Film placing device

Abstract

The application discloses a film placing device, which comprises a film feeding sliding seat, a film separating assembly and a film separating lifting driving assembly. The film separating lifting driving assembly comprises a film separating connecting rod, a film separating fixing plate, a film separating lifting rod, a film separating lifting plate and a film separating lifting driving element arranged on the film separating fixing plate. The film separating assembly is connected with one end of the film separating lifting rod away from the film separating lifting plate, and the film separating lifting plate is connected with an output end of the film separating lifting driving element. The film separating lifting driving element drives the film separating lifting plate to move upward along the axis direction of the film separating lifting rod. The film separating assembly connected with the other end of the film separating lifting rod moves synchronously with the film separating lifting plate, and then drives the whole film separating assembly to move upward, and then the film separating assembly is lifted to a certain height, so that the dry film separated by the film separating assembly moves at a certain distance higher than the surface of the wafer, and the dry film is prevented from touching the wafer when moving, and the wafer is prevented from deviating from the film pasting position.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of film pasting equipment, in particular to a film placing device. BACKGROUND

[0002] Wafer refers to a silicon wafer used for making silicon semiconductor integrated circuits. Since the shape is circular, it is called wafer. Various circuit element structures can be processed and made on the silicon wafer to become integrated circuit products with specific electrical properties.

[0003] In the production process of existing products such as wafers, the finished product needs to be pasted with film. The dry film wound on the roll is pasted on the surface of the wafer. The dry film unwound through the upper surface of the wafer. During the movement of the dry film, the wafer is easily touched and deviated from the film pasting position. SUMMARY

[0004] The purpose of the present application is to provide a film placing device, which aims to solve the problem that in the prior art, the dry film is easily touched during movement and deviates from the film pasting position.

[0005] To achieve this purpose, the present application adopts the following technical solutions:

[0006] The film placing device comprises a film feeding sliding seat, a film separating assembly for separating the dry film from the bottom film, and a film separating lifting driving assembly provided on the film feeding sliding seat and used for driving the film separating assembly to move in the vertical direction. The film separating lifting driving assembly comprises a film separating connecting rod connected with the film feeding sliding seat, a film separating fixed plate connected with the film separating connecting rod, a film separating lifting rod penetrating through the film feeding sliding seat and being in sliding connection with the film feeding sliding seat, a film separating lifting plate connected with the film separating lifting rod, and a film separating lifting driving piece provided on the film separating fixed plate. The film separating assembly is connected with one end of the film separating lifting rod away from the film separating lifting plate, and the film separating lifting plate is connected with the output end of the film separating lifting driving piece.

[0007] Further, the film feeding sliding seat is provided with a first film feeding accommodation hole, and the film separating lifting rod penetrates through the first film feeding accommodation hole and is connected with the film separating assembly.

[0008] Further, the film separating lifting plate is provided with a second film feeding accommodation hole, and the film separating connecting rod penetrates through the second film feeding accommodation hole.

[0009] Further, the film separating assembly comprises a film separating frame, a film feeding tensioning roller rotatably connected with the film separating frame, and a film separating roller rotatably connected with the film separating frame.

[0010] Further, the film feeding sliding seat is provided with a film separating installation vertical rod, and the film separating installation vertical rod is provided with a film separating position sensor.

[0011] Further, the film separating lifting driving part is a film separating lifting driving cylinder arranged on the film separating fixing plate.

[0012] Further, the film feeding sliding rail in sliding connection with the film feeding sliding seat and the film feeding sliding driving assembly for driving the film feeding sliding seat to slide are further included.

[0013] Further, the film feeding sliding seat is provided with a raw material film supply assembly for supplying raw material film and a bottom film winding assembly arranged on the film feeding sliding seat and used for winding the bottom film; and the film feeding device further includes a waste film winding assembly matched with the raw material film supply assembly.

