Control devices and control methods for auxiliary equipment

Abstract

This invention relates to the field of equipment control technology and discloses a control device for auxiliary equipment, including: an event server and a control server connected to the event server; the event server is used to acquire the current processing event and current working state of the process equipment, and send the current processing event and current working state to the control server; the control server is used to determine the predicted working state data of the process equipment after the occurrence of the current processing event based on the current processing event and the correspondence between pre-stored historical processing events and historical working state data; and to control the working state of the auxiliary equipment to change according to the changes in the current working state of the process equipment based on the predicted working state data. The control device and control method for auxiliary equipment provided by this invention can save energy and extend the service life of the auxiliary equipment.

Description

Technical Field

[0001] This invention relates to the field of equipment control technology, and in particular to a control device and control method for auxiliary equipment. Background Technology

[0002] In semiconductor plants, existing process equipment typically has dedicated auxiliary equipment, such as vacuum pumps and first gas processors for box-type process equipment, to remove harmful process gases at the end of each process step.

[0003] However, the inventors discovered at least the following problems with the existing technology: Generally, process equipment undergoes repeated processing, idle periods, and maintenance cycles. This means that when the process equipment is idle, the auxiliary equipment, although not performing any processing, remains operational. This consumes electrical energy and shortens the lifespan of the auxiliary equipment. Summary of the Invention

[0004] The purpose of this invention is to provide a control device and control method for auxiliary equipment, which can both save energy and extend the service life of the auxiliary equipment.

[0005] To address the aforementioned technical problems, embodiments of the present invention provide a control device for auxiliary equipment, comprising: an event server and a control server connected to the event server; the event server is used to acquire the current processing event and current operating status of the process equipment, and send the current processing event and current operating status to the control server; the control server is used to calculate the predicted operating status data of the process equipment after the occurrence of the current processing event based on the current processing event of the process equipment and the pre-stored correspondence between historical processing events and historical operating status data; and to control the operating status of the auxiliary equipment to change in accordance with the changes in the current operating status of the process equipment based on the predicted operating status data.

[0006] The embodiments of the present invention also provide a control method for auxiliary equipment, comprising: acquiring the current processing event and current working state of the process equipment; calculating the predicted working state data of the process equipment after the occurrence of the current processing event based on the current processing event of the process equipment and the correspondence between the pre-stored historical processing events and historical working state data; and controlling the working state of the auxiliary equipment to change in accordance with the changes in the current working state of the process equipment based on the predicted working state data.

[0007] Compared with the prior art, the present invention provides a control device for auxiliary equipment. The current processing event and current working state of the process equipment can be synchronized to an event server. The event server sends the current processing event and current working state of the process equipment to a control server. Since the control server pre-stores the correspondence between historical processing events and historical working state data, it can calculate the predicted working state data of the process equipment after the occurrence of the current processing event. Based on the predicted working state data of the process equipment under the current processing event, the auxiliary equipment is controlled to change according to the change of the current working state of the process equipment. This avoids the auxiliary equipment connected to the process equipment being in a working state when the process equipment is in an idle state during the processing of an event, thus saving energy and avoiding excessive consumption of energy due to long-term working state, which would affect the service life of the auxiliary equipment and improve the service life of the auxiliary equipment.

[0008] Furthermore, the operating status includes both running and non-running states. The predicted operating status data includes at least: the predicted running state interval duration. Specifically, the control server, upon receiving information from the event server that the process equipment has entered a non-running state, controls the auxiliary equipment to enter a non-running state and maintains the auxiliary equipment in this state for the predicted running state interval duration. This scheme reduces the consumption of auxiliary equipment by controlling it to remain in a non-running state for the predicted running state interval duration.

