Film laminating machine

Abstract

The application discloses a film pasting machine, which is characterized by comprising a film pasting device, a film cutting device, a film conveying mechanism for conveying a dry film, and a film pulling mechanism for pulling the dry film to move from the film pasting device to the film cutting device; the film pulling mechanism comprises a film pulling fixed seat, a film pulling sliding seat, a film pulling driving assembly, a film pulling mounting rack, a film pulling guide roller, a film pulling lifting driving piece, and a film pulling pressing block. The film conveying mechanism conveys the dry film to the film pasting device and above the wafer, the film pasting device pastes the dry film on the wafer surface to bond the wafer and the dry film, the film pulling mechanism pulls the dry film bonded with the wafer to the film cutting device, the film cutting device cuts off the excess dry film along the boundary of the wafer, thereby completing the wafer film pasting, realizing the automatic conveying, automatic pasting and automatic cutting of the dry film, realizing the wafer film pasting treatment, and realizing the automation and continuity of cutting off the dry film outside the wafer boundary.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of film pasting equipment, in particular to a film pasting machine. BACKGROUND

[0002] Wafer refers to a silicon wafer used for manufacturing silicon semiconductor integrated circuits. Since the shape is circular, it is called wafer. Various circuit element structures can be processed and manufactured on the silicon wafer to become integrated circuit products with specific electrical properties.

[0003] In the production process of wafers and other products, the products need to be pasted with film, and the dry film outside the product boundary needs to be cut off. SUMMARY

[0004] The purpose of the present application is to provide a film pasting machine, which aims to solve the problem in the prior art that in the production process of wafers and other products, the products need to be pasted with film, and the dry film outside the product boundary needs to be cut off.

[0005] To achieve this purpose, the present application adopts the following technical solutions:

[0006] The film pasting machine comprises a film pasting device, a film cutting device, a film feeding mechanism for feeding dry film, and a film pulling mechanism for pulling the dry film to move from the film pasting device to the film cutting device; the film pulling mechanism comprises a film pulling fixed seat, a film pulling sliding seat in sliding connection with the film pulling fixed seat, a film pulling driving assembly for driving the film pulling sliding seat to move, a film pulling mounting rack connected with the film pulling sliding seat, a film pulling guide roller arranged on the film pulling mounting rack, a film pulling lifting driving piece arranged on the film pulling sliding seat, and a film pulling pressing block arranged on the output end of the film pulling lifting driving piece and matched with the film pulling guide roller.

[0007] Further, the film pasting device comprises a film pasting support, a first film pasting table fixedly arranged on the film pasting support, a film pressing mechanism arranged on the first film pasting table, a second film pasting table arranged opposite to the first film pasting table, a film pasting lifting driving mechanism for driving the second film pasting table to move, and a locking assembly arranged between the first film pasting table and the second film pasting table and used for locking the first film pasting table and the second film pasting table.

[0008] Further, the film pasting device further comprises a sealing ring arranged on the second film pasting table and used for contacting the first film pasting table, and a vacuum pumping assembly for pumping vacuum between the first film pasting table and the second film pasting table; the vacuum pumping assembly comprises a vacuum pump and a vacuum pipe connected with the vacuum pump; the first film pasting table and / or the second film pasting table is / are provided with a vacuum hole communicated with the vacuum pipe.

[0009] Further, the film pressing mechanism comprises a film pressing air bag connected to the first film pasting table and located between the first film pasting table and the second film pasting table, and a film pressing air pump for supplying air to the film pressing air bag.

[0010] Alternatively, the film pressing mechanism comprises a film pressing air cylinder arranged at the first film pasting table, and a film pressing plate connected to a movable end of the film pressing air cylinder and located between the first film pasting table and the second film pasting table.

[0011] Further, the locking assembly comprises a first locking block arranged at the first film pasting table, a first locking rod in sliding connection with the second film pasting table, and a first locking driving member arranged at the second film pasting table and used for driving the first locking rod to move; the first locking block is provided with a first locking hole matched with the first locking rod; the locking assembly further comprises a first guide block arranged at the second film pasting table, the first guide block is provided with a first guide hole for the first locking rod to pass through; the locking assembly further comprises a first fixing block arranged at the second film pasting table, the first fixing block is provided with a first fixing hole corresponding to the first locking rod, and the first fixing block is arranged opposite to and spaced apart from the first guide block.

[0012] Further, the film feeding mechanism comprises a raw film supply assembly, a film dividing roller matched with the raw film supply assembly, a bottom film winding assembly, and a waste film winding assembly.

[0013] Further, the raw film supply assembly comprises a film feeding support, a first air expansion shaft in rotary connection with the film feeding support, a first rotary driving member used for driving the first air expansion shaft to rotate, and a plurality of first tensioning rollers arranged at the film feeding support; the waste film winding assembly comprises a second air expansion shaft in rotary connection with the film feeding support, a second rotary driving member used for driving the second air expansion shaft to rotate, and a second tensioning roller arranged at the film feeding fixed seat; the bottom film winding assembly comprises a third air expansion shaft in rotary connection with the film feeding support, a third rotary driving member used for driving the third air expansion shaft to rotate, and a plurality of third tensioning rollers arranged at the film feeding support.

[0014] Further, the number of the film pulling lifting driving members is greater than or equal to two, the film pulling lifting driving members are in sliding connection with the film pulling sliding seat, and the film pulling sliding seat is provided with a flattening driving assembly used for respectively driving each of the film pulling lifting driving members to slide.

[0015] Further, the film cutting device comprises a cutting table, a cutting assembly, and a moving driving assembly for driving the cutting assembly to move; a vacuum chuck is arranged in the middle of the cutting table, and at least one circular cutting accommodation slot is formed in the cutting table; the cutting assembly comprises a cutting fixed table connected with the output end of the moving driving assembly, a cutting knife assembly, and a cutting driving assembly arranged on the cutting fixed table and used for driving the cutting knife assembly to complete a cutting action.

