Display device and method of manufacturing the same
By forming an inorganic insulating layer pattern with different etch selectivity on the inorganic insulating layer, the problem of air gaps and contact electrode material breaking under the light emitting element is solved, and stable contact electrode contact is achieved.
Patent Information
- Application Number
- CN201980049565.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Priority Date
- 2018-07-24
- Filing Date
- 2019-01-03
- Publication Date
- 2025-05-13
- Estimated Expiration
- 2039-01-03
AI Technical Summary
The air gap and the fracture or short circuit of the contact electrode material is formed under the light emitting element.
By forming an inorganic insulating layer pattern with different etch selectivity on the inorganic insulating layer, an air gap is avoided under the light emitting element and a stable contact of the contact electrode is ensured.
In the patterning process performed after the light emitting element alignment, the air gap is effectively prevented under the light emitting element, and the problems of breakage and short circuit of the contact electrode material are prevented.
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Figure CN112470282B_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to a display device and a method for manufacturing the same. Background Art
[0002] As multimedia technology develops, display devices have become increasingly important. Therefore, various types of display devices, such as organic light emitting display devices and liquid crystal display (LCD) devices, are currently used.
[0003] The display device is used to display an image and includes a display panel such as an organic light emitting display panel or a liquid crystal display panel. Among them, the light emitting display panel may include a light emitting element. For example, a light emitting diode (LED) may include an organic light emitting diode (OLED) using an organic material as a fluorescent material and an inorganic light emitting diode using an inorganic material as a fluorescent material.
[0004] Organic light emitting diodes (OLEDs) use organic materials for fluorescent materials of light emitting elements. The advantages are that the manufacturing process is simple and the elements are flexible. However, it is known that organic materials are susceptible to high temperature driving environments and the efficiency of blue light is relatively low.
[0005] On the other hand, an inorganic light emitting diode using an inorganic semiconductor as a fluorescent material has advantages in that the inorganic light emitting diode has durability even in a high temperature environment and has high blue light efficiency compared to an organic light emitting diode. In addition, in the manufacturing process, as the disadvantages of conventional inorganic light emitting diodes are pointed out, a transfer method using a dielectrophoresis (DEP) method has been developed. Therefore, inorganic light emitting diodes having excellent durability and efficiency compared to organic light emitting diodes have been continuously studied. Summary of the invention
[0006] Technical issues
[0007] Aspects of the present disclosure provide a display device without an air gap that may be formed under a light emitting element by forming an inorganic insulating layer pattern having different etching selectivities on an inorganic insulating layer.
[0008] An object of the present disclosure is to prevent breakage or poor contact of a contact electrode in a case where a light emitting element contacts the contact electrode.
[0009] It should be noted that aspects of the present disclosure are not limited to the above-mentioned aspects, and other unmentioned aspects of the present disclosure will be clearly understood by those skilled in the art through the following description.
[0010] Technical Solution
[0011] According to aspects of the present disclosure, a display device may include: a first electrode; a second electrode spaced apart from the first electrode to face the first electrode; a first insulating layer disposed on the first electrode and the second electrode to expose at least a portion of each of the first electrode and the second electrode and cover at least a portion of the respective facing sides of the first electrode and the second electrode and a space between the first electrode and the second electrode; at least one light-emitting element disposed on the first insulating layer between the first electrode and the second electrode; a second insulating layer disposed between the first electrode and the second electrode to cover at least a portion of the at least one light-emitting element; a first contact electrode electrically contacting a first end of the at least one light-emitting element and the first electrode; and a second contact electrode electrically contacting a second end of the at least one light-emitting element and the second electrode. The first insulating layer may include: an overlapping region overlapping the at least one light-emitting element; a first non-overlapping region extending outwardly from the first end of the at least one light-emitting element and not overlapping the at least one light-emitting element; and a second non-overlapping region extending outwardly from the second end of the at least one light-emitting element and not overlapping the at least one light-emitting element.
[0012] The first insulating layer may partially cover the first electrode and the second electrode, and the first insulating layer may include: a first opening partially exposing the first electrode; and a second opening partially exposing the second electrode.
[0013] The material of the first insulating layer and the material of the second insulating layer may have different etching selectivities.
[0014] The first insulating layer may partially cover side surfaces of the first electrode and the second electrode opposite to the corresponding facing side surfaces.
[0015] The overlapping region of the first insulating layer may be substantially horizontal with at least a portion of each of the first non-overlapping region and the second non-overlapping region.
[0016] The corresponding facing sides of the first electrode and the second electrode can be inclined relative to a substrate arranged below the first electrode and the second electrode, at least a portion of the first non-overlapping area can partially overlap with the inclined side of the first electrode, and at least a portion of the second non-overlapping area can partially overlap with the inclined side of the second electrode.
[0017] The first non-overlapping region may partially cover an upper surface of the first electrode, and the second non-overlapping region may partially cover an upper surface of the second electrode.
[0018] At least one of the first opening and the second opening may extend in a first direction in which the first electrode and the second electrode extend, and the first opening and the second opening may be spaced apart from each other in a second direction different from the first direction.
[0019] Both ends of each of the first opening and the second opening in the first direction may terminate at positions spaced inwardly from both ends of the first electrode or the second electrode in the first direction.
[0020] The width of the first opening and the width of the second opening measured in the second direction may be respectively smaller than the width of the first electrode and the width of the second electrode measured in the second direction, and the distance between the corresponding facing sides of the first electrode and the second electrode may be smaller than the distance between the corresponding facing sides of the first opening and the second opening.
[0021] A length between the first end and the second end of the at least one light emitting element may be greater than a distance between respective facing sides of the first electrode and the second electrode, and less than a distance between respective facing sides of the first opening and the second opening.
[0022] The first contact electrode may electrically contact the first electrode through the first opening, the second contact electrode may electrically contact the second electrode through the second opening, and at least a portion of each of the first and second contact electrodes contacts the first insulating layer.
[0023] A side surface of a first end of at least one light-emitting element may electrically contact the first contact electrode, a side surface of a second end of at least one light-emitting element may electrically contact the second contact electrode, and a lower surface of the first end and a lower surface of the second end of at least one light-emitting element may partially contact an overlapping region of the first insulating layer.
[0024] The display device may further include a third insulating layer disposed on the first electrode, the first contact electrode, and the second insulating layer to partially cover the first electrode, the first contact electrode, and the second insulating layer. The second contact electrode may contact at least a portion of each of the third insulating layer, the second electrode, and the second insulating layer.
[0025] According to aspects of the present disclosure, a method for manufacturing a display device may include the following steps: forming a first electrode and a second electrode facing the first electrode on a substrate; forming a first insulating layer on the first electrode and the second electrode and between the first electrode and the second electrode; forming a light-emitting element on the first insulating layer; forming a second insulating layer to cover the light-emitting element, and patterning a portion of the second insulating layer to expose a first end of the light-emitting element; forming a first opening to expose the first electrode by partially patterning an area where the first electrode and the first insulating layer overlap; and forming a first contact electrode, the first contact electrode electrically contacting the exposed first end of the light-emitting element and the first electrode exposed by the opening.
[0026] The material of the first insulating layer and the material of the second insulating layer may have different etching selectivities, and patterning the second insulating layer includes avoiding patterning the first insulating layer.
[0027] The step of forming the first opening may include forming the first opening to have a width smaller than a width of the first electrode.
[0028] The method may include: patterning a second insulating layer to expose a second end opposite to the first end of the light emitting element; forming a second opening to expose the second electrode by partially patterning an area where the second electrode and the first insulating layer overlap; and forming a second contact electrode, the second contact electrode electrically contacting the exposed second end of the light emitting element and the second electrode exposed by the second opening.
[0029] The step of forming a first insulating layer may include: forming an overlapping region overlapping the light emitting element; forming a first non-overlapping region, the first non-overlapping region extending outward from the first end of the light emitting element and not overlapping the light emitting element; and forming a second non-overlapping region, the second non-overlapping region extending outward from the second end of the light emitting element and not overlapping the light emitting element.
[0030] The forming of the overlapping region of the first insulating layer may include forming the overlapping region of the first insulating layer to be substantially horizontal with at least a portion of each of the first non-overlapping region and the second non-overlapping region.
[0031] Details of other embodiments are included in the detailed description and accompanying drawings.
[0032] Beneficial Effects
[0033] In the display device according to the embodiment, the lower surfaces of both ends of the light emitting element can form a smooth contact with the first insulating layer including the inorganic material, and the both ends of the light emitting element can form a smooth contact with the contact electrode contacting the side surfaces of the both ends. Therefore, it is possible to prevent the formation of an air gap under the light emitting element in the patterning process performed after aligning the light emitting element, and to prevent the breakage and short circuit problems of the contact electrode material.
[0034] Advantageous effects according to the present disclosure are not limited to the above-mentioned advantageous effects, and include various other advantageous effects herein. BRIEF DESCRIPTION OF THE DRAWINGS
[0035] Additional understanding according to embodiments of the invention will become more apparent by describing embodiments of the invention in detail with reference to the accompanying drawings.
[0036] Figure 1 is a schematic plan view of a display device according to an embodiment.
[0037] Figure 2 yes Figure 1 Schematic enlarged view of part A of FIG.
[0038] Figure 3 It is along Figure 1Schematic cross-sectional view taken along line II' and line II-II'.
[0039] Figure 4 is a schematic diagram of a light emitting element according to an embodiment.
[0040] Figures 5 to 17 are schematic cross-sectional views showing a schematic sequence of a method of manufacturing a display device according to an embodiment.
[0041] Fig.18 and Fig.19 is a schematic cross-sectional view of a display device according to a comparative example.
[0042] Fig. 20 It shows the manufacturing Fig.19 A schematic cross-sectional view of a portion of a method of displaying an apparatus.
[0043] Fig.21 is a schematic cross-sectional view of a display device according to another embodiment.
[0044] Figure 22 to Figure 24 It shows the manufacturing Fig.21 A schematic cross-sectional view of a portion of a method of displaying an apparatus.
[0045] Fig.25 is a schematic cross-sectional view of a display device according to another embodiment. DETAILED DESCRIPTION
[0046] The present invention will now be described more fully hereinafter with reference to the accompanying drawings, in which preferred embodiments of the invention are shown. However, the present invention may be implemented in different forms and should not be construed as being limited to the embodiments set forth herein. On the contrary, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the scope of the invention to those skilled in the art.
[0047] It will also be understood that when a layer is referred to as being “on” another layer or substrate, it can be directly on the other layer or substrate, or intervening layers may also be present. Throughout the specification, the same reference numerals refer to the same components.
[0048] It will be understood that although the terms "first", "second", etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another element. For example, without departing from the teachings of the present invention, the first element discussed below may be referred to as the second element. Similarly, the second element may also be referred to as the first element.
[0049] Hereinafter, exemplary embodiments of the present disclosure will be described with reference to the accompanying drawings.
[0050] Figure 1 is a schematic plan view of a display device according to an embodiment.
[0051] The display device 10 may include at least one area defined as a pixel PX. The pixels PX may be disposed in a display portion of the display device 10 and may each emit light of a specific wavelength band to the outside of the display device 10. Figure 1 1 and 2 are shown by way of example, but it is obvious that the display device 10 may include a larger number of pixels. Although the pixels PX arranged in only one direction (e.g., the first direction D1) in a plane are shown in the drawings, the pixels PX may also be arranged in a second direction D2 intersecting the first direction D1. Figure 1 Each pixel PX may also be divided into segments, each segment forming a pixel PX. Figure 1 The plurality of electrodes are not shown as being arranged in parallel in the first direction D1 , but may also be arranged in various structures, such as in a vertical direction (or second direction D2 ) and in a zigzag manner.
[0052] Although not shown in the drawings, the display device 10 may include an emission portion, in which a light emitting element 350 is provided to emit light of a specific color, and a non-emission portion defined as an area other than the emission portion. The non-emission portion may be covered by a specific member so that it is not visible from the outside of the display device 10. In the non-emission portion, various members for driving the light emitting element 350 provided in the emission portion may be provided. For example, wiring, a circuit unit, and a driving unit for transmitting an electrical signal to the emission portion may be provided in the non-emission portion, but the present disclosure is not limited thereto.