[0009] Furthermore, non-operating states include standby and shutdown states. Specifically, when the event server detects that a process device has entered a non-operating state, if the predicted operating interval is less than a preset duration, the control server controls the auxiliary equipment to enter standby mode and maintains it in standby mode for the predicted operating interval. If the predicted operating interval is not less than the preset duration, the control server controls the auxiliary equipment to enter shutdown mode and maintains it in shutdown mode for the predicted operating interval. This solution, by controlling the auxiliary equipment to enter standby mode when the predicted operating interval is less than the preset duration to maintain it in standby mode for the predicted operating interval, avoids excessive energy consumption caused by turning the auxiliary equipment on and off, thereby further saving energy and extending the service life of the auxiliary equipment.

[0010] Furthermore, the non-operating state includes standby state and shutdown state. Specifically, when the event server detects that the process equipment has entered a non-operating state, if the current processing event is determined to be a first-type preset event, the control server controls the auxiliary equipment to enter a shutdown state and maintains the auxiliary equipment in the shutdown state for the predicted operating state interval. If the current processing event is a second-type preset event, the control server controls the auxiliary equipment to enter a standby state and maintains the auxiliary equipment in the standby state for the predicted operating state interval. In this scheme, when the current processing event is a second-type processing event, the auxiliary equipment is controlled to enter a standby state, thereby avoiding the additional consumption caused by frequently turning the auxiliary equipment on or off.

[0011] In addition, the control server is also used to obtain the actual working status data of the currently processed events from the event server, and update the correspondence between historical processed events and historical working status data based on the correspondence between the current processed events and the actual working status data. This scheme improves the accuracy of the correspondence by updating the historical processed events and historical working status data, thereby making the calculated predicted working status data of the process equipment more accurate. Attached Figure Description

[0012] One or more embodiments are illustrated by way of example with reference numerals in the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are denoted as similar elements. Unless otherwise stated, the figures in the drawings are not to be limited by scale.

[0013] Figure 1 This is a schematic diagram of the structure of the control device of the auxiliary equipment according to the first embodiment of the present invention;

[0014] Figure 2 This is a flowchart illustrating the control method of the auxiliary device according to the second embodiment of the present invention. Detailed Implementation

[0015] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the various embodiments of the present invention will be described in detail below with reference to the accompanying drawings. However, those skilled in the art will understand that many technical details have been presented in the various embodiments of the present invention to enable the reader to better understand this application. However, the technical solutions claimed in this application can be implemented even without these technical details and various changes and modifications based on the following embodiments.

[0016] The first embodiment of the present invention relates to a control device for an auxiliary device, such as... Figure 1As shown, it includes: an event server 1 and a control server 2 connected to the event server 1; the event server 1 is used to obtain the current processing event and current working status of the process equipment 3, and send the current processing event and current working status to the control server 2; the control server 2 is used to calculate the predicted working status data of the process equipment 3 after the occurrence of the current processing event based on the current processing event of the process equipment 3 and the correspondence between the pre-stored historical processing events and historical working status data; and control the working status of the auxiliary equipment 4 to change according to the changes in the current working status of the process equipment 3 based on the predicted working status data.

[0017] Specifically, the control device of the auxiliary equipment 4 includes: event server 1 and control server 2. Event server 1 is connected to process equipment 3 and control server 2. Control server 2 is connected to auxiliary equipment 4. Process equipment 3 is also connected to auxiliary equipment 4. The current processing event and current working status of process equipment 3 can be synchronized to event server 1. Event server 1 sends the current processing event and current working status of process equipment 3 to control server 2. Since control server 2 has pre-stored the correspondence between historical processing events and historical working status data, it can determine the historical working status data of the same historical processing event as the current processing event of process equipment 3. The so-called historical working status data represents the historical working status changes of process equipment 3 under historical processing events. This historical working status change data is used as the predicted working status data of process equipment 3 after the current processing event occurs. Control server 2 can know in advance the working status changes of process equipment 3 after the current processing event occurs based on this predicted working status data. Based on the advance knowledge of the working status changes of process equipment 3 after the current processing event, it controls the auxiliary equipment 4 to change according to the changes in the current working status of process equipment 3. This avoids the auxiliary equipment 4 connected to process equipment 3 being in a working state when process equipment 3 is in an idle state during the processing of events, thus saving energy and preventing the auxiliary equipment 4 from consuming too much energy due to being in a working state for a long time, thereby improving the service life of the auxiliary equipment 4.

