A graphite boat loading and unloading anti-collision device

Abstract

The present invention discloses a graphite boat loading and unloading anti-collision device, comprising two groups of anti-collision mechanisms facing each other and arranged at intervals, each group of the anti-collision mechanisms comprising: a receiving bottom plate; and an anti-collision mounting frame, which is fixedly connected to the receiving bottom plate so that the outer contour of the anti-collision mechanism is an L-shaped structure; wherein, anti-collision plates are provided on both the front and rear sides of the anti-collision mounting frame, and at least one anti-collision reset component is elastically connected between the anti-collision plate and the anti-collision mounting frame, and the anti-collision plate can approach or move away from the anti-collision mounting frame to switch between a buffering state and a reset state, and the anti-collision reset component acts on the anti-collision plate to make the anti-collision plate move away from the anti-collision mounting frame to reset from the buffering state to the reset state. According to the present invention, before the manipulator collides with the graphite boat, the manipulator will preferentially collide with the anti-collision plate, so that the graphite boat is effectively protected.

Description

Technical Field

[0001] The invention relates to the field of solar photovoltaic cells, and in particular to a graphite boat loading and unloading anti-collision device. Background Art

[0002] A solar cell is a semiconductor device with light-to-electricity conversion characteristics. It directly converts solar radiation energy into direct current and is the most basic unit of photovoltaic power generation. In the process of solar energy collection and conversion, sunlight shines on the silicon wafer of the solar cell, and part of the sunlight will be reflected. Even if the silicon surface is designed to be velvety, although the incident light will produce multiple reflections to increase the light absorption rate, some of the sunlight will still be reflected. It is estimated that the reflection loss rate of light on the silicon surface is as high as about 35%. The anti-reflection film can greatly improve the utilization rate of sunlight by the cell, help to increase the photogenerated current density, and then improve the conversion efficiency. At the same time, the passivation of the surface of the cell by hydrogen in the film reduces the surface recombination rate of the emitter junction, reduces the dark current, increases the open circuit voltage, and improves the photoelectric conversion efficiency.

[0003] Thin film preparation technology can be divided into two categories according to its film forming method: physical vapor deposition (PVD) and chemical vapor deposition (CVD). Plasma enhanced chemical vapor deposition (PECVD) is a type of chemical vapor deposition. PECVD (Plasma Enhanced Chemical Vapor Deposition) plasma enhanced chemical vapor deposition, plasma is the intensification of the thermal motion of material molecules, the collision between them will cause the gas molecules to ionize, the material will become a mixture of free movement and interacting positive ions, electrons and neutral particles, and its low deposition temperature is its most prominent advantage. PECVD films have excellent electrical properties, good substrate adhesion and excellent step coverage.

[0004] As the production capacity requirements of PECVD equipment become higher and higher, from the initial single-tube 240 pieces to the current 432 pieces, PECVD equipment has also developed from the original two tubes to the current five tubes. As a result, the robot's actions of taking and placing the graphite boat are becoming more and more frequent. In the process of the robot repeatedly taking and placing the graphite boat, the robot will inevitably collide with the graphite boat, causing the graphite boat to break and be damaged.

[0005] In view of this, it is necessary to develop a graphite boat loading and unloading anti-collision device to solve the above problems. Summary of the invention

[0006] In view of the shortcomings in the prior art, the main purpose of the present invention is to provide a graphite boat loading and unloading anti-collision device, which protects the outer edge of the graphite boat by arranging anti-collision plates on both sides of the anti-collision mounting frame. Before the manipulator collides with the graphite boat, the manipulator will first collide with the anti-collision plate, thereby effectively protecting the graphite boat.

[0007] Another object of the present invention is to provide a graphite boat loading and unloading anti-collision device, which monitors the impact force received by the anti-collision plate in real time by arranging an impact sensing component transmission-connected to the anti-collision plate.

