Lens module and substrate cutting device including the same

Abstract

A lens module and a substrate cutting device including the lens module are disclosed. The lens module includes a housing member, a first lens portion including a first lens and a second lens, and a second lens portion including a third lens and a fourth lens. The housing member includes: a main body portion defining a first internal space and a second internal space; a first receiving portion located on the top surface of the main body portion and including a first lens receiving portion in which the first lens is disposed and a second lens receiving portion in which the second lens is disposed; and a second receiving portion located on the bottom surface of the main body portion and including a third lens receiving portion and a fourth lens receiving portion, wherein the third lens receiving portion supports and exposes the third lens to the outside, and the fourth lens receiving portion supports and exposes the fourth lens to the outside. The third lens and the fourth lens are in contact with each other.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims the priority benefit of Korean Patent Application No. 10-2019-0045475 filed on April 18, 2019, in the Korean Intellectual Property Office, the entire contents of which are incorporated herein by reference. Technical Field

[0003] The present inventive concept relates to a substrate cutting apparatus, and more particularly, to a lens module and a substrate cutting apparatus including the same. Background Art

[0004] Generally, display devices include organic light emitting devices (OLEDs), liquid crystal displays (LCDs), electrophoretic displays (EDs), surface conduction electron emitter displays (SEDs), vacuum fluorescent displays (VFDs), and the like.

[0005] The display device may be used for mobile devices such as smart phones, tablet personal computers, laptop computers, digital cameras, camcorders, and portable digital assistants, or electronic products such as slim televisions, exhibition displays, and advertising boards.

[0006] Recently, research on manufacturing ultra-thin display devices has been conducted. Among display devices, flexible display devices have attracted attention as next-generation displays due to ease of portability and availability for devices of various shapes.

[0007] In addition, the display device performs a cutting process according to a preset diversified design. Summary of the invention

[0008] Some exemplary embodiments of the present inventive concepts provide a lens module capable of cutting a plurality of cutting target areas and a substrate cutting apparatus including the lens module.

[0009] According to some exemplary embodiments of the present inventive concept, a lens module may include: a housing member; a first lens portion including a first lens and a second lens disposed in the housing member; and a second lens portion including a third lens and a fourth lens disposed in the housing member. The second lens portion may be spaced apart from the first lens portion. The housing member may include: a main body portion including a top surface, a bottom surface, and a side surface connecting the top surface and the bottom surface to each other, the main body portion defining a first internal space and a second internal space; a first receiving portion, on the top surface of the main body portion, the first receiving portion including a first lens receiving portion and a second lens receiving portion, the first lens receiving portion overlapping the first internal space and defining a first through hole in which the first lens is disposed, the second lens receiving portion overlapping the second internal space and defining a second through hole in which the second lens is disposed; and a second receiving portion, on the bottom surface of the main body portion, the second receiving portion including a third lens receiving portion and a fourth lens receiving portion, wherein the third lens receiving portion supports a third lens overlapping the first lens and exposing the third lens to the outside, and the fourth lens receiving portion supports a fourth lens overlapping the second lens and exposing the fourth lens to the outside. The third lens and the fourth lens may contact each other.

[0010] In some embodiments, the third lens may include a first region overlapping the third lens receiving portion and a second region not overlapping the third lens receiving portion. The fourth lens may include a third region overlapping the fourth lens receiving portion and a fourth region not overlapping the fourth lens receiving portion.

[0011] In certain embodiments, the second region of the third lens may be in contact with the fourth region of the fourth lens.

[0012] In certain embodiments, in a plan view, an area of ​​each of the third lens and the fourth lens may be greater than an area of ​​each of the first lens and the second lens.

[0013] In some embodiments, an outer surface of each of the third lens and the fourth lens may include a curved side portion having a curved shape and a straight side portion having a linear shape. The straight side portion of the third lens may contact the straight side portion of the fourth lens.

[0014] In some embodiments, a first main body hole and a second main body hole may be defined on the top surface. A third main body hole and a fourth main body hole may be defined on the bottom surface. The third main body hole may overlap with the first main body hole, and the fourth main body hole may overlap with the second main body hole.

[0015] In certain embodiments, in a plan view, an area of ​​each of the third body hole and the fourth body hole may be greater than an area of ​​each of the first body hole and the second body hole.

[0016] In some implementations, the first lens can receive the first light from the first light beam generator. The second lens can receive the second light from the second light beam generator.

[0017] In some embodiments, the third lens can output the first light transmitted from the first lens to a first cutting target area of ​​the substrate facing the third lens. The fourth lens can output the second light transmitted from the second lens to a second cutting target area of ​​the substrate facing the fourth lens.

[0018] In certain embodiments, the third lens may output the first light to the first cutting target area in one direction parallel to the thickness direction of the substrate. The fourth lens may output the second light to the second cutting target area in the one direction.

[0019] In some embodiments, the lens module may further include: a first scanner that receives the first light from the first beam generator and adjusts the path of the first light transmitted to the first lens; and a second scanner that receives the second light from the second beam generator and adjusts the path of the second light transmitted to the second lens.

[0020] In some embodiments, the first lens portion may further include a fifth lens. The second lens portion may further include a sixth lens overlapping the fifth lens. The first receiving portion may further include a fifth lens receiving portion, the fifth lens receiving portion defining a third through hole in which the fifth lens is disposed. The second receiving portion may further include a sixth lens receiving portion, the sixth lens receiving portion supporting the sixth lens and exposing the sixth lens to the outside.

[0021] In some embodiments, the sixth lens may be in contact with each of the third lens and the fourth lens.

[0022] In some embodiments, the sixth lens may include a first side surface overlapping the sixth lens receiving portion and a first sub-side surface and a second sub-side surface that do not overlap the sixth lens receiving portion. The first side surface may have a curved shape. The first sub-side surface adjacent to one end of the first side surface may have a linear shape and contact the third lens. The second sub-side surface adjacent to the other end of the first side surface may have a linear shape and contact the fourth lens.