[0016] Further, the cutting assembly further comprises a mounting plate arranged between the cutting driving assembly and the cutting knife assembly, and the cutting knife assembly is rotationally connected with the mounting plate; the cutting assembly further comprises a film breaking driving assembly used for driving the cutting knife assembly to rotate relative to the mounting plate; the cutting knife assembly comprises a knife seat rotationally connected with the mounting plate, and a cutter fixedly arranged on the knife seat; the film breaking driving assembly comprises a rotating block rotationally connected with the knife seat, and a driving cylinder with a movable end connected with the rotating block; the fixed end of the driving cylinder is rotationally connected with the mounting plate.

[0017] Further, a first rotating seat is arranged on the knife seat; the rotating block is rotationally connected with the first rotating seat; a second rotating seat is arranged on the mounting plate; the fixed end of the driving cylinder is rotationally connected with the second rotating seat.

[0018] Further, a lower knife avoiding notch is formed in the side wall of the cutting accommodation slot.

[0019] Further, a connecting plate is arranged between the cutting driving assembly and the mounting plate, the connecting plate is provided with a connecting through hole, and the mounting plate is provided with a plurality of threaded holes in the length direction; a connecting screw is arranged between the connecting plate and the mounting plate, the connecting screw penetrates through the connecting through hole and is threadedly connected with the threaded holes.

[0020] Further, the moving driving assembly comprises a support table, a horizontal driving module arranged on the support table, and a vertical driving module connected with the output end of the horizontal driving module; the cutting fixed table is connected with the output end of the vertical driving module; the horizontal driving module comprises a horizontal motor arranged on the support table, a horizontal lead screw shaft connected with the output shaft of the horizontal motor, a horizontal lead screw nut sleeved outside the horizontal lead screw shaft, and a horizontal moving plate connected with the horizontal lead screw nut; the vertical driving module comprises a vertical motor arranged on the horizontal moving plate, a vertical lead screw shaft connected with the output shaft of the vertical motor, a vertical lead screw nut sleeved outside the vertical lead screw shaft, and a vertical moving plate connected with the vertical lead screw nut, and the cutting fixed table is connected with the vertical moving plate.

[0021] Further, the surface of the film pulling pressing block near the side of the film pulling guide roller is provided with a film pulling groove corresponding to the film pulling guide roller; and the film pulling guide roller is provided with a film pulling flexible member in contact with the film pulling pressing block.

[0022] Further, the film pasting lifting driving mechanism comprises a film pasting base and a lifting cylinder arranged on the film pasting base; the second film pasting table is connected with the movable end of the lifting cylinder; the film pasting lifting driving mechanism further comprises a film pasting guide rail in sliding connection with the film pasting base and a film pasting sliding cylinder for driving the film pasting base to slide along the film pasting guide rail; the film pasting base is provided with a film pasting guide hole, and the film pasting lifting driving mechanism further comprises a film pasting guide rod located in the film pasting guide hole, the film pasting guide rod being connected with the film pasting base and being in sliding connection with the film pasting base in the film pasting guide hole.

[0023] Further, the first film pasting table is provided with a first heating assembly, the first heating assembly comprising a first heating member, a first heat conducting member connected with the side of the first heating member near the second film pasting table, and a first heat insulating member connected with the side of the first heating member away from the first heat conducting member.

[0024] Further, the second film pasting table is provided with a second heating assembly, the second heating assembly comprising a second heating member, a second heat conducting member connected with the side of the second heating member near the first film pasting table, and a second heat insulating member connected with the side of the second heating member away from the second heat conducting member.

[0025] Further, the locking assembly comprises a second locking block arranged on the second film pasting table, a second locking rod in sliding connection with the first film pasting table, and a second locking driving member arranged on the first film pasting table and used for driving the second locking rod to move; the second locking block is provided with a second locking hole matched with the second locking rod; the locking assembly further comprises a second guide block arranged on the first film pasting table, the second guide block being provided with a second guide hole for the second locking rod to pass through; the locking assembly further comprises a second fixing block arranged on the first film pasting table, the second fixing block being provided with a second fixing hole corresponding to the second locking rod, and the second fixing block being arranged opposite to and spaced apart from the second guide block.

[0026] Further, the film pasting support comprises two film pasting vertical plates arranged opposite to and spaced apart from each other, and the film pasting vertical plates are provided with film pasting accommodation holes.

[0027] The beneficial effects of this invention are as follows: The film feeding mechanism transports the dry film to the film application device and positions it directly above the wafer. The film application device applies the dry film to the wafer surface, causing the wafer and the dry film to adhere. The film pulling mechanism pulls the dry film with the wafer attached to it to the film cutting device. The film cutting device cuts off the excess dry film along the wafer boundary, thereby completing the wafer film application. This invention achieves automatic dry film transportation, automatic dry film application, and automatic dry film cutting, realizing the automation and continuity of wafer film application and the removal of dry film outside the wafer boundary. Attached Figure Description

[0028] To more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0029] Figure 1 This is a schematic diagram of the film applicator from a first-view perspective in an embodiment of the present invention;

[0030] Figure 2 This is a schematic diagram of the film-pulling mechanism in an embodiment of the present invention;

[0031] Figure 3 for Figure 2 A magnified view of a section at point A in the middle;

[0032] Figure 4 This is a schematic diagram of the film applicator from a second perspective in an embodiment of the present invention;

[0033] Figure 5 This is a schematic diagram of the film-applying device in an embodiment of the present invention;

[0034] Figure 6 for Figure 5 A magnified view of a section at point B in the middle;

[0035] Figure 7 This is a schematic diagram of the locking assembly in an embodiment of the present invention;

[0036] Figure 8 This is a cross-sectional view of the film-applying device in an embodiment of the present invention;

[0037] Figure 9 This is a schematic diagram of the film-cutting device in an embodiment of the present invention;

[0038] Figure 10 This is a schematic diagram of the cutting component in an embodiment of the present invention;

[0039] Figure 11 This is a schematic diagram of the cutting table structure in an embodiment of the present invention;

[0040] In the drawings:

[0041] 500, raw film; 5001, dry film; 50011, waste film; 5002, bottom film; 600, wafer;

[0042] 1, film feeding mechanism; 11, raw film supply assembly; 111, film feeding support; 112, first air expansion shaft; 113, first tension roller; 12, film dividing roller; 13, bottom film winding assembly; 131, third air expansion shaft; 132, third tension roller; 14, waste film winding assembly; 141, second air expansion shaft; 142, second tension roller;

