A magnetic template cover fixture
Through the magnetic-sucking template cover fixture, the magnetic suction force is used to adsorb and press rings, the problems of inconvenient template replacement and insufficient limit protection in micro-nano imprinting are solved, and efficient, safe replacement and effective limit of templates are achieved.
Patent Information
- Application Number
- CN201910658564.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2019-07-19
- Publication Date
- 2025-04-01
- Estimated Expiration
- 2039-07-19
AI Technical Summary
During micro-nano imprinting, the replacement of templates requires careful care, which is inconvenient to operate, and the prior art is difficult to effectively limit and protect thin and fragile templates.
A magnetic-sucking template cover fixture is used to adsorb and press rings through magnetic suction force, thereby achieving efficient and safe replacement of the template. The fixture includes a base plate, a press ring and a cover plate. The press ring and annular groove can be detached and assembled. The cover ring of the cover plate is made of magnetic material, which can adsorb and lift the press ring.
It realizes efficient and safe replacement of the template, avoiding the problem of jamming and damage to the bearing surface during assembly and disassembly, and ensuring the limit and protection of the template.
Smart Images

Figure CN112241104B_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the field of micro-nano imprinting equipment, and in particular to a magnetic template cover jig. Background Art
[0002] The micro-nano imprinting process involves a template, but the template itself has a service life and needs to be replaced at certain intervals. The template itself is also limited in a specific fixture, and the fixture needs to limit the template very well. However, the template itself is a very thin and fragile item, so the replacement of the existing template often requires caution and the operation is not very convenient. Summary of the invention
[0003] The problem to be solved by the present invention is to provide a magnetic template cover jig, which utilizes magnetic attraction to absorb and lift out a pressure ring, thereby making room for replacing the template, and the replacement of the template is efficient and safe.
[0004] In order to solve the above problems, the present invention provides a magnetic template cover jig. In order to achieve the above purpose, the technical solution adopted by the present invention to solve its technical problems is:
[0005] A magnetic template cover jig comprises: a base plate, the upper surface of which is provided with a bearing surface which matches the vertical projection of the template, the outer contour of the bearing surface is in the shape of a major arc, and a concave annular groove is provided around the bearing surface; a pressure ring which matches the vertical projection of the annular groove, and the pressure ring and the annular groove are detachably assembled; a cover plate, comprising a cover ring which has adsorption force on the upper surface of the pressure ring, a transparent plate is provided in the middle of the cover ring, and a convex handle is also provided on the cover ring; the pressure ring and the cover ring are made of ferromagnetic materials.
[0006] The beneficial effect of adopting the above technical solution is: when the template needs to be replaced, the personnel grasp the cover plate, and use the cover plate to absorb and lift the pressure ring. Because the cover ring of the cover plate is made of magnetic material, after being fitted with the upper surface of the pressure ring, the pressure ring can be directly lifted out of the annular groove. There is no need to consider setting a notch on the annular groove to facilitate the opening of the pressure ring, and the pressure ring and the annular groove can be tightly assembled together. At the same time, when the cover plate lifts the pressure ring, the pressure ring itself basically always remains horizontal. In the original way of prying the pressure ring, the pressure ring itself is easy to be at an angle with the horizontal plane, and it is easy to get stuck with the bearing surface, damaging the bearing surface. The role of the transparent plate is to facilitate visual observation by personnel and prevent debris from falling onto the template. The inner contour of the pressure ring restricts it from rotating in the annular groove, ensuring the limitation of the template. In addition to the vertical upward freedom of the template, the replacement of the template is efficient and safe.
[0007] As a further improvement of the present invention, there are two handles, a line connecting the two handles passes through the centroid of the cover ring, and the tops of the handles are provided with bulged portions.
[0008] The beneficial effects of adopting the above technical solution are: the arrangement position of the handle ensures that the cover plate is not easily tilted on the fingers of the person due to its own weight, and the enlarged part of the handle prevents the cover plate from slipping out of the hands of the person.
[0009] As a further improvement of the present invention, the lower surface of the transparent plate is higher than the lower surface of the cover ring, and the transparent plate is made of acrylic material.
[0010] The beneficial effects of adopting the above technical solution are: ensuring that the transparent plate will not damage the template, and the transparent acrylic material is easy to obtain and is light in weight.
[0011] As a further improvement of the present invention, the thickness of the pressure ring is not less than the depth of the annular groove.
[0012] The beneficial effect of adopting the above technical solution is: ensuring that the pressure ring is not lower than the bearing surface, and the template can be limited in its own degree of freedom by the pressure ring.
[0013] As a further improvement of the present invention, the outer contour of the pressure ring, the outer contour of the cover ring, and the inner contour of the cover ring are all circular, the outer contour radius of the cover ring is smaller than the outer contour radius of the pressure ring, and the radius corresponding to the major arc of the bearing surface is smaller than the inner contour radius of the cover ring.