[0023] According to some exemplary embodiments of the present inventive concept, a substrate cutting device may include: a stage supporting a substrate including a first cutting target area and a second cutting target area adjacent to each other; a first beam generator configured to emit a first light; a second beam generator configured to emit a second light; and a lens module receiving the first light and outputting the first light to the first cutting target area, and receiving the second light and outputting the second light to the second cutting target area. The lens module may include: a housing member; and a lens unit located within the housing member. The lens unit may include: a first lens receiving the first light; a second lens spaced apart from the first lens and receiving the second light; a third lens overlapping the first lens and outputting the first light passing through the first lens to the first cutting target area; and a fourth lens overlapping the second lens and outputting the second light passing through the second lens to propagate toward the second cutting target area. The third lens and the fourth lens may contact each other.

[0024] In certain embodiments, the first light passing through the third lens and the second light passing through the fourth lens may be simultaneously irradiated onto the first cutting target area and the second cutting target area, respectively.

[0025] In some embodiments, the third lens can output the first light to the first cutting target area in one direction. The one direction can be parallel to the thickness direction of the substrate. The fourth lens can output the second light to the second cutting target area in the one direction.

[0026] In certain embodiments, the shell member may include: a main body portion, which includes a top surface, a bottom surface, and a side surface connecting the top surface and the bottom surface to each other; a first receiving portion, which is on the top surface of the main body portion, the first receiving portion includes a first lens receiving portion and a second lens receiving portion, wherein the first lens receiving portion defines a first through hole in which the first lens is disposed, the second lens receiving portion defines a second through hole in which the second lens is disposed, and the first lens receiving portion and the second lens receiving portion are separated from each other in a plan view; and a second receiving portion, which is on the bottom surface of the main body portion, the second receiving portion includes a third lens receiving portion and a fourth lens receiving portion, wherein the third lens receiving portion supports the third lens and exposes the third lens to the outside, and the fourth lens receiving portion supports the fourth lens and exposes the fourth lens to the outside.

[0027] In some embodiments, the third lens may include a first area overlapping with the third lens receiving portion and a second area not overlapping with the third lens receiving portion. The fourth lens may include a third area overlapping with the fourth lens receiving portion and a fourth area not overlapping with the fourth lens receiving portion. The second area and the fourth area may contact each other.

[0028] In some embodiments, the lens unit may be a telecentric lens. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 A perspective view of a substrate cutting apparatus according to some exemplary embodiments of the inventive concept is shown.

[0030] Figure 2 An exploded perspective view showing a substrate cutting apparatus according to some exemplary embodiments of the inventive concept is shown.

[0031] Figure 3 Exploded perspective views representing lens modules according to some exemplary embodiments of the inventive concept are illustrated.

[0032] Figure 4 Shown along Figure 3 A cross-sectional view taken along line II′.

[0033] Figure 5A Exploded perspective views showing a second receiving portion and a second lens portion according to some exemplary embodiments of the present inventive concept are shown.

[0034] Figure 5B Plan views showing second lens parts according to some exemplary embodiments of the inventive concept are shown.

[0035] Figure 6 A perspective view showing a substrate including two cutting target areas according to some exemplary embodiments of the inventive concept is shown.

[0036] Fig. 7A Cross-sectional views representing lens modules according to some exemplary embodiments of the inventive concept are illustrated.

[0037] Figure 7B Cross-sectional views representing lens modules according to some exemplary embodiments of the inventive concept are illustrated.

[0038] Figure 8 Plan views of second lens parts according to some exemplary embodiments of the inventive concept are shown. DETAILED DESCRIPTION

[0039] In this specification, when a specific component (or region, layer, part, etc.) is referred to as being "on", "connected to" or "coupled to" another component(s), the specific component may be directly disposed on, directly connected to or directly coupled to the other component(s), or there may be at least one intervening component between the specific component and the other component(s).

[0040] The same reference numerals denote the same components. In addition, in the drawings, in order to effectively explain the technical contents, the thickness, proportion and size of the components are exaggerated.

[0041] The term "and / or" includes one or more combinations defined by the relevant components.

[0042] It will be understood that although the terms first, second, etc. may be used herein to describe various components, these components should not be limited by these terms. These terms are only used to distinguish one component from another component. For example, a first component may be referred to as a second component, and a second component may be referred to as a first component, without departing from the scope of the present invention. Unless the context clearly indicates otherwise, the singular form is also intended to include the plural form.

[0043] Additionally, terms such as "below," "lower," "above," and "upper" are used herein to describe one component's relationship to other components as illustrated in the drawings. Relative terms are intended to encompass different orientations in addition to the orientation depicted in the drawings.

[0044] Unless otherwise defined, all terms (including technical terms and scientific terms) used in this article have the same meaning as those generally understood by those of ordinary skill in the art. In addition, terms as defined in commonly used dictionaries should be understood to have the same meaning as those defined in the relevant art, or to have the meaning defined in the context of the relevant art, and unless clearly defined in this article, should not be understood as idealized or overly formalized meanings.

[0045] It should be understood that terms such as “comprising,” “including,” and “having” are used to specify the presence of stated features, integers, steps, operations, parts, elements, or a combination thereof, but do not exclude the presence or addition of one or more other features, integers, steps, operations, parts, elements, or a combination thereof.

[0046] Now, some exemplary embodiments of the present inventive concept will be described below with reference to the accompanying drawings.

[0047] Figure 1 A perspective view of a substrate cutting apparatus according to some exemplary embodiments of the inventive concept is shown. Figure 2 An exploded perspective view showing a substrate cutting apparatus according to some exemplary embodiments of the inventive concept is shown.

[0048] Reference Figure 1 The substrate cutting device SCD includes a substrate cutting table SCT, a lens module LM, a laser module LR and a controller CT.

[0049] The substrate cutting table SCT includes a first table WT and a second table ST. Each of the first table WT and the second table ST is parallel to a plane defined by the first direction DR1 and the second direction DR2. A third direction DR3 indicates a direction perpendicular to each of the first table WT and the second table ST. The third direction DR3 indicates a thickness direction of the substrate PS.