[0008] In order to achieve the above-mentioned purpose and other advantages according to the present invention, a graphite boat loading and unloading anti-collision device is provided, comprising two sets of anti-collision mechanisms arranged opposite to each other and at intervals, characterized in that each set of the anti-collision mechanisms comprises:

[0009] receiving base plate; and

[0010] An anti-collision mounting frame, which is fixedly connected to the receiving bottom plate so that the outer contour of the anti-collision mechanism is an L-shaped structure;

[0011] Among them, anti-collision plates are provided on the front and rear sides of the anti-collision mounting frame, and at least one anti-collision reset component is elastically connected between the anti-collision plate and the anti-collision mounting frame. The anti-collision plate can approach or move away from the anti-collision mounting frame to switch between a buffering state and a reset state, and the anti-collision reset component acts on the anti-collision plate to make the anti-collision plate move away from the anti-collision mounting frame to reset from the buffering state to the reset state.

[0012] Optionally, the anti-collision plate is in an L-shaped structure, so that when the anti-collision plate is connected to the anti-collision mounting frame, the anti-collision plate can be adapted to the L-shaped outer contour of the anti-collision mechanism.

[0013] Optionally, the anti-collision mounting frame includes:

[0014] Two mounting columns, which are fixedly mounted on the receiving bottom plate, each of the anti-collision plates is arranged on the outer side of a corresponding mounting column, and the two mounting columns are arranged opposite to each other and spaced apart; and

[0015] An installation beam fixedly connected between the two installation columns;

[0016] Among them, the two mounting columns, the mounting cross beam and the supporting bottom plate define an installation space located therebetween; the anti-collision plate and the mounting columns are slidably connected by at least two connecting rods, and the connecting rods start from a corresponding anti-collision plate and pass through the mounting columns to reach the interior of the installation space; two groups of impact sensing components are installed in the installation space, and each group of impact sensing components is arranged to be fixedly connected to a connecting rod on a corresponding anti-collision plate.

[0017] Optionally, the anti-collision reset component is a linear spring, and each of the connecting rods is sleeved with a corresponding linear spring, and the linear spring is confined between the anti-collision plate and a corresponding mounting column.

[0018] Optionally, the impact sensing component includes:

[0019] An induction mounting plate, which is fixedly connected to the mounting crossbeam;

[0020] an impact sensor mounted on the sensing mounting plate; and

[0021] The connecting rod passes through the mounting column and is fixedly connected to the impact transmission plate.

[0022] Wherein, the sensing end of the impact sensor is transmission-connected with an impact pressure-sensitive sheet, and the impact pressure-sensitive sheet starts from the impact sensor until it abuts against the impact transmission plate.

[0023] Optionally, a manipulator mounting seat is installed on the top of the mounting crossbeam, and the manipulator mounting seat includes:

[0024] a rotating base fixed to the top of the mounting beam; and

[0025] an adjusting base, which is rotatably connected to the rotating base;

[0026] Among them, the adjustment base is spaced from the top of the mounting beam to form an adjustment space therebetween, and two adjustment studs are arranged in sequence along the extension direction of the mounting beam in the adjustment space, and the rotating base is located between the two adjustment studs; the two adjustment studs start from the mounting beam until they abut against the bottom of the adjustment base so that the top of the adjustment base remains horizontal.

[0027] Optionally, a positioning groove is formed at the top surface of the supporting base plate, and a guide surface is formed on at least one side wall of the graphite boat positioning groove, which is inclined toward the inside of the graphite boat positioning groove along a top-to-bottom direction. When the graphite boat is placed between two groups of the anti-collision mechanisms, the guide surface guides the end of the graphite boat to a predetermined position on the bottom wall of a corresponding positioning groove.

