A wafer automatic transmission device with a multi-axis linkage robot

Abstract

The present invention discloses an automatic wafer transmission device with a multi-axis linkage manipulator, comprising a frame; a manipulator transmission mechanism and a bellows transmission mechanism fixedly installed in the frame; a manipulator mechanism connected to the manipulator transmission mechanism; The mechanical mobile phone The structure forms a multi-axis linkage through the linkage of several manipulator transmission components Robotic arm, The manipulator mechanism is provided with a clamping mechanism; the bellows mechanism is transmission-connected to the bellows transmission mechanism, and the bellows mechanism is movably mounted on the frame. The present invention provides XY-axis motion through multi-axis linkage of the manipulator mechanism, and up and down Z-axis motion through the manipulator transmission mechanism. This allows wafers to be loaded to corresponding positions on different processing machines, effectively resolving the issue of single-stage loading equipment being incompatible with different processing machines. This avoids the need to configure customized loading equipment of different styles, which can lead to a sharp increase in enterprise costs, and has the advantage of strong applicability.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer processing devices, and in particular to an automatic wafer transmission device with a multi-axis linkage manipulator. Background Art

[0002] A wafer is a silicon wafer used in the production of silicon semiconductor integrated circuits. The starting material is silicon, and because of its round shape, it's called a wafer. Silica ore is refined in an electric arc furnace, chlorinated with hydrochloric acid, and distilled to produce high-purity polycrystalline silicon, with a purity of up to 99.9999999999%. Wafer fabrication plants then melt this polycrystalline silicon, add a small silicon seed crystal to the solution, and slowly pull it out to form a cylindrical single-crystal silicon ingot. Because the silicon ingot gradually grows from a small grain of molten silicon, this process is called "crystal growth." The silicon ingot is then ground, polished, and sliced ​​to become the basic raw material for integrated circuit factories—silicon wafers, or "wafers." Simply put, single-crystal silicon wafers are drawn and refined from ordinary silica sand. A series of steps, including dissolution, purification, and distillation, produce single-crystal silicon ingots. These ingots are then polished and sliced ​​to become wafers. The wafer undergoes multiple mask processing, each of which includes photosensitive agent application, exposure, development, etching, infiltration or cooking, etc., to produce IC wafers with multiple layers of circuits and components. It is then handed over to the back-end testing, cutting and packaging factories to make physical integrated circuit products.

[0003] During the wafer production process, wafers are highly susceptible to environmental contamination, ranging from tiny particles tens of nanometers to hundreds of microns in size. These particles can accumulate on the wafer surface, substandard air purity, and chemical reagents used during processing. These particles can block light during photolithography, causing defects in the integrated circuit structure. Contaminants can also adhere to the wafer surface, resulting in incomplete patterns and directly impacting the chip's electrical characteristics. Therefore, SMIF (Standard Mechanical Interface) isolation technology is often used to ensure cleanliness during automated wafer loading and unloading, while maintaining relatively low environmental requirements.

[0004] For example, Chinese invention patent publication number CN101459100B discloses a compact wafer automatic transmission device, which includes a frame, a loading platform, a bellows body and an arm mechanism. The lifting and extension motors of the arm mechanism are not on the same plane. The lower arm is connected to the grasping mechanism through a translation mechanism and a flipping mechanism, and the gear connecting rod transmission mechanism is used to drive the grasping mechanism to rotate around the axis. The grasping motor of the grasping mechanism drives the clamping claw to move back and forth, and the positioning mechanism on the grasping mechanism is provided with an adjustable positioning block.

[0005] For example, Chinese invention patent publication number CN101459101B discloses a flip-type automatic wafer transmission device, which includes a frame, a loading platform, a bellows body and an arm mechanism. The lower arm of the arm mechanism is connected to the grasping mechanism through a flip mechanism. The fixed plate of the grasping mechanism is hinged on the flip base through a flip axis. The grasping motor of the grasping mechanism drives the grasping connecting rod through a turbine worm gear to drive the clamping claw to move back and forth along the grasping slide rail. The positioning mechanism on the grasping mechanism is provided with an adjustable positioning block.