[0050] In the present specification, it is understood that when one or more components are observed in a plan view, the component or components can be observed in a direction opposite to the third direction DR3. In addition, the plane area or size may refer to the area or size when observed in a direction opposite to the third direction DR3. The front surface (or top surface) and the rear surface (or bottom surface) of each of the components or units described below can be defined by the third direction DR3 in a plan view. However, the directions indicated by the first direction DR1, the second direction DR2, and the third direction DR3 are relative concepts, and therefore can also represent the respective opposite directions.

[0051] The first table WT may support the substrate PS. In plan view, the substrate PS may completely overlap with and be supported by the first table WT. Figure 1 The substrate PS may be shown, parts of which are not cut by the substrate cutting device SCD.

[0052] In certain embodiments, the substrate PS may include Cutting target area CA, cutting target area CA includes The first cutting target area CA1 and the second cutting target area CA2 are adjacent to each other. For example, the first cutting target area CA1 and the second cutting target area CA2 may have shapes corresponding to shapes of two cameras, respectively.

[0053] The second stand ST may support the first stand WT. In a plan view, the first stand WT may completely overlap with the second stand ST and be supported by the second stand ST.

[0054] In some embodiments, the first and second stages WT and ST may have holes WO overlapping the first and second cutting target areas CA1 and CA2, respectively. In this specification, the term "through hole" refers to a hole penetrating and exposed on top and bottom surfaces of a specific component.

[0055] The substrate PS may include a first portion and a second portion surrounding the first portion. The first portion may correspond to a cutting target area CA that is subsequently cut by the laser module LR. For example, the substrate PS may refer to a display module. The display module may include one or more of a display panel that displays an image and an input sensing unit that senses an external input. For another example, the substrate PS may refer to a single base substrate included in the display module.

[0056] The laser module LR may include a beam generator (not shown) that emits laser light (hereinafter also referred to as light) and a scanner (not shown) installed on the path of the light. The beam generator includes: a solid laser such as a ruby ​​laser, a glass laser, a yttrium aluminum garnet (YAG) laser, and a yttrium lithium fluoride (YLF) laser; a gas laser such as an excimer laser and a helium-neon laser; and a pulse laser.

[0057] The scanner may be positioned in the path of the light generated from the beam generator. The scanner may include at least one mirror (not shown) mounted in the path of the light and changing the angle of the laser. The mirror may include a galvano mirror or a reflective mirror whose angle changes based on an applied voltage.

[0058] The controller CT may control the position of the laser module LR or control the intensity and amplitude of light emitted from the laser module LR. The controller CT may shift the laser module LR to allow the substrate PS to receive light incident along the cutting target area CA of the substrate PS. The laser module LR may shift in the first direction DR1 and the second direction DR2.

[0059] In addition, the controller CT may adjust the light to have an intensity capable of cutting the substrate PS. The controller CT may control the amplitude and intensity of the light generated from the beam generator according to the intensity and / or amplitude of the light preset or input by the user.

[0060] The lens module LM allows the light incident from the laser module LR to pass through the lens module LM and transmits the light to the substrate PS. For example, the lens module LM receives the first light and the second light from the laser module LR. The first light and the second light passing through the lens module LM can remove the first cutting target area CA1 and the second cutting target area CA2 from the substrate PS, respectively. For example, the first light transmitted from the laser module LR passes through the lens module LM and propagates toward the first cutting target area CA1. The second light transmitted from the laser module LR passes through the lens module LM and propagates toward the second cutting target area CA2.

[0061] In some embodiments, the first light and the second light may be irradiated onto the first cutting target area CA1 and the second cutting target area CA2 simultaneously. In the present specification, the phrase "simultaneously or at the same time" may substantially include a specific error range. For example, the sentence "irradiating light onto the first cutting target area CA1 and the second cutting target area CA2 simultaneously" means that while irradiating light onto the first cutting target area CA1, light is also irradiated onto the second cutting target area CA2, or while irradiating light onto the second cutting target area CA2, light is also irradiated onto the first cutting target area CA1.

[0062] Since the first and second cutting target areas CA1 and CA2 of the substrate PS are simultaneously cut as described above, the overall manufacturing time may be reduced more than in a case where the first and second cutting target areas CA1 and CA2 are cut separately from each other.

[0063] The following will refer to Figure 2 The substrate cutting device SCD is described in detail. Figure 2 The substrate cutting device SCD shown in FIG. 1 further includes a receiving member HD and an air intake member VD.

[0064] Reference Figure 2 The first station WT includes a top surface WT-U, a bottom surface WT-B, and a side surface WT-S connecting the top surface WT-U and the bottom surface WT-B to each other. The substrate PS may be disposed on the top surface WT-U of the first station WT.

[0065] In some embodiments, the first table WT defines therein first and second through holes WO1 and WO2 overlapping the first and second cutting target areas CA1 and CA2 of the substrate PS, respectively. Each of the first and second through holes WO1 and WO2 may penetrate the top and bottom surfaces WT-U and WT-B of the first table WT.

[0066] The first through hole WO1 and the second through hole WO2 may have shapes corresponding to the shapes of the first cutting target area CA1 and the second cutting target area CA2, respectively. Figure 2 As shown in FIG. 1 , in a plan view, the first through hole WO1 and the second through hole WO2 may be connected to each other, or may be spaced apart from each other at a certain interval.

[0067] In a plan view, the first station WT further defines therein a plurality of suction holes SH spaced apart from the first through hole WO1 and the second through hole WO2. The plurality of suction holes SH may be exposed on the top surface WT-U of the first station WT. When the substrate PS is disposed on the top surface WT-U of the first station WT, the plurality of suction holes SH may be covered by the substrate PS. The plurality of suction holes SH may suck the substrate PS through the vacuum holes VH of the second station ST. Although not shown, air may be supplied to the vacuum holes VH by an air intake member VD connected to a connection hole SS0 defined on a side surface of the second station ST. Since the substrate PS is sucked through the plurality of suction holes SH, the substrate PS may be fixed to the top surface WT-U of the first station WT.

[0068] The bottom surface WT-B of the first stand WT may be supported by a second stand ST disposed below the first stand WT.

[0069] The second stage ST may include a first hole SO1 overlapping the first through hole WO1 and a second hole SO2 overlapping the second through hole WO2. The first hole SO1 and the second hole SO2 may penetrate the top and bottom surfaces of the second stage ST. The top surface of the second stage ST may face the first stage WT, and the bottom surface of the second stage ST may face the intake member VD.

