Processing device

Abstract

A processing device is provided, which can easily identify the cause of an error. The processing device of the present invention is characterized in that it has a holding table, a processing unit, a photographing unit, a touch panel, and a control unit for controlling each mechanism. The control unit has: an image recording unit that continuously records the screen displayed on the touch panel as an image; and a contact detection unit that detects the coordinates of the touch panel touched and operated by the operator. The image recording unit records the image in a state where an arbitrary mark is displayed at the coordinates detected by the contact detection unit.

Description

Technical Field

[0001] The present invention relates to a processing apparatus. Background Art

[0002] Conventionally, there has been known a processing apparatus that holds a workpiece such as a semiconductor wafer on a chuck table and performs cutting on the held workpiece along a scribe lane to divide it into individual device chips. In such a processing apparatus, there is a processing apparatus having a touch panel type operation panel that displays an image of the front surface of a wafer captured by an imaging unit and a plurality of operation keys, and various operations of the processing apparatus are performed by means of this operation panel (for example, refer to Patent Document 1).

[0003] In addition, in the above processing apparatus, the operation history, measurement values, etc. of each mechanism are recorded as a log.

[0004] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2010 - 49466

[0005] In the above processing apparatus, when an error occurs, the operator needs to find the cause of the error, but sometimes even by referring to the above log recorded by the processing apparatus, the cause of the error cannot be found. Summary of the Invention

[0006] The present invention has been made in view of the above circumstances, and an object thereof is to provide a processing apparatus in which the cause of an error can be easily found.

[0007] In order to solve the above problems and achieve the object, the present invention is a processing apparatus, characterized in that the processing apparatus has a holding table, a processing unit, an imaging unit, a touch panel, and a control unit that controls each mechanism, and the control unit has: an image recording unit that continuously records the screen displayed on the touch panel as an image; and a contact detection unit that detects the coordinates of the touch panel that has been touched and operated by the operator, and the image recording unit records the image in a state where an arbitrary mark is displayed at the coordinates detected by the contact detection unit.

[0008] In addition, in the above processing apparatus, it is characterized in that the control unit further has an error detection unit that detects an error, and the image recording unit accumulates the images recorded within a preset time before and after the error, and deletes the images recorded at times other than the above time after a specified time has elapsed.

[0009] According to the present invention, there is an effect that a processing apparatus in which the cause of an error can be easily found can be provided. Brief Description of the Drawings

[0010] Figure 1 It is a perspective view schematically showing a structural example of a processing apparatus according to an embodiment.

[0011] Figure 2 It is a top view showing a structural example of a wafer processed by the processing apparatus of the embodiment.

[0012] Figure 3 It is a schematic front view showing a structural example of the light source of the imaging unit of the embodiment.

[0013] Figure 4 It is a block diagram schematically showing an example of the functional structure of the processing apparatus of the embodiment.

[0014] Figure 5 It is a diagram schematically showing the generation of the frame advance image of the embodiment.

[0015] Figure 6 It is a diagram showing a display example of an image of an operation screen constituting the frame advance image of the embodiment.

[0016] Figure 7 It is a diagram showing a display example of an image of an operation screen constituting the frame advance image of the embodiment.

[0017] Figure 8 It is a diagram showing a display example of an image of an operation screen constituting the frame advance image of the embodiment.

[0018] Figure 9 It is a diagram showing a display example of an image of an operation screen constituting the frame advance image of the embodiment.

[0019] Figure 10 It is a diagram showing a display example of an image of an operation screen constituting the frame advance image of the embodiment.

[0020] Figure 11 It is a diagram showing a display example of an image of an operation screen constituting the frame advance image of the embodiment.

[0021] Figure 12 It is a diagram showing a display example of an image of an operation screen constituting the frame advance image of the embodiment.

[0022] Figure 13 It is a diagram showing a display example of an image of an operation screen constituting the frame advance image of the embodiment.

[0023] Figure 14 It is a diagram showing a display example of an image of an operation screen constituting the frame advance image of the embodiment.

[0024] Figure 15 It is a flowchart showing an example of the processing of the processing apparatus of the embodiment.

[0025] Figure 16It is a block diagram schematically showing an example of the functional structure of a processing apparatus according to a modified example.