[0014] The beneficial effect of adopting the above technical solution is: ensuring that the size of the cover ring is just inside the pressure ring, and all the lower surfaces of the cover ring are in contact with the pressure ring, and do not contact with the transparent plate.
[0015] As a further improvement of the present invention, the bottom of the annular groove is provided with a plurality of first fixing holes. When the pressure ring is assembled with the annular groove, the pressure ring is provided with a third fixing hole docking with the first fixing hole. The third fixing hole passes through the upper and lower surfaces of the pressure ring, and the first fixing hole and the third fixing hole are connected by screws.
[0016] The beneficial effect of adopting the above technical solution is that the first fixing hole and the third fixing hole can assemble and fix the pressure ring and the bottom plate within a period of time.
[0017] As a further improvement of the present invention, the outer contour of the bottom plate is rectangular, and a plurality of vertical second fixing holes are provided between the outer contour of the annular groove and the outer contour of the bottom plate.
[0018] The beneficial effect of adopting the above technical solution is that the corners of the rectangle provide positions for the second fixing holes, and the second fixing holes can fix the bottom plate to other workbenches.
[0019] As a further improvement of the present invention, the bearing surface is provided with concave-convex wrinkles, forming a plurality of concentric major arcs of different sizes.
[0020] The beneficial effect of adopting the above technical solution is that it can provide uniform support for the template and prevent the smooth flat surface from having a suction effect on the template, thereby increasing the difficulty of replacing the template.
[0021] As a further improvement of the present invention, a convex mirror is provided on the transparent plate.
[0022] The beneficial effect of adopting the above technical solution is that the convex mirror can easily act as a magnifying glass, and the state of the template can be observed while the pressure ring is moving. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0024] Figure 1 It is a perspective view of an embodiment of the present invention.
[0025] 1-bottom plate; 1a-annular groove; 1b-bearing surface; 1c-flat surface; 1d-first fixing hole; 1e-second fixing hole; 2-template; 3-pressing ring; 3a-hole; 3b-third fixing hole; 4-cover plate; 4a-transparent plate; 4b-handle; 4c-cover ring. DETAILED DESCRIPTION
[0026] The present invention is further described in detail below in conjunction with specific embodiments:
[0027] In order to achieve the purpose of the present invention, a magnetic template cover jig includes: a base plate 1, the upper surface of which has a bearing surface 1b that matches the vertical projection of the template 2, the outer contour of the bearing surface 1b is a major arc, and the bearing surface 1b is surrounded by a concave annular groove 1a; a pressure ring 3 that matches the vertical projection of the annular groove 1a, and the pressure ring 3 and the annular groove 1a are detachably assembled; a cover plate 4, including a cover ring 4c that has adsorption force on the upper surface of the pressure ring 3, a transparent plate 4a is provided in the middle of the cover ring 4c, and a convex handle 4b is also provided on the cover ring 4c; the pressure ring 3 and the cover ring 4c are ferromagnetic materials.
[0028] The pressure ring 3 is made of steel, and the cover ring 4c is made of magnet. Figure 1 As shown, the position of the chord of the major arc corresponding to the annular groove 1a and the bearing surface 1b is a vertical flat surface 1c.
[0029] The beneficial effect of adopting the above technical solution is: when the template needs to be replaced, the personnel grasp the cover plate, and use the cover plate to absorb and lift the pressure ring. Because the cover ring of the cover plate is made of magnetic material, after being fitted with the upper surface of the pressure ring, the pressure ring can be directly lifted out of the annular groove. There is no need to consider setting a notch on the annular groove to facilitate the opening of the pressure ring, and the pressure ring and the annular groove can be tightly assembled together. At the same time, when the cover plate lifts the pressure ring, the pressure ring itself basically always remains horizontal. In the original way of prying the pressure ring, the pressure ring itself is easy to be at an angle with the horizontal plane, and it is easy to get stuck with the bearing surface, damaging the bearing surface. The role of the transparent plate is to facilitate visual observation by personnel and prevent debris from falling onto the template. The inner contour of the pressure ring restricts it from rotating in the annular groove, ensuring the limitation of the template. In addition to the vertical upward freedom of the template, the replacement of the template is efficient and safe.
[0030] In some other embodiments of the present invention, there are two handles 4b, the connecting line of the two handles 4b passes through the centroid of the cover ring 4c, and the top of the handle 4b is provided with an enlarged portion.
[0031] The beneficial effects of adopting the above technical solution are: the arrangement position of the handle ensures that the cover plate is not easily tilted on the fingers of the person due to its own weight, and the enlarged part of the handle prevents the cover plate from slipping out of the hands of the person.
[0032] In some other embodiments of the present invention, the lower surface of the transparent plate 4a is higher than the lower surface of the cover ring 4c, and the transparent plate 4a is made of acrylic material.
[0033] The beneficial effects of adopting the above technical solution are: ensuring that the transparent plate will not damage the template, and the transparent acrylic material is easy to obtain and is light in weight.
[0034] In some other embodiments of the present invention, the thickness of the pressure ring 3 is not less than the depth of the annular groove 1 a.
