A device for drilling thin-walled deep holes of rotating silicon target

Abstract

A device for boring thin-walled deep holes in a rotating silicon target, the device includes a vertical frame of the equipment, a left ball screw guide set, a right ball screw guide set, three upper, middle and lower support plates, four sets of center automatic positioning and alignment devices, a boring and grinding tool and a variable frequency speed reduction motor, a flushing cooling water system, and an operating electronic control system. The vertical frame of the equipment is composed of a large base plate, two columns and several arc-shaped reinforcing rib plates, which are fixed by threaded connections. Among them, two sets of center automatic positioning and alignment devices are used as upper and lower clamping guide devices for the tool, which are respectively placed on the lower part of the upper support plate and the upper part of the middle drag plate. The tool is automatically positioned along the vertical center by moving three polyurethane rollers toward the center at the same time. The rollers rotate with the outer circle of the tool to reduce the rotation swing of the over-long tool and stabilize the amplitude. The present invention has a wide range of processing dimensions, with a hole diameter of Ф130-380mm and a maximum hole depth of 1600mm, which fully meets the various specifications and dimensions of rotating silicon targets.

Description

Technical Field

[0001] The invention belongs to the technical field of silicon target material machining, and in particular relates to a thin-wall deep hole boring machining device for a rotating silicon target material. Background Art

[0002] Sputtering target refers to the sputtering source that forms various functional thin films on the substrate through magnetron sputtering deposition of vacuum coating equipment. Silicon target is an important coating target source, mainly used in glass, flat display, solar photovoltaic, optical communication storage and other fields. With the rapid development of magnetron sputtering coating technology and the expansion of application fields, rotating silicon target (tubular target) has become the main target material for the production of high-definition display screens due to its sputtering coating utilization rate of more than 80%. The market demand is increasing day by day, especially the market prospect of an ultra-long rotating silicon target is broad.

[0003] There are two methods for producing rotating silicon targets in the prior art. One is to use high-purity silicon powder through plasma thermal spraying technology. It has low density (about 90%), high oxygen content (more than 4000ppm), and low sputtering rate, so it is gradually replaced by the second method; the second method is to use the single crystal furnace pulling method to make single crystal, multi-crystalline round rods or use the ingot furnace directional solidification method to make polycrystalline square ingot blanks, and then use cutting, grinding, polishing and other mechanical processing technologies to make silicon targets. This silicon target material is characterized by high density (≥99.9%), high purity (≥99.995%), and high sputtering rate. However, since single crystal and polycrystalline silicon materials have higher hardness and brittleness than carving materials (various glasses, crystals, jade, etc.), if inappropriate processing equipment and processes are used during mechanical cutting and grinding, it is very easy to produce edge collapse, corner collapse, cracks, etc., which seriously affects the product yield and production cost. Especially in the process of hollowing out and removing the core material of the rotating silicon target, the processing difficulty is higher, so that most silicon target processing companies have not been involved in the processing and production of this kind of rotating silicon target.

[0004] In order to meet the market demand for thin-walled deep hole boring machining of rotating silicon targets, it is urgent to solve the above problems. Summary of the invention

[0005] The purpose of the present invention is to provide a rotating silicon target thin-wall deep hole boring mechanical processing device to address the problems existing in the prior art of silicon target thin-wall deep hole boring mechanical processing to meet the processing needs of high-density, high-purity, and high-sputtering rate rotating silicon target to remove core materials. It can take into account the processing of various types of rotating silicon targets, effectively eliminate processing defects, have high production efficiency and high yield, and is conducive to mass production.

[0006] In order to achieve the above-mentioned purpose, the technical solution of the special device of the present invention is: a rotating silicon target thin-wall deep hole boring device, which includes an equipment vertical frame, a left ball screw guide set (driven by a stepper motor), a right ball screw guide set (driven by hand wheel rotation), three upper, middle and lower support plates, four sets of center automatic positioning and alignment devices, a boring and grinding tool and a variable frequency speed reduction motor, a flushing cooling water system, and an operating electronic control system.

[0007] The vertical frame of the equipment is composed of a large base plate, two columns and several arc-shaped reinforcing ribs, which are fixed by threaded connection. The two columns are rectangular square steel or H-shaped steel, placed vertically, parallel and symmetrically, and connected and fixed by arc-shaped reinforcing ribs at intervals from bottom to top to ensure the relative position relationship and structural strength of the two columns. The number of arc-shaped reinforcing ribs is determined according to the strength requirements of the columns.