[0028] Optionally, the receiving bottom plate is provided with a presence or absence sensor installation groove connected to the positioning groove, and a graphite boat presence or absence sensor component is provided in the presence or absence sensor installation groove, and the graphite boat presence or absence sensor component includes:

[0029] Whether the fixed setting has a mounting base;

[0030] A rotating support fixedly connected to the mounting base; and

[0031] a transmission rod, which is rotatably connected to the rotating support,

[0032] Among them, a pressure sensor is installed on the rear side of the mounting seat, the rotating support is fixed to the front side of the mounting seat, and the transmission rod is rotatably connected to the rotating support near its middle section so that one end of the transmission rod passes over the mounting seat from the front side of the mounting seat and is transmission-connected to the pressure sensor.

[0033] Optionally, the transmission rod and the pressure sensor are connected in transmission via a gravity pressure sensing sheet.

[0034] Optionally, the other end of the transmission rod is integrally formed with a pressure-touch end extending upward, and when the graphite boat presence / absence sensing component is installed in the presence / absence sensing installation groove, the pressure-touch end protrudes upward from the bottom wall of the positioning groove.

[0035] One of the above technical solutions has the following advantages or beneficial effects: since it protects the outer edge of the graphite boat by arranging anti-collision plates on both sides of the anti-collision mounting frame, before the manipulator collides with the graphite boat, the manipulator will first collide with the anti-collision plate, thereby effectively protecting the graphite boat.

[0036] Another technical solution among the above technical solutions has the following advantages or beneficial effects: since it monitors the impact force received by the anti-collision plate in real time by providing an impact sensing component that is transmission-connected to the anti-collision plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings of the embodiments are briefly introduced below. Obviously, the drawings in the following description only relate to some embodiments of the present invention, but are not intended to limit the present invention.

[0038] Figure 1 A three-dimensional diagram of a graphite boat loading and unloading anti-collision device according to one embodiment of the present invention;

[0039] Figure 2 A three-dimensional diagram of an anti-collision mechanism in a graphite boat loading and unloading anti-collision device according to an embodiment of the present invention;

[0040] Figure 3 A three-dimensional diagram of the internal structure of an anti-collision mechanism in a graphite boat loading and unloading anti-collision device according to one embodiment of the present invention;

[0041] Figure 4 It is a right view of the internal structure of the anti-collision mechanism in the graphite boat loading and unloading anti-collision device proposed according to one embodiment of the present invention;

[0042] Figure 5 It is a three-dimensional diagram of the internal structure of the anti-collision mechanism in the graphite boat loading and unloading anti-collision device according to one embodiment of the present invention, in which the graphite boat presence or absence sensing component is hidden;

[0043] Figure 6 It is a right view of the internal structure of the anti-collision mechanism in the graphite boat loading and unloading anti-collision device according to one embodiment of the present invention, and the graphite boat presence or absence sensing component is hidden in the figure;

[0044] Figure 7 A three-dimensional diagram showing whether a graphite boat has a sensing component in a graphite boat loading and unloading anti-collision device according to an embodiment of the present invention;

[0045] Figure 8 A three-dimensional diagram showing whether a graphite boat has a sensing component in a graphite boat loading and unloading anti-collision device according to an embodiment of the present invention from another perspective;

[0046] Fig. 9 A front view showing the presence or absence of a sensing component in a graphite boat in a graphite boat loading and unloading anti-collision device according to an embodiment of the present invention. DETAILED DESCRIPTION

[0047] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0048] In the drawings, the shapes and dimensions may be exaggerated for clarity, and the same reference numerals will be used throughout to designate the same or like components.

[0049] Unless otherwise defined, the technical or scientific terms used herein shall have the usual meanings understood by persons of ordinary skill in the field to which the invention belongs. The words "first", "second" and similar words used in the patent application specification and claims of the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one", "one" or "the" do not indicate a quantity limitation, but indicate the existence of at least one. Words such as "include" or "comprise" and similar words mean that the elements or objects appearing before "include" or "comprise" include the elements or objects listed after "include" or "comprise" and their equivalents, and do not exclude other elements or objects. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0050] In the following description, words such as center, thickness, height, length, front, back, rear, left, right, top, bottom, upper, lower, etc. are defined relative to the structure shown in the drawings. In particular, "height" is equivalent to the dimension from top to bottom, "width" is equivalent to the dimension from left to right, and "depth" is equivalent to the dimension from front to back. They are relative concepts and may change accordingly according to their different positions and different usage states. Therefore, these or other directions should not be interpreted as restrictive terms.

