Inspection device

Abstract

The present invention provides an inspection device which can easily transport both an upper jig that contacts the upper surface of an inspection object and a lower jig that contacts the lower surface of the inspection object. The inspection device (1) comprises: a jig frame (3) capable of accommodating an upper jig (6U) and a lower jig (6D); an arm member (41) capable of selectively placing the upper jig (6U) and the lower jig (6D); an arm driving unit (42) driving the arm member (41); an upper loading and unloading mechanism (8U) receiving the upper jig (6U) from the arm member (41) and mounting it on the upper mounting unit (2U); and a lower loading and unloading mechanism (8D) receiving the lower jig (6D) from the arm member (41) and mounting it on the lower mounting unit (2D); the arm driving unit (42) takes out the upper jig (6U) from the jig frame (3) and transports it to the upper loading and unloading mechanism (8U), and takes out the lower jig (6D) from the jig frame (3) and transports it to the lower loading and unloading mechanism (8D).

Description

Technical Field

[0001] The present invention relates to an inspection device for performing inspection by bringing a probe into contact with an inspection object. Background Art

[0002] There is a known liquid crystal substrate inspection apparatus which includes an inspection device for inspecting a liquid crystal substrate and a probe replacement device including a transport device for transporting a probe for inspecting a liquid crystal substrate (for example, see Patent Document 1).

[0003] Patent Document 1 discloses that the probe 6 is placed on the liquid crystal substrate 30 for inspection (see Patent Document 1). Figure 6 (a), paragraphs 0044 to 0047).

[0004] [Prior art literature]

[0005] [Patent Document]

[0006] [Patent Document 1] Japanese Patent Application Publication No. 2005-233997 Summary of the invention

[0007] [Problems to be solved by the invention]

[0008] In addition, when inspecting a circuit board or a semiconductor substrate, sometimes inspection points such as wiring and pads to be inspected are provided on both the upper and lower surfaces of the substrate. When inspecting such a substrate, the probe must be brought into contact with both the upper and lower surfaces of the substrate.

[0009] However, the technique described in Patent Document 1 can only transport the probe to the upper side of the inspection object, and therefore cannot transport the probe to the lower side of the inspection object. Therefore, it is difficult to apply the probe replacement device described in Patent Document 1 to an inspection device for inspecting an inspection object having inspection points on both sides.

[0010] An object of the present invention is to provide an inspection device that can easily transport both an upper jig that contacts the upper surface of an inspection object and a lower jig that contacts the lower surface of the inspection object.

[0011] [Technical means to solve the problem]

[0012] An inspection device according to an example of the present invention comprises: an upper mounting portion, which is arranged above an inspection object having a substantially plate-shaped shape and enables an upper jig holding an upper probe for contacting the upper surface of the inspection object to be removably mounted from below; a lower mounting portion, which is arranged below the inspection object and enables a lower jig holding a lower probe for contacting the lower surface of the inspection object to be removably mounted from above; a jig frame, which can accommodate the upper jig and the lower jig; an arm member, which can selectively carry the upper jig and the lower jig; an arm driving portion, which transports the upper jig and the lower jig by driving the arm member; an upper loading and unloading mechanism, which receives the upper jig from the arm member The upper jig is mounted on the upper mounting portion; and a lower loading and unloading mechanism receives the lower jig from the arm member and mounts it on the lower mounting portion; the arm driving unit takes out the upper jig from the jig rack and transports it to the upper loading and unloading mechanism, and takes out the lower jig from the jig rack and transports it to the lower loading and unloading mechanism, the upper jig comprises: a roughly plate-shaped upper plate; and an upper jig head, which holds a plurality of the upper probes in a direction extending downward from the lower surface side of the upper plate; the lower jig comprises: a roughly plate-shaped lower plate; and a lower jig head, which holds a plurality of the lower probes in a direction extending upward from the upper surface side of the lower plate.

[0013] [Effects of the Invention]

[0014] The inspection device having such a configuration can easily transport both the upper jig that contacts the upper surface of the inspection object and the lower jig that contacts the lower surface of the inspection object. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a cross-sectional view conceptually showing a schematic configuration of an inspection device according to one embodiment of the present invention.

[0016] Figure 2 Observed from the downward direction Figure 1 A three-dimensional view of the upper fixture 6U shown in FIG.

[0017] Figure 3 Observed from the downward direction Figure 1 0 is a perspective view of the upper mounting portion 2U, the upper mounting and dismounting mechanism 8U, the upper position adjustment mechanism 10U, and the upper position sensor 85U shown in FIG.

[0018] Figure 4 It means that the upper fixture 6U has been installed Figure 3 1 is an explanatory diagram of the state of the bottom plate 22U of the upper mounting portion 2U shown in FIG.

[0019] Figure 5 It is a perspective view showing an example of the arm member 41 and the arm-side position adjustment mechanism 9 .

[0020] Figure 6 It means that the upper fixture 6U has been placed on Figure 5 0 is a perspective view of the state of the arm member 41 shown in .

[0021] Figure 7 Yes means Figure 1 0 is a block diagram of an example of the electrical configuration of the inspection device 1 shown in FIG.

[0022] Figure 8 This is a flowchart showing an example of the operation of the inspection device 1 when the jig 6 is conveyed from the mounting portion 2 to the jig holder 3 .

[0023] Fig. 9 This is a flowchart showing an example of the operation of the inspection device 1 when the jig 6 is conveyed from the jig holder 3 to the mounting portion 2 .

[0024] Fig.10 This is a flowchart showing an example of the operation of the inspection device 1 when the jig 6 is conveyed from the jig holder 3 to the mounting portion 2 .

[0025] Fig.11 This is an explanatory diagram of the upper jig 6U inserted into the upper holding member 80U via the arm member 41 in a non-contact manner, as viewed from the X-axis direction.

[0026] Fig.12 This is an explanatory diagram of the lower jig 6D inserted into the lower holding member 80D via the arm member 41 in a non-contact manner, as viewed from the X-axis direction.

[0027] Fig.13 This is an explanatory diagram for explaining a state in which the upper plate 61U has been conveyed above the receiving members 31U, 31U.

[0028] Fig.14 This is an explanatory diagram for explaining a state in which the lower plate 61D has been conveyed upward of the receiving members 31D, 31D.

[0029] [Explanation of Symbols]

[0030] 1: Check the device

[0031] 2: Installation

[0032] 2D: Lower mounting part

[0033] 2U: Upper mounting part

[0034] 3, 3a, 3b: fixture rack

[0035] 4: Jig transfer mechanism

[0036] 5D: Lower fixture drive mechanism

[0037] 5U: Upper fixture drive mechanism

[0038] 6: Jig

[0039] 6D: Lower jig

[0040] 6U: Upper fixture

[0041] 7: Control Department

[0042] 8D: Lower side loading and unloading mechanism

[0043] 8U: Upper loading and unloading mechanism

[0044] 9: Arm side position adjustment mechanism

[0045] 10D: Lower position adjustment mechanism

[0046] 10U: Upper position adjustment mechanism

[0047] 11: Pressing member (second pressing member, third pressing member)

[0048] 12: Actuator

[0049] 15: Frame

[0050] 21D: Device side lower connector

[0051] 21U: Connector on the device side

[0052] 22D, 22U: Bottom plate

[0053] 23: Positioning pin

[0054] 31, 31U, 31D: Connecting components

[0055] 32, 32: Vertical wall

[0056] 41: Arm member

[0057] 42, 42a~42d: ​​arm driving unit

[0058] 43: Connection

[0059] 44: Loading position detection unit

[0060] 45: Depression

[0061] 46: Groove

[0062] 47, 48: Opening

[0063] 61: Board

[0064] 61D: lower plate

[0065] 61U: on board

[0066] 62D: Lower fixture head

[0067] 62U: Upper fixture head

[0068] 63D: Fixture side lower connector

[0069] 63U: Connector on the fixture side

[0070] 64D, 64U: Wiring

[0071] 65: Blade

[0072] 71: Jig transfer control department

[0073] 72: Inspection Department

[0074] 80D: Lower retaining member

[0075] 80U: Upper retaining member

[0076] 81D, 82D, 81U, 82U: Retaining rod

[0077] 83D: Lower fixture lifting mechanism

[0078] 83U: Upper fixture lifting mechanism

[0079] 84: Hole

[0080] 85D: Lower position sensor

[0081] 85U: Upper position sensor

[0082] 90: Pillar

[0083] 91D, 91U, 92D, 92U: Pressing part

[0084] 100: Inspection object

[0085] 221: Incision

[0086] 651: Top

[0087] 811, 821: Vertical wall

[0088] 812D, 822D: Lower second protrusion

[0089] 812U, 822U: Upper first protrusion

[0090] 813D, 823D: Lower first protrusion

[0091] 813U, 823U: Upper second protrusion

[0092] 821: Vertical Wall

[0093] 911: Pressing member (first pressing member)

[0094] 912: Actuator

[0095] A: Check the location

[0096] F: Front end

[0097] P: Probe

[0098] Pd: Lower probe

[0099] Pu: upper probe

[0100] R: Base end

[0101] S1~S8, S11~S15, S16~S19: Steps

[0102] T: Thickness

[0103] W1, W4, W5, W6, W7, W8: Interval

[0104] W2, W3: Width

[0105] X, Y, Z: axis directions

[0106] θ: Rotation direction DETAILED DESCRIPTION

[0107] Hereinafter, embodiments of the present invention will be described based on the accompanying drawings. In addition, the same symbols in the various drawings represent the same structures, and their descriptions are omitted. Figure 1 In order to make the directional relationship with each figure described later clear, the XYZ orthogonal coordinate axes and the rotation direction θ are shown.

[0108] Figure 1 The inspection device 1 shown in the figure generally includes an upper mounting portion 2U, a lower mounting portion 2D, a jig frame 3a, a jig frame 3b, a jig conveying mechanism 4, an upper jig driving mechanism 5U, and a lower jig driving mechanism 5D in a frame 15. In addition, the inspection device 1 includes an upper loading and unloading mechanism 8U, a lower loading and unloading mechanism 8D, an arm side position adjustment mechanism 9, an upper position adjustment mechanism 10U, and a lower position adjustment mechanism 10D described later.