[0043] 2, film pulling mechanism; 21, film pulling fixed seat; 22, film pulling sliding seat; 23, film pulling driving assembly; 24, film pulling mounting frame; 25, film pulling guide roller; 251, film pulling flexible piece; 26, film pulling lifting driving piece; 27, film pulling pressing block; 271, film pulling groove; 28, flattening driving assembly;

[0044] 3, film pasting device; 31, film pasting support; 311, film pasting vertical plate; 3111, film pasting accommodation hole; 32, first film pasting table; 33, film pressing mechanism; 331, film pressing cylinder; 332, film pressing plate; 34, second film pasting table; 35, film pasting lifting driving mechanism; 351, film pasting base; 352, lifting cylinder; 353, film pasting guide rail; 354, film pasting sliding cylinder; 355, film pasting guide rod; 36, locking assembly; 361, first locking block; 3611, first locking hole; 362, first locking rod; 363, first locking driving piece; 364, first guide block; 365, first fixed block; 3651, first fixed hole; 37, sealing ring; 38, first heating assembly; 381, first heating piece; 382, first heat conduction piece; 383, first heat insulation piece; 39, second heating assembly; 391, second heating piece; 392, second heat conduction piece; 393, second heat insulation piece;

[0045] 4, film cutting device; 41, cutting table; 411, cutting accommodation groove; 412, lower knife accommodation notch; 42, cutting assembly; 421, cutting fixed table; 422, cutting knife assembly; 4221, knife seat; 42211, first rotating seat; 4222, cutting tool; 423, cutting driving assembly; 424, mounting plate; 4241, second rotating seat; 425, film breaking driving assembly; 4251, rotating block; 4252, driving cylinder; 426, connecting plate; 43, moving driving assembly; 431, support table; 432, horizontal driving module; 4321, horizontal motor; 433, vertical driving module; 4331, vertical motor. DETAILED DESCRIPTION

[0046] In order to make the objects, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not intended to limit the present application.

[0047] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0048] It should be understood that the terms "length", "width", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only used to facilitate the description of the present application and simplify the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0049] In addition, the terms "first", "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise explicitly and specifically limited.

[0050] The implementation of the present application will be described in detail below in combination with specific embodiments.

[0051] As shown in Figures 1-11 The present application embodiment proposes a film sticking machine, which comprises a film sticking device 3, a film cutting device 4, a film feeding mechanism 1 for feeding dry film 5001, and a film pulling mechanism 2 for pulling the dry film 5001 to move from the film sticking device 3 to the film cutting device 4; the film pulling mechanism 2 comprises a film pulling fixed seat 21, a film pulling sliding seat 22 in sliding connection with the film pulling fixed seat 21, a film pulling driving assembly 23 for driving the film pulling sliding seat 22 to move (which can be a motor and screw pair cooperation mode to drive the film pulling sliding seat 22 to slide along the film pulling fixed seat 21), a film pulling mounting bracket 24 connected with the film pulling sliding seat 22, a film pulling guide roller 25 provided on the film pulling mounting bracket 24, a film pulling lifting driving piece 26 provided on the film pulling sliding seat 22 (which can be a pneumatic cylinder), and a film pulling pressing block 27 provided on the output end of the film pulling lifting driving piece 26 and matched with the film pulling guide roller 25.

[0052] In the embodiment of the present application, the film pasting process of the film pasting machine is as follows: the wafer 600 (or other product to be pasted with film) is placed on the film pasting position of the film pasting device 3, the film feeding mechanism 1 feeds the dry film 5001 to the film pasting device 3 and positions it directly above the wafer 600, the film pasting device 3 pastes the dry film 5001 on the surface of the wafer 600 so that the wafer 600 is bonded with the dry film 5001, the film pulling mechanism 2 pulls the dry film 5001 bonded with the wafer 600 to the film cutting device 4, the film cutting device 4 cuts off the excess dry film 5001 along the boundary of the wafer 600, thereby completing the film pasting of the wafer 600, realizing the automatic feeding, pasting and cutting of the dry film 5001, realizing the film pasting of the wafer 600, and realizing the automation and continuity of cutting off the dry film 5001 outside the boundary of the wafer 600. The process of pulling the dry film 5001 (which can be a strip-shaped dry film 5001) and moving the wafer 600 by the film pulling mechanism 2 is as follows: the film pulling driving assembly 23 drives the film pulling sliding seat 22 to slide along the film pulling fixed seat 21 to a position close to the film pasting device 3, the film pulling lifting driving member 26 drives the film pulling pressing block 27 to press the dry film 5001 tightly between the film pulling guide roller 25 and the film pulling pressing block 27, then the film pulling driving assembly 23 drives the film pulling sliding seat 22 to move along the film pulling fixed seat 21 to a direction close to the film cutting device 4 (i.e. away from the film pasting device 3), and finally pulls the position of the dry film 5001 bonded with the wafer 600 to the film cutting device 4, so that the film cutting device 4 cuts the dry film 5001.

[0053] Further, please refer to Figures 5-8As another specific embodiment of the film laminating machine provided by the application, the film laminating device 3 comprises a film laminating support 31, a first film laminating table 32 fixedly arranged on the film laminating support 31, a film pressing mechanism 33 arranged on the first film laminating table 32, a second film laminating table 34 arranged opposite to the first film laminating table 32, a film laminating lifting driving mechanism 35 for driving the second film laminating table 34 to move, and a locking assembly 36 arranged between the first film laminating table 32 and the second film laminating table 34 and used for locking the first film laminating table 32 and the second film laminating table 34. The film laminating process of the film laminating device 3 is as follows: the wafer 600 is placed on the second film laminating table 34, the dry film 5001 is located between the first film laminating table 32 and the second film laminating table 34 and directly above the wafer 600, then the film laminating lifting driving mechanism 35 drives the second film laminating table 34 to ascend and gradually approach the first film laminating table 32, when the second film laminating table 34 contacts the first film laminating table 32, the locking assembly 36 locks the first film laminating table 32 and the second film laminating table 34, the film pressing mechanism 33 is actuated to apply force to the dry film 5001 and the wafer 600, so that the dry film 5001 is attached to the surface of the wafer 600, thereby completing the film laminating of the wafer 600, and since the locking assembly 36 locks the first film laminating table 32 and the second film laminating table 34, when the film pressing mechanism 33 is actuated to apply force to the dry film 5001 and the wafer 600, the first film laminating table 32 and the second film laminating table 34 do not move relatively, the film pressing mechanism 33 can sufficiently apply force to the dry film 5001 and the wafer 600, and the tightness between the dry film 5001 and the wafer 600 is ensured.