[0014] Further, the film feeding auxiliary mechanism matched with the raw material film supply assembly is further included; the film feeding auxiliary mechanism includes an auxiliary mounting seat, an auxiliary connecting rod connected with the auxiliary mounting seat, an auxiliary fixing plate connected with the auxiliary connecting rod, an auxiliary lifting rod penetrating through the auxiliary mounting seat and in sliding connection with the auxiliary mounting seat, an auxiliary lifting seat connected with one end of the auxiliary lifting rod, an auxiliary lifting plate connected with the other end of the auxiliary lifting rod, a first auxiliary guide roller arranged on the auxiliary lifting seat, and an auxiliary lifting driving part arranged on the auxiliary fixing plate and used for driving the auxiliary lifting plate to move along the axial direction of the auxiliary lifting rod.

[0015] Further, the auxiliary lifting seat is provided with two relatively arranged flattening assemblies, and each of the flattening assemblies includes a flattening guide rail arranged on the auxiliary lifting seat, a flattening sliding block in sliding connection with the flattening guide rail, a flattening driving part for driving the flattening sliding block to slide, a flattening cylinder arranged on the flattening sliding block, and a flattening pressing plate connected with the movable end of the flattening cylinder and matched with the first auxiliary guide roller.

[0016] Further, the surface of the flattening pressing plate in contact with the first auxiliary guide roller is provided with a flattening groove, and the first auxiliary guide roller is provided with a flattening flexible part in contact with the flattening pressing plate.

[0017] Further, the auxiliary lifting driving part is a cylinder.

[0018] Further, the film feeding sliding driving assembly includes a film feeding sliding motor, a film feeding sliding lead screw shaft in transmission connection with the film feeding sliding motor, and a film feeding sliding lead screw nut matched with the film feeding sliding lead screw shaft; and the film feeding sliding seat is connected with the film feeding sliding lead screw nut.

[0019] Further, a film feeding linear bearing is arranged in the first film feeding accommodation hole, and the film feeding linear bearing is arranged on the outer wall of the film separating lifting rod.

[0020] Further, an adjusting assembly is arranged on the film separating frame, and the adjusting assembly comprises an adjusting frame connected with the film separating frame, an adjusting guide rod arranged on the adjusting frame, an adjusting sliding block in sliding connection with the adjusting guide rod, an adjusting guide roller arranged on the adjusting sliding block, an adjusting elastic member arranged between the adjusting sliding block and the adjusting guide rod, and an adjusting screw in threaded connection with the adjusting frame and used for abutting against the adjusting sliding block.

[0021] Further, the raw film supply assembly comprises a first air expansion shaft and a raw film supply driving member used for driving the first air expansion shaft to rotate, the bottom film winding assembly comprises a second air expansion shaft and a bottom film winding driving member used for driving the second air expansion shaft to rotate, and the waste film winding assembly comprises a third air expansion shaft and a waste film winding driving member used for driving the third air expansion shaft to rotate.

[0022] The beneficial effects of the present application are as follows: the film separating lifting driving assembly drives the film separating lifting plate to move upward along the axis direction of the film separating lifting rod, the film separating assembly connected with the other end of the film separating lifting rod moves upward synchronously with the film separating lifting plate, and then drives the whole film separating assembly to move upward, and then the film separating assembly is lifted to a certain height, so that the dry film separated by the film separating assembly moves at a certain distance higher than the surface of the wafer, and the situation that the dry film touches the wafer and then the wafer deviates from the film pasting position when the dry film moves is avoided. BRIEF DESCRIPTION OF DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without any creative labor.

[0024] Figure 1 It is a sectional view of the film placing device in the embodiment of the present application.

[0025] Figure 2 It is a sectional view of the film placing device in the embodiment of the present application. Figure 1 It is a partial enlarged view of A in the embodiment of the present application.

[0026] Figure 3 It is a structural schematic view of the film separating assembly in the embodiment of the present application.

[0027] Figure 4 It is a structural schematic view of the film feeding auxiliary mechanism in the embodiment of the present application.