[0053] The pixel PX may display a color by including one or more light-emitting elements 350 that emit light of a specific wavelength band. The light emitted from the light-emitting element 350 may be displayed externally by the emission portion of the display device 10. In an embodiment, the pixel PX that displays different colors may include a light-emitting element 350 that emits light of different colors. For example, the first pixel PX1 that displays red may include a light-emitting element 350 that emits red light, the second pixel PX2 that displays green may include a light-emitting element 350 that emits green light, and the third pixel PX3 that displays blue may include a light-emitting element 350 that emits blue light. However, the present disclosure is not limited thereto. In some cases, pixels that display different colors may include a light-emitting element 350 that emits light of the same color (e.g., blue), and a wavelength conversion layer or a color filter may be placed on the emission path to achieve the color of each pixel. However, the present disclosure is not limited thereto. In some cases, adjacent pixels PX may emit light of the same color.
[0054] Reference Figure 1The display device 10 may include electrodes 330 and 340, a first insulating layer 510 disposed on the electrodes 330 and 340 (see, for example, Figure 3 ) and the light emitting element 350. At least a portion of each of the electrodes 330 and 340 may be disposed in each pixel PX and electrically connected to the light emitting element 350, and may transmit an electrical signal to the light emitting element 350 so that the light emitting element 350 may emit light of a specific color.
[0055] At least a portion of each of the electrodes 330 and 340 may be used to form an electric field in each pixel PX to align the light emitting element 350. In particular, in the case where the light emitting elements 350 emitting light of different colors are aligned in the pixel PX, it is necessary to accurately align the different light emitting elements 350 in each pixel PX. In order to align the light emitting elements 350 using a dielectrophoresis (DEP) method, a solution containing the light emitting elements 350 may be applied to the display device 10, and then due to the electric field, an alternating current (AC) may be applied to form a capacitor. Therefore, a DEP force may be applied to the light emitting element 350, thereby aligning the light emitting element 350.
[0056] Here, the first insulating layer 510 may be provided on each electrode 330 or 340 to cover each electrode 330 or 340, but a portion of each electrode 330 or 340 is exposed through the opening 510P, and the light emitting element 350 may be provided on the first insulating layer 510 and spaced apart from the opening 510P. The first insulating layer 510 may form a smooth contact surface with each light emitting element 350, and the region of the first insulating layer 510 in contact with the lower surface of each light emitting element 350 is not damaged or the material of the first insulating layer 510 is not etched. The contact surface of the first insulating layer 510 may extend horizontally toward each electrode 330 or 340. The contact electrode 360 may smoothly contact the side surfaces of both ends of each light emitting element 350 on the first insulating layer 510. Since the contact electrode 360 may contact the first electrode 330 and the second electrode 340 exposed in the opening 510P, they may transmit electrical signals received from the electrodes 330 and 340, respectively, to the light emitting element 350. This will be described in more detail below.
[0057] Each of the electrodes 330 and 340 may include a first electrode 330 and a second electrode 340. In an exemplary embodiment, the first electrode 330 may be a separate pixel electrode provided in each pixel PX, and the second electrode 340 may be a common electrode commonly connected along the pixels PX. The first electrode 330 may be an anode of each light emitting element 350, and the second electrode 340 may be a cathode of each light emitting element 350. However, the present disclosure is not limited thereto, and the situation may also be the opposite.
[0058] Each of the first electrode 330 and the second electrode 340 may include an electrode stem 330S or 340S extending in a first direction D1 and at least one electrode branch 330B or 340B extending and branching from the electrode stem 330S or 340S in a second direction D2 intersecting the first direction D1 .
[0059] In particular, the first electrode 330 may include a first electrode trunk 330S extending in the first direction D1 and at least one first electrode branch 330B branching from the first electrode trunk 330S and extending in the second direction D2. Although not shown in the drawings, the first electrode trunk 330S may have one end connected to a signal application pad ("pad", also referred to as a "pad" or "pad") and another end extending in the first direction D1 and electrically isolated between pixels PX. The signal application pad may be electrically connected to the display device 10 or an external power source to transmit an electrical signal to the first electrode trunk 330S or apply AC power when the light emitting element 350 is aligned.
[0060] The first electrode trunk 330S of any one pixel may be located on substantially the same straight line as the first electrode trunk 330S of the adjacent pixels (e.g., adjacent in the first direction D1) belonging to the same row. In other words, both ends of the first electrode trunk 330S of one pixel may terminate between the pixels PX, but the first electrode trunk 330S of the adjacent pixels may be aligned with the extension of the first electrode trunk 330S of one pixel. This arrangement of the first electrode trunk 330S may be achieved by forming a trunk electrode in a manufacturing process and then cutting the trunk electrode using a laser or the like after performing an alignment process of the light-emitting element 350. Therefore, the first electrode trunks 330S respectively disposed in the pixels PX may transmit different electrical signals to their corresponding first electrode branches 330B, and the first electrode branches 330B may be driven separately.
[0061] The first electrode branch 330B may branch from at least a portion of the first electrode trunk 330S and may extend in the second direction D2 to a position spaced apart from the second electrode trunk 340S facing the first electrode trunk 330S. For example, the first electrode branch 330B disposed in each pixel PX may have one end connected to the first electrode trunk 330S and the other end spaced apart from the second electrode trunk 340S. Since the first electrode branch 330B is connected to the first electrode trunk 330S electrically isolated in each pixel PX, different electrical signals may be transmitted to each pixel PX.
[0062] One or more first electrode branches 330B may be provided in each pixel PX. Figure 1In the embodiment, two first electrode branches 330B are provided, but a plurality of first electrode branches 330B may be provided, and are not limited to two. In this case, the first electrode branches 330B may be spaced apart from each other, and may be spaced apart from the second electrode branches 340B described below. In some embodiments, the second electrode branches 340B may be provided between the first electrode branches 330B. Therefore, each pixel PX may have a symmetrical structure relative to the second electrode branches 340B, but the present disclosure is not limited thereto.
[0063] The second electrode 340 may include a second electrode trunk 340S and at least one second electrode branch 340B, the second electrode trunk 340S extending in the first direction D1 and spaced apart from the first electrode trunk 330S to face the first electrode trunk 330S, and at least one second electrode branch 340B branching from the second electrode trunk 340S, extending in the second direction D2 and spaced apart from the first electrode branch 330B to face the first electrode branch 330B. Like the first electrode trunk 330S, the second electrode trunk 340S may have one end connected to the signal application pad. However, the other end of the second electrode trunk 340S may extend to the pixel PX adjacent in the first direction D1. For example, the second electrode trunk 340S may be electrically connected between the pixels PX. Therefore, the two ends of the second electrode trunk 340S of any one pixel may be electrically connected to the corresponding ends of the second electrode trunk 340S of the adjacent pixel between the pixels PX. Therefore, the same electrical signal may be transmitted to each pixel PX.
[0064] The second electrode branch 340B may branch from at least a portion of the second electrode trunk 340S and extend in the second direction D2 to a position spaced apart from the first electrode trunk 330S. For example, the second electrode branch 340B disposed in each pixel PX may have one end connected to the second electrode trunk 340S and the other end spaced apart from the first electrode trunk 330S. Since the second electrode branch 340B is electrically connected to the second electrode trunk 340S, the second electrode trunk 340S is electrically connected to each pixel PX, and therefore, the same electrical signal may be transmitted to each pixel PX.
[0065] The second electrode branch 340B may be spaced apart from the first electrode branch 330B to face the first electrode branch 330B. Here, since the first electrode trunk 330S and the second electrode trunk 340S are spaced apart to face each other in opposite directions relative to the center of each pixel PX, the first electrode branch 330B and the second electrode branch 340B may extend in opposite directions. In other words, the first electrode branch 330B may extend in one direction in the second direction D2, and the second electrode branch 340B may extend in another direction in the second direction D2. Therefore, the corresponding ends of the branches may be arranged in opposite directions relative to the center of each pixel PX. However, the present disclosure is not limited thereto, and the first electrode trunk 330S and the second electrode trunk 340S may also be arranged in the same direction relative to the center of each pixel PX and spaced apart from each other. In this case, the first electrode branch 330B and the second electrode branch 340B branched from the first electrode trunk 330S and the second electrode trunk 340S, respectively, may extend in the same direction.
[0066] The light emitting element 350 may be aligned between the first electrode branch 330B and the second electrode branch 340B. Each of at least some of the light emitting elements 350 may have a first end electrically connected to one of the first electrode branches 330B and a second end electrically connected to the second electrode branch 340B. One of the contact electrodes 360 may be disposed on each of the first electrode branch 330B and the second electrode branch 340B connected to the light emitting element 350. The contact electrode 360 may electrically contact the light emitting element 350 so that the light emitting element 350 is electrically connected to the electrode branches 330B and 340B. The contact electrode 360 may electrically contact at least one side of both ends of each light emitting element 350. Therefore, the light emitting element 350 may receive an electrical signal and may emit light of a specific color.
[0067] In some embodiments, the first end of the light emitting element 350 electrically contacting the first electrode branch 330B may be an n-type doped conductive material layer, and the second end of the light emitting element 350 contacting the second electrode branch 340B may be a p-type doped conductive material layer. However, the present disclosure is not limited thereto, and the situation may also be the opposite.
[0068] The first insulating layer 510 (see e.g. Figure 3) may be disposed on the first electrode 330 and the second electrode 340 to cover but partially expose the first electrode 330 and the second electrode 340. The first insulating layer 510 may cover the first electrode 330 and the second electrode 340, but may include an opening 510P to expose a portion of the upper surface of each of the first electrode 330 and the second electrode 340 (e.g., a portion of the upper surface of each of the first electrode branch 330B and the second electrode branch 340B). The light emitting element 350 may be disposed between the first electrode branch 330B and the second electrode branch 340B on the first insulating layer 510 in which the opening 510P is not disposed.
[0069] The first insulating layer 510 may cover the first electrode 330 and the second electrode 340 to protect the first electrode 330 and the second electrode 340 and to electrically insulate the first electrode 330 and the second electrode 340 from each other. The first insulating layer 510 may be provided to cover both sides of each of the first electrode branch 330B and the second electrode branch 340B, and may also be provided in the space between the sides of each first electrode branch 330B and the second electrode branch 340B. Therefore, the first insulating layer 510 may cover the facing sides of each first electrode branch 330B and the second electrode branch 340B spaced apart from each other to electrically insulate them, and the light emitting element 350 may be provided on the first insulating layer 510 in the above-mentioned space.
[0070] The first insulating layer 510 (for example, the first insulating layer 510 disposed on the first electrode branch 330B and the second electrode branch 340B) disposed in the region where the light emitting element 350 is not disposed may be patterned to form an opening 510P. The first insulating layer 510 may remain unetched between each of the first electrode branch 330B and the second electrode branch 340B, and the light emitting element 350 may be disposed on the first insulating layer 510. The first insulating layer 510 may be disposed to partially cover the first electrode branch 330B and the second electrode branch 340B in the region where the opening 510P is not disposed. This may be possible because, since each of the first insulating layer 510 and the second insulating layer 520 may include materials having different etching selectivities, only the second insulating layer 520 described below is patterned in the patterning of the second insulating layer 520 during the manufacturing process of the display device 10.
[0071] Therefore, through the process performed during the manufacture of the display device 10, the air gap of the first insulating layer 510 may not be formed on the lower surface of each light emitting element 350 contacting the first insulating layer 510. The material of the contact electrode 360 contacting both side surfaces of each light emitting element 350 may be prevented from being broken by the air gap on the lower surface of each light emitting element 350. This will be described in more detail below with reference to other drawings.
[0072] As described above, by patterning the first insulating layer 510 (see Figure 3 ) may be disposed on the first electrode branch 330B and the second electrode branch 340B. The contact electrode 360 may electrically contact the first electrode branch 330B and the second electrode branch 340B through the opening 510P.
[0073] Figure 2 yes Figure 1 Schematic enlarged view of part A of FIG.
[0074] Reference Figure 1 and Figure 2 , the opening 510P may be provided to partially expose the upper surface of the first electrode branch 330B and the second electrode branch 340B. Since the electrode branches 330B and 340B are spaced apart from each other in the first direction D1, the opening 510P may also be spaced apart from each other in the first direction D1. Although not shown in the drawings, the first insulating layer 510 (see Figure 3 ) may be provided in a region in which the opening 510P is not provided to cover each electrode 330 or 340 .