[0054] Further, please refer to Figure 8As another specific embodiment of the film laminating machine provided by the present application, the film laminating device 3 further comprises a sealing ring 37 arranged on the second film laminating table 34 and used to contact the first film laminating table 32, and a vacuum pumping assembly used to pump the air between the first film laminating table 32 and the second film laminating table 34; the vacuum pumping assembly comprises a vacuum pump and a vacuum pipe connected to the vacuum pump; the first film laminating table 32 or the second film laminating table 34 is provided with a vacuum hole communicated with the vacuum pipe (the first film laminating table 32 or the second film laminating table 34 can be provided with the vacuum hole simultaneously). The film laminating lifting driving mechanism 35 drives the second film laminating table 34 to ascend and gradually approach the first film laminating table 32, when the sealing ring 37 on the second film laminating table 34 is in sealing contact with the first film laminating table 32, the locking assembly 36 locks the first film laminating table 32 and the second film laminating table 34, the vacuum pumping assembly pumps the air between the first film laminating table 32 and the second film laminating table 34, so that the air between the first film laminating table 32 and the second film laminating table 34 is pumped away, then the film pressing mechanism 33 acts to apply force to the dry film 5001 and the wafer 600, since the air between the first film laminating table 32 and the second film laminating table 34 is in a near-vacuum state, the problem that air bubbles exist between the wafer 600 and the dry film 5001 after the dry film 5001 is attached to the wafer 600 is avoided. The vacuum pump pumps the air between the first film laminating table 32 and the second film laminating table 34 away through the vacuum pipe and the vacuum hole communicated with the vacuum pipe, so that the vacuum pumping effect is achieved. When the vacuum hole is arranged on the second film laminating table 34, the vacuum hole is located within the boundary range of the sealing ring 37; when the vacuum hole is arranged on the first film laminating table 32, the vacuum hole is located within the annular range where the first film laminating table 32 contacts the sealing ring 37.

[0055] Further, as another specific embodiment of the film laminating machine provided by the present application, the film pressing mechanism 33 comprises a film pressing air bag connected to the first film laminating table 32 and located between the first film laminating table 32 and the second film laminating table 34, and a film pressing air pump (not shown in the figure) used to supply air to the film pressing air bag; the film pressing air pump supplies air to the film pressing air bag through a film pressing air pipe, after the film pressing air bag is inflated, the volume of the film pressing air bag expands and tightly presses the dry film 5001 on the wafer 600, since the film pressing air bag is filled with air, the pressure applied by the film pressing air bag to the dry film 5001 and the wafer 600 is basically the same at each position of the film pressing air bag, so that the dry film 5001 is well attached to the wafer 600 at each position, the problem of poor local attachment effect is avoided, and the effect of pressing the dry film 5001 on the wafer 600 is improved.

[0056] In other embodiments of the present application, as shown in Figure 8As shown, the film pressing mechanism 33 comprises a film pressing cylinder 331 arranged at the first film pasting table 32, and a film pressing plate 332 connected with the movable end of the film pressing cylinder 331 and located between the first film pasting table 32 and the second film pasting table 34. The piston rod (i.e. the movable end) of the film pressing cylinder 331 drives the film pressing plate 332 to move and apply force to the dry film 5001 and the wafer 600, so as to complete the pressing action between the dry film 5001 and the wafer 600 and complete the film pressing action.

[0057] Further, referring to Figure 7 As another specific embodiment of the film pasting machine provided by the present application, the locking assembly 36 comprises a first locking block 361 arranged at the first film pasting table 32, a first locking rod 362 in sliding connection with the second film pasting table 34, and a first locking driving member 363 arranged at the second film pasting table 34 and used for driving the first locking rod 362 to move; the first locking block 361 is provided with a first locking hole 3611 matched with the first locking rod 362; the locking assembly 36 further comprises a first guide block 364 arranged at the second film pasting table 34, the first guide block 364 is provided with a first guide hole through which the first locking rod 362 passes; the locking assembly 36 further comprises a first fixing block 365 arranged at the second film pasting table 34, the first fixing block 365 is provided with a first fixing hole 3651 corresponding to the first locking rod 362, and the first fixing block 365 is arranged opposite to and spaced apart from the first guide block 364. The process of locking the first film pasting table 32 and the second film pasting table 34 by the locking assembly 36 is as follows: the first locking driving member 363 (which can be a cylinder or other driving member) drives the first locking rod 362 to move and extend into the first locking hole 3611 of the first locking block 361 on the first film pasting table 32, at this time the first locking rod 362 limits the first locking block 361, so that the first film pasting table 32 cannot move relative to the second film pasting table 34. The first locking rod 362 is in sliding connection with the second film pasting table 34 in the first guide hole. After the first locking rod 362 extends into the first locking hole 3611 of the first locking block 361 on the first film pasting table 32, the first locking rod 362 continues to move to the first fixing hole 3651 on the first fixing block 365, at this time the first locking block 361 is located between the first fixing block 365 and the first guide block 364, and the two ends of the first locking rod 362 are located in the first fixing block 365 and the first guide block 364 respectively, so as to enhance the locking effect of the first locking block 361 and ensure the locking effect between the first film pasting table 32 and the second film pasting table 34.

[0058] Further, referring to Figure 1As another specific embodiment of the film sticking machine provided by the present application, the film feeding mechanism 1 comprises a raw film supply assembly 11 arranged on the side of the film sticking device 3 away from the film cutting device 4, a film separating roller 12 arranged between the raw film supply assembly 11 and the film sticking device 3 and matched with the raw film supply assembly 11, a bottom film winding assembly 13, and a waste film winding assembly 14 arranged on the side of the film cutting device 4 away from the film sticking device 3. The raw film supply assembly 11 is used to feed the raw film 500, and the raw film 500 is separated into a strip-shaped dry film 5001 and a bottom film 5002 at the film separating roller 12; the dry film 5001 continues to move to the film sticking mechanism, is cut off by the film cutting device 4 after being attached to the wafer 600, and the waste film 50011 is wound by the waste film winding assembly 14; and the bottom film winding assembly 13 is used to wind the bottom film 5002.

