Boat pushing device and boat pushing system

Abstract

The present invention discloses a boat pusher device and a boat pusher system, wherein the boat pusher device is used to push a wafer boat into or push out a plurality of furnace tubes of a furnace tube device, and comprises: a first frame; a first conveying part, mounted on the first frame, and drivable along the Z-axis direction; at least one second conveying part, mounted on and driven by the first conveying part, and the second conveying part can be driven along the X-axis direction perpendicular to the Z-axis direction; at least one first bearing part, used to carry the wafer boat, mounted on and carried by the second conveying part, so as to push the wafer boat into or push out the furnace tube. The boat pusher device according to the present invention can improve the use efficiency of the boat pusher device and reduce the cost of the boat pusher system.

Description

Technical Field

[0001] The present invention relates to, but is not limited to, the field of photovoltaic cell manufacturing technology, and in particular to a boat pushing device and a boat pushing system. Background Art

[0002] Photovoltaic power generation is generally considered to be an industry with great development prospects. Solar photovoltaic cells (hereinafter referred to as photovoltaic cells) are batteries that convert solar energy into electrical energy and are one of the core components of photovoltaic power generation. In the manufacturing process of photovoltaic cells, furnace tube equipment is one of the core equipment. Furnace tube equipment includes diffusion furnaces, oxidation furnaces, annealing furnaces, PECVD and LPCVD, etc., which are widely used as reaction chambers for diffusion, oxidation, annealing and deposition processes of photovoltaic cells.

[0003] In the boat pushing system (loading and unloading) of the wafer boat, the furnace tube equipment usually loads and unloads the wafer boat through a boat pushing device, and the boat pushing device pushes the wafer boat into the furnace tube of the furnace tube equipment or takes it out of the furnace tube. In the boat pushing system of the known furnace tube equipment, the furnace tube of the furnace tube equipment and the boat pushing device are usually in a one-to-one correspondence, that is, one boat pushing device corresponds to one furnace tube, and if one equipment has several furnace tubes, it corresponds to several boat pushing devices, which is very costly. In addition, the time the wafer boat is in the furnace tube is much longer than the time the boat pushing device is in action. When the wafer boat is in the process in the reaction chamber, the boat pushing device is in a standby state, and the efficiency is extremely low, which also leads to a waste of cost. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the known technology. To this end, the present invention proposes a boat pushing device, which can improve the use efficiency of the boat pushing device and reduce the cost of the boat pushing system. In addition, the present invention also proposes a boat pushing system using the boat pushing device.

[0005] According to the first aspect of the present invention, a boat pushing device is used to push a wafer boat into or push it out of a plurality of furnace tubes of a furnace tube device, and includes: a first frame; a first conveying part, which is installed on the first frame and can be driven along the Z-axis direction; at least one second conveying part, which is installed on and driven by the first conveying part, and the second conveying part can be driven along the X-axis direction perpendicular to the Z-axis direction; at least one first carrying part, which is used to carry the wafer boat, is installed on the second conveying part and is transported by the second conveying part, so as to push the wafer boat into or push it out of the furnace tube.

[0006] The boat push device according to the first aspect of the embodiment has at least the following beneficial effects: since a first conveying portion drivable along the Z-axis direction is provided, the second conveying portion loaded with the first carrying portion for carrying the wafer boat can be driven along the Z-axis direction, and one boat push device can correspond to multiple furnace tubes, thereby improving the use efficiency of the boat push device and reducing the cost of the boat push system.

[0007] In some embodiments, the second conveying parts include two parts, which are respectively mounted on the first conveying parts; the first bearing parts include two parts, which are respectively mounted on the two second conveying parts.

[0008] In some embodiments, the first conveying part includes a first driving part and two first guiding parts guiding along the Z-axis direction, and the two first guiding parts are respectively installed on both sides of the first frame in the Y-axis direction; the two second conveying parts are respectively installed on the two first guiding parts and are respectively connected to the first driving part.

[0009] In some embodiments, a first connecting portion is further included, wherein the first connecting portion is respectively connected to the two second conveying portions and is connected to the first driving portion.

