A silicon wafer spin dryer

Abstract

The present invention discloses a silicon wafer spin dryer, which includes a housing. A control button is provided at the front end of the housing, and a sealing cover is provided at the upper end of the housing. Inside the housing, there is a rotating member for rotating the silicon wafer. One end of the rotating member is fixedly connected to a cassette fixing member for receiving the silicon wafer. The lower end of the cassette fixing member is connected to a support member for ensuring the rotational stability of the cassette fixing member. Inside the cassette fixing member, there is a cassette for fixedly placing the silicon wafer in a sliding connection manner. Through the structural setting of the rotating component in the present invention, with the setting of the lower housing, the silicon wafer can be simply placed and fixed. Moreover, the sliding connection mode between the upper housing and the lower housing after connection and the fixed frame also makes the operation of putting the silicon wafer into the spin dryer simple. At the same time, due to the structural design of the fixing component, the user only needs to apply a little force outward along the direction of the limiting groove to take out the lower housing and the upper housing, making the operation of taking out the silicon wafer also simple and fast.

Description

Technical Field

[0001] The present invention relates to the field of silicon wafer production, and specifically to a silicon wafer spin dryer. Background Art

[0002] Silicon wafers are raw materials for making chips. With the development of science and technology, the development of semiconductors has been continuously promoted. The development of technologies such as automation and computers has reduced the cost of high-tech products such as silicon wafers (integrated circuits) to a very low level. The price of a microcomputer is only a few hundred yuan. This has paved the way for microcomputers to enter thousands of households and made our lives more and more modern. Of course, the changes brought by chips to families are far more than this. With the increase in electronic families, a new production and lifestyle - "home industry" and "home office" are emerging. In the future, it will become a reality in the near future to operate machines, direct production, manage companies and factories at home.

[0003] In the production process of silicon wafers, one step is to spin-dry the silicon wafers by centrifugal action. However, for traditional silicon wafer brush dryers, the clamping structure for silicon wafers is not stable enough, resulting in breakage of silicon wafers during centrifugal spin-drying, reducing the yield of silicon wafers. Therefore, we propose a silicon wafer spin dryer. Summary of the Invention

[0004] The purpose of the present invention is to provide a silicon wafer spin dryer to solve the problems raised in the above background art.

[0005] To achieve the above purpose, a silicon wafer spin dryer includes a housing. A control button is provided at the front end of the housing, and a sealing cover is provided at the upper end of the housing. Inside the housing, there is a rotating member for rotating the silicon wafer. One end of the rotating member is fixedly connected to a box fixing member for receiving the silicon wafer. The lower end of the box fixing member is connected to a support member to ensure the rotational stability of the box fixing member. The inside of the box fixing member is slidably connected to a box for fixedly placing the silicon wafer.

[0006] Preferably, the rotating member includes a motor. The upper end of the motor is fixedly connected to a rotating rod. The outer surface of the rotating rod is surrounded by a first bearing. Near the upper end of the first bearing on the outer surface of the rotating rod, a connecting rod is fixedly connected. The connecting rod is fixedly connected to the box fixing member. By setting the rotating member, the silicon wafer placed in the box is driven to rotate, so as to spin-dry the liquid on the surface of the silicon wafer by centrifugal action.

[0007] Preferably, the box body fixing member includes a fixing frame, a spring is arranged inside the fixing frame, one end of the spring is fixedly connected to the inner wall of the fixing frame, the other end of the spring is fixedly connected to a bolt, the bolt is elastically connected to the fixing frame through the spring, the box body fixing member is fixedly connected to the connecting rod through the fixing frame. Through the arrangement of the box body fixing member, the box body can be rotated in an inclined direction towards the inside, and at the same time, through the arrangement of the box body fixing member, the box body can be reinforced to prevent the box body from shaking greatly during rotation.

[0008] Preferably, the support member includes a base, a second bearing is arranged at the upper end of the base, the upper end of the second bearing is fixedly connected to a fixing frame, and the base is fixedly connected to the inner wall of the housing. Through the arrangement of the support member, the structure is more stable when the box body fixing member rotates, and the shaking amplitude when the box body fixing member rotates is reduced.