[0006] For example, Chinese invention patent publication number CN101465308B discloses a rotary wafer automatic transmission device, which includes a frame, a loading platform, a bellows body and an arm mechanism. The gripping mechanism of the arm mechanism rotates around the axis using a transmission mechanism composed of large and small pulleys assembled in the lower arm fixed seat. The gripping motor arranged in the gripping mechanism drives the gripping connecting rod through a worm gear to drive the clamping claw to move back and forth along the gripping slide rail. The positioning mechanism on the gripping mechanism is provided with an adjustable positioning block.

[0007] For example, Chinese invention patent publication number CN101465309 discloses a translation and flipping type automatic wafer transmission device, which includes a frame, a loading platform, a bellows body and an arm mechanism. The lower arm of the arm mechanism is connected to the grasping mechanism through an assembled translation mechanism and a flipping mechanism, and the grasping mechanism is driven to rotate around the axis by an assembled gear connecting rod transmission mechanism. The grasping motor of the grasping mechanism drives the clamping claw to move back and forth, and the positioning mechanism on the grasping mechanism is provided with an adjustable positioning block.

[0008] However, in actual use, it was found that the technical solutions in the above-mentioned comparative documents all had defects. For example, the technical solution in comparative document one can only complete the automatic horizontal or vertical transmission of wafers within a limited travel space, and realize the left and right translation and flipping of the wafer box; for example, the technical solution in comparative document three can only realize the arbitrary rotation and 180-degree reverse placement of the wafer box while completing the automatic transmission of the wafer.

[0009] In the above technical solution, the robot's movement range is small, resulting in a single loading device being incompatible with different processing models. For each processing model, different styles of customized loading equipment need to be configured, which leads to a sharp increase in corporate costs. Therefore, it is necessary to improve the above problems. Summary of the Invention

[0010] The purpose of the present invention is to provide an automatic wafer transfer device with a multi-axis linkage robot, which has the advantage of strong applicability and solves the problems raised in the above background technology.

[0011] To achieve the above object, the present invention provides the following technical solution: an automatic wafer transfer device with a multi-axis linkage robot, comprising a frame; a robot transmission mechanism and a bellows transmission mechanism fixedly mounted in the frame; a robot mechanism connected to the robot transmission mechanism; The manipulator mechanism is linked to form a multi-axis linkage through several manipulator transmission components. Move the robot, The manipulator mechanism is provided with a clamping mechanism; a bellows mechanism is transmission-connected to the bellows transmission mechanism, and the bellows mechanism is movably mounted on the frame.

[0012] Preferably, the manipulator mechanism includes a first manipulator, a second manipulator, a third manipulator and a fourth manipulator, and the first manipulator, the second manipulator and the third manipulator are each provided with a manipulator transmission assembly, the first manipulator is fixedly installed at the output end of the manipulator transmission mechanism, the first manipulator is connected to the second manipulator through the manipulator transmission assembly, the second manipulator is connected to the third manipulator through the manipulator transmission assembly, the third manipulator is connected to the fourth manipulator through the manipulator transmission assembly, and the clamping mechanism is fixedly installed in the fourth manipulator.

[0013] Preferably, the manipulator transmission assembly includes a manipulator transmission motor, a manipulator worm and a manipulator worm wheel. The output shaft of the manipulator transmission motor is connected to the manipulator worm, the manipulator worm is connected to the manipulator worm wheel, and the manipulator worm wheel is fixedly connected to the second manipulator, the third manipulator and the fourth manipulator respectively.

[0014] Preferably, the clamping mechanism includes a clamping motor, a clamping worm, a clamping worm wheel, a clamping connecting rod and a claw. The clamping motor is fixedly installed in the fourth manipulator, and the output shaft of the clamping motor is transmission-connected to the clamping worm, the clamping worm is transmission-connected to the clamping worm wheel, the clamping connecting rod is movably installed on the clamping worm wheel, and the other end of the clamping connecting rod is fixedly connected to the claw, and the claw passes through the fourth manipulator and extends to the outside.

