40×5 lifting T-type screws, the reduction mechanism uses a 1:90 worm gear, the motor step angle is 1.8° (the motor rotates one circle with 200 steps), and the reduction is 1:10. The distance between the lifting point and the fixed point is 1425mm. The required lifting distance is converted to: sin0.15°×1425mm=3.73mm. The lifting distance with a resolution of 1″ is converted to: sin0.0003°(1”)×1425mm=7.5μm. The actual running full-step resolution of 0.03μm is far better than the required resolution of 7.5μm. The rated load of a single plane bearing is 10.5KN. The required torque of a single lifting mechanism is: Finite element analysis of the three-point lifting position of the θx and θY axes shows that the variable is ≈0.014mm under the load of 5T, and the deformation required by the indicator is ≤0.06mm. It has overall stability and small deformation when used under heavy load conditions. When the sample under test by Party A needs to be lifted or fine-tuned, the lifting mechanism uses the existing rotating table R950mm circle three-point uniform adjustment to push up the synchronous motion. The drive adopts a 110 stepper motor with a corresponding reduction mechanism to rotate the worm gear mechanism with a transmission ratio of 1:90, so that the lead screw can be pushed up and moved smoothly, achieving high resolution and high positioning accuracy. The Z-axis uses an M40×5 lifting T-type lead screw, the reduction mechanism uses a 1:90 worm gear, the motor step angle is 1.8 (the motor rotates one circle 200 steps), and is equipped with a 1:10 reduction. Resolution:

[0053] The overall walking mechanism includes a steel support bracket 13 installed on both sides of the base 1, and a moving tank 15 located at the bottom of the steel support bracket 13 and vertically installed by a moving push screw 14. The overall walking mechanism is used for the overall movement of the device. The base 1 and the one-dimensional translation stage are combined into one. When the whole needs to be moved, three moving tanks 15 are placed at the bottom of the steel support bracket 13, and the moving push screw 14 is adjusted to make the base 1 platform suspended. After moving into place, the moving push screw 14 rises, the moving tank 15 is withdrawn, and the three M30 adjustable horizontal screws are adjusted, and then the two M30 screws are adjusted to assist the support points. Finally, when the base is adjusted to be horizontal, the area suspended from the ground is all filled with epoxy resin material for support, ensuring that the overall base is in contact with the ground over a large area, reducing the temperature difference variable and the deformation caused by the movement of the center of gravity, so that the platform can be stable when moved to any position;

[0054] The first high-precision ball screw pair as transmission mechanism, the second high-precision ball screw pair as transmission mechanism, the first high-precision worm gear mechanism, the second high-precision worm gear mechanism, and the tank 15 are respectively controlled by the network port or 485 bus and the computer sends instructions to realize the functional control of axis movement, positioning, and feedback.

[0055] Among them, the base 1 is made of granite marble. In order to reduce the weight, 800×250mm are hollowed out on both sides of the marble base. Support ribs are added at the guide rail installation position to increase the overall support strength. Four first hanging rings 201 are installed on the upper surface. Marble is used as the main body. The deformation caused by 2℃ is calculated according to the maximum length of the base plate 3000mm, δ=thermal expansion coefficient×length×temperature change=4.6×10-6×3000×2℃=0.028mm.

[0056] Among them, the X-axis translation guide 2 adopts a high-precision THK-55 square guide, and the high-load-bearing slider adopts a single slider with a basic rated load of 88.5KN that matches the X-axis translation guide 2. The high-load-bearing sliders together reach a load capacity of 7T. It is characterized by a small dynamic and static friction coefficient, high positioning accuracy, and high-precision linear motion under high load conditions.

[0057] Among them, the first high-precision ball screw pair as a transmission mechanism includes an X-axis ball screw 3 installed in the first groove 302 at the middle position of the upper surface of the base 1 and arranged parallel to the X-axis translation guide 2, an X-axis motor 301 arranged at one end of the X-axis ball screw 3 for driving, and a ball nut connection structure installed at the bottom of the middle-level high-strength table 4 and connected to the X-axis ball screw 3. The adjustment accuracy of the first high-precision ball screw pair as a transmission mechanism reaches 0.03mm, and the transmission is transmitted by a high-precision ball screw pair as a transmission mechanism, which can resist deformation. The finite element analysis shows that the overall structure has good strength and deformation resistance. The drive adopts a 130 servo motor with a 1:5 reduction mechanism to rotate the lead screw M50×10. The lead screw surface has extremely high hardness and strength, and the core has excellent toughness. Therefore, the lead screw pair has good fatigue resistance, deformation resistance and vibration resistance. At the same time, it has good limit speed and load capacity, so that the table moves smoothly on the guide rail. According to the 2500 pulse signal, The base is equipped with an absolute imported linear grating (resolution 1μm), which can provide better feedback and more accurate precision. Finite element analysis of the 4 slider positions shows that under the load of 7T, the variable is ≈0.04mm, and the deformation required by the indicator is ≤0.06mm, which is the overall flat stability and small deformation under heavy load conditions.