[0009] Preferably, the box body includes a lower box body and an upper box body. A chute is arranged on the outer surface of the lower box body, a card slot is arranged inside the chute, a fitting groove is arranged on the inner wall of the lower box body, an inner groove is arranged inside the lower box body, a fitting body is arranged at the upper end of the upper box body, and a compaction component is arranged inside the upper box body. The upper box body is fitted and connected to the fitting groove through the fitting body. By arranging the box body, the silicon wafer can be fixed, which is convenient for the silicon wafer to be placed in the box body fixing member.

[0010] Preferably, the compaction component includes a rotating piece, a roller is arranged inside the rotating piece, the rotating piece is rotatably connected to the upper box body through the roller, an outer rod is fixedly connected to the lower end of the rotating piece, an inner rod is threadedly connected to the inside of the outer rod, a third bearing is connected to the lower end of the inner rod, a hard piece is arranged on the outside of the third bearing, and a soft piece is connected to the lower end of the hard piece. Through the arrangement of the compaction component, the silicon wafer can be reinforced, and the shaking degree of the silicon wafer rotating in the box body is reduced.

[0011] Compared with the prior art, the beneficial effects of the present invention are:

[0012] Through the structural design of the rotating component, with the setting of the lower housing, the silicon wafer can be simply placed and fixed. At the same time, with the setting of the upper housing, the silicon wafer is relatively sealed and fixed. And through the rotating compaction component, the compaction component moves downward to compact the top of the silicon wafer, thus relatively stably fixing the silicon wafer. The design of the soft pressing plate prevents hard contact damage between the compaction component and the silicon wafer. The way the upper housing and the lower housing are fitted and connected can make the placement and removal of the silicon wafer relatively simple. Moreover, the sliding connection mode between the upper housing and the lower housing after connection and the fixed frame also makes the operation of putting the silicon wafer into the dryer simple. The design of the plug and the card slot enables the lower housing and the upper housing to be buckled and fixed immediately after being placed in the fixed frame, providing stability for the rotation of the lower housing and the upper housing inside the dryer. And when the drying is over, the user only needs to exert a little force outward along the direction of the limit groove to take out the lower housing and the upper housing, making the removal operation of the silicon wafer also simple and fast. The oblique design of the box fixing part also makes the rotating and drying structure of the silicon wafer more stable. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 is a schematic external view of the present invention;

[0014] Figure 2 is a schematic internal structure view of the present invention;

[0015] Figure 3 is an enlarged view of area A in FIG. 2;

[0016] Figure 4 is an enlarged view of the support member structure in FIG. 2;

[0017] Figure 5 is a schematic box structure view of the present invention;

[0018] Figure 6 is a schematic compaction component structure view of the present invention;

[0019] Figure 7 is a schematic external view of the box fixing part of the present invention.

[0020] In the figures: 1. Housing; 2. Control button; 3. Sealing cover; 4. Rotating member; 5. Motor; 6. Rotating rod; 7. First bearing; 8. Connecting rod; 9. Box fixing part; 10. Support member; 11. Base; 12. Second bearing; 13. Fixed frame; 14. Spring; 15. Plug; 16. Box body; 17. Lower box body; 18. Chute; 19. Card slot; 20. Fitting groove; 21. Inner groove; 22. Upper box body; 23. Fitting body; 24. Compaction component; 25. Rotating piece; 26. Roller; 27. Outer rod; 28. Inner rod; 29. Third bearing; 30. Hard piece; 31. Soft piece. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0021] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0022] Please refer to Figures 1-7 , a wafer spin dryer shown in the figure, including a housing 1, a control button 2 is provided at the front end of the housing 1, a sealing cover 3 is provided at the upper end of the housing 1, and a rotating member 4 for rotating the wafer is provided inside the housing 1. One end of the rotating member 4 is fixedly connected to a cartridge fixing member 9 for receiving the wafer, and a support member 10 for ensuring the rotational stability of the cartridge fixing member 9 is connected to the lower end of the cartridge fixing member 9. A cartridge 16 for fixedly placing the wafer is slidably connected inside the cartridge fixing member 9.

[0023] The rotating member 4 includes a motor 5, a rotating rod 6 is fixedly connected to the upper end of the motor 5, a first bearing 7 is disposed around the outer surface of the rotating rod 6, a connecting rod 8 is fixedly connected to the outer surface of the rotating rod 6 near the upper end of the first bearing 7, the connecting rod 8 is fixedly connected to the cartridge fixing member 9, and the motor 5 is connected to an electric wire, and the electric wire passes through the inner wall of the housing 1 and is connected to an external power supply.

