Flexure hinge phase shifter
Through the multi-point support synchronous phase shifting and elastic reset structure of the flexible hinge phase shifter, the displacement deviation and short service life caused by the single-point support phase shifter are solved, and the precision displacement and efficient operation of the interferometer are achieved.
Patent Information
- Application Number
- CN202010794457.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2020-08-10
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2040-08-10
AI Technical Summary
The single-point support phase shifter in existing interferometers leads to displacement position deviation, reduced reset recovery performance and short service life, affecting the accuracy of the quality and disadvantages of the sample being tested.
The flexible hinge phase shifter is adopted, and the phase shift is synchronously through multi-point support, combined with the elastic reset structure and actuator assembly, to achieve rigid connection and precision displacement between the main body and the base, and to provide restoration force using the flexible hinge structure and spring.
It achieves stable precision displacement, extends service life, improves the working efficiency and accuracy of interferometers, and reduces the losses of the enterprise.
Smart Images
Figure CN111854611B_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the field of interferometer components, and in particular to a flexible hinge phase shifter. Background Art
[0002] At present, in the field of interferometer detection, the use of computer algorithms to calculate the quality of the sample under test reflected by the interferometer fringes is becoming more and more widely used. In the interferometric phase shifting algorithm, it is required that there is a sub-micron displacement between the sample under test and the standard lens, and the displacement curve of each point on the end face of the moved object is consistent, stable, and recoverable. This is the role of the phase shifter.
[0003] When the interferometer is calculated through software, it is unable to obtain a stable, precise, and recoverable displacement, which often leads to a large displacement error, causing the final calculation result to differ greatly from the actual value, ultimately affecting the company's judgment on the quality of the measured samples.
[0004] A similar solution available on the market is to set a single-point supported phase shifter on the interferometer. The single-point supported phase shifter often causes deviation in the phase shift position, the reset recovery performance decreases over time, and the service life of the phase shifter is short. Summary of the invention
[0005] In view of the shortcomings of the prior art, the present invention provides a flexible hinge phase shifter to solve the defects of the above technology.
[0006] In order to achieve the above object, the present invention adopts the following technical solutions:
[0007] A flexible hinge phase shifter, characterized in that: it includes a base and a main body; an actuator assembly is fixed on the base; the actuator assembly is electrically connected to a wiring harness, the wiring harness is commonly connected to a wiring harness connector, a wire buckle is sleeved on the wiring harness connector, and the wire buckle is fixed on the base; the main body includes a front main body and a rear main body; an elastic reset structure is installed between the opposite sides of the front main body and the rear main body; the end of the actuator assembly is fixedly connected to the rear main body; a plurality of shielding blocks are arranged on the side of the front main body, and the shielding blocks are fixedly connected between the base and the front main body to realize a fixed connection between the front main body and the base.
[0008] According to an optimized solution, the actuator assembly includes a plurality of actuators fixedly mounted on a base via a first fastener, and the number of the actuators is an even number.
[0009] According to an optimized solution, the rear body is provided with through holes corresponding to the actuators one by one, and pins are installed in the through holes; the pins are connected to the ends of the actuators through the second fasteners.
[0010] In an optimized solution, the elastic reset structure includes a plurality of springs fixedly installed between the side surfaces of the front body and the rear body.
[0011] Due to the adoption of the above technology, compared with the prior art, the beneficial effects of the present invention are:
[0012] The present invention obtains stable and precise displacement by means of multi-point support synchronous phase shifting. The structure of the flexible hinge enables a rigid connection between the main body and the base without position deviation, which greatly improves the service life, indirectly helps enterprises reduce losses, and improves the working efficiency of the interferometer. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] Figure 1 This is a schematic diagram of an exploded three-dimensional structure of an embodiment of the present invention;
[0014] Figure 2 This is a schematic diagram of the exploded side structure of an embodiment of the present invention. DETAILED DESCRIPTION
[0015] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.
[0016] like Figure 1-2 As shown, the flexible hinge phase shifter includes a base 5 and a main body.