[0075] The openings 510P may be respectively provided on the electrode branches 330B and 340B, and may extend in the second direction D2. Of both ends of each opening 510P in the second direction D2, one end in the direction of the electrode trunk 330S or 340S may be provided at a position spaced apart from the electrode trunk 330S or 340S so as not to overlap with the electrode trunk 330S or 340S, and the other end may be provided at a position spaced inwardly from one end of the electrode branch 330B or 340B.
[0076] Both ends of each opening 510P in the first direction D1 may be spaced inwardly from both sides of the electrode branch 330B or 340B, respectively. Each opening 510P may have a predetermined width based on the center of the electrode branch 330B or 340B, and thus may be spaced inwardly from both sides of the first electrode branch 330B or the second electrode branch 340B.
[0077] The width d1 of each opening 510P measured in the first direction D1 can be less than the width d2 of each electrode branch 330B or 340B measured in the first direction D1 (d1 < d2). The contact electrodes 360 described below can be arranged to partially cover the electrode branches 330B and 340B and the first insulating layer 510, and can contact the electrodes 330 and 340 respectively through the openings 510P. Herein, the width d3 of each contact electrode 360 measured in the first direction D1 can be greater than the width d2 of each electrode branch 330B or 340B measured in the first direction D1 (d2 < d3). In other words, in a plan view, each opening 510P can be substantially arranged inside the electrode branch 330B or 340B.
[0078] The light-emitting elements 350 can be arranged on the first insulating layer 510 where no opening 510P is provided between the electrode branches (e.g., between each first electrode branch 330B and the second electrode branch 340B). The first end of each light-emitting element 350 can be electrically connected to the first electrode branch 330B, and the second end can be electrically connected to the second electrode branch 340B. These contact portions can not contact the openings 510P on each electrode branch 330B or 340B. For example, the length h of the major axis of each light-emitting element 350 can be less than the distance l1 between the facing side surfaces of the plurality of openings 510P, but can be greater than the distance l2 between the facing side surfaces of the electrode branches 330B and 340B (l2 < h < l1).
[0079] Therefore, the corresponding ends of each light-emitting element 350 can be electrically connected to the first electrode branch 330B and the second electrode branch 340B, and the contact electrodes 360 can electrically contact both ends of each light-emitting element 350 and the electrodes 330 and 340 through the openings 510P.
[0080] In the above drawings, it is shown that the contact electrodes 360 can electrically contact the first electrode branch 330B and the second electrode branch 340B through the openings 510P. However, the first insulating layer 510 can also be arranged on each first electrode branch 330B, the second electrode branch 340B, and the space between each first electrode branch 330B and the second electrode branch 340B. The arrangement of the first insulating layer 510 will be described in detail with reference to a cross-sectional view below.
[0081] As Figure 1 shown, the first electrode main body 330S and the second electrode main body 340S can be electrically connected to the thin-film transistor 120 and the power supply wiring 161 to be described below respectively through contact holes (e.g., the first electrode contact hole CNTD and the second electrode contact hole CNTS). Although the contact holes on the first electrode main body 330S and the second electrode main body 340S are arranged at Figure 1Since the second electrode stem 340S extends to and is electrically connected to the adjacent pixel PX as described above, in some embodiments, the second electrode stem 340S may also be electrically connected to the thin film transistor through a contact hole.
[0082] Now refer to Figure 3 A more detailed structure of the components provided in the display device 10 is described.
[0083] Figure 3 It is along Figure 1 Schematic cross-sectional view taken along line II-I' and line II-II'. Figure 3 Only one pixel PX is shown in FIG. 1 , but the same can be applied to other pixels. Figure 3 The line II′ of FIG. 3 may be a cutting line for illustrating a cross section across a first end of the light emitting element 350 and a second end opposite to the first end.
[0084] Reference Figure 1 and Figure 3 , the display device 10 may include a substrate 110, thin film transistors 120 and 140 disposed on the substrate 110, electrodes 330 and 340 disposed above the thin film transistors 120 and 140, and a light emitting element 350. The thin film transistor may include a first thin film transistor 120 and a second thin film transistor 140, and the first thin film transistor 120 and the second thin film transistor 140 may be a driving transistor and a switching transistor, respectively. Each of the thin film transistors 120 and 140 may include an active layer, a gate electrode, a source electrode, and a drain electrode. The first electrode 330 may be electrically connected to the drain electrode of the first thin film transistor 120.
[0085] More particularly, substrate 110 may be an insulating substrate. Substrate 110 may be made of an insulating material such as glass, quartz or a polymer resin. Examples of polymer materials may include polyethersulfone (PES), polyacrylate (PA), polyarylate (PAR), polyetherimide (PEI), polyethylene naphthalate (PEN), polyethylene terephthalate (PET), polyphenylene sulfide (PPS), polyallylate, polyimide (PI), polycarbonate (PC), cellulose triacetate (CAT), cellulose acetate propionate (CAP) and combinations of these materials. Substrate 110 may be a rigid substrate or a flexible substrate that may be bent, folded or curled.
[0086] The buffer layer 115 may be disposed on the substrate 110. The buffer layer 115 may prevent diffusion of impurity ions, prevent penetration of moisture or external air, and perform a surface planarization function. The buffer layer 115 may include silicon nitride, silicon oxide, or silicon oxynitride.
[0087] The semiconductor layer is disposed on the buffer layer 115. The semiconductor layer may include a first active layer 126 of the first thin film transistor 120, a second active layer 146 of the second thin film transistor 140, and an auxiliary layer 163. The semiconductor layer may include polycrystalline silicon, single crystal silicon, or an oxide semiconductor.
[0088] The first gate insulating layer 170 is disposed on the semiconductor layer. The first gate insulating layer 170 covers the semiconductor layer. The first gate insulating layer 170 may be used as a gate insulating film of a thin film transistor. The first gate insulating layer 170 may include silicon oxide, silicon nitride, silicon oxynitride, aluminum oxide, tantalum oxide, hafnium oxide, zirconium oxide, titanium oxide, etc. These materials may be used alone or in combination with each other.
[0089] The first conductive layer is disposed on the first gate insulating layer 170. The first conductive layer includes a first gate electrode 121 disposed on the first active layer 126 of the first thin film transistor 120 with the first gate insulating layer 170 interposed therebetween, a second gate electrode 141 disposed on the second active layer 146 of the second thin film transistor 140, and a power wiring 161 disposed on the auxiliary layer 163. The first conductive layer may include one or more metals selected from molybdenum (Mo), aluminum (Al), platinum (Pt), palladium (Pd), silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), calcium (Ca), titanium (Ti), tantalum (Ta), tungsten (W), and copper (Cu). The first conductive layer may be a single film or a multilayer film.
[0090] The second gate insulating layer 180 is disposed on the first conductive layer. The second gate insulating layer 180 may be an interlayer insulating film. The second gate insulating layer 180 may be made of an inorganic insulating material such as silicon oxide, silicon nitride, silicon oxynitride, hafnium oxide, aluminum oxide, titanium oxide, tantalum oxide, or zinc oxide.
[0091] The second conductive layer is disposed on the second gate insulating layer 180. The second conductive layer includes a capacitor electrode 128 disposed on the first gate electrode 121 with the second gate insulating layer 180 interposed therebetween. The capacitor electrode 128 may form a storage capacitor with the first gate electrode 121.
[0092] Like the first conductive layer, the second conductive layer may include one or more metals selected from molybdenum (Mo), aluminum (Al), platinum (Pt), palladium (Pd), silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), calcium (Ca), titanium (Ti), tantalum (Ta), tungsten (W) and copper (Cu).
[0093] The interlayer insulating layer 190 is disposed on the second conductive layer. The interlayer insulating layer 190 may be an interlayer insulating film. In addition, the interlayer insulating layer 190 may perform a surface planarization function. The interlayer insulating layer 190 may include an organic insulating material (such as polyacrylate resin, epoxy resin, phenolic resin, polyamide resin, polyimide resin, unsaturated polyester resin, polyphenylene ether resin, polyphenylene sulfide resin or benzocyclobutene (BCB)).
[0094] The third conductive layer is disposed on the interlayer insulating layer 190 , and includes the first drain electrode 123 and the first source electrode 124 of the first thin film transistor 120 , the second drain electrode 143 and the second source electrode 144 of the second thin film transistor 140 , and the power electrode 162 disposed on the power wiring 161 .
[0095] The first source electrode 124 and the first drain electrode 123 may be electrically connected to the first active layer 126, respectively, through the first contact holes 129 penetrating the interlayer insulating layer 190, the second gate insulating layer 180, and the first gate insulating layer 170. The second source electrode 144 and the second drain electrode 143 may be electrically connected to the second active layer 146, respectively, through the second contact holes 149 penetrating the interlayer insulating layer 190, the second gate insulating layer 180, and the first gate insulating layer 170. The power electrode 162 may be electrically connected to the power wiring 161 through the third contact hole 169 penetrating the interlayer insulating layer 190 and the second gate insulating layer 180.
[0096] The third conductive layer may include one or more metals selected from aluminum (Al), molybdenum (Mo), platinum (Pt), palladium (Pd), silver (Ag), magnesium (Mg), gold (Au), nickel (Ni), neodymium (Nd), iridium (Ir), chromium (Cr), calcium (Ca), titanium (Ti), tantalum (Ta), tungsten (W) and copper (Cu). The third conductive layer may be a single film or a multilayer film. For example, the third conductive layer may have a stacked structure of Ti / Al / Ti, Mo / Al / Mo, Mo / AlGe / Mo or Ti / Cu.
[0097] The insulating base layer 310 is disposed on the third conductive layer. The insulating base layer 310 may be made of an organic material such as polyacrylate resin, epoxy resin, phenolic resin, polyamide resin, polyimide resin, unsaturated polyester resin, polyphenylene oxide resin, polyphenylene sulfide resin, or benzocyclobutene (BCB). The surface of the insulating base layer 310 may be flat.
[0098] The barrier ribs 410 and 420 may be disposed on the insulating base layer 310. In each pixel PX, the barrier ribs 410 and 420 may be spaced apart to face each other, and the first electrode 330 and the second electrode 340 may be disposed on the barrier ribs 410 and 420 spaced apart from each other (e.g., disposed on the first barrier rib 410 and the second barrier rib 420, respectively). Figure 1 and Figure 3 In the embodiment, three barrier ribs 410 and 420 (particularly, two first barrier ribs 410 and one second barrier rib 420 ) may be provided in one pixel PX, and thus, two first electrodes 330 and one second electrode 340 may be provided.
[0099] However, the present disclosure is not limited thereto, and a larger number of barrier ribs 410 and 420 may also be provided in one pixel PX. For example, a larger number of barrier ribs 410 and 420 may be provided, and thus, a larger number of first electrodes 330 and second electrodes 340 may be provided. The barrier ribs 410 and 420 may include at least one first barrier rib 410 on which the first electrode 330 is provided and at least one second barrier rib 420 on which the second electrode 340 is provided. In this case, the first barrier ribs 410 and the second barrier ribs 420 may be spaced apart to face each other, and may be alternately provided in one direction. In some embodiments, two first barrier ribs 410 may be spaced apart from each other, and one second barrier rib 420 may be provided between the first barrier ribs 410 spaced apart from each other.
[0100] Despite Figure 3 Although not shown in the figure, the first electrode 330 and the second electrode 340 may respectively include the electrode trunks 330S and 340S and the electrode branches 330B and 340B as described above. It is understood that the first electrode branch 330B and the second electrode branch 340B are respectively arranged at Figure 3 on the first barrier rib 410 and the second barrier rib 420 .
[0101] The barrier ribs 410 and 420 may be formed of substantially the same material in one process. In this case, the barrier ribs 410 and 420 may form a grid pattern. The barrier ribs 410 and 420 may include polyimide (PI).
[0102] Although not shown in the drawings, at least some of the barrier ribs 410 and 420 may be disposed at the boundary of each pixel PX to separate the pixels PX. These barrier ribs may also be disposed in a substantially grid pattern together with the first barrier ribs 410 and the second barrier ribs 420 described above. At least some of the barrier ribs 410 and 420 disposed at the boundary of each pixel PX may also be formed to cover the electrode lines of the display device 10.