[0018] For example, process equipment 3 is an etching machine, and auxiliary equipment 4 connected to process equipment 3 is, for example, a vacuum pump and a first gas processor. The vacuum pump and the first gas processor are used to extract harmful gases generated during the etching process. Event server 1 obtains the current processing event of process equipment 3 as an "operation event" and the current working state of process equipment 3 is "processing state". If, according to the correspondence between "operation events" and "historical working state data" pre-stored in control server 2, it is known that the historical working state data of process equipment 3 in the previous "operation event" was: four hours of operation, one hour of idle time, and then four more hours of operation, then this historical working state data is directly used as the predicted working state data of process equipment 3 after the current processing event occurs. Based on this predicted working state data, auxiliary equipment 4 is controlled to change according to the change in the current working state of process equipment 3, so that auxiliary equipment 4 is in the operating state when process equipment 3 is operating and in the non-operating state when process equipment 3 is idle. This avoids the situation where auxiliary equipment 4 is still in operation even though it is not actually processing, during the idle period when process equipment 3 is handling "operation events". This saves energy and avoids wear and tear on auxiliary equipment 4, thus extending its service life.

[0019] In addition, the working status includes the running status and the non-running status. The predicted working status data includes at least the predicted running status interval duration. The control server 2 is specifically used to control the auxiliary equipment 4 to enter the non-running status when the event server 1 obtains that the process equipment 3 has entered the non-running status, and to maintain the auxiliary equipment 4 in the non-running status predicted running status interval duration.

[0020] Specifically, the operating states of both auxiliary equipment 4 and process equipment 3 include: operating state and non-operating state. The predicted operating state data includes at least the predicted operating state interval duration. Since the processing steps and dwell time in the operating and non-operating states are generally the same for the same processing event, the predicted operating state interval duration can be directly used based on the historical operating state interval duration. When the event server 1 obtains that process equipment 3 has entered the non-operating state, the control server 2 directly controls auxiliary equipment 4 to enter the non-operating state and maintains auxiliary equipment 4 in this non-operating state for the predicted operating state interval duration. Therefore, it is only necessary to know the state change of process equipment 3 when it enters the non-operating state, without needing to know the operating state of process equipment 3 in real time.

[0021] In addition, the non-operational state includes standby state and shutdown state; specifically, when the event server 1 obtains that the process equipment 3 has entered the non-operational state, if it is determined that the predicted operating state interval is less than the preset time, the control server 2 controls the auxiliary equipment 4 to enter the standby state and maintains the auxiliary equipment 4 in the standby state for the predicted operating state interval; if it is determined that the predicted operating state interval is not less than the preset time, the control server 2 controls the auxiliary equipment 4 to enter the shutdown state and maintains the auxiliary equipment 4 in the shutdown state for the predicted operating state interval.

[0022] Specifically, the non-operating states of auxiliary equipment 4 include standby and shutdown states. Control server 2 is specifically used to determine, when event server 1 detects that process equipment 3 has entered a non-operating state, whether the predicted operating state interval determined based on the current processing event of process equipment 3 is less than a preset duration. If it is not less than the preset duration, it indicates that the predicted operating state interval of the current processing event is relatively long. Therefore, when process equipment 3 enters a non-operating state, control server 2 can directly control auxiliary equipment 4 to enter a shutdown state and maintain auxiliary equipment 4 in this shutdown state for the predicted operating state interval, thereby avoiding the consumption caused by auxiliary equipment 4 continuing to operate within the predicted operating state interval. If the predicted operating state interval is less than the preset duration, it is considered that the consumption of auxiliary equipment 4 in the standby state is greater than the consumption of turning auxiliary equipment 4 on and off within the predicted operating state interval. Therefore, in this case, controlling auxiliary equipment 4 to be in the shutdown state for the predicted operating state interval can further reduce the consumption of auxiliary equipment 4 and extend its service life. The preset duration can be set according to actual needs; for example, the preset duration can be set to 2 hours.