[0028] In the drawings:

[0029] 100, film processing cavity; 200, first film pressing station; 300, second film pressing station; 400, raw film; 4001, dry film; 40011, waste film; 4002, bottom film;

[0030] 1, film feeding sliding seat;

[0031] 2, film separating assembly; 201, film separating frame; 202, film feeding tension roller; 203, film separating roller;

[0032] 3, film separating lifting driving assembly; 301, film separating connecting rod; 302, film separating fixing plate; 303, film separating lifting rod; 304, film separating lifting plate; 305, film separating lifting driving piece;

[0033] 4, film feeding sliding driving assembly; 401, film feeding sliding motor; 402, film feeding sliding screw shaft; 403, film feeding sliding screw nut;

[0034] 5, film feeding auxiliary mechanism; 501, auxiliary mounting seat; 502, auxiliary connecting rod; 503, auxiliary fixing plate; 504, auxiliary lifting rod; 505, auxiliary lifting seat; 506, auxiliary lifting plate; 507, first auxiliary guide roller; 5071, flattening flexible piece; 508, auxiliary lifting driving piece; 509, second auxiliary guide roller;

[0035] 6, flattening assembly; 601, flattening guide rail; 602, flattening sliding block; 603, flattening pressing plate; 604, flattening air cylinder;

[0036] 7, adjusting assembly; 701, adjusting frame; 702, adjusting guide rod; 703, adjusting sliding block; 704, adjusting guide roller; 705, adjusting elastic piece; 706, adjusting screw;

[0037] 8, raw film supply assembly; 801, first air expansion shaft; 9, bottom film winding assembly; 901, second air expansion shaft; 10, film separating mounting vertical rod; 11, film separating position sensor; 12, film feeding sliding rail; 13, waste film winding assembly; 1301, third air expansion shaft. DETAILED DESCRIPTION

[0038] In order to make the objectives, technical solutions and advantages of the present application clearer, the present application will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and should not be used to limit the present application.

[0039] It is to be noted that when an element is referred to as being "fixed" or "set" on another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or indirectly connected to the other element.

[0040] It is to be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like, indicate directions or positions based on the orientations or positions shown in the drawings, and are used for convenience only in describing the application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be construed as limiting the application.

[0041] In addition, the terms "first", "second", "third", etc. are used only for descriptive purposes and cannot be construed as indicating or implying relative importance or an implied reference to the number of technical features indicated. Therefore, features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the application, the meaning of "a plurality of" is two or more, unless otherwise specifically limited.

[0042] The implementation of the application is described in detail below in combination with specific embodiments.

[0043] As shown in Figures 1-4 The film placing device according to the embodiment of the application comprises a film feeding sliding seat 1, a film separating assembly 2 for separating a dry film 4001 from a base film 4002, and a film separating lifting driving assembly 3 arranged on the film feeding sliding seat 1 and used for driving the film separating assembly 2 to move in a vertical direction; the film separating lifting driving assembly 3 comprises a film separating connecting rod 301 connected with the film feeding sliding seat 1, a film separating fixing plate 302 connected with the film separating connecting rod 301, a film separating lifting rod 303 penetrating through the film feeding sliding seat 1 and in sliding connection with the film feeding sliding seat 1, a film separating lifting plate 304 connected with the film separating lifting rod 303, and a film separating lifting driving member 305 arranged on the film separating fixing plate 302; the film separating assembly 2 is connected with one end of the film separating lifting plate 304 away from the film separating lifting rod 303, and the film separating lifting plate 304 is connected with an output end of the film separating lifting driving member 305.

[0044] The film separating assembly 2 is used for separating the dry film 4001 from the base film 4002 on the raw material film 400, and the dry film 4001 is attached to a wafer to complete film attachment.

[0045] In the embodiment of the present application, the working process of the film releasing device is as follows: the film separating lifting driving member 305 drives the film separating lifting plate 304 to move upward along the axis direction of the film separating lifting rod 303, the film separating assembly 2 connected to the other end of the film separating lifting rod 303 moves synchronously upward with the film separating lifting plate 304, thereby driving the film separating assembly 2 to move upward as a whole, and then the film separating assembly 2 is lifted to a certain height, so that the dry film 4001 separated by the film separating assembly 2 moves at a certain distance above the surface of the wafer, thereby avoiding the case that the dry film 4001 touches the wafer when moving and causes the wafer to deviate from the film pasting position.