[0058] Among them, the middle-layer high-strength table top 4 is made of high-strength aviation aluminum alloy material, with a hollow area 403 and reserved support ribs 404 inside. Support ribs are added to the installation position of the Y-axis translation guide 5 to increase the overall support strength. The Y-axis translation guide 5 uses two high-precision THK-55 square guides, each of which is equipped with two high-load-bearing sliders (the basic rated load of a single slider is 88.5KN). It has the characteristics of small dynamic and static friction coefficient, high positioning accuracy, and high-precision linear motion under high load. The table top (shared with the rotating body) is made of aluminum alloy material, and the transmission is a high-precision ball screw pair as the transmission mechanism, which has deformation resistance and shock resistance, and has good limiting speed and load-bearing capacity. The specific deformation resistance has been verified by finite element analysis. The drive uses a 130 servo motor with a 1:5 reduction mechanism to rotate the lead screw M50×10, so that the table top moves smoothly on the guide rail, and is converted according to a 2500 pulse signal. The base is equipped with an absolute imported linear grating (resolution 1μm), which can provide better feedback and more accurate precision. Finite element analysis of the Y-axis translation table shows that the variable is ≈0.03mm under the load of 6T, and the deformation required by the index is ≤0.06mm. The overall flat stability and small deformation used under heavy load conditions, and the outer side of the middle-layer high-strength table 4 is installed with a second lifting ring 401.

[0059] Among them, the second high-precision ball screw pair as the transmission mechanism includes a Y-axis ball screw 6 installed in the second groove 402 in the middle position of the upper surface of the middle-layer high-strength table 4 and arranged parallel to the Y-axis translation guide rail 5, a Y-axis motor 601 arranged at one end of the Y-axis ball screw 6 for driving, and a ball nut connection structure installed at the bottom of the Y-axis translation platform 7 and connected to the Y-axis ball screw 6. The adjustment accuracy of the second high-precision ball screw pair as the transmission mechanism reaches 0.04mm.

[0060] Among them, the first high-precision turbine worm mechanism includes a θZ-axis motor 16 installed on the top of the Y-axis translation stage 7 and a circular turbine disk 1101 arranged at the bottom of the turntable table 11. The output shaft end of the θZ-axis motor 16 is equipped with a first worm structure 1601 that cooperates with the circular turbine disk 1101 in the form of a worm gear.

[0061] Among them, the second high-precision worm gear mechanism includes three worm mounting grooves 12 that are three-point-shaped and arranged on the upper surface of the turntable table 11, a worm gear 1203 installed in the worm mounting groove 12, an angle adjustment motor 1201 installed on the side of the turntable table 11, and a lifting screw 1204 installed in the worm gear 1203 for lifting the heavy test sample 17. The output shaft end of the angle adjustment motor 1201 is equipped with a second worm gear structure 1205 that cooperates with the worm gear in the form of a worm gear.

[0062] Among them, the base 1 is provided with an X-axis absolute imported linear grating 101 which is arranged parallel to the X-axis translation guide 2 and is used to measure the X-axis translation data; the middle-layer high-strength table 4 is provided with a Y-axis absolute imported linear grating 501 which is arranged parallel to the Y-axis translation guide 5 and is used to measure the Y-axis translation data; the Y-axis translation stage 7 is provided with an imported absolute circular grating 702 which is used to measure the rotation angle data, and the X-axis absolute imported linear grating 101, the Y-axis absolute imported linear grating 501 and the imported absolute circular grating 702 all adopt Heidenhain gratings with a resolution accuracy of 1μm.

[0063] The system composition of the high-load-bearing capacity ultra-high-precision five-dimensional motion regulating device of the present invention is as follows:

[0064] The five-dimensional adjustment frame consists of two translation axes (front and rear X-axis and left and right Y-axis) and three rotation axes rotating around X, Y, and Z respectively. The two translation axes are driven by two 10NM 130 servo motors with a reduction mechanism, equipped with imported linear absolute grating scales with a resolution of 1μm to ensure displacement measurement accuracy. One rotation axis is driven by a 50NM 130 stepper motor with a reduction mechanism, equipped with an imported 360° circular grating with a resolution of 1” to ensure rotation measurement accuracy. The two angular swings are driven by three 30NM 110 stepper motors with a reduction mechanism.

