A decoupled dual-frame micro gyroscope

Abstract

The present invention discloses a decoupled dual-frame micro-gyroscope, which comprises: a left driving mass block group, a right driving mass block group, a left Coriolis mass block group and a right Coriolis mass block group, all of which are semi-enclosed structures with one side opening, and the openings of the left driving mass block group and the right driving mass block group are arranged relatively, and the left driving mass block group and the right driving mass block group are symmetrically distributed; the openings of the left Coriolis mass block group and the right Coriolis mass block group are arranged relatively; the left Coriolis mass block group and the left driving mass block group are sequentially sleeved on the periphery of the left detection mass block; the right Coriolis mass block group and the right driving mass block group are sequentially sleeved on the periphery of the right detection mass block. The decoupled dual-frame micro-gyroscope of the present invention realizes differential amplification of detection capacitance, improves the sensitivity of the structure, suppresses mechanical coupling of the micro-gyroscope, and improves the detection accuracy of the micro-gyroscope.

Description

Technical Field

[0001] The invention relates to the technical field of micromechanical systems, and in particular to a decoupled dual-frame micro-gyroscope with high detection accuracy. Background Art

[0002] A gyroscope is a sensor used to measure angular rate and is one of the core components of inertial technology. It plays an important role in modern industrial control, aerospace, national defense and military, and consumer electronics.

[0003] The development of gyroscope can be roughly divided into three stages:

[0004] The first stage is the traditional mechanical rotor gyroscope, which has high precision and plays an irreplaceable role in military strategic weapons such as nuclear submarines and intercontinental strategic missiles, but it is large in size, complex in manufacturing process, expensive, long in cycle and not suitable for mass production; the second stage is the optical detection gyroscope, mainly including laser gyroscope and fiber optic gyroscope, which mainly uses the Sagnac effect. Its advantages are no rotating parts and high precision. It plays an important role in navigation and aerospace, but it still faces the problems of large size, high cost and difficulty in integration; the third stage is the micromechanical gyroscope, which was developed in the 1990s. Its research started late, but it has developed rapidly with its unique advantages of small size, low power consumption, light weight, mass production, low price, strong overload resistance and integration. It is suitable for civil fields such as aircraft navigation, automobile manufacturing, digital electronics, industrial machinery and modern national defense and military fields such as drones, tactical missiles, smart bombs, and military aiming systems. It has broad application prospects and is attracting more and more attention.

[0005] At present, the commonly used driving methods of micromechanical gyroscopes include piezoelectric, electromagnetic, electrostatic, etc.; the detection methods include piezoresistive, piezoelectric, resonant tunneling, electron tunnel effect, capacitive, etc.

[0006] Regarding the driving mode, piezoelectric driving has the advantages of high precision and small error, but it has high requirements on the gyroscope structure design and is not easy to process and manufacture; electromagnetic driving has a large amplitude, but is difficult to control stably; although electrostatic driving has a small driving amplitude, it has the advantage of good stability.

[0007] As for the detection methods, the piezoresistive effect detection has low sensitivity and large temperature coefficient, which limits the further improvement of detection accuracy; the sensitivity of piezoelectric effect detection is prone to drift, requires frequent correction, is slow to return to zero, and is not suitable for continuous testing; the sensitivity of the resonant tunneling effect is an order of magnitude higher than that of the silicon piezoresistive effect, but the detection sensitivity is low. The problem is that the bias voltage is prone to drift due to the gyroscope drive, resulting in the gyroscope being unable to work stably; the manufacturing process of electronic tunneling effect devices is extremely complex, and the detection circuit is relatively difficult to implement, with a low yield rate, making it difficult to work normally and not conducive to integration. In particular, it is difficult to control the distance between the tunnel junction tip and the electrode plate at the nanometer level, and the normal operation of the sensor cannot be guaranteed.

[0008] The capacitance detection adopts a comb-tooth structure with high displacement resolution. The capacitance structure is suitable for MEMS processing. Nowadays, electrostatic drive and capacitance detection are still the mainstream processes for micro-gyroscope processing.

[0009] However, the detection accuracy of the micro-gyroscope has not been improved in the existing processing technology. There are two main reasons for this: first, due to errors in the gyroscope structure design, processing technology, etc., there is a large mechanical coupling between the driving mode and the detection mode, resulting in the coupling of orthogonal error interference signals in the micro-gyroscope output signal; second, because the gyroscope cannot avoid the influence of external linear acceleration, interference signals with the same frequency and direction are coupled into the micro-gyroscope output signal.

[0010] See Chinese invention patent CN109737943A, which discloses a high-precision MEMS gyroscope. The micro-gyroscope structure disclosed in the patent is a frame structure, and its innovation lies in connecting the inner frame of the mass block through the interference mode isolation structure, so that the interference mode is far away from the working mode, but at the same time, there is a large mechanical coupling between the micro-gyroscope driving mode and the detection mode of the structure, which will cause a large orthogonal error. Continue to refer to Chinese invention patent CN108507555A, which discloses a MEMS micro-mechanical fully decoupled closed-loop gyroscope. The micro-gyroscope structure disclosed in the patent is driven along the X direction and detected along the Y direction, and structural decoupling is taken into account, but it cannot avoid the influence of external linear acceleration. In addition, it cannot keep the common-mode interference mode away from the reverse working mode during micro-gyroscope detection, which will eventually affect the output signal of the micro-gyroscope and affect the detection accuracy.

[0011] Therefore, it is urgent to propose a new technical solution to solve the problem of low detection accuracy of micro-gyroscopes in the prior art. Summary of the invention

[0012] The purpose of the present invention is to solve the problems existing in the prior art and provide a decoupled dual-frame micro-gyroscope with high detection accuracy. The technical solution adopted is as follows:

[0013] A decoupled dual-frame micro-gyroscope, comprising:

[0014] A left driving mass group and a right driving mass group, wherein the left driving mass group and the right driving mass group are both semi-enclosed structures with an opening on one side, and the openings of the left driving mass group and the right driving mass group are arranged opposite to each other;

[0015] A left Coriolis mass block group and a right Coriolis mass block group, wherein the left Coriolis mass block group and the right Coriolis mass block group are both semi-enclosed structures with one side opening, and the openings of the left Coriolis mass block group and the right Coriolis mass block group are arranged opposite to each other;

[0016] A left detection mass block and a right detection mass block, wherein the left Coriolis mass block group and the left driving mass block group are sequentially sleeved on the periphery of the left detection mass block, and the openings of the left Coriolis mass block group and the left driving mass block group face the same direction;

[0017] The right Coriolis mass group and the right driving mass group are sequentially sleeved on the periphery of the right detection mass group, and the openings of the right Coriolis mass group and the right driving mass group are oriented in the same direction.

[0018] The above technical solution further includes an outer frame, and the left driving mass block group and the right driving mass block group are accommodated in the outer frame.

[0019] Furthermore, the left driving mass block group and the right driving mass block group are symmetrically distributed, the left driving mass block group and the right driving mass block group are connected by two driving mass block group decoupling beams, the driving mass block group decoupling beams are fixed on the driving mass block group decoupling beam anchor points, and the driving mass block group decoupling beam anchor points are fixedly connected to the micro-gyroscope substrate,

[0020] Further, the driving mass group decoupling beam is configured to force the left driving mass group and the right driving mass group to keep moving in opposite directions.

[0021] Further, the left driving mass block group and the right driving mass block group each include two driving mass blocks and a connecting arm connecting the two driving mass blocks, each of the driving mass blocks has a first driving end and a second driving end, and both ends of the connecting arm are respectively connected to the first driving ends of the two driving mass blocks, so that the left driving mass block group and the right driving mass block group respectively form a semi-enclosed structure;

[0022] Further, the second driving end of one of the driving mass blocks in the left driving mass block group is connected to the second driving end of one of the driving mass blocks in the right driving mass block group through a first driving mass block group decoupling beam,

[0023] Further, the second driving end of another driving mass in the left driving mass group is connected to the second driving end of another driving mass in the right driving mass group via a second driving mass group decoupling beam.

[0024] Further, each of the driving mass blocks is provided with two driving folded beams, the two driving folded beams are respectively located at a first driving end and a second driving end of the driving mass block, and the two driving folded beams are close to the Coriolis mass block;

[0025] Furthermore, each of the driving mass blocks is further provided with two driving electrodes and one driving feedback electrode, and the driving electrodes and the driving feedback electrode are arranged on a side away from the Coriolis mass block.

[0026] Furthermore, the first driving end and the second driving end of each driving mass block are respectively provided with a driving folded beam anchor point, and the driving folded beam is fixedly connected to the micro-gyroscope substrate through the driving folded beam anchor point, and the axial direction of the driving folded beam is the same as the center line direction of the first driving end and the second driving end of the driving mass block.

[0027] Further, the left Coriolis mass block group and the right Coriolis mass block group each include two Coriolis mass blocks and a connecting rod connecting the two Coriolis mass blocks, each of the Coriolis mass blocks has a first end and a second end, and the two ends of the connecting rod are respectively connected to the first ends of the two Coriolis mass blocks, so that the left Coriolis mass block group and the right Coriolis mass block group respectively form a semi-enclosed structure;

[0028] Furthermore, a detection decoupling beam is respectively provided at the first end and the second end of each Coriolis mass block, one end of each detection decoupling beam is connected to the Coriolis mass block, and the other end is connected to the driving mass block, and the detection decoupling beam is arranged so that the Coriolis mass block moves with the driving mass block.

[0029] Furthermore, the detection decoupling beam is arranged along the axial direction of the connecting rod, and the stiffness of the detection decoupling beam along the axial direction of the connecting rod is greater than its stiffness along the direction of the line connecting the first end and the second end of the Coriolis mass.