[0046] Further, referring to Figure 3 , as another specific embodiment of the film releasing device provided by the present application, the film feeding sliding seat 1 is provided with a first film feeding accommodation hole, and the film separating lifting rod 303 penetrates through the first film feeding accommodation hole and is connected to the film separating assembly 2. The first film feeding accommodation hole can be used as a guide hole when the film separating lifting rod 303 is lifted, thereby improving the stability of the film separating lifting rod 303 when being lifted.

[0047] Further, referring to Figure 3 , as another specific embodiment of the film releasing device provided by the present application, the film separating lifting plate 304 is provided with a second film feeding accommodation hole, and the film separating connecting rod 301 penetrates through the second film feeding accommodation hole. The film separating connecting rod 301 penetrates through the second film feeding accommodation hole, so that the film separating connecting rod 301 can be used as a guide rod when the film separating lifting plate 304 is lifted, thereby improving the stability of the film separating lifting plate 304 when being lifted and simplifying the structure of the film releasing device as a whole.

[0048] Further, referring to Figure 3 , as another specific embodiment of the film releasing device provided by the present application, the film separating assembly 2 comprises a film separating frame 201, a film feeding tension roller 202 rotationally connected to the film separating frame 201, and a film separating roller 203 rotationally connected to the film separating frame 201. The raw film 400 is separated at the film separating roller 203, and the bottom film 4002 moves reversely after passing through the film separating roller 203 to form separation from the dry film 4001.

[0049] Further, referring to Figure 3 , as another specific embodiment of the film releasing device provided by the present application, the film feeding sliding seat 1 is provided with a film separating mounting vertical rod 10, the film separating mounting vertical rod 10 is provided with a film separating position sensor 11, the film separating frame 201 is provided with a film separating trigger piece for triggering the film separating position sensor 11, thereby monitoring the height of the film separating frame 201, i.e. the film separating assembly 2 in real time.

[0050] Further, referring to Figure 3As another specific embodiment of the film releasing device provided by the present application, the film separating lifting driving member 3053 is a film separating lifting driving cylinder arranged on the film separating fixing plate 302.

[0051] Further, referring to Figure 3 As another specific embodiment of the film releasing device provided by the present application, the film releasing device further comprises a film feeding sliding rail 12 slidingly connected with the film feeding sliding seat 1, and a film feeding sliding driving assembly 4 for driving the film feeding sliding seat 1 to slide. The film feeding sliding driving assembly 4 drives the film feeding sliding seat 1 to move along the film feeding sliding rail 12 so that the film separating assembly 2 enters the film pasting processing cavity 100 (the gap between the first film pressing table 200 and the second film pressing table 300), the waste film winding assembly 13 fixes the dry film 4001 away from one end of the raw film supplying assembly 8, the film feeding sliding driving assembly 4 drives the film feeding sliding seat 1 to move along the film feeding sliding rail 12 and makes the film separating assembly 2 gradually leave the film pasting processing cavity 100; while the film feeding sliding seat 1 is moving, the raw film supplying assembly 8 releases the raw film 400, and the bottom film winding assembly 9 works to wind the bottom film 4002 so that the bottom film 4002 is separated from the dry film 4001. Since the waste film winding assembly 13 fixes the dry film 4001 away from one end of the raw film supplying assembly 8, the dry film 4001 will not move relative to the film pasting processing cavity 100, and thus the dry film 4001 completes the separation from the bottom film 4002 in the film pasting processing cavity 100. When the film separating assembly 2 on the film feeding sliding seat 1 completely leaves the film pasting processing cavity 100, the dry film 4001 in the film pasting processing cavity 100 has completed the separation from the bottom film 4002. At this time, the first film pressing table 200 and the second film pressing table 300 immediately act to adhere the dry film 4001 to the wafer, which reduces the time for the dry film 4001 to move to the film pasting processing cavity 100 after the dry film 4001 is separated from the bottom film 4002, avoids the hardening of the glue on the dry film 4001, and improves the bonding effect of the dry film 4001 to the wafer.