[0017] An actuator assembly is fixed on the base 5. The actuator assembly is electrically connected to a wiring harness, and the wiring harness is commonly connected to a wiring harness connector. A wire clip 3 is sleeved on the wiring harness connector, and the wire clip 3 is fixed on the base. The actuator assembly includes a plurality of actuators 6 fixedly mounted on the base by a first fastener 4, and the number of actuators 6 is an even number. The number of actuators is an even number of two or more, which is the best implementation method, mainly because this method can ensure that the entire phase shifter will not find position deviation when working. The wiring harness and the actuator are in a one-to-one correspondence, and electrical connection is a general term for the connection between wires and conductors.
[0018] The main body includes a front body 9 and a rear body 7. An elastic reset structure is installed between the opposite sides of the front body 9 and the rear body 7. The end of the actuator assembly is fixedly connected to the rear body through a cylindrical pin. A plurality of shielding blocks 8 are arranged on the side of the front body, and the shielding blocks 8 are fixedly connected between the base and the front body to achieve a fixed connection between the front body and the base.
[0019] The rear body is provided with through holes corresponding to the actuators one by one, and pins are installed in the through holes. The pins are connected to the ends of the actuators through the second fasteners 2. The elastic reset structure includes a plurality of springs 1 fixedly installed between the sides of the front body and the rear body.
[0020] The actuator in this patent receives voltage and deforms to provide a displacement, which is transmitted to the end face of the main body through the cylindrical pin, causing the object fixed on the main body to move. When the voltage is lost, the main body of the flexible hinge structure and the spring provide a restoring force at the same time, so that the phase shifter returns to its initial position.
[0021] The assembly steps of the flexible hinge phase shifter of this embodiment are as follows:
[0022] 1. Fix the actuator to the base 5 using the first fastener 4.
[0023] 2. Use a wiring harness to connect the four actuators and lead out a wiring harness connector so that the four actuators obtain the same voltage at the same time and the top points of the four actuators have the same displacement characteristic curve.
[0024] 3. Align the main body and place it on the base, and use the blocking blocks and fasteners to connect the front main body to the base to make the appearance beautiful and fill the grooves caused by structural requirements.
[0025] 4. Use eight fasteners to press eight springs into the front and rear bodies so that the phase shifter can return to its original point after a calculation is completed.
[0026] 5. Place four pins into the holes of the main body above the actuator, and use four fasteners to make the cylindrical pins closely contact with the top of the actuator so that the displacement generated by the actuator is synchronously transmitted to the top of the main body.
[0027] 6. Use wire clips to secure the leads to the base to protect the wiring harness.
[0028] The present invention obtains stable and precise displacement by means of multi-point support synchronous phase shifting. The structure of the flexible hinge enables a rigid connection between the main body and the base without position deviation, which greatly improves the service life, indirectly helps enterprises reduce losses, and improves the working efficiency of the interferometer.
[0029] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.
[0030] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.
[0031] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.
Claims
1. A flexible hinge phase shifter, characterized in that: Including a base and a main body; An actuator assembly is fixed on the base; the actuator assembly is electrically connected to a wiring harness, the wiring harnesses are commonly connected to a wiring harness connector, a wire buckle is sleeved on the wiring harness connector, and the wire buckle is fixed on the base; The main body comprises a front main body and a rear main body; an elastic reset structure is installed between the opposite sides of the front main body and the rear main body; The end of the actuator assembly is fixedly connected to the rear body; A plurality of shielding blocks are arranged on the side of the front body, and the shielding blocks are fixedly connected between the base and the front body to realize the fixed connection between the front body and the base; The actuator assembly includes a plurality of actuators fixedly mounted on a base by a first fastener, and the number of the actuators is an even number; The rear body is provided with through holes corresponding to the actuators one by one, and pins are installed in the through holes; the pins are connected to the ends of the actuators through the second fasteners; The elastic reset structure includes a plurality of springs fixedly installed between the side surfaces of the front body and the rear body.