[0030] Furthermore, each Coriolis mass block is provided with two orthogonal correction electrodes, and the two orthogonal correction electrodes are respectively close to the first end and the second end of the Coriolis mass block.

[0031] Further, the two Coriolis masses of the left Coriolis mass group are arranged relative to each other, and the orthogonal correction electrode at the first end or the second end of one Coriolis mass group in the left Coriolis mass group and the orthogonal correction electrode at the second end or the first end of another Coriolis mass group in the left Coriolis mass group are adjusted simultaneously, so that the left Coriolis mass group realizes deflection from the first angular position to the second angular position;

[0032] Furthermore, the two Coriolis mass blocks of the right Coriolis mass block group are arranged relative to each other, and the orthogonal correction electrode at the first end or the second end of one Coriolis mass block in the right Coriolis mass block group and the orthogonal correction electrode at the second end or the first end of another Coriolis mass block in the right Coriolis mass block group are adjusted simultaneously, so that the right Coriolis mass block group realizes deflection from the third angular position to the fourth angular position.

[0033] Furthermore, each of the Coriolis mass blocks has a driving decoupling beam, and the two Coriolis mass blocks in the left Coriolis mass block group are respectively connected to the left detection mass block through the driving decoupling beam, and the two Coriolis mass blocks in the right Coriolis mass block group are respectively connected to the right detection mass block through the driving decoupling beam.

[0034] Furthermore, the drive decoupling beam includes an "H"-shaped structure, and the drive decoupling beam is distributed along the center line direction of the first end and the second end of the Coriolis mass block, and the stiffness of the drive decoupling beam along the axial direction of the connecting rod is smaller than its stiffness along the center line direction of the first end and the second end of the Coriolis mass block.

[0035] Furthermore, four detection electrodes are respectively arranged at the center positions of the left detection mass block and the right detection mass block, and the four detection electrodes are arranged in two rows, each row having two detection electrodes.

[0036] Four detection feedback electrodes are also respectively arranged on the left detection mass block and the right detection mass block. The four detection feedback electrodes are respectively arranged at the four corners of the left detection mass block or the right detection mass block.

[0037] Furthermore, four detection folding beams are respectively arranged on the left detection mass block and the right detection mass block, and each of the detection folding beams is fixedly connected to the micro-gyroscope substrate through a detection folding beam anchor point.

[0038] Further, the four detection folding beams are arranged on the periphery of the left detection mass block, and the four detection folding beams are respectively close to the four corners of the left detection mass.

[0039] Further, the four detection folding beams are arranged on the periphery of the right detection mass block, and the four detection folding beams are respectively close to the four corners of the right detection mass;

[0040] Furthermore, the detection folding beam is distributed along the outer wall of the left detection mass block or the right detection mass block, and the distribution direction of the detection folding beam is parallel to the axial direction of the connecting rod of the Coriolis mass block.

[0041] Furthermore, the left detection mass block and the right detection mass block are connected by a detection mass block decoupling beam that assists the left detection mass block and the right detection mass block in maintaining reverse motion. The detection mass block decoupling beam is located at the center of the outer frame, and the detection mass block decoupling beam is fixedly connected to the micro-gyroscope substrate through a detection mass block decoupling beam anchor point.

[0042] Further, the driving mass group decoupling beam includes a first deformable beam connected to the left driving mass group, a third deformable beam connected to the right driving mass group, a second deformable beam connecting the first deformable beam and the third deformable beam, and a support beam connected to the anchor point of the driving mass group decoupling beam.

[0043] Further, when the left driving mass group moves in the first direction relative to the driving mass group decoupling beam, the first deformation beam of the driving mass group decoupling beam undergoes elastic deformation under the traction of the left driving mass group, and the elastic deformation of the first deformation beam is transmitted to the third deformation beam under the action of the second deformation beam, and the third deformation beam pushes the right driving mass group to move in the second direction under the action of the elastic deformation.

[0044] Further, when the left driving mass block group moves in the first direction, the left driving mass block group pulls the first deformable beam connected thereto to stretch in the first direction, and the stretched first deformable beam drives the third deformable beam through the second deformable beam to push the right driving mass block group to move in the second direction.

[0045] Further, when the left driving mass block group moves in the second direction relative to the driving mass block group decoupling beam, the first deformation beam of the driving mass block group decoupling beam undergoes elastic deformation under the extrusion of the left driving mass block group, and the elastic deformation of the first deformation beam is transmitted to the third deformation beam under the action of the second deformation beam, and the third deformation beam pushes the right driving mass block group to move in the first direction under the action of the elastic deformation.

[0046] Further, when the left driving mass block group moves in the second direction, the left driving mass block group squeezes the first deformable beam connected thereto to compress it in the second direction, and the compressed first deformable beam drives the third deformable beam through the second deformable beam to push the right driving mass block group to move in the first direction.

[0047] Furthermore, the first direction is opposite to the second direction.

[0048] Furthermore, the first deformable beam, the second deformable beam, the third deformable beam and the support beam form an "E"-shaped structure, the first deformable beam, the third deformable beam and the support beam are parallel to each other, and one end of the support beam is connected to the center position of the second deformable beam.

[0049] Furthermore, the anchor point of the driving mass block group decoupling beam is fixedly connected to the base of the decoupled micro-gyroscope, and the cross-sectional shape of the anchor point of the driving mass block group decoupling beam is a two-legged harpoon type, which has a connecting groove for accommodating the second deformation beam, and one end of the second deformation beam is connected from the notch of the connecting groove to the bottom of the connecting groove, and the connecting groove faces the detection mass block decoupling beam.

[0050] Further, the detection mass decoupling beam includes a first structural part connected to the left detection mass and a second structural part connected to the right detection mass.

[0051] Furthermore, when the left detection mass block moves away from the detection mass block decoupling beam, the first structural portion of the detection mass block decoupling beam undergoes elastic deformation under the traction of the left detection mass block, and the elastic deformation of the first structural portion of the detection mass block decoupling beam causes the second structural portion of the detection mass block decoupling beam to also undergo elastic deformation, thereby causing the second structural portion of the detection mass block decoupling beam to push the right detection mass block to move away from the detection mass block decoupling beam.

[0052] Furthermore, when the left detection mass block moves closer to the detection mass block decoupling beam, the first structural portion of the detection mass block decoupling beam undergoes elastic deformation under the compression of the left detection mass block, and the elastic deformation of the first structural portion of the detection mass block decoupling beam causes the second structural portion of the detection mass block decoupling beam to also undergo elastic deformation, thereby causing the second structural portion of the detection mass block decoupling beam to pull the right detection mass block to move closer to the detection mass block decoupling beam;

[0053] Furthermore, the first structural portion of the detection mass block decoupling beam and the second structural portion of the detection mass block decoupling beam are axisymmetric, the elastic deformation of the first structural portion of the detection mass block decoupling beam and the elastic deformation of the first structural portion of the detection mass block decoupling beam are also axisymmetric, and the axis of symmetry is the axis of symmetry of the left detection mass block and the right detection mass block.

[0054] Further, the detection mass decoupling beam comprises four detection mass decoupling elastic beams, four detection mass decoupling intermediate connecting beams, four detection mass decoupling supporting beams, a left detection mass decoupling end connecting beam and a right detection mass decoupling end connecting beam.

[0055] Furthermore, one end of the left detection mass block decoupling end connecting beam is connected to the left detection mass block, and the other end is connected to the middle part of a detection mass block decoupling elastic beam, one end of the right detection mass block decoupling end connecting beam is connected to the right detection mass block, and the other end is connected to the middle part of another detection mass block decoupling elastic beam, the detection mass block decoupling elastic beam and the detection mass block decoupling middle connecting beam are alternately connected end to end in sequence, so that the four detection mass block decoupling elastic beams and the four detection mass block decoupling middle connecting beams are alternately connected end to end to form a closed loop, one end of each detection mass block decoupling support beam is connected to the detection mass block decoupling beam anchor point, and the other end is connected to the middle part of a corresponding detection mass block decoupling middle connecting beam,

[0056] Further, the partial structure of the detection mass decoupling beam located on the side of the symmetry axis close to the left detection mass block is called the first structural part, and the partial structure of the detection mass decoupling beam located on the side of the symmetry axis close to the right detection mass block is called the second structural part;

[0057] Further, each detection mass decoupling elastic beam comprises a U-shaped portion in the middle and two L-shaped portions at both ends, and the two L-shaped portions at both ends of the detection mass decoupling elastic beam are symmetrically arranged about the U-shaped portion in the middle of the detection mass decoupling elastic beam.

[0058] Further, the opening direction of the L-shaped portion at the end of the detection mass decoupling elastic beam is toward the anchor point of the detection mass decoupling beam.

[0059] Further, the decoupling end connecting beam of the left detection mass block is connected to the bottom of one of the U-shaped portions, and the decoupling end connecting beam of the right detection mass block is connected to the bottom of the other U-shaped portion;

[0060] Furthermore, each detection mass block has an L-shaped decoupling intermediate connecting beam.

[0061] Furthermore, one end of each detection mass decoupling support beam is connected to the detection mass decoupling beam anchor point, and the other end is connected to the corner point of the L-shaped structure, so that the four detection mass decoupling support beams form a diagonal line in the closed loop.

[0062] Furthermore, the opening direction of the L-shaped detection mass block decoupling intermediate connecting beam is oriented toward the detection mass block decoupling beam anchor point.