[0026] Figure 17 It is a diagram schematically showing an example of the processing of image information according to a modified example.

[0027] Reference Numeral Explanation

[0028] 10: Processing apparatus; 11: Chuck table; 12: Imaging unit; 13: Processing unit; 17: Touch panel; 23: Light source; 30: Memory; 31: Image storage unit; 40: Control unit; 41: Central control unit; 42: Screen display control unit; 43: Contact detection unit; 44: Image recording unit; 45: Image display control unit; 46: Error detection unit; 100: Wafer (workpiece); 103: Street (division predetermined line); 104: Device. Detailed Description of the Embodiment

[0029] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The present invention is not limited to the content described in the following embodiments. In addition, among the structural elements described below, there are those that can be easily conceived by those skilled in the art and those that are substantially the same. In addition, the structures described below can be appropriately combined. In addition, various omissions, replacements, or changes in the structure can be made without departing from the gist of the present invention.

[0030] In the embodiments described below, an XYZ rectangular coordinate system is set, and with reference to this XYZ rectangular coordinate system, the positional relationships of the respective parts are described. One direction in the horizontal plane is taken as the X-axis direction, the direction perpendicular to the X-axis direction in the horizontal plane is taken as the Y-axis direction, and the direction perpendicular to the X-axis direction and the Y-axis direction respectively is taken as the Z-axis direction. The XY plane including the X-axis and the Y-axis is parallel to the horizontal plane. The Z-axis direction perpendicular to the XY plane is the vertical direction.

[0031] With reference to the accompanying drawings, the processing apparatus 1 according to the embodiment will be described. Figure 1 It is a perspective view schematically showing a structural example of the processing apparatus according to the embodiment. Figure 2 It is a top view showing a structural example of a wafer processed by the processing apparatus according to the embodiment. Figure 3 It is a schematic front view showing a structural example of the light source of the imaging unit according to the embodiment. Figure 4 It is a block diagram schematically showing an example of the functional structure of the processing apparatus according to the embodiment.

[0032] The processing apparatus 10 (an example of a processing apparatus) according to the embodiment is a cutting apparatus that cuts a wafer 100 along a street (division predetermined line) 103. As Figure 1As shown, the processing apparatus 10 has, as a basic structure, a chuck table 11 for holding a wafer 100, an imaging unit 12, a processing unit 13, a driving unit 14, a Z-axis moving unit 15, a touch panel 17, and a control unit 40.

[0033] As Figure 2 shown, the wafer (workpiece) 100 is adhered to the front surface of an adhesive tape 107 mounted on an annular frame 108. Further, the wafer 100 is divided into a plurality of regions by a plurality of scribe lines 103 formed in a lattice pattern on the front surface 101, and devices 104 composed of semiconductor chips such as ICs and LSIs are formed in the divided regions. The wafer 100 thus configured has its back surface 102 adhered to the adhesive tape 107 mounted on the annular frame 108 with the front surface 101 facing upward.

[0034] The chuck table 11 (an example of a holding table) has a holding surface 11a for sucking and holding the wafer 100, and the chuck table 11 is connected to a motor 19 and is configured to be rotatable. Further, the chuck table 11 is configured to be movable in the X-axis direction, which is a horizontal direction, relative to the holding surface 11a by an X-axis moving unit 22 having a well-known structure such as a ball screw 20, a nut, and a pulse motor 21. Accordingly, the processing apparatus 10 can relatively move the wafer 100 held by the chuck table 11 in the X-axis direction relative to the imaging unit 12 or the processing unit 13.

[0035] The imaging unit 12 is an electron microscope equipped with an image sensor such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor). The imaging unit 12 images the front surface 101 of the wafer 100 held on the holding surface 11a of the chuck table 11. The imaging unit 12 can switch to macro imaging at a low magnification (Lo) or micro imaging at a high magnification (Hi) to image the front surface 101 of the wafer 100. The region to be cut (scribe line) is detected based on the image information (key pattern) obtained by the imaging unit 12 and is used in the positioning of the processing operation of the processing unit 13. As Figure 3 shown, the imaging unit 12 has a light source 23 that irradiates illumination light onto the front surface of the wafer 100 held on the holding surface 11a of the chuck table 11. The light source 23 is composed of an incident light source 231 that irradiates the wafer 100 from directly above and an oblique light source 232 that illuminates from an oblique direction.