[0008] The left and right ball screw guide sets are installed face to face and inverted on the inner side of the two columns. Each set of ball screw guides is equipped with two slides, one driven by the screw to move up and down, and the other driven by no screw and only sliding up and down freely on the linear guide. The upper pallet is connected to the screw-driven slide through one end of the angle plate, and the other end is connected to another linear guide free slide without a ball screw, which serves as the tool up and down feeding support plate. The ball screw is driven by the stepper motor to rotate and drive the upper pallet to move up and down; the middle pallet is also connected to the screw-driven slide through one end of the angle plate, and the other end is connected to another linear guide free slide without a ball screw, which serves as the clamping and locking support plate for adjusting different workpiece lengths. The ball screw is driven by the handwheel to rotate and drive the middle pallet to move up and down.

[0009] The hole-cutting and grinding tool is a cylindrical hollow thin-walled diamond deep-hole water drill head, which is customized according to the size of the rotating silicon target to be processed. The workpiece is a solid round rod blank that is ground by rough machining of the rotating silicon target.

[0010] The four sets of automatic center positioning and alignment devices, the first and second sets of automatic center positioning and alignment devices are used as upper and lower clamping and guiding devices for the tool, and are respectively placed on the lower part of the upper support plate and the upper part of the middle slide. The tool is automatically positioned along the vertical center by moving three polyurethane rollers toward the center at the same time. The rollers rotate with the outer circle of the tool to reduce the rotation swing of the over-long tool and stabilize the amplitude. The third and fourth sets of automatic center positioning and alignment devices are used as upper and lower position clamping and positioning devices for the workpiece, and are respectively placed on the lower part of the middle support plate and the lower slide. The outer circle of the workpiece is clamped by three polyurethane fixed wheels, and the workpiece is automatically aligned and positioned along the vertical center.

[0011] Each set of the center automatic positioning and alignment device is composed of 3 sets of positioning roller pairs, 3 sets of adjustment block groups, a center positioning disk, a locking disk, and a bolt locker. The positioning roller pair and the adjustment block group are fixedly connected by bolts, and the adjustment block group slides in three T-shaped grooves evenly distributed on the circumference of the center positioning disk. The locking disk is placed at the second step at the lower part of the center positioning disk circle. The locking disk is provided with three evenly distributed smooth arc grooves and a vertical center short strip hole. The tail column of the lower adjustment slider of the 3 sets of adjustment block groups and the screw hole sliding column column of the bolt locker pass through the center positioning disk and are placed in the smooth arc groove and the short strip hole respectively.

[0012] The automatic center positioning and alignment device clamps the tool or workpiece in two steps: the first step is to mesh and position the upper adjustment block of the three adjustment block groups with the serrations on the lower adjustment slide block, adjust them to a consistent telescopic size, and fasten them with bolts; three sets of positioning roller pairs are installed on the adjustment block group, and the installation position also has three equally spaced positions, which can be used as part of the adjustment of the telescopic amount. The inner diameter size surrounded by the three sets of positioning roller pairs is about 10mm larger than the outer diameter of the tool or workpiece. The second step is to rotate the long bolt of the bolt locker to make the screw hole slide column move linearly, and the screw hole slide column column drives the locking disk to rotate. The three arc grooves of the locking disk drive the three adjustment block groups to move toward the center at the same time in the T-slot of the center positioning disk, so that the three sets of positioning roller pairs move toward the center or in the opposite direction at the same time, so as to achieve the purpose of automatically aligning the center to clamp the outer circle of the tool or workpiece.

[0013] The sawtooth meshing adjustment telescopic amount of the adjustment block group is 0-60mm, the positioning roller pair is installed at three equally spaced positions of the adjustment block group to adjust the telescopic amount of 25 or 50mm, and the smooth arc groove on the locking disk has a locking amount of 0-28mm. The center automatic positioning and alignment device can clamp tool diameters ranging from 130 to 380mm and workpiece diameters ranging from 150 to 400mm.

[0014] The first and second sets of tool clamping center automatic positioning and alignment devices are placed at the lower part of the upper support plate and the upper part of the middle support plate. The roller pairs of the installed center automatic positioning and alignment devices are offset by 60 degrees, so that the tool enters the workpiece at the later stage of hole cutting. The three sets of roller pairs on the upper and lower sides can be inserted and overlapped in height to reduce the length of the customized tool. Due to the thin-walled nature of the tool, the longer the tool is, the easier it is to produce deflection and swing.