[0063] Compared with the prior art, the present invention has one or more of the following beneficial effects:

[0064] 1. The present invention provides a decoupled dual-frame micro-gyroscope, which ensures that the micro-gyroscope can resist the influence of external linear acceleration during the detection process, thereby improving the detection accuracy; and the micro-gyroscope realizes differential amplification of the detection capacitor, thereby improving the sensitivity of the decoupled micro-gyroscope, suppressing the mechanical coupling between the micro-gyroscope driving mode and the detection mode, so that the micro-gyroscope can maintain horizontal up and down movement, thereby greatly reducing the error; the micro-gyroscope of the present invention has a reasonable and compact structural design, small error, and high detection accuracy.

[0065] 2. The decoupled dual-frame micro-gyroscope of the present invention improves the detection accuracy of the micro-gyroscope, ensures that the detection mass block moves in the opposite direction during detection, and keeps the common-mode interference mode away from the reverse working mode.

[0066] 3. The frame structure of the decoupled double-frame micro-rotor described in the present invention is equipped with a driving mass block group, a Coriolis mass block group, and a detection mass block. The detection mass block will not move during driving, has a decoupling function, and suppresses the mechanical coupling between the driving mode and the detection mode. BRIEF DESCRIPTION OF THE DRAWINGS

[0067] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0068] Figure 1 It is a schematic diagram of the overall structure of the micro-gyroscope of the present invention;

[0069] Figure 2 It is a schematic diagram of the micro-gyroscope driving structure of the present invention;

[0070] Figure 3 It is a schematic diagram of the micro-gyroscope detection structure of the present invention;

[0071] Figure 4 is a schematic diagram of the structure of the detection mass decoupling beam of the present invention;

[0072] Figure 5 It is a schematic diagram of the structure of the driving mass block decoupling beam of the present invention.

[0073] Among them, 1a-left frame structure; 1b-right frame structure;

[0074] 2a-left driving mass block group (also referred to as the first driving mass block group); 2b-right driving mass block group (also referred to as the second driving mass block group);

[0075] 3a-first driving electrode; 3b-second driving electrode; 3c-third driving electrode; 3d-fourth driving electrode; 3e-fifth driving electrode; 3f-sixth driving electrode; 3g-seventh driving electrode; 3h-eighth driving electrode;

[0076] 4a-first driving feedback electrode; 4b-second driving feedback electrode; 4c-third driving feedback electrode; 4d-fourth driving feedback electrode;

[0077] 5a-first driving folding beam; 5b-second driving folding beam; 5c-third driving folding beam; 5d-fourth driving folding beam; 5e-fifth driving folding beam; 5f-sixth driving folding beam; 5g-seventh driving folding beam; 5h-eighth driving folding beam;

[0078] 6a-first driving decoupling beam; 6b-second driving decoupling beam; 6c-third driving decoupling beam; 6d-fourth driving decoupling beam;

[0079] 7a- first driving mass group decoupling beam; 7b- second driving mass group decoupling beam;

[0080] 8a-left detection mass block (also referred to as the first detection mass block); 8b-right detection mass block (also referred to as the second detection mass block);

[0081] 9a-first detection electrode; 9b-second detection electrode; 9c-third detection electrode; 9d-fourth detection electrode; 9e-fifth detection electrode; 9f-sixth detection electrode; 9g-seventh detection electrode; 9h-eighth detection electrode;

[0082] 10a-first detection feedback electrode; 10b-second detection feedback electrode; 10c-third detection feedback electrode; 10d-fourth detection feedback electrode; 10e-fifth detection feedback electrode; 10f-sixth detection feedback electrode; 10g-seventh detection feedback electrode; 10h-eighth detection feedback electrode;

[0083] 11a-first detection folding beam; 11b-second detection folding beam; 11c-third detection folding beam; 11d-fourth detection folding beam; 11e-fifth detection folding beam; 11f-sixth detection folding beam; 11g-seventh detection folding beam; 11h-eighth detection folding beam;

[0084] 12a-first detection decoupling beam; 12b-second detection decoupling beam; 12c-third detection decoupling beam; 12d-fourth detection decoupling beam; 12e-fifth detection decoupling beam; 12f-sixth detection decoupling beam; 12g-seventh detection decoupling beam; 12h-eighth detection decoupling beam;

[0085] 13- detection mass decoupling beam;

[0086] 14a-left Coriolis mass block group (also referred to as the first Coriolis mass block group); 14b-right Coriolis mass block group (also referred to as the second Coriolis mass block group);

[0087] 15a-first driving folding beam anchor point; 15b-second driving folding beam anchor point; 15c-third driving folding beam anchor point; 15d-fourth driving folding beam anchor point; 15e-fifth driving folding beam anchor point; 15f-sixth driving folding beam anchor point; 15g-seventh driving folding beam anchor point; 15h-eighth driving folding beam anchor point;

[0088] 16a-first detection folding beam anchor point; 16b-second detection folding beam anchor point; 16c-third detection folding beam anchor point; 16d-fourth detection folding beam anchor point; 16e-fifth detection folding beam anchor point; 16f-sixth detection folding beam anchor point; 16g-seventh detection folding beam anchor point; 16h-eighth detection folding beam anchor point;

[0089] 17a-first orthogonal correction electrode; 17b-second orthogonal correction electrode; 17c-third orthogonal correction electrode; 17d-fourth orthogonal correction electrode; 17e-fifth orthogonal correction electrode; 17f-sixth orthogonal correction electrode; 17g-seventh orthogonal correction electrode; 17h-eighth orthogonal correction electrode;

[0090] 18a- first driving mass group decoupling beam anchor point; 18b- second driving mass group decoupling beam anchor point;

[0091] 19- anchor point of detection mass decoupling beam;

[0092] 710-first deformation beam; 720-second deformation beam; 730-third deformation beam; 740-support beam;

[0093] 1310- elastic beam for decoupling the detection mass block; 1320- middle connecting beam for decoupling the detection mass block; 1330- supporting beam for decoupling the detection mass block; 1340- end connecting beam for decoupling the first detection mass block; 1350- end connecting beam for decoupling the second detection mass block;

[0094] A-first direction; B-second direction. DETAILED DESCRIPTION

[0095] The following will be combined with the accompanying drawings of the embodiments of the present invention to clearly and completely describe the technical solutions of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0096] In the description of the present invention, it should be understood that the terms "upper", "lower", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In the description of the present invention, "plurality" means two or more, unless otherwise clearly and specifically defined.

[0097] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0098] The gist of the present invention is further explained below with reference to the accompanying drawings and embodiments.

[0099] Example:

[0100] The gyroscope in the prior art has always had the problem of mechanical coupling during movement, which reduces the detection accuracy of the gyroscope. In order to suppress the mechanical coupling, a Coriolis mass block is added to the gyroscope, but the processing accuracy requirements of the Coriolis mass block are very high. If the installed Coriolis mass block cannot meet the required accuracy requirements, the Coriolis mass block will deflect in the gyroscope, and this deflection cannot be adjusted, which will increase the overall orthogonal error and thus affect the detection accuracy of the gyroscope.

[0101] In view of the problems existing in the prior art, the present invention provides a decoupled micro-gyroscope, which comprises: two left-right symmetrical frame structures (a left frame structure 1a and a right frame structure 1b), the left frame structure 1a and the right frame structure 1b together constitute an outer frame, the left frame structure 1a and the right frame structure 1b are both configured to accommodate a driving mass block group, a Coriolis mass block group and a detection mass block, the driving mass block group, the Coriolis mass block group and the detection mass block are arranged in sequence from the outside to the inside in the left frame structure 1a and the right frame structure 1b, the driving mass block group, the Coriolis mass block group and the detection mass block are connected in sequence through a decoupling beam structure, the decoupling beam structure and the folding beam structure are fixedly connected to a micro-gyroscope substrate through anchor points, the driving mass block group, the Coriolis mass block group and the detection mass block are all provided with electrodes, and the Coriolis mass block group is provided with an orthogonal correction electrode.

[0102] In one embodiment, see Figure 1-3The decoupled micro-gyroscope structure described in the present invention is composed of two left-right symmetrical frame structures (left frame structure 1a and right frame structure 1b), wherein each of the frame structures includes a driving mass block group 2a, 2b, a Coriolis mass block group 14a, 14b, a detection mass block 8a, 8b, a beam structure 5a~5h, 6a~6d, 7a~7b, 11a~11h, 12a~12h, 13, electrodes 3a~3h, 4a~4d, 9a~9h, 10a~10h, 17a~17h and anchor points 15a~15h, 16a~16h, 18a~18b, 19.

[0103] Among them, the frame structures 1a and 1b are respectively equipped with driving mass blocks 2a and 2b, Coriolis mass blocks 14a and 14b, and detection mass blocks 8a and 8b from the outside to the inside. The three different mass blocks are connected by decoupling beams 6a-6d, 7a-7b, 12a-12h, and 13, and then fixed and supported by folding beams 5a-5h, 11a-11h and anchor points 15a-15h, 16a-16h, 18a-18b, and 19. Among them, the driving mass blocks 2a and 2b are respectively provided with driving electrodes 3a-3h and driving feedback electrodes 4a-4d on the upper and lower sides, and the Coriolis mass blocks 14a and 14b are provided with orthogonal correction electrodes 17a-17h in the middle, and the detection mass blocks 8a and 8b are provided with detection electrodes 9a-9h and detection feedback electrodes 10a-10h in the middle. The above-mentioned structure basically forms the micro-gyroscope structure described in the present invention.

