A detachable vacuum-sealed electrical interface

Abstract

The present invention relates to a detachable vacuum-sealed electrical interface, which includes a flange made of insulating material, at least three threaded posts vertically arranged on the vacuum side of the flange and evenly placed in a circle, an insulating plate slidable sleeved on the plurality of threaded posts, and metal welding posts passing through the flange and the insulating plate at both ends with clearance fit; an annular boss is arranged between the flange and the insulating plate on the metal welding post; a sealing ring is sleeved between the flange and the annular boss on the metal welding post; on each of the threaded posts, a nut connected by threads is arranged outside the insulating plate; the present invention can play a transition role through the metal welding post, can be respectively used for connecting wires inside and outside the vacuum chamber, and has the advantages of convenient disassembly and assembly and good sealing effect.

Description

Technical Field

[0001] The present invention relates to the field of vacuum sealing, and particularly to a detachable vacuum-sealed electrical interface. Background Art

[0002] Currently, vacuum chambers are all made of metal materials and sealed through metal flanges. Since cameras, motors, etc. are installed in the vacuum chamber according to requirements, wiring is required to provide power or transmit signals after installing the electrical appliances. However, after wiring, the existing metal flanges cannot be sealed. Therefore, there is an urgent need for a vacuum-sealed electrical interface. Summary of the Invention

[0003] The purpose of the present invention is to provide a detachable vacuum-sealed electrical interface to overcome the deficiencies of the prior art.

[0004] To achieve the above object, the technical solution adopted by the present invention is: a detachable vacuum-sealed electrical interface, comprising a flange made of insulating material, at least three threaded columns vertically arranged on the vacuum side of the flange and evenly distributed in a circle, an insulating plate slidable on the multiple threaded columns, and metal welding columns passing through the flange and the insulating plate at both ends with a clearance fit; an annular boss is arranged between the flange and the insulating plate on the metal welding column; a sealing ring is sleeved between the flange and the annular boss on the metal welding column; a nut connected by a thread is arranged on the outside of the insulating plate on each threaded column.

[0005] Preferably, the flange is made of plexiglass.

[0006] Preferably, a plurality of threaded holes corresponding to the threaded columns are arranged on the vacuum side of the flange; each threaded column is fixedly connected to the threaded hole through a thread fit.

[0007] Preferably, the flange is made of quartz glass.

[0008] Preferably, each threaded column is bonded to the vacuum side of the flange.

[0009] Preferably, the insulating plate is made of plexiglass.

[0010] Preferably, the edge of the flange is wrapped with a metal retaining ring for sealed connection.

[0011] Preferably, the flange and the metal retaining ring are fixedly sealed by bonding.

[0012] Preferably, the metal welding column and the annular boss are integrally formed.

[0013] Preferably, welding holes are respectively arranged at both ends of the metal welding column.

[0014] Due to the application of the above technical solution, the present invention has the following advantages compared with the prior art:

[0015] The metal welding post of the present invention can play a transitional role, and its two ends can be respectively used to connect the wires inside and outside the vacuum chamber. The flange and the insulating plate also play an insulating role, which can effectively prevent the metal welding post from contacting the vacuum chamber body, and has the advantages of convenient disassembly and assembly and good sealing effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The technical solution of the present invention will be further described below in conjunction with the drawings:

[0017] FIG Figure 1 is a cross-sectional view of the detachable vacuum-sealed electrical interface of the present invention;

[0018] FIG Figure 2 is Figure 1 a partial enlarged view of A in

[0019] FIG Figure 3 is a schematic structural diagram of the metal welding post in the present invention;

[0020] FIG Figure 4 is a structural diagram of another connection method of the threaded post in the present invention.

[0021] Wherein: 1, metal retaining ring; 2, flange; 3, threaded post; 4, insulating plate; 5, nut; 6, metal welding post; 7, annular boss; 8, sealing ring; 9, welding hole. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0022] The present invention will be further described in detail below in conjunction with the drawings and specific embodiments.