[0015] Preferably, the manipulator transmission mechanism is fixedly mounted on the upper end of the frame, and the manipulator transmission mechanism includes a lifting assembly and a rotating assembly, the lifting assembly includes a manipulator lifting motor, a manipulator transmission belt, a manipulator lifting screw and a manipulator lifting guide rail, the manipulator lifting motor is connected to the manipulator lifting screw through the manipulator transmission belt, the rotating assembly includes a rotating spindle, a steering motor and a reduction gearbox, the rotating spindle is movably mounted on the manipulator lifting guide rail, the output shaft of the steering motor is connected to the reduction gearbox, the output shaft of the reduction gearbox is fixedly connected to the rotating spindle, and the manipulator mechanism is fixedly mounted on the lower end of the rotating spindle.

[0016] Preferably, the bellows transmission mechanism is fixedly mounted at the lower end of the frame, and the bellows transmission mechanism includes a bellows transmission motor, a bellows transmission screw and a bellows transmission guide rail, the output shaft of the bellows transmission motor is transmission-connected to the bellows transmission screw, the bellows transmission screw is transmission-connected to the bellows mechanism, and the bellows mechanism is movably mounted on the bellows transmission guide rail.

[0017] Preferably, the bellows mechanism includes a bellows body and a workbench, the bellows body is a box body with openings on both sides, and an FFU and two box opening components are provided on the bellows body, the FFU is fixedly mounted on the lower end face of the bellows body, the box opening component is fixedly mounted on the upper end face of the bellows body, the two box opening components are respectively located on both sides of the opening of the upper end face of the bellows body, the workbench is fixedly mounted on the frame, and the workbench matches the shape of the opening of the upper end face of the bellows body, and an unlocking component is provided in the workbench.

[0018] Preferably, the box opening assembly includes a box opening motor, a rack and a gear shift block, the box opening motor is transmission connected to the rack, and the rack is transmission connected to the gear shift block.

[0019] Preferably, the unlocking assembly includes an unlocking motor, an unlocking transmission belt, an unlocking screw, an unlocking connecting rod and an unlocking shift block. The output shaft of the unlocking motor is connected to the unlocking screw through the unlocking transmission belt. A transmission block is provided on the unlocking screw. The transmission block is movably connected to the unlocking screw, and the transmission block is movably connected to one end of the unlocking connecting rod. The other end of the unlocking connecting rod is movably connected to the unlocking shift block. The unlocking shift block is movably installed in the workbench, and two shift posts are provided on the unlocking shift block. Both of the shift posts extend through the workbench to the outside.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] The present invention provides a manipulator mechanism comprising a first manipulator, a second manipulator, a third manipulator, and a fourth manipulator. Each of the first, second, and third manipulators is provided with a manipulator transmission assembly. The first manipulator is connected to the second manipulator via the manipulator transmission assembly, the second manipulator is connected to the third manipulator via the manipulator transmission assembly, and the third manipulator is connected to the fourth manipulator via the manipulator transmission assembly. The clamping mechanism is fixedly mounted in the fourth manipulator.

[0022] During operation, the robot mechanism's first manipulator, driven by the manipulator transmission mechanism, raises and lowers the first manipulator, rotating it within a range of 180 degrees to 180 degrees. The manipulator transmission assembly on the first manipulator then controls the rotation of the second manipulator within a range of 180 degrees to 180 degrees. Similarly, subsequent manipulators are driven by the manipulator transmission assembly on the preceding manipulator to achieve various angular movements. The fourth manipulator, equipped with a clamping mechanism, grasps the wafer. This effectively solves the problem of inconsistent wafer loading positions across different processing machines, enabling a single machine for multiple uses and achieving high adaptability. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is one of the structural diagrams of the present invention;

[0024] Figure 2 This is the second structural diagram of the present invention;

[0025] Figure 3 This is the third structural diagram of the present invention;

[0026] Figure 4 This is the fourth structural diagram of the present invention;

[0027] Figure 5 This is one of the structural diagrams of the present invention when the wind box body is raised;

[0028] Figure 6 This is the second structural diagram of the present invention when the wind box body is raised;

[0029] Figure 7 This is the third structural diagram of the present invention when the wind box is raised;

[0030] Figure 8 This is the fourth structural diagram of the present invention when the wind box body is raised;

[0031] Figure 9 It is a structural schematic diagram of the wind box body in the present invention;

[0032] Figure 10 Schematic diagram of the structure of the workbench in the present invention;

[0033] Figure 11 This is one of the structural diagrams of the manipulator in the present invention;

[0034] Figure 12 This is the second structural diagram of the manipulator in the present invention;

[0035] Figure 13 Schematic diagram of the structure of the clamping assembly in the present invention.