[0104] In order to better illustrate that the structure of the decoupled micro-gyroscope described in the present invention can establish a three-dimensional rectangular coordinate system, in one embodiment, the mass center of the entire two frame structures can be used as the coordinate origin, the direction parallel to the central axis of each frame structure is the Y axis, the direction parallel to the center line of the cross section of each frame structure is the X axis, and the X axis and the Y axis both pass through the coordinate origin, and the Z axis is determined by using the Y axis and the X axis as the coordinate axes, and a three-dimensional rectangular coordinate system is established through the X axis, the Y axis and the Z axis (the coordinate system is established on Figure 1 As reflected in FIG. 1 , the left frame structure 1a and the right frame structure 1b are symmetrical about the Y axis.

[0105] Continue to see Figure 1-3, the frame structures 1a and 1b are respectively provided with driving mass blocks 2a and 2b, Coriolis mass blocks 14a and 14b, and detection mass blocks 8a and 8b from the outside to the inside. In one embodiment, in the present invention, each of the frame structures is provided with a driving mass block group, the driving mass block group is a rectangular frame with an opening on one side, and the opening direction is toward the coordinate origin, and the driving mass blocks in the left frame structure and the driving mass blocks in the right frame structure are symmetrical about the Y axis; therefore, the decoupled micro-gyroscope described in the present invention has a total of two driving mass blocks, namely the left driving mass block group 2a and the right driving mass block group 2b. Of course, any driving mass block group includes two driving mass blocks arranged opposite to each other, and the two driving mass blocks are connected by a connecting arm, so that the driving mass block group is a rectangular frame with an opening on one side.

[0106] In one embodiment, in the present invention, each of the driving mass block groups is provided with a Coriolis mass block group, the Coriolis mass block group is a rectangular frame with an opening on one side, and the opening is oriented toward the coordinate origin, and the Coriolis mass block group in the left frame structure and the Coriolis mass block group in the right frame structure are symmetrical about the Y-axis; therefore, there are a total of two Coriolis mass block groups in the decoupled micro-gyroscope described in the present invention, and any one of the Coriolis mass block groups includes two relatively arranged Coriolis mass blocks, and the two Coriolis mass blocks are connected by a connecting rod, so that the Coriolis mass block group is a rectangular frame with an opening on one side.

[0107] In one embodiment, one detection mass block is provided in each of the Coriolis mass block groups in the present invention, and the detection mass block is a cubic frame structure, and the detection mass block in the left frame structure and the detection mass block in the right frame structure are symmetrical about the Y-axis; therefore, there are a total of two detection mass blocks in the decoupled micro-gyroscope described in the present invention.

[0108] In a further embodiment, the decoupling beam structures 6a-6d, 7a-7b, 12a-12h, 13 of the present invention include driving decoupling beams 6a-6d, detecting decoupling beams 12a-12h, driving mass block group decoupling beams 7a, 7d, and detecting mass block decoupling beams 13; the folded beam structures 5a-5h, 11a-11h include driving folded beams 5a-5h and detecting folded beams 11a-11h; the electrodes 3a-3h, 4a-4d, 9a-9h, 10a- 10h, 17a~17h include driving electrodes 3a~3h, driving feedback electrodes 4a~4d, orthogonal correction electrodes 17a~17h, detection electrodes 9a~9h, and detection feedback electrodes 10a~10h; the anchor points 15a~15h, 16a~16h, 18a~18b, 19 include driving folding beam anchor points 15a~15h, detection folding beam anchor points 16a~16h, driving mass block group decoupling beam anchor points 18a, 18b, and detection mass block decoupling beam anchor point 19.

[0109] The left driving mass block group 2a and the right driving mass block group 2b described in the present invention are connected by the upper and lower driving mass block group decoupling beams 7a and 7b. The left driving mass block group 2a is located on the left side of the micro-gyroscope structure and is fixedly supported by four driving folded beams 5a to 5d and four driving folded beam anchors 15a to 15d. Four driving electrodes 3a to 3d and two driving feedback electrodes 4a and 4b are arranged on the upper and lower sides of the left driving mass block group 2a. Similarly, the right driving mass block group 2b is located on the right side of the micro-gyroscope structure and is connected to the four driving folded beam anchors 15e to 15h through four driving folded beams 5e to 5h. Four driving electrodes 3e to 3h and two driving feedback electrodes 4c and 4d are arranged on the upper and lower sides of the right driving mass block group 2b.

[0110] In a further embodiment, see Figure 2, the driving mass block group is a rectangular frame with an opening on one side, the driving folding beam anchor point is arranged on the inner wall of the rectangular frame, the driving folding beam anchor points include four, and the four driving folding beam anchor points are respectively connected to the four corner points of the rectangular frame, each driving folding beam anchor point is connected to a driving folding beam, and the driving folding beams are distributed along the X-axis direction. The Coriolis mass block group and the driving mass block group are connected by a detection decoupling beam, the detection decoupling beam is distributed along the Y-axis, the stiffness of the detection decoupling beam along the detection direction is less than its stiffness along the driving direction (the stiffness of the detection decoupling beam along the axis direction of the connecting rod is greater than its stiffness along the direction of the line connecting the first end and the second end of the Coriolis mass block); two driving electrodes are respectively arranged at both ends of the driving mass block group along the Y-axis direction, the driving electrodes are located outside the rectangular frame forming the driving mass block group, and the two driving electrodes are arranged oppositely on a side of the rectangular frame, and one of the two driving electrodes close to the coordinate origin is arranged oppositely to the driving feedback electrode.

[0111] There are a total of 8 driving folding beams 5a~5h described in the present invention, and their structural dimensions are consistent. The first to fourth driving folding beams 5a~5d are respectively located on the inner side around the left driving mass block group 2a, and are respectively connected to the left driving mass block group 2a and the first to fourth driving folding beam anchor points 15a~15d, and are fixedly supported by the first driving folding beam anchor point 15a to the fourth driving folding beam anchor point 15d; the fifth to eighth driving folding beams 5e~5h are located on the inner side around the right driving mass block group 2b, and are respectively connected to the right driving mass block group 2b and the fifth to eighth driving folding beam anchor points 15e~15h, and are fixedly supported by the fifth to eighth driving folding beam anchor points 15e~15h.

[0112] There are a total of 8 detection folding beams 11a~11h described in the present invention, and their structural dimensions are consistent. The first to fourth detection folding beams 11a~11d are respectively located on the outside of the left detection mass block 8a, and are respectively connected to the left detection mass block 8a and the first to fourth detection folding beam anchor points 16a~16d, and are fixedly supported by the first to fourth detection folding beam anchor points 16a~16d; the fifth to eighth detection folding beams 11e~11h are located on the outside of the right detection mass block 8b, and are respectively connected to the right detection mass block 8b and the fifth to eighth detection folding beam anchor points 16e~16h, and are fixedly supported by the fifth to eighth detection folding beam anchor points 16e~16h.

[0113] In a further embodiment, the driving mass group decoupling beam anchor point is a two-legged fork structure, the driving mass group decoupling beam anchor point includes two, the two driving mass group decoupling beam anchor points are symmetrical about the X-axis, and one driving mass group decoupling beam anchor point is symmetrical about the Y-axis. The driving mass group decoupling beam includes two, the driving mass group decoupling beam is a tripod structure, one driving mass group decoupling beam is correspondingly plug-connected with one driving mass group decoupling beam anchor point, the driving mass group decoupling beam is symmetrical about the Y-axis, and the driving mass group of the left frame structure is connected to the driving mass group of the right frame structure through the driving mass group decoupling beam.

[0114] The number of the Coriolis mass block groups 14a and 14b described in the present invention includes two, namely the left Coriolis mass block group 14a and the right Coriolis mass block group 14b, which have the same structural dimensions and are symmetrical along the Y axis. The left Coriolis mass block group 14a is located on the left side of the micro-gyroscope structure, surrounded by the left driving mass block group 2a, and connected to the left driving mass block group 2a through four detection decoupling beams 12a~12d; four orthogonal correction electrodes 17a~17d are arranged inside the left Coriolis mass block group 14a, which are used to adjust the torsion component of the left Coriolis mass block group 14a so that it moves horizontally up and down along the Y axis. Similarly, the right Coriolis mass block group 14b is located on the right side of the micro-gyroscope structure, surrounded by the right driving mass block 2b, and connected to the right driving mass block group 2b through four detection decoupling beams 12e~12h; four orthogonal correction electrodes 17e~17h are arranged inside the right Coriolis mass block group 14b, which are used to adjust the torsional component of the right Coriolis mass block group 14b so that it moves horizontally up and down along the Y-axis direction.

[0115] In one embodiment, the left Coriolis mass block group and the right Coriolis mass block group each include two Coriolis mass blocks and a connecting rod connecting the two Coriolis mass blocks, each of the Coriolis mass blocks has a first end and a second end, and the two ends of the connecting rod are respectively connected to the first ends of the two Coriolis mass blocks, so that the left Coriolis mass block group and the right Coriolis mass block group form a semi-enclosed structure respectively; two orthogonal correction electrodes are provided on each Coriolis mass block, and the two orthogonal correction electrodes are respectively close to the first end and the second end of the Coriolis mass block,

[0116] The two Coriolis masses of the left Coriolis mass group are arranged opposite to each other, and the orthogonal correction electrode at the first end or the second end of one Coriolis mass group in the left Coriolis mass group and the orthogonal correction electrode at the second end or the first end of another Coriolis mass group in the left Coriolis mass group are adjusted simultaneously, so that the left Coriolis mass group realizes deflection from the first angular position to the second angular position;

[0117] The two Coriolis mass blocks of the right Coriolis mass block group are arranged relative to each other, and the orthogonal correction electrode at the first end or the second end of one Coriolis mass block in the right Coriolis mass block group and the orthogonal correction electrode at the second end or the first end of another Coriolis mass block in the right Coriolis mass block group are adjusted simultaneously, so that the right Coriolis mass block group realizes deflection from the third angular position to the fourth angular position.