[0109] The inspection object 100 has a roughly plate-like shape. The inspection object 100 may be, for example, a printed wiring substrate, a glass epoxy substrate, a flexible substrate, a ceramic multilayer wiring substrate, a package substrate for semiconductor packaging, an interposer substrate, or a film carrier, or an electrode plate for a display such as a liquid crystal display, an electroluminescence (EL) display, or a touch screen display, or an electrode plate for a touch screen, or a semiconductor substrate such as a semiconductor chip, a chip size package (CSP), a semiconductor element (integrated circuit (IC)), or a semiconductor wafer, and may be various substrates.

[0110] The inspection object 100 is transported to a predetermined inspection position A by a transport and holding mechanism (not shown) and is held horizontally.

[0111] The upper mounting portion 2U is disposed above the inspection object 100 located at the inspection position A. The upper mounting portion 2U can load and unload the upper jig 6U from below. The lower mounting portion 2D is disposed below the inspection object 100 located at the inspection position A. The lower mounting portion 2D can load and unload the lower jig 6D from above. Hereinafter, the upper mounting portion 2U and the lower mounting portion 2D are collectively referred to as the mounting portion 2, and the upper jig 6U and the lower jig 6D are collectively referred to as the jig 6.

[0112] The upper jig drive mechanism 5U and the lower jig drive mechanism 5D include a power transmission mechanism such as a motor and a gear. The upper jig drive mechanism 5U moves the upper mounting portion 2U in the X-axis direction, the Y-axis direction, and the Z-axis direction, and rotates in the θ direction around the Z-axis. The lower jig drive mechanism 5D moves the lower mounting portion 2D in the X-axis direction, the Y-axis direction, and the Z-axis direction, and rotates in the θ direction around the Z-axis.

[0113] The jig rack 3a and the jig rack 3b can each accommodate two sets of upper jigs 6U and lower jigs 6D. Hereinafter, the jig rack 3a and the jig rack 3b are collectively referred to as the jig rack 3.

[0114] The jig conveying mechanism 4 includes an arm member 41, and arm driving parts 42a to 42d. Hereinafter, the arm driving parts 42a to 42d are collectively referred to as the arm driving part 42. On the upper surface of the arm member 41, the upper jig 6U and the lower jig 6D can be selectively placed. On the arm driving part 42a, the arm driving part 42d, the arm driving part 42b, and the arm driving part 42c are sequentially placed from bottom to top. The arm member 41 is connected to the arm driving part 42c.

[0115] The arm driving unit 42a slides the arm driving units 42d, 42b, and 42c in the X-axis direction. Thus, the arm driving unit 42a moves the arm member 41 connected to the arm driving unit 42c in the X-axis direction, that is, in a direction approaching or separating from the mounting unit 2.

[0116] The arm driving unit 42d rotates the arm driving units 42b and 42c around the Z axis. Thus, the arm driving unit 42d can change the direction of the arm member 41 connected to the arm driving unit 42c between the X-axis direction, i.e., the direction toward the mounting unit 2, and the Y-axis direction, i.e., the direction toward the jig holder 3.

[0117] The arm driving unit 42b slides the arm driving unit 42c connected to the arm member 41 along the long side direction of the arm member 41. Thus, the arm driving unit 42b can move the arm member 41 forward and backward relative to the mounting portion 2 when the arm member 41 is directed toward the mounting portion 2, and can move the arm member 41 forward and backward relative to the jig frame 3 when the arm member 41 is directed toward the jig frame 3.

[0118] In addition, one end of four support columns 90 of the arm side position adjustment mechanism 9 described later is mounted on the arm driving unit 42b. Figure 1 In the figure, the description of the pressing part 91U, the pressing part 92U, the pressing part 91D, and the pressing part 92D is omitted, and only the support 90 is recorded in a penetrating manner using a double-dashed line. By installing the four support pillars 90 on the arm driving part 42b, the arm side position adjustment mechanism 9 slides in the X-axis direction together with the arm driving part 42b through the arm driving part 42a, and rotates around the Z-axis through the arm driving part 42d.

[0119] The arm driving parts 42a to 42c are configured using, for example, a motor, a gear mechanism, a slide rail, a rack and pinion, a belt, a chain, etc. The arm driving part 42d is configured using, for example, a motor and a gear mechanism, etc.

[0120] The jig transport mechanism 4 operates the arm driving units 42 a to 42 d in conjunction with each other in response to a control signal from the control unit 7 described later, thereby transporting the jig 6 placed on the arm member 41 bidirectionally between the mounting unit 2 and the jig holder 3 .

[0121] Figure 2 The figure shows a state where the arm member 41 is facing the mounting portion 2. Figure 3 to Figure 6 , Fig.11 , Fig.12 In the figure, the arrows are used to indicate the direction of the arm member 41. Figure 2 The XYZ directions are in the same orientation.

[0122] Figure 2The upper jig 6U shown in the figure includes: a roughly plate-shaped upper plate 61U; a plurality of upper probes Pu; an upper jig head 62U, which holds the plurality of upper probes Pu in a direction extending downward from the lower surface side of the upper plate 61U; a jig-side upper connector 63U, which is arranged on the upper surface side of the upper plate 61U and can be connected to the device-side upper connector 21U; a wiring 64U, which is arranged on the lower surface side of the upper plate 61U and connects the plurality of upper probes Pu to each terminal of the jig-side upper connector 63U; and a pair of blades 65, which are arranged on the lower surface side of the upper plate 61U and protrude on both sides of the upper jig head 62U and the wiring 64U sandwiched in the middle.

[0123] The width of the upper plate 61U is set to W3. The upper jig 6U may include a protective cover that covers the wiring 64U and the terminals of the jig-side upper connector 63U.

[0124] exist Figure 2 In the example shown in , the left side in the X-axis direction becomes the front end side of the upper jig 6U, and the right side in the X-axis direction becomes the rear end side of the upper jig 6U. The upper jig head 62U is arranged near the front end of the upper jig 6U, and the jig side upper connector 63U is arranged on the rear end side compared to the upper jig head 62U.

[0125] The pair of blades 65 has a long plate shape in the X-axis direction and is erected on the lower surface of the upper plate 61U. The tops 651 of the pair of blades 65 are extended and arranged parallel to each other. The protrusion (height) of the pair of blades 65 from the lower surface of the upper plate 61U becomes fixed relative to the X-axis direction. Thus, when the tops 651 of the pair of blades 65 are abutted against the upper surface of the arm member 41 to place the upper jig 6U on the arm member 41, the pair of blades 65 are used to horizontally support the upper plate 61U.

[0126] The protrusion amount of the pair of blades 65 from the lower surface of the upper plate 61U, that is, the height of the top 651 is greater than the terminals of the wiring 64U and the connector 63U on the jig side, or their protective covers. Figure 2 As shown, a portion between the top 651 of the blade 65 and the lower surface of the upper plate 61U may be partially cut.

[0127] The front surface of the jig-side upper connector 63U is exposed on the upper surface of the upper plate 61U. Figure 2 In the figure, the back side of the upper connector 63U on the jig side can be seen on the lower surface of the upper plate 61U. In addition, a positioning hole (not shown) for accommodating the positioning pin 23 of the upper mounting portion 2U described later is provided on the upper surface of the upper plate 61U.

[0128] The lower jig 6D is equivalent to removing a pair of blades 65 from the upper jig 6U and turning it upside down. Figure 2In the figure, the symbols of the lower jig 6D, the lower plate 61D, the lower jig head 62D, the jig side lower connector 63D, the wiring 64D, and the lower probe Pd corresponding to the upper jig 6U, the upper plate 61U, the upper jig head 62U, the jig side upper connector 63U, the wiring 64U, and the upper probe Pu are recorded in brackets.

[0129] Right now, Figure 1 , Figure 2 The lower fixture 6D shown in the figure includes: a roughly plate-shaped lower plate 61D; a plurality of lower probes Pd; a lower fixture head 62D, which holds the plurality of lower probes Pd in ​​a direction extending upward from the upper surface side of the lower plate 61D; a fixture-side lower connector 63D, which is arranged on the lower surface side of the lower plate 61D and can be connected to the device-side lower connector 21D; and a wiring 64D, which is arranged on the upper surface side of the lower plate 61D and connects the plurality of lower probes Pd to each terminal of the fixture-side lower connector 63D.

[0130] Metal plates such as aluminum or stainless steel can be used as the upper plate 61U, the lower plate 61D, and the pair of blades 65. Hereinafter, the upper plate 61U and the lower plate 61D are collectively referred to as plates 61, and the upper probes Pu and the lower probes Pd are collectively referred to as probes P.

[0131] Figure 3 The upper mounting portion 2U shown in FIG. 1 includes a substantially plate-shaped bottom plate 22U. Figure 3 In the example shown in FIG. 1 , the inner side in the X-axis direction becomes the front end side of the bottom plate 22U, and the front side in the X-axis direction becomes the rear end side of the bottom plate 22U. Notches 221 are formed at four corners of the bottom plate 22U.

[0132] The device side upper connector 21U is provided at the rear end side of the bottom plate 22U. A plurality of positioning pins 23 protruding downward are installed on the lower surface of the bottom plate 22U. When the upper jig 6U is installed on the bottom plate 22U, each positioning pin 23 is inserted into the positioning hole, the bottom plate 22U and the upper jig 6U are positioned, and the device side upper connector 21U is connected to the jig side upper connector 63U.

[0133] The upper loading and unloading mechanism 8U includes an upper holding member 80U and Figure 7 The upper jig lifting mechanism 83U shown in FIG. The upper holding member 80U includes holding rods 81U and 82U extending parallel to each other in the X-axis direction on both sides of the bottom plate 22U in the Y-axis direction. The holding rod 81U has a substantially L-shaped cross section when cut in the YZ plane.

[0134] The holding rods 81U and 82U include vertical walls 811 and 821 facing each other.

[0135] The retaining rod 81U includes: a plate-shaped upper first protrusion 812U extending from the lower end of the vertical wall 811 toward the retaining rod 82U; and upper second protrusions 813U, 813U, which are located at the upper end of the vertical wall 811, i.e., above the upper first protrusion 812U, facing the upper first protrusion 812U and protruding toward the retaining rod 82U.