[0015] The tool variable frequency speed reduction motor drives the tool to rotate independently and is placed on the upper part of the upper pallet. The motor is a 4KW reduction motor, and the fixed reduction ratio is preferably 1:5 to meet the friction torque required due to the low rotation speed, and the tool can be rotated forward and reversely through the inverter operation control system, and the rotation speed can be adjusted according to the tool diameter and grinding feed amount.

[0016] The flushing cooling water system is composed of a water pump, a pressure gauge, a clean water tank, a recycling water tank, a pipeline, a water inlet rotary joint, an adjusting control valve, etc. Due to the high hardness and high brittleness of the silicon target substrate, and the need to ensure the integrity of the rotating tubular target material and the integrity of the core after hole removal, uninterrupted liquid flushing is required during the processing process to cool the tool and flush away the grinding powder. The coolant is preferably clean water. The flushing water flows into the tool cavity through the rotary joint, passes through the inner wall of the diamond grinding tool to reach the head tooth gap, and then flows out from the outer wall of the tool in the opposite direction. The flushing water must have a certain water pressure to ensure that the ground powder is taken away in time, so as to achieve the purpose of continuous grinding of the tool without stopping the tool and suffocating the tool. Since the length of deep hole drilling and hole grinding is more than 800mm, it can be guaranteed that the total length of the forward and reverse drilling and grinding can reach the size requirement of 1600mm. Due to the long length of the drilling and hole grinding, the flow rate and water pressure requirements are large enough. After experimental verification, the preferred flow rate is ≥1m 3 / h, water pressure ≥0.4MPa.

[0017] The device of the present invention has the following significant effects:

[0018] 1) The processing size range is wide, the hole diameter is 130-380mm, and the maximum hole depth is 1600mm, which fully meets the various specifications and sizes of rotating silicon targets;

[0019] 2) The workpiece positioning speed is fast, the ball screw guide drives the middle support plate to adjust different heights, and the upper and lower center automatic positioning and alignment devices are aligned at the vertical center;

[0020] 3) The tool rotates smoothly (the upper and lower paths are guided by the tool rotation), the speed and feed rate are CNC-adjustable, effectively eliminating processing defects such as edge collapse, corner collapse, and cracks;

[0021] 4) The utilization rate of target silicon material is high, the core is completely taken out, and it can be used as other types of target materials according to the size. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0023] Figure 2 It is a schematic diagram of the hollowing grinding tool structure;

[0024] Figure 3 It is a schematic diagram of the three-dimensional structure of four sets of center automatic positioning and alignment devices 6a, 6b, 6c and 6d;

[0025] Figure 4 for Figure 3 Back view of the structure;

[0026] Figure 5 It is a schematic diagram of the positioning roller pair structure;

[0027] Figure 6 for Figure 5 A three-dimensional view of the structure;

[0028] Figure 7 To adjust the block group structure diagram;

[0029] Figure 8 A three-dimensional diagram of the parts of the adjustment block assembly 201;

[0030] Fig. 9 A three-dimensional diagram of the parts of the adjustment block assembly 202;

[0031] Fig.10 It is a three-dimensional diagram of the structure of the adjustment block assembly 203 parts and the tail column 203A;

[0032] Fig.11 This is a schematic diagram of the structure of the center positioning disk;

[0033] Fig.12 It is a schematic diagram of the locking disc structure;

[0034] Fig.13 It is a schematic diagram of the bolt locker structure;

[0035] Fig.14 It is a forward stereogram of the bolt locker structure;

[0036] Fig.15 It is a reverse stereoscopic view of the bolt locker structure.

[0037] Figure 1-Figure 15 Middle: 1- equipment vertical frame, 1A- basic base plate, 1B- column, 1C- arc-shaped reinforcing rib plate, 2- left ball screw guide set, 2A- left ball screw guide, 2B- stepper motor, 3- tool speed regulation rotation reduction motor, 4- flushing cooling water inlet rotary joint, 5- upper support plate, 6a, 6b, 6c, 6d - 4 sets of center automatic positioning and alignment devices, 7- hole grinding tool, 8- right ball screw guide and handwheel rotation drive, 9- middle support plate, 10- right ball screw guide set, 10A- right ball screw guide, 10B- handwheel, 11- lower support plate, 100- positioning roller pair, 101- polyurethane roller, 102- bearing or ring sleeve, 103- clamping sleeve, 104-upper plate, 105-shaft, 106-pressure ring, 107-side plate, 108-base, 200-adjustment block group, 201-upper adjustment block, 202-T-type slider, 203-lower adjustment slider, 203A-tail column, 30-center positioning plate, 30A-first step circle, 30B-second step circle, 30C-T-slot, 30D-countersunk bolt hole, 30E-long waist hole, 30F-short slot,