[0118] In a further embodiment, see Figure 2-3 , two of the orthogonal correction electrodes are respectively provided at the two ends of the Coriolis mass block group along the Y-axis direction, the Coriolis mass block is a rectangular frame with an opening on one side, the detection mass block is accommodated in the rectangular frame from the opening, and the drive decoupling beams are respectively provided at the two ends of the detection mass block along the Y-axis direction, the two drive decoupling beams include an "H"-shaped structure, the Coriolis mass block and the detection mass block are connected by the drive decoupling beams; the stiffness of the drive decoupling beam along the driving direction is less than its stiffness along the detection direction (the stiffness of the drive decoupling beam along the axial direction of the connecting rod is less than its stiffness along the direction connecting the first end and the second end of the Coriolis mass block).

[0119] There are a total of 4 drive decoupling beams 6a~6d described in the present invention, and their structural dimensions are consistent, and their shapes are "H"-shaped or other shapes. The stiffness of the drive decoupling beams 6a~6d along the driving direction is much smaller than the stiffness along the detection direction. The first drive decoupling beam 6a and the second drive decoupling beam 6b are connected to the left Coriolis mass block group 14a and the left detection mass block 8a; the third drive decoupling beam 6c and the fourth drive decoupling beam 6b are connected to the right Coriolis mass block group 14b and the right detection mass block 8b.

[0120] There are a total of 8 detection decoupling beams 12a~12h described in the present invention, and their structural dimensions are consistent and their shapes are the same as those of the folding beams. The stiffness of the detection decoupling beams 12a~12h along the detection direction is much smaller than the stiffness along the driving direction (the stiffness of the detection decoupling beams along the axial direction of the connecting rod is greater than its stiffness along the direction connecting the first end and the second end of the Coriolis mass block). The first to fourth detection decoupling beams 12a~12d connect the left Coriolis mass block 14a and the left driving mass block 2a, and the fifth to eighth detection decoupling beams 12e~12h connect the right Coriolis mass block 14b and the right driving mass block 2b.

[0121] The driving mass block group decoupling beams 7a and 7b of the present invention have a total of two, and the structural dimensions are consistent. Each of them can be in the shape of a tripod, located at the upper and lower sides of the center of the micro-gyroscope, respectively, for connecting the left driving mass block group 2a and the right driving mass block group 2b, and fixedly supported by the first driving mass block group decoupling beam anchor 18a and the second driving mass block group decoupling beam anchor 18b, so that the common mode resonance frequency of the micro-gyroscope during driving is much greater than the reverse working mode resonance frequency, ensuring that the left driving mass block group 2a and the right driving mass block group 2b move in the opposite direction, and suppressing the influence of external linear acceleration. There are two driving mass block group decoupling beam anchors 18a and 18b, respectively located at the upper and lower sides of the driving mass block group decoupling beam, and in the shape of a two-legged fork, which are used to protect the middle beam of the driving mass block group decoupling beams 7a and 7b, so that it is not easy to bend and break at a large angle. There is one detection mass block decoupling beam 13 located at the center of the micro-gyroscope, which is used to connect the left detection mass block 8a and the right detection mass block 8b, and is fixedly supported by the detection mass block decoupling beam anchor point 19, so that the common mode resonant frequency of the micro-gyroscope during detection is much larger than the reverse working mode resonant frequency, ensuring that the left detection mass block 8a and the right detection mass block 8b move in the opposite direction.

[0122] The driving electrodes 3a-3h of the present invention are 8 in total, and have the same structural dimensions. The driving feedback electrodes 4a-4c are 4 in number, have the same structural dimensions, and are symmetrically distributed along the X-axis and the Y-axis. The first and second driving electrodes 3a-3b are located in the middle position of the upper side of the left driving mass block group 2a, the third and fourth driving electrodes 3a-3b are located in the middle position of the lower side of the left driving mass block group 2a, and the first and second driving feedback electrodes 4a-4b are respectively located at the edge positions of the upper and lower sides of the left driving mass block group 2a; similarly, the fifth and sixth driving electrodes 3e-3f are located in the middle position of the upper side of the right driving mass block group 2b, the seventh and eighth driving electrodes 3g-3h are located in the middle position of the lower side of the right driving mass block group 2b, and the third and fourth driving feedback electrodes 4c-4d are respectively located at the edge positions of the upper and lower sides of the right driving mass block group 2b.

[0123] The detection mass blocks 8a and 8b described in the present invention are two in number, namely the left detection mass block 8a and the right detection mass block 8b, which have the same structural dimensions and are axially symmetrical along the Y axis. The left detection mass block 8a and the right detection mass block 8b are connected by the detection mass block decoupling beam 13. The left detection mass block 8a is located on the left side of the micro-gyroscope structure and is surrounded by the left Coriolis mass block group 14a. It is connected to the left Coriolis mass block group 14a through two driving decoupling beams 6a and 6b, and is fixedly supported by four detection folding beams 11a to 11d and four detection folding beam anchor points 16a to 16d. Four detection electrodes 9a to 9d and four detection feedback electrodes 10a to 10d are arranged inside the left detection mass block 8a. Similarly, the right detection mass block 8b is located on the right side of the micro-gyro structure and is surrounded by the right Coriolis mass block group 14b. It is connected to the right Coriolis mass block group 14b through two drive decoupling beams 6c and 6d, and is fixedly supported by four detection folded beams 11e to 11h and four detection folded beam anchor points 16e to 16h. Four detection electrodes 9e to 9h and four detection feedback electrodes 10e to 10h are arranged inside the right detection mass block 8b.

[0124] In a further embodiment, see Figure 3 Two detection folding beam anchor points are respectively arranged at the two ends of the detection mass block along the Y-axis direction, and the two detection folding beam anchor points are relatively arranged at the edges of the detection mass block, and each of the detection folding beam anchor points is connected to a detection folding beam, and the detection folding beam is arranged on the outer wall of the detection mass block along the Y-axis direction.

[0125] In one embodiment, the detection mass block is a cubic frame structure, and four detection feedback electrodes are arranged in the cubic frame structure. The four detection feedback electrodes are installed one by one at the four corner points of the cubic frame structure. Four detection electrodes are also arranged in the cubic frame structure, and the four detection electrodes are arranged in a two-level array.

[0126] In one embodiment, the detection mass block in the left frame structure is connected to the detection mass block in the right frame structure through a detection mass block decoupling beam, and the detection mass block decoupling beam is fixedly connected to the detection mass block decoupling beam anchor point, and the detection mass block decoupling beam anchor point is installed at the coordinate origin.

[0127] The detection electrodes 9a-9h of the present invention are 8 in total, and have the same structural dimensions. The detection feedback electrodes 10a-10h are 8 in total, and have the same structural dimensions, and are symmetrically distributed along the X-axis and the Y-axis. The first, second, third, and fourth detection electrodes 9a-9d are located at the center of the inner side of the left detection mass block 8a, and the first, second, third, and fourth detection feedback electrodes 10a-10d are located at the surrounding positions of the inner side of the left detection mass block 8a; similarly, the fifth, sixth, seventh, and eighth detection electrodes 9a-9d are located at the center of the inner side of the right detection mass block 8b, and the fifth, sixth, seventh, and eighth detection feedback electrodes 10e-10h are located at the surrounding positions of the inner side of the right detection mass block 8b.

[0128] There are a total of 8 orthogonal correction electrodes 17a~17h described in the present invention, and their structural dimensions are consistent. The first, second, third, and fourth orthogonal correction electrodes 17a~17d are arranged at the hollow position in the middle of the left Coriolis mass block 14a, and the fifth, sixth, seventh, and eighth orthogonal correction electrodes 17e~17h are arranged at the hollow position in the middle of the right Coriolis mass block 14b. The orthogonal electrodes 17a~17h are used to control the torsion component generated when the left and right Coriolis mass block groups 14a and 14b are driven, so that they maintain horizontal up and down movement along the Y-axis direction, thereby greatly reducing the orthogonal error of the micro gyroscope.

[0129] In one embodiment, see Figure 4 , 5 , Figure 4 is a schematic diagram of the structure of the detection mass decoupling beam of the present invention; Figure 5 It is a structural schematic diagram of the decoupling beam of the driving mass block group described in the present invention.

[0130] It should be noted that, referring to the accompanying drawings, the left detection mass block can actually be called the first detection mass block, the right detection mass block can be called the second detection mass block, the left driving mass block group can be called the first driving mass block group, the right driving mass block group can be called the second driving mass block group, the left Coriolis mass block group can be called the first Coriolis mass block group, and the right Coriolis mass block group can be called the second Coriolis mass block group, among which "left", "right", "first" and "second" are just a reference description, without any specific reference or limitation on position.

[0131] See also Figure 4 In one embodiment, the first detection mass block 8a and the second detection mass block 8b in the decoupled micro-gyroscope described in the present invention will move in opposite directions under the action of the Keshi force; and the detection mass block decoupling beam 13 connected between the first detection mass block 8a and the second detection mass block 8b is configured to cause the first detection mass block 8a and the second detection mass block 8b to maintain movement in opposite directions.

[0132] In one embodiment, the left detection mass block 8a in the left frame structure 1a and the right detection mass block 8b in the right frame structure 1b are connected by a detection mass block decoupling beam 13. The detection mass block decoupling beam 13 is configured to connect the two detection mass blocks 8a and 8b, and make the two detection mass blocks 8a and 8b perform simple harmonic motion respectively. When the first detection mass block 8a moves away from the detection mass block decoupling beam 13 (moves in the C direction), the detection mass block decoupling beam 13 undergoes elastic deformation under the traction of the first detection mass block 8a, thereby pushing the second detection mass block 8b to move away from the detection mass block decoupling beam 13 (moves in the D direction). When the first detection mass block 8a moves toward the detection mass block decoupling beam 13 (moves toward the D direction), the detection mass block decoupling beam 13 undergoes elastic deformation under the compression of the first detection mass block 8a, thereby pulling the second detection mass block 8b to move toward the detection mass block decoupling beam 13 (moves in the C direction).