[0103] At least a portion of each of the barrier ribs 410 and 420 may protrude from the insulating base layer 310. Each of the barrier ribs 410 and 420 may protrude upward from the plane in which the light emitting element 350 is disposed, and at least a portion of the protruding portion may have a slope. The reflective layers 331 and 341, which will be described later, may be disposed on the inclined and protruding barrier ribs 410 and 420 to reflect incident light. Light guided from the light emitting element 350 to the reflective layers 331 and 341 may be reflected toward the outside of the display device 10 (for example, toward above the barrier ribs 410 and 420). The shape of the protruding barrier ribs 410 and 420 is not specifically limited. Figure 3 , each of the protruding barrier ribs 410 and 420 has an angled corner due to an inclined side surface and a flat upper surface. However, the present disclosure is not limited thereto, and each of the barrier ribs 410 and 420 may also protrude in a curved shape.
[0104] The reflective layers 331 and 341 may be disposed on the barrier ribs 410 and 420 .
[0105] The first reflective layer 331 covers the first barrier rib 410 and is electrically connected to the first drain electrode 123 of the first thin film transistor 120 through the fourth contact hole 319_1 penetrating the insulating base layer 310. The second reflective layer 341 covers the second barrier rib 420 and is electrically connected to the power electrode 162 through the fifth contact hole 319_2 penetrating the insulating base layer 310.
[0106] The first reflective layer 331 may be electrically connected to the first drain electrode 123 of the first thin film transistor 120 through the fourth contact hole 319_1 in the pixel PX. Therefore, the first thin film transistor 120 may be disposed in a region overlapping the pixel PX. Figure 1 In the embodiment, the first reflective layer 331 is electrically connected to the first thin film transistor 120 through the first electrode contact hole CNTD provided in the first electrode stem 330S. For example, the first electrode contact hole CNTD may be the fourth contact hole 319_1.
[0107] The second reflective layer 341 may be electrically connected to the power electrode 162 through the fifth contact hole 319_2 in the pixel PX. Figure 3In FIG. 1 , the second reflective layer 341 is connected through the fifth contact hole 319_2 in one pixel PX. Figure 1 In the embodiment, the second electrode 340 of each pixel PX is electrically connected to the power wiring 161 through the second electrode contact hole CNTS on the second electrode stem 340S. For example, each of the second electrode contact holes CNTS may be a fifth contact hole 319_2.
[0108] However, the present disclosure is not limited thereto. Figure 1 In the embodiment, the second electrode contact hole CNTS may be disposed at various positions on the second electrode trunk 340S, and in some cases, may be located on the second electrode branch 340B. The second reflective layer 341 may be connected to one second electrode contact hole CNTS or the fifth contact hole 319_2 in a region other than one pixel PX.
[0109] The non-emitting region in which the light emitting element 350 is not disposed may exist in a region other than an emitting portion in which the pixel PX of the display device 10 is disposed (e.g., in a region outside the pixel PX). As described above, the respective second electrodes 340 of the pixel PX may be electrically connected to each other through the second electrode trunk 340S to receive the same electrical signal.
[0110] In some embodiments, in the case of the second electrode 340, the second electrode stem 340S may be electrically connected to the power electrode 162 through one second electrode contact hole CNTS in the non-emission region located on the periphery of the display device 10. Figure 1 The second electrode trunk 340S is electrically connected to the power electrode 162 because the second electrode trunk 340S extends to and is electrically connected to the adjacent pixel PX, so the same electrical signal can also be transmitted to the second electrode branch 340B of each pixel PX. The position of the contact hole through which the second electrode 340 of the display device 10 receives the electrical signal from the power electrode 162 may vary according to the structure of the display device 10, but the present disclosure is not limited thereto.
[0111] Refer again Figure 1 and Figure 3 , the reflective layers 331 and 341 may include a material having high reflectivity to reflect light emitted from the light emitting element 350. For example, the reflective layers 331 and 341 may include a material such as silver (Ag) or copper (Cu), but the present disclosure is not limited thereto.
[0112] The first electrode layer 332 and the second electrode layer 342 may be disposed on the first reflective layer 331 and the second reflective layer 341 , respectively.
[0113] The first electrode layer 332 is directly disposed on the first reflective layer 331. The first electrode layer 332 and the first reflective layer 331 may have substantially the same pattern. The second electrode layer 342 is directly disposed on the second reflective layer 341 and is spaced apart from the first electrode layer 332. The second electrode layer 342 and the second reflective layer 341 may have substantially the same pattern.
[0114] In an embodiment, the electrode layers 332 and 342 may respectively cover the reflective layers 331 and 341 disposed under the electrode layers 332 and 342. For example, the electrode layers 332 and 342 may be formed larger than the reflective layers 331 and 341 to cover the side surfaces of the ends of the reflective layers 331 and 341. However, the present disclosure is not limited thereto.
[0115] The first electrode layer 332 and the second electrode layer 342 can respectively transmit an electrical signal to the contact electrode 360 to be described later, and the electrical signal is transmitted to the first reflective layer 331 and the second reflective layer 341 connected to the first thin film transistor 120 or the power electrode 162. The electrode layers 332 and 342 may include a transparent conductive material. For example, the electrode layers 332 and 342 may include a material such as indium tin oxide (ITO), indium zinc oxide (IZO) or indium tin zinc oxide (ITZO). In some embodiments, the reflective layers 331 and 341 and the electrode layers 332 and 342 may form a structure in which one or more transparent conductive layers (such as ITO, IZO or ITZO) and one or more metal layers (such as silver or copper) are stacked. For example, the reflective layers 331 and 341 and the electrode layers 332 and 342 may form a stacked structure of ITO / silver (Ag) / ITO.
[0116] The first reflective layer 331 and the first electrode layer 332 disposed on the first barrier rib 410 may form (or constitute) the first electrode 330. The first electrode 330 may protrude from both ends of the first barrier rib 410. Therefore, the protruding region of the first electrode 330 may contact the insulating base layer 310. The second reflective layer 341 and the second electrode layer 342 disposed on the second barrier rib 420 may form (or constitute) the second electrode 340. The second electrode 340 may protrude from both ends of the second barrier rib 420. Therefore, the protruding region of the second electrode 340 may contact the insulating base layer 310.
[0117] The first electrode 330 and the second electrode 340 may cover the entire area of the first barrier rib 410 and the entire area of the second barrier rib 420, respectively. However, as described above, the first electrode 330 and the second electrode 340 are spaced apart to face each other. For example, the first electrode branch 330B and the second electrode branch 340B are parallel to each other and spaced apart, as will be described below, the first insulating layer 510 is disposed between the first electrode branch 330B and the second electrode branch 340B, and the light emitting element 350 may be disposed on the first insulating layer 510.
[0118] The first reflective layer 331 may receive a driving voltage from the first thin film transistor 120, and the second reflective layer 341 may receive a power supply voltage from the power supply wiring 161. Therefore, the first electrode 330 and the second electrode 340 receive a driving voltage and a power supply voltage, respectively. As will be described below, the first electrode 330 may be electrically connected to the first thin film transistor 120, and the second electrode 340 may be electrically connected to the power supply wiring 161. Therefore, the first contact electrode 361 disposed on the first electrode 330 and the second contact electrode 362 disposed on the second electrode 340 may receive a driving voltage and a power supply voltage, respectively. The driving voltage and the power supply voltage may be transmitted to the light emitting element 350, and a current may flow through the light emitting element 350, causing the light emitting element 350 to emit light.
[0119] The first insulating layer 510 is disposed in some regions of the first and second electrodes 330 and 340. The first insulating layer 510 may cover most of upper surfaces of the first and second electrodes 330 and 340, and may include openings 510P partially exposing the first and second electrodes 330 and 340.
[0120] The first insulating layer 510 may be disposed in a space between the first electrode 330 and the second electrode 340. In a plan view, the first insulating layer 510 may have an island shape or a line shape formed along a space between the first electrode branch 330B and the second electrode branch 340B. Figure 3 In the embodiment, the first insulating layer 510 is disposed in a space between one first electrode 330 (e.g., first electrode branch 330B) and one second electrode 340 (e.g., second electrode branch 340B). However, as described above, since a plurality of first electrodes 330 and second electrodes 340 may be provided, the first insulating layer 510 may also be disposed between one first electrode 330 and another second electrode 340, or between one second electrode 340 and another first electrode 330.
[0121] The first insulating layer 510 may overlap some regions of the electrodes 330 and 340 (e.g., regions of the first electrode 330 and the second electrode 340 that protrude in directions facing each other), and may partially overlap the electrodes 330 and 340 on the inclined side surfaces of the barrier ribs 410 and 420. For example, the first insulating layer 510 may cover the ends of the first electrode 330 and the second electrode 340 that protrude in directions facing each other in a cross section. The first insulating layer 510 may protect the regions overlapping the electrodes 330 and 340 and electrically insulate these regions from each other. Therefore, a portion of the lower surface of the first insulating layer 510 may contact the insulating base layer 310, and a portion of the lower surface and the side surface of the first insulating layer 510 may contact each electrode 330 or 340.
[0122] However, the present disclosure is not limited thereto. In some embodiments, the first insulating layer 510 may be disposed on the first electrode 330 and the second electrode 340 to partially overlap with the flat upper surfaces of the barrier ribs 410 and 420. The lower surface of the first insulating layer 510 may partially overlap with the electrodes 330 and 340 on the flat upper surfaces of the barrier ribs 410 and 420.
[0123] The first insulating layer 510 may not be disposed on each electrode 330 or 340, and the opening 510P may be disposed to expose a portion of the upper surface of each electrode 330 or 340. In particular, the opening 510P may be disposed to expose a portion of the upper surface of each of the first electrode branch 330B and the second electrode branch 340B. Figure 2 As described, the opening 510P may have a predetermined width based on the center of each electrode branch 330B or 340B and thus may be spaced inwardly from both sides of each of the first electrode branch 330B and the second electrode branch 340B.
[0124] Therefore, if Figure 3 As shown in , the opening 510P may partially overlap the first electrode 330 and the second electrode 340 on the inclined side surfaces of the barrier ribs 410 and 420. For example, the first electrode 330 and the second electrode 340 exposed by the opening 510P may be a region overlapping the flat upper surface and the inclined side surface of the barrier ribs 410 and 420. However, the present disclosure is not limited thereto. As described above, in the case where the first insulating layer 510 is also provided on the flat upper surface of the barrier ribs 410 and 420, the opening 510P may expose only the upper surface of the first electrode 330 and the second electrode 340. For example, the width of the exposed area of each of the first electrode 330 and the second electrode 340 may vary according to the width of the opening 510P.
[0125] The contact electrode 360 described below may be disposed on the opening 510P, and the first electrode 330 and the second electrode 340 may electrically contact the contact electrode 360. Since the contact electrode 360 may electrically contact the light emitting element 350 disposed on the first insulating layer 510, they may transmit electrical signals transmitted to the first electrode 330 and the second electrode 340 to the light emitting element 350. The contact area between the contact electrode 360 and each of the first electrode 330 and the second electrode 340 may vary depending on the width of the opening 510P. This may be selected according to the number of light emitting elements 350 that may be placed in each pixel PX, the electrode material, and the like.
[0126] At least one light emitting element 350 may be disposed between the first electrode 330 and the second electrode 340. Although the light emitting element 350 emitting only light of the same color is disposed Figure 1 In each pixel PX in the embodiment, but the present disclosure is not limited thereto. As described above, the light emitting elements 350 emitting light of different colors may also be disposed together in one pixel PX.
[0127] The light emitting element 350 may be a light emitting diode (LED). The light emitting element 350 may be a nanostructure having a size of approximately nanometers. The light emitting element 350 may be an inorganic LED made of an inorganic material. In the case where the light emitting element 350 is an inorganic LED, if a light emitting material having an inorganic crystal structure is placed between two opposing electrodes and an electric field is formed in a specific direction in the light emitting material, the inorganic LED may be aligned between two electrodes having a specific polarity.