[0052] Further, referring to Figure 1As another specific embodiment of the film releasing device provided by the present application, the film feeding sliding seat 1 is provided with a raw film supply assembly 8 for supplying the raw film 400, and a bottom film winding assembly 9 arranged on the film feeding sliding seat 1 and used for winding the bottom film 4002. The film releasing device further comprises a waste film winding assembly 13 matched with the raw film supply assembly 8. The raw film 400 comprises a dry film 4001 and a bottom film 4002 covering the surface of the dry film 4001, the raw film 400 is wound on the raw film supply assembly 8, the bottom film 4002 separated from the dry film 4001 is wound on the bottom film winding assembly 9, after the dry film 4001 is bonded and attached to the wafer in the film attaching processing cavity 100, the cutting mechanism can cut the dry film 4001 along the boundary of the wafer, the wafer is separated from the dry film 4001, and the cut part of the dry film 4001 forms the waste film 40011 which is wound by the waste film winding assembly 13. The raw film 400 is separated at the film separating roller 203, and the bottom film 4002 moves reversely to form the separation from the dry film 4001 after passing through the film separating roller 203.

[0053] Further, referring to Figure 1 As another specific embodiment of the film releasing device provided by the present application, the film feeding sliding seat 1 is provided with a raw film supply assembly 8 for supplying the raw film 400, and a bottom film winding assembly 9 arranged on the film feeding sliding seat 1 and used for winding the bottom film 4002. The film releasing device further comprises a waste film winding assembly 13 matched with the raw film supply assembly 8. The raw film 400 comprises a dry film 4001 and a bottom film 4002 covering the surface of the dry film 4001, the raw film 400 is wound on the raw film supply assembly 8, the bottom film 4002 separated from the dry film 4001 is wound on the bottom film winding assembly 9, after the dry film 4001 is bonded and attached to the wafer in the film attaching processing cavity 100, the cutting mechanism can cut the dry film 4001 along the boundary of the wafer, the wafer is separated from the dry film 4001, and the cut part of the dry film 4001 forms the waste film 40011 which is wound by the waste film winding assembly 13. The raw film 400 is separated at the film separating roller 203, and the bottom film 4002 moves reversely to form the separation from the dry film 4001 after passing through the film separating roller 203.

[0054] Further, referring to Figure 4As another specific embodiment of the film placing device provided by the present application, two pull flattening assemblies 6 are arranged opposite to each other on the auxiliary lifting seat 505. The pull flattening assembly 6 comprises a pull flattening guide rail 601 arranged on the auxiliary lifting seat 505, a pull flattening sliding block 602 in sliding connection with the pull flattening guide rail 601, a pull flattening driving member for driving the pull flattening sliding block 602 to slide, a pull flattening cylinder 604 arranged on the pull flattening sliding block 602, and a pull flattening pressing plate 603 connected with the movable end of the pull flattening cylinder 604 and matched with the first auxiliary guide roller 507. The dry film 4001 (or the waste film 40011) is prone to be wrinkled during movement. The pull flattening assembly 6 is used to flatten the wrinkled dry film 4001. The specific process is as follows: the pull flattening cylinder 604 drives the pull flattening pressing plate 603 to move and press the dry film 4001, so that the dry film 4001 is located between the pull flattening pressing plate 603 and the first auxiliary guide roller 507. The pull flattening driving members on the two pull flattening assemblies 6 drive the two pull flattening cylinders 604 to move in opposite directions, respectively. The opposite sides of the dry film 4001 are subjected to pulling force, so that the wrinkled dry film 4001 is flattened.

[0055] Further, refer to Figure 4 As another specific embodiment of the film placing device provided by the present application, the surface of the pull flattening pressing plate 603 in contact with the first auxiliary guide roller 507 has a pull flattening groove, and the first auxiliary guide roller 507 is provided with a pull flattening flexible member 5071 in contact with the pull flattening pressing plate 603. The pull flattening flexible member 5071 has a certain friction force. When the pull flattening pressing plate 603 flattens the dry film 4001, the dry film 4001 will not slide along the first auxiliary guide roller 507, but only be flattened by the pull flattening pressing plate 603.

[0056] Further, refer to Figure 4 As another specific embodiment of the film placing device provided by the present application, the auxiliary lifting driving member 508 is a cylinder.