[0065] X-axis (front and rear axis), adjustment range ±750mm, maximum speed 25mm / s; Y-axis (left and right axis), adjustment range ±50mm, maximum speed 25mm / s; horizontal rotation (θZ axis), adjustment range 360°, maximum speed 1° / s. The optical five-axis adjustment frame control system consists of a cabinet, a 10-inch touch screen, a panel power switch button, 5 control cards, 5 switching power supplies, and 5 stepping drivers. On the left side of the cabinet, there are aviation sockets for connecting the five-axis adjustment frame, power sockets, and network cable sockets for connecting the computer.

[0066] The beneficial effects compared with the prior art include:

[0067] 1. The present invention fills the blank of ultra-high precision motion adjustment device for large load mechanism. Compared with the um-level high-precision five-dimensional motion adjustment device currently on the market, the load capacity of this device is far superior.

[0068] 2. Compared with the five-dimensional large-load-bearing motion device in the existing technology, the fine-tuning accuracy of the present invention reaches the um level, which is far superior in motion adjustment accuracy and can be competent for the bearing and fine-tuning work of precision measurement of large-scale devices.

[0069] The preferred embodiments of the present invention disclosed above are only used to help illustrate the present invention. The preferred embodiments do not describe all the details in detail, nor do they limit the invention to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can understand and use the present invention well. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. An ultra-high precision five-dimensional motion adjustment device with high load-bearing capacity, characterized in that: It includes a front-to-back translation mechanism based on the X direction, a left-right translation mechanism based on the Y direction, a rotation mechanism based on the θZ direction, a swing mechanism based on the θX direction or the θY direction, a lifting mechanism based on the Z direction, and an overall walking mechanism; The front-to-back translation mechanism comprises a base (1), two X-axis translation guide rails (2) installed on the upper surface of the base and provided with support ribs, a middle-layer high-strength table (4) slidably matched with the X-axis translation guide rails (2) through a plurality of high-load-bearing sliders installed at the bottom, and a first high-precision ball screw pair as a transmission mechanism installed in a first groove (302) on the upper part of the base (1) and arranged parallel to the X-axis translation guide rail (2) for transmitting the middle-layer high-strength table (4) to perform X-axis translation; the front-to-back translation mechanism is used to perform high-precision X-axis translation on the middle-layer high-strength table (4); the base (1) is made of granite marble, with two sides of the bottom hollowed out, and a plurality of first suspension rings (201) installed on the upper surface; The left-right translation mechanism comprises two Y-axis translation guide rails (5) installed on the upper surface of the middle-layer high-strength table (4) and provided with support ribs along the Y-axis direction, a Y-axis translation platform (7) with a plurality of high-load-bearing sliders installed at the bottom and slidably matched with the Y-axis translation guide rails (5) and provided with hollow holes (701) inside, and a second high-precision ball screw pair as a transmission mechanism installed in a second groove (402) on the upper part of the middle-layer high-strength table (4) and provided in parallel with the Y-axis translation guide rails (5) for driving the Y-axis translation platform (7) to perform Y-axis translation. The left-right translation mechanism is used to perform high-precision Y-axis translation on the Y-axis translation platform (7); The rotating mechanism comprises a plurality of high-precision arc guide rails (8) mounted on the upper surface of the Y-axis translation platform (7), a turntable table (11) slidably matched with the high-precision arc guide rails (8) through a plurality of high-load-bearing sliding blocks mounted on the bottom, and a first high-precision worm gear mechanism mounted on the Y-axis translation platform (7) and the bottom of the turntable table (11) to drive the turntable table (11), wherein the rotating mechanism is used to perform high-precision rotation adjustment on the turntable table (11) carrying the heavy sample (17) to be tested; The swing mechanism and the lifting mechanism are both realized by three second high-precision worm gear mechanisms evenly arranged at three points installed on the turntable table (11), and one or two of the second worm gear mechanisms are used to adjust the heavy sample (17) to be tested, which is installed on the turntable table (11) through the sample base (1701), in the θX axis and θY axis with high precision to form the swing mechanism; the three second worm gear mechanisms are used to synchronously and smoothly push up to achieve Z-direction lifting to form the lifting mechanism, and the swing mechanism is used to perform high-precision θX axis and θY axis angle adjustment on the heavy sample (17) to be tested; and the lifting mechanism is used to perform high-precision Z-direction lifting on the heavy sample (17) to be tested; The integral walking mechanism comprises a steel support bracket (13) mounted on both sides of the base (1), and a moving tank (15) vertically mounted at the bottom of the steel support bracket (13) through a moving lifting screw (14), and the integral walking mechanism is used for the overall movement of the device; The first high-precision ball screw pair as a transmission mechanism, the second high-precision ball screw pair as a transmission mechanism, the first high-precision worm gear mechanism, the second high-precision worm gear mechanism, and the tank (15) are respectively controlled by a network port or a 485 bus and a computer sends instructions to realize the functional control of axis movement, positioning, and feedback; The first high-precision worm gear mechanism comprises a θZ-axis motor (16) mounted on the upper part of the Y-axis translation platform (7) and a circular turbine disc (1101) arranged at the bottom of the turntable table (11); a first worm gear structure (1601) is mounted on the output shaft end of the θZ-axis motor (16) and is in transmission cooperation with the circular turbine disc (1101) in the form of a worm gear; The second high-precision worm gear mechanism comprises three worm gear mounting grooves (12) arranged in a three-point manner on the upper surface of the turntable table (11), a worm gear (1203) mounted in the worm gear mounting grooves (12), an angle adjustment motor (1201) mounted on the peripheral side of the turntable table (11), and a push screw (1204) mounted in the worm gear (1203) for lifting a heavy sample (17) to be tested. The output shaft end of the angle adjustment motor (1201) is provided with a second worm gear structure (1205) which cooperates with the worm gear in a worm gear transmission manner.