[0051] Terms related to attachment, coupling, and the like (eg, "connected" and "attached") refer to either a fixed or attached relationship between structures, either directly or indirectly, and either movable or rigid attachments or relationships, unless expressly stated otherwise, of the structures to one another through intermediate structures.

[0052] According to one embodiment of the present invention, Figure 1 and Figure 2 As shown in the figure, it can be seen that the graphite boat loading and unloading anti-collision device includes two sets of anti-collision mechanisms 1 that are arranged opposite to each other and at intervals. When in use, the graphite boat is placed between the two sets of anti-collision mechanisms 1, so that the two ends of the graphite boat are respectively undertaken by a corresponding set of graphite boat anti-collision mechanisms 1, and each set of the anti-collision mechanisms 1 includes:

[0053] A receiving bottom plate 111; and

[0054] An anti-collision mounting frame 112, which is fixed to the receiving bottom plate 111 so that the outer contour of the anti-collision mechanism 1 is an L-shaped structure;

[0055] Wherein, both the front and rear sides of the anti-collision mounting frame 112 are provided with anti-collision plates 12, and at least one anti-collision reset component 121 is elastically connected between the anti-collision plate 12 and the anti-collision mounting frame 112, and the anti-collision plate 12 can approach or move away from the anti-collision mounting frame 112 to switch between the buffering state and the reset state, and the anti-collision reset component 121 acts on the anti-collision plate 12 to make the anti-collision plate 12 move away from the anti-collision mounting frame 112 to reset from the buffering state to the reset state. Since the outer edge of the graphite boat is protected by arranging anti-collision plates on both sides of the anti-collision mounting frame, before the manipulator collides with the graphite boat, the manipulator will first collide with the anti-collision plates, so that the graphite boat is effectively protected, and the impact force during the collision will be absorbed by the anti-collision reset component 121.

[0056] Furthermore, the anti-collision plate 12 is in an L-shaped structure, so that when the anti-collision plate 12 is connected to the anti-collision mounting frame 112, the anti-collision plate 12 can be adapted to the L-shaped outer contour of the anti-collision mechanism 1, thereby improving the protection area of ​​the graphite boat.

[0057] Reference Figure 3 and Figure 4 As shown, the anti-collision mounting frame 112 includes:

[0058] Two mounting columns 1121, which are fixedly mounted on the receiving bottom plate 111, each of the anti-collision plates 12 is arranged on the outer side of a corresponding mounting column 1121, and the two mounting columns 1121 are arranged opposite to each other and spaced apart; and

[0059] An installation beam 1122, which is fixedly connected between the two installation columns 1121;

[0060] The two mounting posts 1121, the mounting crossbeam 1122 and the receiving bottom plate 111 define a mounting space between the four; the anti-collision plate 12 is slidably connected to the mounting posts 1121 by at least two connecting rods 122, and the connecting rods 122 start from a corresponding anti-collision plate 12 and pass through the mounting posts 1121 to reach the inside of the mounting space; two groups of impact sensing components 15 are installed in the mounting space, and each group of the impact sensing components 15 is arranged to be fixedly connected to the connecting rod 122 on a corresponding anti-collision plate 12. Because it monitors the impact force received by the anti-collision plate in real time by setting an impact sensing component that is transmission-connected to the anti-collision plate. During actual use, each group of the anti-collision mechanism 1 also includes a control system, and the impact sensing component 15 and the manipulator establish a communication connection with the control system. Each group of impact sensing components 15 is used to sense the collision impact force at the corresponding position in real time. The control system is programmed to receive the collision impact force signal from the impact sensing component 15 and determine the buffering displacement of the anti-collision plate 12 according to the collision impact force signal, and finally determine whether to command the manipulator to stop according to the buffering displacement.