[0057] Further, refer to Figure 1 and Figure 3 As another specific embodiment of the film placing device provided by the present application, the film feeding sliding driving assembly 4 comprises a film feeding sliding motor 401, a film feeding sliding lead screw shaft 402 in transmission connection with the film feeding sliding motor 401, and a film feeding sliding lead screw nut 403 matched with the film feeding sliding lead screw shaft 402; and the film feeding sliding seat 1 is connected with the film feeding sliding lead screw nut 403. The film feeding sliding motor 401 drives the film feeding sliding seat 1 to slide through the lead screw pair composed of the film feeding sliding lead screw shaft 402 and the film feeding sliding lead screw nut 403.

[0058] Further, refer to Figure 3As another specific embodiment of the film placing device provided by the application, a film feeding linear bearing is arranged in the first film feeding accommodation hole, the film feeding linear bearing is arranged on the outer wall of the film separating lifting rod 303, and the film separating lifting rod 303 is slidingly connected with the film feeding sliding seat 1 through the film feeding linear bearing, so that the friction when the film separating lifting rod 303 slides relative to the film feeding sliding seat 1 is reduced.

[0059] Further, refer to Figures 1-2 As another specific embodiment of the film placing device provided by the application, the film separating frame body 201 is provided with an adjusting assembly 7; the adjusting assembly 7 comprises an adjusting frame body 701 connected with the film separating frame body 201, an adjusting guide rod 702 arranged on the adjusting frame body 701, an adjusting sliding block 703 slidingly connected with the adjusting guide rod 702, an adjusting guide roller 704 arranged on the adjusting sliding block 703, an adjusting elastic member 705 arranged between the adjusting sliding block 703 and the adjusting guide rod 702, and an adjusting screw 706 threadedly connected with the adjusting frame body 701 and used for abutting against the adjusting sliding block 703. The adjusting assembly 7 is used for adjusting the tension of the raw material film 400 during movement, so as to select different tensions according to different film pasting states. The specific adjusting process is as follows: the raw material film 400 passes through the adjusting guide roller 704 and contacts the upper surface of the adjusting guide roller 704, the adjusting screw 706 is rotated to move the adjusting screw 706 relative to the adjusting frame body 701, because the adjusting screw 706 abuts against the adjusting sliding block 703, the adjusting screw 706 drives the adjusting sliding block 703 to move when the adjusting screw 706 moves relative to the adjusting frame body 701, and then the adjusting guide roller 704 arranged on the adjusting sliding block 703 is driven to move up and down, so as to change the tension of the raw material film 400.

[0060] Further, refer to Figure 1As another specific embodiment of the film placing device provided by the application, the raw film supply assembly 8 comprises a first air shaft 801 and a raw film 400 supply driving member (which can be a motor) for driving the first air shaft 801 to rotate; the raw film 400 is wound on the first air shaft 801, and the rotation of the first air shaft 801 driven by the raw film 400 supply driving member realizes the release of the raw film 400 by the first air shaft 801, thereby supplying the raw film 400. The bottom film winding assembly 9 comprises a second air shaft 901 and a bottom film 4002 winding driving member (which can be a motor) for driving the second air shaft 901 to rotate; the bottom film 4002 is wound on the second air shaft 901, and the rotation of the second air shaft 901 driven by the bottom film 4002 winding driving member realizes the winding of the bottom film 4002 by the second air shaft 901. The waste film winding assembly 13 comprises a third air shaft 1301 and a waste film 40011 winding driving member (which can be a motor) for driving the third air shaft 1301 to rotate; the dry film 4001 is cut along the boundary of the wafer by the cutting mechanism after being bonded with the wafer, and part of the cut dry film 4001 forms the waste film 40011, which is wound on the third air shaft 1301, and the rotation of the third air shaft 1301 driven by the waste film 40011 winding driving member realizes the winding of the waste film 40011.

[0061] It should be noted that the scheme in another specific embodiment can be an improved implementation based on other embodiments.

[0062] Obviously, the above embodiments of the application are only examples for clearly illustrating the application, and are not intended to limit the implementation of the application. Based on the above description, those skilled in the art can make other different forms of changes or modifications. Here, it is not necessary and impossible to enumerate all the implementations. Any modification, equivalent replacement and improvement made within the spirit and principle of the application shall be included in the protection scope of the claims of the application.