[0136] The retaining rod 82U includes: a plate-shaped upper first protrusion 822U extending from the lower end of the vertical wall 821 toward the retaining rod 81U; and upper second protrusions 823U, 823U, which are located at the upper end of the vertical wall 821, i.e., above the upper first protrusion 822U, facing the upper first protrusion 822U and protruding toward the retaining rod 81U.

[0137] The interval W1 between the upper first protrusion 812U and the upper second protrusions 813U, 813U, and the interval W1 between the upper first protrusion 822U and the upper second protrusions 823U, 823U are greater than the thickness T of the upper plate 61U. Figure 4 As shown, the upper plate 61U can be inserted into the gap W1 between the holding rods 81U and 82U. The lower surface of the upper plate 61U inserted into the gap W1 is supported by the upper first protrusions 812U and 822U.

[0138] The interval W5 between the upper first protrusion 812U and the upper first protrusion 822U is narrower than the width W3 of the plate 61 and wider than the width W2 of the arm member 41 described later. Thus, the arm member 41 does not interfere with the upper first protrusion 812U and the upper first protrusion 822U, and the upper plate 61U can be transported into the interval W1 between the retaining rod 81U and the retaining rod 82U or moved out of the interval W1 between the retaining rod 81U and the retaining rod 82U by the arm member 41.

[0139] In the case of the lower holding member 80D, the interval W6 between the lower first protrusion 813D and the lower first protrusion 823D is narrower than the width W3 of the plate 61 and wider than the width W2 of the arm member 41 described later. Thus, the arm member 41 does not interfere with the lower first protrusion 813D and the lower first protrusion 823D, and the lower plate 61D can be conveyed into the interval W1 between the holding rod 81D and the holding rod 82D or can be conveyed out of the interval W1 between the holding rod 81D and the holding rod 82D by the arm member 41.

[0140] The holding rods 81U and 82U can be raised and lowered by the upper jig lifting mechanism 83U described later. When the holding rods 81U and 82U are raised by the upper jig lifting mechanism 83U, the upper second protrusions 813U and 813U and the upper second protrusions 823U and 823U fit into the cutouts 221 at the four corners of the bottom plate 22U.

[0141] The upper position sensor 85U is disposed, for example, on the front end F side of the holding rod 81U and the holding rod 82U. The upper position sensor 85U detects the position of the upper jig 6U held by the upper holding member 80U. As the upper position sensor 85U, the same position detection sensor as the placement position detection unit 44 can be used.

[0142] Reference Figure 3 The upper position adjustment mechanism 10U is mounted near one end and the other end of the holding rod 81U and the holding rod 82U, for example. The upper position adjustment mechanism 10U includes a substantially rod-shaped pressing member 11 (second pressing member) and an actuator 12 for moving the pressing member 11 forward and backward.

[0143] Each actuator 12 is mounted on the outer side of the vertical wall 811 and the vertical wall 821 of the holding rod 81U and the holding rod 82U. A hole 84 is formed at the position where the actuator 12 is mounted in the vertical wall 811 and the vertical wall 821. Each actuator 12 causes the pressing member 11 to protrude from the hole 84 or to retract the pressing member 11 in response to a control signal from the jig transport control unit 71 described later.

[0144] Thus, each actuator 12 corresponds to a control signal from a jig transport control unit 71 described later, causing the pressing member 11 to protrude toward the upper plate 61U from both sides of the upper plate 61U held by the upper retaining member 80U, and causing the pressing member 11 to abut against the edge of the upper plate 61U, thereby adjusting the position of the upper jig 6U.

[0145] The lower mounting portion 2D, the lower mounting and dismounting mechanism 8D, the lower position adjustment mechanism 10D, and the lower position sensor 85D correspond to Figure 3 The upper mounting part 2U, the upper loading and unloading mechanism 8U, the upper position adjustment mechanism 10U, and the upper position sensor 85U shown in the figure are reversed upside down, and are constructed in the same manner as the upper mounting part 2U, the upper loading and unloading mechanism 8U, the upper position adjustment mechanism 10U, and the upper position sensor 85U, so their description is omitted.

[0146] exist Figure 3In the figure, the symbols of the lower mounting part 2D, the lower connector 21D on the device side, the bottom plate 22D, the lower loading and unloading mechanism 8D, the lower holding member 80D, the holding rod 81U, the holding rod 82U, the upper first protrusion 812U, the upper first protrusion 822U, the upper second protrusion 813U, 813U, the upper second protrusion 823U, 823U, the upper position sensor 85U, and the upper position adjustment mechanism 10U corresponding to the upper mounting part 2U, the upper connector 21D on the device side, the bottom plate 22D, the lower loading and unloading mechanism 8D, the lower holding member 80D, the holding rod 81D, the holding rod 82D, the lower second protrusion 812D, the lower second protrusion 822D, the lower first protrusion 813D, 813D, the lower first protrusion 823D, 823D, the lower position sensor 85D, and the lower position adjustment mechanism 10D are illustrated by writing in brackets. The pressing member 11 of the lower position adjustment mechanism 10D corresponds to an example of a third pressing member.

[0147] In the case of the lower holding member 80D, the lower surface of the lower plate 61D inserted into the interval W1 between the holding bars 81D and 82D is supported by the lower first protrusions 813D, 813D and the lower first protrusions 823D, 823D.

[0148] like Figure 4 As shown in FIG. 1 , when the upper plate 61U is inserted into the gap W1 between the retaining rods 81U and 82U and the retaining rods 81U and 82U are raised, the upper plate 61U is pressed against the bottom plate 22U by the upper first protrusions 812U and 822U, and the jig-side upper connector 63U is connected to the device-side upper connector 21U. In this manner, the upper jig 6U is mounted on the upper mounting portion 2U.

[0149] On the other hand, if the retaining rods 81U and 82U are Figure 4 When the state shown in FIG. 1 is lowered, the upper plate 61U is separated from the bottom plate 22U by the upper second protrusions 813U, 813U and the upper second protrusions 823U, 823U. As a result, the upper jig 6U is removed from the upper mounting portion 2U.

[0150] Similarly, in the case of the lower side mounting and dismounting mechanism 8D, when the holding rods 81D and 82D are lowered while the lower plate 61D is inserted into the gap W1 between the holding rods 81D and 82D, the lower plate 61D is pressed against the bottom plate 22D by the lower second protrusions 812D and 822D, and the jig side lower connector 63D is connected to the device side lower connector 21D. In this manner, the lower jig 6D is mounted on the lower mounting portion 2D.

[0151] On the other hand, when the holding rods 81D and 82D rise, the lower plate 61D is separated from the bottom plate 22D by the lower first protrusions 813D, 813D and the lower first protrusions 823D, 823D. As a result, the lower jig 6D is removed from the lower mounting portion 2D.

[0152] Figure 5 The arm member 41 shown in FIG. 4 is connected to the arm driving unit 42c via a connecting portion 43. The arm member 41 has a substantially plate-like shape on which the jig 6 can be placed. The connecting portion 43 links with the driving of the arm driving unit 42c to raise and lower the arm member 41 while maintaining the arm member 41 in a horizontal state.

[0153] Four placement position detection units 44 are provided on the upper surface of the arm member 41 near the connection unit 43. The placement position detection unit 44 is a sensor that detects the placement position of the jig 6 placed on the arm member 41. As the placement position detection unit 44, various sensors such as an optical sensor, an ultrasonic sensor, or a mechanical sensor that physically contacts the jig 6 to detect the position of the jig 6 can be used.

[0154] The front end F of the arm member 41 opposite to the connecting portion 43 is provided with a recessed portion 45 recessed and cut toward the base end R connected to the connecting portion 43. The recessed portion 45 is provided at a portion where the upper jig head 62U is located when the upper jig 6U is placed on the arm member 41.

[0155] Therefore, if the upper jig 6U is placed on the arm member 41, Figure 6 As shown, the upper jig head 62U passes through the recessed portion 45 and protrudes toward the lower side of the arm member 41. In this way, by providing the recessed portion 45, when the upper jig 6U is placed on the arm member 41, the arm member 41 and the upper jig head 62U do not interfere with each other.

[0156] In addition, a pair of grooves 46 are provided on the upper surface of the arm member 41 so as to accommodate the tops 651 of the pair of blades 65. Thus, when the upper jig 6U is placed on the arm member 41, the tops 651 of the pair of blades 65 are embedded in the pair of grooves 46, and as a result, the concern that the upper jig 6U slides laterally on the arm member 41 is reduced.

[0157] In addition, when the upper jig 6U is placed on the arm member 41, the pair of blades 65 are interposed between the arm member 41 and the upper plate 61U. As a result, the upper surface of the arm member 41 and the lower surface of the upper plate 61U are separated by a distance obtained by subtracting the depth of the groove 46 from the height of the blades 65. In this way, the upper surface of the arm member 41 and the lower surface of the upper plate 61U are separated, and the wiring 64U is not sandwiched between the arm member 41 and the upper plate 61U.

[0158] The arm member 41 has an opening 47 formed at a portion where the jig-side lower connector 63D is located when the lower jig 6D is placed on the arm member 41. Thus, even when the lower jig 6D is placed on the arm member 41, the jig-side lower connector 63D of the lower jig 6D does not interfere with the arm member 41. The arm member 41 also has an opening 48 formed in advance.

[0159] The width W2 of the arm member 41 is smaller than the width W3 of the plate 61 . Therefore, when the jig 6 is placed on the arm member 41 , the plate 61 is exposed to both sides of the arm member 41 in the width direction.

[0160] The arm side position adjustment mechanism 9 includes: a pair of pressing parts 91U, 91U, a pair of pressing parts 92U, 92U, a pair of pressing parts 91D, 91D, and a pair of pressing parts 92D, 92D, a total of eight pressing parts, and four pillars 90 supporting these pressing parts. Each pair of pressing parts is arranged to face each other in the Y-axis direction so that the jig 6 placed on the arm member 41 is located between one and the other of the pair of pressing parts. Each pressing part includes a pressing member 911 (first pressing member) and an actuator 912.