[0036] The processing unit 13 forms a cutting groove (notch) by cutting the wafer 100 held on the holding surface 11a of the chuck table 11 along the scribe lane 103 with a rotating, annular, extremely thin cutting tool 24. The photographing unit 12 is integrated by being mounted and supported on a part of the housing 25 for the processing unit 13, and is arranged to be movable in the Z-axis direction by a Z-axis moving unit 15 based on a ball screw, a nut, a pulse motor 26, etc. In addition, a Y-axis moving unit 27 that relatively moves the photographing unit 12 or the processing unit 13 relative to the holding surface 11a of the chuck table 11 in the Y-axis direction is composed of a ball screw 28, a nut, a pulse motor 29, etc., and the Y-axis moving unit 27 and the X-axis moving unit 22 together constitute a driving unit 14.

[0037] The touch panel 17 displays an image of the front surface 101 of the wafer 100 photographed by the photographing unit 12 and various information required for the processing under the control of the control unit 40, and receives input operations required for the processing from the operator. The touch panel 17 is disposed on the housing of the processing apparatus 10 at a position where it is easy to observe and easy to operate. The touch panel 17 is configured to have a display device and an input device. The touch panel 17 may be constituted by a touch screen display, which has a display device such as a liquid crystal display or an organic EL display, and a touch screen that designates the input position and coordinates on the display surface of the display device.

[0038] The processing apparatus 10 having the above structure relatively feeds the chuck table 11 in the X-axis direction relative to the processing unit 13 while causing the high-speed rotating cutting tool 24 to cut into the wafer 100 at a prescribed cutting depth. Thereby, the scribe lane 103 on the wafer 100 can be cut to form a cutting groove (notch). Next, the processing apparatus 10 rotates the wafer 100 by 90° by rotating the chuck table 11, and then repeats the same cutting process for all the scribe lanes 103 newly arranged in the X-axis direction using the processing unit 13. Thereby, the wafer 100 can be divided into individual devices 104.

[0039] Figure 4 The illustrated memory 30 stores a control program for realizing various processing functions executed by the control unit 40, data used in the processing based on the control program, etc. The memory 30 can be installed by an HDD (Hard Disk Drive) or a semiconductor memory, etc. The memory 30 can also be used as a temporary work area when the processor included in the control unit 40 executes the commands described in the control program.

[0040] The memory 30 has an image storage unit 31 that stores image information of the operation screen displayed on the touch panel 17. The image information stored in the image storage unit 31 is composed of multiple images of the operation screen continuously recorded by an image recording unit 44 described later. As the image information stored in the image storage unit 31, for example, multiple images obtained by continuously recording the operation screens that are sequentially switched and displayed on the touch panel 17 during alignment teaching or manual alignment, etc., along with any series of operations performed by the operator are exemplified. In addition, a mark indicating the coordinates (coordinates on the operation screen) detected by a contact detection unit 43 described later is included in the images constituting the image information. That is, the mark is incorporated into the image of the operation screen in a state where the position where the operator operates (touches) on the operation screen displayed on the touch panel 17 can be displayed in an identifiable manner.

[0041] The control unit 40 has: an arithmetic processing device such as a CPU (Central Processing Unit); a storage device such as a ROM (Read Only Memory) or a RAM (Random Access Memory); and an input / output interface device. The control unit 40 is a computer that can use the above devices to execute a control program, etc., for controlling the above respective components according to a series of processing steps performed by the processing device 10.

[0042] As Figure 4 shown, the control unit 40 has: a central control unit 41, a screen display control unit 42, a contact detection unit 43, an image recording unit 44, and an image display control unit 45, and realizes or executes the functions or actions of various processes described below through the above respective units.

[0043] The central control unit 41 controls the overall operation of the processing device 10 according to the processing conditions set by the operator via the touch panel 17. In addition, the central control unit 41 controls the shooting actions of the shooting unit 12 having the light source 23 during alignment and notch inspection.