[0059] Further, referring to Figures 1-3 As another specific embodiment of the film sticking machine provided by the present application, the raw film supply assembly 11 comprises a film feeding support 111, a first air expansion shaft 112 rotatably connected with the film feeding support 111, a first rotation driving member (which can be a motor) used to drive the first air expansion shaft 112 to rotate, and a plurality of first tensioning rollers 113 arranged on the film feeding support 111; the waste film winding assembly 14 comprises a second air expansion shaft 141 rotatably connected with the film feeding support 111, a second rotation driving member (which can be a motor) used to drive the second air expansion shaft 141 to rotate, and a second tensioning roller 142 arranged on the film feeding fixed seat 21; and the bottom film winding assembly 13 comprises a third air expansion shaft 131 rotatably connected with the film feeding support 111, a third rotation driving member (which can be a motor) used to drive the third air expansion shaft 131 to rotate, and a plurality of third tensioning rollers 132 arranged on the film feeding support 111. The raw film 500 released by the first air expansion shaft 112 passes around the plurality of first tensioning rollers 113 and reaches the film separating roller 12, the bottom film 5002 passes around the plurality of third tensioning rollers 132 and is wound by the third air expansion shaft 131, and the waste film 50011 passes through the second tensioning roller 142 and is wound by the second air expansion shaft 141.

[0060] Further, referring to Figure 2As another specific embodiment of the film sticking machine provided by the present application, the number of the film pulling lifting driving members 26 is greater than or equal to two, the film pulling lifting driving members 26 are slidingly connected with the film pulling sliding seat 22, and the film pulling sliding seat 22 is provided with film pulling driving assemblies 28 (which can be a mode of motor and screw pair cooperation to drive the film pulling lifting driving members 26 to slide along the film pulling sliding seat 22) for driving each of the film pulling lifting driving members 26 to slide, respectively. The number of the film pulling driving assemblies 28 is the same as that of the film pulling lifting driving members 26 and corresponds to each of the film pulling lifting driving members 26, so as to drive each of the film pulling lifting driving members 26 to slide on the film pulling sliding seat 22. Before the dry film 5001 is attached to the wafer 600, when the dry film 5001 has a certain wrinkle, two of the film pulling lifting driving members 26 are driven by the film pulling driving assemblies 28 to move to both sides of the middle part of the dry film 5001, respectively, and the dry film 5001 is flattened by the film pulling pressing block 27, so as to improve the flatness of the film sticking.

[0061] Further, please refer to Figure 9 As another specific embodiment of the film sticking machine provided by the present application, the film cutting device 4 comprises a cutting table 41, a cutting assembly 42, and a moving driving assembly 43 for driving the cutting assembly 42 to move; the middle part of the cutting table 41 is provided with a vacuum chuck, and the cutting table 41 is provided with at least one circular cutting accommodation groove 411; the cutting assembly 42 comprises a cutting fixed table 421 connected with the output end of the moving driving assembly 43, a cutting knife assembly 422, and a cutting driving assembly 423 provided on the cutting fixed table 421 and used for driving the cutting knife assembly 422 to complete the cutting action (which can be a motor or other driving mechanism with the cutting knife assembly 422 to complete the cutting action with a circular trajectory). The film cutting process of the film cutting device 4 is as follows: when the wafer 600 attached to the dry film 5001 belt moves to the position directly above the cutting table 41, the vacuum chuck on the cutting table 41 positions the wafer 600, the moving driving assembly 43 drives the cutting assembly 42 to the position directly above the wafer 600, the cutting driving assembly 423 drives the cutting knife assembly 422 to cut the dry film 5001 along the boundary of the wafer 600, so that the wafer 600 and the dry film 5001 belt are separated, and then the finished wafer 600 with the dry film 5001 attached is obtained. The wafer 600 can be stably adsorbed and fixed by the vacuum chuck, and the surface of the wafer 600 will not be damaged when the wafer 600 is fixed. The cutting accommodation groove 411 is provided for the cutting knife assembly 422 to pass through when completing the cutting action, so as to avoid damage of the cutting table 41 to the cutting knife assembly 422 or damage of the cutting table 41 to the cutting knife assembly 422.

[0062] Further, please refer to Figure 10As another specific embodiment of the film cutting machine provided by the application, the cutting assembly 42 further comprises a mounting plate 424 arranged between the cutting driving assembly 423 and the cutter assembly 422, and the cutter assembly 422 is rotationally connected to the mounting plate 424; the cutting assembly 42 further comprises a film breaking driving assembly 425 for driving the cutter assembly 422 to rotate relative to the mounting plate 424; in the initial state, the cutter assembly 422 is inclined to the direction away from the product to be cut (for cutting the dry film 5001 on the wafer 600 and the like), and the cutter assembly 422 is located above the dry film 5001 with a small gap; the film breaking driving assembly 425 drives the cutter assembly 422 to rotate to the direction close to the product to be cut, and the cutter assembly 422 has two sub-movements in the horizontal and vertical directions during the rotation process, the vertical sub-movement causes the cutter assembly 422 to cut the dry film 5001 and makes the end of the cutter assembly 422 lower than the product to be cut, and the horizontal sub-movement causes the cutter assembly 422 to move to the direction close to the product to be cut until the boundary of the wafer 600 is abutted; thus, the cutter assembly 422 can be abutted to the boundary of the product to be cut after being lowered below the product to be cut, and the product to be cut will not be damaged. Compared with the mode that the cutter assembly 422 directly moves downward from the vertical direction to cut the dry film 5001 and abut to the boundary of the product to be cut, the damage of the product to be cut caused by the direct downward movement of the cutter assembly 422 from the vertical direction can be avoided. The mounting plate 424 can be connected to the output end of the cutting driving assembly 423 through a connecting plate 426. The cutter assembly 422 comprises a cutter seat 4221 rotationally connected to the mounting plate 424, and a cutter 4222 fixedly installed on the cutter seat 4221; the film breaking driving assembly 425 comprises a rotating block 4251 rotationally connected to the cutter seat 4221, and a driving cylinder 4252 with a movable end connected to the rotating block 4251; the fixed end of the driving cylinder 4252 is rotationally connected to the mounting plate 424. When the cutter seat 4221 rotates relative to the mounting plate 424, the cutter 4222 rotates. The cutter assembly 422 can also be directly rotationally connected to the mounting plate 424. The cutter 4222 is provided with an inclined cutting edge, and the cutter 4222 is provided with a plurality of mounting positions connected to the cutter seat 4221 to adjust the length of the cutter 4222 extending out of the cutter seat 4221. The process of driving the cutter assembly 422 to rotate by the film breaking driving assembly 425 is as follows: the extension and retraction of the movable end of the driving cylinder 4252 drives the movement of the rotating block 4251, and the rotating block 4251 drives the cutter assembly 422 to rotate during the movement.