[0070] The receiving member HD may be disposed on the bottom surface of the second stage ST while covering the first hole SO1 and the second hole SO2. The receiving member HD is defined on its top surface with a first receiving hole HO1a overlapping the first hole SO1 and a second receiving hole HO1b overlapping the second hole SO2. The first through hole WO1 and the first hole SO1 may be formed as a single opening, which is defined as a first cutting hole hereinafter. The second through hole WO2 and the second hole SO2 may be formed as a single opening, which is defined as a second cutting hole hereinafter.

[0071] The receiving member HD may provide an inner space, and the first cutting hole may be spatially connected to the inner space of the receiving member HD through the first receiving hole HO1a. The second cutting hole may be spatially connected to the inner space of the receiving member HD through the second receiving hole HO1b.

[0072] For example, the inner space of the receiving member HD may be filled with the first and second cutting portions corresponding to the first and second cutting target areas CA1 and CA2 , respectively, through the first and second cutting holes.

[0073] In addition, an air intake hole HO2 is defined on the receiving member HD. The air intake member VD can be connected to the receiving member HD while covering the air intake hole HO2. The air intake operation of the air intake member VD can make the first and second cut portions of the substrate PS easily move through the first and second cut holes into the receiving member HD.

[0074] Figure 3 Exploded perspective views representing lens modules according to some exemplary embodiments of the inventive concept are illustrated. Figure 4 Shown along Figure 3 A cross-sectional view taken along line II′.

[0075] Reference Figure 3 and Figure 4 The lens module LM includes a lens unit LNU and a housing member HU. The lens unit LNU includes a first lens portion LN1 and a second lens portion LN2 spaced apart from each other in the third direction DR3. The first lens portion LN1 and the second lens portion LN2 may be disposed within the housing member HU.

[0076] In some embodiments, the lens unit LNU may be configured as a telecentric lens. Since the lens unit LNU is configured as a telecentric lens, the substrate PS may be irradiated with light that passes through the lens unit LNU and propagates in a direction parallel to the third direction DR3.

[0077] The first lens part LN1 includes a first lens LN1a and a second lens LN1b. In certain embodiments, the first lens LN1a and the second lens LN1b may be spaced apart from each other in a plan view.

[0078] The first lens LN1a can be Figure 2 , and the first light incident from the laser module LR may pass through the first lens LN1a. The first lens LN1a may adjust the path of the first light incident from the laser module LR so as to transmit the first light to the second lens portion LN2. For example, the incident angle of the first light irradiated onto the top surface of the first lens LN1a facing the laser module LR may be different from the exit angle of the first light emitted from the bottom surface of the first lens LN1a.

[0079] The second lens LN1b may overlap the second cutting target area CA2, and the second light incident from the laser module LR may pass through the second lens LN1b. The second lens LN1b may adjust the path of the second light incident from the laser module LR, thereby transmitting the second light to the second lens portion LN2. For example, the incident angle of the second light irradiated onto the top surface of the second lens LN1b facing the laser module LR may be different from the exit angle of the second light emitted from the bottom surface of the second lens LN1b.

[0080] The second lens portion LN2 includes a third lens LN2a and a fourth lens LN2b. The third lens LN2a overlaps the first lens LN1a and receives the first light emitted from the bottom surface of the first lens LN1a. The third lens LN2a may adjust the path of the first light and may transmit the first light to the first cutting target area CA1 of the substrate PS. For example, the incident angle of the first light irradiated onto the top surface of the third lens LN2a facing the first lens LN1a may be different from the exit angle of the first light emitted from the bottom surface of the third lens LN2a.

[0081] For example, the first light far from the third lens LN2 a may propagate in the thickness direction of the substrate PS or in a direction parallel to the third direction DR3 , and may then be transmitted to the first cutting target area CA1 .

[0082] The fourth lens LN2b overlaps the second lens LN1b and receives the second light emitted from the bottom surface of the second lens LN1b. The fourth lens LN2b may adjust the path of the second light and may transmit the second light to the second cutting target area CA2 of the substrate PS. For example, the incident angle of the second light irradiated onto the top surface of the fourth lens LN2b facing the second lens LN1b may be different from the exit angle of the second light emitted from the bottom surface of the fourth lens LN2b.

[0083] The second light emitted from the fourth lens LN2b may propagate in a direction parallel to the third direction DR3 and may then be transmitted to the second cutting target area CA2.

[0084] In certain embodiments, each of the third lens LN2a and the fourth lens LN2b may have a planar area greater than that of each of the first lens LN1a and the second lens LN1b. For example, in a plan view, the first lens LN1a may completely overlap with the third lens LN2a, and the second lens LN1b may completely overlap with the fourth lens LN2b.

[0085] In addition, in some embodiments, the third lens LN2a and the fourth lens LN2b may be partially in contact with each other. Therefore, the area that can be processed by the lens module LM can be increased. For example, the first cutting target area CA1 can be easily processed at a portion thereof adjacent to the second cutting target area CA2, and the second cutting target area CA2 can be easily processed at a portion thereof adjacent to the first cutting target area CA1. In this case, since the third lens LN2a and the fourth lens LN2b are in contact with each other, the substrate PS can have a processing range corresponding to the overlap with the third lens LN2a and the fourth lens LN2b (see Fig. 7A This will be discussed in further detail below.

[0086] The housing member HU includes a main body BD, a first receiving portion HD1, and a second receiving portion HD2. The main body BD may be disposed between the first receiving portion HD1 and the second receiving portion HD2. Figure 4 As shown in , the main body portion BD, the first receiving portion HD1 and the second receiving portion HD2 may be integrated into a single structure to constitute the housing member HU.

[0087] The body portion BD includes a top surface BD-U, a bottom surface BD-B, and a side surface connecting the top surface BD-U and the bottom surface BD-B to each other. The body portion BD may define a first body hole overlapping with the third lens LN2a and a second body hole overlapping with the fourth lens LN2b on its top surface BD-U. The body portion BD may define a third body hole overlapping with the first body hole and a fourth body hole overlapping with the second body hole on its bottom surface BD-B.