[0161] The pair of pressing parts 91U, 91U and the pair of pressing parts 92U, 92U are arranged above the pair of pressing parts 91D, 91D and the pair of pressing parts 92D, 92D. The pair of pressing parts 91U, 91U and the pair of pressing parts 91D, 91D and the pair of pressing parts 92U, 92U and the pair of pressing parts 92D, 92D are arranged to be separated from each other by a predetermined distance shorter than the length of the lower plate 61D and the upper plate 61U in the X-axis direction.

[0162] The pressing parts 91U, 91U, 92U, 92U are used for position adjustment when the upper jig 6U is transported between the upper mounting part 2U and the jig frame 3, and the pressing parts 91D, 91D, 92D, 92D are used for position adjustment when the lower jig 6D is transported between the lower mounting part 2D and the jig frame 3. The arm-side position adjustment mechanism 9 is used to adjust the placement position of the upper jig 6U and the lower jig 6D on the arm member 41, thereby reducing the concern of interference and sliding with the upper loading and unloading mechanism 8U, the lower loading and unloading mechanism 8D, or the jig frame 3 when the upper jig 6U and the lower jig 6D are transported. As a result, the concern of dust generation due to sliding is reduced.

[0163] Furthermore, by including the upper pressing parts 91U, 91U, 92U, 92U and the lower pressing parts 91D, 91D, 92D, 92D, the movement amount of the arm member 41 when conveying the jig 6 to the mounting part 2 can be reduced.

[0164] The actuator 912 moves the pressing member 911 of each pressing portion forward and backward in response to a control signal from the jig transport control unit 71 described later. Figure 6 As shown, the arm side position adjustment mechanism 9 makes the pressing member 911 protrude from both sides of the upper jig 6U or the lower jig 6D placed on the arm member 41, and makes the pressing member 911 abut against the edge of the upper plate 61U or the lower plate 61D, thereby adjusting the placement position of the jig 6 on the arm member 41.

[0165] Figure 1 The jig frame 3a and the jig frame 3b shown in the figure respectively include: longitudinal walls 32, 32 facing each other, two pairs of receiving members 31U, 31U protruding from the inner walls of the longitudinal walls 32, 32, and two pairs of receiving members 31D, 31D. An upper jig 6U can be received by a pair of receiving members 31U, 31U, and a lower jig 6D can be received by a pair of receiving members 31D, 31D. Hereinafter, the receiving members 31U and 31D are collectively referred to as receiving members 31.

[0166] Therefore, the jig rack 3a can accommodate two upper jigs 6U and two lower jigs 6D, and the jig rack 3b can also accommodate two upper jigs 6U and two lower jigs 6D. Figure 1 The jig frame 3 a shows a state in which one upper jig 6U and one lower jig 6D are accommodated, and the jig frame 3 b shows a state in which two upper jigs 6U and two lower jigs 6D are accommodated.

[0167] The interval W4 between the pair of receiving members 31, 31 is narrower than the width W3 of the jig 6 and wider than the width W2 of the arm member 41. Thus, the arm member 41 is inserted under the jig 6 received by the pair of receiving members 31, 31 and the arm member 41 is raised, so that the jig 6 can be lifted by the arm member 41.

[0168] Figure 7 The inspection device 1 shown in the figure includes a control unit 7. The control unit 7 is electrically connected to the device-side lower connector 21D, the device-side upper connector 21U, the arm driving unit 42, the placement position detection unit 44, the arm-side position adjustment mechanism 9, the upper jig lifting mechanism 83U, the upper position sensor 85U, the upper position adjustment mechanism 10U, the lower jig lifting mechanism 83D, the lower position sensor 85D, and the lower position adjustment mechanism 10D.

[0169] The control unit 7 is composed of, for example, a central processing unit (CPU) that performs a predetermined operation process, a random access memory (RAM) that temporarily stores data, a flash memory or a non-volatile storage device such as a hard disk drive (HDD) that stores a predetermined control program, and their peripheral circuits. The control unit 7 functions as a jig transport control unit 71 and an inspection unit 72, for example, by executing the control program.

[0170] If the upper connector 63U on the jig side is connected to the upper connector 21U on the device side, and the lower connector 63D on the jig side is connected to the lower connector 21D on the device side, the upper probe Pu is connected to the control unit 7 via the upper connector 63U on the jig side and the upper connector 21U on the device side, and the lower probe Pd is connected to the control unit 7 via the lower connector 63D on the jig side and the lower connector 21D on the device side.

[0171] The inspection section 72 supplies an inspection current between any of the upper probes Pu and the lower probes Pd and measures a voltage between the any of the probes, thereby inspecting the inspection object 100 .

[0172] The jig transport control unit 71 controls the operation of the arm driving unit 42, the upper jig lifting mechanism 83U, and the lower jig lifting mechanism 83D, thereby transporting the upper jig 6U between the jig frame 3 and the upper mounting portion 2U, and transporting the lower jig 6D between the jig frame 3 and the lower mounting portion 2D.

[0173] In addition, the jig transport control unit 71 controls the arm side position adjustment mechanism 9 based on the placement position of the jig 6 on the arm member 41 detected by the placement position detection unit 44. Thus, the jig transport control unit 71 adjusts the placement position of the jig 6 through the arm side position adjustment mechanism 9 so as to place the jig 6 at an appropriate position on the arm member 41.

[0174] In addition, the jig transport control unit 71 controls the upper position adjustment mechanism 10U based on the holding position of the upper jig 6U held by the upper holding member 80U detected by the upper position sensor 85U. Thus, the jig transport control unit 71 adjusts the position of the upper jig 6U through the upper position adjustment mechanism 10U so that the upper jig 6U is held at an appropriate position by the upper holding member 80U.

[0175] In addition, the jig transport control unit 71 controls the lower position adjustment mechanism 10D based on the holding position of the lower jig 6D held by the lower holding member 80D detected by the lower position sensor 85D. Thus, the jig transport control unit 71 adjusts the position of the lower jig 6D through the lower position adjustment mechanism 10D so that the lower jig 6D is held at an appropriate position by the lower holding member 80D.

[0176] The jig transport control unit 71 controls the operation of the upper jig lifting mechanism 83U to attach and detach the upper jig 6U to the upper mounting portion 2U, and controls the operation of the lower jig lifting mechanism 83D to attach and detach the lower jig 6D to the lower mounting portion 2D.

[0177] The jig transport control unit 71 enables the arm driving unit 42, the arm side position adjustment mechanism 9, the upper jig lifting mechanism 83U, the upper position adjustment mechanism 10U, the lower jig lifting mechanism 83D, and the lower position adjustment mechanism 10D to operate in cooperation, thereby allowing the jig 6 installed on the upper mounting portion 2U and the lower mounting portion 2D to be replaced with other jigs 6 accommodated in the jig rack 3.

[0178] Reference Figure 8 Next, the operation of the inspection device 1 when the jig 6 removed from the mounting portion 2 is stored in the jig holder 3 will be described.

[0179] First, it is assumed that the upper jig 6U is mounted on the upper mounting portion 2U, and the lower jig 6D is mounted on the lower mounting portion 2D. When the upper jig 6U is transported from this state, the upper jig lifting mechanism 83U lowers the upper holding member 80U in response to the control signal from the jig transport control unit 71. Then, the upper second protrusions 813U, 813U, and the upper second protrusions 823U, 823U press the upper surface of the upper plate 61U downward, and as a result, the jig-side upper connector 63U is separated from the device-side upper connector 21U, and the upper jig 6U is removed from the upper mounting portion 2U (step S1).

[0180] There are many cases where more than a thousand upper probes Pu and lower probes Pd are provided. Therefore, there are many cases where the number of pins of the upper connector 63U on the jig side and the lower connector 63D on the jig side also corresponds to the number of probes and exceeds a thousand. The loading and unloading of connectors with more than a thousand pins requires a large force. Therefore, by including the upper second protrusions 813U, 813U, and the upper second protrusions 823U, 823U, the upper jig lifting mechanism 83U can be used to force the upper connector 63U on the jig side to be separated from the upper connector 21U on the device side, and the upper jig 6U can be removed from the upper mounting portion 2U.

[0181] In addition, as indicated in brackets in the flowchart, when the lower jig 6D is transported, the lower jig lifting mechanism 83D raises the lower holding member 80D in response to a control signal from the jig transport control unit 71 (step S1). Thus, the jig-side lower connector 63D can be separated from the device-side lower connector 21D in the same manner as in the case of the upper jig 6U, and the lower jig 6D can be removed from the lower mounting portion 2D.

[0182] Hereinafter, the operations related to the lower jig 6D are preferably described together by being written in parentheses.

[0183] Next, in response to the control signal from the jig transport control unit 71, the arm driving unit 42 inserts the arm member 41 under the upper plate 61U in a non-contact manner without contacting the upper plate 61U, and raises the arm member 41, thereby lifting the upper jig 6U (step S2).

[0184] Fig.11 6U is an explanatory diagram showing a state where the upper jig 6U is lifted. Fig.11 As shown, when the upper jig 6U is placed on the arm member 41 , the tops of the blades 65 , 65 abut against the upper surface of the arm member 41 , and the upper jig head 62U of the upper jig 6U protrudes downward from the recessed portion 45 of the arm member 41 .

[0185] The width W2 of the arm member 41, the interval W5 between the upper first protrusion 812U and the upper first protrusion 822U, the width W3 of the plate 61, and the interval W7 between the longitudinal walls 811 and 821 have a relationship of W2<W5<W3<W7, and the interval W1 between the upper first protrusion 812U and the upper second protrusions 813U, 813U, the interval W1 between the upper first protrusion 822U and the upper second protrusions 823U, 823U, and the thickness T of the plate 61 have a relationship of W1>T. Therefore, the arm member 41 can lift the upper plate 61U without interfering with the upper holding member 80U. As a result, the upper jig 6U and the upper holding member 80U can be brought into a non-contact state.

[0186] In addition, when conveying the lower jig 6D, as in the case of conveying the upper jig 6U, the arm driving unit 42 responds to the control signal from the jig conveying control unit 71, inserts the arm member 41 under the lower plate 61D in a non-contact manner without contacting the lower plate 61D, and raises the arm member 41, thereby lifting the lower jig 6D (step S2).