[0063] Further, please refer to Figure 10As another specific embodiment of the film laminating machine provided by the present application, the knife seat 4221 is provided with a first rotating seat 42211; the rotating block 4251 is rotatably connected with the first rotating seat 42211; the mounting plate 424 is provided with a second rotating seat 4241; and the fixed end of the driving cylinder 4252 is rotatably connected with the second rotating seat 4241. The first rotating seat 42211 can be two oppositely and spaced apart guide plates, and a rotating shaft can be arranged between the rotating block 4251 and the guide plates of the first rotating seat 42211 to realize the rotatable connection. The second rotating seat 4241 can be two oppositely and spaced apart guide plates, and a rotating shaft can be arranged between the fixed end of the driving cylinder 4252 and the guide plates of the second rotating seat 4241 to realize the rotatable connection.

[0064] Further, refer to Figure 11 As another specific embodiment of the film laminating machine provided by the present application, the side wall of the cutting accommodation groove 411 is provided with a lower-knife-avoiding notch 412. In the process that the film breaking driving assembly 425 drives the cutting knife assembly 422 to rotate towards the wafer 600 and realizes that the cutter 4222 is below the upper surface of the wafer 600, the cutter 4222 enters the cutting accommodation groove 411 through the lower-knife-avoiding notch 412.

[0065] Further, refer to Figure 10 As another specific embodiment of the film laminating machine provided by the present application, the connecting plate 426 is arranged between the cutting driving assembly 423 and the mounting plate 424, the connecting plate 426 is provided with a connecting through hole, and the mounting plate 424 is provided with a plurality of threaded holes in the length direction; the connecting plate 426 and the mounting plate 424 are provided with connecting screws, the connecting screws pass through the connecting through hole and are threadedly connected with the threaded holes. The connecting plate 426 is provided with a connecting through hole, and the mounting plate 424 is provided with a plurality of threaded holes in the length direction; the connecting plate 426 and the mounting plate 424 are provided with connecting screws, so that the length of the mounting plate 424 extending out of the connecting plate 426 can be adjusted, and then the radius of the circle in the process that the cutting knife assembly 422 arranged on the mounting plate 424 makes a circular cutting motion along with the mounting plate 424 can be adjusted to adapt to wafers 600 of different sizes. The number of the cutting accommodation grooves 411 is multiple, and the centers of the cutting accommodation grooves 411 are the same, so that when products of different sizes are placed on the cutting table 41, the length of the mounting plate 424 extending out of the connecting plate 426 only needs to be adjusted, and the position of the cutting knife assembly 422 as a whole does not need to be moved. The connecting plate 426 is provided with a sliding groove, and the mounting plate 424 is provided with a sliding protrusion located in the sliding groove. When the length of the mounting plate 424 extending out of the connecting plate 426 is adjusted, the mounting plate 424 can be slid along the connecting plate 426 to a preset length, and then the connecting screws are locked, so that the operation is convenient.

[0066] Further, refer to Figure 9As another specific embodiment of the film laminating machine provided by the present application, the moving driving assembly 43 comprises a support table 431, a horizontal driving module 432 arranged on the support table 431, and a vertical driving module 433 connected with the output end of the horizontal driving module 432; the cutting fixing table 421 is connected with the output end of the vertical driving module 433; the vertical driving module 433 is used to drive the cutting fixing table 421 to move up and down along the vertical direction, and the horizontal driving module 432 is used to drive the vertical driving module 433 to move forward and backward in the horizontal plane, so that the support table 431 is fixed at a position in line with the center of the cutting table 41, and then the cutting driving assembly 423 and the cutter assembly 422 arranged on the cutting fixing table 421 can be driven to move to the middle position of the cutting table 41 through the cooperation of the vertical driving module 433 and the horizontal driving module 432, so as to cut the dry film 5001 around the edge of the wafer 600. The horizontal driving module 432 comprises a horizontal motor 4321 arranged on the support table 431, a horizontal screw shaft connected with the output shaft of the horizontal motor 4321, a horizontal screw nut sleeved outside the horizontal screw shaft, and a horizontal moving plate connected with the horizontal screw nut; the vertical driving module 433 comprises a vertical motor 4331 arranged on the horizontal moving plate, a vertical screw shaft connected with the output shaft of the vertical motor 4331, a vertical screw nut sleeved outside the vertical screw shaft, and a vertical moving plate connected with the vertical screw nut, and the cutting fixing table 421 is connected with the vertical moving plate. The horizontal driving module 432 drives the horizontal moving plate to move through the screw pair composed of the horizontal screw shaft and the horizontal screw nut driven by the horizontal motor 4321, and the horizontal driving module 432 further comprises bearings and other components necessary for the work of the screw pair in the prior art; the vertical driving module 433 drives the vertical moving plate to move through the screw pair composed of the vertical screw shaft and the vertical screw nut driven by the vertical motor 4331, and the vertical driving module 433 further comprises bearings and other components necessary for the work of the screw pair in the prior art.