[0036] The reference numerals and names in the figures are as follows:

[0037] 1. Frame; 2. Manipulator transmission mechanism; 21. Lifting assembly; 211. Manipulator lifting motor; 212. Manipulator transmission belt; 213. Manipulator lifting screw; 214. Manipulator lifting guide rail; 22. Rotating assembly; 221. Rotating spindle; 222. Steering motor; 223. Reduction gearbox; 3. Bellows transmission mechanism; 31. Bellows transmission motor; 32. Bellows transmission screw; 33. Bellows transmission guide rail; 4. Manipulator mechanism; 41. First manipulator; 42. Second manipulator; 43. Third manipulator; 44. Fourth manipulator; 45. Manipulator transmission assembly; 451. Mechanical Hand transmission motor; 452, manipulator worm; 453, manipulator worm wheel; 46, clamping mechanism; 461, clamping motor; 462, clamping worm; 463, clamping worm wheel; 464, clamping connecting rod; 465, claw; 5, bellows mechanism; 51, bellows body; 52, FFU; 53, box opening assembly; 531, box opening motor; 532, rack; 533, gear shift block; 54, workbench; 55, unlocking assembly; 551, unlocking motor; 552, unlocking transmission belt; 553, unlocking screw; 554, transmission block; 555, unlocking connecting rod; 556, unlocking shift block; 557, shift column. DETAILED DESCRIPTION

[0038] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0039] See also Figures 1 to 13 The present invention provides an embodiment of a wafer automatic transport device with a multi-axis linkage robot, comprising a frame 1; a robot transmission mechanism 2 and a bellows transmission mechanism 3 fixedly mounted in the frame 1; a robot mechanism 4 connected to the robot transmission mechanism 2. The manipulator mechanism is linked by several manipulator transmission components 45 Into a multi-axis linkage robot, The manipulator mechanism 4 is provided with a clamping mechanism 46 ; a bellows mechanism 5 which is transmission-connected to the bellows transmission mechanism 3 , and the bellows mechanism 5 is movably mounted on the frame 1 .

[0040] More specifically, the manipulator mechanism 4 includes a first manipulator 41, a second manipulator 42, a third manipulator 43 and a fourth manipulator 44. The first manipulator 41, the second manipulator 42 and the third manipulator 43 are each provided with a manipulator transmission assembly 45. The first manipulator 41 is fixedly installed at the output end of the manipulator transmission mechanism 2. The first manipulator 41 is connected to the second manipulator 42 through the manipulator transmission assembly 45. The second manipulator 42 is connected to the third manipulator 43 through the manipulator transmission assembly 45. The third manipulator 43 is connected to the fourth manipulator 44 through the manipulator transmission assembly 45. The clamping mechanism 46 is fixedly installed in the fourth manipulator 44.

[0041] More specifically, the manipulator transmission assembly 45 includes a manipulator transmission motor 451, a manipulator worm 452 and a manipulator worm wheel 453. The output shaft of the manipulator transmission motor 451 is transmission-connected to the manipulator worm 452, the manipulator worm 452 is transmission-connected to the manipulator worm wheel 453, and the manipulator worm wheel 453 is fixedly connected to the second manipulator 42, the third manipulator 43 and the fourth manipulator 44 respectively.