[0187] like Fig.12 As shown, the width W2 of the arm member 41, the interval W6 between the lower first protrusion 813D and the lower first protrusion 823D, the width W3 of the plate 61, and the interval W7 between the longitudinal walls 811 and 821 have a relationship of W2<W6<W3<W7, and the interval W1 between the lower first protrusions 813D, 813D and the lower second protrusion 812D, the interval W1 between the lower first protrusions 823D, 823D and the lower second protrusion 822D, and the thickness T of the plate 61 have a relationship of W1>T. Therefore, the arm member 41 can lift the lower plate 61D without interfering with the lower holding member 80D. As a result, the lower jig 6D and the lower holding member 80D can be brought into a non-contact state.

[0188] Then, the arm driving unit 42 moves the arm member 41 horizontally in the X-axis direction in response to the control signal from the jig transport control unit 71, thereby extracting the upper plate 61U (lower plate 61D) on the arm member 41 from the upper holding member 80U (lower holding member 80D) and transporting it (step S3).

[0189] In this case, the upper jig 6U (lower jig 6D) and the upper holding member 80U (lower holding member 80D) do not slide in a non-contact state, and the upper jig 6U (lower jig 6D) is conveyed. As a result, dust generation due to sliding can be suppressed. If dust is generated in the inspection device 1 and adheres to the inspection object 100, there is a concern that the correct inspection result cannot be obtained. However, according to steps S2 and S3, the upper jig 6U (lower jig 6D) and the upper holding member 80U (lower holding member 80D) do not slide in a non-contact state, and the upper jig 6U (lower jig 6D) is conveyed, so the concern about dust generation can be reduced.

[0190] Then, the jig transport control unit 71 outputs a control signal to control the arm-side position adjustment mechanism 9 based on the detection position detected by the placement position detection unit 44. The arm-side position adjustment mechanism 9 causes the pressing members 911 of the pressing parts 91U, 91U (pressing parts 91D, 91D) to appropriately protrude from both sides of the jig 6 on the arm member 41 based on the control signal from the jig transport control unit 71. Thus, the placement position of the upper jig 6U (lower jig 6D) on the arm member 41 is adjusted (step S4).

[0191] Then, while the jig 6 is pressed from both sides by the protruding pressing member 911, the arm driving unit 42 rotates the arm member 41 in response to the control signal from the jig transport control unit 71 so that the front end of the arm member 41 faces the jig holder 3 (step S5).

[0192] In this case, the arm member 41 rotates while the jig 6 is held by the pressing member 911 , so that the jig 6 is less likely to be displaced from its placement position or fall off from the arm member 41 due to the rotation.

[0193] Next, the arm-side position adjustment mechanism 9 retracts the pressing member 911 based on the control signal from the jig transport control unit 71 (step S6 ).

[0194] Then, the arm driving unit 42 moves the upper plate 61U (lower plate 61D) on the arm member 41 in a separated state toward the upper side of the receiving members 31U, 31U (receiving members 31D, 31D) in response to the control signal from the jig transport control unit 71 (step S7, Fig.13 ( Fig.14 )).

[0195] In this case, the upper plate 61U (lower plate 61D) can be conveyed above the receiving members 31U, 31U (receiving members 31D, 31D) without sliding on the receiving members 31U, 31U (receiving members 31D, 31D), thereby suppressing dust generation due to sliding.

[0196] In addition, the jig 6 is carried to the jig frame 3 in a state where the placement position of the jig 6 on the arm member 41 is appropriately adjusted in step S4, thereby reducing the concern that the jig 6 and the jig frame 3 will interfere with or slide due to the deviation of the placement position of the jig 6. As a result, the concern that dust will be generated due to interference or sliding can be reduced.

[0197] In addition, in steps S3 to S7, it is preferred that the jig transport control unit 71 monitors the placement position of the jig 6 detected by the placement position detection unit 44 while the jig 6 on the arm member 41 is being transported. Furthermore, when the placement position of the jig 6 deviates and exceeds the preset placement range, it is preferred that the jig transport control unit 71 stops the transport operation of the arm member 41 driven by the arm driving unit 42.

[0198] As a result, during the conveyance process of the jig 6 , there is less concern that the jig 6 will be subjected to a conveyance force while interfering with some object, or that the jig 6 will fall from the arm member 41 .

[0199] Next, the arm driving unit 42 lowers the arm member 41 in response to the control signal from the jig transport control unit 71, and the upper jig 6U (lower jig 6D) is received by the receiving members 31U, 31U (receiving members 31D, 31D) (step S8).

[0200] like Fig.13 As shown, the width W2 of the arm member 41, the interval W4 between the receiving members 31U, 31U, the width W3 of the plate 61, and the interval W8 between the longitudinal walls 32, 32 have a relationship of W2<W4<W3<W8. Therefore, the arm member 41 can be lowered to the bottom of the receiving members 31U, 31U without interfering with the receiving members 31U, 31U, and the receiving members 31U, 31U can receive the upper jig 6U.

[0201] Likewise, if Fig.14 As shown, the width W2 of the arm member 41, the interval W4 between the receiving members 31D, 31D, the width W3 of the plate 61, and the interval W8 between the longitudinal walls 32, 32 have a relationship of W2<W4<W3<W8. Therefore, the arm member 41 can be lowered to the bottom of the receiving members 31D, 31D without interfering with the receiving members 31D, 31D, and the receiving members 31D, 31D can receive the lower jig 6D.

[0202] According to steps S7 and S8, the upper jig 6U (lower jig 6D) and the receiving members 31U, 31U (receiving members 31D, 31D) can be stored in the jig holder 3 without sliding in a non-contact state. As a result, the concern about the generation of dust can be reduced.

[0203] According to the above steps S1 to S8, the upper jig 6U (lower jig 6D) mounted on the upper mounting portion 2U (lower mounting portion 2D) can be removed and stored in the jig rack 3. In addition, the upper jig 6U and the lower jig 6D can be transported at the same time by the arm member 41, so it is easy to transport both the upper jig 6U and the lower jig 6D.

[0204] In step S5 , the arm member 41 does not necessarily need to be rotated while the jig 6 is pressed from both sides by the protruding pressing member 911 . The arm member 41 may be rotated in step S5 after the pressing member 911 is retracted in step S6 .

[0205] Alternatively, after the arm member 41 is rotated in step S5 , the placement position of the jig 6 may be adjusted in step S4 .

[0206] Reference Fig. 9 Next, the operation of the inspection device 1 when the jig 6 taken out from the jig holder 3 is mounted on the mounting portion 2 will be described.

[0207] First, the arm driving unit 42, in response to the control signal from the jig transport control unit 71, inserts the arm member 41, which is separated from the upper plate 61U (lower plate 61D), under the upper plate 61U (lower plate 61D) supported by the supporting members 31U, 31U (31D, 31D), and raises the arm member 41 to lift the upper jig 6U (lower jig 6D) (step S11).

[0208] Fig.13 ( Fig.14 ) indicates a state where the upper jig 6U (lower jig 6D) is lifted by the arm member 41. As described above, since the relationship W2<W4<W3<W8 is established, the arm member 41 can be lifted without interfering with the receiving members 31U, 31U (31D, 31D), so that the upper jig 6U (lower jig 6D) is separated from the receiving members 31U, 31U (31D, 31D).

[0209] Then, the arm driving unit 42 moves the arm member 41 horizontally in response to the control signal from the jig transport control unit 71, and removes the upper jig 6U (lower jig 6D) from the jig holder 3 in a state separated from the receiving members 31U, 31U (31D, 31D) (step S12).

[0210] According to steps S11 and S12, the upper jig 6U (lower jig 6D) and the receiving members 31U, 31U (receiving members 31D, 31D) can be removed from the jig holder 3 without sliding in a non-contact state. As a result, the concern about the generation of dust can be reduced.

[0211] Then, the jig transport control unit 71 outputs a control signal to control the arm position adjustment mechanism 9 according to the detection position detected by the placement position detection unit 44. The arm position adjustment mechanism 9 appropriately protrudes the pressing member 911 of the pressing parts 91U, 91U (pressing parts 91D, 91D) according to the control signal from the jig transport control unit 71. Thus, the placement position of the upper jig 6U (lower jig 6D) on the arm member 41 is adjusted (step S13).

[0212] Then, while the jig 6 is pressed from both sides by the protruding pressing member 911, the arm driving unit 42 rotates the arm member 41 in response to the control signal from the jig transport control unit 71 so that the front end of the arm member 41 faces the direction of the mounting portion 2 (step S14).

[0213] In this case, the arm member 41 rotates while the jig 6 is held by the pressing member 911 , so that the jig 6 is less likely to be displaced from its placement position or fall off from the arm member 41 due to the rotation.

[0214] Then, the arm-side position adjustment mechanism 9 retracts the pressing member 911 according to the control signal from the jig transport control unit 71 (step S15 ).

[0215] Then, the arm driving unit 42 moves the arm member 41 in response to the control signal from the jig transport control unit 71, and inserts the two end portions in the width direction of the upper plate 61U (lower plate 61D) placed on the arm member 41 into the interval W1 between the upper first protrusion 812U, the upper first protrusion 822U and the upper second protrusions 813U, 813U, and the upper second protrusions 823U, 823U (the lower first protrusions 813D, 813D, the lower first protrusions 823D, 823D and the lower second protrusions 812D, 822D) (step S16).

[0216] Fig.11 ( Fig.12 ) represents a state where the upper jig 6U is inserted into the gap W1 of the upper holding member 80U through the arm member 41. As described above, since there is a relationship of W2<W5<W3<W7, and W1>T, the arm member 41 does not interfere with the upper holding member 80U, and the upper jig 6U can be inserted without contacting the upper holding member 80U.

[0217] Likewise, if Fig.12 As shown, since the relationship of W2<W6<W3<W7 and W1>T exists, the arm member 41 does not interfere with the lower holding member 80D, and the lower jig 6D can be inserted without contacting the lower holding member 80D.