[0044] The screen display control unit 42 controls the display of the touch panel 17 according to the operation content input by the operator via the touch panel 17. For example, during manual alignment, the screen display control unit 42 sequentially switches the operation screens according to a series of operations performed by the operator and displays them on the touch panel 17.

[0045] The contact detection unit 43 detects the coordinates of the touch panel 17 touched and operated by the operator. That is, the contact detection unit 43 detects the position on the operation screen where the operator operates (touches).

[0046] The image recording unit 44 continuously records the screen (operation screen) displayed on the touch panel 17 as an image. For example, the image recording unit 44 continuously captures an image (still image) of the operation screen in the background of the display control of the operation screen performed by the screen display control unit 42 and records it. The image recording unit 44 continuously records a plurality of images of the operation screen that are sequentially switched and displayed on the touch panel 17 along with any series of operations performed by the operator. The image recording unit 44 stores the image information of the recorded operation screen in the image storage unit 31 in the order (time series) of the operator's operations. When storing the image information in the image storage unit 31, the image recording unit 44 can correspondingly store the date and time when the image was recorded and the operation content. The operation content can adopt all conventional operation contents specified by the operator, such as notch inspection or alignment teaching. When recording an image of the operation screen, the image recording unit 44 can record the image of the operation screen in a state where any mark is displayed at the coordinates detected by the contact detection unit 43. In addition, when recording an image of the operation screen, the image recording unit 44 can, based on the coordinates of the touch panel 17 detected by the contact detection unit 43, record the position on the operation screen that the operator has operated (touched) in association with the image of the operation screen.

[0047] The image display control unit 45 controls the display of the image information stored in the image storage unit 31. That is, the image display control unit 45 continuously displays a plurality of images of the operation screen that are sequentially switched and displayed on the touch panel 17 along with any series of operations performed by the operator in the order (time series) of the operator's operations. For example, by playing frame-by-frame images, the image display control unit 45 can continuously display a plurality of images of the operation screen in the order of operations, where the frame-by-frame images are obtained by arranging a plurality of images of the operation screen that are continuously recorded in the background of a series of operations performed by the operator in time series. When continuously displaying the image of the operation screen, the image display control unit 45 can display the image of the operation screen in a state where any mark is displayed at the coordinates detected by the contact detection unit 43. In addition, when continuously displaying the image of the operation screen, the image display control unit 45 can assign any mark or the like to the position that the operator has operated (touched) based on the position on the operation screen detected by the contact detection unit 53. Thus, for example, during alignment teaching or manual alignment, the position that the operator has operated (touched) is displayed on the image of the operation screen in an identifiable manner.

[0048] Refer to Figures 5 to 14 The image of the operation screen recorded by the processing apparatus according to the embodiment will be described. Figure 5 It is a diagram schematically showing the generation of the frame-by-frame image according to the embodiment. Figures 6 to 14This is a diagram showing a display example of an image of an operation screen that constitutes a frame-by-frame image of an embodiment.

[0049] As Figure 5 shown, the image recording unit 44 continuously records a plurality of images (still images) of operation screens that are sequentially switched and displayed on the touch panel 17 in accordance with an arbitrary series of operations performed by the operator, in the order (time series) of the operator's operations. The image recording unit 44 records the images of the operation screens shown in Figures 6 to 14 such as 17-1 to 17-9 etc. The image display control unit 45, for example, generates a frame-by-frame image 17-10 obtained by arranging the plurality of images of the operation screens recorded by the image recording unit 44 in time series during manual alignment. By playing the generated frame-by-frame image 17-10, the image display control unit 45 can continuously display the plurality of images of the operation screens recorded by the image recording unit 44 on the touch panel 17 in the order of operations. In this way, the processing device 10 can, for example, subsequently enable the operator to visually recognize the situation of a series of operations on the operation screen performed by the operator during manual alignment.