[0042] More specifically, the clamping mechanism 46 includes a clamping motor 461, a clamping worm 462, a clamping worm wheel 463, a clamping link 464 and a claw 465. The clamping motor 461 is fixedly installed in the fourth manipulator 44, and the output shaft of the clamping motor 461 is transmission-connected to the clamping worm 462, the clamping worm 462 is transmission-connected to the clamping worm wheel 463, the clamping link 464 is movably installed on the clamping worm wheel 463, and the other end of the clamping link 464 is fixedly connected to the claw 465, and the claw 465 passes through the fourth manipulator 44 and extends to the outside.

[0043] More specifically, the manipulator transmission mechanism 2 is fixedly mounted on the upper end of the frame 1, and the manipulator transmission mechanism 2 includes a lifting assembly 21 and a rotating assembly 22. The lifting assembly 21 includes a manipulator lifting motor 211, a manipulator transmission belt 212, a manipulator lifting screw 213 and a manipulator lifting guide rail 214. The manipulator lifting motor 211 is transmission-connected to the manipulator lifting screw 213 through the manipulator transmission belt 212. The rotating assembly 22 includes a rotating spindle 221, a steering motor 222 and a reduction gear box 223. The rotating spindle 221 is movably mounted on the manipulator lifting guide rail 214. The output shaft of the steering motor 222 is transmission-connected to the reduction gear box 223. The output shaft of the reduction gear box 223 is fixedly connected to the rotating spindle 221. The manipulator mechanism 4 is fixedly mounted on the lower end of the rotating spindle 221.

[0044] More specifically, the bellows transmission mechanism 3 is fixedly mounted at the lower end of the frame 1, and the bellows transmission mechanism 3 includes a bellows transmission motor 31, a bellows transmission screw 32 and a bellows transmission guide rail 33. The output shaft of the bellows transmission motor 31 is transmission-connected to the bellows transmission screw 32, and the bellows transmission screw 32 is transmission-connected to the bellows mechanism 5. The bellows mechanism 5 is movably mounted on the bellows transmission guide rail 33.

[0045] More specifically, the bellows mechanism 5 includes a bellows body 51 and a workbench 54. The bellows body 51 is a box with openings on both sides, and an FFU52 and two box opening components 53 are provided on the bellows body 51. The FFU52 is fixedly mounted on the lower end surface of the bellows body 51, and the box opening component 53 is fixedly mounted on the upper end surface of the bellows body 51. The two box opening components 53 are respectively located on both sides of the opening of the upper end surface of the bellows body 51. The workbench 54 is fixedly mounted on the frame 1, and the workbench 54 matches the shape of the opening of the upper end surface of the bellows body 51. An unlocking component 55 is provided in the workbench 54.

[0046] More specifically, the box opening assembly 53 includes a box opening motor 531 , a rack 532 and a gear shift block 533 . The box opening motor 531 is in transmission connection with the rack 532 , and the rack 532 is in transmission connection with the gear shift block 533 .

[0047] More specifically, the unlocking assembly 55 includes an unlocking motor 551, an unlocking transmission belt 552, an unlocking screw rod 553, an unlocking connecting rod 555 and an unlocking shift block 556. The output shaft of the unlocking motor 551 is transmission-connected to the unlocking screw rod 553 via the unlocking transmission belt 552. The unlocking screw rod 553 is provided with a transmission block 554. The transmission block 554 is movably connected to the unlocking screw rod 553, and the transmission block 554 is movably connected to one end of the unlocking connecting rod 555. The other end of the unlocking connecting rod 555 is movably connected to the unlocking shift block 556. The unlocking shift block 556 is movably installed in the workbench 54, and two shift posts 557 are provided on the unlocking shift block 556. Both of the shift posts 557 extend to the outside through the workbench 54.

[0048] Working principle:

[0049] First, place the wafer box on the workbench 54, and the pre-positioning groove on the wafer box matches the workbench 54. After matching, the sensor senses that there is a product on the workbench 54. At this time, the bellows body 51 rises, and the gear shift block 533 on the bellows body 51 closes and is stuck in the reserved groove on the upper cover of the wafer box. When the bellows body 51 rises, the upper cover of the wafer box is also driven to rise, and the wafer box is automatically opened. At the same time, the clean air in the bellows body 51 comes into contact with the wafer. The air is relatively still in the bellows body 51, and it is not easy to convect and cause small external particles to affect the cleanliness of the wafer. At the same time, the FFU (fan filter unit) 52 under the bellows body 51 continues to work to keep the inside of the bellows body 51 clean.