[0128] The light emitting element 350 may be disposed on the first insulating layer 510 in which the opening 510P is not disposed between the first electrode branch 330B and the second electrode branch 340B. Therefore, the lower surface of the light emitting element 350 may contact the upper surface of the first insulating layer 510, and the insulating base layer 310, the first insulating layer 510, and the light emitting element 350 may be sequentially stacked between the first electrode branch 330B and the second electrode branch 340B.
[0129] The light emitting element 350 may be disposed on the first insulating layer 510 such that both sides of the light emitting element 350 are exposed, and a contact electrode 360 described below may contact the exposed upper surfaces of the electrodes 330 and 340 and both sides of the light emitting element 350 .
[0130] Reference Figure 3An enlarged view. In some embodiments, the light-emitting element 350 may have a structure in which a first conductive-type semiconductor layer 351, an active material layer 353, a second conductive-type semiconductor layer 352, and an electrode material layer 357 are stacked as will be described below. In the light-emitting element 350, the first conductive-type semiconductor layer 351, the active material layer 353, the second conductive-type semiconductor layer 352, and the electrode material layer 357 may be stacked in this order in a direction parallel to the insulating substrate layer 310. In other words, the light-emitting element 350 in which the above layers are stacked may be disposed in a horizontal direction parallel to the insulating substrate layer 310. However, the present disclosure is not limited thereto, and the light-emitting element 350 may also be aligned in a direction opposite to the above stacking direction.
[0131] As described above, the length h of the major axis of the light-emitting element 350 may be less than the distance l1 between the facing side surfaces of the plurality of openings 510P, but may be greater than the distance l2 between the facing side surfaces of the electrode branches 330B and 340B (l2 < h < l1). Therefore, the contact electrode 360, which will be described later, can smoothly make electrical contact with the side surfaces at both ends of the light-emitting element 350. The first end of the light-emitting element 350 may be electrically connected to the first electrode 330, and the second end may be electrically connected to the second electrode 340.
[0132] The above arrangement of the first insulating layer 510 and the opening 510P can be achieved by forming the first insulating layer 510 to completely cover the first electrode 330 and the second electrode 340 during the manufacture of the display device 10 and then partially patterning the first insulating layer 510 to form the opening 510P. The light-emitting element 350 is disposed on the first insulating layer 510 between the first electrode 330 and the second electrode 340. When the opening 510P is formed, the region spaced apart from the region of the first insulating layer 510 in which the light-emitting element 350 is disposed is patterned. Therefore, since the region adjacent to the light-emitting element 350 is not patterned, some materials between the first insulating layer 510 and the light-emitting element 350 can be prevented from being removed.
[0133] The first insulating layer 510 may include an overlapping region overlapping with the lower surface of the light emitting element 350, a first non-overlapping region extending outward from the first end of the light emitting element 350 and not overlapping with the light emitting element 350, and a second non-overlapping region extending outward from the second end of the light emitting element 350 and not overlapping with the light emitting element 350. Wherein the contact surface of the overlapping region of the first insulating layer 510 contacting the light emitting element 350 may be level with a portion of each of the first non-overlapping region and the second non-overlapping region of the contact electrodes 330 and 340 of the first insulating layer 510, wherein the first non-overlapping region and the second non-overlapping region of the first insulating layer 510 do not overlap with the light emitting element 350. For example, the contact electrode 360 may be connected so that the material of the contact electrode 360 is not broken at the lower surface of the light emitting element 350. Therefore, the upper surface of the first insulating layer 510 and the lower surface of the light emitting element 350 may maintain smooth contact, and the material of the contact electrode 360 may be prevented from being broken when the contact electrode 360 contacts the light emitting element 350. The first insulating layer 510 may prevent the first conductive type semiconductor layer 351 and the second conductive type semiconductor layer 352 of the light emitting element 350 from directly contacting other members, thereby preventing damage to the light emitting element 350 .
[0134] At least a portion of each of the first non-overlapping region and the second non-overlapping region of the first insulating layer 510 may be disposed in a region where the first electrode 330 or the second electrode 340 overlaps the inclined side surface of the barrier rib 410 or 420. For example, a portion of each of the first non-overlapping region and the second non-overlapping region may be positioned higher than the overlapping region in a cross section. However, the present disclosure is not limited thereto. As described above, the first non-overlapping region and the second non-overlapping region may also be horizontal to the overlapping region, and in some cases, may also be disposed in a region where the first electrode 330 and the second electrode 340 overlap the flat upper surface of the barrier rib 410 and 420. This will be described in detail below.
[0135] The second insulating layer 520 may be disposed on the light emitting element 350 to overlap at least a portion of the light emitting element 350. The second insulating layer 520 may protect the light emitting element 350, and may fix the light emitting element 350 between the first electrode 330 and the second electrode 340.
[0136] Despite Figure 3In the cross section of FIG. 1 , the second insulating layer 520 is disposed on the upper surface of the light emitting element 350, but it may also be disposed to cover the outer surface of the light emitting element 350. Although not shown in the drawings, a portion of the material of the second insulating layer 520 may also be disposed in a region where the lower surface of the light emitting element 350 contacts the first insulating layer 510. This may be because during the manufacturing process of the display device 10, after the light emitting element 350 is disposed on the first insulating layer 510, when the second insulating layer 520 is formed on the light emitting element 350, a portion of the material of the second insulating layer 520 penetrates into the air gap formed in the first insulating layer 510 contacting the lower surface of the light emitting element 350.
[0137] The second insulating layer 520 is provided to expose both side surfaces of the light emitting element 350. For example, in a cross section, the second insulating layer 520 provided on the upper surface of the light emitting element 350 may be shorter than the light emitting element 350 in one axial direction. Therefore, the second insulating layer 520 may be recessed inward from both side surfaces of the light emitting element 350. Therefore, the side surfaces of the first insulating layer 510, the light emitting element 350, and the second insulating layer 520 may be stacked in a stepped pattern. The contact electrode 360 described below may smoothly and electrically contact the side surfaces of both ends of the light emitting element 350. However, the present disclosure is not limited thereto, and the length of the second insulating layer 520 may also be equal to the length of the light emitting element 350 so that both sides thereof are aligned with each other. Like the first insulating layer 510, the second insulating layer 520 may also have an island shape or a line shape formed along the space between the first electrode branch 330B and the second electrode branch 340B in a plan view.
[0138] The second insulating layer 520 may be provided to cover the first insulating layer 510, and then may be patterned, for example, in a region where the light emitting element 350 is exposed to contact the contact electrode 360. The patterning of the second insulating layer 520 may be performed by a conventional dry etching method or a wet etching method. Here, in order to prevent the first insulating layer 510 from being patterned, the first insulating layer 510 and the second insulating layer 520 may include materials having different etching selectivities. In other words, when the second insulating layer 520 is patterned, the first insulating layer 510 may serve as an etching stopper.
[0139] Therefore, even if the second insulating layer 520 is patterned to cover the outer surface of the light emitting element 350 and expose both ends of the light emitting element 350, the material of the first insulating layer 510 will not be damaged. For example, the first insulating layer 510 and the light emitting element 350 can form a smooth contact surface at both ends of the light emitting element 350 where the light emitting element 350 electrically contacts the contact electrode 360. When the contact electrode 360 electrically contacting the light emitting element 350 is formed, the air gap generated by patterning is not formed in the first insulating layer 510 contacting the lower surface of the light emitting element 350. Therefore, the material of the contact electrode 360 can be prevented from being broken by the air gap. This will be described in more detail below.
[0140] Refer again Figure 3 A first contact electrode 361 disposed on the first electrode 330 and overlapping at least a portion of the second insulating layer 520 and a second contact electrode 362 disposed on the second electrode 340 and overlapping at least a portion of the second insulating layer 520 may be disposed on the second insulating layer 520 .
[0141] The first contact electrode 361 may be disposed on the first electrode 330 to partially cover the first electrode 330, and a lower surface of the first contact electrode 361 may partially electrically contact the light emitting element 350, the first insulating layer 510, and the second insulating layer 520. One end of the first contact electrode 361 in a direction in which the second electrode 340 is disposed is disposed on the second insulating layer 520.
[0142] The second contact electrode 362 may be disposed on the second electrode 340 to partially cover the second electrode 340, and a lower surface of the second contact electrode 362 may partially electrically contact the light emitting element 350, the first insulating layer 510, and the third insulating layer 530. Both ends of the second contact electrode 362 in a direction in which the first electrode 330 is disposed are disposed on the third insulating layer 530.
[0143] In other words, the first contact electrode 361 and the second contact electrode 362 may be disposed on the upper surfaces of the first electrode 330 and the second electrode 340, respectively. In particular, the first contact electrode 361 and the second contact electrode 362 may be disposed on the upper surfaces of the first electrode 330 and the second electrode 340 to electrically contact the first electrode layer 332 and the second electrode layer 342, respectively. The first insulating layer 510 and the second insulating layer 520 may be patterned in the region of the first electrode 330 and the second electrode 340 disposed to cover the upper surfaces of the first barrier ribs 410 and the second barrier ribs 420. Therefore, the first electrode layer 332 of the first electrode 330 and the second electrode layer 342 of the second electrode 340 may be exposed and may be electrically connected to the contact electrode 360 in the exposed region, respectively.
[0144] The first contact electrode 361 and the second contact electrode 362 may electrically contact the first end and the second end of the light emitting element 350 (e.g., the first conductive semiconductor layer 351 and the electrode material layer 357), respectively. Therefore, the first contact electrode 361 and the second contact electrode 362 may transmit the electrical signal transmitted to the first electrode layer 332 and the second electrode layer 342 to the light emitting element 350.
[0145] The first contact electrode 361 and the second contact electrode 362 may be spaced apart from each other on the second insulating layer 520 or the third insulating layer 530. For example, the first contact electrode 361 and the second contact electrode 362 may contact the light emitting element 350 and the second insulating layer 520 or the third insulating layer 530, but may be spaced apart in the stacking direction on the second insulating layer 520, and thus electrically insulated from each other. Therefore, the first contact electrode 361 and the second contact electrode 362 may receive different power from the first thin film transistor 120 and the power wiring 161, respectively. For example, the first contact electrode 361 may receive a driving voltage applied from the first thin film transistor 120 to the first electrode 330, and the second contact electrode 362 may receive a common power voltage applied from the power wiring 161 to the second electrode 340. However, the present disclosure is not limited thereto.
[0146] The first contact electrode 361 may electrically contact a region of the first electrode 330 exposed through the opening 510P, but may be disposed so as not to overlap a region of the first electrode 330 electrically contacting the first thin film transistor 120 through the fourth contact hole 319_1. The second contact electrode 362 may electrically contact a region of the second electrode 340 exposed through the opening 510P, but may be disposed so as not to overlap a region of the second electrode 340 electrically contacting the power wiring 161 through the fifth contact hole 319_2. For example, also refer to Figure 1 , the first contact electrode 361 may not be formed in the first electrode contact hole CNTD on the first electrode trunk 330S, and the second contact electrode 362 may not be formed in the second electrode contact hole CNTS on the second electrode trunk 340S. The first contact electrode 361 and the second contact electrode 362 may be substantially formed only on the electrode branches 330B and 340B, respectively. However, the present disclosure is not limited thereto. In some cases, each of the first contact electrode 361 and the second contact electrode 362 may also be disposed in the region of the first electrode branch 330S or the second electrode branch 340S.
[0147] The contact electrode 360 may include a conductive material such as ITO, IZO, ITZO, or aluminum (Al). However, the present disclosure is not limited thereto.
[0148] The contact electrode 360 and the electrode layers 332 and 342 may include the same material. The contact electrode 360 may be disposed on the electrode layers 332 and 342 and may electrically contact the electrode layers 332 and 342. The contact electrode 360 and the electrode layers 332 and 342 may be substantially the same pattern. For example, the first contact electrode 361 and the second contact electrode 362 in contact with the first electrode layer 332 and the second electrode layer 342 may receive an electrical signal transmitted to the first electrode layer 332 and the second electrode layer 342, and may transmit the received electrical signal to the light emitting element 350.
[0149] As described above, the first contact electrode 361 and the second contact electrode 362 may smoothly and electrically contact the side surfaces of both ends of the light emitting element 350 without their materials being broken.