[0061] exist Figure 2 In the illustrated embodiment, protective plates 114 are provided on the left and right sides of the anti-collision mounting frame 112, respectively, and the protective plates 114 seal the mounting space to prevent the robot from affecting the impact sensing component 15 in the mounting space during the process of taking and placing the graphite boat.

[0062] Reference Figure 6 The anti-collision reset component 121 is a linear spring, and each connecting rod 122 is sleeved with a corresponding linear spring, and the linear spring is limited between the anti-collision plate 12 and a corresponding mounting column 1121.

[0063] Reference Figure 4 , the impact sensing component 15 comprises:

[0064] The induction mounting plate 151 is fixedly connected to the mounting beam 1122;

[0065] An impact sensor 152 mounted on the sensing mounting plate 151; and

[0066] The connecting rod 122 passes through the mounting column 1121 and is fixedly connected to the collision transmission plate 154.

[0067] The sensing end of the impact sensor 152 is transmission-connected with an impact pressure-sensing sheet 153 , and the impact pressure-sensing sheet 153 starts from the impact sensor 152 until it contacts the impact transmission plate 154 .

[0068] Furthermore, a manipulator mounting seat 14 is installed on the top of the mounting crossbeam 1122, and the manipulator mounting seat 14 includes:

[0069] A rotating base 141 fixedly connected to the top of the mounting beam 1122; and

[0070] an adjusting base 143, which is rotatably connected to the rotating base 141;

[0071] The adjustment base 143 is spaced from the top of the mounting crossbeam 1122 to form an adjustment space therebetween. Two adjustment studs 142 are arranged in sequence along the extension direction of the mounting crossbeam 1122 in the adjustment space. The rotating base 141 is located between the two adjustment studs 142. The two adjustment studs 142 start from the mounting crossbeam 1122 and abut against the bottom of the adjustment base 143 to keep the top of the adjustment base 143 horizontal. The manipulator mounting base 14 is used to accommodate and install the manipulator. After a long period of pick-and-place cycle, if a deviation is found between the top of the adjustment base 143 and the horizontal plane, the top of the adjustment base 143 can be maintained on the horizontal plane again by adjusting the two adjustment studs 142.

[0072] Reference Figure 3 A positioning groove 11111 is formed on the top surface of the receiving bottom plate 111, and a guide surface 1111a is formed on at least one side wall of the graphite boat positioning groove 11111, which is inclined from top to bottom toward the inside of the graphite boat positioning groove 11111. When the graphite boat is placed between the two groups of the anti-collision mechanisms 1, the guide surface 1111a guides the end of the graphite boat to a predetermined position on the bottom wall of a corresponding positioning groove 11111.

[0073] Reference Figure 7 to Figure 9 The receiving bottom plate 111 is provided with a presence or absence sensor installation groove 1112 connected to the positioning groove 1111, and a graphite boat presence or absence sensor component 13 is provided in the presence or absence sensor installation groove 1112, and the graphite boat presence or absence sensor component 13 includes:

[0074] The fixed arrangement has or does not have a mounting seat 131;

[0075] A rotating support 132, which is fixedly connected to the mounting base 131; and

[0076] The transmission rod 133 is rotatably connected to the rotating support 132.

[0077] A pressure sensor 134 is installed at the rear side of the presence / absence mounting seat 131, the rotating support 132 is fixedly connected to the front side of the presence / absence mounting seat 131, and the transmission rod 133 is rotatably connected to the rotating support 132 near the middle section so that one end of the transmission rod 133 passes over the presence / absence mounting seat 131 from the front side of the presence / absence mounting seat 131 and is transmission-connected to the pressure sensor 134. Each of the pressure sensors 134 is used to sense the pressure of the graphite boat at the corresponding position in real time, and the control system is programmed to receive a pressure signal from the pressure sensor 134 and determine whether the graphite boat at the corresponding positioning groove 1111 is placed in place according to the pressure signal.

