An aluminum reactor for CVD coating equipment

Abstract

The invention relates to the technical field of metal cutting tool and tool and die coating, and discloses an aluminum reactor for CVD coating equipment, comprising a cylinder, an aluminum reactor fixing plate is fixedly installed on the outer side of the cylinder, the upper cover of the aluminum reactor is locked by a locking clamp because it needs to be frequently disassembled to add aluminum particles, which can ensure the sealing performance and can be quickly disassembled and installed, a lifting ring and a handle are installed on the upper cover, which is convenient for carrying the entire aluminum reactor and disassembling and moving the upper cover, a heat sink is installed at the upper cover flange, which can reduce the temperature at the groove of the O-ring of the upper cover flange to a certain extent, prolong the service life of the O-ring of the upper cover flange, and reduce the cost, and the heat sink can also play the role of blocking the cylinder heating ring to prevent the cylinder heating ring from slipping, the air outlet plate is fixed by screws, which is convenient for disassembly for cleaning and maintenance, and the air inlet plate is fixed by buckle, the position will not be offset, and it is convenient to disassemble.

Description

Technical Field

[0001] The invention relates to the technical field of metal cutting tool and tool and die coating, in particular to an aluminum reactor for CVD coating equipment. Background Art

[0002] CVD is a method of forming a film on the surface of other materials (substrates) for metal processing workpieces, such as molds, cutting tools, wear-resistant and corrosion-resistant parts, etc., especially a thin film forming method. The characteristic of chemical vapor deposition is the chemical reaction of the compounds contained in the reaction gas. The desired main products of the chemical reaction are deposited on the surface of the substrate and form a coating or film there. Possible reaction by-products appear in gaseous form and must be removed from the gas mixture to ensure the performance of the film. This is achieved through the exhaust pipe. The service life of the coated cutting tools and molds will be greatly improved, and the coated parts will be more corrosion-resistant and wear-resistant.

[0003] In common technologies, the temperature measuring elements of the aluminum reactor are all distributed on the outside of the reactor, such as the top cover and the cylinder wall. There is no heat sink at the flange of the upper cover, and the air outlet plate is fixed by welding. However, these methods are also defective. The temperature measuring elements are distributed on the outside of the reactor, and the temperature measuring point is outside, which deviates from the actual temperature inside. The upper cover is locked with screws, which is inconvenient to disassemble and install, and the screws are easy to strip. Summary of the invention

[0004] Technical Solution

[0005] In order to achieve the above-mentioned purpose of accurately knowing the temperature inside the aluminum reactor, the upper cover can ensure the sealing and can be quickly disassembled and installed, the present invention provides the following technical scheme: an aluminum reactor for CVD coating equipment, comprising a cylinder, an aluminum reactor fixing plate is fixedly installed on the outer side of the cylinder, a temperature measuring thermocouple bracket is welded and installed on the bottom of the outer wall of the cylinder, a lower sealing plate is welded on the bottom of the cylinder, a lower sealing plate heating plate pressing plate is fixedly installed on the bottom of the lower sealing plate, an air outlet is provided at the bottom of the lower sealing plate, an upper cover flange heat sink is welded on the top of the cylinder, an upper cover flange is welded on the top of the upper cover flange heat sink, an upper cover flange O-ring groove is provided on the top side end of the upper cover flange, locking clamps are movably installed on the outer sides of the upper cover flange and the upper cover, an upper cover is movably installed on the top of the cylinder, and an air inlet plate, an air outlet plate and a temperature measuring thermocouple sleeve are respectively fixedly installed inside the cylinder.

[0006] Preferably, a lifting ring, a handle and an air inlet are respectively fixedly mounted on the top of the upper cover.

[0007] Preferably, a lower sealing plate temperature measuring point is provided on the outside of the bottom end of the lower sealing plate.

[0008] Preferably, the temperature measuring thermocouple sleeve is located inside the cylinder but isolated from the inner cavity of the cylinder.

[0009] Preferably, a heating plate is fixedly mounted on the lower sealing plate, and the heating plate is fixedly mounted on the bottom of the lower sealing plate by a lower sealing plate heating plate pressing plate.