[0133] In one embodiment, the detection mass decoupling beam 13 includes a first structural portion connected to the first detection mass 8a and a second structural portion connected to the second detection mass 8b.

[0134] When the first detection mass block 8a moves away from the detection mass block decoupling beam 13, the first structural part of the detection mass block decoupling beam 13 undergoes elastic deformation under the traction of the first detection mass block 8a, and the elastic deformation of the first structural part of the detection mass block decoupling beam 13 causes the second structural part of the detection mass block decoupling beam 13 to also undergo elastic deformation, thereby causing the second structural part of the detection mass block decoupling beam 13 to push the second detection mass block 8b to move away from the detection mass block decoupling beam 13.

[0135] When the first detection mass block 8a moves closer to the detection mass block decoupling beam 13, the first structural part of the detection mass block decoupling beam 13 undergoes elastic deformation under the squeezing of the first detection mass block 8a. The elastic deformation of the first structural part of the detection mass block decoupling beam 13 causes the second structural part of the detection mass block decoupling beam 13 to also undergo elastic deformation, thereby causing the second structural part of the detection mass block decoupling beam 13 to pull the second detection mass block 8b to move closer to the detection mass block decoupling beam 13.

[0136] In one embodiment, the first structural portion of the detection mass block decoupling beam 13 and the second structural portion of the detection mass block decoupling beam 13 are axisymmetric, the elastic deformation of the first structural portion of the detection mass block decoupling beam 13 and the elastic deformation of the first structural portion of the detection mass block decoupling beam 13 are also axisymmetric, and the axis of symmetry is the axis of symmetry of the first detection mass block 8a and the second detection mass block 8b.

[0137] In one embodiment, the detection mass decoupling beam 13 includes four detection mass decoupling elastic beams 1310, four detection mass decoupling intermediate connecting beams 1320, four detection mass decoupling supporting beams 1330, a first detection mass decoupling end connecting beam 1340 and a second detection mass decoupling end connecting beam 1350.

[0138] One end of the first detection mass block decoupling end connecting beam 1340 is connected to the first detection mass block 8a, and the other end is connected to the middle of a detection mass block decoupling elastic beam 1310. One end of the second detection mass block decoupling end connecting beam 1350 is connected to the second detection mass block 8b, and the other end is connected to the middle of another detection mass block decoupling elastic beam 1310. The detection mass block decoupling elastic beam 1310 and the detection mass block decoupling intermediate connecting beam 1320 are alternately connected end to end in sequence, so that the four detection mass block decoupling elastic beams 1310 and the four detection mass block decoupling intermediate connecting beams 1320 are alternately connected end to end to form a closed loop. One end of each detection mass block decoupling support beam 1330 is connected to the detection mass block decoupling beam anchor point 19, and the other end is connected to the middle of a corresponding detection mass block decoupling intermediate connecting beam 1320.

[0139] The partial structure of the detection mass decoupling beam 13 located on the side of the symmetry axis close to the first detection mass 8a is called the first structural part, and the partial structure of the detection mass decoupling beam 13 located on the side of the symmetry axis close to the second detection mass 8b is called the second structural part.

[0140] In one embodiment, each detection mass decoupling elastic beam 1310 includes a U-shaped portion located in the middle and two L-shaped portions located at both ends, and the two L-shaped portions at both ends of the detection mass decoupling elastic beam 1310 are symmetrically arranged about the U-shaped portion in the middle of the detection mass decoupling elastic beam 1310.

[0141] The opening direction of the L-shaped portion at the end of the detection mass decoupling elastic beam 1310 is toward the detection mass decoupling beam anchor point 19.

[0142] The first detection mass block decoupling end connecting beam 1340 is connected to the bottom of one of the U-shaped portions, and the second detection mass block decoupling end connecting beam 1350 is connected to the bottom of the other U-shaped portion.

[0143] In one embodiment, each detection mass decoupling intermediate connecting beam 1320 is an L-shaped structure.

[0144] One end of each detection mass decoupling support beam 1330 is connected to the detection mass decoupling beam anchor point 19, and the other end is connected to the corner point of the L-shaped structure, so that the four detection mass decoupling support beams 1330 form a diagonal line in the closed loop.

[0145] The opening direction of the L-shaped detection mass decoupling intermediate connecting beam 1320 is toward the detection mass decoupling beam anchor point 19 .

[0146] In one embodiment, when the first detection mass block 8a moves away from the detection mass block decoupling beam 13, the detection mass block decoupling elastic beam 1310 connected to the first detection mass block decoupling end connecting beam 1340 undergoes elastic deformation, and the elastic deformation reduces the included angle between the two detection mass block decoupling support beams 1330 of the first structural part of the detection mass block decoupling beam 13 to generate an external thrust, which prompts the first detection mass block 8a to move away from the detection mass block decoupling beam 13. The external thrust generated by the first structural part prompts the included angle between the two detection mass block decoupling support beams 1330 of the second structural part to reduce through the detection mass block decoupling beam anchor point 19 to generate a reverse external thrust, and the reverse external thrust prompts the second detection mass block 8b to move away from the detection mass block decoupling beam 13.

[0147] When the first detection mass block 8a moves closer to the detection mass block decoupling beam 13, the detection mass block decoupling elastic beam 1310 connected to the first detection mass block decoupling end connecting beam 1340 undergoes elastic deformation. The elastic deformation increases the included angle between the two detection mass block decoupling support beams 1330 of the first structural part of the detection mass block decoupling beam 13, thereby generating an internal thrust. The internal thrust causes the first detection mass block 8a to move closer to the detection mass block decoupling beam 13. The internal thrust generated by the first structural part causes the included angle between the two detection mass block decoupling support beams 1330 of the second structural part to increase through the detection mass block decoupling beam anchor point 19, thereby generating a reverse internal thrust. The reverse internal thrust causes the second detection mass block 8b to move closer to the detection mass block decoupling beam 13.

[0148] Continue to see Figure 5In one embodiment, when the first driving mass block group 2a of the decoupled micro-gyroscope of the present invention moves in the first direction (i.e., moves in the direction A) relative to the first driving mass block group decoupling beam 7a, the first driving mass block group decoupling beam 7a undergoes elastic deformation under the traction of the first driving mass block group 2a, thereby pushing the second driving mass block group 2b to move in the second direction (i.e., moves in the direction B) relative to the first driving mass block group decoupling beam 7a. When the first driving mass block group 2a moves in the second direction (i.e., moves in the direction B) relative to the first driving mass block group decoupling beam 7a, the first driving mass block group decoupling beam 7a undergoes elastic deformation under the extrusion of the first driving mass block group 2a, thereby pushing the second driving mass block group 2b to move in the first direction (i.e., moves in the direction A) relative to the first driving mass block group decoupling beam 7a.

[0149] In one embodiment, the first driving mass group decoupling beam 7a includes a first deformable beam 710 connected to the first driving mass group 2a, a third deformable beam 730 connected to the second driving mass group 2b, a second deformable beam 720 connecting the first deformable beam 710 and the third deformable beam 730, and a support beam 740 connected to the first driving mass group decoupling beam anchor point 18a.

[0150] When the first driving mass group 2a moves in the first direction relative to the first driving mass group decoupling beam 7a, the first deformation beam 710 of the first driving mass group decoupling beam 7a undergoes elastic deformation under the traction of the first driving mass group 2a, and the elastic deformation of the first deformation beam 710 is transmitted to the third deformation beam 730 under the action of the second deformation beam 720. The third deformation beam 730 pushes the second driving mass group 2b to move in the second direction under the action of the elastic deformation.

[0151] When the first driving mass group 2a moves in the second direction relative to the first driving mass group decoupling beam 7a, the first deformation beam 710 of the first driving mass group decoupling beam 7a undergoes elastic deformation under the extrusion of the first driving mass group 2a, and the elastic deformation of the first deformation beam 710 is transmitted to the third deformation beam 730 under the action of the second deformation beam 720. The third deformation beam 730 pushes the second driving mass group 2b to move in the first direction under the action of the elastic deformation.

[0152] The first direction is opposite to the second direction.

[0153] In one embodiment, when the first driving mass group 2a moves in the first direction, the first driving mass group 2a pulls the first deformable beam 710 connected thereto to stretch in the first direction, and the stretched first deformable beam 710 drives the third deformable beam 730 to push the second driving mass group 2b to move in the second direction through the second deformable beam 720.

[0154] When the first driving mass group 2a moves in the second direction, the first driving mass group 2a squeezes the first deformable beam 710 connected thereto to be compressed in the second direction, and the compressed first deformable beam 710 drives the third deformable beam 730 to push the second driving mass group 2b to move in the first direction through the second deformable beam 720.

[0155] The first driving mass group 2a and the second driving mass group 2b respectively perform simple harmonic motions driven by the first driving mass group decoupling beam 7a, and the first driving mass group 2a and the second driving mass group 2b form differential motions.

[0156] In one embodiment, the first deformable beam 710, the second deformable beam 720, the third deformable beam 730 and the support beam 740 form an "E"-shaped structure. The first deformable beam 710, the third deformable beam 730 and the support beam 740 are parallel to each other. One end of the support beam 740 is connected to the center of the second deformable beam 720.