[0038] 40-locking plate, 40A-smooth arc groove, 40B-vertical center short strip hole, 500-bolt locker, 501-long bolt, 502-left cover, 503-screw hole sliding column, 503A-short column, 504-sliding groove, 505-right cover, 501-long bolt, 502-left cover, 503-screw hole sliding column, 503A-short column, 504-sliding groove, 505-right cover. DETAILED DESCRIPTION

[0039] The specific implementation modes of the present invention are described in conjunction with the accompanying drawings.

[0040] like Figure 1-Figure 15 As shown, a device for boring thin-walled deep holes of a rotating silicon target material adopts a vertical processing method, including: a vertical equipment frame 1; a left ball screw guide rail set 2, driven by a stepper motor; a tool speed regulating rotary reduction motor 3; a flushing cooling water inlet rotary joint 4; an upper support plate 5; 4 sets of center automatic positioning and alignment devices 6a, 6b, 6c, 6d; a boring and grinding tool 7; a middle support plate 8; a rotating silicon target material workpiece 9; a right ball screw guide rail set 10, driven by a hand wheel rotation; and a lower support plate 11. In addition, the device also includes a flushing cooling water system and an operating electronic control system.

[0041] The equipment vertical frame 1 is composed of a large base plate 1A, two symmetrical columns 1B and five arc-shaped reinforcing ribs 1C, which are connected and fixed by bolts. The columns 1B are made of rectangular square steel and have four planes and a bottom plane processed to ensure the vertical and parallel relative position relationship of the equipment installation.

[0042] The left and right ball screw guide sets are installed face to face and upside down on the inside of two columns. Each set of ball screw guides has two slides, one is a screw driven slide, and the other is a linear guide free slide. The upper support plate 5 is connected to the drive slide of the left ball screw guide set 2 through one end of the angle plate, and the other end is connected to the free slide of the right ball screw guide set 10; the left ball screw is driven by the stepper motor 2B to rotate and drive the upper support plate 5 to move up and down, forming the tool CNC up and down feeding function; the middle support plate 8 is also connected to the drive slide of the right ball screw guide set 10 through one end of the angle plate, and one end is connected to the free slide of the left ball screw guide set 2. The right ball screw is driven by the handwheel 10B to rotate and drive the middle support plate 8 to move up and down, meeting the loading and unloading, clamping, locking and adjustment functions of workpieces of different lengths.

[0043] The left ball screw guide rail set 2 has a total length of 2.8 meters, and the effective stroke of the ball screw is greater than 1.6 meters; the right ball screw guide rail set 10 has a total length of 2.8 meters, and the effective stroke of the ball screw is greater than 1.2 meters.

[0044] There are four sets of automatic center positioning and alignment devices 6a, 6b, 6c, and 6d, each of which consists of three sets of positioning roller pairs 100, three sets of adjustment block groups 200, a center positioning disk 30, a locking disk 40, and a bolt locker 500. The two sets of automatic center positioning and alignment devices 6a and 6b are used as tool upper and lower clamping and guiding devices, and are respectively placed at the lower part of the upper support plate 5 and the upper part of the middle carriage 8 to stably control the tool amplitude; the two sets of automatic center positioning and alignment devices 6c and 6d are used as workpiece vertical upper and lower position clamping and positioning devices, and the bearings 102 of the positioning roller pairs 100 are changed into ring sleeves (i.e., non-rotatable fixed wheels), and these two sets are respectively placed at the lower part of the middle support plate 8 and the lower carriage 11. The four sets of automatic center positioning and alignment devices are all positioned by the first step circle 30A of the center positioning disk 30 parts and the inner circle or annular groove of each support plate center (lower support plate 11), and are fixedly connected to each support plate through six countersunk bolt holes 30D using hexagon socket head bolt standard parts.