[0150] The material of the first insulating layer 510 may remain undamaged or unetched at the surface where the light emitting element 350 and the first insulating layer 510 contact each other. When the second insulating layer 520 is patterned to expose both ends of the light emitting element 350, because the first insulating layer 510 and the second insulating layer 520 may have different etching selectivities, the first insulating layer 510 may serve as an etching stopper, and only the second insulating layer 520 may be etched.
[0151] Therefore, the lower surface of the light emitting element 350 and the first insulating layer 510 can maintain a smooth contact surface without damaging or etching the material of the first insulating layer 510. Even if the contact electrode 360 including the inorganic material has insufficient step coverage, the material of the contact electrode 360 may not be formed on the lower surface of the light emitting element 350, and the material of the contact electrode 360 may be prevented from being broken by the air gap on the lower surface of the light emitting element 350.
[0152] The third insulating layer 530 may be disposed on the first contact electrode 361 to electrically insulate the first contact electrode 361 and the second contact electrode 362 from each other. The third insulating layer 530 may cover the first contact electrode 361, but may not overlap a portion of the light emitting element 350, so that the light emitting element 350 may electrically contact the second contact electrode 362. On the upper surface of the second insulating layer 520, the third insulating layer 530 may partially contact the first contact electrode 361, the second contact electrode 362, and the second insulating layer 520. The third insulating layer 530 may cover one end of the first contact electrode 361 on the upper surface of the second insulating layer 520. Therefore, the third insulating layer 530 may protect the first contact electrode 361 while electrically insulating the first contact electrode 361 from the second contact electrode 362.
[0153] One end of the third insulating layer 530 in a direction in which the second electrode 340 is provided may be aligned with a side surface of the second insulating layer 520 .
[0154] In some embodiments, the third insulating layer 530 may be omitted from the display device 10. Thus, the first contact electrode 361 and the second contact electrode 362 may be disposed on substantially the same plane and may be electrically insulated from each other by a passivation layer 550 to be described below.
[0155] The passivation layer 550 may be formed on the third insulating layer 530 and the second contact electrode 362 to protect the components disposed on the insulating base layer 310 from the external environment. If the first contact electrode 361 and the second contact electrode 362 are exposed, the contact electrode material may be broken due to electrode damage. Therefore, they may be covered by the passivation layer 550. For example, the passivation layer 550 may cover the first electrode 330, the second electrode 340, the light emitting element 350, etc. As described above, if the third insulating layer 530 is omitted, the passivation layer 550 may be formed on the first contact electrode 361 and the second contact electrode 362. The passivation layer 550 may electrically insulate the first contact electrode 361 and the second contact electrode 362 from each other.
[0156] Each of the first insulating layer 510, the second insulating layer 520, the third insulating layer 530, and the passivation layer 550 described above may include an inorganic insulating material. For example, the first insulating layer 510, the second insulating layer 520, the third insulating layer 530, and the passivation layer 550 may include an inorganic insulating material such as silicon oxide (SiO x ), Silicon Nitride (SiN x ), silicon oxynitride (SiO x N y ), aluminum oxide (Al 2 O 3 ) or aluminum nitride (AlN). The first insulating layer 510, the second insulating layer 520, the third insulating layer 530 and the passivation layer 550 may be made of the same material or different materials. In addition, various materials that impart insulating properties to the first insulating layer 510, the second insulating layer 520, the third insulating layer 530 and the passivation layer 550 are applicable.
[0157] As described above, the first insulating layer 510 and the second insulating layer 520 may have different etching selectivities. For example, in the case where the first insulating layer 510 includes silicon oxide (SiO x ), the second insulating layer 520 may include silicon nitride (SiN x For another example, the first insulating layer 510 includes silicon nitride (SiN x ), the second insulating layer 520 may include silicon oxide (SiO x ). However, the present disclosure is not limited thereto.
[0158] As described above, the display device 10 according to the embodiment may include a first electrode 330, a second electrode 340, and a light emitting element 350 disposed between the first electrode 330 and the second electrode 340. The light emitting element 350 may emit light of a specific wavelength band by receiving an electrical signal from the first contact electrode 361 and the second contact electrode 362. Here, the light emitting element 350 may be disposed on the first insulating layer 510 disposed between the first electrode 330 and the second electrode 340, and the first contact electrode 361 and the second contact electrode 362 may electrically contact the first electrode 330 and the second electrode 340 through the opening 510P in some regions of the first electrode 330 and the second electrode 340.
[0159] The region of the first insulating layer 510 in which the opening 510P is formed may be spaced apart from the light emitting element 350, and the surface of the first insulating layer 510 in contact with the light emitting element 350 may extend horizontally toward each electrode 330 or 340. Therefore, the first insulating layer 510 may smoothly contact the light emitting element 350. Therefore, the first contact electrode 361 and the second contact electrode 362 may smoothly contact the side surfaces of both ends of the light emitting element 350, and the material of the contact electrode 360 may be prevented from being broken.
[0160] The light emitting element 350 may be manufactured on a substrate by an epitaxial growth method. A seed layer for forming a semiconductor layer may be formed on the substrate, and a desired semiconductor material may be deposited and grown. Figure 4 The structure of the light emitting element 350 according to various embodiments is described in detail.
[0161] Figure 4 is a schematic diagram of a light emitting element according to an embodiment.
[0162] Reference Figure 4 , the light emitting element 350 may include conductive semiconductor layers 351 and 352, an active material layer 353 disposed between the conductive semiconductor layers 351 and 352, an electrode material layer 357, and an insulating material layer 358. An electrical signal applied from the first electrode 330 and the second electrode 340 may be transmitted to the active material layer 353 through the conductive semiconductor layers 351 and 352. As a result, light may be emitted.
[0163] The light emitting element 350 may include a first conductive semiconductor layer 351 , a second conductive semiconductor layer 352 , an active material layer 353 disposed between the first conductive semiconductor layer 351 and the second conductive semiconductor layer 352 , an electrode material layer 357 disposed on the second conductive semiconductor layer 352 , and an insulating material layer 358 . Figure 4The light emitting element 350 has a structure in which a first conductive semiconductor layer 351, an active material layer 353, a second conductive semiconductor layer 352, and an electrode material layer 357 are sequentially stacked in a longitudinal direction. However, the present disclosure is not limited thereto. The electrode material layer 357 may be omitted, and in some embodiments, the electrode material layer 357 may be disposed on at least one of the two side surfaces of each of the first conductive semiconductor layer 351 and the second conductive semiconductor layer 352. Figure 4 The light emitting element 350 is taken as an example.
[0164] The first conductive type semiconductor layer 351 may be an n-type semiconductor layer. In an example, in the case where the light emitting element 350 emits light in the blue band, the first conductive type semiconductor layer 351 may be a semiconductor layer having a chemical formula In x Al y Ga 1-x-y The first conductive semiconductor layer 351 may be a semiconductor material of N (0≤x≤1, 0≤y≤1, 0≤x+y≤1), for example, it may be any one or more of n-type doped InAlGaN, GaN, AlGaN, InGaN, AlN, and InN. The first conductive semiconductor layer 351 may be doped with a first conductive dopant. The first conductive dopant may be, for example, Si, Ge, or Sn. The length of the first conductive semiconductor layer 351 may be in the range of about 1.5 μm to about 5 μm, but is not limited thereto.
[0165] The second conductive type semiconductor layer 352 may be a p-type semiconductor layer. In an example, in the case where the light emitting element 350 emits light in the blue band, the second conductive type semiconductor layer 352 may be a semiconductor layer having a chemical formula In x Al y Ga 1-x-y N (0≤x≤1, 0≤y≤1, 0≤x+y≤1) semiconductor material, for example, it can be any one or more of p-type doped InAlGaN, GaN, AlGaN, InGaN, AlN and InN. The second conductive semiconductor layer 352 can be doped with a second conductive dopant. The second conductive dopant can be, for example, Mg, Zn, Ca, Se or Ba. The length of the second conductive semiconductor layer 352 can be in the range of about 0.08 μm to about 0.25 μm, but is not limited thereto.
[0166] The active material layer 353 may be disposed between the first conductive semiconductor layer 351 and the second conductive semiconductor layer 352, and may include a material having a single quantum well structure or a multi-quantum well structure. In the case where the active material layer 353 includes a material having a multi-quantum well structure, it may have a structure in which quantum layers and well layers are alternately stacked. The active material layer 353 may emit light by recombination of electron-hole pairs according to an electrical signal received through the first conductive semiconductor layer 351 and the second conductive semiconductor layer 352. For example, in the case where the active material layer 353 emits light in a blue band, it may include a material such as AlGaN or AlInGaN. In the case where the active material layer 353 has a multi-quantum well structure in which quantum layers and well layers are alternately stacked, the quantum layer may include a material such as AlGaN or AlInGaN, and the well layer may include a material such as GaN or AlGaN. However, the present disclosure is not limited thereto, and the active material layer 353 may also have a structure in which a semiconductor material having a large band gap energy and a semiconductor material having a small band gap energy are alternately stacked, or may include different Group 3 or Group 5 semiconductor materials according to the band of emitted light. Therefore, light emitted from active material layer 353 is not limited to light in the blue band, but may also be light in red and green bands in some cases. The length of active material layer 353 may be in the range of about 0.05 μm to about 0.25 μm, but is not limited thereto.
[0167] Light emitted from the active material layer 353 may travel not only toward the outer surface of the light emitting element 350 in the longitudinal direction but also toward both side surfaces. For example, the direction of light emitted from the active material layer 353 is not limited to one direction.
[0168] The electrode material layer 357 may be an ohmic contact electrode. However, the present disclosure is not limited thereto, and the electrode material layer 357 may also be a Schottky contact electrode. The electrode material layer 357 may include a conductive metal. For example, the electrode material layer 357 may include at least one of aluminum (Al), titanium (Ti), indium (In), gold (Au), and silver (Ag). Alternatively, the electrode material layer 357 may include the same material or different materials, but the present disclosure is not limited thereto.
[0169] The insulating material layer 358 may be formed on the outside of the light emitting element 350 to protect the light emitting element 350. For example, the insulating material layer 358 may be formed to surround the side of the light emitting element 350, and may not be formed at both ends of the light emitting element 350 in the longitudinal direction (for example, at both ends where the first conductive type semiconductor layer 351 and the second conductive type semiconductor layer 352 are provided). The insulating material layer 358 may include an insulating material such as silicon oxide (SiO x ), Silicon Nitride (SiNx ), silicon oxynitride (SiO x N y ), aluminum nitride (AlN) or aluminum oxide (Al 2 O 3 ). Therefore, it is possible to prevent an electrical short circuit that may occur when the active material layer 353 directly contacts the first electrode 330 or the second electrode 340. Since the insulating material layer 358 protects the outer surface of the light emitting element 350 including the active material layer 353, a decrease in light emitting efficiency can be prevented.
[0170] The insulating material layer 358 may extend in the longitudinal direction to cover from the first conductive semiconductor layer 351 to the electrode material layer 357. However, the present disclosure is not limited thereto, and the insulating material layer 358 may also only cover the first conductive semiconductor layer 351, the active material layer 353, and the second conductive semiconductor layer 352, or may only cover a portion of the outer surface of the electrode material layer 357 to expose a portion of the outer surface of the electrode material layer 357.
[0171] In some embodiments, the insulating material layer 358 may be surface-treated so that it can remain separate in the solution without being aggregated with other insulating material layers 358. In the case where the light emitting element 350 is aligned as will be described below, it can remain separate in the solution and aligned between the first electrode 330 and the second electrode 340 without being aggregated with other light emitting elements 350. For example, the surface of the insulating material layer 358 may be hydrophobically treated or hydrophilically treated so that the insulating material layer 358 can remain separate from other insulating material layers 358 in the solution.
[0172] The thickness of the insulating material layer 358 may be in the range of about 0.5 μm to about 1.5 μm, but is not limited thereto.
[0173] The light emitting element 350 may be cylindrical. However, the shape of the light emitting element 350 is not limited to the cylindrical shape, and the light emitting element 350 may also have various shapes such as a cube, a cuboid, and a hexagonal prism. The light emitting element 350 may have a length of about 1 μm to about 10 μm or about 2 μm to about 5 μm, preferably, a length of about 4 μm. In addition, the light emitting element 350 may have a diameter of about 400 nm to about 700 nm, preferably, a diameter of about 500 nm.