[0157] The decoupling beam anchor point 18a of the first driving mass block group is fixedly connected to the base of the decoupled micro-gyroscope. The cross-sectional shape of the decoupling beam anchor point 18a of the first driving mass block group is a two-legged harpoon type, which has a connecting groove for accommodating the second deformation beam 720. One end of the second deformation beam 720 is connected from the notch of the connecting groove to the bottom of the connecting groove, and the connecting groove faces the decoupling beam of the detection mass block.

[0158] The decoupled micro-gyroscope described in the present invention is driven by electrostatic force. The left driving mass block group and the right driving mass block group of the micro-gyroscope will respectively drive the left Coriolis mass block group and the right Coriolis mass block group to perform reverse linear simple harmonic vibration along the Y-axis direction. When an angular velocity input is detected in the Z-axis direction, the Coriolis force generated by the Coriolis effect of the micro-gyroscope drives the left Coriolis mass block group and the right Coriolis mass block group to respectively drive the left detection mass block and the right detection mass block to perform reverse in-plane motion along the X-axis. The detection of the Z-axis angular velocity can be achieved through the change in the capacitance of the sensitive detection electrode.

[0159] The present invention provides a decoupled micro-gyroscope, which is mainly composed of two left-right symmetrical frame structures (i.e., an outer frame, which wraps a left driving mass block group and a right driving mass block group inside), the left and right sides of the outer frame are symmetrical (i.e., two identical left frame structures and right frame structures are formed), and the left and right sides both include a driving mass block group, a Coriolis mass block group, a detection mass block, a beam structure (a decoupling beam and a folding beam), electrodes and anchor points. The left and right frame structures are respectively a driving mass block group, a Coriolis mass block group, and a detection mass block from the outside to the inside, and the three are connected by a decoupling beam, and the decoupling beam is fixedly supported by a folding beam and an anchor point, a driving electrode and a driving feedback electrode are distributed on the upper and lower sides of the driving mass block group, an orthogonal correction electrode is distributed in the middle of the Coriolis mass block, and a detection electrode and a detection feedback electrode are distributed in the middle of the detection mass block. The micro-gyroscope structure described in the present invention adopts electrostatic drive and differential capacitance detection. The decoupling beam of the driving mass block group is cleverly designed, so that the left and right driving mass block groups move in opposite directions along the Y-axis direction (see the X, Y, Z three-dimensional rectangular coordinate system marked in the attached figure), which can resist the influence of external linear acceleration.

[0160] The decoupled micro-gyroscope of the present invention is designed with a detection mass block decoupling beam, so that the left and right detection mass blocks move in opposite directions along the X-axis direction, realizing differential amplification of the detection capacitor and improving the sensitivity of the decoupled micro-gyroscope; by designing a decoupling structure and an orthogonal correction structure, the mechanical coupling between the micro-gyroscope driving mode and the detection mode is suppressed, so that the micro-gyroscope can maintain horizontal up and down movement, greatly reducing the orthogonal error; the micro-gyroscope of the present invention has a reasonable and compact structural design, a small orthogonal error and high detection accuracy.

[0161] The decoupled micro-gyroscope described in the present invention adopts lever drive, orthogonal correction, resistance to external linear acceleration, and differential capacitance detection to improve the detection accuracy of the micro-gyroscope. The decoupling beam of the detection mass block in the micro-gyroscope structure can ensure that the detection mass block moves in the opposite direction during detection, so that the common-mode interference mode is far away from the reverse working mode.

[0162] The frame structure of the present invention is equipped with a driving mass block group, a Coriolis mass block group, and a detection mass block. When the micro-gyroscope is driven, the driving mass block group drives the Coriolis mass block group to move along the Y-axis direction. When it is sensitive to the external angular velocity input, the Coriolis mass block group of the micro-gyroscope will drive the detection mass block to move along the X-axis. When driven, the detection mass block will not move, which has a decoupling function and suppresses the mechanical coupling of the driving mode and the detection mode. At the same time, the designed micro-gyroscope has an orthogonal error structure. By applying a voltage to the orthogonal correction electrode to control and adjust the torsion component of the Coriolis mass block group, it moves horizontally up and down along the Y-axis direction, greatly reducing the orthogonal error.

[0163] The decoupled micro-gyroscope structure of the present invention adopts electrostatic drive and differential capacitance detection, and its design advantage lies in the ingenious design of the decoupling beam of the driving mass block group, so that the left and right driving mass block groups move in opposite directions along the Y-axis direction, which can resist the influence of external linear acceleration and improve the signal-to-noise ratio of the structure; the structure also designs a detection mass block decoupling beam, so that the left and right detection mass blocks move in opposite directions along the X-axis direction, realizes differential amplification of the detection capacitor, and improves the sensitivity of the structure; the structure also designs a decoupling structure and an orthogonal correction structure, which suppresses the mechanical coupling between the micro-gyroscope driving mode and the detection mode, and maintains horizontal up and down movement, greatly reduces the orthogonal error, and improves the detection accuracy of the micro-gyroscope.

[0164] In summary, compared with the prior art, the decoupled micro-gyroscope structure provided by the present invention adopts a decoupled micro-gyroscope structure, suppresses the mechanical coupling between the micro-gyroscope driving mode and the detection mode, designs an orthogonal correction electrode, and greatly reduces the orthogonal error of the micro-gyroscope; the lever-type driving mass block group decoupling beam structure and the differential detection mass block decoupling beam structure are cleverly designed, so that the micro-gyroscope drives and detects in the reverse working mode, avoiding the influence of the micro-gyroscope common mode interference mode on the working mode, and suppressing the influence of the external linear acceleration on the micro-gyroscope. The micro-gyroscope structure of the present invention is reasonably compact, has a small orthogonal error, and has high detection accuracy, which has great progressive significance.

[0165] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine different embodiments or examples described in this specification.

[0166] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify and vary the above embodiments within the scope of the present invention.

Claims

1. A decoupled dual-frame micro-gyroscope, characterized in that: It includes: A left driving mass group and a right driving mass group, wherein the left driving mass group and the right driving mass group are both semi-enclosed structures with an opening on one side, and the openings of the left driving mass group and the right driving mass group are arranged opposite to each other, and the left driving mass group and the right driving mass group each include two driving mass blocks; A left Coriolis mass block group and a right Coriolis mass block group, wherein the left Coriolis mass block group and the right Coriolis mass block group are both semi-enclosed structures with one side opening, and the openings of the left Coriolis mass block group and the right Coriolis mass block group are arranged opposite to each other; A left detection mass block and a right detection mass block, wherein the left Coriolis mass block group and the left driving mass block group are sequentially sleeved on the periphery of the left detection mass block, and the openings of the left Coriolis mass block group and the left driving mass block group face the same direction; The right Coriolis mass block group and the right driving mass block group are sequentially sleeved on the periphery of the right detection mass block, the openings of the right Coriolis mass block group and the right driving mass block group are oriented in the same direction, the left Coriolis mass block group and the right Coriolis mass block group each include two Coriolis mass blocks, and a connecting rod connecting the two Coriolis mass blocks, each of the Coriolis mass blocks has a first end and a second end, and the two ends of the connecting rod are respectively connected to the first ends of the two Coriolis mass blocks, so that the left Coriolis mass block group and the right Coriolis mass block group respectively form a semi-enclosed structure; A detection decoupling beam is respectively disposed at the first end and the second end of each of the Coriolis mass blocks, one end of each detection decoupling beam is connected to the Coriolis mass block, and the other end is connected to the driving mass block, and the detection decoupling beam is arranged so that the Coriolis mass block moves with the driving mass block. Each Coriolis mass block is provided with two orthogonal correction electrodes, the two orthogonal correction electrodes are respectively close to the first end and the second end of the Coriolis mass block, The two Coriolis masses of the left Coriolis mass group are arranged opposite to each other, and the orthogonal correction electrode at the first end or the second end of one Coriolis mass group in the left Coriolis mass group and the orthogonal correction electrode at the second end or the first end of another Coriolis mass group in the left Coriolis mass group are adjusted simultaneously, so that the left Coriolis mass group realizes deflection from the first angular position to the second angular position; The two Coriolis mass blocks of the right Coriolis mass block group are arranged relative to each other, and the orthogonal correction electrode at the first end or the second end of one Coriolis mass block in the right Coriolis mass block group and the orthogonal correction electrode at the second end or the first end of another Coriolis mass block in the right Coriolis mass block group are adjusted simultaneously, so that the right Coriolis mass block group realizes deflection from the third angular position to the fourth angular position.

2. The decoupled dual-frame micro-gyroscope according to claim 1, characterized in that: It also includes an outer frame, in which the left driving mass group and the right driving mass group are accommodated.

3. The decoupled dual-frame micro-gyroscope according to claim 1, characterized in that: The left driving mass block group and the right driving mass block group are symmetrically distributed, and the left driving mass block group and the right driving mass block group are connected by two driving mass block group decoupling beams, and the driving mass block group decoupling beams are fixed on the driving mass block group decoupling beam anchor points, and the driving mass block group decoupling beam anchor points are fixedly connected to the micro-gyroscope substrate, The driving mass group decoupling beam is configured to force the left driving mass group and the right driving mass group to keep moving in opposite directions.

4. The decoupled dual-frame micro-gyroscope according to claim 3, characterized in that: The left driving mass group and the right driving mass group each include a connecting arm connecting the two driving mass blocks, each of the driving mass blocks has a first driving end and a second driving end, and both ends of the connecting arm are respectively connected to the first driving ends of the two driving mass blocks, so that the left driving mass group and the right driving mass group respectively form a semi-enclosed structure; The second driving end of one of the driving masses in the left driving mass group is connected to the second driving end of one of the driving masses in the right driving mass group through a first driving mass group decoupling beam, The second driving end of another driving mass in the left driving mass group is connected to the second driving end of another driving mass in the right driving mass group through a second driving mass group decoupling beam.