[0088] In certain embodiments, Figure 4 As shown in , each of the third body hole and the fourth body hole defined on the bottom surface BD-B of the body portion BD may have an area larger than that of each of the first body hole and the second body hole defined on the top surface BD-U of the body portion BD.

[0089] The body portion BD may define therein a first inner space INA1 connected to the external space through the first and third body holes, and may further define therein a second inner space INA2 connected to the external space through the second and fourth body holes.

[0090] For example, the first internal space INA1 and the second internal space INA2 may be spatially separated from each other. For another example, the first internal space INA1 and the second internal space INA2 may include a space commonly shared with each other.

[0091] The first receiving portion HD1 includes a first lens receiving portion HD1a and a second lens receiving portion HD1b provided on the top surface BD-U of the body portion BD. In a plan view, the first lens receiving portion HD1a and the second lens receiving portion HD1b may be spaced apart from each other and may have a shape in which they protrude from the top surface BD-U of the body portion BD. For example, each of the first lens receiving portion HD1a and the second lens receiving portion HD1b may be provided in a cylindrical shape having an internal through hole.

[0092] The first lens receiving portion HD1 a may define therein a first through hole TH1 overlapping the first internal space INA1 , and the second lens receiving portion HD1 b may define therein a second through hole TH2 overlapping the second internal space INA2 .

[0093] According to the inventive concept, the first lens receiving portion HD1a may receive the first lens LN1a on its inner surface defined by the first through hole TH1, and the second lens receiving portion HD1b may receive the second lens LN1b on its inner surface defined by the second through hole TH2.

[0094] The second receiving portion HD2 includes a third lens receiving portion HD2a and a fourth lens receiving portion HD2b disposed on the bottom surface BD-B of the main body portion BD. In a plan view, the third lens receiving portion HD2a and the fourth lens receiving portion HD2b may be spaced apart from each other. The second receiving portion HD2 may have a shape protruding from the bottom surface BD-B of the main body portion BD, or may be arranged within the main body portion BD.

[0095] The third lens receiving portion HD2a may support the third lens LN2a overlapping the first lens LN1a and may expose the third lens LN2a to the outside. The first lens LN1a and the third lens LN2a may be spaced apart from each other in the third direction DR3. The third lens LN2a may face the first cutting target area CA1 of the substrate PS.

[0096] The fourth lens receiving portion HD2b may support the fourth lens LN2b overlapping the second lens LN1b and may expose the fourth lens LN2b to the outside. The fourth lens LN2b may face the second cutting target area CA2 of the substrate PS.

[0097] like Figure 4 As shown in FIG. 1 , the first light beam generator LB1 and the second light beam generator LB2 may be included in Figure 1 Components in the laser module LR shown in . The first light beam generator LB1 emits a first light LT1, and the second light beam generator LB2 emits a second light LT2.

[0098] In addition, the laser module LR includes a scanner section SC. The scanner section SC may include a first scanner SC1 and a second scanner SC2. Alternatively, the first scanner SC1 and the second scanner SC2 may not be included in the laser module LR but may be provided outside the laser module LR.

[0099] The first scanner SC1 may adjust the path of the first light LT1 emitted from the first beam generator LB1, and may transmit the first light LT1 to the first lens LN1a. The second scanner SC2 may adjust the path of the second light LT2 emitted from the second beam generator LB2, and may transmit the second light LT2 to the second lens LN1b. For example, the first scanner SC1 and the second scanner SC2 may control the paths of the first light LT1 and the second light LT2 to cut the first cutting target area CA1 and the second cutting target area CA2 of the substrate PS.

[0100] Figure 5A Exploded perspective views showing a second receiving portion and a second lens portion according to some exemplary embodiments of the present inventive concept are shown. Figure 5B Plan views showing second lens parts according to some exemplary embodiments of the inventive concept are shown. Figure 6 A perspective view showing a substrate including two cutting target areas according to some exemplary embodiments of the inventive concept is shown.

[0101] Reference Figure 5A , the third lens LN2a includes a first region P1a overlapping with the third lens receiving portion HD2a and a second region P1b not overlapping with the third lens receiving portion HD2a. In a plan view, the second region P1b may have an area larger than that of the first region P1a. The first region P1a of the third lens LN2a may be a portion supported by the third lens receiving portion HD2a, and may correspond to an outer portion of the third lens LN2a.

[0102] The fourth lens LN2b includes a third region P2a overlapping with the fourth lens receiving portion HD2b and a fourth region P2b not overlapping with the fourth lens receiving portion HD2b. In a plan view, the fourth region P2b may have an area larger than that of the third region P2a. The third region P2a of the fourth lens LN2b may be a portion supported by the fourth lens receiving portion HD2b and may correspond to an outer portion of the fourth lens LN2b.

[0103] In some embodiments, the second region P1b of the third lens LN2a may be in contact with the fourth region P2b of the fourth lens LN2b. Figure 5A As shown in , a portion of the second region P1b of the third lens LN2a may contact a portion of the fourth region P2b of the fourth lens LN2b.

[0104] like Figure 5B As shown in FIG, an outer surface of the third lens LN2a may be divided into a first curved side portion C1 and a first straight side portion S1. An outer surface of the fourth lens LN2b may be divided into a second curved side portion C2 and a second straight side portion S2.

[0105] In certain embodiments, a first curved side portion C1 of the third lens LN2a and a second curved side portion C2 of the fourth lens LN2b may be given a curved shape. A first straight side portion S1 of the third lens LN2a and a second straight side portion S2 of the fourth lens LN2b may be given a linear shape.

[0106] For example, the first straight side portion S1 of the third lens LN2a may contact the second straight side portion S2 of the fourth lens LN2b. For ease of description, Figure 5B It is illustrated that the third lens LN2a and the fourth lens LN2b are spaced apart from each other, but an actual product may have a structure in which the third lens LN2a and the fourth lens LN2b are in contact with each other.

[0107] A situation different from the present invention may have a structure in which the third lens and the fourth lens facing the substrate do not contact each other. In this case, a spacing space may appear between the third lens and the fourth lens. As described above, the light passing through the third lens and the fourth lens may propagate in a direction parallel to the third direction DR3. Therefore, when the spacing space overlaps a portion of the first cutting target area and the second cutting target area of ​​the substrate, no laser may be irradiated onto the portion.