[0023] Embodiment 1:

[0024] FIG Figures 1-3The detachable vacuum-sealed electrical interface described in the present invention includes a flange 2 made of plexiglass, three threaded holes evenly arranged in a circle on the vacuum side of the flange 2, three threaded posts 3 respectively arranged in the three threaded holes and perpendicular to the vacuum side of the flange 2, a slidable insulating plate 4 sleeved on the multiple threaded posts 3, and metal welding posts 6 passing through the flange 2 and the insulating plate 4 at both ends with a clearance fit; an annular boss 7 is arranged between the flange 2 and the insulating plate 4 on the metal welding post 6; a sealing ring 8 is sleeved between the flange 2 and the annular boss 7 on the metal welding post 6; on each of the threaded posts 3, a nut 5 connected by threads is arranged outside the insulating plate 4; during operation, the nuts 5 on the three threaded posts 3 are rotated respectively, which can push the inner insulating plate 4 to drive the annular boss 7 to squeeze the sealing ring 8 to achieve sealing; the metal welding posts 6 play a transitional role, and their two ends are respectively used to connect the wires inside and outside the vacuum chamber for providing power or transmitting signals; among them, the flange 2 and the insulating plate 4 also play an insulating role, which can effectively prevent the metal welding posts 6 from contacting the vacuum chamber body; the number of metal welding posts 6 can be determined according to the number of electrical appliances in the vacuum chamber, not limited to one; since plexiglass is not only beautiful and transparent, but also has very high mechanical strength, is not easy to be damaged, and is relatively easy to process, it is convenient to process threaded holes and is fixedly connected to the threaded posts 3 by threads, and this connection method is more firm.

[0025] Embodiment 2:

[0026] The difference from Embodiment 1 is that as Figure 4 shown, the flange 2 is made of quartz glass, and no threaded holes are provided on the vacuum side of the flange 2, and the three threaded posts 3 are all bonded to the vacuum side of the flange 2; since quartz glass has an extremely low coefficient of thermal expansion, high heat resistance, excellent chemical stability, and excellent electrical insulation, it can be applied to the normally closed with higher usage requirements.

[0027] Furthermore, the insulating plate 4 is made of plexiglass, which is not only convenient for observing the situation inside the vacuum chamber, but also convenient for processing.

[0028] Furthermore, the edge of the flange 2 is wrapped with a metal retaining ring 1 connected by sealing, which plays a protective role and can effectively prevent the flange 2 from being damaged by collision with external objects.

[0029] Furthermore, the flange 2 and the metal retaining ring 1 are fixedly sealed by bonding; not only is the installation more convenient, but also no other parts are needed for fixing and sealing, so that the production cost and the overall thickness can be effectively reduced.

[0030] Furthermore, the metal welding post 6 and the annular boss 7 are integrally formed, which is not only firm in structure but also convenient for production.

[0031] Furthermore, welding holes 9 are respectively arranged at both ends of the metal solder column 6, which is not only convenient for welding but also aesthetically pleasing.

[0032] The above are only specific application examples of the present invention and do not constitute any limitation to the protection scope of the present invention. Any technical solutions formed by equivalent transformation or equivalent substitution fall within the scope of the protection of the rights of the present invention.

Claims

1. A detachable vacuum-sealed electrical interface, characterized in that: It includes a flange made of insulating material, at least three threaded posts vertically arranged on the vacuum side of the flange and evenly placed in a circle, an insulating plate slidable sleeved on the multiple threaded posts, and metal welding posts passing through the flange and the insulating plate at both ends with clearance fit. An annular boss is arranged between the flange and the insulating plate on the metal welding post; a sealing ring is sleeved between the flange and the annular boss on the metal welding post; a nut connected by thread is arranged on the outside of the insulating plate on each threaded post. The flange is made of plexiglass, and its edge is wrapped with a metal retaining ring connected by seal; multiple threaded holes corresponding to the threaded posts are arranged on the vacuum side of the flange; each threaded post is fixedly connected with the threaded hole by thread fit. The metal welding post and the annular boss are integrally formed. The insulating plate is made of plexiglass. Welding holes are respectively arranged at both ends of the metal welding post.

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