[0045] The three groups of positioning roller pairs 100 of the center automatic positioning and alignment device are respectively fixedly connected with the three groups of adjustment block groups 200 by bolts (three positions, each with a spacing of 25mm); the three groups of adjustment block groups 200 slide in three T-shaped slots 30C evenly distributed on the circumference of the center positioning plate 30; the locking plate 40 is placed at the second step circle 30B at the lower part of the center positioning plate 30; the locking plate 40 is provided with three evenly distributed smooth arc grooves 40A and a vertical center short strip hole 40B. The lower adjustment slider 203 and tail column 203A of the three groups of adjustment block groups 200 pass through the short slot 30F of the center positioning plate 30 and are placed in the smooth arc groove 40A; the screw hole slide column 503 of the bolt locker 500 passes through the long waist-shaped hole 30E of the center positioning plate 30, so that the short column 503A is placed in the vertical center short strip hole 40B.

[0046] When the center automatic positioning and alignment device clamps the tool or workpiece, the sawtooth meshing size adjustment on the upper adjustment block 201 of the three adjustment block groups 200 and the lower adjustment slide block 203 is adjusted in advance, and the three positioning roller pairs 100 are installed with the screw hole positions of the adjustment block group 200 to complete the preliminary adjustment of the expansion and contraction amount, so that the inner diameter size surrounded by the three positioning roller pairs 100 is larger than the outer diameter of the tool or workpiece by about 10mm; then the long bolt 501 of the bolt locker 500 is rotated to make the screw hole slide column 503 move linearly, and the short column 503A drives the locking plate 40 to rotate, and the three smooth arc grooves 40A of the locking plate pass through the tail column 203A, driving the three adjustment block groups 200 to move toward the center at the same time in the T-slot 30C of the center positioning plate 30, so that the three positioning roller pairs clamp the outer circle of the tool or workpiece at the same time, so as to achieve the purpose of automatic center alignment and clamping. When the automatic center positioning and alignment device needs to loosen the tool or the workpiece, the long bolt 501 of the bolt locker 500 is rotated in the reverse direction.

[0047] The lower support plate 11 can be slidably connected to the base large bottom plate by rollers or linear guides and fixed in place by positioning blocks and bolts, so that the workpiece can be moved forward and pulled out in the shutdown state, which is convenient for clamping and disassembling the workpiece.

[0048] The tool speed regulating rotation reduction motor 3 drives the tool to rotate independently and is placed on the upper support plate 5. The motor is a 3.7KW reduction motor with a reduction ratio of 1:5. The tool can be rotated forward and reversely through the inverter operation control system, and the rotation speed can be adjusted from 0 to 288 rpm.

[0049] The flushing cooling water system consists of a water pump, a pressure gauge, a clean water tank, a recycling water tank, a pipeline, a water inlet rotary joint, and an adjusting control valve. The flushing cooling water inlet rotary joint 4 is placed between the hole-cutting grinding tool 7 and the speed-regulating rotary reduction motor 3. It adopts an upper and lower bearing and a double-pass skeleton oil seal structure so that the joint jacket does not rotate but the shaft rotates, and the flushing cooling water enters the tool cavity through the hollow rotating shaft. Pump selection Rated flow 1m 3 / h, rated head 46 meters.

[0050] The present invention discloses a mechanical processing device for thin-walled deep holes of a rotating silicon target. According to actual processing verification, when the hole diameter is 130-200mm, the tool rotation is controlled at 200-260 rpm, and the feed rate can reach 10-20mm / min; when the hole diameter is 200-380mm, the tool rotation is controlled at 150-200 rpm, and the feed rate can reach 5-10mm / min. The tool rotates smoothly and feeds stably. The accuracy of the hole feed diameter and the exit diameter is within the error range of 0.15mm. The coaxiality accuracy of the inner hole and the outer circle of the machined workpiece is within the range of 0.3mm. The workpiece and the removed core rod are intact and crack-free, which fully meets the processing needs of rotating silicon targets of various specifications and sizes. The processing device has the characteristics of convenient and fast positioning and clamping, high machining dimensional accuracy, high production efficiency, and high yield rate.