[0023] In addition, the non-operational state includes standby state and shutdown state; the control server 2 is specifically used to control the auxiliary equipment 4 to enter the shutdown state and maintain the auxiliary equipment 4 in the shutdown state for the predicted operating state interval duration when the event server 1 obtains that the process equipment 3 has entered the non-operational state. If the current processing event is determined to be a first type of preset event, the control server 2 controls the auxiliary equipment 4 to enter the standby state and maintains the auxiliary equipment 4 in the standby state for the predicted operating state interval duration.

[0024] Specifically, the non-operating states of auxiliary equipment 4 include standby state and shutdown state. For the first type of preset event, although the historical working interval of process equipment 3 is relatively short under this type of event, auxiliary equipment 4 needs to be kept off during the process of this type of event, such as "alarm event"; while for the second type of preset event, although the historical working interval of process equipment 3 is relatively long under this type of event, auxiliary equipment 4 needs to be used frequently during the process of this type of event, such as "maintenance event" and "repair event".

[0025] For these two special types of processing events, the auxiliary equipment cannot be directly controlled to stop or standby based on the predicted operating interval. Therefore, in this embodiment, when the process equipment 3 enters a non-operating state, the control server 2 determines whether the current processing event is a first-type preset event. If the current processing event is determined to be a first-type preset event, the auxiliary equipment 4 is controlled to enter a stop state and maintained in the stop state for the predicted operating interval to ensure the normal processing of the first-type preset event. For example, when the processing event is an "alarm event," although the time that the process equipment 3 is in a non-operating state may be less than the preset duration, due to a malfunction in the process equipment 3, the auxiliary equipment 4 needs to be stopped to avoid dangerous events. Therefore, it is necessary to control the auxiliary equipment 4 to enter a stop state to ensure the normal processing of the first-type preset event. If the current processing event is determined to be a second-type preset event, the auxiliary equipment 4 is controlled to enter a standby state and maintained in the standby state for the predicted operating interval to ensure the normal processing of the second-type preset event. For example, when the event is a "maintenance event", even though the process equipment 3 is always in a non-operational state, if the maintenance personnel need to use the auxiliary equipment 4 to perform tests or other operations, then the auxiliary equipment 4 needs to be in a standby state so that the maintenance personnel can repair the process equipment 3.

[0026] In addition, the control server 2 is also used to obtain the actual working status data of the currently processed event from the event server 1, and update the correspondence between the historical processed events and the historical working status data according to the correspondence between the current processed event and the actual working status data.

[0027] Specifically, event server 1 obtains the current processing event of process equipment 3 and the actual working status data under the current processing event. After the current processing event of process equipment 3 is completed, it sends the current processing event and the interval between the current processing event and the actual operating status data to control server 2. Control server 2 then establishes a correspondence between the current processing event and the actual working status data. The actual working status data includes at least the actual operating status interval of process equipment 3, for example: the actual operating status interval for an "alarm event" is 3 hours; the actual operating status interval for an "operation event" is 1 hour; and the actual operating status interval for a "maintenance event" is 8 hours. Then, the correspondence between the current processing event and the actual working status data replaces the historical working status data corresponding to the same historical processing event, thereby updating the correspondence between historical processing events and historical working status data, making the correspondence more accurate, and thus making the calculated predicted working status data of process equipment 3 more accurate.

[0028] Compared with the prior art, the embodiments of the present invention provide a control device for auxiliary equipment. The current processing event and current working state of the process equipment 3 can be synchronized to the event server 1. The event server 1 sends the current processing event and current working state of the process equipment 3 to the control server 2. Since the control server 2 has pre-stored the correspondence between historical processing events and historical working state data, it can calculate the predicted working state data of the process equipment 3 after the occurrence of the current processing event. Based on the predicted working state data of the process equipment 3 under the current processing event, the auxiliary equipment 4 is controlled to change according to the change of the current working state of the process equipment 3. This avoids the auxiliary equipment 4 connected to the process equipment 3 from being in an idle state during the processing of events, thus saving energy and avoiding excessive consumption due to long-term operation, which would affect the service life of the auxiliary equipment 4 and improve its service life.