[0050] After the bellows body 51 rises, the manipulator mechanism 4 begins to move. At this point, the wafer has been unpacked and can be taken out by the manipulator mechanism 4. The manipulator mechanism 4 is driven by the manipulator lifting motor 211 through the manipulator transmission belt 212 to drive the manipulator lifting screw 213 to rotate, thereby driving the first manipulator 41 to rise and fall. The steering motor 222 is decelerated through the reduction gearbox 223 and drives the first manipulator to rotate axially, with a rotation range of positive 180 degrees to negative 180 degrees. The first manipulator 41 is equipped with a manipulator transmission motor 451, a manipulator worm 452, and a manipulator worm wheel 453. The manipulator transmission motor 451 drives the manipulator worm 452 and manipulator worm wheel 453 to control the rotation of the second manipulator, with a rotation range of positive 180 degrees to negative 180 degrees. Similarly, subsequent manipulators are driven to rotate by the manipulator transmission motor 451 on the previous manipulator in conjunction with the manipulator worm 452 and manipulator worm wheel 453 to achieve various angles of movement.

[0051] The fourth manipulator 44 is equipped with a clamping mechanism, which drives the clamping worm 462 and the clamping worm wheel 463 to rotate through the clamping motor 461, and then controls the opening and closing of the clamping claw 465 through the clamping link 464 to grab the wafer.

[0052] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above and that the invention can be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the invention is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be included therein. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

Claims

1. An automatic wafer transfer device with a multi-axis linkage robot, characterized in that: include Rack (1); A manipulator transmission mechanism (2) and a bellows transmission mechanism (3) fixedly mounted in the frame (1); A manipulator mechanism (4) is connected to the manipulator transmission mechanism (2), wherein the manipulator mechanism comprises a first manipulator (41), a second manipulator (42), a third manipulator (43) and a fourth manipulator (44), wherein each of the first manipulator (41), the second manipulator (42) and the third manipulator (43) is provided with a manipulator transmission assembly (45). The manipulator transmission assembly (45) includes a manipulator transmission motor (451), a manipulator worm (452) and a manipulator worm wheel (453), wherein the output shaft of the manipulator transmission motor (451) is transmission-connected to the manipulator worm (452), the manipulator worm (452) is transmission-connected to the manipulator worm wheel (453), and the manipulator worm wheel (453) is fixedly connected to the second manipulator (42), the third manipulator (43) and the fourth manipulator (44), respectively, to control each manipulator to rotate around an axis from positive 180 degrees to negative 180 degrees; A clamping mechanism (46) is provided on the fourth manipulator (44), the clamping mechanism comprising a clamping motor (461), a clamping worm (462), a clamping worm wheel (463), a clamping connecting rod (464) and a clamping claw (465), wherein the clamping motor (461) drives the clamping worm wheel (463) to rotate via the clamping worm (462), thereby driving the clamping connecting rod (464) to control the opening and closing of the clamping claw (465); A bellows mechanism (5) connected to the bellows transmission mechanism (3) in a transmission manner, the bellows mechanism (5) comprising a bellows body (51) and an unlocking assembly (55) arranged in a workbench (54), the unlocking assembly (55) comprising an unlocking motor (551), an unlocking transmission belt (552), an unlocking screw (553) and an unlocking shifting block (556) linked to the unlocking screw, the unlocking shifting block (556) being provided with two shifting posts (557) for unlocking the wafer box; The bellows body (51) is a box body with openings on both sides, and an FFU (52) and two box opening assemblies (53) are provided on the bellows body (51), wherein the FFU (52) is fixedly mounted on the lower end face of the bellows body (51), and the box opening assembly (53) is fixedly mounted on the upper end face of the bellows body (51), and the two box opening assemblies (53) are respectively located on both sides of the opening of the upper end face of the bellows body (51).