[0218] Therefore, according to step S16, the upper jig 6U (lower jig 6D) and the receiving members 31U, 31U (receiving members 31D, 31D) can be inserted into the gap W1 of the upper holding member 80U (lower holding member 80D) without sliding in a non-contact state. As a result, the concern about the generation of dust can be reduced.

[0219] In addition, after adjusting the placement position of the upper jig 6U (lower jig 6D) on the arm member 41 in step S13, the upper jig 6U (lower jig 6D) is inserted into the interval W1 of the upper holding member 80U (lower holding member 80D) in step S16, so that the insertion accuracy of the upper jig 6U (lower jig 6D) is improved. As a result, the concern about interference or sliding between the upper jig 6U (lower jig 6D) and the receiving members 31U, 31U (receiving members 31D, 31D) is reduced. As a result, the concern about dust generation due to interference and sliding can be reduced.

[0220] In addition, in steps S13 to S16, it is preferred that the jig transport control unit 71 monitors the placement position of the jig 6 detected by the placement position detection unit 44 while the jig 6 on the arm member 41 is being transported. Furthermore, when the placement position of the jig 6 deviates and exceeds the preset placement range, it is preferred that the jig transport control unit 71 stops the transport operation of the arm member 41 driven by the arm driving unit 42.

[0221] As a result, during the conveyance process of the jig 6 , there is less concern that the jig 6 will be subjected to a conveyance force while interfering with some object, or that the jig 6 will fall from the arm member 41 .

[0222] Then, the arm driving unit 42 responds to the control signal from the jig transport control unit 71, causing the arm member 41 to descend, and the upper first protrusion 812U and the upper first protrusion 822U (the lower first protrusions 813D, 813D, the lower first protrusions 823D, 823D) support the upper plate 61U (lower plate 61D) (step S17).

[0223] Then, the jig transport control unit 71 outputs a control signal to control each upper position adjustment mechanism 10U (lower position adjustment mechanism 10D) based on the detection position detected by the placement position detection unit 44. Each upper position adjustment mechanism 10U (lower position adjustment mechanism 10D) appropriately protrudes the pressing member 11 toward the upper plate 61U (lower plate 61D) inserted into the upper holding member 80U (lower holding member 80D) in response to the control signal from the jig transport control unit 71, thereby adjusting the position of the upper jig 6U (lower jig 6D) held by the upper holding member 80U (lower holding member 80D) (step S18).

[0224] Then, the upper jig lifting mechanism 83U rises the upper holding member 80U in response to the control signal from the jig transport control unit 71, and the upper jig 6U is mounted on the upper mounting portion 2U (step S19). In the case of the lower jig 6D, the lower jig lifting mechanism 83D descends the lower holding member 80D in response to the control signal from the jig transport control unit 71, and the lower jig 6D is mounted on the lower mounting portion 2D (step S19).

[0225] As described above, the number of pins of the jig-side upper connector 63U and the jig-side lower connector 63D often exceeds one thousand. Connecting a connector having more than one thousand pins requires a large force. Therefore, by including the upper first protrusion 812U and the upper first protrusion 822U, the upper jig-side upper connector 63U can be forcibly connected to the device-side upper connector 21U by using the force of the upper jig lifting mechanism 83U to raise the upper holding member 80U, and the upper jig 6U can be mounted on the upper mounting portion 2U.

[0226] Similarly, by including the lower second protrusion 812D and the lower second protrusion 822D, the force of the lower jig lifting mechanism 83D to lower the lower retaining member 80D can be used to forcibly connect the jig side lower connector 63D and the device side lower connector 21D, thereby installing the lower jig 6D on the lower side mounting portion 2D.

[0227] In addition, before connecting the jig side upper connector 63U (jig side lower connector 63D) and the device side upper connector 21U (device side lower connector 21D) in step S19, the position of the upper jig 6U (lower jig 6D) held by the upper holding member 80U (lower holding member 80D) is finely adjusted in step S18, so that the jig side upper connector 63U (jig side lower connector 63D) and the device side upper connector 21U (device side lower connector 21D) can be positioned with high precision and then connected. As a result, when installing the upper jig 6U (lower jig 6D), the concern that the jig side upper connector 63U (jig side lower connector 63D) and the device side upper connector 21U (device side lower connector 21D) will interfere due to position deviation is reduced.

[0228] According to the above, the upper jig 6U (lower jig 6D) accommodated in the jig holder 3 can be mounted on the upper mounting portion 2U (lower mounting portion 2D) according to steps S11 to S19. Therefore, by combining steps S1 to S8 with steps S11 to S19, the upper jig 6U (lower jig 6D) already mounted on the upper mounting portion 2U (lower mounting portion 2D) and the upper jig 6U (lower jig 6D) already accommodated in the jig holder 3 can be replaced.

[0229] Furthermore, in either case of replacing the upper jig 6U or replacing the lower jig 6D, the same arm member 41 can be used for replacement, so it becomes easy to replace both the upper jig 6U that contacts the upper surface of the inspection object 100 and the lower jig 6D that contacts the lower surface of the inspection object 100.

[0230] In step S14 , the arm member 41 does not necessarily need to be rotated while the jig 6 is pressed from both sides by the protruding pressing member 911 . The arm member 41 may be rotated in step S14 after the pressing member 911 is retracted in step S15 .

[0231] Alternatively, after the arm member 41 is rotated in step S14 , the placement position of the jig 6 may be adjusted in step S13 .

[0232] Furthermore, although the example in which the jig rack 3 can accommodate a plurality of pairs of upper jigs 6U and lower jigs 6D is shown, the jig rack 3 may accommodate only one pair of upper jigs 6U and lower jigs 6D.

[0233] In addition, an example is shown in which the receiving members 31U, 31U (31D, 31D) and the upper jig 6U (lower jig 6D) are prevented from sliding when the upper jig 6U (lower jig 6D) is taken out of the jig frame 3 or the upper jig 6U (lower jig 6D) is placed in the jig frame 3, but the receiving members 31U, 31U (31D, 31D) and the upper jig 6U (lower jig 6D) can also be made to slide.

[0234] In addition, an example is shown in which the upper jig 6U (lower jig 6D) and the upper retaining member 80U (lower retaining member 80D) are prevented from sliding when the upper jig 6U (lower jig 6D) is pulled out or inserted relative to the upper retaining member 80U (lower retaining member 80D), but the upper jig 6U (lower jig 6D) and the upper retaining member 80U (lower retaining member 80D) can also be made to slide.

[0235] In addition, an example is shown in which the arm member 41 is lowered to allow the receiving members 31U, 31U (31D, 31D) to receive the upper jig 6U (lower jig 6D) when the upper jig 6U (lower jig 6D) is accommodated in the jig frame 3. However, it is sufficient to allow the receiving members 31U, 31U (31D, 31D) to receive the upper jig 6U (lower jig 6D) by moving the arm member 41 and the receiving members 31U, 31U (31D, 31D) relative to each other. Therefore, the receiving members 31U, 31U (31D, 31D) may be raised instead of lowering the arm member 41, or the lowering of the arm member 41 may be combined with the raising of the receiving members 31U, 31U (31D, 31D).

[0236] Similarly, when the upper jig 6U (lower jig 6D) is removed from the jig frame 3, the receiving members 31U, 31U (31D, 31D) may be lowered instead of raising the arm member 41 to lift the upper jig 6U (lower jig 6D). Alternatively, the lowering of the receiving members 31U, 31U (31D, 31D) and the raising of the arm member 41 may be combined to lift the upper jig 6U (lower jig 6D).

[0237] In addition, an example is shown in which the arm member 41 is raised to lift the upper jig 6U (lower jig 6D) when the upper jig 6U (lower jig 6D) is pulled out from the upper holding member 80U (lower holding member 80D). However, it is sufficient to lift the upper jig 6U (lower jig 6D) by moving the arm member 41 relative to the upper holding member 80U (lower holding member 80D). Therefore, the upper holding member 80U (lower holding member 80D) may be lowered instead of raising the arm member 41 to lift the upper jig 6U (lower jig 6D), or the lowering of the upper holding member 80U (lower holding member 80D) and the raising of the arm member 41 may be combined to lift the upper jig 6U (lower jig 6D).

[0238] In addition, the arm position adjustment mechanism 9 and the placement position detection unit 44 may not be included, and step S13 may not be performed. In addition, the upper position adjustment mechanism 10U, the lower position adjustment mechanism 10D, the upper position sensor 85U, and the lower position sensor 85D may not be included, and step S18 may not be performed.

[0239] In addition, the openings 47 and 48 may not be formed in the arm member 41. In addition, the grooves 46 and 46 may not be formed in the arm member 41.

[0240] In addition, the upper jig 6U may not include the blades 65 , 65 .

[0241] That is, an inspection device of one example of the present invention comprises: an upper mounting portion, which is arranged above an inspection object of a substantially plate-shaped shape and enables an upper jig holding an upper probe for contacting the upper surface of the inspection object to be detachably mounted from below; a lower mounting portion, which is arranged below the inspection object and enables a lower jig holding a lower probe for contacting the lower surface of the inspection object to be detachably mounted from above; a jig frame, which can accommodate the upper jig and the lower jig; an arm member, which can selectively carry the upper jig and the lower jig; an arm driving portion, which drives the arm member to transport the upper jig and the lower jig; an upper loading and unloading mechanism, which receives the upper jig from the arm member The upper jig is received and mounted on the upper mounting portion; and a lower loading and unloading mechanism is received from the arm member and mounted on the lower mounting portion; the arm driving portion takes out the upper jig from the jig frame and transports it to the upper loading and unloading mechanism, takes out the lower jig from the jig frame and transports it to the lower loading and unloading mechanism, the upper jig comprises: a roughly plate-shaped upper plate; and an upper jig head, which holds a plurality of the upper probes in a direction extending downward from the lower surface side of the upper plate; the lower jig comprises: a roughly plate-shaped lower plate; and a lower jig head, which holds a plurality of the lower probes in a direction extending upward from the upper surface side of the lower plate.