[0174] Now refer to Figures 5 to 17 A method of manufacturing the display device 10 according to the embodiment is described.
[0175] Figures 5 to 17 is a schematic cross-sectional view illustrating a method of manufacturing the display device according to the embodiment.
[0176] Reference Figure 5, a first base layer 600 is prepared, the first base layer 600 including an insulating base layer 310, first barrier ribs 410 and second barrier ribs 420 disposed on the insulating base layer 310 and spaced apart from each other, and first electrodes 330 and second electrodes 340 disposed on the first barrier ribs 410 and second barrier ribs 420, respectively. The above components may be formed by patterning a metal or an organic material using a conventional mask process. The process of forming each component will be omitted in the following description.
[0177] As described above, the first thin film transistor 120, the second thin film transistor 140, and the power supply wiring 161 may be disposed below the insulating base layer 310 of the first base layer 600. Figure 3 The components described are the same, so their detailed description will be omitted.
[0178] Reference Figure 6 , forming a first insulating material layer 511 to cover the first electrode 330 and the second electrode 340. The first insulating material layer 511 may be patterned in a process described below to form Figure 3 The first insulating layer 510 is formed.
[0179] Reference Figure 7 , the light emitting element 350 is aligned on the first insulating material layer 511 in the space between the first electrode 330 and the second electrode 340. The light emitting element 350 may be aligned using a DEP method.
[0180] Although not shown in the drawings, a specific method of aligning the light emitting element 350 is as follows. First, a solution containing the light emitting element 350 is applied to the first electrode 330 and the second electrode 340. The solution may be in the form of ink or paste, and may be any one or more of acetone, water, alcohol, and toluene. However, the present disclosure is not limited thereto, and the solution is not specifically limited as long as it is a material that can be evaporated at room temperature or by heating.
[0181] AC power is applied to the first electrode 330 and the second electrode 340, and capacitance is formed between the first electrode 330 and the second electrode 340 due to the electric field E. In the case of forming capacitance, bipolarity is induced in the light emitting element 350 under the non-uniform electric field E, and the light emitting element 350 is subjected to force by the DEP force. Therefore, the light emitting element 350 can be aligned between the first electrode 330 and the second electrode 340 by the DEP force. For example, a first end of the light emitting element 350 can electrically contact the first electrode 330, and a second end can electrically contact the second electrode 340.
[0182] Reference Figure 8, a second insulating material layer 521 is formed to cover the first insulating material layer 511 and the light emitting element 350, thereby forming a second base layer 700. The second insulating material layer 521 may be disposed on the upper surface of the light emitting element 350 in a cross section, but may be disposed to substantially cover the outer surface of the light emitting element 350. As described above, the second insulating material layer 521 may include a material having an etching selectivity different from that of the material of the first insulating material layer 511. The second insulating material layer 521 may be patterned in a process to be described later to form the second insulating layer 520. Here, the first insulating material layer 511 may be used as an etching stopper so that only the second insulating material layer 521 is patterned.
[0183] Reference Fig. 9 , the second insulating material layer 521 is patterned to expose a portion of the first insulating material layer 511 on the first electrode 330. When the second insulating material layer 521 is patterned, the first insulating material layer 511 is not etched or damaged. Therefore, the lower surface of the first insulating material layer 511 contacting the first electrode 330 at the first end of the light emitting element 350 contacting the first electrode 330 can maintain smooth contact. The contact surface between the first insulating material layer 511 and the lower surface of the light emitting element 350 can extend horizontally toward the first electrode 330.
[0184] Reference Fig.10 , the first insulating material layer 511 is patterned to expose a portion of the first electrode 330, thereby forming a first opening 510Pa. The first opening 510Pa may expose the first electrode 330 overlapping a portion of the inclined side surface and the flat upper surface of the first barrier rib 410. Therefore, the first insulating material layer 511 in the region in which the first electrode 330 is disposed may partially overlap the first electrode 330 on the inclined side surface of the first barrier rib 410.
[0185] Reference Fig.11 The first contact electrode 361 is formed to partially cover the first electrode 330, the first insulating material layer 511 and the second insulating material layer 521, and to contact the first end of the light emitting element 350. The first contact electrode 361 may be electrically contacted at Fig.12 The first electrode 330 is exposed in the embodiment of the present invention, and may electrically contact a side surface of a first end of the light emitting element 350 that electrically contacts the first electrode 330 .
[0186] In the patterning of the second insulating material layer 521, since the contact surface between the lower surface of the light emitting element 350 and the first insulating material layer 511 can maintain a smooth surface, the first contact electrode 361 can be smoothly disposed at the side surface of the first end of the light emitting element 350 with a portion of the upper surface of the first insulating material layer 511 without its material being broken. The first contact electrode 361 can electrically contact one end of the patterned second insulating material layer 521.
[0187] Fig.12 yes Fig.11 is an enlarged view of part B, and Fig.13 yes Figure 3 Magnified scanning electron microscope (SEM) photograph of a portion of.
[0188] Reference Fig.12 and Fig.13 , the material of the first insulating material layer 511 may remain undamaged or unetched at the surface where the light emitting element 350 and the first insulating material layer 511 contact each other. Because the first insulating material layer 511 and the second insulating material layer 521 may have different etching selectivities, when the second insulating material layer 521 is patterned to expose both ends of the light emitting element 350, the first insulating material layer 511 may serve as an etching stopper, and only the second insulating material layer 521 may be etched.
[0189] As shown in the drawings, the lower surface of the light emitting element 350 and the first insulating layer 510 can maintain a smooth contact surface without damaging or etching the material. Therefore, even if the contact electrode 360 including an inorganic material has insufficient step coverage, the material of the contact electrode 360 may not be formed on the lower surface of the light emitting element 350, and the material of the contact electrode 360 may be prevented from being broken by the air gap on the lower surface of the light emitting element 350. Fig.13 It can be seen that the contact electrode 360 smoothly contacts the side surfaces of both ends of the light emitting element 350 and the upper surface of the first insulating layer 510 without being broken.
[0190] The first contact electrode 361 may electrically contact a region of the first electrode 330 exposed by the first opening 510Pa, but may not overlap a region where the first electrode 330 contacts the first thin film transistor 120 through the fourth contact hole 319_1 . This has been described in detail above.
[0191] Reference Fig.14, a third insulating material layer 531 is formed to cover the first contact electrode 361 and the remaining second insulating material layer 521. The third insulating material layer 531 may also be patterned in a process to be described later to form a third insulating layer 530. The third insulating material layer 531 may include a material having the same etching selectivity as the material of the second insulating material layer 521, so that they can be etched at the same time. However, the present disclosure is not limited thereto, and the third insulating material layer 531 may also include a material having an etching selectivity different from the etching selectivity of the material of the second insulating material layer 521.
[0192] Reference Fig.15 , the second insulating material layer 521 and the third insulating material layer 531 are patterned to expose a portion of the first insulating material layer 511 on the second electrode 340. As described above, when the second insulating material layer 521 and the third insulating material layer 531 are patterned, the first insulating material layer 511 is not etched or damaged. Therefore, the lower surface of the first insulating material layer 511 that contacts the second end of the light emitting element 350 that electrically contacts the second electrode 340 can maintain smooth contact. The contact surface between the first insulating material layer 511 and the lower surface of the light emitting element 350 can extend horizontally toward the second electrode 340.
[0193] Here, as in Fig.15 As shown in , when the second insulating material layer 521 and the third insulating material layer 531 are patterned at the same time, their respective end surfaces in the direction along which the second electrode 340 is provided may be aligned with each other. When the regions of the second insulating material layer 521 and the third insulating material layer 531 overlapping the second electrode 340 are patterned, the second insulating layer 520 and the third insulating layer 530 may be formed, respectively.
[0194] Reference Fig.16 , the first insulating material layer 511 is patterned to expose a portion of the second electrode 340, thereby forming a second opening 510Pb. The second opening 510Pb may expose the second electrode 340 overlapping a portion of the inclined side surface and the flat upper surface of the second barrier rib 420. Therefore, the first insulating material layer 511 in the region in which the second electrode 340 is disposed may partially overlap the second electrode 340 on the inclined side surface of the second barrier rib 420. Here, when the first insulating material layer 511 is patterned, the first insulating layer 510 may be formed.
[0195] Reference Fig.17 The second contact electrode 362 is formed to partially cover the second electrode 340, the first insulating layer 510 and the third insulating layer 530, and to electrically contact the second end of the light emitting element 350 and one end of the second insulating layer 520. The second contact electrode 362 may electrically contact Fig.16The second electrode 340 is exposed in the middle and electrically contacts the side surface of the second end of the light emitting element 350 that electrically contacts the second electrode 340.
[0196] In the patterning of the second insulating material layer 521 and the third insulating material layer 531, since the contact surface between the lower surface of the light emitting element 350 and the first insulating material layer 511 can maintain a smooth surface, the second contact electrode 362 can be smoothly disposed at the side surface of the second end of the light emitting element 350 with a portion of the upper surface of the first insulating material layer 511 without its material being broken. The second contact electrode 362 can contact one end of each of the patterned second insulating layer 520 and the third insulating layer 530.
[0197] The second contact electrode 362 may electrically contact a region of the second electrode 340 exposed through the second opening 510Pb, but may not overlap a region where the second electrode 340 electrically contacts the power wiring 161 through the fifth contact hole 319_2 . This has been described in detail above.
[0198] Finally, although not shown in the drawings, a passivation layer 550 may be formed (see, for example, Figure 3 ) to cover the components disposed on the insulating base layer 310, thereby completing Figure 3 A display device 10 is provided.
[0199] Hereinafter, a display device 10 according to other embodiments will be described. Figure 3 The differences between the display device 10 and the display device 10 are shown, and any redundant description will be omitted.
[0200] Fig.18 and Fig.19 is a schematic cross-sectional view of a display device according to another embodiment.
[0201] First, refer to Fig.18 In the display device 10_1, the barrier ribs 410_1 and 420_1 (eg, the first barrier rib 410_1 and the second barrier rib 420_1 disposed on the insulating base layer 310) may protrude from the insulating base layer 310, but may have the same Figure 3 Different curvatures. For example, the first barrier rib 410_1 and the second barrier rib 420_1 may be substantially semicircular or semi-elliptical.
[0202] exist Fig.18In the display device 10_1 of the embodiment, since the outer surfaces of the first barrier ribs 410_1 and the second barrier ribs 420_1 are curved, the components disposed thereon (e.g., the first insulating layer 510_1, the first electrode 330_1, and the second electrode 340_1) may be stacked in a curved shape. The above components may be disposed on the first barrier ribs 410_1 and the second barrier ribs 420_1 to have a curvature in a region overlapping the first barrier ribs 410_1 and the second barrier ribs 420_1.
[0203] Reference Fig.19 , in the display device 10_2, the first insulating layer 510_2 may also be disposed on the horizontal upper surfaces of the first barrier ribs 410 and the second barrier ribs 420 of the first electrode 330_2 and the second electrode 340_2, and the first contact electrode 361_2 and the second contact electrode 362_2 may electrically contact the first electrode 330_2 and the second electrode 340_2 only on the flat upper surfaces of the first barrier ribs 410 and the second barrier ribs 420. For example, in Fig.19 In the display device 10_2, the opening 510P_2 (such as Fig. 20 ) and Figure 3 The opening can be relatively narrow compared to the.
[0204] Therefore, portions of the first and second non-overlapping regions where the lower surface of the light emitting element 350 does not overlap the first insulating layer 510_2 may be located on the first and second electrodes 330_2 and 340_2 overlapping the flat upper surfaces of the first and second barrier ribs 410 and 420 .
[0205] As described above, the width of the opening 510P may be adjusted according to the extent of electrical signals transmitted from the first electrode 330 and the second electrode 340 to the first contact electrode 361 and the second contact electrode 362, respectively, the type of material of each electrode, etc. The width of the opening 510P may be adjusted by controlling the extent to which the first insulating material layer 511 is patterned.
[0206] Fig. 20 It shows the manufacturing Fig.19 A cross-sectional view of a portion of a method of displaying an apparatus.