[0029] The second embodiment of the present invention relates to a control method for an auxiliary device, wherein the control method for the auxiliary device in this embodiment is applied to the control device for the auxiliary device in the first embodiment.

[0030] A flowchart illustrating the control method for auxiliary equipment in this embodiment is shown below. Figure 2 As shown, it specifically includes:

[0031] Step 101: Obtain the current processing events and current working status of the process equipment.

[0032] Specifically, the process equipment is connected to the event processor, and the event server is connected to the control server. The current processing events and current operating status of the process equipment can be synchronized to the event server, which then sends the current processing events and current operating status of the process equipment to the control server.

[0033] Step 102: Based on the current processing event of the process equipment and the correspondence between the pre-stored historical processing events and historical working status data, calculate the predicted working status data of the process equipment after the current processing event occurs.

[0034] Specifically, the control server pre-stores the correspondence between historical processing events and historical working status data. This allows it to determine the historical working status data of the same historical processing event based on the current processing event of the process equipment. The so-called historical working status data represents the changes in the historical working status of the process equipment under the historical processing event. This historical working status change data is used as the predicted working status data of the process equipment after the current processing event occurs. The control server can then use this predicted working status data to know the changes in the working status of the process equipment after the current processing event occurs.

[0035] Step 103: Based on the predicted working status data, control the working status of the auxiliary equipment to change in accordance with the current working status of the process equipment.

[0036] Specifically, based on the predicted operating status data, the auxiliary equipment is controlled to change according to the current operating status of the process equipment, ensuring that the auxiliary equipment is in an operating state when the process equipment is running and in a non-operating state when the process equipment is idle. This avoids the situation where the auxiliary equipment remains in an operating state even though it is not actually processing "operation events" during the idle period when the process equipment is handling "operation events," thus saving energy and avoiding wear and tear on the auxiliary equipment, thereby extending its service life.

[0037] Furthermore, the working state includes running state and non-running state, and the predicted working state data includes at least: the predicted running state interval duration; and controlling the working state of auxiliary equipment to change with the current working state of the process equipment based on the predicted working state data, specifically including: when the process equipment enters a non-running state, controlling the auxiliary equipment to enter a non-running state; and maintaining the auxiliary equipment in a non-running state for the predicted running state interval duration.

[0038] Specifically, the operating status of both auxiliary equipment and process equipment includes: operating status and non-operating status. The predicted operating status data includes at least the predicted operating status interval duration. Since the processing steps and dwell time in the operating and non-operating states are generally the same for the same processing event, the historical operating status interval duration can be directly used as the predicted operating status interval duration for the current processing event. When it is detected that process equipment has entered a non-operating state, the auxiliary equipment is directly controlled to enter a non-operating state and maintained in this non-operating state for the predicted operating status interval duration. Therefore, it is only necessary to know the status change when the process equipment enters a non-operating state, without needing to know the operating status of the process equipment in real time.

[0039] As one feasible approach, the non-operating state includes standby state and shutdown state. When it is detected that the process equipment has entered a non-operating state, the auxiliary equipment is controlled to enter a non-operating state and maintained in the non-operating state for a predicted operating state interval. Specifically, this includes: determining whether the predicted operating state interval is less than a preset interval; if the predicted operating state interval is less than the preset interval, the auxiliary equipment is controlled to enter a shutdown state and maintained in the shutdown state for a predicted operating state interval; if the predicted operating state interval is not less than the preset interval, the auxiliary equipment is controlled to enter a shutdown state and maintained in the shutdown state for a predicted operating state interval.