[0010] In some embodiments, the second conveying portion includes a second driving portion and a second guiding portion, the second guiding portion guides along the X-axis direction, and the first bearing portion is mounted on the second guiding portion and connected to the second driving portion.

[0011] In some embodiments, the two second conveying parts include two second guide parts, the two second guide parts are respectively guided along the X-axis direction, and the two first bearing parts are respectively installed on the two second guide parts; the two second conveying parts include a second driving part, and the two first bearing parts are respectively connected to the second driving parts.

[0012] In some embodiments, a third conveying portion is further included, the third conveying portion is drivable along a Y-axis direction which is perpendicular to the Z-axis direction and the X-axis direction, and the first frame is mounted to the third conveying portion.

[0013] In some embodiments, the third conveying parts include two parts spaced apart in the Z-axis direction, and both ends of the first frame in the Z-axis direction are respectively mounted to the third conveying parts adjacent thereto.

[0014] According to the second aspect of the present invention, the boat pushing system includes: a furnace tube device, the furnace tube device has one to four furnace tube groups, and the furnace tube groups include multiple furnace tubes distributed along the Z-axis direction; any one of the above-mentioned boat pushing devices, the boat pushing device pushes the wafer boat into the furnace tube or pushes it out of the furnace tube.

[0015] The boat push system according to the second aspect of the embodiment has at least the following beneficial effects: since the boat push device is provided with a first conveying part drivable along the Z-axis direction, the second conveying part loaded with the first carrying part for carrying the wafer boat can be driven along the Z-axis direction, and one boat push device can correspond to multiple furnace tubes of the furnace tube device, thereby improving the utilization efficiency of the boat push device, reducing the number of boat push devices in the furnace tube device, and thereby reducing the cost of the boat push system.

[0016] In some embodiments, the furnace tube equipment includes multiple units along the Y-axis direction, the boat pushing device includes one unit, and the boat pushing device pushes the wafer boat into each of the furnace tubes of the multiple furnace tube equipment or pushes it out of the furnace tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of a front view direction of an embodiment of a boat pushing device according to the first aspect of the present invention.

[0018] Figure 2 yes Figure 1 Schematic diagram of the rear view direction of the boat pusher.

[0019] Figure 3 It is a schematic diagram of another embodiment of a boat pushing device in a front view direction.

[0020] Figure 4 yes Figure 3 Schematic diagram of the rear view direction of the boat pusher.

[0021] Figure 5 It is a simplified schematic diagram of the main viewing direction of an embodiment of the push boat system of the second aspect of the present invention.

[0022] Figure 6 yes Figure 5 A simplified schematic diagram of a push boat system from a side view. DETAILED DESCRIPTION

[0023] The embodiments of the invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the invention, and cannot be understood as limiting the invention.

[0024] In the description of the invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the drawings and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the invention.

[0025] In the description of the invention, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of the first or the second, it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0026] In the description of the invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meaning of the above terms in the invention based on the specific content of the technical solution.

[0027] Figure 1 is a schematic diagram of the boat pushing device 100 in the front view direction, Figure 2 is a schematic diagram of the boat pushing device 100 in the rearward direction, referring to Figure 1 , Figure 2 According to the first aspect of the present invention, the boat pushing device 100 is used to push the wafer boat 101 into the furnace tube device 200 (see auxiliary reference Figure 5 , Figure 6 ) or pushed out from the furnace tube 201, comprising: a first frame 102, a first conveying part 103, at least one second conveying part 104 and at least one first carrying part 105. Among them, the first conveying part 103 is installed on the first frame 102, and the first conveying part 103 can be driven along the Z-axis direction. The second conveying part 104 is installed on the first conveying part 103 and driven by the first conveying part 103, and the second conveying part 104 can be driven along the X-axis direction perpendicular to the Z-axis direction. The first carrying part 105 is used to carry the wafer boat 101, and the first carrying part 105 is installed on the second conveying part 104 and carried by the second conveying part 104, so as to push the wafer boat 101 into the furnace tube 201 or push it out from the furnace tube 201.

[0028] In this embodiment, since the first conveying section 103 that can be driven along the Z-axis direction is provided, the second conveying section 104 loaded with the first carrying section 105 for carrying the wafer boat 101 can be driven along the Z-axis direction, so that one boat pusher device 100 can correspond to multiple furnace tubes 201, which can improve the use efficiency of the boat pusher device 100 and reduce the cost of the boat pusher system 300 (described later).