[0035] The beneficial effect of adopting the above technical solution is: ensuring that the pressure ring is not lower than the bearing surface, and the template can be limited in its own degree of freedom by the pressure ring.
[0036] In other embodiments of the present invention, the outer contour of the pressure ring 3, the outer contour of the cover ring 4c, and the inner contour of the cover ring 4c are all circular, the outer contour radius of the cover ring 4c is smaller than the outer contour radius of the pressure ring 3, and the radius corresponding to the major arc of the bearing surface 1b is smaller than the inner contour radius of the cover ring 4c.
[0037] like Figure 1 As shown, the center of the pressure ring 3 is provided with a hole 3c, and the inner contour of the hole 3c is consistent with the outer contour of the template 2.
[0038] The beneficial effect of adopting the above technical solution is: ensuring that the size of the cover ring is just inside the pressure ring, and all the lower surfaces of the cover ring are in contact with the pressure ring, and do not contact with the transparent plate.
[0039] In some other embodiments of the present invention, the bottom of the annular groove 1a is provided with a plurality of first fixing holes 1d. When the pressure ring 3 is assembled with the annular groove 1a, the pressure ring 3 is provided with a third fixing hole 3b which is docked with the first fixing hole 1d. The third fixing hole 3b passes through the upper and lower surfaces of the pressure ring 3, and the first fixing hole 1d and the third fixing hole 3b are connected by screws.
[0040] The beneficial effect of adopting the above technical solution is that the first fixing hole and the third fixing hole can assemble and fix the pressure ring and the bottom plate within a period of time.
[0041] In some other embodiments of the present invention, the outer contour of the bottom plate 1 is rectangular, and a plurality of vertical second fixing holes 1 e are provided between the outer contour of the annular groove 1 a and the outer contour of the bottom plate 1 .
[0042] The beneficial effect of adopting the above technical solution is that the corners of the rectangle provide positions for the second fixing holes, and the second fixing holes can fix the bottom plate to other workbenches.
[0043] In some other embodiments of the present invention, the bearing surface 1b is provided with concave-convex wrinkles, forming a plurality of concentric major arcs of different sizes.
[0044] The beneficial effect of adopting the above technical solution is that it can provide uniform support for the template and prevent the smooth flat surface from having a suction effect on the template, thereby increasing the difficulty of replacing the template.
[0045] In some other embodiments of the present invention, a convex mirror is provided on the transparent plate 4a.
[0046] The beneficial effect of adopting the above technical solution is that the convex mirror can easily act as a magnifying glass, and the state of the template can be observed while the pressure ring is moving.
[0047] The above embodiments are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it. They cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.
Claims
1. A magnetic template cover fixture, characterized in that: include: The bottom plate has a bearing surface on its upper surface that matches the vertical projection of the template, the outer contour of the bearing surface is in the shape of a major arc, and a concave annular groove is arranged around the bearing surface; A pressing ring, which is consistent with the vertical projection of the annular groove, and the pressing ring and the annular groove are detachably assembled; The cover plate comprises a cover ring having an adsorption force with the upper surface of the pressure ring, a transparent plate is provided in the middle of the cover ring, and a convex handle is also provided on the cover ring; The pressure ring and cover ring are made of ferromagnetic materials; The thickness of the pressure ring is not less than the depth of the annular groove; The bearing surface is provided with concave-convex wrinkles, forming a plurality of concentric superior arcs of different sizes.
2. The magnetic template cover jig according to claim 1, characterized in that: There are two handles, a line connecting the two handles passes through the centroid of the cover ring, and the tops of the handles are provided with bulging parts.
3. The magnetic template cover jig according to claim 1, characterized in that: The lower surface of the transparent plate is higher than the lower surface of the cover ring, and the transparent plate is made of acrylic material.
4. The magnetic template cover jig according to claim 1, characterized in that: The outer contour of the pressure ring, the outer contour of the cover ring and the inner contour of the cover ring are all circular, the outer contour radius of the cover ring is smaller than the outer contour radius of the pressure ring, and the radius corresponding to the major arc of the bearing surface is smaller than the inner contour radius of the cover ring.
5. The magnetic template cover jig according to claim 4, characterized in that: The bottom of the annular groove is provided with a plurality of first fixing holes. When the pressure ring is assembled with the annular groove, the pressure ring is provided with a third fixing hole docking with the first fixing hole. The third fixing hole passes through the upper and lower surfaces of the pressure ring. The first fixing hole and the third fixing hole are connected by screws.
6. The magnetic template cover jig according to claim 5, characterized in that: The outer contour of the bottom plate is rectangular, and a plurality of vertical second fixing holes are provided between the outer contour of the annular groove and the outer contour of the bottom plate.
7. The magnetic template cover jig according to claim 1, characterized in that: A convex mirror is arranged on the transparent plate.
Citation Information
Patent Citations
Reticle pod
CN101321674A
Magnetic type template cover jig
CN210270507U