[0242] According to the above configuration, an arm member is included that can selectively carry an upper jig and a lower jig, and an arm driving unit drives the arm member, thereby the upper jig can be taken out from the jig frame and transported to the upper loading and unloading mechanism, and the lower jig can be taken out from the jig frame and transported to the lower loading and unloading mechanism. Moreover, the upper loading and unloading mechanism can receive the upper jig from the arm member and install it on the upper mounting portion, and the lower loading and unloading mechanism can receive the lower jig from the arm member and install it on the lower mounting portion. Therefore, the upper jig and the lower jig can be taken out from the jig frame, and the taken out upper jig and the lower jig can be transported to their respective mounting portions. As a result, it becomes easy to transport both the upper jig that contacts the upper surface of the inspection object and the lower jig that contacts the lower surface of the inspection object.

[0243] Furthermore, it is preferable that a portion of the front end portion of the arm member where the upper jig head is located when the upper jig is placed on the arm member is recessed toward the base end portion and cut out.

[0244] According to the above configuration, the front end of the arm member is recessed and cut toward the base end to avoid the upper jig head that protrudes downward from the plate-shaped upper plate in order to contact the upper surface of the inspection object. As a result, when the upper jig is placed on the arm member, the upper jig head does not interfere with the arm member, so the upper jig can be placed on the arm member for transportation.

[0245] Furthermore, it is preferable to further include a placement position detection unit that detects a placement position of the upper jig or the lower jig placed on the arm member.

[0246] According to the above configuration, since the placement position of the upper jig or the lower jig on the arm member is detected by the placement position detection unit, it is easy to confirm whether the upper jig or the lower jig is placed at an appropriate position on the arm member.

[0247] In addition, it is preferred that an arm side position adjustment mechanism is also included, which, based on the detection result of the loading position detected by the loading position detection unit, causes the first pressing member to protrude toward the upper plate or the lower plate from both sides of the upper jig or the lower jig loaded on the arm member, thereby adjusting the loading position of the upper jig or the lower jig on the arm member.

[0248] According to the above configuration, the placement position of the upper jig or the lower jig can be adjusted so that the upper jig or the lower jig is placed at an appropriate position on the arm member.

[0249] In addition, it is preferred that the upper mounting portion includes an upper connector on the device side, the upper jig also includes an upper connector on the jig side which is arranged on the upper surface side of the upper plate and can be connected to the upper connector on the device side, the lower mounting portion includes a lower connector on the device side, the lower jig also includes a lower connector on the jig side which is arranged on the lower surface side of the lower plate and can be connected to the lower connector on the device side, the upper loading and unloading mechanism connects the upper connector on the device side with the upper connector on the jig side, thereby mounting the upper jig on the upper mounting portion, and the lower loading and unloading mechanism connects the lower connector on the device side with the lower connector on the jig side, thereby mounting the lower jig on the lower mounting portion.

[0250] According to the described structure, the upper connector on the device side and the upper connector on the jig side can be connected by applying the force required for plugging and unplugging the upper connector on the device side and the upper connector on the jig side through the upper loading and unloading mechanism, and the lower connector on the device side and the lower connector on the jig side can be connected by applying the force required for plugging and unplugging the lower connector on the device side and the lower connector on the jig side through the lower loading and unloading mechanism.

[0251] In addition, preferably, wiring connecting the plurality of upper probes to the jig-side upper connector is arranged on the lower surface of the upper plate, and a pair of blades protruding on both sides sandwiching the wiring are provided on the lower surface of the upper plate.

[0252] According to the above configuration, when the upper jig is placed on the arm member, the pair of blades abut against the upper surface of the arm member, and the upper plate is supported by the pair of blades. At this time, a gap corresponding to the height of the pair of blades is generated between the upper surface of the arm member and the upper plate, thereby ensuring space for pulling the wiring.

[0253] Furthermore, it is preferable that a groove portion which is recessed so as to accommodate top portions of the pair of blades is provided on the upper surface of the arm member.

[0254] According to the above configuration, when the upper jig is placed on the arm member, the tops of the pair of blades are accommodated in the grooves, and as a result, there is less concern that the upper jig will slide laterally on the arm member.

[0255] In addition, it is preferable that the tops of the pair of blades are extended and arranged parallel to each other.

[0256] According to the above configuration, when the upper jig is placed on the arm member, it is easy to stably support the upper plate by the pair of blades.

[0257] Furthermore, it is preferable that the arm member is provided with an opening at a portion where the jig-side lower connector is located when the lower jig is placed on the arm member.

[0258] According to the above configuration, even when the jig-side lower connector protrudes from the lower surface of the lower plate, there is less concern that the jig-side lower connector will interfere when the lower jig is placed on the arm member.

[0259] In addition, the upper side loading and unloading mechanism preferably includes: an upper holding member, including an upper first protrusion supporting the lower surface of the upper plate on both sides of the upper plate, and an upper second protrusion arranged above the upper first protrusion and facing the upper first protrusion; and an upper jig lifting mechanism, which raises and lowers the upper holding member; the interval between the upper first protrusion and the upper second protrusion is larger than the thickness of the upper plate, and the lower side loading and unloading mechanism includes: a lower holding member, including a lower first protrusion supporting the lower surface of the lower plate on both sides of the lower plate, and a lower second protrusion arranged above the lower first protrusion and facing the lower first protrusion; and a lower jig lifting mechanism, which raises and lowers the lower holding member; the interval between the lower first protrusion and the lower second protrusion is larger than the thickness of the lower plate.

[0260] According to the above configuration, the upper plate is inserted into the gap between the upper first protrusion and the upper second protrusion, so that the upper holding member can hold the upper jig. Furthermore, the upper holding member is raised and lowered, so that the upper jig can be raised and lowered. In addition, the lower plate is inserted into the gap between the lower first protrusion and the lower second protrusion, so that the lower holding member can hold the lower jig. Furthermore, the lower holding member is raised and lowered, so that the lower jig can be raised and lowered.

[0261] In addition, it is preferred that the arm driving unit drives the arm member to insert the two end portions in the width direction of the upper plate that have been placed on the arm member between the upper first protrusion and the upper second protrusion in a non-contact manner, and the upper jig lifting mechanism causes the upper holding member to rise, thereby connecting the jig-side upper connector on the upper surface of the upper plate held by the upper holding member with the device-side upper connector, and the arm driving unit drives the arm member to insert the two end portions in the width direction of the lower plate that have been placed on the arm member between the lower first protrusion and the lower second protrusion in a non-contact manner, and the lower jig lifting mechanism causes the lower holding member to descend, thereby connecting the jig-side lower connector on the lower surface of the lower plate held by the lower holding member with the device-side lower connector.

[0262] According to the above configuration, the upper first protrusion and the upper second protrusion can be kept from sliding with the upper plate, and the upper plate can be held on the upper holding member, and the upper connector on the jig side can be connected to the upper connector on the device side. In addition, the lower first protrusion and the lower second protrusion can be kept from sliding with the lower plate, and the lower plate can be held on the lower holding member, and the lower connector on the jig side can be connected to the lower upper connector on the device side. Thus, when installing the upper jig and the lower jig, the concern about dust generation due to sliding can be reduced.

[0263] In addition, it is preferred that the upper jig lifting mechanism lowers the upper holding member, thereby removing the upper jig mounted on the upper mounting portion from the upper mounting portion, the arm driving portion drives the arm member, thereby non-contactingly inserting the arm member under the upper plate held by the upper holding member, causing the upper holding member and the arm member to move relative to each other, thereby positioning the upper plate at a position separated from any one of the upper first protrusion and the upper second protrusion, and lifting the upper jig by the arm member to remove the lifted upper jig from the upper holding member. The lower jig lifting mechanism raises the lower holding member, thereby removing the lower jig installed on the lower mounting portion from the lower mounting portion, and the arm driving portion drives the arm member, thereby inserting the arm member non-contactly under the lower plate held by the lower holding member, so that the pair of lower holding members and the arm member move relative to each other, thereby positioning the lower plate at a position separated from any one of the lower first protrusion and the lower second protrusion, and lifting the lower jig by the arm member to extract the lifted lower jig from the lower holding member.

[0264] According to the above configuration, the upper jig is removed from the upper mounting portion, the arm member is inserted under the upper plate in a non-contact manner, and the upper plate is located at a position separated from either the upper first protrusion or the upper second protrusion, and then the upper jig is lifted and pulled out by the arm member. Therefore, when the upper jig is removed from the upper mounting portion, the concern about dust generated by sliding can be reduced. In addition, the lower jig is removed from the lower mounting portion, the arm member is inserted under the lower plate in a non-contact manner, and the lower plate is located at a position separated from either the lower first protrusion or the lower second protrusion, and then the lower jig is lifted and pulled out by the arm member. Therefore, when the lower jig is removed from the lower mounting portion, the concern about dust generated by sliding can be reduced.

[0265] In addition, it is preferred that it also includes: an upper position adjustment mechanism, which causes the second pressing member to protrude toward the upper plate from both sides of the upper plate held by the upper retaining member, thereby adjusting the position of the upper jig; and a lower position adjustment mechanism, which causes the third pressing member to protrude toward the lower plate from both sides of the lower plate held by the lower retaining member, thereby adjusting the position of the lower jig.

[0266] According to the above configuration, the holding position of the upper jig held by the upper holding member and the holding position of the lower jig held by the lower holding member can be finely adjusted.

[0267] In addition, it is preferred that the arm driving unit inserts the arm member under the upper jig accommodated in the jig frame to lift the upper jig, thereby removing the upper jig from the jig frame, and inserts the arm member under the lower jig accommodated in the jig frame to lift the lower jig, thereby removing the lower jig from the jig frame.

[0268] According to the above configuration, the upper jig and the lower jig stored in the jig holder are lifted up by the arm member and taken out. Therefore, when the upper jig and the lower jig are taken out from the jig holder, the concern of dust generation due to sliding can be reduced.

[0269] In addition, it is preferred that the jig frame includes a pair of receiving members, and the pair of receiving members can receive both ends of at least one of the upper plate and the lower plate from below, and the arm driving unit inserts the arm member in a state separated from the upper plate under the upper plate received by the pair of receiving members in the jig frame, lifts the upper jig by moving the pair of receiving members relative to the arm member, and removes the upper jig from the jig frame in a state where the upper plate is separated from the pair of receiving members, and in the jig frame, inserts the arm member in a state separated from the lower plate under the lower plate received by the pair of receiving members, lifts the lower jig by moving the pair of receiving members relative to the arm member, and removes the lower jig from the jig frame in a state where the lower plate is separated from the pair of receiving members.