[0040] Specifically, the non-operating states of auxiliary equipment include standby and shutdown states. The preset duration indicates that the energy consumption of turning the auxiliary equipment on and off is essentially the same as the energy consumption required for the auxiliary equipment to operate for the preset duration. When the predicted operating interval is not less than the preset duration, it indicates that the energy consumption of turning the auxiliary equipment on and off is less than the energy consumption required for the auxiliary equipment to operate for the preset duration. In this case, the auxiliary equipment can be directly controlled to enter the shutdown state and maintained in this shutdown state for the predicted operating interval. When the predicted operating interval is less than the preset duration, it indicates that the energy consumption of turning the auxiliary equipment on and off is less than the energy consumption required for the auxiliary equipment to operate for the preset duration. In this case, the auxiliary equipment can be controlled to enter the standby state to maintain the auxiliary equipment in the standby state for the predicted operating interval, thereby avoiding excessive energy consumption caused by turning the auxiliary equipment on and off, thus further saving energy and extending the service life of the auxiliary equipment.

[0041] As another possible approach, the non-operating state includes standby and shutdown states. When it is detected that the process equipment has entered a non-operating state, the auxiliary equipment is controlled to enter a non-operating state and maintained in the non-operating state for a predicted operating state interval. Specifically, when the event server detects that the process equipment has entered a non-operating state, it determines whether the currently processed event is a first-type preset event. If the currently processed event is a first-type preset event, the auxiliary equipment is controlled to enter a shutdown state and maintained in the shutdown state for a predicted operating state interval. If the currently processed event is not a first-type preset event, it determines whether the currently processed event is a second-type preset event. If the currently processed event is a second-type preset event, the auxiliary equipment is controlled to enter a standby state and maintained in the standby state for a predicted operating state interval.

[0042] Specifically, the non-operating states of auxiliary equipment include standby and shutdown states. For the first type of preset event, although the historical operating interval of the process equipment is relatively short under this type of event, the auxiliary equipment needs to be kept off during the event, such as an "alarm event". For the second type of preset event, although the historical operating interval of the process equipment is relatively long under this type of event, the auxiliary equipment needs to be used frequently during the event, such as "maintenance events" and "repair events".

[0043] For these two special types of events, the auxiliary equipment cannot be directly controlled to stop or standby based on the predicted operating interval. Therefore, in this embodiment, when the process equipment enters a non-operating state, it is determined whether the current processing event is a first-type preset event. If the current processing event is determined to be a first-type preset event, the auxiliary equipment is controlled to enter a stop state and maintained in the stop state for the predicted operating interval to ensure the normal processing of the first-type preset event. For example, when the processing event is an "alarm event," although the time the process equipment is in a non-operating state may be less than the preset duration, due to a malfunction in the process equipment, the auxiliary equipment needs to be stopped to avoid dangerous events. Therefore, it is necessary to control the auxiliary equipment to enter a stop state to ensure the normal processing of the first-type preset event. If the current processing event is determined to be a second-type preset event, the auxiliary equipment is controlled to enter a standby state and maintained in the standby state for the predicted operating interval to ensure the normal processing of the second-type preset event. For example, when the event is a "maintenance event", even though the process equipment is not in operation, maintenance personnel need to use auxiliary equipment to perform operations such as testing. Therefore, the auxiliary equipment needs to be in standby mode so that maintenance personnel can repair the process equipment.

[0044] Furthermore, after acquiring the current processing event and current working status of the process equipment, the method also includes: acquiring the actual working status data of the current processing event; and updating the correspondence between the historical processing event and the historical working status data based on the correspondence between the current processing event and the actual working status data.

[0045] Specifically, the historical working status data corresponding to the same historical processing event is replaced with the correspondence between the current processing event and the actual working status data. This updates the correspondence between historical processing events and historical working status data, making the correspondence more accurate, and thus the predicted working status data of the process equipment calculated is also more accurate.

[0046] It is worth noting that since the process equipment on the product production line is basically always in operation, with very little time spent in a non-operational state, and auxiliary equipment is also mostly in operation, the control method for auxiliary equipment in this embodiment is mainly applied to process lines such as guide lines, R&D lines, and system IC lines, where the non-operational time is relatively long, and is not frequently applied to product production lines.