[0029] Specifically, the furnace tube equipment 200 includes but is not limited to a diffusion furnace, an oxidation furnace, an annealing furnace, PECVD and LPCVD.

[0030] Specifically, the wafer boat 101 is a carrier for carrying silicon wafers, including, for example, a quartz boat and a graphite boat.

[0031] Specifically, the first frame 102 may be a frame erected along the Z-axis direction. As long as the flatness of each mounting surface of the first frame 102 can be ensured, the formation method of the first frame 102 is not particularly limited. For example, the first frame 102 may be welded using profiles such as square tubes, channel steels, and I-beams, and finely processed by, for example, a gantry milling machine, a machining center, etc. In addition, if the strength is sufficient, the first frame 102 may also be spliced ​​using aluminum profiles.

[0032] Specifically, the first conveying part 103 includes a first driving part 106 and a first guiding part 107 guided along the Z-axis direction. The first driving part 106 includes a driving component 108 and a transmission component 109. As the driving component 108, a motor such as a three-phase asynchronous motor, a stepping motor, a servo motor, etc. can be selected. In the case of increasing the torque, the driving component 108 can also be increased. A speed reducer. As the transmission component 109, for example, a ball screw transmission component, a trapezoidal screw transmission component, a gear rack transmission component, a synchronous belt transmission component, and a chain transmission component can be selected, but it is not limited to this. In addition, in order to realize the self-locking of the first driving part 106, for example, in a power-off state, the motor can select a motor with a braking function (i.e., a brake). In addition, a transmission component 109 with a self-locking function, such as a trapezoidal screw transmission component, can also be selected. As the first guiding part 107, a guide component such as a linear slide, a linear guide shaft, a dovetail groove, etc. can be selected, but it is not limited to this. Taking the linear slide rail as an example, the first guide portion 107 may include two or more groups of linear slide rail assemblies 110 spaced apart along the X-axis direction, and each group of linear slide rail assemblies 110 guides along the Z-axis direction. The first drive portion 106 is installed between the two spaced groups of linear slide rail assemblies 110. In addition, a single-axis manipulator (a commercially available single-axis manipulator may be selected) that integrates the first drive portion 106 and the first guide portion 107 may be selected as the first conveying portion 103. Furthermore, when a single-axis manipulator is selected as the first conveying portion 103, the first conveying portion 103 may select one single-axis manipulator, or may select, for example, two single-axis manipulators for synchronous drive.

[0033] Similarly, the second conveying unit 104 includes a second driving unit 111 and a second guiding unit 112 guided along the X-axis direction. The structure of the second conveying unit 104 can be set with reference to the structure of the first conveying unit 103. For example, the second conveying unit 104 can also select a commercially available single-axis robot that integrates the second driving unit 111 and the second guiding unit 112. The single-axis robot of the second conveying unit 104 is mounted on the first conveying unit 103, driven by the first conveying unit 103 and switched along the Z-axis direction according to the position of the furnace tube 201 of the furnace tube equipment 200.

[0034] In addition, the first carrying part 105 is mounted on the second conveying part 104. As described above, the first carrying part 105 is used to carry a quartz boat or a graphite boat as the wafer carrier boat 101. The first carrying part 105 includes a carrying paddle 113 for carrying the wafer carrier boat 101. The carrying paddle 113 is a cantilever paddle and can be mounted to the second conveying part 104 through a known mounting structure 114. The carrying paddle 113 can be made of, for example, SIC material (silicon carbide material). The carrying paddle 113 can include one to support the bottom side of the wafer carrier boat 101.