[0024] Among them, the shape of the plug 15 is arcuate, and the outer diameter size of the plug 15 is adapted to the inner diameter size of the fitting groove 20, so that the fitting groove 20 and the plug 15 are more closely connected. The inner diameter size of the support member 10 is adapted to the outer diameter size of the cartridge 16, so that the cartridge fixing member 9 and the cartridge 16 are more closely connected.

[0025] It should be particularly noted that the cartridge fixing member 9 and the cartridge 16 are both provided with a large-area hole structure to facilitate the water flow out from the mesh holes.

[0026] In this solution: The user places the wafer in the inner groove 21, and then the upper cartridge 22 and the lower cartridge 17 are connected together by fitting to simply fix the wafer. Then the user puts the cartridge 16 into the cartridge fixing member 9, and the plug 15 is fitted with the fitting groove 20 to fix the cartridge 16. Finally, the rotating piece 25 is rotated, so that the inner rod 28 is subjected to a screw threading effect, and the soft piece 31 is pushed to make soft contact with the upper end of the wafer and compact the wafer. Then the motor 5 is started to drive the cartridge fixing member 9 to rotate to spin-dry the wafer by centrifugal force. After the spin-drying is completed, the cartridge 16 is pulled out obliquely upward along the cartridge fixing member 9, and the cartridge 16 is disassembled into the lower cartridge 17 and the upper cartridge 22, and the wafer can be taken out.

[0027] It should be noted that in this text, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprising", "including" or any other variant thereof are intended to cover non-exclusive inclusion, such that a process, method, article or device comprising a series of elements not only includes those elements but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device.

[0028] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A silicon wafer spin dryer, comprising a housing (1), a control button (2) is arranged at the front end of the housing (1), and a sealing cover (3) is arranged at the upper end of the housing (1), characterized in that: Inside the housing (1), there is a rotating member (4) for rotating the silicon wafer. One end of the rotating member (4) is fixedly connected to a cassette fixing member (9) for receiving the silicon wafer. The lower end of the cassette fixing member (9) is connected to a support member (10) to ensure the rotational stability of the cassette fixing member (9). Inside the cassette fixing member (9), there is a slidably connected cassette (16) for fixedly placing the silicon wafer; The rotating member (4) includes a motor (5). The upper end of the motor (5) is fixedly connected to a rotating rod (6). The outer surface of the rotating rod (6) is surrounded by a first bearing (7). The outer surface of the rotating rod (6) near the upper end of the first bearing (7) is fixedly connected to a connecting rod (8). The connecting rod (8) is fixedly connected to the cassette fixing member (9); The cassette fixing member (9) includes a fixing frame (13). Inside the fixing frame (13), there is a spring (14). One end of the spring (14) is fixedly connected to the inner wall of the fixing frame (13). The other end of the spring (14) is fixedly connected to a bolt (15). The bolt (15) is elastically connected to the fixing frame (13) through the spring (14). The cassette fixing member (9) is fixedly connected to the connecting rod (8) through the fixing frame (13); The cassette (16) includes a lower cassette (17) and an upper cassette (22). The outer surface of the lower cassette (17) is provided with a chute (18). Inside the chute (18), there is a card slot (19). The inner wall of the lower cassette (17) is provided with a fitting groove (20). Inside the lower cassette (17), there is an inner groove (21). The upper end of the upper cassette (22) is provided with a fitting body (23). Inside the upper cassette (22), there is a compaction component (24). The upper cassette (22) is fitted and connected to the fitting groove (20) through the fitting body (23); The compaction component (24) includes a rotating piece (25). Inside the rotating piece (25), there is a roller (26). The rotating piece (25) is rotatably connected to the upper cassette (22) through the roller (26). The lower end of the rotating piece (25) is fixedly connected to an outer rod (27). The inner rod (28) is threadedly connected to the inside of the outer rod (27). The lower end of the inner rod (28) is connected to a third bearing (29). The outside of the third bearing (29) is provided with a hard piece (30). The lower end of the hard piece (30) is connected to a soft piece (31).

2. The wafer spin dryer according to claim 1, wherein: The support member (10) includes a base (11). The upper end of the base (11) is provided with a second bearing (12). The fixing frame (13) is fixedly connected to the upper end of the second bearing (12). The base (11) is fixedly connected to the inner wall of the housing (1).

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