[0050] Figure 6 The image 17-1 shown in Figure 6 shows an example of the image initially displayed as the frame-by-frame image 17-10. The image 17-1 shown in Figure 6 records the entire image of the operation screen 50-1 that displays the cutting state during manual alignment. In the operation screen 50-1 shown in Figure 6 there are a main region 51 and a sub-region 52. In the display region 51-1 provided in the main region 51, various buttons are provided, for example, along the inner periphery of the region. In the display region 51-1 shown in

[0051] Figure 7 for example, a wafer map 61 is displayed. The wafer map 61 is a schematic diagram showing the shape (circular shape) of the wafer 100 and the scribe lanes 103 (multiple horizontal lines), and can visually show the progress of cutting. In the sub-region 52, window adjustment buttons 52-1, θ alignment buttons 52-2, light amount buttons 52-3, focus buttons 52-4, magnification change buttons 52-5, etc. required for manual alignment are provided. Figure 7 The image 17-2 shown in Figure 7In the operation screen 50-2 shown, in the display area 51-1 of the main area 51, a plurality of images such as the notch images 62-1 to 62-4 are displayed, for example. The notch image 62-1 shows a set area where notch inspection is performed in the wafer 100. The notch images 62-2 to 62-4 respectively display images obtained by magnifying the cutting groove (notch) corresponding to the set area of the notch image 62-1 at a prescribed magnification with mutually different contrasts.

[0052] Figure 8 The image 17-3 shown is an example of an image played after the image 17-2 as the frame advance image 17-10. Figure 8 The image 17-3 shown records the operation screen 50-3 displayed when an error occurs in notch inspection during manual alignment. In Figure 8 In the operation screen 50-3 shown, in the display area 51-1 of the main area 51, for example, the notch image 63 is displayed. The notch image 63 includes an image 63-1 of the cutting groove (notch) and an image 63-2 of the scribe lane 103, showing that the position of the cutting groove (notch) is shifted from the scribe lane 103.

[0053] In addition, in Figure 8 In the image 17-3 shown, a marker 71 is displayed that overlaps with the alarm clear button 52-6 provided in the sub-area 52 when played as the frame advance image 17-10. When Figure 8 When the operation screen 50-3 shown is displayed on the touch panel 17, the marker 71 shows the position on the operation screen 50-3 that the operator has operated (touched) in a series of operations related to manual alignment. That is, through the marker 71, it can be confirmed that: at the time of recording Figure 8 the image 17-3 shown, the alarm clear button 52-6 has been operated by the operator.

[0054] Figure 9 The image 17-4 shown is an example of an image played after the image 17-3 as the frame advance image 17-10. Figure 9 The image 17-4 shown records the operation screen 50-4 displayed when error recovery is performed during manual alignment. In the main area 51 of the operation screen 50-4, for example, a notch inspection retry button 51-2, a notch inspection teaching button 51-3, a stop correction button 51-4, a cutting continue button 51-5, etc. are provided. In addition, in the sub-area 52 of the operation screen 50-4, for example, a cutting position correction button 52-7, a marking line correction button 52-8, etc. are provided.

[0055] In addition, in Figure 9In the image 17-4 shown, a marker 72 overlapping with the stop correction button 51-4 set in the main area 51 is displayed when played as the frame-in image 17-10. When Figure 9 the operation screen 50-4 shown is displayed on the touch panel 17, the marker 72 indicates the position on the operation screen 50-4 that the operator operates (touches) in a series of operations related to manual alignment. That is, it can be confirmed by the marker 72 that: at the time of recording Figure 9 the image 17-4 shown, the stop correction button 51-4 was operated by the operator.

[0056] Figure 10 The image 17-5 shown shows an example of an image played after the image 17-4 as the frame-in image 17-10. Figure 10 The image 17-5 shown records the operation screen 50-5 displayed when performing stop correction in manual alignment. In the operation screen 50-5, the same cutout image 63 as Figure 8 the operation screen 50-3 shown is displayed in the display area 51-1 of the main area 51. In addition, in Figure 10 the display area 51-1 shown, in addition to Figure 8 the image 63-1 of the cutting groove (cutout) and the image 63-2 of the interval track 103 shown, it also includes the image 63-3 of the marking line, reflecting the situation of specifying the cutting position.

[0057] In addition, in the main area 51 of the operation screen 50-5, for example, a direction key 51-6 is provided. In Figure 10 the image 17-5 shown, a marker 73 overlapping with the direction key 51-6 set in the main area 51 is displayed when played as the frame-in image 17-10. When Figure 10 the operation screen 50-5 shown is displayed on the touch panel 17, the marker 73 indicates the position on the operation screen 50-5 that the operator operates (touches) in a series of operations related to manual alignment. That is, it can be confirmed by the marker 73 that: at the time of recording Figure 10 the image 17-5 shown, the direction key 51-6 was operated by the operator.