[0035] Figure 3 is a schematic diagram of the boat pushing device 100a in the forward direction, Figure 4 is a schematic diagram of the boat pushing device 100a in the rearward direction, Figure 5 It is a simplified schematic diagram of the main viewing direction of the boat pushing system 300. Figure 6 3 is a schematic diagram of the push boat system 300 from the side. Figure 3 , Figure 4 And auxiliary reference Figure 5 , Figure 6 In some embodiments, when the furnace tube group 202 of the furnace tube device 200 has multiple columns distributed along the Y-axis direction (auxiliary reference Figure 5 , Figure 6 ), in order to further improve the utilization rate of the boat pusher device 100, the second conveying part 104 includes two, which are respectively installed on the first conveying part 103, and the first bearing part 105 also includes two, and the two first bearing parts 105 are respectively installed on the two second conveying parts 104. Specifically, the first conveying part 103 includes a first driving part 106 and two first guide parts 107, and the two first guide parts 107 are respectively installed on both sides of the Y-axis direction of the first frame 102 along the Y-axis direction; the two second conveying parts 104 are respectively installed on the two first guide parts 107, and are respectively connected to the first driving part 106. In addition, the first driving part 106 may include a driving component 108 and two transmission components 109, and the two second conveying parts 104 are installed on the two transmission components 109 one by one, and are respectively connected to the driving component 108. Thus, when there are two rows of furnace tube groups 202 distributed in the Y direction in the furnace tube device 200, for example, the two second conveying parts 104 can be driven in the Z-axis direction by a first driving part 106, and the wafer boat 101 can be sent into the furnace tube 201 or taken out of the furnace tube 201 by the first supporting part 105, thereby improving the utilization rate of the boat pushing device 100.

[0036] More specifically, first mounting surfaces 115 are processed on both sides of the first frame 102 in the Y-axis direction, and the linear guide rails serving as the first guide portion 107 are respectively mounted on the first mounting surfaces 115 on the two sides of the first frame 102. In order to improve the parallelism between the linear guide rails on both sides of the Y-axis direction of the first frame 102, a parallelism adjustment block (not shown) may be installed before the linear guide rails are installed. The parallelism adjustment block is locked with a plurality of adjustment screws. Before the parallelism adjustment block is pre-locked to the first frame 102, the parallelism of the parallelism adjustment block relative to its mounting surface is detected by a parallelism tester (not shown), and the adjustment screws are gradually rotated for adjustment, and then the parallelism adjustment block is completely locked, and then the linear guide rail serving as the first guide portion 107 is installed on the parallelism adjustment block. In addition, after the adjustment of the parallelism of the linear guide rail on one side of the first frame 102 in the Y-axis direction relative to the first frame 102 is completed, the parallelism of the parallelism adjustment block on the other side of the first frame 102 in the Y-axis direction relative to the adjusted linear guide rail is adjusted. In this way, the mutual parallelism of the two first guide parts 107 can be improved, ensuring that the first conveying part 103 can smoothly convey the two second conveying parts 104.

[0037] In addition, although the above description uses the example of adjusting the parallelism between the two first guides 107 by the parallelism adjustment block, it is not limited to this. The linear guide rails as the first guides 107 can also be directly locked to the two sides of the Y-axis direction of the first frame 102, and the parallelism between them can be adjusted by adjusting shims (not shown).

[0038] In some embodiments, in order to realize synchronous driving of the two second conveying parts 104 by the first driving part 106, a first connecting part 116 is further included, and the first connecting part 116 is respectively connected to the two second conveying parts 104 and connected to the first driving part 106. Specifically, the first connecting part 116 includes a plurality of connecting shafts 117 respectively connected to the two second conveying parts 104, and the two axial ends of the connecting shafts 117 are respectively connected to the second conveying parts 104. In order to prevent the parallelism of the two second conveying parts 104 from deviating due to processing, assembly accuracy and other reasons after being connected by the connecting shafts 117, the connecting shaft 117 can be fastened to one of the second conveying parts 104 at one end, and the other end can be floatably mounted to the other second conveying part 104 along the Y-axis direction through an elastic member such as a spring (not shown), thereby ensuring the parallelism of the two second conveying parts 104 after being connected.

[0039] Continue to refer to Figure 3 , Figure 4 And auxiliary reference Figure 5 , Figure 6In some embodiments, when the second conveying parts 104 include two, in order to facilitate the control of the second conveying parts 104, each second conveying part 104 may include a second driving part 111 and a second guiding part 112, the second guiding part 112 guides along the X-axis direction, and the first bearing part 105 is mounted on the second guiding part 112 and connected to the second driving part 111. By making each second conveying part 104 have an independent second driving part 111, each second conveying part 104 can independently drive each first bearing part 105 to load and / or unload the wafer boat 101.