[0108] In contrast, according to the inventive concept, since the third lens LN2a and the fourth lens LN2b contact each other, the laser may be irradiated across the adjacent first and second cutting target areas CA1 and CA2 of the substrate PS.

[0109] For example, refer to Figure 6 The substrate PS may define therein a first cutting target area CA1 and a second cutting target area CA2 which are adjacent to each other and are to be removed from the substrate PS. The range of the first light LT1 which can pass through the third lens LN2a and be irradiated onto the substrate PS may be defined as Figure 6 The range of the second light LT2 that can pass through the fourth lens LN2b and irradiate onto the substrate PS can be defined as Figure 6 The first process area LPA1 and the second process area LPA2 may constitute a process area PA.

[0110] According to the inventive concept, in a plan view, the first processing range LPA1 may have an area larger than that of the first cutting target area CA1, and the second processing range LPA2 may have an area larger than that of the second cutting target area CA2. For example, in a plan view, the first cutting target area CA1 may completely overlap with the first processing range LPA1, and the second cutting target area CA2 may completely overlap with the second processing range LPA2.

[0111] Since the third lens LN2a and the fourth lens LN2b contact each other as described above, the first processing area LPA1 and the second processing area LPA2 may not be spaced apart from each other. Therefore, the first light LT1 passing through the third lens LN2a and the second light LT2 passing through the fourth lens LN2b may cut an area where the first cutting target area CA1 and the second cutting target area CA2 contact each other.

[0112] Fig. 7A Cross-sectional views representing lens modules according to some exemplary embodiments of the inventive concept are illustrated. Figure 7B Cross-sectional views representing lens modules according to some exemplary embodiments of the inventive concept are illustrated. Fig. 7A Shown along Figure 6A cross-sectional view taken along line II-II′ of Figure 7B It also shows that along Figure 6 A cross-sectional view taken along line II-II′.

[0113] Reference Fig. 7A , the first scanner SC1 receives Figure 4 The first light LT1 output by the first light beam generator LB1 discussed in the above discussion and the second scanner SC2 receives the first light LT1 from Figure 4 The second light LT2 output by the second light beam generator LB2 discussed in the above. For example, the first light LT1 can be divided into the first sub-light L1a, the second sub-light L1b, the third sub-light L1c and the fourth sub-light L1d, and the first sub-light L1a to the fourth sub-light L1d can be transmitted to the first scanner SC1. The second light LT2 can be divided into the fifth sub-light L2a, the sixth sub-light L2b, the seventh sub-light L2c and the eighth sub-light L2d, and the fifth sub-light L2a to the eighth sub-light L2d can be transmitted to the second scanner SC2. In this case, Figure 4 Each of the first beam generator LB1 and the second beam generator LB2 shown in FIG. 1 may include four sub-beam generators.

[0114] The first scanner SC1 includes a first sub-scanner SCR1a, a second sub-scanner SCR1b, a third sub-scanner SCR1c, and a fourth sub-scanner SCR1d to which the first sub-light L1a, the second sub-light L1b, the third sub-light L1c, and the fourth sub-light L1d are transmitted respectively. The second scanner SC2 includes a fifth sub-scanner SCR2a, a sixth sub-scanner SCR2b, a seventh sub-scanner SCR2c, and an eighth sub-scanner SCR2d to which the fifth sub-light L2a, the sixth sub-light L2b, the seventh sub-light L2c, and the eighth sub-light L2d are transmitted respectively.

[0115] like Fig. 7A and Figure 7B As shown in Figure 1 The substrate cutting device SCD further includes a first orifice AT1 and a second orifice AT2.

[0116] Lens unit (see Figure 3 The optical path is adjusted by the LNU of FIG. 1 so that the first to eighth sub-lights L1a to L1d and L2a to L2d incident from the first scanner SC1 and the second scanner SC2 propagate vertically toward the first and second cutting target areas CA1 and CA2.

[0117] The first to fourth sub-scanners SCR1a to SCR1d may control the first to fourth sub-lights L1a to L1d to pass through the center CX of the first aperture AT1. The position and size of the first aperture AT1 may be changed based on the characteristics of the lens included in the lens unit LNU of the present inventive concept. In addition, the positions and arrangement angles of the first to fourth sub-scanners SCR1a to SCR1d may be changed based on the characteristics of the lens included in the lens unit LNU of the present inventive concept.

[0118] As described above, the first to fourth sub-scanners SCR1a to SCR1d may allow the first to fourth sub-lights L1a to L1d to pass through the center CX of the first aperture AT1. The first to fourth sub-lights L1a to L1d passing through the center CX of the first aperture AT1 may pass through the first lens LN1a and the third lens LN2a, and then may be irradiated onto the first cutting target area CA1.

[0119] For example, the first to fourth sub-lights L1a to L1d may propagate along the thickness direction of the substrate PS and may be irradiated onto corresponding points of the first cutting target area CA1. In addition, the first to fourth sub-lights L1a to L1d may be irradiated onto the first cutting target area CA1 at the same time, and thus the time required to cut the first cutting target area CA1 may be reduced.

[0120] The fifth to eighth sub-scanners SCR2a to SCR2d can control the fifth to eighth sub-lights L2a to L2d to pass through the center CX of the second aperture AT2. The position and size of the second aperture AT2 can be changed based on the characteristics of the lens included in the lens unit LNU of the present invention. In addition, the positions and arrangement angles of the fifth to eighth sub-scanners SCR2a to SCR2d can be changed based on the characteristics of the lens included in the lens unit LNU of the present invention.

[0121] The fifth to eighth sub-scanners SCR2a to SCR2d may allow the fifth to eighth sub-lights L2a to L2d to pass through the center CX of the second aperture AT2. The fifth to eighth sub-lights L2a to L2d passing through the center CX of the second aperture AT2 may pass through the second lens LN1b and the fourth lens LN2b, and then may be irradiated onto the second cutting target area CA2.