[0058] Figure 11 The image 17-6 shown shows an example of an image played after the image 17-5 as the frame-in image 17-10. Figure 11 The image 17-6 shown records the operation screen 50-5 after the operator has operated the direction key 51-6. Figure 11 The operation screen 50-5 shown has the same structure as Figure 10 the operation screen shown. Figure 11When the image 17-6 shown is played as the frame-forward image 17-10, a marker 74 overlapping with the cutting position correction button 52-7 provided in the sub-region 52 is displayed. When Figure 11 When the operation screen 50-5 shown is displayed on the touch panel 17, the marker 74 indicates the position on the operation screen 50-5 that the operator has operated (touched) in a series of operations related to manual alignment. That is, it can be confirmed by the marker 74 that: at the time of recording Figure 11 the image 17-6 shown, the cutting position correction button 52-7 was operated by the operator.

[0059] Figure 12 The image 17-7 shown shows an example of an image played after the image 17-6 as the frame-forward image 17-10. Figure 12 The image 17-7 shown records the operation screen 50-1 displayed on the touch panel 17 after the cutting position correction button 52-7 was operated by the operator in the operation screen 50-5 shown. Figure 11 The operation screen 50-1 shown has the same structure as Figure 12 the operation screen shown. Figure 6 the operation screen shown.

[0060] Figure 13 The image 17-8 shown shows an example of an image played after the image 17-7 as the frame-forward image 17-10. Figure 13 The image 17-8 shown is the same operation screen 50-2 as Figure 7 and records the operation screen 50-2 shown during the implementation of the notch inspection via the Figure 12 cutting state display shown.

[0061] Figure 14 The image 17-9 shown shows an example of an image played after the image 17-8 as the frame-forward image 17-10. Figure 14 The image 17-9 shown is the same operation screen 50-3 as Figure 8 and records the operation screen 50-3 shown when an error occurs during the notch inspection via the Figure 13 notch inspection implementation shown. In the operation screen 50-3 shown, a notch image 64 is displayed, for example, in the display area 51-1 of the main region 51. The notch image 64 includes an image 64-1 of a cutting groove (notch) and an image 64-2 of a spacer channel 103, reflecting the situation where the position of the cutting groove (notch) is shifted from the spacer channel 103. Figure 14 In the operation screen 50-3 shown, a notch image 64 is displayed, for example, in the display area 51-1 of the main region 51. The notch image 64 includes an image 64-1 of a cutting groove (notch) and an image 64-2 of a spacer channel 103, reflecting the situation where the position of the cutting groove (notch) is shifted from the spacer channel 103.

[0062] By Figures 6 to 14When playing the frame-by-frame image 17-1 shown, it is possible to confirm the situation of a series of operations on the operation screen (such as 50-1 to 50-5, etc.) performed by the operator. For example, by confirming the images 17-4 to 17-6 played as the frame-by-frame image 17-10, it is possible to find out that the error in the notch inspection recorded in the image 17-9 is due to the incorrect correction of the cutting position.

[0063] The processing of the processing device 10 according to the embodiment is particularly useful, for example, in the case of manual alignment by the operator to perform θ alignment, set the alignment target, and perform the alignment of the spacer track with respect to the target, resulting in a cutting offset. Specifically, in the case of an error in the notch inspection such that the cutting groove (notch) deviates from the threshold, the operator performs an operation to re-specify the cutting position. At this time, in the case where an error in the notch inspection occurs again due to an error in the cutting position re-specified by the operator, if the operation of the operator is recorded as an image, it is possible to easily confirm whether there is an error in the cutting position re-specified by the operator.

[0064] Figure 15 It is a flowchart showing an example of the processing of the processing device according to the embodiment. Figure 15 The processing of the processing device 10 shown is executed by each part of the control unit 40.

[0065] As Figure 15 shown, the image display control unit 45 reads the image information of the operation screen from the image storage unit 31 (step S101). The image information read by the image display control unit 45 is specified by the operator. The operator can specify the date and time and the operation content to specify the image information.