[0010] Preferably, an O-ring groove is placed inside the O-ring groove of the upper cover flange.

[0011] Beneficial Effects

[0012] Compared with the prior art, the present invention provides an aluminum reactor for CVD coating equipment, which has the following beneficial effects:

[0013] 1. The aluminum reactor used for CVD coating equipment can measure the internal temperature of the aluminum reactor by inserting the temperature measuring element into the aluminum reactor through the temperature measuring thermocouple sleeve, so as to know the internal temperature of the aluminum reactor more accurately.

[0014] 2. The aluminum reactor used for CVD coating equipment has an upper cover that needs to be frequently disassembled to add aluminum particles, so it is locked by a locking clamp, which can ensure the sealing and can be quickly disassembled and installed. A lifting ring and a handle are installed on the upper cover to facilitate the transportation of the entire aluminum reactor and the disassembly and movement of the upper cover. An upper cover flange heat sink is installed at the upper cover flange, which can reduce the temperature at the groove of the upper cover flange O-ring to a certain extent, extend the service life of the upper cover flange O-ring, and reduce the cost. At the same time, the upper cover flange heat sink can also block the cylinder heating ring and prevent the cylinder heating ring from slipping. The air outlet plate is fixed by screws, which is convenient for disassembly for cleaning and maintenance. The air inlet plate is fixed by snap-on method, the position will not shift, and it is convenient to disassemble. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a front view of the overall structure of the present invention;

[0016] Figure 2 This is a diagram showing the internal structure of the cylinder of the present invention;

[0017] Figure 3 It is a bottom view of the overall structure of the present invention.

[0018] In the figure: 1-cylinder, 2-upper cover, 3-locking clamp, 4-temperature measuring thermocouple bracket, 5-air inlet plate, 6-air outlet plate, 7-lower sealing plate heating plate pressing plate, 8-upper cover flange heat sink, 9-aluminum reactor fixing plate, 10-temperature measuring thermocouple sleeve, 11-air outlet, 12-upper cover flange O-ring groove, 13-upper cover flange, 14-lower sealing plate, 15-lifting ring, 16-handle, 17-air inlet, 18-lower sealing plate temperature measuring point. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0020] See also Figure 1-3 , an aluminum reactor for CVD coating equipment, comprising a cylinder 1, an aluminum reactor fixing plate 9 is fixedly installed on the outer side of the cylinder 1, the aluminum reactor fixing plate 9 is welded to the approximately middle part of the cylinder 1, a temperature measuring thermocouple bracket 4 is welded to the bottom of the outer wall of the cylinder 1, a lower sealing plate 14 is welded to the bottom of the cylinder 1, a lower sealing plate heating plate pressing plate 7 is fixedly installed at the bottom of the lower sealing plate 14, an air outlet 11 is opened at the bottom of the lower sealing plate 14, and the air outlet 11 is welded at the center position of the bottom of the lower sealing plate 14, an upper cover flange heat sink 8 is welded to the top of the cylinder 1, an upper cover flange 13 is welded to the top of the upper cover flange heat sink 8, an upper cover flange O-ring groove 12 is opened at the top side end of the upper cover flange 13, and a locking clamp 3 is movably installed on the outer sides of the upper cover flange 13 and the upper cover 2, and the upper cover 2 and the upper cover flange 13 are locked by the locking clamp 3.

[0021] The temperature measuring element is inserted into the aluminum reactor through the temperature measuring thermocouple sleeve to measure the internal temperature of the aluminum reactor, so as to know the internal temperature of the aluminum reactor more accurately. The locking clamp 3 locks the upper cover 2 and the upper cover flange 13 to ensure the seal. The upper cover 2 is movably installed on the top of the cylinder 1, and the near-orifice plate 5, the outlet orifice plate 6 and the temperature measuring thermocouple sleeve 10 are fixedly installed inside the cylinder 1.

[0022] Preferably, a lifting ring 15 , a handle 16 and an air inlet 17 are respectively fixedly mounted on the top of the upper cover 2 .