5. The decoupled dual-frame micro-gyroscope according to claim 4, characterized in that: Two driving folded beams are arranged on each driving mass block, the two driving folded beams are respectively located at a first driving end and a second driving end of the driving mass block, and the two driving folded beams are close to the Coriolis mass block; Two driving electrodes and one driving feedback electrode are also arranged on each driving mass block, and the driving electrodes and the driving feedback electrode are arranged on a side away from the Coriolis mass block.

6. The decoupled dual-frame micro-gyroscope according to claim 5, characterized in that: The first driving end and the second driving end of each driving mass block are respectively provided with a driving folded beam anchor point, and the driving folded beam is fixedly connected to the micro-gyroscope substrate through the driving folded beam anchor point, and the axial direction of the driving folded beam is the same as the center line direction of the first driving end and the second driving end of the driving mass block.

7. The decoupled dual-frame micro-gyroscope according to claim 1, characterized in that: The detection decoupling beam is arranged along the axial direction of the connecting rod, and the stiffness of the detection decoupling beam along the axial direction of the connecting rod is greater than the stiffness along the direction connecting the first end and the second end of the Coriolis mass.

8. The decoupled dual-frame micro-gyroscope according to claim 1, characterized in that: Each of the Coriolis mass blocks has a driving decoupling beam, and the two Coriolis mass blocks in the left Coriolis mass block group are respectively connected to the left detection mass block through the driving decoupling beam, and the two Coriolis mass blocks in the right Coriolis mass block group are respectively connected to the right detection mass block through the driving decoupling beam. The driving decoupling beam comprises an "H"-shaped structure, and the driving decoupling beam is distributed along the center line connecting the first end and the second end of the Coriolis mass block, and the stiffness of the driving decoupling beam along the axial direction of the connecting rod is smaller than the stiffness along the center line connecting the first end and the second end of the Coriolis mass block.

9. The decoupled dual-frame micro-gyroscope according to claim 1, characterized in that: Four detection electrodes are respectively arranged at the center of the left detection mass block and the right detection mass block, and the four detection electrodes are arranged in two rows, each row having two detection electrodes. Four detection feedback electrodes are also respectively arranged on the left detection mass block and the right detection mass block. The four detection feedback electrodes are respectively arranged at the four corners of the left detection mass block or the right detection mass block.

10. The decoupled dual-frame micro-gyroscope according to claim 9, characterized in that: Four detection folding beams are respectively arranged on the left detection mass block and the right detection mass block, and each of the detection folding beams is fixedly connected to the micro-gyroscope substrate through a detection folding beam anchor point. The four detection folding beams are arranged on the periphery of the left detection mass block, and the four detection folding beams are respectively close to the four corners of the left detection mass. The four detection folding beams are arranged on the periphery of the right detection mass block, and the four detection folding beams are respectively close to the four corners of the right detection mass; The detection folding beam is distributed along the outer wall of the left detection mass block or the right detection mass block, and the distribution direction of the detection folding beam is parallel to the axial direction of the connecting rod of the Coriolis mass block.

11. The decoupled dual-frame micro-gyroscope according to claim 2, characterized in that: The left detection mass block and the right detection mass block are connected by a detection mass block decoupling beam that assists the left detection mass block and the right detection mass block to maintain reverse motion, the detection mass block decoupling beam is located at the center of the outer frame, and the detection mass block decoupling beam is fixedly connected to the micro-gyroscope substrate through a detection mass block decoupling beam anchor point. The detection mass decoupling beam comprises a first structural part connected to the left detection mass and a second structural part connected to the right detection mass. When the left detection mass block moves away from the detection mass block decoupling beam, the first structural part of the detection mass block decoupling beam undergoes elastic deformation under the traction of the left detection mass block, and the elastic deformation of the first structural part of the detection mass block decoupling beam causes the second structural part of the detection mass block decoupling beam to also undergo elastic deformation, thereby causing the second structural part of the detection mass block decoupling beam to push the right detection mass block to move away from the detection mass block decoupling beam. When the left detection mass block moves closer to the detection mass block decoupling beam, the first structural portion of the detection mass block decoupling beam undergoes elastic deformation under the extrusion of the left detection mass block, and the elastic deformation of the first structural portion of the detection mass block decoupling beam causes the second structural portion of the detection mass block decoupling beam to also undergo elastic deformation, thereby causing the second structural portion of the detection mass block decoupling beam to pull the right detection mass block to move closer to the detection mass block decoupling beam; The first structural part of the detection mass decoupling beam and the second structural part of the detection mass decoupling beam are axisymmetric, the elastic deformation of the first structural part of the detection mass decoupling beam and the elastic deformation of the first structural part of the detection mass decoupling beam are also axisymmetric, and the symmetry axis is the symmetry axis of the left detection mass and the right detection mass. The detection mass decoupling beam comprises four detection mass decoupling elastic beams, four detection mass decoupling intermediate connecting beams, four detection mass decoupling supporting beams, a left detection mass decoupling end connecting beam and a right detection mass decoupling end connecting beam. One end of the left detection mass block decoupling end connecting beam is connected to the left detection mass block, and the other end is connected to the middle part of a detection mass block decoupling elastic beam. One end of the right detection mass block decoupling end connecting beam is connected to the right detection mass block, and the other end is connected to the middle part of another detection mass block decoupling elastic beam. The detection mass block decoupling elastic beam and the detection mass block decoupling middle connecting beam are alternately connected end to end in sequence, so that the four detection mass block decoupling elastic beams and the four detection mass block decoupling middle connecting beams are alternately connected end to end to form a closed loop. One end of each detection mass block decoupling support beam is connected to the detection mass block decoupling beam anchor point, and the other end is connected to the middle part of a corresponding detection mass block decoupling middle connecting beam. The partial structure of the detection mass decoupling beam located on the side of the symmetry axis close to the left detection mass is called the first structural part, and the partial structure of the detection mass decoupling beam located on the side of the symmetry axis close to the right detection mass is called the second structural part; Each detection mass decoupling elastic beam comprises a U-shaped portion in the middle and two L-shaped portions at both ends, wherein the two L-shaped portions at both ends of the detection mass decoupling elastic beam are symmetrically arranged with respect to the U-shaped portion in the middle of the detection mass decoupling elastic beam. The opening direction of the L-shaped portion at the end of the detection mass decoupling elastic beam is toward the anchor point of the detection mass decoupling beam. The left detection mass block decoupling end connecting beam is connected to the bottom of one of the U-shaped parts, and the right detection mass block decoupling end connecting beam is connected to the bottom of the other U-shaped part; Each detection mass block decouples the middle connecting beam into an L-shaped structure. One end of each detection mass block decoupling support beam is connected to the detection mass block decoupling beam anchor point, and the other end is connected to the corner point of the L-shaped structure, so that the four detection mass block decoupling support beams form a diagonal line in the closed loop, The opening direction of the L-shaped detection mass decoupling intermediate connecting beam faces the detection mass decoupling beam anchor point.

12. The decoupled dual-frame micro-gyroscope according to claim 3, characterized in that: The driving mass group decoupling beam comprises a first deformable beam connected to the left driving mass group, a third deformable beam connected to the right driving mass group, a second deformable beam connecting the first deformable beam and the third deformable beam, and a support beam connected to an anchor point of the driving mass group decoupling beam. When the left driving mass group moves in the first direction relative to the driving mass group decoupling beam, the first deformation beam of the driving mass group decoupling beam undergoes elastic deformation under the traction of the left driving mass group, and the elastic deformation of the first deformation beam is transmitted to the third deformation beam under the action of the second deformation beam, and the third deformation beam pushes the right driving mass group to move in the second direction under the action of the elastic deformation. When the left driving mass block group moves in the first direction, the left driving mass block group pulls the first deformable beam connected thereto to stretch in the first direction, and the stretched first deformable beam drives the third deformable beam through the second deformable beam to push the right driving mass block group to move in the second direction. When the left driving mass group moves in the second direction relative to the driving mass group decoupling beam, the first deformation beam of the driving mass group decoupling beam undergoes elastic deformation under the extrusion of the left driving mass group, and the elastic deformation of the first deformation beam is transmitted to the third deformation beam under the action of the second deformation beam, and the third deformation beam pushes the right driving mass group to move in the first direction under the action of the elastic deformation. When the left driving mass block group moves in the second direction, the left driving mass block group squeezes the first deformable beam connected thereto to compress it in the second direction, and the compressed first deformable beam drives the third deformable beam through the second deformable beam to push the right driving mass block group to move in the first direction. The first direction is opposite to the second direction.

13. The decoupled dual-frame micro-gyroscope according to claim 12, characterized in that: The first deformable beam, the second deformable beam, the third deformable beam and the support beam form an "E"-shaped structure. The first deformable beam, the third deformable beam and the support beam are parallel to each other. One end of the support beam is connected to the center of the second deformable beam. The decoupling beam anchor point of the driving mass block group is fixedly connected to the base of the decoupled micro-gyroscope. The cross-sectional shape of the decoupling beam anchor point of the driving mass block group is a two-legged harpoon type, which has a connecting groove for accommodating the second deformation beam, and one end of the second deformation beam is connected from the notch of the connecting groove to the bottom of the connecting groove. The left detection mass block and the right detection mass block are connected by a detection mass block decoupling beam that assists the left detection mass block and the right detection mass block to maintain reverse motion, and the connecting groove faces the detection mass block decoupling beam.

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