[0270] According to the above configuration, the arm member is inserted under the upper plate in a state separated from the upper plate, the upper jig is lifted, and the upper jig is removed from the jig frame in a state where the upper plate is separated from the pair of receiving members. Therefore, when the upper jig is removed from the jig frame, the concern about dust generated by sliding can be reduced. In addition, the arm member is inserted under the lower plate in a state separated from the lower plate, the lower jig is lifted, and the lower jig is removed from the jig frame in a state where the lower plate is separated from the pair of receiving members. Therefore, when the lower jig is removed from the jig frame, the concern about dust generated by sliding can be reduced.

[0271] In addition, it is preferred that the arm driving unit transports the upper plate placed on the arm member in a separated state toward the top of the pair of receiving members of the jig frame, and moves the pair of receiving members and the arm member relative to each other, thereby causing the pair of receiving members to receive the upper plate and accommodate the upper jig in the jig frame, and transports the lower plate placed on the arm member in a separated state toward the top of the pair of receiving members of the jig frame, and moves the pair of receiving members and the arm member relative to each other, thereby causing the pair of receiving members to receive the lower plate and accommodate the lower jig in the jig frame.

[0272] According to the above configuration, the upper plate is transported in a separated state toward the upper side of the pair of receiving members, so that the pair of receiving members receive the upper plate and the upper jig is stored in the jig rack, so when the upper jig is stored in the jig rack, the concern about dust generated by sliding can be reduced. In addition, the lower plate is transported in a separated state toward the upper side of the pair of receiving members, so that the pair of receiving members receive the lower plate and the lower jig is stored in the jig rack, so when the lower jig is stored in the jig rack, the concern about dust generated by sliding can be reduced.

[0273] In addition, it is preferred that the jig rack can accommodate a plurality of the upper jigs and a plurality of the lower jigs.

[0274] According to the above configuration, the upper jig and the lower jig for replacement can be stored in the jig holder in advance, so that the replacement of the jig becomes easy.

Claims

1. An inspection device, include: An upper mounting portion is disposed above a plate-shaped inspection object and is detachably mounted from below an upper jig that holds an upper probe for contacting an upper surface of the inspection object; A lower mounting portion is disposed below the inspection object and allows a lower jig for holding a lower probe for contacting a lower surface of the inspection object to be detachably mounted from above; A jig frame capable of accommodating the upper jig and the lower jig; An arm member capable of selectively placing the upper jig and the lower jig; an arm driving unit that drives the arm member to transport the upper jig and the lower jig; an upper loading and unloading mechanism, receiving the upper jig from the arm member and mounting it on the upper mounting portion; as well as a lower side loading and unloading mechanism, receiving the lower jig from the arm member and mounting it on the lower side mounting portion; The arm driving unit takes out the upper jig from the jig rack and transports it to the upper loading and unloading mechanism, and takes out the lower jig from the jig rack and transports it to the lower loading and unloading mechanism. The upper fixture comprises: a plate-like upper plate; and an upper jig head for holding the plurality of upper probes in a direction extending downward from the lower surface side of the upper plate; The lower fixture comprises: a plate-like lower plate; and The lower fixture head holds the plurality of lower probes in a direction extending upward from the upper surface side of the lower plate, When the upper jig is placed on the arm member, the front end portion of the arm member is recessed and cut in the direction of the base end portion at the portion where the upper jig head is located. 2 . The inspection device according to claim 1 , further comprising a placement position detection unit that detects a placement position of the upper jig or the lower jig placed on the arm member. 3 .

3. The inspection device according to claim 2 further includes an arm side position adjustment mechanism, which, based on the detection result of the loading position detected by the loading position detection unit, causes the first pressing member to protrude toward the upper plate or the lower plate from both sides of the upper jig or the lower jig loaded on the arm member, thereby adjusting the loading position of the upper jig or the lower jig on the arm member.

4. The inspection device according to claim 1, wherein the upper mounting portion includes an upper device-side connector, The upper fixture further includes a fixture-side upper connector disposed on the upper surface side of the upper plate and capable of being connected to the device-side upper connector. The lower mounting portion includes a device-side lower connector, The lower fixture further includes a fixture-side lower connector disposed on the lower surface side of the lower plate and capable of being connected to the device-side lower connector. The upper side mounting and dismounting mechanism connects the upper connector on the device side with the upper connector on the jig side, thereby mounting the upper jig on the upper side mounting portion. The lower side mounting and detaching mechanism connects the device side lower connector and the jig side lower connector, thereby mounting the lower jig on the lower side mounting portion.

5. The inspection device according to claim 4, wherein wiring for connecting the plurality of upper probes to the upper connector on the jig side is arranged on the lower surface side of the upper plate, A pair of blades are provided on the lower surface of the upper plate so as to protrude on both sides sandwiching the wiring. 6 . The inspection device according to claim 5 , wherein a groove portion recessed so as to accommodate top portions of the pair of blades is provided on an upper surface of the arm member.

7. The inspection device according to claim 1, wherein the upper loading and unloading mechanism include: an upper holding member, comprising upper first protrusions supporting the lower surface of the upper plate at both sides of the upper plate, and upper second protrusions disposed above the upper first protrusions and facing the upper first protrusions; as well as An upper fixture lifting mechanism is used to lift and lower the upper holding member; The interval between the upper first protrusion and the upper second protrusion is larger than the thickness of the upper plate. The lower loading and unloading mechanism comprises: a lower holding member including lower first protrusions supporting the lower surface of the lower plate at both sides of the lower plate, and lower second protrusions disposed above the lower first protrusions and facing the lower first protrusions; and A lower fixture lifting mechanism is used to lift and lower the lower holding member; The interval between the lower first protrusion and the lower second protrusion is larger than the thickness of the lower plate.

8. The inspection device according to any one of claims 1 to 7, wherein the arm driving unit inserts the arm member under the upper jig accommodated in the jig holder to lift the upper jig, thereby removing the upper jig from the jig holder, The arm member is inserted under the lower jig accommodated in the jig holder to lift the lower jig, thereby taking the lower jig out of the jig holder. 9 . The inspection device according to claim 1 , wherein the jig rack is capable of accommodating a plurality of the upper jigs and a plurality of the lower jigs.

10. An inspection device, include: An upper mounting portion is disposed above a plate-shaped inspection object and is detachably mounted from below an upper jig that holds an upper probe for contacting an upper surface of the inspection object; A lower mounting portion is disposed below the inspection object and allows a lower jig for holding a lower probe for contacting a lower surface of the inspection object to be detachably mounted from above; A jig frame capable of accommodating the upper jig and the lower jig; An arm member capable of selectively placing the upper jig and the lower jig; an arm driving unit that drives the arm member to transport the upper jig and the lower jig; an upper loading and unloading mechanism, receiving the upper jig from the arm member and mounting it on the upper mounting portion; as well as a lower side loading and unloading mechanism, receiving the lower jig from the arm member and mounting it on the lower side mounting portion; a placement position detection unit configured to detect a placement position of the upper jig or the lower jig placed on the arm member, The arm driving unit takes out the upper jig from the jig rack and transports it to the upper loading and unloading mechanism, and takes out the lower jig from the jig rack and transports it to the lower loading and unloading mechanism. The upper fixture comprises: a plate-like upper plate; and an upper jig head for holding the plurality of upper probes in a direction extending downward from the lower surface side of the upper plate; The lower fixture comprises: a plate-like lower plate; and The lower jig head holds the plurality of lower probes in a direction extending upward from the upper surface side of the lower plate.

11. The inspection device according to claim 10, wherein the upper mounting portion comprises an upper connector on the device side, The upper fixture further includes a fixture-side upper connector disposed on the upper surface side of the upper plate and capable of being connected to the device-side upper connector. The lower mounting portion includes a device-side lower connector, The lower fixture further includes a fixture-side lower connector disposed on the lower surface side of the lower plate and capable of being connected to the device-side lower connector. The upper side mounting and dismounting mechanism connects the upper connector on the device side with the upper connector on the jig side, thereby mounting the upper jig on the upper side mounting portion. The lower side mounting and detaching mechanism connects the device side lower connector and the jig side lower connector, thereby mounting the lower jig on the lower side mounting portion.

12. The inspection device according to claim 11, wherein wiring for connecting the plurality of upper probes to the upper connector on the jig side is arranged on the lower surface side of the upper plate, A pair of blades are provided on the lower surface of the upper plate so as to protrude on both sides sandwiching the wiring. 13 . The inspection device according to claim 12 , wherein a groove portion recessed so as to accommodate top portions of the pair of blades is provided on an upper surface of the arm member.

14. The inspection device according to claim 10, wherein the upper loading and unloading mechanism include: an upper holding member, comprising upper first protrusions supporting the lower surface of the upper plate at both sides of the upper plate, and upper second protrusions disposed above the upper first protrusions and facing the upper first protrusions; as well as An upper fixture lifting mechanism is used to lift and lower the upper holding member; The interval between the upper first protrusion and the upper second protrusion is larger than the thickness of the upper plate. The lower loading and unloading mechanism comprises: a lower holding member including lower first protrusions supporting the lower surface of the lower plate at both sides of the lower plate, and lower second protrusions disposed above the lower first protrusions and facing the lower first protrusions; and A lower fixture lifting mechanism is used to lift and lower the lower holding member; The interval between the lower first protrusion and the lower second protrusion is larger than the thickness of the lower plate.

15. The inspection device according to any one of claims 10 to 14, wherein the arm driving unit inserts the arm member under the upper jig accommodated in the jig holder to lift the upper jig, thereby removing the upper jig from the jig holder, The arm member is inserted under the lower jig accommodated in the jig holder to lift the lower jig, thereby taking the lower jig out of the jig holder. 16 . The inspection device according to claim 10 , wherein the jig rack is capable of accommodating a plurality of the upper jigs and a plurality of the lower jigs.

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