2. The ultra-high precision five-dimensional motion adjustment device with high load-bearing capacity according to claim 1, characterized in that: The X-axis translation guide rail (2) adopts a high-precision THK-55 square guide rail, and the high-load-bearing slider adopts a slider with a basic rated load of 88.5KN for a single slider matched with the X-axis translation guide rail (2), and each of the high-load-bearing sliders together reaches a load capacity of 7T.

3. The ultra-high precision five-dimensional motion adjustment device with high load-bearing capacity according to claim 1, characterized in that: The first high-precision ball screw pair transmission mechanism comprises an X-axis ball screw (3) installed in a first groove (302) at a middle position on the upper surface of the base (1) and arranged parallel to the X-axis translation guide rail (2), an X-axis motor (301) arranged at one end of the X-axis ball screw (3) for driving, and a ball nut connection structure installed at the bottom of the middle-level high-strength table (4) and connected to the X-axis ball screw (3). The adjustment accuracy of the first high-precision ball screw pair transmission mechanism reaches 0.03 mm.

4. The ultra-high precision five-dimensional motion adjustment device with high load-bearing capacity according to claim 1, characterized in that: The middle-layer high-strength tabletop (4) is made of high-strength aviation aluminum alloy material, has a hollow area (403) inside and reserved support ribs (404), and a second hanging ring (401) is installed on the outer side.

5. The ultra-high precision five-dimensional motion adjustment device with high load-bearing capacity according to claim 1, characterized in that: The second high-precision ball screw pair transmission mechanism comprises a Y-axis ball screw (6) installed in a second groove (402) at a middle position on the upper surface of the middle-layer high-strength table (4) and arranged parallel to the Y-axis translation guide rail (5), a Y-axis motor (601) arranged at one end of the Y-axis ball screw (6) for driving, and a ball nut connection structure installed at the bottom of the Y-axis translation platform (7) and connected to the Y-axis ball screw (6). The adjustment accuracy of the second high-precision ball screw pair transmission mechanism reaches 0.04 mm.

6. The ultra-high precision five-dimensional motion adjustment device with high load-bearing capacity according to claim 1, characterized in that: The base (1) is provided with an X-axis absolute imported linear grating (101) arranged in parallel with the X-axis translation guide rail (2) for measuring X-axis translation data; the middle-layer high-strength table (4) is provided with a Y-axis absolute imported linear grating (501) arranged in parallel with the Y-axis translation guide rail (5) for measuring Y-axis translation data; the Y-axis translation stage (7) is provided with an imported absolute circular grating (702) for measuring rotation angle data, and the X-axis absolute imported linear grating (101), the Y-axis absolute imported linear grating (501) and the imported absolute circular grating (702) all adopt Heidenhain gratings with a resolution of 1 μm.

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