[0067] Further, please refer to Figure 6 As another specific embodiment of the film laminating machine provided by the present application, the surface of the film pulling pressing block 27 close to one side of the film pulling guide roller 25 is provided with a film pulling groove 271 corresponding to the film pulling guide roller 25; the film pulling guide roller 25 is provided with a film pulling flexible piece 251 in contact with the film pulling pressing block 27. The film pulling groove 271 significantly increases the contact area between the film pulling pressing block 27 and the dry film 5001, and can effectively avoid the sliding of the dry film 5001 relative to the film pulling pressing block 27 when the film pulling pressing block 27 is pressed tightly with the film pulling guide roller 25; the setting of the film pulling groove 271 further avoids the sliding of the dry film 5001 relative to the film pulling pressing block 27. The film pulling flexible piece 251 has a certain friction, which can avoid the sliding of the dry film 5001 relative to the film pulling guide roller 25. The film pulling flexible piece 251 can be a flexible piece with good friction such as a silicone rubber piece.

[0068] Further, referring to Figure 5 , as another specific embodiment of the film laminating machine provided by the present application, the film laminating lifting driving mechanism 35 comprises a film laminating base 351 and a lifting cylinder 352 arranged on the film laminating base 351; the second film laminating table 34 is connected with the movable end of the lifting cylinder 352; the lifting cylinder 352 arranged on the film laminating base 351 drives the lifting movement of the second film laminating table 34 to realize the contact between the sealing ring 37 on the first film laminating table 32 and the second film laminating table 34. The film laminating lifting driving mechanism 35 further comprises a film laminating guide rail 353 in sliding connection with the film laminating base 351 and a film laminating sliding cylinder 354 for driving the film laminating base 351 to slide along the film laminating guide rail 353; the film laminating sliding cylinder 354 can drive the film laminating base 351 to slide along the film laminating guide rail 353, so that the wafer 600 can leave the position directly below the first film laminating table 32 after the film laminating on the second film laminating table 34 is completed, and the wafer 600 can be taken out by manual or mechanical hand. The film laminating base 351 is provided with a film laminating guide hole, and the film laminating lifting driving mechanism 35 further comprises a film laminating guide rod 355 arranged in the film laminating guide hole; the film laminating guide rod 355 is connected with the second film laminating table 34 and is in sliding connection with the film laminating base 351 in the film laminating guide hole. When the lifting cylinder 352 drives the second film laminating table 34 to move in the vertical direction, the film laminating guide rod 355 connected with the second film laminating table 34 slides with the film laminating base 351 in the film laminating guide hole, so as to avoid the lateral deviation of the second film laminating table 34.

[0069] Further, referring to Figure 8 , as another specific embodiment of the film laminating machine provided by the present application, the first film laminating table 32 is provided with a first heating assembly 38, which comprises a first heating member 381, a first heat conduction member 382 connected with the side of the first heating member 381 close to the second film laminating table 34, and a first heat insulation member 383 connected with the side of the first heating member 381 away from the first heat conduction member 382. The first heating member 381 generates heat, and the heat is conducted to the film pressing air bag (or the film pressing plate 332 in other embodiments) through the first heat conduction member 382 and heats the dry film 5001, so as to relieve the hardening of the glue on the dry film 5001. The first heat insulation member 383 is arranged on the side of the first heating member 381 away from the first heat conduction member 382, so as to avoid the heat generated by the first heating member 381 from being transferred to other positions, thereby improving the utilization rate of the heat.

[0070] Further, referring to Figure 8As another specific embodiment of the film laminating machine provided by the present application, the second film laminating table 34 is provided with a second heating assembly 39, which comprises a second heating member 391, a second heat conduction member 392 connected to the side of the second heating member 391 close to the first film laminating table 32, and a second heat insulation member 393 connected to the side of the second heating member 391 away from the second heat conduction member 392. The second heating assembly 39 can cooperate with the first heating assembly 38 to heat the dry film 5001, further relieving the hardening of the glue on the dry film 5001. The second heating member 391 generates heat, and the heat is conducted to the second film laminating table 34 through the second heat conduction member 392, so that the wafer 600 and the dry film 5001 placed on the second film laminating table 34 are heated. The second heat insulation member 393 is arranged on the side of the second heating member 391 away from the first film laminating table 32, avoiding the heat from being transmitted in the direction away from the first film laminating table 32, and improving the utilization rate of the heat.

[0071] Further, as another specific embodiment of the film laminating machine provided by the present application, the locking assembly 36 comprises a second locking block arranged on the second film laminating table 34, a second locking rod slidingly connected with the first film laminating table 32, and a second locking driving member arranged on the first film laminating table 32 and used to drive the second locking rod to move; the second locking block is provided with a second locking hole matched with the second locking rod; the locking assembly 36 further comprises a second guide block arranged on the first film laminating table 32, and the second guide block is provided with a second guide hole for the second locking rod to pass through; the locking assembly 36 further comprises a second fixing block arranged on the first film laminating table 32, and the second fixing block is provided with a second fixing hole corresponding to the second locking rod, and the second fixing block is arranged opposite to and spaced apart from the second guide block. The process of locking the first film laminating table 32 and the second film laminating table 34 by the locking assembly 36 is as follows: the second locking driving member (which can be a driving member such as a pneumatic cylinder) drives the second locking rod to move and extend into the second locking hole of the second locking block on the second film laminating table 34, at this time the second locking rod limits the second locking block, so that the second film laminating table 34 cannot move relative to the first film laminating table 32. The second locking rod is slidingly connected with the first film laminating table 32 in the second guide hole. After the second locking rod extends into the second locking hole of the second locking block on the second film laminating table 34, the second locking rod continues to move into the second fixing hole on the second fixing block, at this time the second locking block is located between the second fixing block and the second guide block, and the two ends of the second locking rod are located in the second fixing block and the second guide block respectively, improving the locking effect of the second locking block and ensuring the locking effect between the first film laminating table 32 and the second film laminating table 34.

[0072] Further, please refer to Figure 5As another specific embodiment of the film laminating machine provided by the application, the film laminating support 31 comprises two film laminating vertical plates 311 oppositely and spacedly arranged, and the film laminating vertical plate 311 is provided with a film laminating clearance hole 3111. The first film laminating table 32 is fixedly installed between the two film laminating vertical plates 311, and the second film laminating table 34 is located directly below the first film laminating table 32. The film laminating clearance hole 3111 is used for the strip-shaped dry film 5001 to enter between the first film laminating table 32 and the second film laminating table 34, and can continuously provide the dry film 5001 for the wafer 600.