[0023] Preferably, a lower sealing plate temperature measuring point 18 is provided on the outside of the bottom end of the lower sealing plate 14 .

[0024] Preferably, the temperature measuring thermocouple sleeve 10 is located inside the cylinder 1 but isolated from the inner cavity of the cylinder 1 .

[0025] Preferably, a heating plate is fixedly mounted on the lower sealing plate 14 , and the heating plate is fixedly mounted on the bottom of the lower sealing plate 14 by a lower sealing plate heating plate pressing plate 7 .

[0026] Preferably, an O-ring groove is placed inside the O-ring groove 12 of the upper cover flange.

[0027] The working principle and use process of the present invention are as follows: aluminum particles are placed between the air inlet plate 5 and the air outlet plate 6, and the aluminum reactor is rotated to an inverted position through the aluminum reactor fixing plate 9 with the help of an external rotating mechanism, that is, the upper cover 2 is located at the lower part, and the lower sealing plate 14 is located at the upper part. A resistance wire heating ring is installed around the outer side of the cylinder 1, and a heating plate is installed at the bottom of the lower sealing plate 14. The heating ring and the heating plate jointly heat the aluminum reactor, and the heat is transmitted to the inside of the aluminum reactor by heat conduction. According to the temperature feedback of the temperature measuring thermocouple installed on the lower sealing plate of the aluminum reactor and the temperature measuring thermocouple installed in the temperature measuring thermocouple sleeve 10, the heating on and off and the heating frequency of the heating ring and the heating plate are controlled, and finally the temperature control of the aluminum reactor is realized. When the temperature of the aluminum reactor reaches the set process temperature, a gas that can react with the aluminum particles is introduced at the air inlet 17 to generate the required reactant or gas, and enter the next process link through the air outlet 11.

[0028] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An aluminum reactor for a CVD coating device, comprising a barrel (1), characterized in that: An aluminum reactor fixing plate (9) is fixedly installed on the outer side of the cylinder (1), a temperature measuring thermocouple bracket (4) is welded to the bottom of the inner wall of the cylinder (1), a lower sealing plate (14) is welded to the bottom of the cylinder (1), a lower sealing plate heating plate pressing plate (7) is fixedly installed on the bottom of the lower sealing plate (14), an air outlet (11) is provided at the bottom of the lower sealing plate (14), and the air outlet (11) is welded at the center position of the bottom of the lower sealing plate (14), an upper cover flange heat sink (8) is welded to the top of the upper cover flange heat sink (8), and an upper cover flange (13) is welded to the top side end of the upper cover flange (13). Flange O-ring groove (12), the top of the cylinder (1) is movably mounted with an upper cover (2), the interior of the cylinder (1) is respectively fixedly mounted with an air inlet plate (5), an air outlet plate (6) and a temperature measuring thermocouple sleeve (10), the upper cover flange (13) and the outer side of the upper cover (2) are both movably mounted with locking clamps (3), a heating plate is fixedly mounted on the lower sealing plate (14), the heating plate is fixedly mounted on the bottom of the lower sealing plate (14) through a lower sealing plate heating plate pressing plate (7), a resistance wire heating ring is mounted around the outer side of the cylinder (1), a temperature measuring thermocouple is mounted on the lower sealing plate (14), and a temperature measuring thermocouple is installed in the temperature measuring thermocouple sleeve (10); A hanging ring (15), a handle (16) and an air inlet (17) are respectively welded to the top of the upper cover (2).

2. The aluminum reactor for CVD coating equipment according to claim 1, characterized in that: A lower sealing plate temperature measuring point (18) is provided at the bottom end of the lower sealing plate (14).

3. The aluminum reactor for CVD coating equipment according to claim 1, characterized in that: The temperature measuring thermocouple sleeve (10) is located inside the cylinder (1) but is isolated from the inner cavity of the cylinder (1).

4. The aluminum reactor for CVD coating equipment according to claim 1, characterized in that: An O-ring groove is placed inside the upper cover flange O-ring groove (12).

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