[0040] In some embodiments, when the second conveying part 104 includes two, in order to reduce the cost of the boat pushing device 100, the two second conveying parts 104 may also include two second guide parts 112, the two second guide parts 112 are respectively guided along the X-axis direction, and the two first bearing parts 105 are mounted on the two second guide parts 112. Different from the above embodiment, the two second conveying parts 104 can use a second drive part 111 in common, and the two first bearing parts 105 are respectively connected to the second drive part 111. Specifically, for example, the second conveying part 104 can respectively select a commercially available slide module without a motor as the second guide part 112, and then select a motor with a dual output shaft as the second drive part 111, and the two slide modules are respectively connected to the output shaft of the motor of the second drive part 111 through, for example, a coupling. In this way, it is possible to achieve that the first bearing part 105 is driven by a second drive part 111, thereby reducing the cost of the boat pushing device 100.

[0041] Continue to refer to Figure 3 , Figure 4In some embodiments, when the furnace tube group 202 of the furnace tube device 200 has multiple rows distributed along the Y-axis direction, in order to further improve the utilization rate of the boat pusher 100, a third conveying portion 118 may be further included. The third conveying portion 118 may be driven along the Y-axis direction which is perpendicular to the Z-axis direction and the X-axis direction, and the first frame 102 is mounted on the third conveying portion 118. Specifically, the boat pusher 100 may be provided with a second frame 119, and the third conveying portion 118 is mounted on the second frame 119. The second frame 119 may be provided with reference to the first frame 102, for example, it may be processed by profile welding, by a machining center, etc. The third conveying part 118 can also be set with reference to the first conveying part 103, for example, it can include a third driving part 120 with a motor and a third guiding part 121 with a linear slide rail. The first frame 102 is mounted on the third guiding part 121 and connected to the third driving part 120. Thus, the third conveying part 118 drives the first frame 102 along the Y-axis direction, thereby driving the first conveying part 103 mounted on the first frame 102 and the second conveying part 104 mounted on the first conveying part 103 to move. By setting the third conveying part 118, it is possible to cover multiple rows of furnace tube groups 202 distributed along the Y-axis direction through one boat pusher 100, thereby further improving the utilization rate of the boat pusher 100.

[0042] Continue to refer to Figure 3 , Figure 4 And auxiliary reference Figure 5 , Figure 6 In some embodiments, in order to drive the first frame 102 more stably, and thus the first conveying part 103 and the second conveying part 104 etc. mounted on the first frame 102 more stably, the third conveying part 118 may include two spaced apart in the Z-axis direction, and the two ends of the first frame 102 in the Z-axis direction are respectively mounted to the third conveying parts 118 adjacent thereto. Specifically, two second frames 119 may be arranged in the Z-axis direction, and each second frame 119 is respectively equipped with a third conveying part 118, so that the first frame 102 is transported by the two third conveying parts 118, and the first frame 102 can be driven more stably. In addition, in order to solve the problem of synchronous driving of the two third conveying parts 118, the motors of the two third driving parts 120 may be controlled by the same motor controller.

[0043] Reference Figure 5 , Figure 6As described above, the boat pushing device 100 of each embodiment above can be used for pushing the wafer boat 101 of the furnace tube device 200 (loading and unloading). The boat pushing system 300 according to the second aspect of the present invention comprises: a furnace tube device 200 and a boat pushing device 100, wherein the furnace tube device 200 has one to four furnace tube groups 202, and the furnace tube group 202 comprises a plurality of furnace tubes 201 distributed along the Z-axis direction; the boat pushing device 100 pushes the wafer boat 101 into the furnace tube 201 or pushes it out of the furnace tube 201 respectively.

[0044] In the present embodiment, since the boat push device 100 of the boat push system 300 is provided with a first conveying section 103 which can be driven along the Z-axis direction, the second conveying section 104 loaded with the first carrying section 105 for carrying the wafer boat 101 can be driven along the Z-axis direction, and one boat push device 100 can correspond to multiple furnace tubes 201, thereby improving the utilization efficiency of the boat push device 100, reducing the number of boat push devices 100 in the boat push system 300, and thereby reducing the cost of the boat push system 300.