[0047] Compared with the prior art, the embodiments of the present invention provide a control method for auxiliary equipment. Since the control server pre-stores the correspondence between historical processing events and historical working status data, it can calculate the predicted working status data of the process equipment after the current processing event occurs. Based on the predicted working status data of the process equipment under the current processing event, the auxiliary equipment is controlled to change according to the changes in the current working status of the process equipment. This avoids the auxiliary equipment connected to the process equipment being in a working state when the process equipment is in an idle state during the processing event, thus saving energy. At the same time, it avoids excessive consumption due to long-term working state, which would affect the service life of the auxiliary equipment, thereby improving the service life of the auxiliary equipment.

[0048] The steps of the various methods described above are only for clarity. In practice, they can be combined into one step or some steps can be split into multiple steps. As long as they include the same logical relationship, they are all within the scope of protection of this patent. Adding insignificant modifications or introducing insignificant designs to the algorithm or process, but without changing the core design of the algorithm and process, are also within the scope of protection of this patent.

[0049] Those skilled in the art will understand that the above embodiments are specific examples of implementing the present invention, and in practical applications, various changes in form and detail may be made without departing from the spirit and scope of the present invention.

Claims

1. A control method for an auxiliary device, characterized in that, include: Obtain the current processing events and current working status of the process equipment; Based on the current processing event of the process equipment and the pre-stored correspondence between historical processing events and historical working status data, the predicted working status data of the process equipment after the occurrence of the current processing event is calculated. Based on the predicted operating status data, the operating status of the auxiliary equipment is controlled to change in accordance with the changes in the current operating status of the process equipment.

2. The control method for auxiliary equipment according to claim 1, characterized in that, The working status includes running status and non-running status, and the predicted working status data includes at least: the predicted running status interval duration; The step of controlling the auxiliary equipment's operating state to follow the changes in the current operating state of the process equipment based on the predicted operating state data specifically includes: When the process equipment is detected to have entered the non-operating state, the auxiliary equipment is controlled to enter the non-operating state, and the auxiliary equipment is kept in the non-operating state for the predicted operating state interval.

3. The control method for auxiliary equipment according to claim 2, characterized in that, The non-operating state includes standby state and shutdown state; the step of controlling the auxiliary equipment to enter the non-operating state and maintaining the auxiliary equipment in the non-operating state when it is detected that the process equipment has entered the non-operating state, and the predicted operating state interval duration specifically includes: When the event server detects that the process equipment has entered the non-operating state, it determines whether the predicted operating state interval is less than a preset time. If the predicted operating state interval is less than the preset duration, the auxiliary device is controlled to enter the standby state, and the auxiliary device is kept in the shutdown state for the predicted operating state interval. If the predicted operating state interval is not less than the preset duration, the auxiliary equipment is controlled to enter the shutdown state, and the auxiliary equipment is maintained in the shutdown state for the predicted operating state interval.

4. The control method for auxiliary equipment according to claim 2, characterized in that, The non-operating state includes standby state and shutdown state; the step of controlling the auxiliary equipment to enter the non-operating state and maintaining the auxiliary equipment in the non-operating state when it is detected that the process equipment has entered the non-operating state, and the predicted operating state interval duration specifically includes: When the event server detects that the process equipment has entered the non-operation state, it determines whether the current processing event is a first type of preset event. If the current processing event is a first type of preset event, then control the auxiliary equipment to enter the shutdown state, and maintain the auxiliary equipment in the shutdown state for the predicted operating state interval duration; If the current processing event is not a first type of preset event, then determine whether the current processing event is a second type of preset event; if the current processing event is a second type of preset event, then control the auxiliary device to enter the standby state, and maintain the auxiliary device in the standby state for the predicted operating state interval duration.

5. The control method for auxiliary equipment according to claim 1, characterized in that, After acquiring the current processing events and current operating status of the process equipment, the method further includes: Obtain the actual working status data of the currently processed event; Based on the correspondence between the current processing event and the actual working status data, update the correspondence between the historical processing event and the historical working status data.

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