[0122] For example, the fifth to eighth sub-lights L2a to L2d may propagate along the thickness direction of the substrate PS and may be irradiated onto corresponding points of the second cutting target area CA2. In addition, the fifth to eighth sub-lights L2a to L2d may be irradiated onto the second cutting target area CA2 at the same time, and thus the time required to cut the second cutting target area CA2 may be reduced.

[0123] In some embodiments, the first to fourth sub-lights L1a to L1d and the fifth to eighth sub-lights L2a to L2d may be irradiated onto the first and second cutting target areas CA1 and CA2 at the same time. The first and second cutting target areas CA1 and CA2 may be cut at the same time, and thus, the time required to cut the substrate PS may be effectively reduced.

[0124] Reference Figure 7B , the first scanner SC1a and the second scanner SC2a according to some exemplary embodiments of the present inventive concept will be described below. The first light LT1 may be divided into a first sub-light L1a and a second sub-light L1b, which may be transmitted to the first scanner SC1a. The second light LT2 may be divided into a third sub-light L2a and a fourth sub-light L2b, which may be transmitted to the second scanner SC2a. In this case, Figure 4 Each of the first beam generator LB1 and the second beam generator LB2 shown in FIG. 1 may include two sub-beam generators.

[0125] The first scanner SC1a may include two sub-scanners to which the first sub-light L1a and the second sub-light L1b are transmitted respectively, and the second scanner SC2a may include two sub-scanners to which the third sub-light L2a and the fourth sub-light L2b are transmitted respectively.

[0126] In this specification, the number of sub-beam generators included in the first beam generator LB1 is merely exemplary, and the number of first sub-scanners included in the first scanner SC1a is also merely exemplary. Similarly, the number of sub-beam generators included in the second beam generator LB2 is merely exemplary, and the number of second sub-scanners included in the second scanner SC2a is also merely exemplary. In addition, the position and angle of the sub-scanner included in each of the first scanner SC1a and the second scanner SC2a are changed differently.

[0127] Figure 8 Plan views of second lens parts according to some exemplary embodiments of the inventive concept are shown.

[0128] Reference Figure 8 , the first lens unit and the second lens unit according to some exemplary embodiments of the present invention will be described below. Figure 3 The second lens unit LN2 discussed includes one more lens. Similarly, although not shown, the first lens unit is larger than the reference lens unit. Figure 3 The first lens portion LN1 discussed includes one lens at most.

[0129] For example, the second lens unit includes a third lens LN2-1 and a fourth lens LN2-2, and further includes a sixth lens LN2-3. In this case, the first lens unit includes a first lens overlapping with the third lens LN2-1 and a second lens overlapping with the fourth lens LN2-2, and further includes a fifth lens overlapping with the sixth lens LN2-3.

[0130] Although not shown, Figure 3 The first receiving portion HD1 shown in FIG. 1 may further include a fifth lens receiving portion defining a third through hole therein in which the fifth lens is disposed. The second receiving portion HD2 may further include a sixth lens receiving portion supporting and exposing the sixth lens to the outside.

[0131] When based on Figure 8 In the embodiment shown in FIG, when two or more cutting target areas are provided on the substrate PS, it can be understood that each of the first lens portion and the second lens portion includes lenses whose number corresponds to the number of the two or more cutting target areas.

[0132] This will be discussed in further detail below Figure 8 The second lens unit shown in .

[0133] The third lens LN2-1 includes a first side surface C1 having a curved shape, and also includes first and second sub-side surfaces S1a and S1b each having a linear shape. The first side surface C1 has one end adjacent to the first sub-side surface S1a and the other end adjacent to the second sub-side surface S1b.

[0134] The fourth lens LN2-2 includes a second side surface C2 having a curved shape, and further includes a third sub-side surface S2a and a fourth sub-side surface S2b each having a linear shape. The second side surface C2 has one end adjacent to the third sub-side surface S2a and the other end adjacent to the fourth sub-side surface S2b.

[0135] The sixth lens LN2-3 includes a third side surface C3 having a curved shape, and also includes a fifth sub-side surface S3a and a sixth sub-side surface S3b each having a linear shape. The third side surface C3 has one end adjacent to the fifth sub-side surface S3a and the other end adjacent to the sixth sub-side surface S3b. The third side surface C3 overlaps with the sixth lens receiving portion, and the fifth sub-side surface S3a and the sixth sub-side surface S3b do not overlap with the sixth lens receiving portion.

[0136] In some embodiments, the first sub-side surface S1a may contact the third sub-side surface S2a, the second sub-side surface S1b may contact the fifth sub-side surface S3a, and the fourth sub-side surface S2b may contact the sixth sub-side surface S3b.

[0137] Therefore, the number and shape of lenses included in each of the first lens section and the second lens section may be changed based on the shape of the cutting target area defined on the substrate PS.

[0138] According to some exemplary embodiments of the present inventive concept, two lenses facing two cutting target regions of the substrate may contact each other. Thus, two lights respectively passing through the two lenses may be irradiated across two cutting target regions adjacent to each other of the substrate.

[0139] In addition, the two cutting target areas of the substrate can receive two lights passing through the two lenses at the same time. Therefore, the time required in the substrate cutting process can be effectively reduced.

[0140] Some exemplary embodiments have been described in the specification and the drawings. Although specific terms are used herein, they are only used for the purpose of describing the inventive concept and do not limit the technical meaning or scope of the inventive concept disclosed in the claims. Therefore, it will be understood by those of ordinary skill in the art that various modifications and equivalent embodiments can be made based on the inventive concept. In short, the true technical scope to be protected by the inventive concept should be determined by the technical concept of the attached claims.