Claims

1. A film-dispensing device, characterized in that, The film feeding sliding seat, the film separating assembly for separating the dry film from the bottom film, and the film separating lifting driving assembly arranged on the film feeding sliding seat and used for driving the film separating assembly to move along the vertical direction; the film separating lifting driving assembly comprises a film separating connecting rod connected with the film feeding sliding seat, a film separating fixing plate connected with the film separating connecting rod, a film separating lifting rod penetrating through the film feeding sliding seat and being in sliding connection with the film feeding sliding seat, a film separating lifting plate connected with the film separating lifting rod, and a film separating lifting driving element arranged on the film separating fixing plate. The film separating assembly is connected with the one end of the film separating lifting rod away from the film separating lifting plate, and the film separating lifting plate is connected with the output end of the film separating lifting driving element; the film separating lifting driving element drives the film separating lifting plate to move upward along the axis direction of the film separating lifting rod, and the film separating assembly connected with the other end of the film separating lifting rod moves synchronously upward with the film separating lifting plate, thereby driving the whole film separating assembly to move upward, so that the dry film separated by the film separating assembly moves at a certain distance higher than the surface of the wafer; the film feeding sliding seat is provided with a first film feeding accommodation hole, the film separating lifting rod penetrates through the first film feeding accommodation hole and is connected with the film separating assembly; the film separating assembly comprises a film separating frame, a film feeding tension roller in rotational connection with the film separating frame, and a film separating roller in rotational connection with the film separating frame.

2. The film placing device according to claim 1, wherein The film separating lifting plate is provided with a second film feeding accommodation hole, and the film separating connecting rod penetrates through the second film feeding accommodation hole.

3. The film placing device according to claim 1, wherein The film feeding sliding seat is provided with a film separating mounting vertical rod, the film separating mounting vertical rod is provided with a film separating position sensor, and the film separating frame is provided with a film separating triggering piece used for triggering the film separating position sensor.

4. The film placing apparatus according to claim 1, wherein The film separating lifting driving element is a film separating lifting driving cylinder arranged on the film separating fixing plate.

5. The film placing apparatus according to claim 1, wherein The film feeding sliding seat is in sliding connection with a film feeding sliding rail, and the film feeding sliding seat is driven to slide by a film feeding sliding driving assembly.

6. The film depositing apparatus according to any one of claims 1 to 5, characterized in that, The film feeding sliding seat is provided with a raw film supplying assembly used for supplying the raw film and a bottom film winding assembly arranged on the film feeding sliding seat and used for winding the bottom film; the film feeding device further comprises a waste film winding assembly matched with the raw film supplying assembly.

7. The film unrolling apparatus according to claim 6, wherein The film feeding device further comprises a film feeding auxiliary mechanism matched with the raw film supplying assembly; the film feeding auxiliary mechanism comprises an auxiliary mounting seat, an auxiliary connecting rod connected with the auxiliary mounting seat, an auxiliary fixing plate connected with the auxiliary connecting rod, an auxiliary lifting rod penetrating through the auxiliary mounting seat and being in sliding connection with the auxiliary mounting seat, an auxiliary lifting seat connected with one end of the auxiliary lifting rod, an auxiliary lifting plate connected with the other end of the auxiliary lifting rod, a first auxiliary guide roller arranged on the auxiliary lifting seat, and an auxiliary lifting driving element arranged on the auxiliary fixing plate and used for driving the auxiliary lifting plate to move along the axis direction of the auxiliary lifting rod.

8. The film placing apparatus according to claim 7, wherein The auxiliary lifting seat is provided with two pull flattening assemblies arranged oppositely, the pull flattening assembly comprises a pull flattening guide rail arranged on the auxiliary lifting seat, a pull flattening sliding block in sliding connection with the pull flattening guide rail, a pull flattening driving member for driving the pull flattening sliding block to slide, a pull flattening cylinder arranged on the pull flattening sliding block, and a pull flattening pressing plate connected with a movable end of the pull flattening cylinder and matched with the first auxiliary guide roller.

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