Claims

1. A device for drilling thin-walled deep holes in a rotating silicon target, characterized in that: The device includes a vertical equipment frame, a left ball screw guide set driven by a stepper motor, a right ball screw guide set driven by hand wheel rotation, three upper, middle and lower support plates, and four sets of center automatic positioning and alignment devices. Each set of the center automatic positioning and alignment devices consists of three groups of positioning roller pairs, three groups of adjustment block groups and center positioning disks, locking disks, and bolt lockers. The positioning roller pairs and the adjustment block groups are fixedly connected by bolts. The adjustment block group slides in three T-shaped grooves evenly distributed on the circumference of the center positioning disk. The locking disk is placed at the second step at the lower part of the center positioning disk. Three evenly distributed T-shaped grooves are arranged on the locking disk. The evenly distributed smooth arc groove body and a vertical center short strip hole, the lower adjustment slider tail column of the three adjustment block groups and the screw hole slide column body of the bolt locker are respectively placed in the smooth arc groove body and the short strip hole through the center positioning plate; the first and second sets of center automatic positioning and alignment devices are used as upper and lower clamping guide devices for the tool, which are respectively placed at the lower part of the upper support plate and the upper part of the middle drag plate. The tool is automatically positioned along the vertical center through the simultaneous movement of three polyurethane rollers to the center. The rollers rotate with the outer circle of the tool to reduce the rotation swing of the super-long tool and stabilize the amplitude; the third and fourth sets of center automatic positioning and alignment devices are used as upper and lower clamping and guiding devices for the tool. The alignment device is used as a clamping and positioning device for the upper and lower positions of the workpiece, which is placed on the lower part of the middle support plate and the lower drag plate respectively. The outer circle of the workpiece is also clamped by three polyurethane fixed wheels, and the workpiece is automatically aligned and positioned along the vertical center; hole-cutting and grinding tools and variable frequency speed reduction motors, flushing cooling water systems, and operating electronic control systems; the vertical frame of the equipment is composed of a large basic base plate, two columns and several arc-shaped reinforcing rib plates, which are fixed by threaded connections; the left and right ball screw guide sets are installed face to face and upside down on the inner sides of the two columns, and each set of ball screw guides is equipped with two slides, one by a thread The rod rotates to drive it to move up and down, and a screwless drive only relies on the linear guide to slide freely up and down; the upper pallet is connected to the screw-driven slide through one end of the angle plate, and the other end is connected to another linear guide free slide without a ball screw, as a tool up and down feed support pallet, and the ball screw is driven by a stepper motor to rotate and drive the upper pallet to move up and down; the middle pallet is also connected to the screw-driven slide through one end of the angle plate, and the other end is connected to another linear guide free slide without a ball screw, as a workpiece length adjustment clamping and locking support pallet, the handwheel rotates to drive the ball screw to rotate and drive the middle pallet to move up and down.

2. The device for drilling thin-walled deep holes of a rotating silicon target according to claim 1, characterized in that: The center automatic positioning and alignment device clamps the tool or workpiece in two steps: the first step is to engage and position the upper adjustment block of the three adjustment block groups with the serrations on the lower adjustment slide block, adjust them to a consistent telescopic size, and fasten them with bolts; three groups of positioning roller pairs are installed on the adjustment block group, and the installation position also has three equally spaced positions, which can be used as part of the adjustment telescopic amount. The inner diameter size surrounded by the three groups of positioning roller pairs is about 10mm larger than the outer diameter of the tool or workpiece; the second step is to rotate the long bolt of the bolt locker to make the screw hole slide column move linearly, and the screw hole slide column column drives the locking disk to rotate. The three arc grooves of the locking disk drive the three adjustment block groups to move toward the center at the same time in the T-slot of the center positioning disk, so that the three groups of positioning roller pairs move toward the center or in the opposite direction at the same time, so as to achieve the purpose of automatically aligning the center to clamp the outer circle of the tool or workpiece.

3. The device for drilling thin-walled deep holes of a rotating silicon target according to claim 1, characterized in that: The sawtooth meshing adjustment telescopic amount of the adjusting block group is 0-60mm, the positioning roller pair is installed at three equally spaced positions of the adjusting block group to adjust the telescopic amount of 25 or 50mm, and the locking amount of the smooth arc groove on the locking disk is 0-28mm, which meets the center automatic positioning and alignment device to clamp the tool diameter range of Ф130-380mm and the workpiece diameter range of Ф150-400mm.

4. The device for drilling thin-walled deep holes of a rotating silicon target according to claim 1, characterized in that: The first and second sets of automatic center positioning and alignment devices are placed at the lower part of the upper pallet and the upper part of the middle pallet. The roller pairs of the installed automatic center positioning and alignment devices are offset by 60°, so that the tool can enter the workpiece in the later stage of hole digging. The upper and lower three sets of roller pairs can be inserted and overlapped in height to reduce the length of the customized tool.

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