[0207] Reference Fig. 20 , when Fig.19 During the manufacture of the display device 10_2, when the first insulating material layer 511_2 is partially patterned to expose a portion of the upper surface of the first electrode 330 or the second electrode 340, Fig.12 and Fig.16Unlike the first barrier rib 410, the first insulating material layer 511_2 may be patterned so that a portion of the first barrier rib 410 and the second barrier rib 420 also exists on the upper surface. Therefore, the opening 510P_2 may be provided only on the flat upper surface of the first barrier rib 410 and the second barrier rib 420, and the first contact electrode 361_2 and the second contact electrode 362_2 (see Fig.19 ) may electrically contact the first electrode 330 and the second electrode 340 only on the flat upper surfaces of the first barrier rib 410 and the second barrier rib 420. Fig. 20 Only the first electrode 330 is exposed in the figure, but it is obvious that the same may be applied to the second electrode 340, so the second electrode 340 will not be described here.
[0208] As described above, the third insulating layer 530 of the display device 10 may be omitted. Therefore, the first contact electrode 361 and the second contact electrode 362 may also be disposed on substantially the same layer.
[0209] Fig.21 is a cross-sectional view of a display device according to another embodiment.
[0210] Reference Fig.21 , in the display device 10_3, the third insulating layer 530 may be omitted, and the first contact electrode 361_3 and the second contact electrode 362_3 may be spaced apart from each other on the second insulating layer 520_3 and may be located on substantially the same plane. The passivation layer 550_3 may be disposed in a space between the first contact electrode 361_3 and the second contact electrode 362_3 to electrically insulate the first contact electrode 361_3 and the second contact electrode 362_3 from each other. The second insulating material layer 521 may be patterned together to simultaneously expose portions of the first insulating material layer 511 overlapping the first electrode 330 and the second electrode 340. Fig.21 Display device 10_3.
[0211] Figure 22 to Figure 24 It shows the manufacturing Fig.21 A schematic cross-sectional view of a portion of a method of displaying an apparatus.
[0212] Reference Fig. 22 ,exist Figure 8 In the second substrate layer 700, the second insulating material layer 521 is patterned to expose the portion of the first insulating material layer 511_3 on the first electrode 330 and the second electrode 340. As described above, when the second insulating material layer 521 is patterned, the first insulating material layer 511_3 may not be etched or damaged, and the second insulating material layer 521 may form a second insulating layer 520_3.
[0213] Reference Fig.23 , the first insulating material layer 511_3 is patterned to partially expose the first electrode 330 and the second electrode 340, thereby forming a first opening 510Pa_3 and a second opening 510Pb_3. The first insulating material layer 511_3 may form a first insulating layer 510_3. The arrangement and shape of the first opening 510Pa_3 and the second opening 510Pb_3 are the same as those described above. Although Fig.23 In the embodiment, the first opening 510Pa_3 and the second opening 510Pb_3 are arranged to overlap with a portion of the inclined side surfaces and the flat upper surface of the first barrier rib 410 and the second barrier rib 420, but the present disclosure is not limited thereto. Fig. 20 In the embodiment, they may also be arranged only on the flat upper surfaces of the barrier ribs 410 and 420.
[0214] Reference Fig.24 , a first contact electrode 361_3 and a second contact electrode 362_3 are formed on the first electrode 330 and the second electrode 340 to contact the first electrode 330 and the second electrode 340 through the first opening 510Pa_3 and the second opening 510Pb_3. The first contact electrode 361_3 and the second contact electrode 362_3 may be spaced apart from each other on substantially the same plane. Although not shown in the drawings, the first contact electrode 361_3 and the second contact electrode 362_3 may be covered by a passivation layer 550_3, and the passivation layer 550_3 also disposed in the space between the first contact electrode 361_3 and the second contact electrode 362_3 may electrically insulate the first contact electrode 361_3 and the second contact electrode 362_3 from each other.
[0215] exist Figure 3 In the display device 10 of FIG. 1 , in a region where the light emitting element 350 and the first insulating layer 510 contact each other, an air gap is not formed in the first insulating layer 510, and the first insulating layer 510 contacts the entire lower surface of the light emitting element 350. However, in some embodiments, some air gaps may be formed in a region where the first insulating layer 510 contacts the lower surface of the light emitting element 350, and may be filled with the second insulating layer 520. For example, the second insulating layer 520 may be provided to cover the outer surface of the light emitting element 350, but at least a portion of the second insulating layer 520 may contact the first insulating layer 510 and the light emitting element 350 at the lower surface of the light emitting element 350.
[0216] Fig.25 is a schematic cross-sectional view of a display device according to another embodiment.
[0217] Reference Fig.25, in the display device 10_4, a portion of a region in which the light emitting element 350 and the first insulating layer 510_4 contact each other may include the same material as that of the second insulating layer 520_4.
[0218] Of the contact surfaces between the lower surface of the light emitting element 350 and the first insulating layer 510_4, the contact surface of the same material as the material of the second insulating layer 520_4 may contact the central portion of the light emitting element 350. As shown in the drawings, a portion of the first insulating layer 510_4 may be recessed downward, and the same material as the material of the second insulating layer 520_4 may be provided in the recessed region. Therefore, the lower surface of the light emitting element 350 may contact the first insulating layer 510_4 and the second insulating layer 520_4 at the same time.
[0219] for Fig.25 In the structure of the display device 10_4, a portion of the first insulating layer 510_4 may be recessed downward in the drawing, and during the manufacture of the display device 10_4, both ends of the light emitting element 350 may be placed to contact both ends of the recessed portion. Here, a portion of the material of the second insulating layer 520_4 provided to cover the light emitting element 350 may fill the recessed portion. Therefore, the lower surface of the light emitting element 350 may contact the first insulating layer 510_4 and the second insulating layer 520_4 at the same time.
[0220] Although not shown in the drawings, the recessed portion of the first insulating layer 510_4 may not necessarily be filled with the material of the second insulating layer 520_4. In some cases, only a portion of the recessed portion may be filled with the material of the second insulating layer 520_4, and the other portion may remain as an air gap. Even in this case, the lower surfaces of both ends of the light emitting element 350 may form a smooth contact surface with the first insulating layer 510_4. The contact surface between the lower surface of both ends of the light emitting element 350 and the first insulating layer 510_4 may extend horizontally toward the electrodes 330 and 340, respectively.
[0221] In summarizing the detailed description, it will be appreciated by those skilled in the art that many changes and modifications may be made to the preferred embodiments without departing substantially from the principles of the invention. Therefore, the disclosed preferred embodiments of the invention are used only in a general and descriptive sense, and not for the purpose of limitation.
Claims
1. A display device, comprising: a first electrode; a second electrode spaced apart from the first electrode to face the first electrode; a first insulating layer disposed on the first electrode and the second electrode to expose at least a portion of each of the first electrode and the second electrode, partially covering respective facing sides of the first electrode and the second electrode, and covering a space between the first electrode and the second electrode; at least one light emitting element, disposed on the first insulating layer between the first electrode and the second electrode; a second insulating layer disposed between the first electrode and the second electrode to cover at least a portion of the at least one light emitting element; a first contact electrode electrically contacting the first end of the at least one light emitting element and the first electrode; as well as a second contact electrode electrically contacting the second end of the at least one light emitting element and the second electrode, Wherein, the first insulating layer includes: an overlapping region, overlapping with the at least one light-emitting element; a first non-overlapping region, extending outward from the first end of the at least one light-emitting element and not overlapping with the at least one light-emitting element; and a second non-overlapping region, extending outward from the second end of the at least one light-emitting element and not overlapping with the at least one light-emitting element.
2. The display device according to claim 1, wherein: The first insulating layer partially covers the first electrode and the second electrode, and the first insulating layer includes: a first opening partially exposing the first electrode; and The second opening partially exposes the second electrode.
3. The display device according to claim 2, wherein: The material of the first insulating layer and the material of the second insulating layer have different etching selectivities.
4. The display device according to claim 3, wherein: The first insulating layer partially covers side surfaces of the first electrode and the second electrode that are opposite to the corresponding facing side surfaces.
5. The display device according to claim 2, wherein: The overlapping region of the first insulating layer is level with at least a portion of each of the first non-overlapping region and the second non-overlapping region.
6. The display device according to claim 5, wherein: The respective facing sides of the first electrode and the second electrode are inclined relative to a substrate disposed below the first electrode and the second electrode, At least a portion of the first non-overlapping region partially overlaps the inclined side surface of the first electrode, and At least a portion of the second non-overlapping region partially overlaps the inclined side surface of the second electrode.
7. The display device according to claim 6, wherein: The first non-overlapping region partially covers an upper surface of the first electrode, and The second non-overlapping region partially covers an upper surface of the second electrode.
8. The display device according to claim 2, wherein: At least one of the first opening and the second opening extends in a first direction along which the first electrode and the second electrode extend, and The first opening and the second opening are spaced apart from each other in a second direction different from the first direction.
9. The display device according to claim 8, wherein: Both ends of each of the first opening and the second opening in the first direction terminate at a position spaced inwardly from both ends of the first electrode or the second electrode in the first direction.
10. The display device according to claim 9, wherein: A width of the first opening and a width of the second opening measured in the second direction are respectively smaller than a width of the first electrode and a width of the second electrode measured in the second direction, and A distance between the respective facing side surfaces of the first electrode and the second electrode is smaller than a distance between the respective facing side surfaces of the first opening and the second opening.
11. The display device according to claim 10, wherein: A length between the first end and the second end of the at least one light emitting element is greater than the distance between the respective facing sides of the first electrode and the second electrode, and is less than the distance between the respective facing sides of the first opening and the second opening.
12. The display device according to claim 2, wherein: The first contact electrode electrically contacts the first electrode through the first opening, The second contact electrode electrically contacts the second electrode through the second opening, and At least a portion of each of the first contact electrode and the second contact electrode contacts the first insulating layer.
13. The display device according to claim 12, wherein: A side surface of the first end of the at least one light emitting element is electrically in contact with the first contact electrode, A side surface of the second end of the at least one light emitting element electrically contacts the second contact electrode, and A lower surface of the first end and a lower surface of the second end of the at least one light emitting element partially contact the overlapping region of the first insulating layer.
14. The display device according to claim 2, further comprising a third insulating layer, the third insulating layer being disposed on the first electrode, the first contact electrode and the second insulating layer to partially cover the first electrode, the first contact electrode and the second insulating layer, in, The second contact electrode contacts at least a portion of each of the third insulating layer, the second electrode, and the second insulating layer.
15. A method for manufacturing a display device, the method comprising the following steps: forming a first electrode and a second electrode facing the first electrode on a substrate; forming a first insulating layer on the first electrode and the second electrode and between the first electrode and the second electrode; forming a light emitting element on the first insulating layer; forming and patterning a second insulating layer to cover the light emitting element and a portion of the first insulating layer and to expose a first end of the light emitting element; forming a first opening to expose the first electrode by partially patterning a region where the first electrode and the first insulating layer overlap, the first insulating layer partially covering respective facing sides of the first electrode and the second electrode; as well as A first contact electrode is formed, the first contact electrode electrically contacting the exposed first end of the light emitting element and the first electrode exposed by the opening.
16. The method according to claim 15, wherein: The material of the first insulating layer and the material of the second insulating layer have different etching selectivities, and The step of patterning the second insulating layer includes avoiding patterning the first insulating layer.
17. The method according to claim 16, wherein: The step of forming the first opening includes forming the first opening to have a width smaller than a width of the first electrode.
18. The method according to claim 17, comprising the steps of: patterning the second insulating layer to expose a second end of the light emitting element opposite to the first end; forming a second opening to expose the second electrode by partially patterning a region where the second electrode and the first insulating layer overlap; as well as A second contact electrode is formed, the second contact electrode electrically contacting the exposed second end of the light emitting element and the second electrode exposed by the second opening.
19. The method according to claim 18, wherein: The step of forming the first insulating layer comprises: forming an overlapping region overlapping the light emitting element; forming a first non-overlapping region extending outward from the first end of the light emitting element and not overlapping the light emitting element; and A second non-overlapping region is formed, the second non-overlapping region extending outward from the second end of the light emitting element and not overlapping the light emitting element.
20. The method according to claim 19, wherein: The step of forming the overlapping region of the first insulating layer includes forming the overlapping region of the first insulating layer to be level with at least a portion of each of the first non-overlapping region and the second non-overlapping region.
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Display apparatus
CN112385045A