[0066] Next, the image display control unit 45 generates a frame-by-frame image using the image information read in step S101 (step S102). The frame-by-frame image is generated in a state where it can be played in time series.

[0067] Next, the image display control unit 45 displays the frame-by-frame image generated in step S102 (step S103) and ends Figure 15 the processing shown.

[0068] In the above embodiment, an example in which the processing device 10 displays the frame-by-frame image (for example, image 17-10) generated from a plurality of images (still images) of the operation screen on the touch panel 17 has been described, but it is not particularly limited to this example. For example, the operator may also send the frame-by-frame image to an external device such as an external information processing device operated remotely or to a server that manages the information of the processing device 10.

[0069] In addition, in the above-described embodiment, an example of generating a frame-by-frame image from a plurality of images (still images) on the operation screen has been described, but it is not particularly limited to this example. For example, the image recording unit 44 may also record a moving image on the operation screen.

[0070] [Modification Example]

[0071] Figure 16 is a block diagram schematically showing an example of the functional structure of a processing apparatus according to a modification example. As Figure 16 shown, the processing apparatus 10 of the modification example includes an error detection unit 46 that detects errors. The error detection unit 46 detects, for example, an error in the notch inspection generated during manual alignment.

[0072] The image recording unit 44 starts recording an image on the operation screen in accordance with a series of operations by the operator, accumulates the images recorded within a preset time before and after the error, and deletes the images recorded at other times after a specified time has elapsed. Figure 17 is a diagram schematically showing an example of processing of image information according to a modification example.

[0073] As Figure 17 shown, the image recording unit 44 determines the image information J2 and J3 in the images stored in the image storage unit 31 after a specified time as the image information to be continuously accumulated, and determines the image information J1 and J4 as the image information to be deleted. The specified time may be, for example, the elapsed time from the end of a series of operations performed by the operator. The image information J2 is the information of the images recorded by the image recording unit 44 from the detection time of the error E1 detected by the error detection unit 46 to the time T1 after tracing back a certain time. The image information J3 is the information of the images recorded by the image recording unit 44 from the detection time of the error E1 detected by the error detection unit 46 to the time T2 after a certain time has elapsed. The image information J1 is the information of the images recorded by the image recording unit 44 at a time earlier than the time T1 after tracing back a certain time from the detection time of the error E1, and the image information J4 is the information of the images recorded by the image recording unit 44 at a time later than the time T2 after a certain time has elapsed from the detection time of the error E1.

[0074] [Other Embodiments]

[0075] The processing apparatus 1 of the present invention can be variously modified and implemented without departing from the gist of the present invention. For example, it is not limited to the cutting apparatus described as an example of the processing apparatus 1, and may also be a laser processing apparatus or a grinding apparatus.

[0076] In addition, each component of the processing apparatus 1 described in the above embodiments is a functional concept component, and it is not necessarily physically configured as shown in the figure. That is, the specific manner of dispersion and integration of the processing apparatus 1 is not limited to that shown in the figure, and all or a part of it can be functionally or physically dispersed or integrated in any unit according to various loads, usage conditions, etc. The control unit 40 can appropriately disperse or integrate the above-mentioned parts according to the content of the processing of each part included in the control unit 40. For example, the screen display control unit 42 and the image display control unit 45 of the control unit 40 can be installed in the control unit 40 in a functionally or physically integrated state.

Claims

1. A processing device, characterized in that, the processing device has a holding table, a processing unit, a photographing unit, a touch panel, and a control unit for controlling each mechanism, the control unit has: an image recording unit that continuously records the screen displayed on the touch panel as an image; and a contact detection unit that detects the coordinates of the touch panel that has been touched and operated by the operator, the image recording unit records the image in a state where an arbitrary mark is displayed at the coordinates detected by the contact detection unit, the control unit further has an error detection unit that detects errors, the image recording unit starts recording the image of the screen displayed on the touch panel along with a series of operations of the operator, the image recording unit continues to accumulate the image recorded within a preset time before and after the error detected by the error detection unit, and deletes the image recorded at times other than the above time after a specified time has elapsed.

Images