[0078] In actual use, a buffer pad 136 is provided on the rotating support 132 and elastically contacts the transmission rod 133 .

[0079] Furthermore, the transmission rod 133 and the pressure sensor 134 are connected to each other through a gravity pressure sensing sheet 135 .

[0080] Furthermore, the other end of the transmission rod 133 is integrally formed with a pressure-touch end 133a extending upward. When the graphite boat presence / absence sensing component 13 is installed in the presence / absence sensing installation groove 1112, the pressure-touch end 133a protrudes upward from the bottom wall of the positioning groove 1111.

[0081] In a specific implementation process, the corresponding positions at both ends of the graphite boat 2 can be provided with pressure trigger terminals adapted to the pressure touch end 133a, and the pressure sensor 134 can be a piezoelectric pressure sensor. Specifically, when there is no graphite boat on the positioning groove 1111, the pressure value sensed by the piezoelectric pressure sensor is zero, and the control system determines that the current graphite boat buffer station is in an idle state according to the pressure signal fed back by the piezoelectric pressure sensor; when the graphite boat is guided and positioned to the predetermined position of the positioning groove 1111, the pressure trigger terminal is in contact with the pressure touch end 133a on the corresponding side. The pressure value detected by the corresponding piezoelectric pressure sensor is adapted so that the pressure value detected by the corresponding piezoelectric pressure sensor is within the preset correct positioning pressure value interval, and the control system makes a judgment that the graphite boat is guided and positioned correctly based on the pressure signal fed back by the piezoelectric pressure sensor; when the graphite boat is not guided and positioned to the predetermined position, the pressure trigger terminal fails to adapt to the piezoelectric pressure sensor on the corresponding side, resulting in the pressure value detected by the piezoelectric pressure sensor being outside the preset correct positioning pressure value interval, and the control system makes a judgment that the graphite boat is not guided to the predetermined position based on the pressure signal fed back by the piezoelectric pressure sensor.

[0082] The number of devices and processing scales described here are used to simplify the description of the present invention. Applications, modifications and variations of the present invention will be obvious to those skilled in the art.

[0083] Although the embodiments of the present invention have been disclosed as above, they are not limited to the applications listed in the specification and implementation modes. They can be fully applied to various fields suitable for the present invention. For those familiar with the art, additional modifications can be easily implemented. Therefore, without departing from the general concept defined by the claims and the scope of equivalents, the present invention is not limited to the specific details and the illustrations shown and described herein.