[0045] In addition, the above-mentioned boat pusher device 100 can simplify the overall structure of the boat pusher system 300 , making it easier to control other related manipulators, such as a manipulator system for loading and unloading the wafer boat 101 .

[0046] Furthermore, the boat pusher device 100 described above can optimize the operation flow between different process technologies, which is beneficial to realize the automation of the entire photovoltaic cell production process.

[0047] In some embodiments, in order to increase the production capacity of photovoltaic cells and reduce the cost of the push boat system 300, the furnace tube equipment 200 includes multiple units along the Y-axis direction, and the push boat device 100 includes one unit. The push boat device 100 pushes the wafer boat 100 into each furnace tube 201 of the multiple furnace tube equipment 200 or pushes it out from the furnace tube 201. Specifically, by using the push boat device 100 equipped with one second conveying part 104 and a third conveying part 118, the push boat device 100 can easily cover each furnace tube equipment 200 of the push boat system 300. In addition, when the furnace tube group 202 of each furnace tube equipment 200 includes two columns and four columns, the push boat device 100 equipped with two second conveying parts 104 and a third conveying part 118 can also be used.

[0048] The above is a detailed description of the embodiments of the invention in conjunction with the accompanying drawings, but the invention is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the invention. In addition, the embodiments of the invention and the features in the embodiments can be combined with each other without conflict.

Claims

1. A boat pusher device, used to push the wafer boat into or out of the multiple furnace tubes of the furnace tube device, It is characterized in that include: First rack; A first conveying unit, mounted on the first frame and drivable along the Z-axis direction; Two second conveying parts, respectively mounted on the first conveying part and driven by the first conveying part, the second conveying parts can be driven along an X-axis direction perpendicular to the Z-axis direction; Two first carrying parts, used for carrying the wafer boat, are respectively mounted on the second conveying part and carried by the second conveying part, so as to push the wafer boat into the furnace tube or push it out from the furnace tube; The two second conveying parts are respectively located on both sides of the first frame along the Y-axis direction perpendicular to the Z-axis direction and the X-axis direction, and are driven by the first conveying part; The boat pusher device further comprises a third conveying portion, the third conveying portion can be driven along the Y-axis direction, and the first frame is mounted on the third conveying portion; The first conveying part includes a first driving part and two first guiding parts guiding along the Z-axis direction, and the two first guiding parts are respectively installed on both sides of the first frame in the Y-axis direction; the two second conveying parts are respectively installed on the two first guiding parts and are respectively connected to the first driving part; The second conveying part includes a second driving part and a second guiding part, the second guiding part guides along the X-axis direction, the first bearing part is installed on the second guiding part and connected to the second driving part; or, the two second conveying parts include two second guiding parts, the two second guiding parts respectively guide along the X-axis direction, the two first bearing parts are respectively installed on the two second guiding parts, the two second conveying parts include a second driving part, and the two first bearing parts are respectively connected to the second driving parts.

2. The boat pusher device according to claim 1, characterized in that: It also includes a first connecting part, wherein the first connecting part is respectively connected to the two second conveying parts and is connected to the first driving part.

3. The boat pusher device according to claim 1, characterized in that: The third conveying parts include two parts spaced apart in the Z-axis direction, and both ends of the first frame in the Z-axis direction are respectively mounted to the third conveying parts adjacent thereto.

4. The boat pushing system is characterized by: include: A furnace tube device, wherein the furnace tube device has one to four furnace tube groups, and the furnace tube groups include a plurality of furnace tubes distributed along the Z-axis direction; The boat pusher device according to any one of claims 1 to 3, wherein the boat pusher device pushes the wafer boat into the furnace tube or pushes it out from the furnace tube.

5. The push boat system according to claim 4, characterized in that: The furnace tube equipment includes a plurality of furnace tube equipments along the Y-axis direction, and the boat pushing device includes a single boat pushing device. The boat pushing device pushes the wafer boat into each furnace tube of the plurality of furnace tube equipments or pushes the wafer boat out of the furnace tube.

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