2. The wafer automatic transport device with a multi-axis linkage robot according to claim 1, characterized in that: The first manipulator (41) is fixedly mounted on the output end of the manipulator transmission mechanism (2); the first manipulator (41) is connected to the second manipulator (42) through a manipulator transmission assembly (45); the second manipulator (42) is connected to the third manipulator (43) through a manipulator transmission assembly (45); the third manipulator (43) is connected to the fourth manipulator (44) through a manipulator transmission assembly (45); and the clamping mechanism (46) is fixedly mounted in the fourth manipulator (44).

3. The wafer automatic transport device with a multi-axis linkage robot according to any one of claims 1 to 2, characterized in that: The clamping motor (461) is fixedly installed in the fourth manipulator (44), and the output shaft of the clamping motor (461) is transmission-connected to the clamping worm (462), the clamping worm (462) is transmission-connected to the clamping worm wheel (463), the clamping connecting rod (464) is movably installed on the clamping worm wheel (463), and the other end of the clamping connecting rod (464) is fixedly connected to the clamping claw (465).

4. The wafer automatic transport device with a multi-axis linkage robot according to any one of claims 1 to 2, characterized in that: The manipulator transmission mechanism (2) is fixedly mounted on the upper end of the frame (1), and the manipulator transmission mechanism (2) includes a lifting assembly (21) and a rotating assembly (22), the lifting assembly (21) includes a manipulator lifting motor (211), a manipulator transmission belt (212), a manipulator lifting screw (213) and a manipulator lifting guide rail (214), the manipulator lifting motor (211) is connected to the manipulator lifting screw (213) through the manipulator transmission belt (212), the rotating assembly (22) includes a rotating spindle (221), a steering motor (222) and a reduction gear box (223), the rotating spindle (221) is movably mounted on the manipulator lifting guide rail (214), the output shaft of the steering motor (222) is connected to the reduction gear box (223), the output shaft of the reduction gear box (223) is fixedly connected to the rotating spindle (221), and the manipulator mechanism (4) is fixedly mounted on the lower end of the rotating spindle (221).

5. The wafer automatic transport device with a multi-axis linkage robot according to claim 1, characterized in that: The bellows transmission mechanism (3) is fixedly mounted on the lower end of the frame (1), and comprises a bellows transmission motor (31), a bellows transmission screw (32), and a bellows transmission guide rail (33). The output shaft of the bellows transmission motor (31) is transmission-connected to the bellows transmission screw (32), the bellows transmission screw (32) is transmission-connected to the bellows mechanism (5), and the bellows mechanism (5) is movably mounted on the bellows transmission guide rail (33).

6. The wafer automatic transport device with a multi-axis linkage robot according to any one of claims 1 and 5, characterized in that: The bellows body (51) is a box body with openings on both sides, and an FFU (52) and two box opening assemblies (53) are provided on the bellows body (51), wherein the FFU (52) is fixedly mounted on the lower end face of the bellows body (51), and the box opening assembly (53) is fixedly mounted on the upper end face of the bellows body (51), and the two box opening assemblies (53) are respectively located on both sides of the opening of the upper end face of the bellows body (51), and the workbench (54) is fixedly mounted on the frame (1), and the workbench (54) matches the shape of the opening of the upper end face of the bellows body (51).

7. The wafer automatic transport device with a multi-axis linkage robot according to claim 6, characterized in that: The box opening assembly (53) comprises a box opening motor (531), a rack (532) and a gear shift block (533); the box opening motor (531) is in transmission connection with the rack (532); and the rack (532) is in transmission connection with the gear shift block (533).

8. The wafer automatic transport device with a multi-axis linkage robot according to claim 6, characterized in that: The output shaft of the unlocking motor (551) is connected to the unlocking screw rod (553) through an unlocking transmission belt (552). The unlocking screw rod (553) is provided with a transmission block (554). The transmission block (554) is movably connected to the unlocking screw rod (553). The transmission block (554) is movably connected to one end of the unlocking connecting rod (555). The other end of the unlocking connecting rod (555) is movably connected to the unlocking shift block (556). The unlocking shift block (556) is movably installed in the workbench (54). The two shifting posts (557) both pass through the workbench (54) and extend to the outside.

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