Flexible plate structure phase shifter

Abstract

The present invention discloses a flexible plate structure phase shifter, comprising a base and a main body; the interior of the base is a working chamber; the main body is arranged above the base; a vertical actuator assembly is installed in the base; the actuator assembly is electrically connected to a wiring harness assembly, the wiring harness assembly is connected to a wiring harness connector, and a wire buckle is sleeved on the wiring harness connector; a through hole is arranged on the side of the base, and the wire buckle is installed on the through hole; a flexible plate assembly is installed on the top of the actuator assembly, and the main body is fixed on the flexible plate assembly. The present invention will not produce position deviation, greatly improves the service life, indirectly helps enterprises reduce losses, and improves the working efficiency of horizontal interferometers.

Description

Technical Field

[0001] The invention relates to the field of interferometer components, and in particular to a flexible plate structure phase shifter. Background Art

[0002] At present, in the field of interferometer detection, the use of computer algorithms to calculate the quality of the sample under test reflected by the interferometer fringes is becoming more and more widely used. In the interferometric phase shifting algorithm, it is required that there is a sub-micron displacement between the sample under test and the standard lens, and the displacement curve of each point on the end face of the moved object is consistent, stable, and recoverable. This is the role of the phase shifter.

[0003] When the interferometer is calculated through software, it is unable to obtain a stable, precise, and recoverable displacement, which often leads to a large displacement error, causing the final calculation result to differ greatly from the actual value, ultimately affecting the company's judgment on the quality of the measured samples.

[0004] A similar solution available on the market is to set a single-point supported phase shifter on the interferometer. The phase shifter is supported at a single point, which has defects such as position deviation of phase shifting, reduced recovery performance over time, and short service life. At the same time, the flexible hinge phase shifter has limited load capacity when used on horizontal equipment. Summary of the invention

[0005] In view of the shortcomings of the prior art, the present invention provides a flexible plate structure phase shifter to solve the defects of the above-mentioned technology.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions:

[0007] A flexible plate structure phase shifter, characterized in that: it includes a base and a main body; the interior of the base is a working chamber; the main body is arranged above the base; a vertical actuator assembly is installed in the base; the actuator assembly is electrically connected to a wiring harness assembly, the wiring harness assembly is connected to a wiring harness connector, and a wire buckle is sleeved on the wiring harness connector; a through hole is provided on the side of the base, and the wire buckle is installed on the through hole; a flexible plate assembly is installed on the top of the actuator assembly, and the main body is fixed on the flexible plate assembly.

[0008] According to an optimized solution, the actuator assembly includes a plurality of actuators fixedly mounted in the working chamber by a first fastener; all the actuators are arranged in a circle.

[0009] In an optimized solution, the wiring harness assembly includes a wiring harness made of wires corresponding one to one with the actuators; one end of the wiring harness is electrically connected to the actuator, and the other ends of all the wiring harnesses are commonly connected to the wiring harness connector.

[0010] According to an optimized solution, the flexible plate assembly includes flexible plates corresponding to the actuators one by one, and the flexible plates are fixedly connected to the actuators through cylindrical pins and top screws.

[0011] In an optimized solution, the number of the actuators is 3-6 and they are evenly distributed in the working chamber.

[0012] Due to the adoption of the above technology, compared with the prior art, the beneficial effects of the present invention are:

[0013] The present invention adds a flexible board between the main body and the base, and the flexible board and the base are nearly rigidly connected, and utilizes the elastic restoring force of the structure itself to restore the phase shifter to its original state after the phase shift is completed.

[0014] The present invention will not cause position deviation, greatly improves the service life, indirectly helps enterprises reduce losses, and improves the working efficiency of the horizontal interferometer. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 The figure is a schematic diagram of an exploded structure of an embodiment of the present invention. DETAILED DESCRIPTION

[0016] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0017] like Figure 1 As shown, the flexible plate structure phase shifter includes a base 8 and a main body 1.

[0018] The interior of the base is a working chamber. The main body 1 is arranged above the base 8. A vertical actuator assembly is installed in the base 8. The actuator assembly is electrically connected to a wiring harness assembly, which is connected to a wiring harness connector, and a wire buckle 6 is sleeved on the wiring harness connector. A through hole 7 is arranged on the side of the base, and the wire buckle 6 is installed on the through hole 7. A flexible board assembly is installed on the top of the actuator assembly, and the main body 1 is fixed on the flexible board assembly.

[0019] The specific design is as follows:

[0020] The actuator assembly includes a plurality of actuators 5 fixedly mounted in the working chamber by a first fastener. All the actuators 5 are arranged in a circle. The number of the actuators is 3-6 and evenly distributed in the working chamber.

[0021] The wiring harness assembly includes a wiring harness made of wires corresponding to the actuators one by one. One end of the wiring harness is electrically connected to the actuator, and the other ends of all the wiring harnesses are commonly connected to the wiring harness connector.

[0022] The flexible plate assembly includes flexible plates 4 corresponding to the actuators one by one, and the flexible plates 4 are fixedly connected to the actuators through cylindrical pins 2 and top screws 3.

[0023] In this embodiment, the actuator is a component with good piezoelectric effect that is encapsulated by a packaging structure that encapsulates piezoelectric ceramics. The base is used to connect the fixed actuator to the device. The main body converts the displacement of the actuator into the displacement of the end face of the main body. The flexible board is installed on the base to achieve the connection between the main body and the flexible board. The actuator causes the flexible board to undergo a slight deformation and transmits it to the main body. The wire buckle is a component that fixes and leads the wire harness connector. The cylindrical pin is a component that smoothly transfers the displacement of the actuator. The top screw is used to adjust the preload force of the cylindrical pin in contact with the actuator.

[0024] The present invention adds a flexible board between the main body and the base, and the flexible board and the base are nearly rigidly connected, and utilizes the elastic restoring force of the structure itself to restore the phase shifter to its original state after the phase shift is completed.

[0025] The present invention will not cause position deviation, greatly improves the service life, indirectly helps enterprises reduce losses, and improves the working efficiency of the horizontal interferometer.

[0026] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0027] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0028] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. Flexible plate structure phase shifter, Features: Including a base and a main body; The interior of the base is a working chamber; the main body is arranged above the base; A vertical actuator assembly is installed in the base; the actuator assembly is electrically connected to a wiring harness assembly, the wiring harness assembly is connected to a wiring harness connector, and a wire buckle is sleeved on the wiring harness connector; a through hole is provided on the side of the base, and the wire buckle is installed on the through hole; A flexible plate assembly is installed on the top of the actuator assembly, the main body is fixed on the flexible plate assembly, the flexible plate assembly includes flexible plates corresponding to the actuators one by one, and the flexible plates are fixedly connected to the actuators through cylindrical pins and top screws; The actuator assembly comprises a plurality of actuators fixedly mounted in the working chamber by a first fastener; all the actuators are arranged circumferentially.

2. The flexible plate structure phase shifter according to claim 1, Features: The number of the actuators is 3-6 and they are evenly distributed in the working chamber.

3. The flexible plate structure phase shifter according to claim 2, Features: The wiring harness assembly includes a wiring harness made of conducting wires corresponding to the actuators one by one; one end of the wiring harness is electrically connected to the actuator, and the other ends of all the wiring harnesses are commonly connected to the wiring harness connector.

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