Claims

1. A graphite boat loading and unloading anti-collision device, comprising two sets of anti-collision mechanisms (1) arranged opposite to each other and spaced apart, It is characterized in that Each set of the anti-collision mechanism (1) comprises: A receiving bottom plate (111); and An anti-collision mounting frame (112) fixedly connected to the receiving base plate (111) so that the outer contour of the anti-collision mechanism (1) is an L-shaped structure; Wherein, both the front and rear sides of the anti-collision mounting frame (112) are provided with anti-collision plates (12); at least one anti-collision reset component (121) is elastically connected between the anti-collision plate (12) and the anti-collision mounting frame (112); the anti-collision plate (12) can be moved closer to or farther away from the anti-collision mounting frame (112) to switch between a buffering state and a reset state; the anti-collision reset component (121) acts on the anti-collision plate (12) to move the anti-collision plate (12) away from the anti-collision mounting frame (112) to reset from the buffering state to the reset state; The anti-collision plate (12) has an L-shaped structure, so that when the anti-collision plate (12) is connected to the anti-collision mounting frame (112), the anti-collision plate (12) can be adapted to the L-shaped outer contour of the anti-collision mechanism (1); The anti-collision mounting frame (112) comprises: Two mounting columns (1121) are fixedly mounted on the receiving bottom plate (111), each of the anti-collision plates (12) is arranged on the outside of a corresponding mounting column (1121), and the two mounting columns (1121) are arranged opposite to each other and spaced apart; and An installation crossbeam (1122) fixedly connected between the two installation columns (1121); The two mounting columns (1121), the mounting crossbeam (1122) and the receiving bottom plate (111) define a mounting space between the four; the anti-collision plate (12) and the mounting columns (1121) are slidably connected via at least two connecting rods (122), and the connecting rods (122) start from a corresponding anti-collision plate (12) and pass through the mounting columns (1121) to reach the interior of the mounting space; two groups of impact sensing components (15) are installed in the mounting space, and each group of the impact sensing components (15) is arranged to be fixedly connected to the connecting rod (122) on a corresponding anti-collision plate (12); The anti-collision reset component (121) is a linear spring, and each of the connecting rods (122) is sleeved with a corresponding linear spring, and the linear spring is limited between the anti-collision plate (12) and a corresponding mounting column (1121); The impact sensing component (15) comprises: An induction mounting plate (151) fixedly connected to the mounting crossbeam (1122); an impact sensor (152) mounted on the sensing mounting plate (151); and The impact transmission plate (154) is provided, wherein the connecting rod (122) passes through the mounting column (1121) and is fixedly connected to the impact transmission plate (154). The sensing end of the impact sensor (152) is transmission-connected to an impact pressure-sensing sheet (153), and the impact pressure-sensing sheet (153) extends from the impact sensor (152) until it contacts the impact transmission plate (154); A positioning groove (1111) is formed at the top surface of the receiving bottom plate (111), and a guide surface (1111a) is formed on at least one side wall of the graphite boat positioning groove (1111) and is inclined from top to bottom toward the inside of the graphite boat positioning groove (1111), and when the graphite boat is placed between two sets of the anti-collision mechanisms (1), the guide surface (1111a) guides the end of the graphite boat to a predetermined position on the bottom wall of a corresponding one of the positioning grooves (1111); The receiving bottom plate (111) is provided with a presence / absence sensing installation groove (1112) connected to the positioning groove (1111), and a graphite boat presence / absence sensing component (13) is arranged in the presence / absence sensing installation groove (1112). The graphite boat presence / absence sensing component (13) comprises: Whether the fixed arrangement has a mounting seat (131); A rotating support (132) fixedly connected to the mounting seat (131); and A transmission rod (133) is rotatably connected to the rotating support (132). A pressure sensor (134) is installed on the rear side of the presence / absence mounting seat (131), the rotating support (132) is fixedly connected to the front side of the presence / absence mounting seat (131), and the transmission rod (133) is rotationally connected to the rotating support (132) near its middle section so that one end of the transmission rod (133) passes over the presence / absence mounting seat (131) from the front side of the presence / absence mounting seat (131) and is transmission-connected to the pressure sensor (134); The other end of the transmission rod (133) is integrally formed with a pressure-touch end (133a) extending upward, and when the graphite boat presence / absence sensing component (13) is installed in the presence / absence sensing installation groove (1112), the pressure-touch end (133a) protrudes upward from the bottom wall of the positioning groove (1111).

2. The graphite boat loading and unloading anti-collision device according to claim 1, It is characterized in that A manipulator mounting seat (14) is mounted on the top of the mounting crossbeam (1122), and the manipulator mounting seat (14) comprises: a rotating base (141) fixedly connected to the top of the mounting beam (1122); and An adjustment base (143) rotatably connected to the rotating base (141); The adjustment base (143) is spaced from the top of the mounting beam (1122) to form an adjustment space therebetween, and two adjustment studs (142) are arranged in sequence along the extension direction of the mounting beam (1122) in the adjustment space, and the rotating base (141) is located between the two adjustment studs (142); the two adjustment studs (142) start from the mounting beam (1122) until they abut against the bottom of the adjustment base (143) so that the top of the adjustment base (143) remains horizontal.

3. The graphite boat loading and unloading anti-collision device according to claim 1, It is characterized in that The transmission rod (133) and the pressure sensor (134) are connected in transmission via a gravity pressure sensing sheet (135).

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