[0073] It should be noted that the scheme in another specific embodiment can be an improved implementation based on other embodiments.

[0074] Obviously, the above embodiments of the application are only examples for clearly illustrating the application, and are not intended to limit the implementation of the application. Based on the above description, other different forms of changes or variations can be made by those skilled in the art. Here, all the implementations are not required to be exhausted. Any modification, equivalent replacement and improvement made within the spirit and principle of the application shall be included in the protection scope of the claims of the application.

Claims

1. A film sticking machine applied to film sticking treatment of a wafer, characterized in that, The film pasting device, the film cutting device, the film conveying mechanism, and the film pulling mechanism; the film pulling mechanism comprises a film pulling fixing base, a film pulling sliding base in sliding connection with the film pulling fixing base, a film pulling driving assembly for driving the film pulling sliding base to move, a film pulling mounting rack connected with the film pulling sliding base, a film pulling guide roller arranged on the film pulling mounting rack, a film pulling lifting driving element arranged on the film pulling sliding base, and a film pulling pressing block arranged on the output end of the film pulling lifting driving element and matched with the film pulling guide roller; wherein the surface of the side of the film pulling pressing block close to the film pulling guide roller is provided with a film pulling groove corresponding to the film pulling guide roller; the film pulling guide roller is provided with a film pulling flexible element in contact with the film pulling pressing block, and the film pulling flexible element is a silicone rubber element; The film pasting device comprises a film pasting support, a first film pasting table fixedly arranged on the film pasting support, a film pressing mechanism arranged on the first film pasting table, a second film pasting table oppositely arranged with the first film pasting table, a film pasting lifting driving mechanism for driving the second film pasting table to move, and a locking assembly arranged between the first film pasting table and the second film pasting table and used for locking the first film pasting table and the second film pasting table; The film pasting device further comprises a sealing ring arranged on the second film pasting table and used for contacting the first film pasting table, and a vacuum pumping assembly for pumping vacuum between the first film pasting table and the second film pasting table; the vacuum pumping assembly comprises a vacuum pump and a vacuum pipe connected with the vacuum pump; the first film pasting table and / or the second film pasting table is / are provided with a vacuum hole communicated with the vacuum pipe; The film cutting device comprises a cutting table, a cutting assembly, and a moving driving assembly for driving the cutting assembly to move; the middle part of the cutting table is provided with a vacuum chuck, and the cutting table is provided with at least one circular cutting accommodation groove; the cutting assembly comprises a cutting fixing table connected with the output end of the moving driving assembly, a cutting knife assembly, and a cutting driving assembly arranged on the cutting fixing table and used for driving the cutting knife assembly to complete the cutting action; The cutting assembly further comprises a mounting plate arranged between the cutting driving assembly and the cutting knife assembly, and the cutting knife assembly is rotationally connected with the mounting plate; the cutting assembly further comprises a film breaking driving assembly for driving the cutting knife assembly to rotate relative to the mounting plate; in the initial state, the cutting knife assembly is inclined to the direction away from the product to be cut, and the cutting knife assembly is located above the dry film and has a small gap; the film breaking driving assembly drives the cutting knife assembly to rotate to the direction close to the product to be cut, and the cutting knife assembly has two sub-movements in the horizontal and vertical directions during the rotation process; the vertical sub-movement makes the cutting knife assembly cut the dry film and makes the end of the cutting knife assembly lower than the product to be cut, and the horizontal sub-movement makes the cutting knife assembly move to the direction close to the product to be cut until the boundary of the wafer is in abutment.

2. The film laminating machine according to claim 1, wherein The film pressing mechanism comprises a film pressing air bag connected to the first film pasting table and located between the first film pasting table and the second film pasting table, and a film pressing air pump for supplying air to the film pressing air bag. Alternatively, the film pressing mechanism comprises a film pressing air cylinder arranged on the first film pasting table, a film pressing plate connected to a movable end of the film pressing air cylinder and located between the first film pasting table and the second film pasting table.

3. The film laminating machine according to claim 1, wherein The locking assembly comprises a first locking block arranged on the first film pasting table, a first locking rod in sliding connection with the second film pasting table, and a first locking driving member arranged on the second film pasting table and used for driving the first locking rod to move; the first locking block is provided with a first locking hole matched with the first locking rod; the locking assembly further comprises a first guide block arranged on the second film pasting table, the first guide block is provided with a first guide hole for the first locking rod to pass through; the locking assembly further comprises a first fixed block arranged on the second film pasting table, the first fixed block is provided with a first fixed hole corresponding to the first locking rod, and the first fixed block is arranged opposite to and spaced from the first guide block.

4. The film laminating machine according to any one of claims 1 to 3, characterized in that, The film feeding mechanism comprises a raw film supply assembly, a film dividing roller matched with the raw film supply assembly, a bottom film winding assembly, and a waste film winding assembly.

5. The film laminating machine according to claim 4, wherein The raw film supply assembly comprises a film feeding support, a first air expansion shaft in rotary connection with the film feeding support, a first rotary driving member for driving the first air expansion shaft to rotate, and a plurality of first tensioning rollers arranged on the film feeding support; the waste film winding assembly comprises a second air expansion shaft in rotary connection with the film feeding support, a second rotary driving member for driving the second air expansion shaft to rotate, and a second tensioning roller arranged on the film feeding fixed seat; the bottom film winding assembly comprises a third air expansion shaft in rotary connection with the film feeding support, a third rotary driving member for driving the third air expansion shaft to rotate, and a plurality of third tensioning rollers arranged on the film feeding support.

6. The film laminating machine according to any one of claims 1 to 3, wherein The number of the film pulling lifting driving members is greater than or equal to two, the film pulling lifting driving members are in sliding connection with the film pulling sliding seat, and the film pulling sliding seat is provided with a flattening driving assembly for respectively driving each film pulling lifting driving member to slide.

7. The film laminating machine according to claim 1, wherein The cutter assembly comprises a cutter seat in rotary connection with the mounting plate, and a cutter fixedly installed on the cutter seat; the film breaking driving assembly comprises a rotary block in rotary connection with the cutter seat, and a driving air cylinder with a movable end connected to the rotary block; a fixed end of the driving air cylinder is in rotary connection with the mounting plate.

Images