Claims

1. Lens module, including: Shell member; a first lens portion including a first lens disposed in the housing member and a second lens spaced apart from the first lens; as well as The second lens unit includes a third lens and a fourth lens disposed in the housing member, wherein the third lens overlaps with the first lens, and the fourth lens overlaps with the second lens. Wherein, the housing component comprises: a main body portion including a top surface, a bottom surface, and a side surface connecting the top surface and the bottom surface to each other, the main body portion defining a first interior space and a second interior space; A first receiving portion is provided on the top surface of the main body, wherein the first receiving portion includes a first lens receiving portion and a second lens receiving portion, wherein the first lens receiving portion overlaps with the first internal space and defines a a first through hole of the first lens, the second lens receiving portion overlapping the second inner space and defining a second through hole in which the second lens is disposed; and a second receiving portion, on the bottom surface of the main body, the second receiving portion including a third lens receiving portion and a fourth lens receiving portion, wherein the third lens receiving portion supports the third lens and exposes the third lens to the outside, The fourth lens receiving portion supports the fourth lens and exposes the fourth lens to the outside. wherein an outer surface of each of the third lens and the fourth lens includes a curved side portion having a curved shape and a straight side portion having a linear shape, and Wherein, the straight side portion of the third lens and the straight side portion of the fourth lens contact each other.

2. The lens module according to claim 1, wherein: The third lens includes a first region overlapping with the third lens receiving portion and a second region not overlapping with the third lens receiving portion, and The fourth lens includes a third region overlapping with the fourth lens receiving portion and a fourth region not overlapping with the fourth lens receiving portion.

3. The lens module according to claim 2, wherein: The second region of the third lens contacts the fourth region of the fourth lens.

4. The lens module according to claim 2, wherein: In a plan view, an area of ​​each of the third lens and the fourth lens is larger than an area of ​​each of the first lens and the second lens.

5. The lens module according to claim 1, wherein: A first main body hole and a second main body hole are defined on the top surface, and A third body hole and a fourth body hole are defined on the bottom surface, the third body hole overlaps the first body hole, and the fourth body hole overlaps the second body hole.

6. The lens module according to claim 5, wherein: In a plan view, an area of ​​each of the third body hole and the fourth body hole is larger than an area of ​​each of the first body hole and the second body hole.

7. The lens module according to claim 1, wherein: The first lens is configured to receive the first light from the first light beam generator, and The second lens is configured to receive second light from a second light beam generator.

8. The lens module according to claim 7, wherein: The third lens is configured to output the first light transmitted from the first lens to a first cutting target area of ​​the substrate facing the third lens, and The fourth lens is configured to output the second light transmitted from the second lens to a second cutting target area of ​​the substrate facing the fourth lens.

9. The lens module according to claim 8, wherein: The third lens is configured to output the first light to the first cutting target area in a direction parallel to the thickness direction of the substrate, and The fourth lens is configured to output the second light to the second cutting target area in the one direction.

10. The lens module according to claim 7, further comprising: a first scanner receiving the first light from the first beam generator and adjusting a path of the first light transmitted to the first lens; as well as The second scanner receives the second light from the second beam generator and adjusts a path of the second light transmitted to the second lens.

11. The lens module according to claim 1, wherein: The first lens unit further includes a fifth lens, The second lens unit further includes a sixth lens overlapping the fifth lens, The first receiving portion further includes a fifth lens receiving portion, the fifth lens receiving portion defining a third through hole in which the fifth lens is disposed, and The second receiving portion further includes a sixth lens receiving portion that supports the sixth lens and exposes the sixth lens to the outside.

12. The lens module according to claim 11, wherein: The sixth lens is in contact with each of the third lens and the fourth lens.

13. The lens module according to claim 11, wherein: The sixth lens includes a first side surface overlapping with the sixth lens receiving portion and a first sub-side surface and a second sub-side surface not overlapping with the sixth lens receiving portion, wherein: The first side surface has a curved shape, The first sub-side surface adjacent to one end of the first side surface has a linear shape and contacts the third lens, and The second sub-side surface adjacent to the other end of the first side surface has a linear shape and contacts the fourth lens.

14. A substrate cutting device, comprising: a stage supporting a substrate including a first cutting target region and a second cutting target region adjacent to each other; a first light beam generator configured to emit a first light; a second light beam generator configured to emit a second light; as well as a lens module configured to receive the first light and output the first light to the first cutting target area, and configured to receive the second light and output the second light to the second cutting target area, Wherein, the lens module comprises: a housing member; and a lens unit, within the housing member, the lens unit comprising a first lens, a second lens, a third lens and a fourth lens, wherein the first lens receives the first light, the second lens is spaced apart from the first lens and receives the second light, the third lens overlaps the first lens and outputs the first light passing through the first lens to the first cutting target area, The fourth lens overlaps the second lens and outputs the second light passing through the second lens to the second cutting target area, wherein an outer surface of each of the third lens and the fourth lens includes a curved side portion having a curved shape and a straight side portion having a linear shape, and Wherein, the straight side portion of the third lens and the straight side portion of the fourth lens contact each other.

15. The substrate cutting device according to claim 14, wherein: The first light passing through the third lens and the second light passing through the fourth lens are simultaneously irradiated onto the first cutting target area and the second cutting target area, respectively.

16. The substrate cutting device according to claim 14, wherein: The third lens is configured to output the first light to the first cutting target area in a direction parallel to a thickness direction of the substrate, and The fourth lens is configured to output the second light to the second cutting target area in the one direction.

17. The substrate cutting device according to claim 14, wherein: The housing member comprises: a main body portion including a top surface, a bottom surface, and a side surface connecting the top surface and the bottom surface to each other, a first receiving portion, on the top surface of the main body portion, the first receiving portion including a first lens receiving portion and a second lens receiving portion, the first lens receiving portion defining a first through hole in which the first lens is disposed, the second lens receiving portion defining a second through hole in which the second lens is disposed, the first lens receiving portion and the second lens receiving portion being spaced apart from each other in a plan view; and A second receiving portion, on the bottom surface of the main body, the second receiving portion includes a third lens receiving portion and a fourth lens receiving portion, wherein the third lens receiving portion supports the third lens and exposes the third lens to the outside, and the fourth lens receiving portion supports the fourth lens and exposes the fourth lens to the outside.

18. The substrate cutting device according to claim 17, wherein: The third lens includes a first region overlapping with the third lens receiving portion and a second region not overlapping with the third lens receiving portion, and The fourth lens includes a third region overlapping with the fourth lens receiving portion and a fourth region not overlapping with the fourth lens receiving portion, Wherein, the second region and the fourth region are in contact with each other.

19. The substrate cutting device according to claim 18, wherein: The lens unit is a telecentric lens.

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